CN113380596B - Low kinetic energy pulse ion source based on photoionization - Google Patents
Low kinetic energy pulse ion source based on photoionization Download PDFInfo
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- CN113380596B CN113380596B CN202110631064.1A CN202110631064A CN113380596B CN 113380596 B CN113380596 B CN 113380596B CN 202110631064 A CN202110631064 A CN 202110631064A CN 113380596 B CN113380596 B CN 113380596B
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- 150000002500 ions Chemical class 0.000 claims abstract description 140
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 56
- 238000006243 chemical reaction Methods 0.000 claims abstract description 25
- 238000003384 imaging method Methods 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 6
- 238000011160 research Methods 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 3
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- 238000002474 experimental method Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001561 resonance enhanced multiphoton ionisation spectroscopy Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
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- 238000005040 ion trap Methods 0.000 description 1
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- 238000000329 molecular dynamics simulation Methods 0.000 description 1
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- H—ELECTRICITY
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- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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Abstract
The invention belongs to the technical field of ion-molecule cross beam scattering, and relates to a low-kinetic energy pulse ion source based on photoionization, which comprises the following components: the ion accelerating lens group, the deflection electrode group, the first focusing electrode group, the second focusing electrode group and the ion decelerating component; the ion accelerating lens group is used for generating and accelerating ions and carrying out preliminary focusing on the ion beam; the deflection electrode group is used for correcting the space position and the speed direction of the ion beam subjected to preliminary focusing; a first focusing electrode group for performing secondary focusing on the modified ion beam; a second focusing electrode group for focusing the ion beam for the third time so that the ion beam focus falls at the center of the reaction zone; and the ion deceleration assembly is used for decelerating the ion beam subjected to the third focusing and optimizing the focusing state of the ion beam in cooperation with the first focusing electrode group and the second focusing electrode group. The multi-stage focusing mode is adopted to ensure that the ions maintain a good focusing state under the condition that the kinetic energy of the ions is reduced to be very low.
Description
Technical Field
The invention relates to a low-kinetic-energy pulse ion source based on photoionization, belongs to the technical field of ion-molecule cross beam scattering, and particularly relates to the technical field of low-kinetic-energy pulse ion sources.
Background
Molecular reaction kinetics is the discipline of studying molecular dynamic structure, reaction process, reaction rate and reaction mechanism in chemical reactions at the atomic and molecular level, and involves both internal movement of molecules and collisions between molecules. The micro-dynamics mechanism of a reaction system is clear from the molecular level, and is the key for understanding the macro-dynamics behavior of the whole system. The collision reaction and energy transfer process between ions and molecules are widely applied to complex gas phase environments such as planet atmosphere, interplanetary space, plasma, combustion process and the like, and research on the collision dynamics process between ions and molecules has important scientific significance for understanding the chemical properties and evolution process of the complex gas phase environments. At the same time, the kinetics of collisions between ions and molecules is also one of the important directions of gas phase molecular reaction kinetics research, which has been a history of more than a century. Not only does these studies greatly deepen understanding of the ion-molecule collision mechanism, but also greatly motivates the development of a variety of advanced instrumentation.
The experimental methods for researching ion-molecule reaction mainly include ion selection-flow tube technology, directed ion beam technology, ion trap technology, and cross-beam technology. The first three techniques focus on the measurement of the total reaction rate and the branching ratio of the product channels, but the information of the quantum state, differential scattering cross section and the like of the reaction products is difficult to accurately measure. In recent years, with the development of ion velocity imaging technology, cross-beam technology based on ion velocity imaging plays an increasingly important role in the field of ion-molecule reaction kinetics. The method not only can obtain the channel branching ratio of the reaction product, but also can obtain the quantum state distribution of the product and the differential scattering cross section information thereof, thereby further obtaining the detailed kinetic information of the reaction.
A pulsed ion source system that is continuously tunable in the lower kinetic energy range (< 5 eV), has a small kinetic energy spread, and is well focused in time and space is the most important component of ion-molecule cross-beam devices. For an ion velocity imaging system with good focusing capability, a sufficiently small reaction volume is critical to obtaining high resolution ion velocity imaging spectra. As ions are charged, coulomb repulsion makes the ions prone to large spatial and kinetic energy broadening during flight. A large reaction volume is formed when the ion beam enters the reaction zone and collides with the neutral molecular beam, which is an important factor for limiting the resolution of product velocity measurement in ion-molecular cross-beam experiments. Meanwhile, the greater kinetic energy broadening brings uncertainty to the analysis of the energy state of the reaction product and the explanation of the reaction mechanism. Therefore, an ion source system that is well focused in space and has a small kinetic energy spread is essential for intensive research of ion-molecule reaction mechanisms.
At present, a plurality of task groups at home and abroad are developing and using a cross molecular beam device based on a three-dimensional ion velocity imaging technology, which is used for researching the collision dynamics process between ions and molecules, such as a Wester professor task group of Innsbruck university of Austria and a Tian Shanxi professor task group of Chinese science and technology university. Both the western teaching and the Tian Shanxi teaching that the ion sources designed for the subject group generate reactant ions by means of electron bombardment, the ions generated by this method are not quantum-selective, and can bring great uncertainty to the explanation of the reaction mechanism.
Disclosure of Invention
In view of the above problems, it is an object of the present invention to provide a low kinetic energy pulsed ion source based on photoionization, which employs a multi-stage focusing manner to ensure that ions maintain a good focusing state even when the kinetic energy is reduced to a low level.
In order to achieve the above purpose, the present invention adopts the following technical scheme: a photoionization-based low kinetic energy pulsed ion source comprising: the ion accelerating lens group, the deflection electrode group, the first focusing electrode group, the second focusing electrode group and the ion decelerating component; the ion accelerating lens group is used for generating and accelerating ions and carrying out preliminary focusing on the ion beam; the deflection electrode group is used for correcting the space position and the speed direction of the ion beam subjected to preliminary focusing; a first focusing electrode group for performing secondary focusing on the modified ion beam; a second focusing electrode group for focusing the ion beam for the third time so that the ion beam focus falls at the center of the reaction zone; and the ion deceleration assembly is used for decelerating the ion beam subjected to the third focusing and optimizing the focusing state of the ion beam in cooperation with the first focusing electrode group and the second focusing electrode group.
Further, the ion accelerating lens component comprises a first group of ion lenses and a second group of ion lenses, the first ion lens group and the second ion lens group comprise a plurality of polar plates which are arranged in parallel, and the first ion lens group is used for ionizing the collimated molecular beam so as to generate and accelerate ions; the second ion lens group is used for primarily focusing the ion beam.
Further, the pulse voltage applied to the plate which is first contacted with the molecular beam in the first group of ion lenses is larger than the pulse voltage applied to the other plates.
Further, the polar plates in the first group of ion lenses are all stuck with metal grid meshes.
Further, the deflection electrode group is composed of two groups of upper and lower deflection electrode groups and two groups of left and right deflection electrode groups, and voltages applied by the electrode groups with the same direction are the same.
Further, the first focusing electrode group includes at least three electrode tubes, and the first electrode tube and the third electrode tube are inserted into the second electrode tube from both ends of the second electrode tube.
Further, the second focusing electrode group comprises at least three electrode tubes, each electrode tube being nested on the previous electrode tube.
Further, the ion deceleration assembly comprises a deceleration electrode, a shielding sleeve and a plurality of front polar plates of the ion imaging electrode group, wherein the plurality of front polar plates of the ion imaging electrode group are arranged in the shielding sleeve and used for adjusting the kinetic energy of the ions after deceleration.
Further, the shielding sleeve evenly distributes round holes for the ion beam and the molecular beam to pass through.
Further, the center of the polar plate is provided with small holes, and the aperture of the small holes is 8mm-12mm.
Due to the adoption of the technical scheme, the invention has the following advantages:
1. the invention adopts a multi-stage focusing mode, and ensures that ions still maintain a good focusing state under the condition of extremely low kinetic energy.
2. The invention adopts a mode of accelerating before decelerating, and applies higher pulse voltage on the first polar plate of the ion accelerating lens group, so that ions fly out of an ionization region at higher speed, space broadening of the ions along the flying direction is compressed as much as possible, and the ions can still keep a better focusing state after decelerating through a deceleration region through the cooperation of other focusing components. Meanwhile, the use of the pulse field can reduce the phenomenon of kinetic energy broadening caused by different initial positions of ions.
3. The space between the polar plate assemblies is as small as possible, and meanwhile, the interference of the external stray electric field on the ion flight is shielded to the greatest extent by using modes such as nested wrapping and the like.
4. The invention can generate ions in specific quantum states by adopting a photoionization method, which has important significance for carrying out ion-molecule reaction dynamics experimental research from quantum states to quantum states and obtaining differential scattering cross sections with quantum state resolution.
Drawings
FIG. 1 is a schematic diagram of a photoionization-based low kinetic energy pulsed ion source in accordance with an embodiment of the present invention;
FIG. 2 is a schematic diagram of a low kinetic energy pulsed ion source according to one embodiment of the present invention;
FIG. 3 is a schematic view of the structure of the X-Y plane of a pulsed ion source with low kinetic energy according to an embodiment of the present invention;
FIG. 4 is a schematic view of the structure of the Y-Z plane of a pulsed ion source with low kinetic energy according to an embodiment of the present invention;
FIG. 5 is an image of the ion velocity of an ion beam generated by ionization of Ar with a 314.5nm laser in accordance with one embodiment of the present invention;
FIG. 6 is a graph of the translational energy of an ion beam generated by ionization of Ar with a 314.5nm laser in an embodiment of the present invention.
Detailed Description
The present invention will be described in detail with reference to specific examples thereof in order to better understand the technical direction of the present invention by those skilled in the art. It should be understood, however, that the detailed description is presented only to provide a better understanding of the invention, and should not be taken to limit the invention. In the description of the present invention, it is to be understood that the terminology used is for the purpose of description only and is not to be interpreted as indicating or implying relative importance.
The invention discloses a low-kinetic energy pulse ion source based on photoionization, which comprises the steps of firstly generating an ion beam through an ion acceleration lens group, carrying out preliminary focusing on the ion beam, and then carrying out focusing on the ion beam through a first focusing electrode group and a second focusing electrode group, so as to ensure that the ion still keeps a good focusing state under the condition that the kinetic energy of the ion is reduced to be very low; and a higher pulse voltage is applied to a first polar plate (namely a polar plate contacted with the molecular beam firstly) of the ion acceleration lens group, so that ions fly out of an ionization region at a higher speed, the space of the ions along the flight direction is widened as much as possible, and the ions are ensured to still maintain a better focusing state after being decelerated by a deceleration region. The solution of the invention is described in detail below by means of two embodiments with reference to the accompanying drawings.
Example 1
The embodiment discloses a low kinetic energy pulse ion source based on photoionization, which comprises the following components as shown in fig. 1-4: an ion accelerating lens group, a deflection electrode group, a first focusing electrode group, a second focusing electrode group and an ion decelerating component.
The ion accelerating lens group is used for generating and accelerating ions and carrying out preliminary focusing on the ion beam;
the deflection electrode group is used for correcting the space position and the speed direction of the ion beam subjected to preliminary focusing;
a first focusing electrode group for performing secondary focusing on the modified ion beam;
a second focusing electrode group for focusing the ion beam for the third time so that the ion beam focus falls at the center of the reaction zone;
and the ion deceleration assembly is used for decelerating the ion beam subjected to the third focusing and optimizing the focusing state of the ion beam in cooperation with the first focusing electrode group and the second focusing electrode group.
Specifically, the ion accelerating lens group consists of a first group of ion lenses and a second group of ion lenses, wherein the first ion lens group and the second ion lens group respectively comprise a plurality of polar plates which are arranged in parallel, the polar plates are round metals with holes at the centers, the outer diameter of the polar plates is 65mm, the holes are 10mm, and the thickness is 0.9mm. In the present embodiment, the first ion lens group includes three polar plates denoted by reference numerals 1 to 3, wherein the distance between the first polar plate 1 and the second polar plate 2 is 15mm, and the distance between the second polar plate 2 and the third polar plate 3 is 10mm. The pressure difference between the first plate 1 and the second plate 2 needs to be large enough to accelerate the ions to a higher kinetic energy as fast as possible, so as to reduce the spatial broadening of the ion beam, i.e. the plate of the first group of ion lenses that first contacts the molecular beam applies a pulse voltage that is larger than the pulse voltages applied on the other plates. The first polar plate 1, the second polar plate 2 and the third polar plate 3 are all stuck with metal grids to form a uniform electric field, so that ions are uniformly accelerated, and the influence of electric field penetration and stray electric fields of other polar plates can be shielded. The second ion lens group comprises three polar plates with reference numbers of 4-6, the spacing between the three polar plates is 10mm, and the spacing between the fourth polar plate and the third polar plate is 10mm. The first ion lens group is used for ionizing the collimated molecular beam to generate an ion beam, the molecular beam is selectively ionized by laser at the centers of the first polar plate 1 and the second polar plate 2 after being collimated, and the ions are accelerated by the first polar plate 1 and the second polar plate 2 to be led out of an ionization region. The second ion lens group is used for carrying out preliminary focusing on the ion beam and preventing the ion from being excessively diverged before reaching the first focusing electrode group and the second focusing electrode group.
The deflection electrode group is composed of two upper and lower deflection electrode groups and two left and right deflection electrode groups, and the upper, lower, left and right deflection electrodes are respectively denoted by 7, 8, 9 and 10 in the drawings. The voltages applied to the electrode groups in the same direction are the same. Wherein the size of the deflection polar plate is 50mm×14nm×5mm (length×width×height); the deflection plates in the same group have a pitch of 10mm and the deflection electrodes in each group have a pitch of 2mm. The distance between the last polar plate 6 in the ion accelerating lens group and the first polar plate 7 in the deflection electrode group is 2mm, the distance between the last polar plate 10 in the deflection electrode group and the first electrode tube 11 in the first focusing electrode group is 2mm, and the distance between the polar plates is as small as possible so as to shield the interference of the external stray electric field on the ion flight track.
The first focusing electrode group comprises at least three electrode tubes 11-13, a first electrode tube 11 and a third electrode tube 13 being inserted into the second electrode tube 12 from both ends of the second electrode tube 12, in this embodiment both the first electrode tube 11 and the third electrode tube 13 extend into the second electrode tube 3mm. The length of the first electrode tube 11 is 40mm, the outer diameter of the tube is 12mm, and the inner diameter of the tube is 10mm; the length of the second electrode tube 12 is 26mm, the outer diameter of the tube is 16mm, and the inner diameter of the tube is 14mm; the length of the third electrode tube 13 is 40mm, the outer diameter of the tube is 12mm, and the inner diameter of the tube is 10mm; and the first electrode tube 11 and the third electrode tube 13 are maintained in a grounded state to shield interference of external stray electric fields, and the ion beam is secondarily focused by applying a voltage to the second electrode tube 12.
The second focusing electrode group comprises at least three focusing electrodes 14-16, each focusing electrode is cylindrical, and two ends of the second focusing electrode are respectively inserted into the first focusing electrode and the third focusing electrode so as to shield interference of an external stray electric field on the ion flight track and play a role in focusing, so that the focus of the ion beam is located at the center of the reaction zone. The main cylinder of the first focusing electrode 14, which has a diameter of 39mm, a length of 18mm and a wall thickness of 2mm, is provided with a tube body as an ion beam inlet of the second focusing electrode group, which has an outer diameter of 16mm, an inner diameter of 14mm and a length of 10mm. The second focusing electrode 15 is 20mm long, 33mm in outer diameter and 30mm in inner diameter. The third focusing electrode has the same size as the first focusing electrode, and the main cylinder is also provided with a tube body which is used as an ion outlet of the second focusing electrode group.
The ion deceleration assembly comprises a deceleration electrode 17, a shielding sleeve 18 and the first three plates 19-21 of the ion imaging electrode set. The deceleration electrode 17 comprises a main cylinder body and an ion outlet pipe, wherein the main cylinder body has the size of 24mm of outer diameter, 20mm of inner diameter and 6mm of length. The ion outlet tube has an outer diameter of 10mm, an inner diameter of 8mm and a length of 12mm. The outlet tube of the third focusing electrode of the second focusing electrode group extends into the main cylinder of the deceleration electrode 17 by 4mm. The shielding sleeve 18 is 70mm long, 110mm in outer diameter and 1mm in wall thickness, and 8 circular holes with the diameter of 10mm are uniformly distributed on the cylinder body and are used for allowing ion beams and molecular beams to pass through. The ion outlet tube of the deceleration electrode 17 extends into the shielding sleeve 18 to enhance the shielding effect. The voltages of the deceleration electrode 17 and the shielding sleeve have an effect on the focusing of the ion beam, and the focusing state of the ion beam can be optimized in cooperation with the first focusing electrode group and the second focusing electrode group. The first three plates 19-21 of the ion imaging electrode set are arranged in parallel with each other in the shielding sleeve 18 for adjusting the kinetic energy of the decelerated ions.
In a preferred embodiment, the intervals of the polar plates are as small as possible, and meanwhile, the interference of external stray electric fields on ion flight is shielded to the greatest extent by using a nested wrapping mode and the like. In addition, the openings of the polar plates are as small as possible, the opening is basically controlled to be 10mm-12mm, the speed-reducing electrode is reduced to 8mm, and the main purpose is to enable the focused ion beam to reach the center of the reaction zone more accurately; meanwhile, the polar plate with small aperture can shield the ions with overlarge divergence degree, so as to further ensure the good focusing state of the ion beam.
Example two
To examine the overall performance of the ion source of the present invention, this example used Ar as the test object, ar was prepared by (3+1) resonance enhanced multiphoton ionization (REMPI) using 314.5nm laser + Ion beam, ar + The ions are decelerated to different kinetic energies, and the best focusing state which can be achieved under the different ion kinetic energies is explored. As shown in fig. 5 and 6, fig. 5 and 6 are respectively an ion velocity imaging diagram and a corresponding translational energy spectrum when the kinetic energy of the ion beam is 1.64 eV. It can be seen from the figure that the full width at half maximum of the kinetic energy of the ion beam is only 150meV at this time, and the focusing effect of the ion beam is comparable to that of the ion source in the prior art. This shows that the scheme of the invention can generate a pulse ion beam which is continuously adjustable in a lower kinetic energy range (1-3 eV), has small kinetic energy expansion and good focusing in time and space, and is used for ion-molecule cross beam scattering experimental research.
It should be specifically noted that all specific values appearing in the first embodiment and the second embodiment are merely examples for illustrating the technical solution of the present invention, and are not meant to be limiting, and the parameters herein can be adjusted according to the specific requirements of the experiment.
Finally, it should be noted that: the above embodiments are only for illustrating the technical aspects of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the above embodiments, it should be understood by those of ordinary skill in the art that: modifications and equivalents may be made to the specific embodiments of the invention without departing from the spirit and scope of the invention, which is intended to be covered by the claims. The foregoing is merely a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and the changes or substitutions should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be as defined in the claims.
Claims (9)
1. A photoionization-based low kinetic energy pulsed ion source comprising: the ion accelerating lens group, the deflection electrode group, the first focusing electrode group, the second focusing electrode group and the ion decelerating component;
the ion accelerating lens group is used for generating and accelerating ions and carrying out preliminary focusing on ion beams, the ion accelerating lens group comprises a first ion lens group and a second ion lens group, the first ion lens group and the second ion lens group respectively comprise a plurality of polar plates which are arranged in parallel, and the first ion lens group is used for ionizing the collimated molecular beams so as to generate and accelerate the ions; the second ion lens group is used for carrying out preliminary focusing on the ion beam; applying pulse voltage on a polar plate which is firstly contacted with the molecular beam in the first ion lens group, so that ions fly out of an ionization region at a high speed;
the deflection electrode group is used for correcting the space position and the speed direction of the ion beam subjected to preliminary focusing;
the first focusing electrode group is used for carrying out secondary focusing on the modified ion beam;
the second focusing electrode group is used for focusing the ion beam for the third time so that the focus of the ion beam falls at the center of the reaction zone;
the ion deceleration assembly is used for decelerating the ion beam subjected to third focusing and optimizing the focusing state of the ion beam by matching the first focusing electrode group and the second focusing electrode group.
2. The photoionization-based low kinetic energy pulsed ion source of claim 1, wherein the plates of the first ion lens group that first contact the molecular beam apply a pulse voltage greater than the other plates.
3. The photoionization-based low kinetic energy pulsed ion source of claim 2, wherein the plates in the first ion lens group are each coated with a metal grid.
4. The photoionization-based low kinetic energy pulsed ion source of claim 1, wherein the deflection electrode sets are comprised of two sets of upper and lower deflection electrode sets and two sets of left and right deflection electrode sets, the pulse voltages applied by the electrode sets in the same direction being the same.
5. The photoionization-based low kinetic energy pulsed ion source of claim 1, wherein the first focusing electrode assembly comprises at least three electrode tubes, a first electrode tube and a third electrode tube being inserted into the second electrode tube from both ends thereof, the first electrode tube and the third electrode tube being held at ground to shield interference of external stray electric fields, and the ion beam being secondarily focused by applying a voltage to the second electrode tube.
6. The photoionization-based low kinetic energy pulsed ion source of claim 1, wherein the second focusing electrode group comprises at least three focusing electrodes, each of the focusing electrodes is cylindrical, two ends of the second focusing electrode are respectively inserted into the first focusing electrode and the third focusing electrode, a main cylinder of the first focusing electrode is provided with a tube body serving as an ion inlet of the second focusing electrode group, and a main cylinder of the third focusing electrode is provided with a tube body serving as an ion outlet of the second focusing electrode group.
7. The photoionization-based low kinetic energy pulsed ion source of claim 1, wherein the ion deceleration assembly comprises a deceleration electrode, a shielding sleeve, and a front plurality of plates of an ion imaging electrode set disposed in the shielding sleeve for adjusting the kinetic energy of the decelerated ions.
8. The photoionization-based low kinetic energy pulsed ion source of claim 7, wherein the shielding sleeve uniformly distributes circular holes for passage of the ion beam and the molecular beam.
9. The photoionization-based low kinetic energy pulsed ion source of any one of claims 1-8, wherein the center of the plates is provided with a small aperture having a pore diameter of 8-12mm.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02112134A (en) * | 1988-10-21 | 1990-04-24 | Nippon Telegr & Teleph Corp <Ntt> | Microwave ion gun |
| US4933551A (en) * | 1989-06-05 | 1990-06-12 | The United State Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Reversal electron attachment ionizer for detection of trace species |
| US5036252A (en) * | 1988-04-26 | 1991-07-30 | Hauzer Holding Bv | Radio frequency ion beam source |
| US6031326A (en) * | 1997-04-01 | 2000-02-29 | Hitachi, Ltd. | Electron gun with electrode supports |
| CN101361153A (en) * | 2005-12-02 | 2009-02-04 | 阿利斯公司 | Ion sources, systems and methods |
| CN107481915A (en) * | 2017-08-02 | 2017-12-15 | 金华职业技术学院 | A kind of method that photic separation is studied under low temperature |
| CN112366129A (en) * | 2020-12-09 | 2021-02-12 | 华东师范大学 | High-resolution time-of-flight mass spectrometer |
| CN112540117A (en) * | 2020-11-26 | 2021-03-23 | 厦门大学 | Gas phase in-situ mass spectrum detection device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112010004286B4 (en) * | 2009-11-06 | 2021-01-28 | Hitachi High-Tech Corporation | Charged particle microscope |
-
2021
- 2021-06-07 CN CN202110631064.1A patent/CN113380596B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5036252A (en) * | 1988-04-26 | 1991-07-30 | Hauzer Holding Bv | Radio frequency ion beam source |
| JPH02112134A (en) * | 1988-10-21 | 1990-04-24 | Nippon Telegr & Teleph Corp <Ntt> | Microwave ion gun |
| US4933551A (en) * | 1989-06-05 | 1990-06-12 | The United State Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Reversal electron attachment ionizer for detection of trace species |
| US6031326A (en) * | 1997-04-01 | 2000-02-29 | Hitachi, Ltd. | Electron gun with electrode supports |
| CN101361153A (en) * | 2005-12-02 | 2009-02-04 | 阿利斯公司 | Ion sources, systems and methods |
| CN107481915A (en) * | 2017-08-02 | 2017-12-15 | 金华职业技术学院 | A kind of method that photic separation is studied under low temperature |
| CN112540117A (en) * | 2020-11-26 | 2021-03-23 | 厦门大学 | Gas phase in-situ mass spectrum detection device |
| CN112366129A (en) * | 2020-12-09 | 2021-02-12 | 华东师范大学 | High-resolution time-of-flight mass spectrometer |
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