CN113371985A - Device and method for manufacturing laminated quartz heat insulation plate - Google Patents
Device and method for manufacturing laminated quartz heat insulation plate Download PDFInfo
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- CN113371985A CN113371985A CN202110806302.8A CN202110806302A CN113371985A CN 113371985 A CN113371985 A CN 113371985A CN 202110806302 A CN202110806302 A CN 202110806302A CN 113371985 A CN113371985 A CN 113371985A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 145
- 239000010453 quartz Substances 0.000 title claims abstract description 102
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 37
- 238000009413 insulation Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims abstract description 133
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- 238000003466 welding Methods 0.000 claims abstract description 14
- 238000010030 laminating Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 i.e. Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/203—Uniting glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
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Abstract
The invention discloses a device and a method for manufacturing a laminated quartz heat-insulating plate, which comprise a horizontal guide driving mechanism, a vertical guide driving mechanism, a burner and a control console, wherein the burner is connected to the horizontal guide driving mechanism; and the console is used for controlling the operation actions of the horizontal guide driving mechanism and the vertical guide driving mechanism and controlling the flame gas source of the burner. Laminating a plurality of quartz plates of different types or the same type to form a quartz plate laminated body, and fixing the quartz plate laminated body on a vertical guide driving mechanism; and then controlling the burner to move to the position aligned with the front and rear surfaces of the quartz plate laminate by the horizontal guide driving mechanism, sequentially heating the plurality of quartz plates by using the flame of the burner, and welding the plurality of quartz plates to each other to form the laminated quartz heat insulation plate.
Description
Technical Field
The invention relates to a device and a method for manufacturing a laminated quartz heat insulation plate, which are particularly suitable for producing and manufacturing quartz heat insulation plates required in the semiconductor and photovoltaic industries.
Background
Quartz glass is utilized for manufacturing various parts inside heat treatment equipment in the semiconductor and photovoltaic industries because of its high purity and high heat resistance. In order to make the heat treatment more efficient, opaque quartz glass capable of reflecting heat rays is used as a part of parts in heat treatment equipment in the semiconductor and photovoltaic industries. The opaque silica glass is produced by forming fine bubbles and particles inside the silica glass, and thus can reflect heat rays and perform a heat insulating action. In semiconductor manufacturing, a quartz glass material is a heat insulating material used for constituting a bell jar, a core tube of a diffusion furnace, a quartz boat, and the like, and is also a material used as a heat insulating susceptor in Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) processes. Semiconductor manufacturing processes involve chemical and physical processes that form microcircuits on silicon wafers by deposition and oxide etching. These manufacturing processes are mainly carried out at high temperatures, and contamination by foreign substances is directly related to yield in CVD and PVD processes, so that impurities cannot be infiltrated during the manufacturing process.
A heat insulating base is provided at the lower end of the process tube, which insulates the inside of the heating furnace from the outside and maintains the inside of the heating furnace at a fixed temperature. Inside the heat insulating base, a plurality of heat insulating products made of a quartz glass material, i.e., quartz heat insulating plates, and a plurality of pillars horizontally supporting the quartz glass products at predetermined intervals in a vertical direction are disposed. The quartz heat shield plate is mainly made of an opaque quartz glass material in which a large number of bubbles are mixed to suppress light transmittance. Such an opaque silica glass material contains a large number of bubbles mixed therein, and when used in a semiconductor heat treatment apparatus, the bubbles are broken, and the broken bubbles generate particles (i.e., silica powder), which adversely affect the quality of a semiconductor substrate.
In addition, in a cleaning step which is required in a semiconductor manufacturing process, the surface of the opaque silica glass material after cleaning becomes rougher in a state where bubbles are broken, more particles are generated, and a semiconductor substrate is adversely affected. Further impurities can enter the collapsed bubble causing a loss of purity. As a conventional technique for manufacturing a quartz heat insulating plate for preventing generation of particles from the surface of the opaque quartz glass material, there is a technique of manufacturing a quartz heat insulating plate by melting quartz powder or a transparent quartz glass material by heat such as electricity or hydrogen gas and welding the melted material to the surface of the opaque quartz glass material; however, any of the above-described manufacturing techniques requires labor, which is costly and time-consuming.
Disclosure of Invention
Aiming at the problems, the invention makes up the defects of the prior art and provides a device and a method for manufacturing a laminated quartz thermal baffle, which have simple structure and low cost; the invention can lead different types or the same type of quartz materials to be fully welded with each other, has excellent heat-insulating property, can eliminate the generation of particles on the surface of the opaque quartz glass material, and can flexibly change the thickness and the size of the laminated quartz heat-insulating plate through the stretching degree.
The invention relates to a device for manufacturing a laminated quartz heat-insulating plate, which is characterized in that: the device comprises a horizontal guide driving mechanism, a vertical guide driving mechanism, a burner and a control console, wherein the burner is connected to the horizontal guide driving mechanism; the control console is respectively connected with the horizontal guide driving mechanism, the vertical guide driving mechanism and the combustor and is used for controlling the operation actions of the horizontal guide driving mechanism and the vertical guide driving mechanism and the flame gas source of the combustor.
As a preferable aspect of the present invention, the vertical guide driving mechanism and the horizontal guide driving mechanism provided with the burner are disposed on the base platform together.
As another preferred scheme of the present invention, the horizontal guiding driving mechanism includes a horizontal driving motor, a horizontal mechanism frame, and a horizontal mechanism main body mounting plate disposed at the top inside the horizontal mechanism frame; two parallel horizontal guide rails are arranged on the horizontal mechanism main body mounting plate, and adapter plates are connected to the two horizontal guide rails in a sliding manner; lie in between two horizontal guide rails, the below of keysets is provided with horizontal lead screw, and horizontal lead screw's both ends are connected in horizontal mechanism main part mounting panel both ends, and horizontal lead screw one end links to each other with the horizontal drive motor power take off end of locating horizontal mechanism support body side, screw connection between horizontal lead screw and the keysets.
As another preferable scheme of the invention, horizontal slide way holes are symmetrically arranged on two sides of the upper part of the horizontal mechanism frame body, and a slide block which can be connected in a sliding manner along the horizontal slide way holes is arranged on the top surface of the horizontal mechanism frame body; the two sides of the bottom of the sliding block are fixedly connected with the two sides of the top of the adapter plate inside the horizontal mechanism frame body through horizontal sliding channel holes, and the sliding block is connected with a combustor.
Furthermore, the combustor is an oxyhydrogen combustor, the combustor is provided with two rows of flame nozzles, and the two rows of flame nozzles of the combustor are arranged oppositely.
As another preferable scheme of the present invention, the vertical guiding driving mechanism includes a first vertical driving motor, a second vertical driving motor, a vertical mechanism housing, and a vertical mechanism main body mounting plate disposed inside the vertical mechanism housing; parallel vertical guide rails are arranged on two sides of the vertical mechanism main body mounting plate, and a first moving connecting rod and a second moving connecting rod which are arranged up and down are connected on the two vertical guide rails in a sliding manner; the vertical mechanism main body mounting plate is also connected with a first vertical screw rod and a second vertical screw rod, the first vertical screw rod is in spiral connection with the first movable connecting rod, and the second vertical screw rod is in spiral connection with the second movable connecting rod; the upper end parts of the first vertical screw rod and the second vertical screw rod are respectively connected with the power output ends of a first vertical driving motor and a second vertical driving motor which are arranged at the top of the outer side of the vertical mechanism shell.
As another preferable scheme of the present invention, the vertical mechanism casing is symmetrically provided with vertical slide holes at both sides, the first and second clamping fixtures are connected to the first and second moving links inside the vertical mechanism casing through the vertical slide holes, and the first and second clamping fixtures are connected to the vertical slide holes in a vertically sliding manner.
Furthermore, the first clamping and fixing piece comprises a first fixing clamp and a first supporting rod, and the first fixing clamp is fixed above the front side of the first supporting rod; the second clamping and fixing piece comprises a second fixing clamp and a second supporting rod, and the second fixing clamp is fixed below the front side of the second supporting rod; the first fixing clamp and the second fixing clamp are arranged oppositely.
As another preferred scheme of the invention, the internal core of the console adopts a PLC control system or a numerical control system, a relay and an electromagnetic valve are also arranged in the console, a signal input/output I/O port of the PLC control system or the numerical control system performs logic control on internal relay and electromagnetic valve devices, and an output control signal of the console controls the rotating speed of driving motors of the horizontal guiding driving mechanism and the vertical guiding driving mechanism and a flame gas source of the burner.
The invention discloses a method for manufacturing a laminated quartz heat-insulating plate, which is characterized by comprising the following steps of: laminating a plurality of quartz plates of different types or the same type to form a quartz plate laminated body, and fixing the quartz plate laminated body on a vertical guide driving mechanism; then controlling the burner to move to the position aligned with the front and rear surfaces of the quartz plate laminate by a horizontal guide driving mechanism, heating a plurality of quartz plates in sequence by using flame of the burner, and welding the plurality of quartz plates with each other to form a laminated quartz heat insulation plate; the operation actions of the vertical guide driving mechanism and the horizontal guide driving mechanism are controlled by the console.
Preferably, the laminated quartz thermal insulation panel is formed by laminating a plurality of quartz plate laminates by laminating different kinds or the same kind of quartz plates and plate-shaped bodies made of different kinds or the same kind of non-quartz glass materials, and by heating the plurality of quartz plate laminates in sequence by using burner flames and welding them to each other.
Further, a laminated quartz thermal insulation board is formed by welding to each other, and a plurality of quartz plates are sequentially stretched by two clamp fixtures of a vertical guide driving mechanism to form a laminated quartz thermal insulation board welding stretched body.
Furthermore, the upper end edge parts and the lower end edge parts of the quartz plates are respectively clamped and fixed by fixing clamps of a first clamping and fixing piece and a second clamping and fixing piece of the vertical guide driving mechanism; two driving motors of the vertical guiding driving mechanism respectively drive the two clamping fixing pieces to move up and down, and simultaneously, the burner flame is utilized to heat the lower parts and the upper parts of the quartz plates in sequence, so that the quartz plates are welded with each other to form the laminated quartz heat insulation plate.
Furthermore, the ratio of the descending speed of the first clamping and fixing piece to the descending speed of the second clamping and fixing piece is 1-10 times, and the descending speed of the first clamping and fixing piece is larger than the descending speed of the second clamping and fixing piece, so that the plurality of quartz plates are downwards stretched during welding, and the laminated quartz heat insulation plate welding stretching body is formed.
Further, the different kinds or the same kind of quartz plates are composed of one or more materials selected from a transparent quartz glass material, an opaque quartz glass material, a natural quartz glass material and a synthetic quartz glass material, and the side of the opaque quartz glass layer of the multilayer structure is covered with the transparent quartz glass material; the laminated quartz thermal baffle is used in the heat treatment process of the semiconductor substrate.
The invention has the beneficial effects.
1. The manufacturing device comprises a horizontal guide driving mechanism, a vertical guide driving mechanism, a burner and a control console, wherein the horizontal guide driving mechanism, the vertical guide driving mechanism, the burner and the control console are matched with each other to process a workpiece, so that the laminated quartz heat-insulating plate consisting of different or same types of quartz plates can be manufactured at simple structure and low cost, and the laminated quartz heat-insulating plate consisting of different or same types of quartz plates and different or same types of non-quartz glass materials can be manufactured; the automation of the processing process of the laminated quartz heat insulation plate product is realized by the control of the operation actions of the horizontal guide driving mechanism and the vertical guide driving mechanism and the control of the flame gas source of the burner through the control console.
2. According to the manufacturing method of the present invention, the laminated quartz heat insulating board which is made of different kinds or the same kind of quartz glass materials, has excellent heat insulating performance and eliminates the generation of particles can be manufactured by flexibly changing the thickness dimension and the stretching degree.
Drawings
In order to make the technical problems, technical solutions and advantageous effects solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and the detailed description. It should be understood that the detailed description and specific examples, while indicating the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
FIG. 1 is a schematic view showing the overall construction of a laminated quartz thermal insulation board manufacturing apparatus according to the present invention.
FIG. 2 is a schematic front view showing the structure of a laminated quartz thermal insulation board of the present invention.
FIG. 3 is a schematic view showing an internal structure of a vertical guide driving mechanism of a laminated quartz thermal insulation board manufacturing apparatus according to the present invention.
FIG. 4 is a schematic view showing an internal structure of a horizontal guide driving mechanism of a laminated quartz heat-insulating board manufacturing apparatus according to the present invention.
The labels in the figure are: the device comprises a console 1, a horizontal guide driving mechanism 2, a vertical guide driving mechanism 3, a first vertical driving motor 4, a second vertical driving motor 5, a vertical slideway hole 6, a second supporting rod 7, a second clamping and fixing piece 8, a second fixing clamp 9, a first fixing clamp 10, a first clamping and fixing piece 11, a first supporting rod 12, a base platform 13, a burner 14, a sliding block 15, a horizontal mechanism frame 16, a horizontal slideway hole 17, a horizontal driving motor 18, a first vertical screw rod 19, a first movable connecting rod 20, a vertical guide rail 21, a second movable connecting rod 22, a second vertical screw rod 23, a vertical mechanism main body mounting plate 24, a horizontal mechanism main body mounting plate 25, a horizontal guide rail 26, a horizontal screw rod 27 and an adapter plate 28.
Detailed Description
Referring to fig. 1 and 2, a device for manufacturing a laminated quartz thermal insulation board comprises a horizontal guide driving mechanism 2, a vertical guide driving mechanism 3, a burner 14, a base platform 13 and a console 1, wherein the burner 14 is connected to the horizontal guide driving mechanism 2, and the burner 14 connected to the horizontal guide driving mechanism 2 is matched with a workpiece clamped and fixed on the vertical guide driving mechanism 3; the control console 1 is respectively and electrically connected with the horizontal guide driving mechanism 2, the vertical guide driving mechanism 3 and the combustor 14 through signal transmission wires, and the control console 1 is used for controlling the operation actions of the horizontal guide driving mechanism 2 and the vertical guide driving mechanism 3 and the flame gas source of the combustor 14; the vertical guide driving mechanism 3 and the horizontal guide driving mechanism 2 provided with the burner 14 are arranged on the base platform 13 together.
Referring to fig. 1, 2 and 3, the vertical guiding driving mechanism 3 includes a first vertical driving motor 4, a second vertical driving motor 5, a vertical mechanism housing, and a vertical mechanism main body mounting plate 24 disposed inside the vertical mechanism housing; the two sides of the vertical mechanism main body mounting plate 24 are provided with parallel vertical guide rails 21, and the two vertical guide rails 21 are connected with a first movable connecting rod 20 and a second movable connecting rod 22 which are arranged up and down in a sliding way; the vertical mechanism main body mounting plate 24 is also connected with a first vertical screw rod 19 and a second vertical screw rod 23, the first vertical screw rod 19 is in screw connection with the first movable connecting rod 20, and the second vertical screw rod 23 is in screw connection with the second movable connecting rod 22; the upper end parts of the first vertical screw rod 19 and the second vertical screw rod 23 are respectively connected with the power output ends of the first vertical driving motor 4 and the second vertical driving motor 5 which are arranged at the top part of the outer side of the vertical mechanism shell. Perpendicular mechanism casing on bilateral symmetry be provided with perpendicular slide hole 6, through perpendicular slide hole 6 and the inside first removal connecting rod 20 of perpendicular mechanism casing, second remove connecting rod 22 be connected with first centre gripping mounting 11, second centre gripping mounting 8, first centre gripping mounting 11, second centre gripping mounting 8 perpendicular slide connection about perpendicular slide hole 6. The first clamping and fixing part 11 comprises a first fixing clamp 10 and a first supporting rod 12, and the first fixing clamp 10 is fixed above the front side of the first supporting rod 12; the second clamping and fixing part 8 comprises a second fixing clamp 9 and a second supporting rod 7, and the second fixing clamp 9 is fixed below the front side of the second supporting rod 7; the first fixing clip 10 is arranged opposite to the second fixing clip 9.
Specifically, the second fixing clip 9 of the second clamping and fixing member 8 is used for fixing and supporting the upper end edges of a plurality of different kinds or the same kind of quartz plates; the first fixing clip 10 of the first clamping and fixing member 11 is used to fix and support the lower end edge of a quartz plate of a different kind or the same kind.
Referring to fig. 1, 2 and 4, the horizontal guiding driving mechanism 2 includes a horizontal driving motor 18, a horizontal mechanism frame 16 and a horizontal mechanism main body mounting plate 25 disposed at the top inside the horizontal mechanism frame 16; two parallel horizontal guide rails 26 are arranged on the horizontal mechanism main body mounting plate 25, and an adapter plate 28 is connected on the two horizontal guide rails 26 in a sliding manner; the horizontal lead screw 27 is arranged between the two horizontal guide rails 26 and below the adapter plate 28, two ends of the horizontal lead screw 27 are connected to two ends of the horizontal mechanism main body mounting plate 25, one end of the horizontal lead screw 27 is connected with the power output end of the horizontal driving motor 18 arranged on the side of the horizontal mechanism frame body 16, and the horizontal lead screw 27 is in threaded connection with the adapter plate 28. Horizontal sliding channel holes 17 are symmetrically formed in two sides of the upper portion of the horizontal mechanism frame body 16, and sliding blocks 15 which can be connected in a sliding mode along the horizontal sliding channel holes 17 are arranged on the top face of the horizontal mechanism frame body 16; two sides of the bottom of the sliding block 15 are fixedly connected with two sides of the top of an adapter plate 28 in the horizontal mechanism frame body 16 through horizontal sliding channel holes 17, and the sliding block 15 is connected with a combustor 14; the combustor 14 is an oxyhydrogen combustor, the combustor 14 is provided with two rows of flame nozzles, and the two rows of flame nozzles of the combustor 14 are arranged oppositely, so that a workpiece can be placed between the two rows of flame nozzles of the combustor 14, the front surface and the rear surface of the workpiece can be heated simultaneously, and the workpiece can be heated sufficiently and uniformly.
Specifically, both surfaces of a plurality of quartz plates passing between the burners 14 are heat-welded by flames of the burners 14, thereby forming a laminated quartz thermal insulation plate; the burner 14 is driven to reciprocate in the horizontal direction by the horizontal guide driving mechanism 2, and the burner 14 reciprocates in the horizontal direction when a plurality of quartz glass plates pass between the burners 14, so that the burners 14 uniformly heat the plurality of quartz glass plates.
The inner core of the control console 1 adopts a PLC control system or a numerical control system, a relay and an electromagnetic valve are further arranged in the control console 1, a signal input/output I/O port of the PLC control system or the numerical control system carries out logic control on the inner relay and the inner electromagnetic valve, and output control signals of the control console 1 control the rotating speed of driving motors of the horizontal guide driving mechanism 2 and the vertical guide driving mechanism 3 and a flame gas source of the combustor 14 through transmission wires.
The operation principle of the manufacturing device of the laminated quartz thermal baffle is described by combining the technical scheme of the invention and the attached drawings.
1. Clamping a workpiece on the fixing clamps of the first clamping fixing piece 11 and the second clamping fixing piece 8; a start button on the console 1 is pressed.
2. And igniting the burner 14, wherein the burner 14 moves to the center of the workpiece rightwards under the action of the horizontal driving motor 18 of the horizontal guiding driving mechanism 2 and the combined action of the transmission of the horizontal lead screw 27, the horizontal guide rail 26 and the guiding of the horizontal slideway hole 17, and starts to reciprocate at a constant speed.
3. The second clamping and fixing part 8 which is already clamped on the upper end edge of the workpiece moves downwards at a constant speed S under the action of the second vertical driving motor 5, and the first clamping and fixing part 11 which is clamped on the lower end edge of the workpiece moves downwards at a constant speed S which is 3 times of the speed S under the action of the first vertical driving motor 4; the second vertical driving motor 5 controls the second clamping fixing member 8 to move downwards through a vertical guide rail 21 and a second vertical lead screw 23 in the vertical guiding driving mechanism 3, and the first vertical driving motor 4 controls the first clamping fixing member 11 to move downwards through a vertical guide rail 21 and a first vertical lead screw 19 in the vertical guiding driving mechanism 3.
4. Under the combined action of the vertical guide driving mechanism 3 and the horizontal guide driving mechanism 2, the workpiece is heated by the burner 14 and then softened.
5. After the equipment is started, the driving motors of all mechanisms operate under the control of an automatic program in the console 1, the operation is carried out according to the process flow actions of the steps, and the workpiece is stretched, fused and straightened; the lowering speed and the drawing speed of the plural quartz plates can be freely set by the console 1, and the size and the like of the laminated quartz heat-insulating plate as a final product can be appropriately changed and set as necessary.
By making the lowering speed of the first clip fixing member 11 larger than that of the second clip fixing member 8, a plurality of quartz plates can be drawn downward at the time of heat welding to form a laminated quartz thermal baffle drawing plate.
By setting the ratio of the descending speed of the first clip fixing 11 to the descending speed of the second clip fixing 8 within the range of 1 to 10 times, it is possible to freely change and set whether or not to stretch, the degree of stretching, and the thickness of the final product. When the drawing is performed, the ratio of the lowering speed may be set in the range of 1.5 to 10 times, preferably in the range of 1.5 to 5 times.
The second embodiment of the method of manufacturing a laminated quartz thermal shield includes: a method of forming a laminated quartz heat insulating plate by laminating a plurality of quartz plate laminates each composed of a different type or the same type of quartz plate and a plate-like body composed of a different type or the same type of non-quartz glass material, sequentially heating the plurality of quartz plates with a flame by a burner 14, and sequentially welding the quartz plates and the plate-like body composed of a non-quartz glass material. In this case, since stretching is not generally required, the ratio of the lowering speed may be set to 1, but in the case where the plate-like body made of a non-quartz glass material is a stretchable material, the stretching operation may be performed as needed.
As the different kind or the same kind of quartz glass plate, one or more of a transparent quartz glass material, an opaque quartz glass material, a natural quartz glass material, a synthetic quartz glass material, and the like can be used. Further, the plate-like body made of a non-quartz glass material includes a ceramic plate and the like.
In addition, the vertical guide driving mechanism 3 and the horizontal guide driving mechanism 2 described in the manufacturing method of the present invention may be replaced with any device, apparatus, other mechanism, or the like that can achieve the same function and function as those described above, as long as the manufacturing method of the present invention can be achieved.
It should be understood that the detailed description of the present invention is only for illustrating the present invention and is not limited by the technical solutions described in the embodiments of the present invention, and those skilled in the art should understand that the present invention can be modified or substituted equally to achieve the same technical effects; as long as the use requirements are met, the method is within the protection scope of the invention.
Claims (10)
1. A device for manufacturing a laminated quartz heat-insulating plate is characterized in that: the device comprises a horizontal guide driving mechanism, a vertical guide driving mechanism, a burner and a control console, wherein the burner is connected to the horizontal guide driving mechanism; the control console is respectively connected with the horizontal guide driving mechanism, the vertical guide driving mechanism and the combustor and is used for controlling the operation actions of the horizontal guide driving mechanism and the vertical guide driving mechanism and the flame gas source of the combustor.
2. The apparatus for manufacturing a laminated quartz heat-insulating plate according to claim 1, characterized in that: the horizontal guide driving mechanism comprises a horizontal driving motor, a horizontal mechanism frame body and a horizontal mechanism main body mounting plate arranged at the inner top of the horizontal mechanism frame body; two parallel horizontal guide rails are arranged on the horizontal mechanism main body mounting plate, and adapter plates are connected to the two horizontal guide rails in a sliding manner; lie in between two horizontal guide rails, the below of keysets is provided with horizontal lead screw, and horizontal lead screw's both ends are connected in horizontal mechanism main part mounting panel both ends, and horizontal lead screw one end links to each other with the horizontal drive motor power take off end of locating horizontal mechanism support body side, screw connection between horizontal lead screw and the keysets.
3. The manufacturing apparatus of a laminated quartz heat-insulating plate according to claim 2, characterized in that: horizontal sliding channel holes are symmetrically formed in two sides of the upper portion of the horizontal mechanism frame body, and sliding blocks which can be connected in a sliding mode along the horizontal sliding channel holes are arranged on the top face of the horizontal mechanism frame body; two sides of the bottom of the sliding block are fixedly connected with two sides of the top of the adapter plate in the horizontal mechanism frame body through horizontal sliding channel holes, and the sliding block is connected with a combustor; the combustor is an oxyhydrogen combustor, the combustor is provided with two rows of flame nozzles, and the two rows of flame nozzles of the combustor are arranged oppositely.
4. The apparatus for manufacturing a laminated quartz heat-insulating plate according to claim 1, characterized in that: the vertical guide driving mechanism comprises a first vertical driving motor, a second vertical driving motor, a vertical mechanism shell and a vertical mechanism main body mounting plate arranged in the vertical mechanism shell; parallel vertical guide rails are arranged on two sides of the vertical mechanism main body mounting plate, and a first moving connecting rod and a second moving connecting rod which are arranged up and down are connected on the two vertical guide rails in a sliding manner; the vertical mechanism main body mounting plate is also connected with a first vertical screw rod and a second vertical screw rod, the first vertical screw rod is in spiral connection with the first movable connecting rod, and the second vertical screw rod is in spiral connection with the second movable connecting rod; the upper end parts of the first vertical screw rod and the second vertical screw rod are respectively connected with the power output ends of a first vertical driving motor and a second vertical driving motor which are arranged at the top of the outer side of the vertical mechanism shell.
5. The apparatus for manufacturing a laminated quartz heat-insulating plate according to claim 4, characterized in that: the vertical mechanism shell is symmetrically provided with vertical sliding channel holes at two sides, and is connected with a first clamping fixing piece and a second clamping fixing piece through the vertical sliding channel holes and a first moving connecting rod and a second moving connecting rod in the vertical mechanism shell, and the first clamping fixing piece and the second clamping fixing piece are connected with the vertical sliding channel holes in a vertical sliding mode; the first clamping and fixing piece comprises a first fixing clamp and a first supporting rod, and the first fixing clamp is fixed above the front side of the first supporting rod; the second clamping and fixing piece comprises a second fixing clamp and a second supporting rod, and the second fixing clamp is fixed below the front side of the second supporting rod; the first fixing clamp and the second fixing clamp are arranged oppositely.
6. The apparatus for manufacturing a laminated quartz heat-insulating plate according to claim 1, characterized in that: the inner core of the control console adopts a PLC control system or a numerical control system, a relay and an electromagnetic valve are also arranged in the control console, a signal input/output I/O port of the PLC control system or the numerical control system carries out logic control on the inner relay and the inner electromagnetic valve, and an output control signal of the control console controls the rotating speed of a driving motor of a horizontal guide driving mechanism and a driving motor of a vertical guide driving mechanism and a burner flame gas source.
7. A manufacturing method of a laminated quartz heat-insulating plate is characterized by comprising the following steps: laminating a plurality of quartz plates of different types or the same type to form a quartz plate laminated body, and fixing the quartz plate laminated body on a vertical guide driving mechanism; then controlling the burner to move to the position aligned with the front and rear surfaces of the quartz plate laminate by a horizontal guide driving mechanism, heating a plurality of quartz plates in sequence by using flame of the burner, and welding the plurality of quartz plates with each other to form a laminated quartz heat insulation plate; the operation actions of the vertical guide driving mechanism and the horizontal guide driving mechanism are controlled by the console.
8. The method of manufacturing a laminated quartz heat-insulating plate according to claim 7, characterized in that: or a plurality of quartz plate laminates are formed by laminating different kinds or the same kind of quartz plates and plate-like bodies made of different kinds or the same kind of non-quartz glass materials, and a laminated quartz thermal insulation plate made of quartz and non-quartz materials is formed by heating the plurality of quartz plate laminates in sequence by using burner flames and welding them to each other.
9. The method of manufacturing a laminated quartz heat-insulating plate according to claim 7, characterized in that: clamping and fixing the upper end edge parts and the lower end edge parts of the quartz plates by fixing clamps of a first clamping and fixing part and a second clamping and fixing part of the vertical guide driving mechanism respectively; two driving motors of the vertical guiding driving mechanism respectively drive the two clamping fixing pieces to move up and down, and simultaneously, the burner flame is utilized to heat the lower parts and the upper parts of the quartz plates in sequence, so that the quartz plates are welded with each other to form a laminated quartz heat insulation plate; the ratio of the descending speed of the first clamping and fixing piece to the descending speed of the second clamping and fixing piece is 1-10 times, and the descending speed of the first clamping and fixing piece is larger than the descending speed of the second clamping and fixing piece, so that the quartz plates are downwards stretched during welding to form the laminated quartz heat insulation plate welding stretching body.
10. The method of manufacturing a laminated quartz heat-insulating plate according to claim 7 or 8, characterized in that: the different kinds or the same kind of quartz plates are composed of one or more materials selected from a transparent quartz glass material, an opaque quartz glass material, a natural quartz glass material and a synthetic quartz glass material, and the side of the opaque quartz glass layer of the multilayer structure is covered with the transparent quartz glass material; the laminated quartz thermal baffle is used in the heat treatment process of the semiconductor substrate.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114656134A (en) * | 2022-02-21 | 2022-06-24 | 江苏太平洋石英股份有限公司 | Composite quartz glass plate and preparation method thereof |
| CN117923812A (en) * | 2024-03-21 | 2024-04-26 | 辽宁拓邦鸿基半导体材料股份有限公司 | Quartz tablet and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004067456A (en) * | 2002-08-07 | 2004-03-04 | Shinetsu Quartz Prod Co Ltd | Apparatus and method of manufacturing multilayer quartz glass plate |
| JP2004091314A (en) * | 2002-07-08 | 2004-03-25 | Shinetsu Quartz Prod Co Ltd | Multilayer quartz glass sheet and tool made of quartz glass |
| CN101199113A (en) * | 2005-03-30 | 2008-06-11 | 精工爱普生株式会社 | Piezoelectric resonator and manufacturing method thereof |
| CN106032309A (en) * | 2015-03-20 | 2016-10-19 | 深圳光启高等理工研究院 | Quartz glass based metamaterial and preparation method thereof |
| CN215327718U (en) * | 2021-07-16 | 2021-12-28 | 沈阳偶得科技有限公司 | Laminated quartz heat insulation plate manufacturing device |
-
2021
- 2021-07-16 CN CN202110806302.8A patent/CN113371985A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004091314A (en) * | 2002-07-08 | 2004-03-25 | Shinetsu Quartz Prod Co Ltd | Multilayer quartz glass sheet and tool made of quartz glass |
| JP2004067456A (en) * | 2002-08-07 | 2004-03-04 | Shinetsu Quartz Prod Co Ltd | Apparatus and method of manufacturing multilayer quartz glass plate |
| CN101199113A (en) * | 2005-03-30 | 2008-06-11 | 精工爱普生株式会社 | Piezoelectric resonator and manufacturing method thereof |
| CN106032309A (en) * | 2015-03-20 | 2016-10-19 | 深圳光启高等理工研究院 | Quartz glass based metamaterial and preparation method thereof |
| CN215327718U (en) * | 2021-07-16 | 2021-12-28 | 沈阳偶得科技有限公司 | Laminated quartz heat insulation plate manufacturing device |
Non-Patent Citations (1)
| Title |
|---|
| 陈国华: "工业机器人与智能制造", 31 December 2020, 西安：西安电子科技大学出版社, pages: 178 - 179 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114656134A (en) * | 2022-02-21 | 2022-06-24 | 江苏太平洋石英股份有限公司 | Composite quartz glass plate and preparation method thereof |
| CN117923812A (en) * | 2024-03-21 | 2024-04-26 | 辽宁拓邦鸿基半导体材料股份有限公司 | Quartz tablet and preparation method thereof |
| CN117923812B (en) * | 2024-03-21 | 2024-05-24 | 辽宁拓邦鸿基半导体材料股份有限公司 | Quartz tablet and preparation method thereof |
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