CN113363727B - Terahertz wave beam scanning-polarization composite regulation and control device and antenna - Google Patents

Terahertz wave beam scanning-polarization composite regulation and control device and antenna Download PDF

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CN113363727B
CN113363727B CN202110414019.0A CN202110414019A CN113363727B CN 113363727 B CN113363727 B CN 113363727B CN 202110414019 A CN202110414019 A CN 202110414019A CN 113363727 B CN113363727 B CN 113363727B
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polarization
beam scanning
silicon column
terahertz
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CN113363727A (en
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肖诗逸
周桃磊
蔡晓东
周磊
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University of Shanghai for Science and Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0086Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/002Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/0026Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices having a stacked geometry or having multiple layers

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Abstract

The application relates to a terahertz wave beam scanning-polarization composite regulation and control device and an antenna, wherein the terahertz wave beam scanning-polarization composite regulation and control device comprises two cascaded super surfaces, and each super surface is formed by periodically arranging a plurality of super periods; each supercycle consists of ten artificial atoms arranged in a line; each artificial atom is formed by sequentially and seamlessly laminating a top silicon column, a silicon substrate and a bottom silicon column; the cross section of the top silicon column and the cross section of the silicon substrate are both square, and the cross section of the bottom silicon column is rectangular; the two cascaded super surfaces are arranged in parallel, and a bottom silicon column of one super surface of the two cascaded super surfaces is close to a top silicon column of the other super surface; two surfaces, far away from each other, of the two cascaded super surfaces are respectively fixed with a rotating mechanism, the rotating mechanisms drive the corresponding super surfaces to rotate, and the rotating axes of the two cascaded super surfaces are overlapped. The terahertz wave beam polarization control device has the effect of dynamically regulating and controlling the wavefront and polarization of the terahertz wave beam.

Description

Terahertz wave beam scanning-polarization composite regulation and control device and antenna
Technical Field
The application relates to the technical field of terahertz beam dynamic regulation, in particular to a terahertz beam scanning-polarization composite regulation device and an antenna.
Background
The terahertz wave band is generally electromagnetic wave in the frequency range of 0.1 to 10THz, and the wave band is between the infrared wave band and the microwave wave band. Due to the unique spectral characteristics of the terahertz wave, the terahertz wave is widely applied to the fields of astrophysics, communication, materials, chemistry, national defense safety, biomedicine and the like.
However, the terahertz band exceeds the cutoff frequency of semiconductor materials essential in electrical amplifiers and mixers, so that currently widely used radio frequency electronic components are no longer compatible with the terahertz band. Therefore, free, dynamic control of the terahertz wave front and polarization is required.
At present, due to the lack of a tunable element with a proper submicron size, the dynamic control of the wavefront and polarization of the terahertz light beam cannot be realized.
Disclosure of Invention
In order to dynamically regulate and control the wavefront and polarization of a terahertz beam, the application provides a terahertz beam scanning-polarization composite regulation and control device and an antenna.
In a first aspect, the application provides a terahertz beam scanning-polarization composite regulation and control device, which adopts the following technical scheme:
a terahertz wave beam scanning-polarization composite regulation and control device comprises two cascaded super surfaces, wherein each super surface is formed by periodically arranging a plurality of super periods;
each supercycle consists of ten artificial atoms arranged in a line; each artificial atom is formed by sequentially and seamlessly laminating a top silicon column, a silicon substrate and a bottom silicon column; the cross section of the top silicon column and the cross section of the silicon substrate are both square, and the cross section of the bottom silicon column is rectangular;
the two cascaded super surfaces are arranged in parallel, and a bottom silicon column of one super surface of the two cascaded super surfaces is close to a top silicon column of the other super surface;
two surfaces, far away from each other, of the two cascaded super surfaces are respectively fixed with a rotating mechanism, the rotating mechanisms drive the corresponding super surfaces to rotate, and the rotating axes of the two cascaded super surfaces are overlapped.
Optionally, the artificial atoms have a phase difference Δ Φ under orthogonal polarization i (r, t) ═ pi/2, and average phase
Figure BDA0003025156210000021
Sequentially linearly adding pi/5.
Optionally, the rotating mechanism is a metal turntable, and the super surface is attached to the metal turntable.
Optionally, the distance between the two cascaded super surfaces is h 4 ,200μm≤h 4 ≤1000μm。
Optionally, h 4 =600μm。
Optionally, in
Figure BDA0003025156210000022
Polarized wave sum
Figure BDA0003025156210000023
Fixing the silicon at normal incidence of the polarized waveSide length P and thickness h of the substrate 2 And the length of a cross-section side omega of the bottom silicon column y Simulating the side length omega of the artificial atom along with the other section of the bottom silicon column by using a time domain finite difference method x And height h 3 Varying phase difference Δ Φ i And transmission coefficient amplitude
Figure BDA0003025156210000024
Determining the section side length omega of the bottom silicon column with high transmission performance and expected phase difference according to the phase diagram obtained by simulation x And height h 3
Optionally, in
Figure BDA0003025156210000025
Polarized wave sum
Figure BDA0003025156210000026
Fixed Δ Φ at normal incidence of polarized wave i The length of the cross section side omega of the bottom silicon column corresponding to-pi/2 x And height h 3 Simulating and calculating the side length l and the height h of the artificial atom along with the section of the top silicon column by using a time domain finite difference method 1 Varying average phase
Figure BDA0003025156210000027
And transmission coefficient amplitude
Figure BDA0003025156210000028
Determining the phase with the expected average phase according to the phase diagram obtained by simulation
Figure BDA0003025156210000029
The side length l and the height h of the cross section of the top silicon column 1
Optionally, the rotational speed of the two cascaded super-surfaces is ω 1 =-π/(2T),ω 2 =3π/(4T)。
In a second aspect, the present application provides a beam scanning-polarization antenna using the terahertz beam scanning-polarization complex modulation and control device described in the first aspect.
By adopting the technical scheme, the super-surface device is formed by two transmission type super-surfaces with specific phase distribution, the whole super-surface device can have a Jones matrix which changes along with time by giving different rotating speeds to the super-surfaces of different layers, the dynamic regulation and control of the wave front and polarization of a wave beam are facilitated, the local regulation and control are not needed by using an active element, the wave front and polarization of a terahertz light beam can be dynamically regulated and controlled, the effectiveness of the terahertz light beam is verified through a terahertz experiment, a road is paved for realizing the dynamic regulation and control of the terahertz light beam, and the terahertz light beam can be better applied to various fields such as terahertz radar, biochemical sensing, imaging and the like.
Drawings
Fig. 1 is an xz plane structure schematic diagram of a terahertz beam scanning-polarization composite control device according to an embodiment of the present application.
Fig. 2 is a schematic perspective structure diagram of a terahertz beam scanning-polarization composite control device according to an embodiment of the present application.
Fig. 3(a) is a schematic plan view of a side surface of the super-surface where the top silicon pillar is disposed according to the embodiment of the present application.
Fig. 3(b) is a schematic plan view of the super-surface on the side surface where the bottom silicon pillar is disposed according to the embodiment of the present application.
Fig. 4 is a schematic structural diagram of an artificial atom according to an embodiment of the present application.
FIG. 5(a) is a phase difference Δ Φ of the bottom silicon pillar of the embodiment of the present application i Side length omega of cross section of bottom silicon column x And height h 3 A phase diagram of the relationship of (1).
FIG. 5(b) is the amplitude of the transmittance of the bottom silicon pillar of the embodiment of the present application
Figure BDA0003025156210000031
Side length omega of cross section of bottom silicon column x And height h 3 A phase diagram of the relationship of (1).
FIG. 5(c) shows the average phase of the top silicon pillar of the embodiment of the present application
Figure BDA0003025156210000032
Length l and height h of cross section of top silicon column 1 A phase diagram of the relationship of (1).
FIG. 5(d) is the transmission coefficient amplitude of the top silicon pillar of the embodiment of the present application
Figure BDA0003025156210000033
Length l and height h of cross section of top silicon column 1 A phase diagram of the relationship of (1).
Fig. 6 is a schematic diagram illustrating the rotation operation of a left-handed circularly polarized incident wave on a poincare sphere after passing through two cascaded super-surfaces according to an embodiment of the present application.
FIG. 7 is a schematic diagram of a phase distribution of a super-surface in an embodiment of the present application.
Fig. 8 is a schematic diagram of the time evolution of the scanning angle on the k-space sphere according to the embodiment of the present application.
Fig. 9 is a schematic diagram of the time evolution of the polarization state on the poincare sphere according to the embodiment of the present application.
Fig. 10 is a schematic position relationship diagram of the terahertz beam scanning-polarization compound control device and the terahertz time-domain spectroscopy system according to the embodiment of the present application.
Fig. 11 is an angular power distribution diagram of a transmitted wave at three times [ T ═ 0, (1/2) T,1T ] in the example of the present application.
Fig. 12 is a polarization state diagram of a transmitted wave at three times [ T ═ 0, (1/2) T,1T ] in the example of the present application.
Description of the reference numerals: 10. a terahertz wave beam scanning-polarization composite regulating device; 11. a super-surface; 110. overcycling; 111. artificial atoms; 1111. a top silicon pillar; 1112. a silicon substrate; 1113. a bottom silicon pillar; 12. a rotation mechanism; 20. a terahertz time-domain spectroscopy system; 201. a transmitter; 202. a first lens; 203. a quarter wave plate; 204. a second lens; 205. a receiver.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.
Fig. 1 is a schematic structural diagram of a terahertz beam scanning-polarization composite control device 10 provided in this embodiment. As shown in fig. 1, the terahertz beam scanning-polarization composite control device 10 is formed by cascading two identical super-surfaces 11. Two surfaces 11 far away from the two layers of super surfaces 11 are respectively and fixedly connected with a rotating mechanism 12, the rotating mechanism 12 drives the corresponding super surfaces 11 to rotate according to a certain rotating speed, and the rotating axes of the two layers of super surfaces 11 are overlapped.
Alternatively, the rotating mechanism 12 is a circular electric metal turntable. Fig. 2 shows a schematic perspective structure of a terahertz beam scanning super-surface device 10 using an electric metal turntable, and fig. 2 is only for illustrating a positional relationship between a super-surface 11 and a rotating mechanism 12, so that a specific structure of the super-surface 11 is not shown and is only for illustration. The electric metal turntable comprises a turntable 121 and a fixing support (not shown in the figure) for fixing the position of the turntable 121, the super surface 11 is attached to one surface of the turntable 121, and the relative positions of the two super surfaces 11 can be adjusted and fixed through the corresponding positions of the turntable 121.
In this embodiment, the two super-surfaces 11 are arranged parallel to each other and at a distance h 4 ,h 4 =[200μm,1000μm]Preferably, h 4 =600μm。
Fig. 3(a) and 3(b) respectively show the structural schematic diagrams of the two side surfaces of each super surface 11. As shown in fig. 3(a) and 3(b), each layer of the super-surface 11 is formed by a plurality of super-periods 110 arranged periodically; each supercycle 110 is composed of ten artificial atoms 111 arranged in a line, and the phase difference delta phi of the artificial atoms under orthogonal polarization i (r, t) ═ pi/2, and average phase
Figure BDA0003025156210000051
And linear addition in turn.
As shown in fig. 1 and 4, each artificial atom 111 includes a square silicon substrate 1112, a top silicon pillar 1111 with a square cross-section is deposited on one side of the silicon substrate 1112, and a bottom silicon pillar 1113 with a rectangular cross-section is deposited on the other side.
As shown in fig. 3(a), for the same supercycle 110, the cross-sectional sizes of the top silicon pillars 1111 of the ten artificial atoms 111 increase or decrease in the order of arrangement, and the heights of the top silicon pillars 1111 are all the same; as shown in fig. 3(b), the bottom silicon pillars 1113 of the ten artificial atoms 111 are all identical in geometric size.
As shown in fig. 1, the bottom silicon pillar 1113 of one super-surface 11 of the two cascaded super-surfaces 11 is opposite to the top silicon pillar 1111 of the other super-surface 11, and does not contact each other.
The artificial atom 111 is an all-dielectric artificial atom with high transmission efficiency in the terahertz wave band, and can generate average phase in a wide range
Figure BDA0003025156210000052
And phase difference Δ Φ i May help to implement a super-surface device that controls the programmable function of the wavefront.
In order to make the terahertz beam scanning-polarization composite control device 10 have high transmission performance, wide coverage beam steering capability and polarization control capability, the geometric dimensions of the top silicon pillar 1111 and the bottom silicon pillar 1113 of the artificial atom 111 need to be designed experimentally.
First, at
Figure BDA0003025156210000053
Polarized wave sum
Figure BDA0003025156210000054
Under normal incidence of polarized waves, the fixed silicon substrate 1112 has a side length P of 130 μm and a thickness h 2 Length of side ω of cross section of 110 μm and bottom silicon column 1113 y The length of the side omega of the artificial atom 111 along with the other section side of the bottom silicon column 1113 is simulated by using a time domain finite difference method x And height h 3 Varying phase difference Δ Φ i And transmission coefficient amplitude
Figure BDA0003025156210000055
From the two phase diagrams shown in FIGS. 5(a) and 5(b) obtained by simulation, the side length ω of the cross section of the bottom silicon pillar 1113 having high transmittance and expected phase difference can be determined from the two phase diagrams x And height h 3
Then, at
Figure BDA0003025156210000056
Polarized wave sum
Figure BDA0003025156210000057
Fixed Δ Φ at normal incidence of polarized wave i Length of side ω of cross section of bottom silicon column 1113 corresponding to-pi/2 x And height h 3 Simulating and calculating the side length l and the height h of the cross section of the artificial atom along with the top silicon column 1111 by using a time domain finite difference method 1 Varying average phase
Figure BDA0003025156210000061
And transmission coefficient amplitude
Figure BDA0003025156210000062
From the two phase diagrams shown in FIGS. 5(c) and 5(d) obtained by the simulation, it was found that the phase at h 1 At 240 μm, the average phase changes with l
Figure BDA0003025156210000063
Can cover a range of 2 pi.
The beam scanning capability and the polarization control capability of the super-surface device are introduced from the aspects of theoretical analysis and experimental verification.
Two anisotropic transmissive meta-surfaces 11 are constructed. The phase distribution of the super-surface 11 is set to be a linear gradient phase, and the propagation path of light can be changed by introducing a phase jump at the light incidence interface according to the generalized Snell's law of refraction. The phase mutation of the super surface is generated by unit structures in which phase differences are sequentially linearly superposed, so that the wave front can be regulated and controlled by changing phase gradients.
The phase distribution of each layer of the super-surface 11 for two orthogonally polarized incidences is respectively
Figure BDA0003025156210000064
And
Figure BDA0003025156210000065
wherein the content of the first and second substances,
Figure BDA0003025156210000066
is composed of
Figure BDA0003025156210000067
The phase of the polarized wave incident on the i-th layer meta-surface 11,
Figure BDA0003025156210000068
is composed of
Figure BDA0003025156210000069
Phase, gradient xi of polarized wave incident on i-th layer super surface 11 0 =0.33k 0 δ — pi/2 represents a phase difference, i — 1, 2. Thus, a jones matrix for the entire super-surface device can be derived, as in equation (1):
Figure BDA00030251562100000610
the super-surface device has a tangential beam quantity k || (t),
Figure BDA00030251562100000611
Figure BDA00030251562100000612
The normal incident wave can be deflected to a time dependent off-normal direction.
Polarization control operator at this time
Figure BDA00030251562100000613
Can be viewed as two axes on a poincare sphere
Figure BDA00030251562100000614
And
Figure BDA0003025156210000071
rotary operation of continuous rotation by delta angle, both rotary operationsThe details are shown in FIG. 6. Assuming that the incident light is a left-handed circularly polarized wave, i.e., (Θ) in ,Ψ in ) Is (0 ° ), and δ is-pi/2. For the same super-surface 11, the incident light first passes through the top silicon pillar 1111 and then passes through the bottom silicon pillar 1113, and then passes through a surrounding trench after the incident light passes through the first super-surface 11
Figure BDA0003025156210000072
After the operation of rotating the shaft by delta angle, | σ of polarization from the beginning in The change (i.e., the north pole of Poincare sphere) is
Figure BDA0003025156210000073
(located on the equator line of the poincare sphere). When the light beam passes through the second layer super-surface 11 and passes through a second layer
Figure BDA0003025156210000074
After operation of the shaft at an angle delta, its polarisation is changed from
Figure BDA0003025156210000075
Becomes a final state | σ f > (ii). Time function [ alpha ] with rotation angle of two-layer super surface 11 1 (t),α 2 (t) } at [0, 2 π]Intermediate state of polarization of transmitted wave when varied in range
Figure BDA0003025156210000076
May cover the entire equator and the terminal state of polarization | σ f > may cover the entire poincare sphere. Thus, in principle, by choosing the appropriate δ values and { α } 1 (t),α 2 (t) function, the polarization of the transmitted wave can be arbitrarily regulated and controlled.
Then, the gradient ξ is designed 0 =0.33k 0 Super-surface device with delta-pi/2 phase difference and its phase distribution
Figure BDA0003025156210000077
And
Figure BDA0003025156210000078
as shown in the figureShown in fig. 7, the wave regulation function at 0.7THz is demonstrated experimentally. Ten artificial atoms 111 are selected to form a supercycle 110, and the phase difference of the artificial atoms 111 under orthogonal polarization is delta phi i (r, t) ═ pi/2, and average phase
Figure BDA0003025156210000079
Sequentially linearly adding pi/5.
The bottom silicon pillar 1113 of the super-surface device is rectangular in cross-section to produce the phase difference required to modulate the polarization of the beam.
By numerically analyzing the performance of the super-surface device, assuming that the rotation speed of each layer of the super-surface 11 is different, the rotation speed is { omega [, respectively 1 =-π/(2T),ω 2 And simulating the beam orientation function of the super-surface device by using an FDTD method, wherein the working frequency is 0.7THz, and the incident source adopts left-handed circularly polarized waves. Fig. 8 and 9 respectively show the propagation direction and the polarization state of the transmitted wave predicted by the theory of formula (1) as a function of time t in one period, and it can be known from the figure that the super-surface device not only can dynamically deflect the normally incident light beam to the non-normal direction, but also can simultaneously regulate and control the polarization state of the light beam.
The beam scanning function of the super-surface device is characterized by experiments, and the rotating speed of each layer of super-surface 11 is still defined as { omega } 1 =-π/(2T),ω 2 3 pi/(4T) }, the test equipment is a terahertz spectrometer far-field system (THz-TDS).
The terahertz time-domain spectroscopy system 20 comprises a transmitter 201, a first lens 202, a quarter wave plate 203, a second lens 204 and a receiver 205 which are arranged in sequence, and the terahertz beam scanning-polarization compound regulating and controlling device 10 is arranged between the quarter wave plate 203 and the second lens 204. The top silicon pillar 1111 of each super-surface 11 is close to the second lens 204 relative to the bottom silicon pillar 1113, and the bottom silicon pillar 1113 of each super-surface 11 is close to the quarter-wave plate 203 relative to the top silicon pillar 1111, that is, the terahertz light beam emitted by the emitter 201 is transmitted through the bottom silicon pillar 1113 of each super-surface 11 and then through the top silicon pillar 1111 of the super-surface.
An incident source is set as a left-handed circularly polarized terahertz wave, and then angular power distributions of the transmitted wave at three times [ T ═ 0, (1/2) T,1T ] are tested, indicated by circles in fig. 11, to show very clearly that the transmitted wave at the three times is deflected to a specific angle. Fig. 11 also shows the simulation results, indicated by solid lines. Obviously, the experimental results and the simulation results are very consistent, and the working efficiency is about 36%.
In addition, the polarization state of the transmitted wave at the above three moments is also characterized experimentally. By rotating the linearly polarized receiver, the THz-TDS system tests the amplitude and phase information of the transmitted wave in two orthogonal directions to determine the polarization state of the transmitted wave. The polarization states of the transmitted wave at three times, [ T ═ 0, (1/2) T,1T ], determined by experimental data, are indicated by circles in fig. 12, and the theoretical calculation results and numerical simulation results of equation (1) are indicated by broken lines and solid lines in fig. 12, respectively. It can be seen that all three results roughly match. In particular, we have found that with increasing time, the polarization of the transmitted beam changes from circular to elliptical and finally linear.
The embodiment also discloses a beam scanning-polarization antenna which is constructed by the cascade super-surface structure with low loss, low cost and easy processing, can effectively change the propagation direction of terahertz waves through proper phase distribution construction, realizes the coverage of a larger scanning range, realizes random, rapid and accurate wavefront modulation in terahertz wave bands, and can dynamically regulate and control the polarization state of transmitted terahertz beams, so the beam scanning-polarization antenna can be used in various fields such as terahertz radars, biochemical sensing, imaging and the like.
The alternative scheme for dynamically regulating the wave front and polarization of the light beam, which is provided by the embodiment, does not need to use an active element for local regulation, and the effectiveness of the scheme is verified through a terahertz experiment. The terahertz wave beam scanning-polarization composite regulation and control device provided by the embodiment is composed of two layers of transmission type super surfaces with specific phase distribution, and the whole super surface device can have a Jones matrix which changes along with time by giving different rotating speeds to the different layers of super surfaces, so that the dynamic regulation and control of the wave front and polarization of the wave beam are facilitated. Based on the established theory, the super-surface device made of the all-dielectric material is designed and manufactured, and the wave front and polarization of the terahertz light can be dynamically regulated and controlled.
In addition, it is to be understood that relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. The terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made to the present application by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present application shall fall within the protection scope of the present application.

Claims (8)

1. A terahertz wave beam scanning-polarization composite regulation and control device is characterized by comprising two cascaded super surfaces, wherein each super surface is formed by periodically arranging a plurality of super periods;
each supercycle consists of ten artificial atoms arranged in a line; each artificial atom is formed by sequentially and seamlessly laminating a top silicon column, a silicon substrate and a bottom silicon column; the cross section of the top silicon column and the cross section of the silicon substrate are both square, and the cross section of the bottom silicon column is rectangular;
the two cascaded super surfaces are arranged in parallel, and a bottom silicon column of one super surface of the two cascaded super surfaces is close to a top silicon column of the other super surface;
two far surfaces of the two layers of cascade super surfaces are respectively fixed with a rotating mechanism, the rotating mechanisms drive the corresponding super surfaces to rotate, and the rotating axes of the two layers of cascade super surfaces are superposed;
phase difference delta phi of i-th layer super surface of artificial atoms under orthogonal polarization i (r, t) — pi/2, r denotes a position on the super surface, t denotes time, and the average phase of the ith layer super surface
Figure FDA0003746094110000011
Sequentially linearly adding pi/5.
2. The terahertz beam scanning-polarization composite modulation device of claim 1, wherein the rotation mechanism is a metal turntable, and the super-surface is attached to the metal turntable.
3. The terahertz beam scanning-polarization composite modulation and control device according to claim 1 or 2, wherein the distance between the two cascaded super-surfaces is h 4 ,200μm≤h 4 ≤1000μm。
4. The terahertz beam scanning-polarization compound modulation device of claim 3, wherein h is 4 =600μm。
5. The terahertz beam scanning-polarization compound modulation device of claim 3, wherein the terahertz beam scanning-polarization compound modulation device is arranged on
Figure FDA0003746094110000012
Polarized wave sum
Figure FDA0003746094110000013
Fixing the side length P and the thickness h of the silicon substrate under normal incidence of polarized waves 2 And the length of a cross-section side omega of the bottom silicon column y Simulating the length omega of the side of the i-th super surface of the artificial atom along with the other section side of the bottom silicon column by using a time domain finite difference method x And height h 3 Varying phase difference Δ Φ i And transmission coefficient amplitude
Figure FDA0003746094110000014
Determining the section side length omega of the bottom silicon column with high transmission performance and expected phase difference according to the phase diagram obtained by simulation x And height h 3 Wherein, in the step (A),
Figure FDA0003746094110000015
and
Figure FDA0003746094110000016
representing a unit vector in a local coordinate system,
Figure FDA0003746094110000017
polarized waves are electromagnetic waves with a polarization direction along the u-axis,
Figure FDA0003746094110000021
polarized waves are electromagnetic waves with a polarization direction along the v-axis.
6. The terahertz beam scanning-polarization compound modulation device of claim 5, wherein the terahertz beam scanning-polarization compound modulation device is arranged on
Figure FDA0003746094110000022
Polarized wave sum
Figure FDA0003746094110000023
Fixed Δ Φ at normal incidence of polarized wave i The length of the cross section side omega of the bottom silicon column corresponding to-pi/2 x And height h 3 Simulating and calculating the side length l and the height h of the i-th super surface of the artificial atom along with the section of the top silicon column by using a time domain finite difference method 1 Varying average phase
Figure FDA0003746094110000024
And transmission coefficient amplitude
Figure FDA0003746094110000025
Determining the phase with the expected average phase according to the phase diagram obtained by simulation
Figure FDA0003746094110000026
The side length l and the height h of the cross section of the top silicon column 1
7. The terahertz wave beam scanning-polarization composite modulation device as claimed in any one of claims 1, 2 and 4 to 6, wherein the rotation speeds of the two cascaded super-surfaces are ω and ω respectively 1 =-π/(2T),ω 2 T denotes the period 3 pi/(4T).
8. A beam scanning-polarization antenna using the terahertz beam scanning-polarization complex manipulation device as claimed in any one of claims 1 to 7.
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