CN113363048A - Inner electrode of laminated inductor, preparation method thereof and laminated inductor - Google Patents
Inner electrode of laminated inductor, preparation method thereof and laminated inductor Download PDFInfo
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- CN113363048A CN113363048A CN202110628997.5A CN202110628997A CN113363048A CN 113363048 A CN113363048 A CN 113363048A CN 202110628997 A CN202110628997 A CN 202110628997A CN 113363048 A CN113363048 A CN 113363048A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/02—Fixed inductances of the signal type without magnetic core
- H01F17/03—Fixed inductances of the signal type without magnetic core with ceramic former
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/29—Terminals; Tapping arrangements for signal inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
- H01F2017/002—Details of via holes for interconnecting the layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
- H01F2027/2809—Printed windings on stacked layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
The invention provides an inner electrode of a laminated inductor, a preparation method thereof and the laminated inductor, wherein the inner electrode comprises at least one metal layer and at least one through hole layer, and the metal layer and the through hole layer are alternately laminated; the metal layer is a linear continuous concave-convex structure, and the through hole layer comprises at least one through hole column. The invention provides an inner electrode of a laminated inductor, which is a laminated chip inductor for improving the inductance Q value by changing the structural design of the inductor.
Description
Technical Field
The invention belongs to the technical field of laminated inductors, and relates to an inner electrode of a laminated inductor, a preparation method of the inner electrode and the laminated inductor.
Background
With the increasing progress of consumer products in terms of high speed, high storage density, light weight, and the like, and the continuous update of mobile communication technology and wired and wireless digital communication networks centered on mobile phones. In the past 20 years, the miniaturization and the portability have been rapidly progressed, and the miniaturization, the chip type miniaturization and the high frequency have been progressed for the inductor products.
The laminated inductor is also a non-winding inductor, and compared with a winding inductor, the laminated inductor has the advantages that: (1) the overall dimension is small; (2) the circuit is closed, no mutual interference exists, and the circuit is suitable for high-density installation; (3) the installation shape of the non-directional and standardized automatic patch is realized; (4) the welding property and the welding resistance are excellent, and the welding method is suitable for flow welding and reflow welding.
At present, with the continuous development of science and technology, the production and processing of electronic components in a lamination mode has become one of the most important modes, and the mode can produce laminated chip inductors on a large scale. The high Q value, low loss and high frequency of the same type and size become the continuous requirements of the laminated inductor. The Q value is the main parameter for measuring the inductance device. It is the ratio of the inductance presented by an inductor when it is operated at an ac voltage of a certain frequency to its equivalent loss resistance. The higher the Q value of the inductor, the lower its losses and the higher the efficiency. The quality factor of the inductor depends on the dc resistance of the coil wire, the dielectric loss of the bobbin, and the loss due to the core and the shield.
CN105206542A discloses a method for manufacturing high quality factor inductor, comprising the following steps: providing a silicon substrate, and forming corrosion windows on mask layers on the front surface of the silicon substrate after the mask layers are deposited on the front surface and the back surface of the silicon substrate; forming a deep pit structure in the silicon substrate along the etching window; spin coating a polymer to form an isolation layer, wherein the isolation layer covers the deep pit structure and is higher than the front surface of the silicon substrate; forming a first metal pattern on the isolation layer; c, spin-coating a dielectric layer on the structure obtained after the step C and patterning to form a through hole exposing part of the first layer of metal pattern; forming a second layer of metal pattern on the structure obtained after the step D; and enabling part of the second layer metal pattern to be in contact with the first layer metal pattern through the through hole to form the inductor.
CN106340508A discloses a method for forming an inductor and an inductor, the method for forming an inductor includes: providing a substrate, wherein the substrate is provided with a first metal layer; forming a first trench and a second trench in the substrate, the second trench communicating with the first metal layer; filling a conductive material in the first trench and the second trench; and forming a second metal layer on the substrate, and etching the second metal layer to form the inductance coil. Through the first trench and the second trench formed in the substrate, when the second metal layer is formed on the first trench, the second metal layer may form a recess on an upper surface at the first trench, thereby increasing a surface area of the inductor coil through the second trench.
CN102637505A discloses a laminated inductor with high self-resonant frequency and high quality factor, wherein the laminated body is a structure in which at least two types of insulator sheets are laminated as a whole, one type is a first insulator sheet of ferrite magnetic material constituting upper and lower substrates of the laminated body, the other type is a second insulator sheet constituting the vicinity of an internal electrode of the laminated body, and the main body of the laminated inductor is a plurality of first insulators of ferrite magnetic material and at least one layer of second insulator of material with low dielectric constant and low loss arranged at a specific position inside the first insulator; the coil conductors of the coil layer are disposed in the first insulator.
The conventional laminated chip inductor is generally manufactured by improving the formula of raw materials or increasing the line width and the line thickness to increase the Q value. However, the former development cycle is too long, while the latter is feasible but limited in improvement due to the dimensional thickness and process limitations of the inductor itself.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an inner electrode of a laminated inductor, a preparation method thereof and the laminated inductor. Through the structural design who changes the inductor, single-deck coil structural design is double-deck or multilayer, and each layer is the continuous concave-convex structure of line type, under the prerequisite of the same volume, has improved the cross section of individual layer inner electrode, has improved the magnetic flow area of inductance to the Q value of stromatolite piece formula inductor has been improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides an inner electrode of a stacked inductor, wherein the inner electrode comprises at least two metal layers and at least one via layer, and the metal layers and the via layers are alternately stacked; the metal layer is a linear continuous concave-convex structure, and the through hole layer comprises at least one through hole column.
The invention provides an inner electrode of a laminated inductor, which is characterized in that a single-layer coil structure is designed into double layers or multiple layers by changing the structural design of the inductor, each layer is a linear continuous concave-convex structure, the cross section of the single-layer inner electrode is improved on the premise of the same volume, the magnetic flux area of the inductor is improved, and the Q value of the laminated chip inductor is improved.
In a preferred embodiment of the present invention, the continuous concave-convex structure is divided into at least one concave portion and at least one convex portion which alternate with each other.
Preferably, the concave part is rectangular, arc-shaped or trapezoidal.
Preferably, the convex part is rectangular, arc-shaped or trapezoidal.
Preferably, the adjacent concave and convex portions have the same or different shapes, and further preferably, the adjacent concave and convex portions have the same shape.
As a preferable technical solution of the present invention, the concave portion is rectangular or trapezoidal, the convex portion is rectangular or trapezoidal, the formed metal layer is a continuous concave-convex structure having a folded corner, and the through-hole pillar is located at the folded corner of the metal layer.
As a preferable technical scheme of the invention, the concave parts and the convex parts are both arc-shaped, the formed metal layer is of a wave-shaped continuous concave-convex structure, and the through hole columns are positioned at wave crests of the metal layer.
The through hole columns are arranged at the positions with larger curvatures, such as the break angles, the wave crests and the like of the metal layer, and the reason is that electrons are easy to accumulate at the positions, and the electrode impedance can be greatly reduced by arranging the through hole columns at the positions.
In a second aspect, the present invention provides a method for preparing the internal electrode of the first aspect, the method comprising:
coating the casting slurry on a base film, drying to obtain a raw belt, and punching holes on the raw belt according to the positions of through hole columns;
(II) printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
and (III) laminating and pressing according to the sequence of alternately laminating the metal layers and the through hole layers, and then sequentially cutting, removing glue and sintering to obtain the inner electrode.
In a preferred embodiment of the present invention, in step (i), the casting slurry comprises a ceramic powder, a plasticizer, a binder, a dispersant and an organic solvent.
Preferably, the base film is a PET film.
Preferably, the base film has a peel force of 5 to 25g, for example, 5g, 6g, 7g, 8g, 9g, 10g, 11g, 12g, 13g, 14g, 15g, 16g, 17g, 18g, 19g or 20g, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
The thickness of the base film is preferably 38 to 50 μm, and may be 38 μm, 39 μm, 40 μm, 41 μm, 42 μm, 43 μm, 44 μm, 45 μm, 46 μm, 47 μm, 48 μm, 49 μm or 50 μm, for example, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the coating thickness is 10 to 100 μm, and may be, for example, 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, 60 μm, 80 μm, 90 μm or 100 μm, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
As a preferred technical solution of the present invention, the step (ii) further comprises: and spraying glue on the printed electrode surface of the single-layer inner electrode and drying.
Preferably, the glue adopted by the glue spraying is a diluent of the adhesive.
As a preferred technical solution of the present invention, in the step (iii), the pressing adopts an isostatic pressing process.
Preferably, the isostatic pressure is 10 to 50MPa, and may be, for example, 10MPa, 15MPa, 20MPa, 25MPa, 30MPa, 35MPa, 40MPa, 45MPa or 50MPa, but is not limited to the recited values, and other values not recited in the numerical range are also applicable.
Preferably, the time of the isostatic pressing is 10-30 min, for example, 10min, 12min, 14min, 16min, 18min, 20min, 22min, 24min, 26min, 28min or 30min, but is not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the temperature of the isostatic pressing is 60 to 90 ℃, for example, 60 ℃, 62 ℃, 64 ℃, 66 ℃, 68 ℃, 70 ℃, 72 ℃, 74 ℃, 76 ℃, 78 ℃, 80 ℃, 82 ℃, 84 ℃, 88 ℃, 89 ℃ or 90 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the binder removal temperature is 350 to 450 ℃, for example 350 ℃, 360 ℃, 370 ℃, 380 ℃, 390 ℃, 400 ℃, 410 ℃, 420 ℃, 430 ℃, 440 ℃ or 450 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the heat preservation time of the binder removal is 8-12 h, for example, 8.0h, 8.5h, 9.0h, 9.5h, 10.0h, 10.5h, 11.0h, 11.5h or 12.0h, but is not limited to the enumerated values, and other non-enumerated values in the numerical range are also applicable.
Preferably, the sintering temperature is 800 to 950 ℃, for example 800 ℃, 810 ℃, 820 ℃, 830 ℃, 840 ℃, 850 ℃, 860 ℃, 870 ℃, 880 ℃, 890 ℃, 900 ℃, 910 ℃, 920 ℃, 930 ℃, 940 ℃ or 950 ℃, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the heat preservation time for the sintering is 0.5 to 2.5 hours, for example, 0.5 hour, 0.6 hour, 0.7 hour, 0.8 hour, 0.9 hour, 1.0 hour, 1.1 hour, 1.2 hour, 1.3 hour, 1.4 hour, 1.5 hour, 1.6 hour, 1.7 hour, 1.8 hour, 1.9 hour, 2.0 hour, 2.1 hour, 2.2 hour, 2.3 hour, 2.4 hour or 2.5 hour, but is not limited to the enumerated values, and other non-enumerated values in the numerical range are also applicable.
In a third aspect, the present invention provides a laminated inductor, which includes a substrate, an external lead-in electrode, an external lead-out electrode, and the internal electrode of the first aspect, wherein the internal electrode is embedded in the substrate, and the external lead-in electrode and the external lead-out electrode are respectively disposed at two ends of the substrate and respectively connected to two ends of the internal electrode.
As a preferable aspect of the present invention, the multilayer inductor is a high-Q multilayer inductor.
It should be noted that the invention of the present invention is directed to a multilayer structure (continuous concave-convex structure) of internal electrodes and a method for manufacturing the same, and other structures of a multilayer inductor are well known to those skilled in the art and are not within the scope of the present invention and the disclosure thereof, and therefore, the method for manufacturing other structures besides the internal electrodes is also within the prior art.
Illustratively, the invention provides a complete set of laminated inductor preparation processes, specifically comprising the steps of:
(1) preparing materials: uniformly mixing ceramic powder, a plasticizer, an adhesive, a dispersant and an organic solvent according to a certain proportion to form casting slurry;
(2) casting: uniformly coating the casting slurry on a PET film with the thickness of 38-50 mu m, wherein the peeling force of the PET film is 5-25 g, the coating thickness is 10-100 mu m, and drying to obtain a raw belt;
(3) slicing and punching: cutting the raw belt into 6 inches, and punching holes on the raw belt according to the positions of the through hole columns;
(4) manufacturing an inner electrode: printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
(5) spraying glue: spraying glue on the printing electrode surface of the single-layer inner electrode by using diluent of the adhesive and drying;
(6) laminating: stacking the blank green tape and the single-layer inner electrode according to a design sequence, and pressing to form a bar block, wherein three layers are stacked in total;
(7) isostatic pressing: placing the blocks into a vacuum plastic package bag for plastic package, placing the vacuum plastic package bag into an isostatic pressing machine for pressing again to obtain a finished product of the bar, wherein the isostatic pressing pressure is 10-50 MPa, the time is 10-30 min, and the temperature is 60-90 ℃;
(8) cutting: cutting the whole product into single products with the size of 0.4 multiplied by 0.2mm according to cutting lines;
(9) and (3) binder removal and sintering: heating a single product to 350-450 ℃, preserving heat for 8-12 h to complete binder removal, and then sintering to densify, wherein the sintering temperature is 800-950 ℃, and the preserving heat time is 0.5-2.5 h;
(10) preparing a terminal electrode: chamfering, silver staining, silver burning and electroplating treatment are carried out on the sintered semi-finished product, so that the lead-in outer electrode and the lead-out outer electrode are communicated with the coil, and the sintered semi-finished product has good weldability and welding resistance;
(11) and (3) testing: and (5) carrying out an electrical property test on the product.
It should be noted that the above steps do not limit the scope of the present invention, but the preparation process of the inner electrode included in the above steps is the scope of the present invention, and other process steps and process parameters may be replaced or adapted according to the actual situation, and the new technical solution obtained after replacement or adjustment still falls within the scope of the present invention.
Compared with the prior art, the invention has the beneficial effects that:
the invention provides an inner electrode of a laminated inductor, which is characterized in that a single-layer coil structure is designed into double layers or multiple layers by changing the structural design of the inductor, each layer is a linear continuous concave-convex structure, the cross section of the single-layer inner electrode is improved on the premise of the same volume, the magnetic flux area of the inductor is improved, and the Q value of the laminated chip inductor is improved.
Drawings
Fig. 1 is a schematic structural diagram of a stacked inductor provided in embodiment 1 of the present invention;
fig. 2 is a Q-value comparison graph of the multilayer inductors provided in example 1, example 7 and comparative example 1 of the present invention.
Wherein, 1-a substrate; 2-introducing an outer electrode; 3-leading out an outer electrode; 4-an inner electrode; 5-a first metal layer; 6-a first via layer; 7-a second metal layer; 8-a second via layer; 9-third metal layer.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Example 1
The embodiment provides a laminated inductor, which is shown in fig. 1 and comprises a base body, an external lead-in electrode, an external lead-out electrode and an internal electrode, wherein the internal electrode is embedded in the base body, and the external lead-in electrode and the external lead-out electrode are respectively arranged at two ends of the base body and are respectively connected with two ends of the internal electrode.
The internal electrode includes a first metal layer, a first via layer, a second metal layer, a second via layer, and a third metal layer stacked in sequence, where the first metal layer, the second metal layer, and the third metal layer have the same structure and are all linear city-wall-like structures (i.e., the concave portions and the convex portions in the continuous concave-convex structure are both rectangular). The number of the through hole columns included in the first through hole layer and the second through hole layer is the same, the positions of the through hole columns correspond to those of the through hole columns, and the through hole columns are located at the corners of the city-like wall-shaped structure.
The first metal layer is connected with the second metal layer through each through hole column in the first through hole layer, the second metal layer is connected with the third metal layer through each through hole column in the second through hole layer, and the left and right ports of the first metal layer, the second metal layer and the third metal layer are respectively connected with the leading-in external electrode and the leading-out external electrode.
Example 2
The invention provides a preparation method of a laminated inductor in embodiment 1, which specifically comprises the following steps:
(1) preparing materials: uniformly mixing ceramic powder with a plasticizer (isopropanolamine), an adhesive (polyvinyl alcohol), a dispersant (hexanediol) and an organic solvent (alcohol ether) according to a certain proportion to form casting slurry, wherein 6 parts of the adhesive, 50 parts of the organic solvent, 3 parts of the plasticizer, 2 parts of the dispersant and 40 parts of the ceramic powder;
(2) casting: uniformly coating the casting slurry on a PET film with the thickness of 50 mu m, wherein the peeling force of the PET film is 10g, the coating thickness is 50 mu m, and drying to obtain a raw belt;
(3) slicing and punching: cutting the raw belt into 6 inches, and punching holes on the raw belt according to the positions of the through hole columns;
(4) manufacturing an inner electrode: printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
(5) spraying glue: spraying glue on the printing electrode surface of the single-layer inner electrode by using diluent of the adhesive and drying;
(6) laminating: stacking the blank green tape and the single-layer inner electrode according to a design sequence, and pressing to form a bar block, wherein three layers are stacked in total;
(7) isostatic pressing: placing the blocks into a vacuum plastic packaging bag for plastic packaging, and placing the vacuum plastic packaging bag into an isostatic pressing machine for pressing again to obtain a finished product, wherein the isostatic pressing pressure is 30MPa, the time is 20min, and the temperature is 70 ℃;
(8) cutting: cutting the whole product into single products with the size of 0.4 multiplied by 0.2mm according to cutting lines;
(9) and (3) binder removal and sintering: heating a single product to 400 ℃, preserving heat for 10 hours to finish glue discharging, and then sintering to densify the product, wherein the sintering temperature is 880 ℃, and the preserving heat time is 1 hour;
(10) preparing a terminal electrode: chamfering, silver staining, silver burning and electroplating treatment are carried out on the sintered semi-finished product, so that the lead-in outer electrode and the lead-out outer electrode are communicated with the coil, and the sintered semi-finished product has good weldability and welding resistance;
(11) and (3) testing: and (5) carrying out an electrical property test on the product.
The size of the laminated inductor prepared by the method is 0.4mm multiplied by 0.2mm multiplied by 0.15mm, the line width of the internal electrode is 30 mu m, the line spacing of the internal electrode is 30 mu m, the thickness of the internal electrode line is 10 mu m, and the inductance is 0.3 nH.
Example 3
The invention provides a preparation method of a laminated inductor in embodiment 1, which specifically comprises the following steps:
(1) preparing materials: uniformly mixing ceramic powder with a plasticizer (1, 3-propylene glycol), an adhesive (polyvinyl alcohol), a dispersant (acrylamide) and an organic solvent (alcohol ether) according to a certain proportion to form casting slurry, wherein the adhesive is 8 parts, the organic solvent is 50 parts, the plasticizer is 4 parts, the dispersant is 2 parts, and the ceramic powder is 45 parts;
(2) casting: uniformly coating the casting slurry on a PET film with the thickness of 38 mu m, wherein the peeling force of the PET film is 5g, the coating thickness is 10 mu m, and drying to obtain a raw belt;
(3) slicing and punching: cutting the raw belt into 6 inches, and punching holes on the raw belt according to the positions of the through hole columns;
(4) manufacturing an inner electrode: printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
(5) spraying glue: spraying glue on the printing electrode surface of the single-layer inner electrode by using diluent of the adhesive and drying;
(6) laminating: stacking the blank green tape and the single-layer inner electrode according to a design sequence, and pressing to form a bar block, wherein three layers are stacked in total;
(7) isostatic pressing: placing the blocks into a vacuum plastic packaging bag for plastic packaging, and placing the vacuum plastic packaging bag into an isostatic pressing machine for pressing again to obtain a finished product, wherein the isostatic pressing pressure is 10MPa, the time is 30min, and the temperature is 60 ℃;
(8) cutting: cutting the whole product into single products with the size of 0.4 multiplied by 0.2mm according to cutting lines;
(9) and (3) binder removal and sintering: heating a single product to 350 ℃, preserving heat for 12 hours to finish glue discharging, and then sintering to densify the product, wherein the sintering temperature is 800 ℃, and the preserving heat time is 0.5 hour;
(10) preparing a terminal electrode: chamfering, silver staining, silver burning and electroplating treatment are carried out on the sintered semi-finished product, so that the lead-in outer electrode and the lead-out outer electrode are communicated with the coil, and the sintered semi-finished product has good weldability and welding resistance;
(11) and (3) testing: and (5) carrying out an electrical property test on the product.
The size of the laminated inductor prepared by the method is 0.4mm multiplied by 0.2mm multiplied by 0.15mm, the line width of the internal electrode is 60 mu m, the line spacing of the internal electrode is 20 mu m, the thickness of the internal electrode line is 15 mu m, and the inductance is 0.3 nH.
Example 4
The invention provides a preparation method of a laminated inductor in embodiment 1, which specifically comprises the following steps:
(1) preparing materials: uniformly mixing ceramic powder, a plasticizer (1, 3-propylene glycol), an adhesive (polyvinyl alcohol), a dispersant (hexanediol) and an organic solvent (n-butyl alcohol) according to a certain proportion to form casting slurry, wherein the adhesive is 5 parts, the organic solvent is 40 parts, the plasticizer is 2 parts, the dispersant is 0.5 part, and the ceramic powder is 40 parts;
(2) casting: uniformly coating the casting slurry on a PET film with the thickness of 40 mu m, wherein the peeling force of the PET film is 15g, the coating thickness is 30 mu m, and drying to obtain a raw belt;
(3) slicing and punching: cutting the raw belt into 6 inches, and punching holes on the raw belt according to the positions of the through hole columns;
(4) manufacturing an inner electrode: printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
(5) spraying glue: spraying glue on the printing electrode surface of the single-layer inner electrode by using diluent of the adhesive and drying;
(6) laminating: stacking the blank green tape and the single-layer inner electrode according to a design sequence, and pressing to form a bar block, wherein three layers are stacked in total;
(7) isostatic pressing: placing the blocks into a vacuum plastic packaging bag for plastic packaging, and placing the vacuum plastic packaging bag into an isostatic pressing machine for pressing again to obtain a finished product, wherein the isostatic pressing pressure is 20MPa, the time is 25min, and the temperature is 75 ℃;
(8) cutting: cutting the whole product into single products with the size of 0.4 multiplied by 0.2mm according to cutting lines;
(9) and (3) binder removal and sintering: heating a single product to 380 ℃, preserving heat for 11h to finish glue discharging, and then sintering to densify the product, wherein the sintering temperature is 850 ℃, and the preserving heat time is 1.5 h;
(10) preparing a terminal electrode: chamfering, silver staining, silver burning and electroplating treatment are carried out on the sintered semi-finished product, so that the lead-in outer electrode and the lead-out outer electrode are communicated with the coil, and the sintered semi-finished product has good weldability and welding resistance;
(11) and (3) testing: and (5) carrying out an electrical property test on the product.
The size of the laminated inductor prepared by the method is 0.4mm multiplied by 0.2mm multiplied by 0.15mm, the line width of the internal electrode is 50 mu m, the space between the internal electrode lines is 40 mu m, the thickness of the internal electrode lines is 20 mu m, and the inductance is 0.3 nH.
Example 5
The invention provides a preparation method of a laminated inductor in embodiment 1, which specifically comprises the following steps:
(1) preparing materials: uniformly mixing ceramic powder, a plasticizer (isopropanolamine), an adhesive (polyvinyl alcohol), a dispersant (hexanediol) and an organic solvent (n-butyl alcohol) according to a certain proportion to form casting slurry, wherein 4 parts of the adhesive, 40 parts of the organic solvent, 1.5 parts of the plasticizer, 0.5 part of the dispersant and 32 parts of the ceramic powder;
(2) casting: uniformly coating the casting slurry on a PET film with the thickness of 43 mu m, wherein the peeling force of the PET film is 20g, the coating thickness is 70 mu m, and drying to obtain a raw belt;
(3) slicing and punching: cutting the raw belt into 6 inches, and punching holes on the raw belt according to the positions of the through hole columns;
(4) manufacturing an inner electrode: printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
(5) spraying glue: spraying glue on the printing electrode surface of the single-layer inner electrode by using diluent of the adhesive and drying;
(6) laminating: stacking the blank green tape and the single-layer inner electrode according to a design sequence, and pressing to form a bar block, wherein three layers are stacked in total;
(7) isostatic pressing: placing the blocks into a vacuum plastic packaging bag for plastic packaging, placing the vacuum plastic packaging bag into an isostatic pressing machine for pressing again to obtain a finished product, wherein the isostatic pressing pressure is 40MPa, the time is 15min, and the temperature is 80 ℃;
(8) cutting: cutting the whole product into single products with the size of 0.4 multiplied by 0.2mm according to cutting lines;
(9) and (3) binder removal and sintering: heating a single product to 430 ℃, preserving heat for 9 hours to finish glue discharging, and then sintering to densify the product, wherein the sintering temperature is 930 ℃, and the heat preservation time is 2 hours;
(10) preparing a terminal electrode: chamfering, silver staining, silver burning and electroplating treatment are carried out on the sintered semi-finished product, so that the lead-in outer electrode and the lead-out outer electrode are communicated with the coil, and the sintered semi-finished product has good weldability and welding resistance;
(11) and (3) testing: and (5) carrying out an electrical property test on the product.
The size of the laminated inductor prepared by the method is 0.4mm multiplied by 0.2mm multiplied by 0.15mm, the line width of the internal electrode is 30 mu m, the line spacing of the internal electrode is 30 mu m, the thickness of the internal electrode line is 10 mu m, and the inductance is 0.3 nH.
Example 6
The invention provides a preparation method of a laminated inductor in embodiment 1, which specifically comprises the following steps:
(1) preparing materials: uniformly mixing ceramic powder, a plasticizer (1, 3-propylene glycol), an adhesive (polyvinyl alcohol), a dispersant (hexanediol) and an organic solvent (n-butyl alcohol) according to a certain proportion to form casting slurry, wherein 9 parts of the adhesive, 60 parts of the organic solvent, 5 parts of the plasticizer, 2.5 parts of the dispersant and 50 parts of the ceramic powder;
(2) casting: uniformly coating the casting slurry on a PET film with the thickness of 45 mu m, wherein the peeling force of the PET film is 25g, the coating thickness is 100 mu m, and drying to obtain a raw belt;
(3) slicing and punching: cutting the raw belt into 6 inches, and punching holes on the raw belt according to the positions of the through hole columns;
(4) manufacturing an inner electrode: printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
(5) spraying glue: spraying glue on the printing electrode surface of the single-layer inner electrode by using diluent of the adhesive and drying;
(6) laminating: stacking the blank green tape and the single-layer inner electrode according to a design sequence, and pressing to form a bar block, wherein three layers are stacked in total;
(7) isostatic pressing: placing the blocks into a vacuum plastic packaging bag for plastic packaging, placing the vacuum plastic packaging bag into an isostatic pressing machine for pressing again to obtain a finished product, wherein the isostatic pressing pressure is 50MPa, the time is 10min, and the temperature is 90 ℃;
(8) cutting: cutting the whole product into single products with the size of 0.4 multiplied by 0.2mm according to cutting lines;
(9) and (3) binder removal and sintering: heating a single product to 450 ℃, preserving heat for 8 hours to finish glue discharging, and then sintering to densify the product, wherein the sintering temperature is 950 ℃, and the preserving heat time is 2.5 hours;
(10) preparing a terminal electrode: chamfering, silver staining, silver burning and electroplating treatment are carried out on the sintered semi-finished product, so that the lead-in outer electrode and the lead-out outer electrode are communicated with the coil, and the sintered semi-finished product has good weldability and welding resistance;
(11) and (3) testing: and (5) carrying out an electrical property test on the product.
The size of the laminated inductor prepared by the method is 0.4mm multiplied by 0.2mm multiplied by 0.15mm, the line width of the internal electrode is 40 mu m, the line spacing of the internal electrode is 30 mu m, the thickness of the internal electrode line is 13 mu m, and the inductance is 0.3 nH.
Example 7
The present embodiment provides a stacked inductor, which is different from embodiment 1 only in the structure of an internal electrode, in which the internal electrode in the present embodiment includes a first metal layer, a via layer, and a second metal layer stacked in sequence, the first metal layer and the second metal layer are both of a city wall-like structure, and the other structures are completely the same as embodiment 1.
The preparation method of the laminated inductor refers to example 2, wherein the lamination process of step (6) is stacked according to the structure of the laminated inductor, and other operation steps and process parameters are completely the same as those of example 2.
Comparative example 1
The present comparative example provides a stacked inductor, which is different from example 1 only in the structure of the internal electrode, in which the internal electrode includes only one metal layer having a wall-like structure, and the other structure is identical to example 1.
The preparation method of the laminated inductor refers to example 1, wherein the lamination process of step (6) is stacked according to the structure of the laminated inductor, and other operation steps and process parameters are completely the same as those of example 2.
The laminated inductors obtained in examples 2 to 7 and comparative example 1 were tested and the quality factor (Q value) was calculated under the following test conditions: the test frequency was 0.5GHz and the inductance was 0.3 nH.
The Q values of the laminated inductors prepared in example 1, example 7 and comparative example 1 were measured at different test frequencies and calculated to obtain a comparative graph as shown in fig. 2.
TABLE 1
| Testing frequency | Inductance value | Quality factor | |
| Example 2 | 0.5GHz | 0.3nH | 35 |
| Example 3 | 0.5GHz | 0.3nH | 33 |
| Example 4 | 0.5GHz | 0.3nH | 35 |
| Example 5 | 0.5GHz | 0.3nH | 34 |
| Example 6 | 0.5GHz | 0.3nH | 33 |
| Example 7 | 0.5GHz | 0.3nH | 22 |
| Comparative example 1 | 0.5GHz | 0.3nH | 11 |
As can be seen from table 1, the quality factors of the laminated inductors prepared in examples 2 to 7 are all higher than that of comparative example 1, which indicates that the Q value of the inductor is greatly improved by the multi-layer inner electrode structure. In addition, as can also be seen from fig. 2, the three-layer inner electrode structure, the two-layer inner electrode structure and the single-layer inner electrode structure have the highest Q value of the inductor including the three-layer inner electrode structure, the next inductor including the two-layer inner electrode structure, and the worst inductor including the single-layer inner electrode structure.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. The inner electrode of the laminated inductor is characterized by comprising at least one metal layer and at least one through hole layer, wherein the metal layer and the through hole layer are alternately laminated; the metal layer is a linear continuous concave-convex structure, and the through hole layer comprises at least one through hole column.
2. The internal electrode according to claim 1, wherein said continuous relief structure is divided into at least one recess and at least one projection alternating;
preferably, the concave part is rectangular, arc-shaped or trapezoidal;
preferably, the convex part is rectangular, arc-shaped or trapezoidal;
preferably, the adjacent concave and convex portions have the same or different shapes, and further preferably, the adjacent concave and convex portions have the same shape.
3. The internal electrode as claimed in claim 2, wherein the concave portion is rectangular or trapezoidal, the convex portion is rectangular or trapezoidal, the metal layer is formed as a continuous concave-convex structure with folded corners, and the via posts are located at the folded corners of the metal layer.
4. The internal electrode as claimed in claim 2 or 3, wherein the concave portion and the convex portion are both arc-shaped, the metal layer is formed in a wave-shaped continuous concave-convex structure, and the via post is located at a peak of the metal layer.
5. A method for preparing an internal electrode according to any one of claims 1 to 4, comprising:
coating the casting slurry on a base film, drying to obtain a raw belt, and punching holes on the raw belt according to the positions of through hole columns;
(II) printing photosensitive silver paste on the punched green tape by adopting a screen printing process, and exposing and developing to obtain a single-layer internal electrode, wherein the single-layer internal electrode comprises a metal layer and a through hole layer, an electrode pattern is printed on the surface of the metal layer, and the through hole layer is printed at the punched position;
and (III) laminating and pressing according to the sequence of alternately laminating the metal layers and the through hole layers, and then sequentially cutting, removing glue and sintering to obtain the inner electrode.
6. The method according to claim 5, wherein in the step (I), the casting slurry comprises a ceramic powder, a plasticizer, a binder, a dispersant and an organic solvent;
preferably, the base film is a PET film;
preferably, the peeling force of the base film is 5-25 g;
preferably, the thickness of the base film is 38-50 μm;
preferably, the coating thickness is 10-100 μm.
7. The method of claim 5 or 6, wherein step (II) further comprises: spraying glue on the printing electrode surface of the single-layer inner electrode and drying;
preferably, the glue adopted by the glue spraying is a diluent of the adhesive.
8. The method according to any one of claims 5 to 7, wherein in the step (III), the pressing is performed by an isostatic pressing process;
preferably, the pressure of the isostatic pressing is 10-50 MPa;
preferably, the isostatic pressing time is 10-30 min;
preferably, the temperature of the isostatic pressing is 60-90 ℃;
preferably, the glue discharging temperature is 350-450 ℃;
preferably, the heat preservation time of the glue discharging is 8-12 h;
preferably, the sintering temperature is 800-950 ℃;
preferably, the heat preservation time of the sintering is 0.5-2.5 h.
9. A laminated inductor, characterized in that, the laminated inductor comprises a substrate, an external lead-in electrode, an external lead-out electrode and an internal electrode as claimed in any one of claims 1 to 4, the internal electrode is embedded in the substrate, the external lead-in electrode and the external lead-out electrode are respectively arranged at two ends of the substrate and respectively connected with two ends of the internal electrode.
10. The multilayer inductor of claim 9, wherein said multilayer inductor is a high-Q multilayer inductor.
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