CN113359221B - Spectral filter insensitive to incident angle based on dielectric dipole and application - Google Patents
Spectral filter insensitive to incident angle based on dielectric dipole and application Download PDFInfo
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- CN113359221B CN113359221B CN202110649138.4A CN202110649138A CN113359221B CN 113359221 B CN113359221 B CN 113359221B CN 202110649138 A CN202110649138 A CN 202110649138A CN 113359221 B CN113359221 B CN 113359221B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
Abstract
The invention discloses a dielectric dipole-based insensitive spectral filter for incident angle and application thereof, wherein the spectral filter works in visible light wave band and adopts double-polished zinc sulfide as a substrate; the nano structure is designed based on the dipole principle and is formed by a plurality of nano structure units which are arranged in an array manner, the nano structure units are regular polygonal prisms or cylinders, the distance between every two adjacent nano structure units is the same, the nano structure units are 20-80 nanometers, the thickness of all the nano structure units is the same, the nano structure units are 200-600 nanometers, and the nano structure material is any medium with high refractive index and high transmissivity in the visible light range; the maximum transmittance of the spectral filter can reach 100%, the spectral filter is insensitive to incident light within a half angle of 15 degrees, and the spectral transmission curve is kept unchanged under the incident light with a plurality of linear polarization angles.
Description
Technical Field
The invention belongs to the field of imaging equipment and optical devices, and relates to a dielectric dipole-based spectral filter insensitive to an incident angle and application thereof.
Background
The optical filter, which is an optical device, can pass light waves with specific wavelengths or other optical characteristics, and is widely applied to the fields of various imaging devices (such as cameras and displays), various photoelectric sensors (such as signal separators), solar cells, color holographic displays, augmented reality displays and the like. Most of the current filters are manufactured by dyeing or coating techniques, which have the advantage of being very large in size and the disadvantage of being limited by the materials. For example, dyes for dyeing or targets for films are naturally found. And the filter array which can be integrated in the image sensor is manufactured by using the technology, N times of alignment technology is needed, the number of the filters is N, the process is very complex, and the production cost is high. If a problem occurs during the process of manufacturing a certain optical filter, the whole optical filter array is scrapped. The filter based on the dielectric dipole has the characteristic dimension far smaller than the design wavelength, so that the filter can be used for measuring the characteristics of light wave polarization, phase, amplitude and the like, and has important significance in the research and design of optical devices. The existing optical filters designed and manufactured by adopting a super-surface structure have a common defect that the optical characteristics of the optical filters are very sensitive to light rays with different incident angles. And the spectral filter which can be used for measuring objects or light sources and is invented at present can only work under the incident light within 5 degrees of half angle, so that an optical lens with larger f-number is required to limit the incident angle, and the application scene is limited.
Disclosure of Invention
Aiming at the problems, the invention provides a spectral filter insensitive to an incident angle based on a dielectric dipole and application thereof.
The purpose of the invention is realized by the following technical scheme:
according to a first aspect of the present description, there is provided a dielectric dipole-based spectral filter insensitive to incident angle, the spectral filter operating in the visible band, using double-polished zinc sulfide as a substrate; the substrate is provided with a nano structure, the nano structure is composed of a plurality of nano structure units arranged in an array manner, the nano structure units are regular polygonal prisms or cylinders, the distance between every two adjacent nano structure units is the same and is between 20 and 80 nanometers, the thickness of all the nano structure units is the same and is between 200 and 600 nanometers, and the nano structure material is any medium with high refractive index and high transmissivity in the visible light range;
when incident light irradiates on a nano-structure unit with thickness constraint, a dipole effect is generated, and under the distance constraint of adjacent nano-structure units, a dipole coupling effect is generated, so that a spectral transmission curve with a plurality of peaks and troughs and high contrast (usually, the highest contrast is not lower than 60%) is generated.
Further, the nanostructure material is selected from titanium oxide and zinc sulfide, and the refractive index is required to be more than 2.3 in a visible light wave band, and the transmissivity is required to be more than 70% in the visible light wave band.
Further, the substrate is made of a material selected from titanium oxide, zinc sulfide and lithium niobate, and the refractive index of the substrate is required to be greater than 2.3 in a visible light wave band, and the transmissivity of the substrate is required to be greater than 70% in the visible light wave band.
Further, the surface of the nano structure is provided with a protective layer, the material of the protective layer is any medium with low refractive index and high transmissivity in the visible light range, the medium is selected from air, aluminum oxide, magnesium oxide, silicon nitride, silicon carbide, magnesium fluoride, calcium fluoride, barium fluoride and the like, the refractive index is required to be lower than that of the nano structure, and the transmissivity is more than 70% in the visible light wave band.
Further, by changing the materials of the substrate, the nanostructure, and the protective layer, the operating band of the spectral filter can be extended to near infrared and far infrared.
Further, the maximum transmittance of the spectral filter can reach 100%, and the spectral filter is insensitive to incident light within 15 degrees of a half angle, that is, the maximum transmittance and the peak-to-valley contrast reduction are less than 10%, and the spectral transmission curve remains unchanged under incident light of a plurality of linear polarization angles, where the plurality of linear polarization angles include: 0 degree, 60 degrees, 120 degrees, 180 degrees, 240 degrees, 300 degrees.
According to a second aspect of the present specification, there is provided a spectral imaging system comprising a plurality of the above-mentioned dielectric dipole-based spectral filters insensitive to incident angle, each spectral filter setting its spectral transmission curve by changing the distance between the center points of adjacent nanostructure elements; the spectral profile of the object or light source is measured through various spectral filters.
Compared with the prior art, the invention has the following beneficial technical effects:
1. the manufacturing process does not need a micro-nano overlay technology, and the cost is low;
2. the spectral transmission curve is insensitive to the incident light within 15 degrees of half angle, and is suitable for any optical lens with f-number larger than 2;
3. the spectral transmission curve remains unchanged under incident light of a plurality of linear polarization angles, including: 0 degree, 60 degrees, 120 degrees, 180 degrees, 240 degrees, 300 degrees;
4. can be used for measuring the spectral curve of an object or a light source, and the mean square error of the spectral curve recovered by using the spectral filter of the invention and the spectral curve of the original object or the light source under the incident light within 15 degrees of half angle is less than 0.0000026088.
Drawings
FIG. 1 is a perspective view of a dielectric dipole-based spectral filter insensitive to incident angle, using as an example regular hexagonal prism for nanostructure elements;
FIG. 2 is a top view of the spectral filter of FIG. 1;
FIG. 3 is a graph of the spectral transmission of the spectral filter of FIG. 1 at incident angles of 0, 5, 10, and 15 degrees;
fig. 4 is a graph of the spectrum recovered using the spectral filter of the present invention under incident light of 0 degrees, 5 degrees, 10 degrees, and 15 degrees.
Detailed Description
For better understanding of the technical solutions of the present application, the following detailed descriptions of the embodiments of the present application are provided with reference to the accompanying drawings.
It should be understood that the embodiments described are only a few embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terminology used in the embodiments of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the examples of this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
The embodiment of the invention provides a dielectric dipole-based insensitive spectral filter for an incident angle, which works in a visible light wave band (400-; the substrate is provided with a nanostructure. The nano structure is composed of a plurality of nano structure units which are arranged in an array manner, the nano structure units are regular polygonal prisms or cylinders, the distance between every two adjacent nano structure units is the same and is between 20 and 80 nanometers, and the thickness of all the nano structure units is the same and is between 200 and 600 nanometers; the nanostructure material is any medium having a high refractive index and high transmittance in the visible range, and is almost transparent, and thus has less influence between adjacent nanostructure units when incident light has an angle, compared to a metal material; the use of high transmission materials to produce spectral transmission curves has certain conditions, namely the principle of dipole: when the size of the nano-structure units meets a certain condition, electric field and magnetic field dipoles can be generated by the nano-structure units, and coupling can be generated among the nano-structure units.
Taking the spectral filter shown in fig. 1 and 2, which uses regular hexagonal prisms as nanostructure units, as an example, the preparation process is detailed:
first, a common substrate having a refractive index of more than 2.3 in the visible light band and a transmittance of more than 70% in the visible light band is selected according to the operating wavelength, for example: titanium oxide, zinc sulfide, lithium niobate.
Then, a nano structure designed based on a dipole principle is arranged above the substrate, the nano structure is composed of a plurality of nano structure units arranged in an array mode, the nano structure units adopt a regular hexagonal prism structure, materials of the regular hexagonal prism are selected from titanium oxide and zinc sulfide, the refractive index is required to be larger than 2.3 in a visible light wave band, and the transmissivity is required to be larger than 70% in the visible light wave band. The structure of the nanostructure unit can be a regular polygonal prism such as a cylinder, a regular pentagonal prism and the like, in addition to a regular hexagonal prism.
Secondly, with respect to the size, the interval between adjacent regular hexagonal prisms is between 20 and 80 nanometers, and the thickness of all regular hexagonal prisms is the same, between 200 and 600 nanometers.
And finally, plating a protective layer on the surface of the nano structure, wherein the protective layer is made of any medium with low refractive index and high transmissivity in the visible light range, is selected from air, aluminum oxide, magnesium oxide, silicon nitride, silicon carbide, magnesium fluoride, calcium fluoride, barium fluoride and the like, and is required to have the refractive index lower than that of the nano structure, and the transmissivity is more than 70% in the visible light band.
The spectral filter and the common black-and-white image sensor are integrated, and spectral curves of a calculated object and a light source can be measured.
FIG. 3 is a graph of the spectral transmission curves of the spectral filter of FIG. 1 at incident angles of 0 degrees, 5 degrees, 10 degrees, and 15 degrees, wherein the maximum transmission of the 0 degree spectral transmission curve is 10% higher than the maximum transmission of 15 degrees and the transmission contrast (maximum transmission-minimum transmission) is reduced to within 10%, illustrating that the spectral filter of the present invention is insensitive to incident light within 15 degrees of half angle.
Fig. 4 shows the spectral curves recovered by using the spectral filter of the present invention under incident light of 0 degree, 5 degrees, 10 degrees and 15 degrees, and the mean square error from the spectral curve of the original object or light source is less than 0.0000026088.
The above description is only for the purpose of illustrating the preferred embodiments of the one or more embodiments of the present disclosure, and is not intended to limit the scope of the one or more embodiments of the present disclosure, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the one or more embodiments of the present disclosure should be included in the scope of the one or more embodiments of the present disclosure.
Claims (6)
1. A spectral imaging system is characterized by comprising a plurality of spectral filters insensitive to the incident angle based on a dielectric dipole;
the spectral filter works in a visible light wave band, and double-polished zinc sulfide is used as a substrate; the substrate is provided with a nano structure, the nano structure is composed of a plurality of nano structure units arranged in an array manner, the nano structure units are regular polygonal prisms or cylinders, the distance between every two adjacent nano structure units is the same and is between 20 and 80 nanometers, the thickness of all the nano structure units is the same and is between 200 and 600 nanometers, and the nano structure material is any medium with high refractive index and high transmissivity in the visible light range;
when incident light irradiates on a nano structure unit with thickness constraint, a dipole effect is generated, and under the distance constraint of adjacent nano structure units, a dipole coupling effect is generated, so that a spectral transmission curve with a plurality of wave crests and wave troughs and high contrast is generated;
setting a spectral transmission curve of each spectral filter by changing the distance between the central points of adjacent nanostructure units; the spectral profile of the object or light source is measured through various spectral filters.
2. The spectroscopic imaging system of claim 1 wherein the nanostructured material is selected from the group consisting of titanium oxide and zinc sulfide, and wherein the refractive index is greater than 2.3 in the visible wavelength band and the transmission is greater than 70% in the visible wavelength band.
3. The spectral imaging system of claim 1, wherein said substrate is made of a material selected from the group consisting of titanium oxide, zinc sulfide, lithium niobate, and wherein a refractive index greater than 2.3 in the visible light band and a transmittance greater than 70% in the visible light band are desired.
4. Spectral imaging system according to claim 1, characterized in that the nanostructure surface is provided with a protective layer, the material of the protective layer being any medium with low refractive index and high transmittance in the visible range, selected from air, aluminum oxide, magnesium oxide, silicon nitride, silicon carbide, magnesium fluoride, calcium fluoride, barium fluoride, etc., the refractive index being lower than the refractive index of the nanostructure, and the transmittance being higher than 70% in the visible range.
5. The spectral imaging system of claim 1, wherein the spectral filter is operable to extend to near infrared and far infrared by changing the materials of the substrate, the nanostructure, and the protective layer.
6. The spectral imaging system of claim 1, wherein the spectral filter has a maximum transmission of up to 100% and is insensitive to incident light within 15 degrees of half angle, i.e., the maximum transmission and the peak-to-valley contrast decrease are less than 10%, and the spectral transmission curve remains constant for incident light at a plurality of linear polarization angles, the plurality of linear polarization angles comprising: 0 degree, 60 degrees, 120 degrees, 180 degrees, 240 degrees, 300 degrees.
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| KR20100121943A (en) * | 2009-05-11 | 2010-11-19 | 삼성전자주식회사 | Method of fabricatinf photonic crystal type color filter |
| EP3004950A1 (en) * | 2013-06-04 | 2016-04-13 | Danmarks Tekniske Universitet | An optical device capable of providing a structural color, and a corresponding method of manufacturing such a device |
| JP6114164B2 (en) * | 2013-11-12 | 2017-04-12 | 株式会社豊田中央研究所 | Optical filter |
| CN103744138B (en) * | 2013-12-13 | 2015-10-21 | 浙江大学 | The preparation method of the insensitive color filter of a kind of incident angle |
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| CN103168360A (en) * | 2010-10-22 | 2013-06-19 | 立那工业股份有限公司 | Light absorption and filtering properties of vertically oriented semiconductor nano wires |
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