CN113358246B - Sensing assembly, force and torque sensor assembly, robot joint and robot - Google Patents

Sensing assembly, force and torque sensor assembly, robot joint and robot Download PDF

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Publication number
CN113358246B
CN113358246B CN202110670753.3A CN202110670753A CN113358246B CN 113358246 B CN113358246 B CN 113358246B CN 202110670753 A CN202110670753 A CN 202110670753A CN 113358246 B CN113358246 B CN 113358246B
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magnets
hall effect
force
effect sensors
pair
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CN113358246A (en
Inventor
姜皓
李书涵
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Feixi Technology Co ltd
Flexiv Robotics Ltd
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Feixi Technology Co ltd
Flexiv Robotics Ltd
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Priority to CN202110670753.3A priority Critical patent/CN113358246B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/12Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/127Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using inductive means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00Joints
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02Sensing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/16Programme controls
    • B25J9/1694Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028Force sensors associated with force applying means
    • G01L5/0042Force sensors associated with force applying means applying a torque

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)

Abstract

The present application relates to a sensing assembly configured to detect relative movement between a first component and a second component, comprising: a magnet assembly configured to be coupled to the first member; and a pair of hall effect sensors configured to be coupled to the second member, wherein the pair of hall effect sensors are configured to produce substantially the same signal change in response to a first relative movement between the pair of hall effect sensors and the magnet assembly in a first direction, and to produce substantially the same but opposite signal change in response to a second relative movement between the pair of hall effect sensors and the magnet assembly in a second direction, the first direction being perpendicular to the second direction.

Description

Sensing assembly, force and torque sensor assembly, robot joint and robot
Technical Field
The application relates to the field of sensing technology, in particular to a sensing assembly, a force and torque sensor assembly, a robot joint and a robot.
Background
Hall effect sensors are used in various applications to detect motion or position. The hall effect sensor detects changes in the magnetic field caused by deflection of the structure by a force or torque load and generates an electrical signal responsive to the force or torque load. One sensor assembly known to the applicant uses a set of magnets and a set of hall effect sensors on the same side of the magnets, a configuration commonly used on position encoders. However, since the change in magnetic field strength is nonlinear in some cases relative to the motion between the hall effect sensor and the magnet, this configuration can result in an impact on the linearity of the overall sense signal.
Disclosure of Invention
The present application provides an improved sensing assembly, force and torque sensor assembly, robotic joint and robot.
In one aspect, the present application provides a sensing assembly configured to detect relative movement between a first component and a second component, comprising a magnet assembly configured to be coupled to the first component; and a pair of hall effect sensors configured to be coupled to the second member. The pair of hall effect sensors are configured to produce substantially the same signal variation in response to a first relative movement between the pair of hall effect sensors and the magnet assembly in a first direction, and to produce substantially the same but opposite signal variation in response to a second relative movement between the pair of hall effect sensors and the magnet assembly in a second direction, the first direction being perpendicular to the second direction.
In some embodiments, a pair of hall effect sensors are located on opposite sides of the magnet assembly, respectively.
In some embodiments, the magnet assembly comprises a single magnet having a magnetization direction substantially perpendicular to a line connecting the pair of hall effect sensors.
In some embodiments, the magnet assembly comprises a single magnet having a magnetization direction substantially parallel to a line connecting the pair of hall effect sensors.
In some embodiments, the magnet assembly includes at least two magnets arranged side-by-side with the magnetization directions of the magnets alternately opposite and each substantially parallel to the line connecting the pair of hall effect sensors.
In some embodiments, the magnet assembly includes a first set of magnets and a second set of magnets, with a pair of hall effect sensors located between the first set of magnets and the second set of magnets.
In some embodiments, the first set of magnets and the second set of magnets each comprise a single magnet, the magnets of the first set of magnets and the magnets of the second set of magnets having the same magnetization direction substantially perpendicular to the line of connection of the pair of hall effect sensors.
In some embodiments, the first set of magnets and the second set of magnets each comprise a single magnet, the magnets of the first set of magnets and the magnets of the second set of magnets having the same magnetization direction substantially parallel to the line connecting the pair of hall effect sensors.
In some embodiments, the first set of magnets and the second set of magnets each include at least two magnets arranged side-by-side, the magnets having alternating opposite magnetization directions and each being substantially parallel to a line of the hall effect sensor, the magnets of the first set of magnets and the magnets of the second set of magnets that lie on the same line that is substantially parallel to the line having the same magnetization direction.
In some embodiments, the detection directions of the pair of hall effect sensors are respectively directed toward the magnet assembly, or have the same detection direction substantially perpendicular to the line connecting the pair of hall effect sensors.
In some embodiments, the apparatus further comprises a magnetically permeable assembly configured to comb the magnetic field of the magnet assembly.
Another aspect of the present application provides a force and torque sensor assembly configured to detect a force or torque applied thereto, comprising: a body including a first member, a second member, and a deformable member connecting the first member and the second member; and at least one sensing assembly according to any of the embodiments of the present application, the sensing assembly being mounted on the body and configured to detect relative movement between the first member and the second member, the at least one sensing assembly comprising a magnet assembly coupled to the first member and a pair of hall effect sensors coupled to the second member.
In some embodiments, the at least one sensing assembly includes two sensing assemblies distributed across the force and torque sensor assemblies, the two sensing assemblies configured to simultaneously produce substantially the same signal change, or substantially equal but opposite signal changes, by a respective pair of hall effect sensors in response to the same force or torque applied to the force and torque sensor assemblies.
In some embodiments, the at least one sensing assembly includes two sensing assemblies distributed across the force and torque sensor assemblies, the two sensing assemblies configured such that in response to a same force or torque applied to the force and torque sensor assemblies, a pair of the hall effect sensors of one produce substantially identical signal changes and a pair of the hall effect sensors of the other produce substantially identical but opposite signal changes.
In some embodiments, the at least one sensing assembly includes two sensing assemblies distributed over the force and torque sensor assemblies, the two sensing assemblies configured to detect relative movement at different locations between the first and second components, respectively.
Yet another aspect of the present application provides a robotic joint comprising a force and torque sensor assembly according to any of the embodiments of the present application.
A further aspect of the present application provides a robot comprising a robot joint according to any of the embodiments of the present application.
The details of one or more embodiments of the invention are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the invention will be apparent from the description and drawings, and from the claims.
Drawings
The present application and other features will be more readily understood from the following detailed description of the various aspects of the application taken in conjunction with the accompanying drawings that depict various embodiments of the application, in which:
FIG. 1 is a perspective view of a force and torque sensor assembly according to one embodiment of the present application;
FIG. 2 is a side view of the force and torque sensor assembly of FIG. 1;
FIG. 3 illustrates an exemplary distribution of sensing assemblies of the force and torque sensor assembly of one embodiment of the present application;
FIG. 4 is a schematic view of a force and torque sensor assembly of one embodiment of the present application, showing the sensing assembly mounted on a body;
FIG. 5 is a schematic view of a force and torque sensor assembly of another embodiment of the present application, showing the sensing assembly mounted on a body;
FIG. 6 is a schematic diagram of a sensing assembly according to one embodiment of the present application;
FIG. 7 is a schematic diagram of a sensing assembly according to another embodiment of the present application;
FIG. 8 is a schematic diagram of a sensing assembly according to another embodiment of the present application;
FIG. 9 is a schematic structural view of a sensing assembly according to another embodiment of the present application;
FIG. 10 is a schematic structural view of a sensing assembly according to another embodiment of the present application;
FIG. 11 is a schematic structural view of a sensing assembly according to another embodiment of the present application;
FIG. 12 is a schematic structural view of a sensing assembly according to another embodiment of the present application;
FIG. 13 is a schematic structural view of a sensing assembly according to another embodiment of the present application;
fig. 14 is a schematic view of a robot according to an embodiment of the present application.
It should be noted that the drawings of the present application are not to scale and are intended to depict only typical aspects of the application and therefore should not be considered as limiting the scope of the application.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
The present application provides a force and torque sensor assembly for detecting a force or torque applied thereto. The force and torque sensor assembly includes a body and at least one sensing assembly. The body includes a first member, a second member, and a deformable member connecting the first member and the second member. At least one sensing assembly is mounted on the body to detect relative movement between the first and second components. The at least one sensing assembly includes a magnet assembly coupled to the first component and a pair of hall effect sensors coupled to the second component. The pair of hall effect sensors are configured to produce substantially the same signal variation in response to a first relative movement between the pair of hall effect sensors and the magnet assembly in a first direction and to produce substantially the same but opposite signal variation in response to a second relative movement between the pair of hall effect sensors and the magnet assembly in a second direction. Wherein the first direction is perpendicular to the second direction.
The force and torque sensor assembly of the present application will be described in detail below with reference to various embodiments. FIG. 1 is a perspective view of an exemplary force and torque sensor assembly 10 according to one embodiment of the present application. Fig. 2 is a side view of the force and torque sensor assembly 10 shown in fig. 1. In this embodiment, the force and torque sensor assembly 10 includes a body 20 and a plurality of sensing assemblies 30 mounted on the body 20. The body 20 includes a first member 21, a second member 22, and a plurality of deformable members 23 disposed between the first member 21 and the second member 22 and connecting the first member 21 and the second member 22. The first member 21 and the second member 22 may have, for example, a disk-like structure. When either the first member 21 or the second member 22 is subjected to a force or torque, the deformable member 23 is elastically deformed, and a relative movement (hereinafter referred to as "movement" or "relative movement") occurs between the first member 21 and the second member 22. The sensing assembly 30 is configured to detect relative movement between the first and second members 21, 22. From the detected relative movement and the characteristics of the deformable member 23, the force or torque exerted on the first member 21 or the second member 22 can be determined. The basic structure of an exemplary force and torque sensor assembly may be found in applicant's previous patent application (U.S. patent application No. 16/456562), the contents of which are incorporated herein by reference.
Referring to FIG. 3, in one embodiment, a plurality of sensing assemblies 30 are circumferentially distributed over the force and torque sensor assembly 10. Each sensing assembly 30 includes a magnet assembly 31 coupled to the first member 21 and a pair of hall effect sensors 32 coupled to the second member 22. Referring to the exemplary configuration shown in fig. 4, the magnet assembly 31 is mounted on two first mounting legs 210 extending from the first member 21 and a pair of hall effect sensors 32 are mounted on a second mounting leg 220 extending from the second member 22. The second mounting leg 220 is positioned between the two first mounting legs 210 such that the sensing assembly 30 can be configured as shown in fig. 6-9. Referring to another exemplary configuration shown in fig. 5, the magnet assembly 31 is mounted on a first mounting leg 210 extending from the first member 21, and a pair of hall effect sensors 32 are mounted on two second mounting legs 220 extending from the second member 22, respectively. The first mounting leg 210 is positioned between the two second mounting legs 220 such that the sensing assembly 30 can be configured as shown in fig. 10-13. According to the embodiment shown in fig. 4-5, the two hall effect sensors 32 of the sensing assembly 30 are connected to each other by being fixed to the same component (i.e., the second component 22) so as to be movable in synchronization. Similarly, in the embodiment shown in fig. 4, the two sets of magnets of the magnet assembly 31 are connected to each other by being fixed to the same part (i.e., the first part 21), and thus synchronous movement is achieved.
It should be understood that the embodiments shown in fig. 1-5 are illustrative only and that the configuration of the force and torque sensor assembly of the present application may be configured in different ways. For example, in one embodiment, the first and second components of the force and torque sensor assembly may be inner and outer rings, respectively, and thus arranged in an inner and outer configuration, as opposed to the upper and lower configurations shown in fig. 1-3. In one embodiment, the force and torque sensor assembly may have only one set of sensing assemblies to detect force or torque in one direction. In other embodiments, other numbers of sensing assemblies, e.g., greater than six, are included in the force and torque sensor assemblies to enable redundant measurements.
Fig. 6-13 illustrate configurations of sensing assembly 30 according to various embodiments, respectively. For ease of illustration, each exemplary sensing assembly 30 is described in connection with a respective Cartesian coordinate system having X, Y and Z axes perpendicular to each other.
It will be appreciated by those of ordinary skill in the art that the hall effect sensor 32 may be calibrated in advance so that the output of the hall effect sensor is zero, for example, when the force and torque sensor assembly 10 is not subject to any force or torque.
In the embodiment shown in fig. 6-9, a pair of hall effect sensors are located on opposite sides of the magnet assembly. Referring to the sensing assembly 30a shown in fig. 6, the detection directions of a pair of hall effect sensors 32a are each directed toward the magnet assembly 31a so as to detect a magnetic flux component change in the Z direction, i.e., the detection directions of the two hall effect sensors 32a are opposite. In this embodiment, the magnet assembly 31a comprises a single magnet having a magnetization direction perpendicular to the line connecting the pair of hall effect sensors 32 a. With this configuration, relative movement between the hall effect sensor 32a and the magnet assembly 31a in the X-direction brings about the same magnetic field variation to the pair of hall effect sensors 32a, and thus the pair of hall effect sensors 32a produce the same signal variation in response to relative movement between the hall effect sensor 32a and the magnet assembly 31a in the X-direction. Conversely, relative movement in the Z direction causes a different magnetic field change to a pair of Hall effect sensors 32a, for example, when one of the Hall effect sensors 32a may induce more magnetic flux in its sense direction and the other Hall effect sensor 32a induces less magnetic flux in its sense direction. Thus, relative movement between the hall effect sensors 32a and the magnet assembly 31a in the Z direction will cause a pair of hall effect sensors 32a to produce substantially equal but opposite signal changes.
Thus, if the sensing assembly 30a is configured to detect a dominant relative motion in the X-direction, an averaging method may be used. Specifically, by adding the signals of the two hall effect sensors 32a, the sensor signals caused by the relative movement between the hall effect sensors 32a and the magnet assembly 31a in the X-direction are combined (i.e., twice the signal caused by a single hall effect sensor), while the sensor signals caused by the relative movement in the Z-direction can be offset or reduced from each other. Thus, a relatively clean linear signal can be obtained, which is only affected by the relative movement in the X-direction. Of course, if the primary relative motion detected by the sensing assembly 30a is in the Z direction, a difference method may be used instead of the averaging method mentioned above. Specifically, by subtracting the sensor signals, the sensor signals caused by the relative movement in the Z direction are combined, and the sensor signals caused by the relative movement in the X direction can be canceled or reduced from each other. It should be noted that while the sensor signal for detecting Z-direction motion may not be as linear as the signal for detecting X-direction motion, the sensing assembly 30a is still able to detect Z-direction relative motion between the hall effect sensor 32a and the magnet assembly 31 a.
Reference is made to the sensing assembly 30b shown in fig. 7, wherein the hall effect sensors 32b have the same sense direction that is perpendicular to the line connecting the two hall effect sensors 32b (i.e., along the X-direction) in order to sense the change in the magnetic flux component in the X-direction. The magnet assembly 31b includes a single magnet having a magnetization direction parallel to the line connecting the pair of hall effect sensors 32b (e.g., two poles of the magnet face the respective hall effect sensors 32 b). Based on this configuration, the relative movement between the hall-effect sensors 32b and the magnet assembly 31b in the X-direction enables both hall-effect sensors 32b to sense the same change in magnetic flux density while the sensed magnetic flux directions are opposite. Thus, relative movement in the X direction causes a pair of Hall effect sensors 32b to generate substantially equal but opposite sensor signals. Conversely, relative movement between the hall-effect sensors 32b and the magnet assembly 31b in the Z-direction causes the two hall-effect sensors 32b to sense opposite changes in magnetic flux density, as well as opposite directions of magnetic flux. Thus, relative movement in the Z direction causes a pair of Hall effect sensors 32b to produce substantially identical sensor signals.
Thus, if the sensing assembly 30b is configured to detect primary relative motion in the X-direction, a differential approach may be used. Specifically, by subtracting the sensor signals, the sensor signals caused by the relative movement in the X direction are combined, and the sensor signals caused by the relative movement in the Z direction can be canceled or reduced from each other. Thus, a clean linear signal can be obtained, which is only affected by the relative movement in the X-direction. If the primary relative motion to be detected is in the Z direction, averaging may be used instead. By combining the signals of the two hall effect sensors 32b, the sensor signals caused by the relative movement in the Z direction are combined, while the sensor signals caused by the relative movement in the X direction can be mutually offset or reduced.
The magnet assemblies of the embodiments shown in fig. 8 and 9 each include a plurality of magnets arranged side-by-side with alternating opposite magnetization directions, each parallel to the line connecting a pair of hall effect sensors. Referring to the sensing assembly 30c in fig. 8, the detection directions of a pair of hall effect sensors 32c are each directed toward the magnet assembly 31c so as to detect a change in the magnetic flux component in the Z direction. The magnet assembly 31c includes two magnets having opposite magnetization directions, each of which is parallel to the line connecting a pair of hall effect sensors 32c (e.g., two poles of each magnet respectively face the corresponding hall effect sensor 32 c). Based on this configuration, the relative movement between the hall-effect sensors 32c and the magnet assembly 31c in the X-direction enables both hall-effect sensors 32c to sense the same change in magnetic flux density while the sensed magnetic flux directions are opposite. Thus, relative movement in the X direction causes the Hall effect sensor 32c to generate substantially equal but opposite sensor signals. Conversely, relative movement in the Z direction causes the two Hall effect sensors 32c to sense opposite changes in magnetic flux density, as well as opposite directions of the sensed magnetic flux. Thus, movement in the Z direction causes a pair of Hall effect sensors 32c to generate substantially identical sensor signals.
Thus, if the sensing assembly 30c is configured to detect primary relative motion in the X-direction, a differential approach may be used. Specifically, by subtracting the sensor signals, the sensor signals caused by the relative movement in the X direction are combined, and the sensor signals caused by the relative movement in the Z direction can be canceled or reduced from each other. Thus, a clean linear signal can be obtained, which is only affected by the relative movement in the X-direction. If the primary relative motion to be detected is in the Z direction, averaging may be used instead. By combining the signals of the two hall effect sensors 32c, the sensor signals caused by the relative movement in the Z direction are combined, while the sensor signals caused by the relative movement in the X direction can be cancelled or reduced from each other.
Referring to fig. 9, the sensing assembly 30d is different from the sensing assembly 30c in that the magnet assembly 31d includes three magnets having alternately opposite magnetization directions, and the detection direction of the pair of hall-effect sensors 32d is perpendicular to the line connecting the pair of hall-effect sensors 32d (i.e., in the X direction) so as to detect the change in the magnetic flux component in the X direction. The operation of the sensing assembly 32d is similar to that of the sensing assembly 32c of fig. 8. That is, relative movement between the hall effect sensor 32d and the magnet assembly 31d in the X-direction causes the two hall effect sensors 32d to generate substantially equal but opposite signals, while relative movement in the Z-direction causes the two hall effect sensors 32d to generate substantially the same signals. Thus, by means of a suitable algorithm, the main relative movement in the X-direction or Z-direction can likewise be detected.
It will be appreciated that more magnets with alternating magnetization directions may be used, as well as to detect primary relative motion while eliminating interference from relative motion in other directions. The difference is that more magnets can provide a stronger magnetic field while also possibly bringing about different linearities between the relative motion and the sensor signal.
It should also be noted that the detection direction of the hall sensor and the magnet alignment direction may be different for all of the embodiments shown above, with only two hall effect sensors producing substantially the same signal in response to a first relative movement between the hall effect sensor and the magnet assembly and substantially equal but opposite signals in response to a second relative movement between the hall effect sensor and the magnet assembly perpendicular to the first relative movement. For example, in another embodiment, the detection direction of the hall effect sensor 32a in fig. 6 may be changed to be a forward direction or a reverse direction pointing in the X direction. In this configuration, the two hall effect sensors 32a may likewise produce substantially identical signals in response to relative movement between the hall effect sensors 32a and the magnet assembly 31a in the X-direction, while producing substantially equal but opposite signals in response to relative movement between the hall effect sensors 32a and the magnet assembly 31a in the Z-direction. This configuration may increase the nonlinearity of the sensor to some extent, but is still viable.
In other embodiments, the relative positions between the magnet and the hall sensor 32 may be reversed. Referring to the embodiment shown in fig. 10-13, the magnet assembly includes a first set of magnets and a second set of magnets, and a pair of hall effect sensors are located between the first set of magnets and the second set of magnets. The first set of magnets and the second set of magnets are interconnected (e.g., fixed to the same support structure) to effect movement of the two sets of magnets together.
Referring to the sensing assembly 30e shown in fig. 10, the detection directions of a pair of hall effect sensors 32e are directed toward two sets of magnets 310e, 311e, respectively, so as to detect the magnetic flux component in the Z direction. The first set of magnets 310e and the second set of magnets 311e each comprise a single magnet having the same magnetization direction that is perpendicular to the line connecting the pair of hall effect sensors 32 e. Based on this configuration, relative movement in the X direction causes a pair of hall effect sensors 32e to sense the same change in magnetic flux, thereby producing the same change in signal. While relative movement in the Z direction causes one of the hall effect sensors 32e to sense more magnetic flux in its sense direction and the other to sense less magnetic flux in its sense direction, thereby causing the pair of hall effect sensors 32e to produce substantially equal but opposite signal changes. Thus, if the sensing assembly 30e is configured to detect a dominant relative motion in the X-direction, an averaging method may be used, resulting in a clean linear signal that is only affected by the relative motion in the X-direction. If configured to detect the predominant relative motion in the Z direction, a differential method may be used instead.
Referring to the sensing assembly 30f shown in fig. 11, the hall effect sensors 32f have the same detection direction that is perpendicular to the line connecting the two hall effect sensors 32f (i.e., in the X direction) in order to detect the magnetic flux component in the X direction. The first set of magnets 310f and the second set of magnets 311f each comprise a single magnet having the same magnetization direction that is parallel to the line connecting the pair of hall effect sensors 32 g. Based on this configuration, the relative movement in the X direction causes the pair of hall-effect sensors 32f to sense a change in the same magnetic flux density, while the sensed magnetic flux directions are opposite. Thus, relative movement in the X direction causes a pair of Hall effect sensors 32f to produce substantially equal but opposite signal changes. Conversely, relative movement in the Z direction causes the two Hall effect sensors 32f to sense opposite changes in magnetic flux density, with the sensed magnetic flux also being reversed. Thus, the relative movement in the Z direction causes a pair of Hall effect sensors 32f to produce substantially the same signal change. Thus, if the sensing assembly 30g is configured to detect primary relative motion in the X direction, a differential method may be used to obtain a clean linear signal that is only affected by motion in the X direction. Instead, if relative movement in the Z direction is to be detected, averaging may be used instead.
In the embodiment of fig. 12 and 13, the first set of magnets and the second set of magnets each include a plurality of magnets arranged side-by-side with alternating opposite magnetization directions that are parallel to the line connecting the pair of hall effect sensors. In addition, any two magnets that are located on the same line parallel to the line connecting the two hall effect sensors (i.e., in the Z direction) have the same magnetization direction.
Referring to sensing assembly 30g in fig. 12, first set of magnets 310g and second set of magnets 311g each include two magnets of alternating opposite magnetization directions side-by-side. The detection directions of the pair of hall-effect sensors 32g are directed to the first group magnet 310g and the second group magnet 311g, respectively, so as to detect the change in the magnetic flux component in the Z direction. Based on this configuration, relative movement in the X direction causes the Hall effect sensor 32g to sense the same change in magnetic flux density, while the sensed magnetic flux is reversed, so relative movement in the X direction causes the Hall effect sensor 32g to produce substantially equal but opposite signal changes. Conversely, relative movement in the Z direction causes the two Hall effect sensors 32g to sense opposite changes in magnetic flux density, while the sensed magnetic flux is also in opposite directions, so relative movement in the Z direction causes the Hall effect sensors 32g to produce substantially the same signal changes. Thus, if the sensing assembly 30g is configured to detect primary motion in the X direction, a differential method may be used to obtain a clean linear signal that is only affected by motion in the X direction. Instead, if relative movement in the Z direction is to be detected, averaging may be used instead.
Referring to sensing assembly 30h in fig. 13, first set of magnets 310h and second set of magnets 311h each have three magnets with alternating opposite magnetization directions side by side. The detection direction of a pair of hall-effect sensors 32h is perpendicular to the line connecting the two hall-effect sensors 32h (i.e., in the X direction) so as to detect the magnetic flux component in the X direction. The operation of the sensing assembly 30h is similar to the embodiment of fig. 12 in that relative movement in the X-direction causes the two hall effect sensors 32h to produce substantially equal but opposite signal changes, while relative movement in the Z-direction causes the two hall effect sensors 32h to produce substantially the same signal changes. Thus, by means of a suitable algorithm, the main movement in the X-direction or Z-direction can also be detected.
It will be appreciated that in the arrangement of figures 12-13, more magnets with alternating magnetization directions may be used, all to detect primary relative movement while eliminating interference with relative movement in other directions. The difference is that more magnets can provide a stronger magnetic field while also possibly bringing about different linearities between the relative motion and the sensor signal.
Similar to the embodiments described in fig. 6-9, the detection direction and magnet arrangement direction of the hall sensor may be different for all of the embodiments shown in fig. 10-13, requiring only two hall effect sensors to produce substantially the same signal in response to a first relative movement between the hall effect sensor and the magnet assembly, and substantially equal but opposite signals in response to a second relative movement between the hall effect sensor and the magnet assembly that is perpendicular to the first relative movement. For example, in a different embodiment of the sensing assembly in fig. 10, the detection direction of a pair of hall effect sensors may be changed to be either positive or negative pointing in the X direction. In this configuration, the two hall effect sensors may likewise produce substantially identical signals in response to relative movement between the hall effect sensors and the magnet assembly in the X-direction, and substantially equal but opposite signals in response to relative movement between the hall effect sensors and the magnet assembly in the Z-direction. This configuration may increase the nonlinearity of the sensor to some extent, but is still viable.
In the embodiment shown in fig. 6-13, the two sensors are symmetrically arranged, with the line between them being perpendicular or parallel to the detection direction of the sensors or the magnetization direction of the magnets. However, it will be appreciated that in practice the positions of the two sensors may be slightly offset, i.e. the line connecting the two sensors may be substantially perpendicular or substantially parallel to the detection direction or magnetization direction.
In the configuration of each sensor assembly 30a-30h described above, if the hall effect sensors 32a-32h are not near the edges of the magnets, the edge effect of the magnets in the Y-direction can be ignored, and the magnet-sensor signal characteristics along the Y-direction can be considered to be constant.
According to the above embodiments, the sensing assembly 30 further comprises a magnetically permeable assembly 33 for carding the magnetic field of the magnet assembly 31. The magnetically permeable component 33 may comprise magnetically permeable material including, for example, a metal or alloy having high magnetic permeability, such as cast iron, silicon steel sheet, nickel zinc ferrite, nickel iron alloy, manganese zinc ferrite. In one particular embodiment, the material of the magnetically permeable assembly 33 is carbon steel. The magnetically permeable material may be distributed, for example, on both sides of the magnet and on both sides of the pair of hall effect sensors 32.
According to the various embodiments described above, the sensing assemblies 30a-30h use a pair of hall effect sensors 32a-32h to detect movement in multiple directions. In other embodiments, more pairs of sensors may be used to make more accurate measurements of the load exerted on the force and torque sensor assembly 10.
Cross checking and cross monitoring between multiple sensor signals can be achieved by multiple hall effect sensors, especially if the motion in the non-linear direction is not the dominant motion. Through cross checking and cross monitoring, one or more sensors or magnets can be quickly determined for damage or failure, providing additional operational safety. Multiple sensors may also be used to suppress common mode noise, especially gaussian electrical noise.
According to the embodiment shown in fig. 3, a plurality of sensing assemblies 30 are circumferentially arranged on the force and torque sensor assembly 10. In other embodiments, the sensing assemblies 30 may be arranged in other ways, for example, the sensing assemblies 30 may be randomly distributed between the first and second members 21, 22.
The plurality of sensing assemblies 30 may have the same configuration as any of the sensing assemblies 30a-30h shown in fig. 6-13. The plurality of sensing assemblies 30 may also have different configurations, such as different configurations selected from the sensing assemblies 30a-30h, respectively. Multiple sensing assemblies 30 may be used simultaneously to measure the force or torque applied to the force and torque sensor assembly 10, whereby more accurate results may be obtained by integrating the outputs of the sensing assemblies 30. In a particular embodiment, for example, the two sensing assemblies 30 are configured such that each pair of hall effect sensors produces substantially the same signal change, or substantially equal but opposite signal changes, when responsive to the same force and torque. In another embodiment, one sensing assembly 30 is configured to produce substantially the same signal change for a pair of hall effect sensors and the other sensing assembly 30 is configured to produce substantially the same but opposite signal change for a pair of hall effect sensors when responding to the same force and torque. The same force or torque can be measured simultaneously regardless of the configuration of the two sensing assemblies 30.
Furthermore, by arranging the sensing assembly 30 at different positions on the force and torque sensor assembly 10, the relative displacement between the first and second parts 21, 22 at different positions can be detected. Furthermore, since the plurality of sensing assemblies 30 are installed at different positions, global deflection of the force and torque sensor assembly 10 can be obtained, and thus, the total external force or torque can be determined according to the rigidity of the force and torque sensor assembly 10. For example, shear forces may produce different displacements at different locations, so detection of displacements at different locations will be particularly helpful in detecting the shear forces.
In one embodiment, the plurality of sensing components 30 may have different spatial orientations, whether or not their configurations are identical. For example, a plurality of sensing assemblies 30 in any of the configurations shown in fig. 6-13 may be arranged on the body 20 such that their primary sense directions (e.g., X-direction) are along the axial direction, radial direction, and shear direction, respectively, of the sensor assembly 10. Based on such a configuration, the force and torque sensor assembly 10 is able to detect forces or torques in multiple directions. For example, a force applied perpendicularly to the force and torque sensor assembly 10 may cause a relative motion of a portion of the sensing assembly 30 in the X-direction, so that the portion of the sensing assembly 30 is capable of producing a linear sensor signal and is therefore suitable for measuring the perpendicular force. However, if a torque is applied about the axis of the torque sensor assembly 10, the torque may cause relative movement of the portion of the sensing assembly 30 in a substantially Y-direction, and thus the portion of the sensing assembly 30 may not be suitable for detection of the torque. In this case, a sensing assembly 30 capable of converting torque into X-direction motion is required, and the sensing assembly 30 may be oriented, for example, at 90 degrees to the portion of the sensing assembly 30 described above.
It should be appreciated that the detection direction of the hall effect sensor 32 may vary in various configurations. For example, in the embodiment shown in fig. 6, the sensing direction of the hall effect sensor 32 may be changed to be parallel to the magnetization direction of the magnet assembly 31. In the case where the detection direction of the hall effect sensor 32 is changed, linearity may thus be affected as well.
It is to be understood that the sensing assembly of the present application is not limited to detecting force or torque as described above, but may be used in other various applications where motion or displacement needs to be detected.
It should be noted that the term "identical" or "equal" describing a sensor signal change or a magnetic flux change in this application is not meant to indicate that the signal change or the magnetic flux change is exactly the same or exactly the same, but may deviate slightly depending on the reason such as the distribution of the magnetic flux. It should also be noted that the terms "linear", "linearity" describing the relationship between the sensor signal and the motion do not mean that the signal variation with respect to the motion is entirely linear.
The application also provides a robot and a robot joint for the robot. The robotic joint includes a force and torque sensor assembly 10 according to any of the embodiments described above.
Fig. 14 shows an exemplary robot 100 comprising an arm 101 and a robot joint 102 connecting adjacent arms 101. The robotic joint 102 has a force and torque sensor assembly, and the first and second components of the force and torque sensor assembly may be connected to two adjacent arms 101, respectively, for example.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof. "optional" or "optionally" means that the subsequently described event or circumstance may or may not occur, and that the description includes instances where the event occurs and instances where it does not.
Approximating language, as used herein throughout the specification and claims, may be applied to modify any quantitative representation that could vary without resulting in a change in the basic function to which it is related. Accordingly, a value modified by one or more terms, such as "about," "approximately," and "substantially," are not to be limited to the precise value specified. In at least some cases, the approximating language may correspond to the precision of an instrument for measuring the value. Here and throughout the specification and claims, unless the context or language indicates otherwise, range limitations may be combined and/or interchanged, such ranges are designated and include all the sub-ranges contained therein.
The corresponding structures, materials, acts, and equivalents of all means or step plus function elements in the claims below are intended to include any structure, material, or act for performing the function in combination with other claimed elements as specifically claimed. The description of the present invention has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the invention. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.

Claims (13)

1. A force and torque sensor assembly configured to detect a force or torque applied thereto, comprising:
a body comprising a first part, a second part, and a deformable part connecting the first part and the second part; and
at least two sensing assemblies mounted on the body and configured to detect relative movement between the first and second components, each of the at least two sensing assemblies comprising:
a magnet assembly configured to be coupled to the first member; and
a pair of hall effect sensors configured to be coupled to the second member,
the pair of hall effect sensors being configured to produce substantially the same signal variation in response to a first relative movement between the magnet assembly in a first direction, and to produce substantially equal but opposite signal variation in response to a second relative movement between the magnet assembly in a second direction, the force and torque sensor assemblies being configured to calculate the first relative movement in the first direction based on an averaging method and the second relative movement in the second direction based on a differencing method, the first direction being perpendicular to the second direction,
the at least two sensing assemblies are configured to detect relative movement at different locations between the first component and the second component, respectively, the at least two sensing assemblies configured to:
in response to the same force or torque applied to the force and torque sensor assemblies, the respective pair of hall effect sensors simultaneously produce substantially the same signal change, or simultaneously produce substantially equal but opposite signal changes; or (b)
The pair of hall effect sensors of each of the at least one sensing assembly produce substantially identical signal changes in response to the same force or torque applied to the force and torque sensor assemblies, while the pair of hall effect sensors of each of the remaining sensing assemblies produce substantially equal but opposite signal changes.
2. The force and torque sensor assembly of claim 1, wherein the pair of hall effect sensors are located on opposite sides of the magnet assembly, respectively.
3. The force and torque sensor assembly of claim 2, wherein the magnet assembly comprises a single magnet having a magnetization direction substantially perpendicular to a line connecting the pair of hall effect sensors.
4. The force and torque sensor assembly of claim 2, wherein the magnet assembly comprises a single magnet having a magnetization direction substantially parallel to a line connecting the pair of hall effect sensors.
5. The force and torque sensor assembly of claim 2, wherein the magnet assembly comprises at least two magnets arranged side-by-side, the magnets having alternating opposite magnetization directions and each being substantially parallel to a line connecting the pair of hall effect sensors.
6. The force and torque sensor assembly of claim 1, wherein the magnet assembly comprises a first set of magnets and a second set of magnets, the pair of hall effect sensors being located between the first set of magnets and the second set of magnets.
7. The force and torque sensor assembly of claim 6, wherein the first set of magnets and the second set of magnets each comprise a single magnet, the magnets of the first set of magnets and the magnets of the second set of magnets having the same magnetization direction substantially perpendicular to the line of connection of the pair of hall effect sensors.
8. The force and torque sensor assembly of claim 6, wherein the first set of magnets and the second set of magnets each comprise a single magnet, the magnets of the first set of magnets and the magnets of the second set of magnets having the same magnetization direction substantially parallel to the line connecting the pair of hall effect sensors.
9. The force and torque sensor assembly of claim 6, wherein the first set of magnets and the second set of magnets each comprise at least two magnets arranged side-by-side, the magnets having magnetization directions that are alternately opposite and each substantially parallel to a line of the hall effect sensor, the magnets of the first set of magnets and the magnets of the second set of magnets that are located on the same line that is substantially parallel to the line having the same magnetization direction.
10. The force and torque sensor assembly of claim 1, wherein the detection directions of the pair of hall effect sensors are respectively directed toward the magnet assembly or have the same detection direction substantially perpendicular to the line connecting the pair of hall effect sensors.
11. The force and torque sensor assembly of claim 1, wherein the sensing assembly further comprises a magnetically permeable assembly configured to comb a magnetic field of the magnet assembly.
12. A robotic joint comprising a force and torque sensor assembly according to any one of claims 1-11.
13. A robot comprising the robot joint of claim 12.
CN202110670753.3A 2021-06-17 2021-06-17 Sensing assembly, force and torque sensor assembly, robot joint and robot Active CN113358246B (en)

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