CN113351425A - Portable photoresist gluing device - Google Patents

Portable photoresist gluing device Download PDF

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Publication number
CN113351425A
CN113351425A CN202110643357.1A CN202110643357A CN113351425A CN 113351425 A CN113351425 A CN 113351425A CN 202110643357 A CN202110643357 A CN 202110643357A CN 113351425 A CN113351425 A CN 113351425A
Authority
CN
China
Prior art keywords
glue
photoresist
tank
portable
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110643357.1A
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Chinese (zh)
Inventor
汪钢
傅立超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo All Semi Micro Electronics Equipment Co ltd
Original Assignee
Ningbo All Semi Micro Electronics Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo All Semi Micro Electronics Equipment Co ltd filed Critical Ningbo All Semi Micro Electronics Equipment Co ltd
Priority to CN202110643357.1A priority Critical patent/CN113351425A/en
Publication of CN113351425A publication Critical patent/CN113351425A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/1013Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1026Valves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/11Vats or other containers for liquids or other fluent materials

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  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)

Abstract

The invention discloses a portable photoresist coating device, and relates to the technical field of photoresist homogenizing; comprises a pressure tank, a glue cup which is positioned in the pressure tank and is used for containing glue, an air inlet which is positioned on the pressure tank, a pressurizing mechanism which inputs nitrogen through the air inlet, a glue outlet pipe of which one end is inserted into the pressure tank and is positioned in the glue cup, and a suck-back valve which is positioned on the glue outlet pipe. The invention has the beneficial effects that: directly placing a rubber cup in the pressure tank, and placing photoresist in the rubber cup. The photoresist was pressed out by nitrogen pressure. When the glue is replaced, only the suck-back valve and the pipeline are cleaned. Is more convenient and fast.

Description

Portable photoresist gluing device
Technical Field
The invention belongs to the technical field of photoresist uniformizing, and particularly relates to a portable photoresist polishing device.
Background
In the glue homogenizing process, a normal photoresist pipeline adopts a glue pumping mode. This is where the photoresist is not changed frequently.
When the photoresist is replaced, the structure of a glue pump (the inside of the glue pump is corrugated and is not easy to clean) and the like need to be cleaned.
In addition, the glue pump generally corresponds to a range of photoresist viscosities. Different photoresist viscosities require different glue pumps to be replaced. The limitation is large.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a portable photoresist coating device. The photoresist was pressed out by nitrogen pressure. When the glue is replaced, only the suck-back valve and the pipeline are cleaned. Is more convenient and fast.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a portable photoresist gluing device, includes the overhead tank, is located the gluey cup that is used for adorning glue in the overhead tank, is located the air inlet on the overhead tank, inputs the loading system of nitrogen gas through the air inlet, one end inserts the overhead tank and is located the glue outlet pipe of gluing the cup, is located the resorption valve on the glue outlet pipe.
Preferably, the pressure tank includes a tank body, a lid for sealing the tank body, and a fixing mechanism for fixing the lid to the tank body.
Preferably, one end of the cover is hinged with the tank body; the fixing mechanism is a fixing bolt which penetrates through the other end of the cover and is in threaded connection with the tank body.
Preferably, the spout extends through and is removably connected to the cover.
Preferably, the cover is provided with a hole, the lower end of the hole is provided with a rubber sleeve for clamping the rubber outlet pipe, and one side of the rubber sleeve is provided with a notch, so that the cross section of the rubber sleeve is C-shaped.
Preferably, a pressure relief valve is arranged on the cover; the pressure relief valve comprises a valve body fixedly connected to the outer side of the pressure tank, a sliding chute positioned at one end of the valve body, a plug connected in the sliding chute in a sliding mode, an accommodating groove positioned at the bottom of the sliding chute, a spring positioned in the accommodating groove and used for applying force towards the accommodating groove to the plug, and an air passage positioned in the valve body; one end of the air passage is communicated with the inside of the pressure tank, the other end of the air passage is located on one side of the sliding groove and is blocked by the plug, and an air outlet blocked by the plug is formed in one side of the sliding groove.
Preferably, one end of the glue outlet pipe, which is far away from the pressure tank, is connected with a glue outlet head; the glue outlet head comprises a head body, a glue channel positioned in the head body and a plurality of glue nozzles connected with one end of the glue channel; the glue nozzles are arranged in a linear array, and the cross section of the glue channel is in an oblong shape.
Preferably, a lifting basket convenient for taking out the rubber cup is arranged in the pressure tank, and the rubber cup is positioned in the lifting basket.
The invention has the beneficial effects that: directly placing a rubber cup in the pressure tank, and placing photoresist in the rubber cup. The photoresist was pressed out by nitrogen pressure. When the glue is replaced, only the suck-back valve and the pipeline are cleaned. Is more convenient and fast.
Drawings
FIG. 1 is a schematic view of a pressure tank;
FIG. 2 is a cross-sectional view of the pressure canister;
FIG. 3 is a schematic view of a pressure relief valve;
FIG. 4 is a schematic view of a glue dispensing head;
FIG. 5 is a schematic diagram of the pipeline of the present embodiment.
In the figure: the rubber bottle comprises a pressure tank 1, a rubber cup 2, an air inlet 3, a rubber outlet pipe 4, a suckback valve 5, a tank body 6, a cover 7, a hole 8, a rubber sleeve 9, a valve body 10, a chute 11, a plug 12, an accommodating groove 13, a spring 14, an air passage 15, a rubber passage 17, a rubber nozzle 18 and a lifting basket 19.
Detailed Description
The invention is explained in further detail below with reference to the figures and the detailed description:
example (b):
referring to fig. 1 to 5, a portable photoresist dispensing device comprises a pressure tank 1, a glue cup 2 located in the pressure tank 1 and used for containing glue, an air inlet 3 located on the pressure tank 1, a pressurizing mechanism for inputting nitrogen through the air inlet 3, a glue outlet pipe 4 with one end inserted into the pressure tank 1 and located in the glue cup 2, and a suck-back valve 5 located on the glue outlet pipe 4.
The pressure tank 1 includes a tank body 6, a lid 7 for sealing the tank body 6, and a fixing mechanism for fixing the lid 7 to the tank body 6.
One end of the cover 7 is hinged with the tank body 6;
the fixing means is a fixing bolt passing through the other end of the cover 7 and for screw-coupling with the can 6.
The rubber outlet pipe 4 penetrates through the cover 7 and is detachably connected with the cover 7.
The cover 7 is provided with a hole 8 for inserting the rubber outlet pipe, the lower end of the hole 8 is provided with a rubber sleeve 9 for clamping the rubber outlet pipe 4, and one side of the rubber sleeve 9 is provided with a notch, so that the cross section of the rubber sleeve 9 is C-shaped.
A pressure release valve is arranged on the cover 7;
the pressure relief valve comprises a valve body 10 fixedly connected to the outer side of the pressure tank 1, a sliding chute 11 positioned at one end of the valve body 10, a plug 12 connected in the sliding chute 11 in a sliding manner, an accommodating groove 13 positioned at the bottom of the sliding chute 11, a spring 14 positioned in the accommodating groove 13 and used for applying force towards the accommodating groove 13 to the plug 12, and an air passage 15 positioned in the valve body 10;
one end of the air passage 15 is communicated with the inside of the pressure tank 1, the other end of the air passage 15 is located on one side of the sliding chute 11 and is blocked by the plug 12, and an air outlet blocked by the plug 12 is formed in one side of the sliding chute 11.
One end of the rubber outlet pipe 4 far away from the pressure tank 1 is connected with a rubber outlet head;
the glue outlet head comprises a head body 16, a glue channel 17 positioned in the head body 16 and a plurality of glue nozzles 18 connected with one end of the glue channel 17;
the glue nozzles 18 are arranged in a linear array, and the cross section of the glue channel 17 is in an oblong shape.
A lifting basket 19 convenient for taking out the rubber cup 2 is arranged in the pressure tank 1, and the rubber cup 2 is positioned in the lifting basket 19.
Principle of embodiment:
put into glue in gluing the cup, put into basket 19 gluing the cup, then hold between fingers the basket 19 upper end with the hand, put into jar body 6, then close the lid, screw up fixing bolt, then insert out rubber tube 4, rubber sleeve 9 presss from both sides tight play rubber tube 4, go out in the tip of rubber tube 4 soaks the glue, when even gluing, the loading system exports nitrogen gas, pressure in the overhead tank risees, under the high-pressure effect, glue in the gluey cup is gone out from play rubber tube 4, comes out from the jiao zui through the resorption valve. When the glue dispensing device needs to stop, the pressurizing mechanism is closed, the plug 12 is pulled down, the spring extends, the plug 12 is separated from the air passage 15 and the air outlet, high-pressure gas in the pressure tank flows out from the air outlet, air pressure in the pressure tank is reduced, the fixing bolt is unscrewed, the cover is opened, the glue cup is taken out, the glue cup, the glue outlet pipe 4 and the suck-back valve are cleaned, and new glue dispensing can be performed after new glue is filled into the glue cup.

Claims (8)

1. The utility model provides a portable photoresist mucilage binding is put which characterized in that, includes the overhead tank, is located the glass that glues that is used for adorning glue in the overhead tank, is located the air inlet on the overhead tank, inputs the loading system of nitrogen gas through the air inlet, one end inserts the overhead tank and is located the glue outlet pipe of glass, is located the resorption valve on the glue outlet pipe.
2. The portable photoresist applicator according to claim 1, wherein the pressure tank comprises a tank body, a cover for sealing the tank body, and a fixing mechanism for fixing the cover to the tank body.
3. The portable photoresist applicator according to claim 2, wherein one end of the cover is hinged to the tank;
the fixing mechanism is a fixing bolt which penetrates through the other end of the cover and is in threaded connection with the tank body.
4. A portable photoresist applicator according to claim 3 wherein the glue outlet tube is removably connected to the cover and extends through the cover.
5. The portable photoresist dispensing device according to claim 4, wherein the cover has a hole, a rubber sleeve is disposed at the lower end of the hole for clamping the rubber outlet tube, and a notch is disposed at one side of the rubber sleeve, so that the cross section of the rubber sleeve is C-shaped.
6. The portable photoresist stripping device according to claim 1, wherein a pressure relief valve is provided on the cover;
the pressure relief valve comprises a valve body fixedly connected to the outer side of the pressure tank, a sliding chute positioned at one end of the valve body, a plug connected in the sliding chute in a sliding mode, an accommodating groove positioned at the bottom of the sliding chute, a spring positioned in the accommodating groove and used for applying force towards the accommodating groove to the plug, and an air passage positioned in the valve body;
one end of the air passage is communicated with the inside of the pressure tank, the other end of the air passage is located on one side of the sliding groove and is blocked by the plug, and an air outlet blocked by the plug is formed in one side of the sliding groove.
7. The portable photoresist dispensing device according to claim 1, wherein one end of the glue outlet tube away from the pressure tank is connected with a glue outlet head;
the glue outlet head comprises a head body, a glue channel positioned in the head body and a plurality of glue nozzles connected with one end of the glue channel;
the glue nozzles are arranged in a linear array, and the cross section of the glue channel is in an oblong shape.
8. The portable photoresist beating device of claim 1, wherein a basket is arranged in the pressure tank for taking out the glue cup, and the glue cup is positioned in the basket.
CN202110643357.1A 2021-06-09 2021-06-09 Portable photoresist gluing device Pending CN113351425A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110643357.1A CN113351425A (en) 2021-06-09 2021-06-09 Portable photoresist gluing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110643357.1A CN113351425A (en) 2021-06-09 2021-06-09 Portable photoresist gluing device

Publications (1)

Publication Number Publication Date
CN113351425A true CN113351425A (en) 2021-09-07

Family

ID=77533475

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110643357.1A Pending CN113351425A (en) 2021-06-09 2021-06-09 Portable photoresist gluing device

Country Status (1)

Country Link
CN (1) CN113351425A (en)

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101406815A (en) * 2008-10-24 2009-04-15 广州通泽机械有限公司 Solvent-free composite glue-mixing mechanism
CN101738867A (en) * 2008-11-07 2010-06-16 沈阳芯源微电子设备有限公司 Photoresist conveying device
CN202683420U (en) * 2012-06-05 2013-01-23 杭州彼特环保包装有限公司 Automatic reset type dispensing head with sucking-back function
CN204134778U (en) * 2014-09-26 2015-02-04 深圳市恒湖科技有限公司 Fluent material pressure feed device
CN205797647U (en) * 2016-05-30 2016-12-14 深圳市劲拓自动化设备股份有限公司 A kind of glue dispensing valve
CN206199625U (en) * 2016-11-26 2017-05-31 佛山市顺德区艺和包装有限公司 A kind of gluing machine
CN206390544U (en) * 2016-11-03 2017-08-11 海南庆禾钢结构设计咨询有限公司 A kind of automatic liquid supply hairbrush
CN208800281U (en) * 2018-08-22 2019-04-30 郭高峰 A kind of glue sprayer convenient for cleaning
CN110332461A (en) * 2019-07-01 2019-10-15 温州齐力流体设备有限公司 A kind of material recovering system
CN111157183A (en) * 2020-01-17 2020-05-15 广东电网有限责任公司 Pressure relief valve protection device of transformer leakage testing process
CN111229545A (en) * 2020-02-19 2020-06-05 青岛歌尔微电子研究院有限公司 Glue resorption device and have its adhesive deposite device
CN211423486U (en) * 2019-11-13 2020-09-04 天津市程凯制冷科技有限公司 Safety relief valve for refrigeration liquid storage device
CN212000491U (en) * 2020-03-06 2020-11-24 辽宁省交通科学研究院有限责任公司 Small-size sand-containing fog seal material spraying equipment

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101406815A (en) * 2008-10-24 2009-04-15 广州通泽机械有限公司 Solvent-free composite glue-mixing mechanism
CN101738867A (en) * 2008-11-07 2010-06-16 沈阳芯源微电子设备有限公司 Photoresist conveying device
CN202683420U (en) * 2012-06-05 2013-01-23 杭州彼特环保包装有限公司 Automatic reset type dispensing head with sucking-back function
CN204134778U (en) * 2014-09-26 2015-02-04 深圳市恒湖科技有限公司 Fluent material pressure feed device
CN205797647U (en) * 2016-05-30 2016-12-14 深圳市劲拓自动化设备股份有限公司 A kind of glue dispensing valve
CN206390544U (en) * 2016-11-03 2017-08-11 海南庆禾钢结构设计咨询有限公司 A kind of automatic liquid supply hairbrush
CN206199625U (en) * 2016-11-26 2017-05-31 佛山市顺德区艺和包装有限公司 A kind of gluing machine
CN208800281U (en) * 2018-08-22 2019-04-30 郭高峰 A kind of glue sprayer convenient for cleaning
CN110332461A (en) * 2019-07-01 2019-10-15 温州齐力流体设备有限公司 A kind of material recovering system
CN211423486U (en) * 2019-11-13 2020-09-04 天津市程凯制冷科技有限公司 Safety relief valve for refrigeration liquid storage device
CN111157183A (en) * 2020-01-17 2020-05-15 广东电网有限责任公司 Pressure relief valve protection device of transformer leakage testing process
CN111229545A (en) * 2020-02-19 2020-06-05 青岛歌尔微电子研究院有限公司 Glue resorption device and have its adhesive deposite device
CN212000491U (en) * 2020-03-06 2020-11-24 辽宁省交通科学研究院有限责任公司 Small-size sand-containing fog seal material spraying equipment

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* Cited by examiner, † Cited by third party
Title
中国石油天然气总公司: "《石油安全工程 中级本 上》", 30 October 1991, 石油工业出版社 *

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Application publication date: 20210907

RJ01 Rejection of invention patent application after publication