CN113341873B - Motion platform control system and control method of optical detection equipment - Google Patents
Motion platform control system and control method of optical detection equipment Download PDFInfo
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- CN113341873B CN113341873B CN202110903208.4A CN202110903208A CN113341873B CN 113341873 B CN113341873 B CN 113341873B CN 202110903208 A CN202110903208 A CN 202110903208A CN 113341873 B CN113341873 B CN 113341873B
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- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
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- G05B2219/13099—Function block, OOP, various functions grouped, called by name as servo
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Abstract
The application discloses motion platform control system and control method of optical detection equipment relates to optical detection technology field, and it includes: the motion platform control system comprises a PLC master station, a plurality of slave stations and a plurality of motion execution units, wherein the motion execution units are respectively used for controlling the lifting of a loading ejector rod for placing an object to be detected, controlling a clamp of the optical detection equipment, controlling the motion of the object to be detected in the X direction and controlling the motion of an optical detection head in the YZ direction; the industrial PC is used for operating a UI interface of the display; the industrial PC is respectively connected with the display and the PLC master station; the PLC master station is connected with all the slave stations. According to the motion platform control system and the motion platform control method, the PLC master station and the PLC slave station are introduced into the motion platform control system, the cost of the control system is reduced, and the stability of the control system is improved.
Description
Technical Field
The application relates to the technical field of optical detection equipment control, in particular to a motion platform control system and a motion platform control method of optical detection equipment.
Background
At present, a motion platform of an optical detection device on the market operates based on an industrial PC, and because the precision requirement of the motion platform for optical detection is extremely high, an electrical control system comprising a shaft control card, a shaft drive controlled by the shaft control card and an IO card is mostly adopted for control. The industrial PC can provide good UI design and give consideration to the motion control and logic control functions of the motion platform, and meanwhile, the industrial PC can also perform real-time data communication of vision and algorithms to complete the control of the whole electric control system.
However, the existing electrical control system has obvious defects, and mainly comprises:
industrial PC needs to be configured with multiple PCI/PCI-E expansion cards, including dedicated and general purpose axial control cards, digital IO cards, analog IO cards, and image capture cards. The price of various expansion cards is high, the total number of the expansion cards is often 10, the configuration requirement on an industrial PC is very high, and the cost of an electrical control system is greatly increased.
Secondly, the efficiency of the industrial PC is affected, the operation burden of the industrial PC is increased by excessive expansion cards, the industrial PC is easy to generate the abnormality of blue screen, program blocking, crash and the like of the computer, and the stability of the electric control system is poor.
And more than 2 shaft control cards of the electric control system are needed, the electric cylinder and the Z-axis servo driver are controlled in a pulse mode, the length of a pulse signal cable reaches 10 meters, the pulse signal cable is easily interfered by signals, the stability of shaft control is influenced, and the construction wiring needs to be long in working time.
Disclosure of Invention
Aiming at the defects in the prior art, the application aims to provide a motion platform control system and a motion platform control method of optical detection equipment, wherein a PLC (programmable logic controller) master station and a PLC slave station are introduced into the motion platform control system, so that the cost of the control system is reduced, and the stability of the control system is improved.
In order to achieve the above purposes, on one hand, the technical scheme is as follows: a motion platform control system of optical detection equipment comprises a display and an industrial PC (personal computer), wherein the motion platform control system comprises a PLC (programmable logic controller) master station, a plurality of slave stations and a plurality of action execution units, and the action execution units are respectively used for performing lifting control on a loading ejector rod for placing an object to be detected, controlling a clamp of the optical detection equipment, controlling the motion of the object to be detected in the X direction and controlling the motion of an optical detection head in the YZ direction;
the industrial PC is used for operating a UI interface of the display; the industrial PC is respectively connected with the display and the PLC master station; the PLC master station is connected with all the slave stations; each slave station is at least connected with one action execution unit, and part of the action execution units are connected with the PLC master station.
On the basis of the technical scheme, the plurality of slave stations comprise a pneumatic cabinet slave station, a fixture platform slave station and a Z-axis electric control box slave station, and the plurality of action execution units comprise electric cylinders, fixture stepping motors and a plurality of Z-axis stepping motors;
the electric cylinder is connected to the pneumatic cabinet slave station, the fixture stepping motors are connected to the fixture platform slave station, and the Z-axis stepping motors are connected to the Z-axis electric cabinet slave station.
On the basis of the technical scheme, the plurality of action execution units further comprise a plurality of servo linear motors, and after the servo linear motors are connected in series, one end of each servo linear motor is connected to the PLC master station, and the other end of each servo linear motor is connected to the fixture platform slave station; the fixture platform slave station is connected to the Z-axis electric cabinet slave station; and the pneumatic cabinet slave station is directly connected with the PLC master station.
On the basis of the technical scheme, the plurality of action execution units further comprise a plurality of servo linear motors, and one end of each servo linear motor is connected to the PLC master station after the servo linear motors are connected in series;
and the fixture platform slave station, the Z-axis electric cabinet slave station and the pneumatic cabinet slave station are directly connected to the PLC master station.
On the basis of the technical scheme, the motion platform control system further comprises a switch, and the industrial PC is connected to the PLC main station through the switch.
On the basis of the technical scheme, the display and the industrial PC, the industrial PC and the switch, and the switch and the PLC master station are connected through TCP/IP communication lines;
the servo linear motors are connected with each other through EtherCAT communication lines, the servo linear motors are connected with the PLC master station, the PLC master station is connected with the pneumatic cabinet slave station, the servo linear motors are connected with the clamp platform slave station, and the clamp platform slave station is connected with the Z-axis electric cabinet slave station through EtherCAT communication lines;
the electric cylinder and the pneumatic cabinet slave station, the fixture stepping motor and the fixture platform slave station, and the Z-axis stepping motors and the Z-axis electric cabinet slave station are connected through differential pulse signal lines.
On the basis of the technical scheme, the PLC master station is provided with a CPU module, an I/O input module, an I/O output module, an analog input module and an expansion coupling module;
the pneumatic cabinet slave station, the clamp platform slave station and the Z-axis electric cabinet slave station are provided with a slave station coupling module, an I/O input module, an I/O output module and a high-speed pulse module.
The application also discloses a control method based on the motion platform control system, which comprises the following steps:
s1: starting the optical detection equipment, placing an object to be detected on a motion platform of the optical detection equipment, and clamping the object to be detected by the industrial PC through a fixture of the slave station control optical detection equipment;
s2: the industrial PC is responsible for UI interface operation and image acquisition of the display in the detection process, and sends a motion execution command to the PLC master station; the PLC master station directly controls part of the action execution units or indirectly controls the action execution units to execute corresponding actions through the PLC master station and the slave stations.
On the basis of the technical scheme, the plurality of slave stations comprise a pneumatic cabinet slave station, a fixture platform slave station and a Z-axis electric control box slave station, and the plurality of action execution units comprise electric cylinders, fixture stepping motors and a plurality of Z-axis stepping motors; the electric cylinder is connected to the pneumatic cabinet slave station, the fixture stepping motors are connected to the fixture platform slave station, and the plurality of Z-axis stepping motors are connected to the Z-axis electric cabinet slave station;
in step S1, the PLC master station transmits a signal to the fixture platform slave station, which converts the communication signal into a pulse signal to control the fixture stepper motor;
in step S2, the industrial PC controls the display of the optical detection device to perform UI interface operation and controls the optical detection head to perform image acquisition; the industrial PC sends a motion execution command to the PLC master station; the PLC master station sends control signals to the pneumatic cabinet slave station and the Z-axis electric cabinet slave station, the pneumatic cabinet slave station converts the control signals into pulse signals, the pulse signals are transmitted to the electric cylinder, and the loading ejector rod for placing the object to be detected is controlled to move up and down; and the Z-axis electric control box converts the control signal into a pulse signal from a slave station, and transmits the pulse signal to the Z-axis stepping motor to control the optical detection head to perform compensation motion.
On the basis of the technical scheme, the plurality of action execution units further comprise a plurality of servo linear motors, and after the servo linear motors are connected in series, one end of each servo linear motor is connected to the PLC master station, and the other end of each servo linear motor is connected to the fixture platform slave station; the fixture platform slave station is connected to the Z-axis electric cabinet slave station; the pneumatic cabinet slave station is directly connected with the PLC master station;
in step S2, the PLC master station sends a signal to the servo linear motor, the servo linear motor controls the driving shaft and the driven shaft of the motion platform to move in the X direction, and the servo linear motor controls the optical detection head to move in the Y direction.
The beneficial effect that technical scheme that this application provided brought includes:
1. the motion platform control system introduces the idea that a PLC master station and a PLC slave station adopt layered control, does not depend on an industrial PC to control the whole system, but sends a motion execution command with high requirements on timeliness and reliability to the PLC master station to control, and the industrial PC is simply responsible for UI interface operation and image acquisition of a display;
compared with the control of the whole system which is carried out by only depending on an industrial PC, the motion platform control system greatly reduces the use of shaft control cards, reduces the requirement of the industrial PC on configuration, introduces a PLC (programmable logic controller) master station with high cost performance, and greatly saves the hardware cost; meanwhile, the slave stations (the pneumatic cabinet slave stations, the fixture platform slave stations and the Z-axis electric cabinet slave stations) are introduced, the lengths of pulse signal lines and I/O cables are reduced, complex wiring work is avoided, and the working hours of the machine is greatly reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is an architecture diagram of a motion platform control system according to an embodiment of the present application.
Reference numerals: 1. a display; 2. industrial PC; 3. a switch; 4. a PLC master station; 5. a pneumatic cabinet slave station; 6. an electric cylinder; 7. a fixture stepping motor; 8. a Z-axis stepper motor; 9. a servo linear motor; 10. a clamp platform slave station; 11. and a Z-axis electric cabinet slave station.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
As shown in fig. 1, the present application discloses an embodiment of a motion platform control system of an optical inspection apparatus, the motion platform control system comprising a display 1 and an industrial PC 2. The motion platform control system comprises a PLC main station 4, a plurality of slave stations and a plurality of motion execution units, wherein the motion execution units are used for performing lifting control on a loading ejector rod for placing an object to be detected, controlling a clamp of optical detection equipment, controlling the motion of the object to be detected in the X direction and controlling the motion of an optical detection head in the YZ direction.
Specifically, the industrial PC2 is used to run the UI interface of the display 1. The industrial PC2 is respectively connected with the display 1 and the PLC master station 4; the division of labor of the industrial PC2 and the PLC master station 4 is obvious, the industrial PC2 is responsible for UI interface operation and image acquisition work of the display 1, bottom layer motion control, high-speed I/O and analog quantity control with strong requirements on timeliness and reliability are given to the PLC master station 4 for realization, the control effect of the motion platform control system is greatly improved, shaft control cards in various forms are avoided, and the cost of the motion platform control system is greatly reduced. And the slave station is arranged, so that the length of cable wiring can be reduced, the cost of the whole motion platform control system is reduced, and the anti-interference capability is improved.
In one embodiment, the plurality of slave stations comprises a pneumatic cabinet slave station 5, a fixture platform slave station 10 and a Z-axis electric cabinet slave station 11, and the plurality of action performing units comprises an electric cylinder 6, a fixture stepping motor 7 and a plurality of Z-axis stepping motors 8. Electric cylinder 6 connects in pneumatic cabinet slave station 5, and anchor clamps step motor 7 connects in anchor clamps platform slave station 10, and a plurality of Z axle step motor 8 all connect in Z axle electric cabinet slave station 11. The electric cylinder 6 controls the object to be detected to move up and down through the loading ejector rod, the clamp stepping motor 7 is used for controlling clamping control of the clamp, and the Z-axis stepping motor 8 is used for compensation control of the optical detection head. The electric cylinder 6 and the clamp stepping motor 7 are combined to load and unload the object to be detected.
Specifically, the analog input module is a device for acquiring analog signals of a remote site to a computer.
Specifically, the pneumatic cabinet slave station 5 is specifically configured to include: the slave station coupling module is divided into a slave station coupling module 1, an I/O input module 2, an I/O output module 1 and a high-speed pulse module 1. The pneumatic cabinet slave station includes: the electromagnetic valve is controlled to realize the functions of the precise air floatation system, such as up-down lifting; the high-speed pulse output module is used for controlling the electric cylinder module, so that the function of automatic feeding and discharging is realized.
The clamp platform comprises from station 10: the slave station coupling module is divided into a slave station coupling module 1, an I/O input module 4, an I/O output module 2 and a high-speed pulse module 1. The clamp platform slave station 10 comprises a control cylinder and a vacuum suction action, and realizes the functions of clamping and loosening the glass.
In one embodiment, the plurality of motion execution units further comprises a plurality of servo linear motors 9, and after the plurality of servo linear motors 9 are connected in series, one end of each servo linear motor is connected to the PLC master station 4, and the other end of each servo linear motor is connected to the fixture platform slave station 10. In the present application, the servo linear motor 9 serves as an operation execution unit, and also has a slave station attribute that serves as a slave station, extends the signal of the PLC master station 4 to a distance, and the servo linear motor 9 can convert the control signal into a pulse signal for executing an operation. The fixture platform slave station 10 is connected to the Z-axis electric cabinet slave station 11, and the pneumatic cabinet slave station 5 is directly connected with the PLC master station 4.
Specifically, the plurality of motion execution units at least include 4 servo linear motors 9, and the two servo linear motors 9 correspond to the driving shaft and the driven shaft of the X0 gantry and the X1 gantry. The two servo linear motors 9 correspond to the optical detection head Y0 and the microscope Y1. Specifically, the optical detection head needs Y0 for fixation, and the microscope needs at least Y1 according to actual needs and can be increased to Y1-Y4 at most.
In another embodiment, the plurality of motion execution units further include a plurality of servo linear motors 9, and after the plurality of servo linear motors 9 are connected in series, one end of each servo linear motor is connected to the PLC master station 4. And the fixture platform slave station 10, the Z-axis electric cabinet slave station 11 and the pneumatic cabinet slave station 5 are directly connected to the PLC master station 4. The PLC master station 4 directly controls the servo linear motor 9, the clamp platform slave station 10, the Z-axis electric cabinet slave station 11 and the pneumatic cabinet slave station 5 respectively.
In one embodiment, the motion platform control system further comprises a switch 3, and the industrial PC2 is connected to the PLC master station 4 through the switch 3.
In one embodiment, the display 1 and the industrial PC2, the industrial PC2 and the switch 3, and the switch 3 and the PLC master station 4 are connected by TCP/IP (Transmission Control Protocol/Internet Protocol) communication lines. Specifically, the TCP/IP communication line is an internet general network line.
Between two servo linear motors 9, servo linear motor 9 and PLC main website 4, PLC main website 4 and pneumatic cabinet slave station 5, servo linear motor 9 and anchor clamps platform slave station 10, and anchor clamps platform slave station 10 and Z axle electric cabinet slave station 11 all are connected through the EtherCAT communication line. Specifically, the EtherCAT communication line is a high-speed industrial internet bus.
The electric cylinder 6 and the pneumatic cabinet slave station 5, the fixture stepping motor 7 and the fixture platform slave station 10, and the Z-axis stepping motors 8 and the Z-axis electric cabinet slave station 11 are connected through differential pulse signal lines. The differential pulse signal line is a special network line for controlling the action.
In one embodiment, the PLC master station 4 is configured with a CPU module, an I/O input module, an I/O output module, an analog input module, and an expansion coupling module. The pneumatic cabinet slave station 5, the clamp platform slave station 10 and the Z-axis electric cabinet slave station 11 are provided with a slave station coupling module, an I/O input module, an I/O output module and a high-speed pulse module.
According to the motion platform control system, the positioning accuracy of the X0 and the X1 axes can reach 8um, and the repeated positioning accuracy can reach below 0.8 um; the speed fluctuation of the synchronous shaft at a high speed of 1000mm/s is less than 0.5 percent, and the time for setting to 0.2um is less than 200 ms. The servo axes in the Y0 and Y1 moving directions have high precision, the positioning precision can reach 4um, the repeated positioning precision reaches below 0.4um, and the time for setting to 0.2um is less than 200 ms. And 4-5 groups of Z-axis stepping motors perform real-time dynamic position compensation, and the compensated real-time automatic focusing function with the precision of 5um is followed.
The motion platform control system is mainly applied to an automatic optical detector for detecting defects of a glass Panel in the FPD (Flat Panel Display) industry. The industrial PC2 is used to run the UI interface of the display 1, which is used to display defects of the glass panel. Wherein, the electric cylinder 6 realizes the lifting control of the glass panel through loading the ejector pin, the clamp stepping motor 7 controls the clamping work of the glass panel, and the Z-axis stepping motor 8 controls the motion compensation of the Z direction of a plurality of optical detection heads of the automatic optical detection machine, so that the optical detection heads are always at the best visual angle, and the defects of the glass panel can be conveniently found.
The motion platform control system provided by the application provides innovation improvement, introduces the idea that a PLC master station and a PLC slave station adopt layered control, does not rely on an industrial PC to control the whole system, but sends a motion execution command with strong requirements on timeliness and reliability to the PLC master station to control, and the industrial PC is solely responsible for UI interface operation and image acquisition of a display; compared with the control of the whole system which is carried out by only depending on an industrial PC, the motion platform control system greatly reduces the use of shaft control cards, reduces the requirement of the industrial PC on configuration, introduces a PLC (programmable logic controller) master station with high cost performance, and greatly saves the hardware cost; meanwhile, the slave stations (the pneumatic cabinet slave stations, the fixture platform slave stations and the Z-axis electric cabinet slave stations) are introduced, the lengths of pulse signal lines and I/O cables are reduced, complex wiring work is avoided, and the working hours of the machine is greatly reduced.
The application also discloses an embodiment of a control method based on the motion platform control system, which comprises the following steps:
s1: and starting the optical detection equipment, placing the object to be detected on a moving platform of the optical detection equipment, and clamping the object to be detected by the industrial PC2 through a clamp of the slave station control optical detection equipment.
In one embodiment, the plurality of slave stations comprises a pneumatic cabinet slave station 5, a fixture platform slave station 10 and a Z-axis electric cabinet slave station 11, and the plurality of action performing units comprises an electric cylinder 6, a fixture stepping motor 7 and a plurality of Z-axis stepping motors 8; electric cylinder 6 connects in pneumatic cabinet slave station 5, and anchor clamps step motor 7 connects in anchor clamps platform slave station 10, and a plurality of Z axle step motor 8 all connect in Z axle electric cabinet slave station 11.
In step S1, the PLC master station 4 transmits a signal to the fixture platform slave station 10, and the fixture platform slave station 10 converts the control signal into a pulse signal to control the fixture stepping motor 7; the gripper stepper motor 7 controls the gripper.
In step S2, the industrial PC2 performs UI interface control on the display of the optical detection apparatus and controls the optical detection head to perform image acquisition. The industrial PC2 sends a motion execution command to the PLC master station 4, the PLC master station 4 sends control signals to the pneumatic cabinet slave station 5 and the Z-axis electric cabinet slave station 11, the pneumatic cabinet slave station 5 converts the control signals into pulse signals, and the pulse signals are transmitted to the electric cylinder 6 to control the lifting motion of the loading ejector rod; and the Z-axis electric control box converts the control signal into a pulse signal from the station 11, transmits the pulse signal to the Z-axis stepping motor 8, and controls the optical detection head to perform compensation motion according to the flatness of the object to be detected so as to achieve the best defect searching effect.
In one embodiment of the control method, the plurality of action execution units further comprise a plurality of servo linear motors 9, after the plurality of servo linear motors 9 are connected in series, one end of each servo linear motor is connected to the PLC master station 4, and the other end of each servo linear motor is connected to the fixture platform slave station 10; the fixture platform slave station 10 is connected to a Z-axis electric cabinet slave station 11; the pneumatic cabinet slave station 5 is directly connected with the PLC master station 4.
In step S2, the PLC master station 4 sends a signal to the servo linear motor 9, the servo linear motor 9 controls the driving shaft and the driven shaft of the motion platform to move in the X direction, and the servo linear motor 9 controls the optical detection head to move in the Y direction.
The control method is applied to a motion platform of optical detection equipment, a hardware control framework is built by utilizing a universal PLC master station and a universal PLC slave station to carry an EtherCAT high-speed industrial internet bus, the gantry type motion control of submicron-level positioning precision is realized, and the high-speed data communication with an industrial PC is realized, so that the control method has more flexible expansibility, and fully exerts the flexibility of the design of a UI (user interface) of the industrial PC and the capability of image processing, and the safety and the accuracy of the bottom layer motion control of the PLC master station; and the scheme of the general PLC master station, the slave station and the plurality of motion execution units replaces the scheme of an original shaft control card, high-precision gantry motion and single-shaft motion are realized, the real-time performance of the PLC master station is high, the real-time dynamic compensation function of the Z shaft is realized conveniently, and the control is more accurate and efficient.
In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be configured in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. A motion platform control system for an optical inspection apparatus comprising a display (1) and an industrial PC (2), characterized by:
the motion platform control system comprises a PLC master station (4), a plurality of slave stations and a plurality of motion execution units, wherein the motion execution units are respectively used for controlling the lifting of a loading ejector rod for placing an object to be detected, controlling a clamp of an optical detection device, controlling the motion of the object to be detected in the X direction and controlling the motion of an optical detection head in the YZ direction;
the industrial PC (2) is used for operating a UI interface of the display (1); the industrial PC (2) is respectively connected with the display (1) and the PLC master station (4); the PLC master station (4) is connected with all the slave stations; each slave station is at least connected with one action execution unit, and part of the action execution units are connected with the PLC master station (4);
the plurality of slave stations comprise a pneumatic cabinet slave station (5), a clamp platform slave station (10) and a Z-axis electric cabinet slave station (11), and the plurality of action execution units comprise electric cylinders (6), clamp stepping motors (7) and a plurality of Z-axis stepping motors (8); the electric cylinder (6) is connected to the pneumatic cabinet slave station (5), the fixture stepping motors (7) are connected to the fixture platform slave station (10), and the plurality of Z-axis stepping motors (8) are connected to the Z-axis electric cabinet slave station (11);
when the motion platform control system works, the industrial PC (2) controls a display of the optical detection equipment to operate a UI interface and controls the optical detection head to acquire images; the industrial PC (2) sends a motion execution command to the PLC master station (4); the PLC master station (4) sends control signals to the pneumatic cabinet slave station (5), the clamp platform slave station (10) and the Z-axis electric cabinet slave station (11), the pneumatic cabinet slave station (5) converts the control signals into pulse signals, the pulse signals are transmitted to the electric cylinder (6), and the loading ejector rod is controlled to lift; the clamp platform converts the communication signal into a pulse signal from the station (10) and controls a clamp stepping motor (7); and the Z-axis electric control box converts the control signal into a pulse signal from the station (11), and transmits the pulse signal to the Z-axis stepping motor (8) to control the optical detection head to perform compensation motion.
2. The motion platform control system for an optical inspection apparatus of claim 1, wherein: the plurality of action execution units also comprise a plurality of servo linear motors (9), after the servo linear motors (9) are connected in series, one end of each servo linear motor is connected to the PLC master station (4), and the other end of each servo linear motor is connected to the clamp platform slave station (10); the fixture platform slave station (10) is connected to the Z-axis electric cabinet slave station (11); and the pneumatic cabinet slave station (5) is directly connected with the PLC master station (4).
3. The motion platform control system for an optical inspection apparatus of claim 1, wherein: the plurality of action execution units also comprise a plurality of servo linear motors (9), and one end of each servo linear motor (9) is connected to the PLC master station (4) after being connected in series;
and the fixture platform slave station (10), the Z-axis electric cabinet slave station (11) and the pneumatic cabinet slave station (5) are directly connected to the PLC master station (4).
4. The motion platform control system for an optical inspection apparatus according to claim 2, wherein: the motion platform control system also comprises a switch (3), and the industrial PC (2) is connected to the PLC master station (4) through the switch (3).
5. The motion platform control system for an optical inspection apparatus according to claim 4, wherein: the display (1) and the industrial PC (2), the industrial PC (2) and the switch (3), and the switch (3) and the PLC master station (4) are connected through TCP/IP communication lines;
the servo linear motors (9), the servo linear motors (9) and the PLC master station (4), the PLC master station (4) and the pneumatic cabinet slave station (5), the servo linear motors (9) and the clamp platform slave station (10), and the clamp platform slave station (10) and the Z-axis electric cabinet slave station (11) are connected through EtherCAT communication lines;
the electric cylinder (6) is connected with the pneumatic cabinet slave station (5), the fixture stepping motor (7) is connected with the fixture platform slave station (10), and the plurality of Z-axis stepping motors (8) are connected with the Z-axis electric cabinet slave station (11) through differential pulse signal lines.
6. The motion platform control system for an optical inspection apparatus of claim 1, wherein: the PLC master station (4) is provided with a CPU module, an I/O input module, an I/O output module, an analog input module and an expansion coupling module;
the pneumatic cabinet slave station (5), the clamp platform slave station (10) and the Z-axis electric cabinet slave station (11) are provided with a slave station coupling module, an I/O input module, an I/O output module and a high-speed pulse module.
7. A control method for a motion platform control system according to claim 1, comprising the steps of:
s1: starting the optical detection equipment, placing an object to be detected on a motion platform of the optical detection equipment, and clamping the object to be detected by the industrial PC (2) through a fixture of the slave station control optical detection equipment;
s2: the industrial PC (2) is responsible for UI interface operation and image acquisition of the display (1) in the detection process, and the industrial PC (2) sends a motion execution command to the PLC master station (4); the PLC master station (4) directly controls part of the action execution units or indirectly controls the action execution units to execute corresponding actions through the PLC master station (4) and the slave stations.
8. The control method of a motion platform control system according to claim 7, wherein:
the plurality of slave stations comprise a pneumatic cabinet slave station (5), a clamp platform slave station (10) and a Z-axis electric cabinet slave station (11), and the plurality of action execution units comprise electric cylinders (6), clamp stepping motors (7) and a plurality of Z-axis stepping motors (8); the electric cylinder (6) is connected to the pneumatic cabinet slave station (5), the fixture stepping motors (7) are connected to the fixture platform slave station (10), and the plurality of Z-axis stepping motors (8) are connected to the Z-axis electric cabinet slave station (11);
in step S1, the PLC master station (4) transmits a signal to the clamp platform slave station (10), the clamp platform slave station (10) converts the communication signal into a pulse signal, and the clamp stepper motor (7) is controlled;
in step S2, the industrial PC (2) controls the display of the optical detection device to operate the UI interface and controls the optical detection head to acquire images; the industrial PC (2) sends a motion execution command to the PLC master station (4); the PLC master station (4) sends control signals to the pneumatic cabinet slave station (5) and the Z-axis electric cabinet slave station (11), the pneumatic cabinet slave station (5) converts the control signals into pulse signals, the pulse signals are transmitted to the electric cylinder (6), and the loading ejector rod is controlled to lift; and the Z-axis electric control box converts the control signal into a pulse signal from the station (11), and transmits the pulse signal to the Z-axis stepping motor (8) to control the optical detection head to perform compensation motion.
9. The control method of a motion platform control system according to claim 8, wherein: the plurality of action execution units also comprise a plurality of servo linear motors (9), after the servo linear motors (9) are connected in series, one end of each servo linear motor is connected to the PLC master station (4), and the other end of each servo linear motor is connected to the clamp platform slave station (10); the fixture platform slave station (10) is connected to the Z-axis electric cabinet slave station (11); the pneumatic cabinet slave station (5) is directly connected with the PLC master station (4);
in step S2, the PLC master station (4) sends a signal to the servo linear motor (9), the servo linear motor (9) controls the driving shaft and the driven shaft of the motion platform to move in the X direction, and the servo linear motor (9) controls the optical detection head to move in the Y direction.
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