CN113340406A - Windproof micro-packaging device of mass point vibration velocity sensor - Google Patents
Windproof micro-packaging device of mass point vibration velocity sensor Download PDFInfo
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- CN113340406A CN113340406A CN202110667538.8A CN202110667538A CN113340406A CN 113340406 A CN113340406 A CN 113340406A CN 202110667538 A CN202110667538 A CN 202110667538A CN 113340406 A CN113340406 A CN 113340406A
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- 238000009462 micro packaging Methods 0.000 title claims abstract description 22
- 230000005236 sound signal Effects 0.000 claims abstract description 21
- 239000002245 particle Substances 0.000 claims description 55
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- 238000004806 packaging method and process Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
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- 230000010354 integration Effects 0.000 description 2
- 230000005238 low-frequency sound signal Effects 0.000 description 2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
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Abstract
The invention discloses a windproof micro-packaging device of a mass point vibration velocity sensor, which integrally forms a sound passage by a first passage, a second passage and a vent hole structure in the windproof micro-packaging structure, converges and amplifies a target sound signal by the first passage, and detects the target sound signal by the mass point vibration velocity sensor arranged in the second passage so as to reduce the influence of wind noise on the mass point vibration velocity sensor.
Description
Technical Field
The invention relates to the technical field of acoustic signal measurement, in particular to a windproof micro-packaging device of a mass point vibration velocity sensor.
Background
The sound signals comprise scalar sound pressure signals and vector particle vibration velocity signals which respectively reflect different characteristics of a sound field, wherein the vector particle vibration velocity signals carry sound wave propagation direction information, can be used for sound source positioning tracking, sound field imaging and other aspects, and have wide application prospects in various fields such as aeroacoustics, hydroacoustics and the like. The scalar sound pressure signal can be measured by various sensors such as an electret condenser microphone, a piezoelectric transducer and the like. For vector particle vibration velocity signals, the traditional measurement method generally performs indirect measurement based on the sound pressure gradient principle, that is, the sound pressure detected by two sound pressure sensors at a certain distance is subjected to gradient calculation to indirectly obtain particle vibration velocity signals. The traditional vector particle vibration velocity signal measurement method has various problems of low measurement precision, large aperture size of a sensor array and the like.
At the end of the last 90 s, dutch-related researchers provided a hot-wire type particle vibration velocity sensor based on micro-electro-mechanical systems (MEMS) technology, which can directly measure the particle vibration velocity signal of sound. When an acoustic signal acts on the sensor, the sensor can realize direct measurement of the vibration velocity signal of the acoustic particle through the temperature change of the thermal resistance wire. The sensor based on the structure has the advantages of simple process, small array aperture, high measurement accuracy and the like, and has good directivity.
However, in an actual environment, airflow disturbance such as wind will also act on the sensitive structure of the sensor, which will affect the temperature field formed by the sensitive structure of the sensor, change the temperature of the thermal resistance wire, and cause the sensitive structure to shake to a certain extent. This will result in the output signal of the sensor containing significant sensor wind noise. The sensor wind noise is mainly concentrated in low frequencies below 100Hz, and the audible sound is mainly distributed in the frequency band range of 20Hz-20 kHz. For the sound signal of the high frequency band, the output signal can be processed by filtering or the like. For a low-frequency sound signal, since the frequency band of the low-frequency sound signal is substantially overlapped with the wind noise frequency band, it is difficult to process the output signal of the sensor by a method such as filtering. The wind noise greatly affects various indexes such as detection accuracy and detection distance of the particle vibration velocity sensor.
Disclosure of Invention
The invention provides a windproof micro-packaging device of a mass point vibration velocity sensor, which aims to solve the problem that the detection of the mass point vibration velocity sensor is influenced by wind noise in the prior art.
The invention provides a windproof micro-packaging device of a mass point vibration velocity sensor, which comprises a first channel, a second channel and a vent hole structure which are sequentially connected, wherein the mass point vibration velocity sensor is arranged in the second channel according to the 8-shaped directivity of the mass point vibration velocity sensor;
the first channel, the second channel and the air hole structure form a sound passage integrally, target sound signals are converged and amplified through the first channel, and the target sound signals are detected through a particle vibration velocity sensor arranged in the second channel, so that the influence of wind noise on the particle vibration velocity sensor is reduced;
the cross section of the first channel opening of the first channel is larger than that of the second channel opening of the first channel, the second channel opening of the first channel is connected with the first channel opening of the second channel, and the air hole structure is arranged at the second channel opening of the second channel.
Optionally, the first port of the first passage gradually converges toward the second port of the first passage until the first port of the second passage communicates with the second port of the first passage through the second port of the first passage.
Optionally, the inner part of the axial section of the first channel is in a trapezoidal structure.
Optionally, the first channel is of a truncated pyramid or circular truncated cone structure, and the whole periphery of the first channel is of a smooth streamline structure so as to guide wind.
Optionally, the first channel includes a first end surface, a second end surface, a third end surface and a fourth end surface, where the first end surface and the third end surface are two opposite end surfaces, and the second end surface and the fourth end surface are two opposite end surfaces;
the included angle between the first end face and the third end face is 30-90 degrees, and the included angle between the second end face and the fourth end face is 90-170 degrees.
Optionally, the inner part of the axial section of the second channel is a straight-tube structure.
Optionally, the interior of the second channel is a prismatic or cylindrical structure.
Optionally, the whole of the air hole structure is prismatic or circular, and a plurality of air holes are uniformly distributed on the air hole structure.
Optionally, according to the 8-shaped directivity of the particle velocity sensor, the direction with the maximum sensitivity is directly opposite to the connection between the first channel and the second channel.
Optionally, the overall shape of the windproof micro-packaging device of the particle velocity sensor is set according to assembly requirements.
The invention has the following beneficial effects:
the invention designs a windproof micro-packaging structure of a mass point vibration velocity sensor, a sound passage is integrally formed by a first passage, a second passage and a vent hole structure in the windproof micro-packaging structure, a target sound signal is converged and amplified through the first passage, and the target sound signal is detected through the mass point vibration velocity sensor arranged in the second passage, so that the influence of wind noise on the mass point vibration velocity sensor is reduced.
Drawings
FIG. 1 is a schematic view of a wind-proof micro-packaging device of a mass point vibration velocity sensor according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a wind-proof micro-packaging device for a mass point vibration velocity sensor according to an embodiment of the present invention;
FIG. 3 is a schematic illustration of wind and target acoustic signal propagation directions provided by an embodiment of the present invention;
FIG. 4 is a schematic cross-sectional view of another wind-resistant micro-packaging apparatus for a particle velocity sensor according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a relationship between a particle velocity sensor and an input direction of an acoustic signal according to an embodiment of the present invention.
Description of the drawings: 1 first channel, 11 first end face, 12 second end face, 13 third end face, 14 fourth end face, 2 second channel, 3 air hole structure and 4 mass point vibration speed sensor.
Detailed Description
The existing particle vibration velocity sensor realizes measurement of sound wave particle vibration velocity signals through temperature change between the thermal resistance wires, when sound signals are transmitted in the air, the sound signals can cause vibration of the air, when the vibration acts on the particle vibration velocity sensor, a temperature field near the particle vibration velocity sensor can be changed, so that the temperature of the thermal resistance wires of the sensor is changed, the resistance of the thermal resistance wires is changed, and the monitoring of the sound signal particle vibration velocity information can be completed according to the change of the resistance of the thermal resistance wires.
And in the working process of the particle vibration velocity sensor, wind noise is generated under the influence of wind. Wind noise of a sensor refers to noise generated by interaction of wind with sensor structures placed therein, and is not wind noise in the ambient background.
Currently, wind noise suppression techniques are mostly used to reduce the influence of wind on the sensor. The wind noise suppression technology is used for reducing the influence of wind noise on the performance of the sensor by adopting proper wind prevention measures on the sensor to enable the sensor to be in a stable working environment. Therefore, the external wind-proof device and the packaging structure of the sensor are particularly critical for suppressing wind noise. The wind-proof device and the packaging structure have the wind-proof function and the sound-transmitting function at the same time, the wind-proof device and the packaging structure ensure that the sensor can work in an environment with small airflow disturbance, and the packaging structure ensures that a target signal can pass through the structures with least attenuation, so that the sensor can accurately detect the target signal.
Traditional sound pressure sensors such as silicon microphones and microphones have the characteristic of omnidirectional pickup, and the sound transmission function of the packaging structure can be realized only by reserving a sound transmission hole on the surface of a packaging shell. These encapsulation structures enable substantially complete encapsulation of the sensitive structure of the sensor (except for the acoustically transparent portion) with better resistance to wind noise. Meanwhile, the sound pressure sensor can be manufactured by adopting mature process means such as an MEMS (micro electro mechanical System) process and the like, and is packaged by chip packaging technologies such as TSOP (time series package), BGA (ball grid array) and the like, so that the sound pressure sensor is convenient to integrate with a subsequent system. However, the particle velocity sensor has natural 8-shaped directivity, so that the sound pickup performance of the particle velocity sensor is seriously affected by a packaging mode suitable for the traditional sound pressure sensor, and the packaging structure is not suitable for the particle velocity sensor.
Based on this, the embodiment of the invention designs a windproof microstructure package suitable for a particle vibration velocity sensor, a sound passage is integrally formed by a first channel 1, a second channel 2 and a vent structure 3 in the windproof microstructure package structure, a target sound signal is converged and amplified through the first channel 1, and the target sound signal is detected through a particle vibration velocity sensor 4 arranged in the second channel 2, so that wind noise of the particle vibration velocity sensor 4 can be reduced, the sensitivity and the signal-to-noise ratio of the sensor are improved, and the connection and integration of the particle vibration velocity sensor 4 and a subsequent system are facilitated. The present invention will be described in further detail below with reference to the drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the invention.
The embodiment of the invention provides a windproof micro-packaging device of a mass point vibration velocity sensor, which comprises a first channel 1, a second channel 2 and a vent hole structure 3 which are sequentially connected, wherein the mass point vibration velocity sensor 4 is arranged in the second channel 2 according to the 8-shaped directivity of the mass point vibration velocity sensor 4;
the first channel 1, the second channel 2 and the air-permeable hole structure 3 form a sound channel integrally, a target sound signal is converged and amplified through the first channel 1, and the target sound signal is detected through a particle vibration velocity sensor 4 arranged in the second channel 22, so that the influence of wind noise on the particle vibration velocity sensor 4 is reduced; the sectional area of the first channel opening of the first channel 1 is larger than that of the second channel opening of the first channel 1, the second channel opening of the first channel 1 is connected with the first channel opening of the second channel 2, and the air hole structure 3 is arranged at the second channel opening of the second channel 2.
Specifically, in the embodiment of the present invention, the input directions of the particle velocity sensor 4 and the acoustic signal are shown in fig. 5, that is, the input direction of the particle velocity sensor 4 relative to the acoustic signal in the embodiment of the present invention.
Therefore, the windproof microstructure package provided by the embodiment of the invention can prevent wind and protect the particle vibration velocity sensor 4, has the characteristics of small volume and easy integration, and can provide a stable working state with small airflow disturbance for the particle vibration velocity sensor 4 on the basis of not influencing the performance and characteristics of the particle vibration velocity sensor 4, thereby reducing the wind noise of the particle vibration velocity sensor 4.
It should be noted that the first channel 1, the second channel 2 and the vent structure 3 in the embodiment of the present invention are made of various materials such as foam, silica gel, and semiconductor, and the manufacturing process thereof may be designed differently according to the specific materials used. Specifically, those skilled in the art may design arbitrarily according to actual situations, as long as a stable operating state with less airflow disturbance is provided for the particle velocity sensor 4, and an environment with less wind noise of the particle velocity sensor 4 is provided, which is not described in detail in the present invention. Meanwhile, the overall shape of the windproof micro-packaging device of the particle velocity sensor 4 according to the embodiment of the invention is arbitrarily set according to the assembly requirements and various requirements.
In the windproof micro-packaging device of the particle velocity sensor 4 according to the embodiment of the present invention, a Land Grid Array (LGA), a Ball Grid Array (BGA) or a Thin Small-sized Package is used for chip packaging (TSOP).
In specific implementation, a first port of the first channel 1 in the embodiment of the present invention gradually converges toward a second port of the first channel 1 until the first port of the second channel 2 communicates with a second port of the first channel 1.
That is, the first passage 1 of the embodiment of the present invention is substantially in a truncated pyramid or truncated cone structure, and as shown in fig. 2, the inside of the cross section of the first passage 1 of the embodiment of the present invention in the axial direction is in a trapezoidal structure.
Specifically, one end of the first channel 1 in the embodiment of the present invention is connected to the external environment, and is an inlet of the first channel 1, and is configured to receive a target acoustic signal; and the other end is connected to the inlet of the second channel 2. The first channel 1 described in the embodiment of the present invention is connected to the external environment through an opening on the package housing, and gradually converges from outside to inside to the joint of the second channel 2 and the first channel 1, that is, the cross section of the joint of the first channel 1 and the second channel 2 is smaller than the cross section of the interface between the first channel 1 and the external environment, and this structure can perform an aggregation and amplification effect on the acoustic signal, that is, the intensity of the acoustic signal at the inlet of the second channel 2 is greater than the intensity of the acoustic signal at the inlet of the first channel 1. Therefore, the structure of the embodiment of the invention can increase the sensitivity and the signal-to-noise ratio of the sensor and improve the performance of the sensor.
The particle vibration velocity sensor 4 is placed in the second channel 2, and the direction with the maximum sensitivity is opposite to the connection part of the first channel 1 and the second channel 2 according to the 8-shaped directivity of the particle vibration velocity sensor 4, so that the particle vibration velocity sensor 4 can detect the target sound signal in the direction with the maximum sensitivity. Meanwhile, the tail end of the second channel 2 is provided with a sound-transmitting hole structure communicated with the external environment, and a complete sound signal channel is constructed in the direction with the greatest sensitivity of the sensor by the first channel 1, the second channel 2 and the sound-transmitting hole structure, so that interference caused by factors such as sound signal reflection is reduced.
In practical application, when wind and a target acoustic signal act on the package structure simultaneously, according to analysis of hydrodynamics, when the wind flows through the inlet of the first channel 1, the wind flows to the upper and lower surfaces of the package structure and does not enter the first channel 1, specifically, as shown by a dotted line in fig. 3, the wind speed at the inlet of the first channel 1 is obviously reduced, compared with an external environment, the air flow speed in the package structure is obviously reduced, and the particle vibration velocity sensor 4 located in the second channel 2 can work in an environment with small airflow disturbance, so that the wind noise of the sensor is reduced. The target acoustic signal at the inlet of the first channel 1 does not change the propagation direction, enters the second channel 2 after passing through the first channel 1, the first channel 1 can amplify the acoustic signal, the amplified acoustic signal enters the second channel 2, and the target acoustic signal is detected by the particle vibration velocity sensor 4 in the second channel 2.
Through a large number of experimental tests, the embodiment of the present invention obtains that when the included angle between the first end surface 11 and the third end surface 13 of the first channel 1 is 30 to 90 degrees, and the included angle between the second end surface 12 and the fourth end surface 14 of the first channel 1 is 90 to 170 degrees, that is, when the included angle between two side surfaces of the wind-proof micro-package device is set to 90 to 170 degrees, and the included angle between the bottom surface and the top surface is set to 30 to 90 degrees, the optimal effect of reducing wind noise can be obtained.
For example, the second end face 12 and the fourth end face 14 of the first channel 1 are used as the side faces of the windproof micro-packaging device, the first end face 11 and the third end face 13 are used as the bottom face and the top face of the windproof micro-packaging device, an included angle between two side faces of the windproof micro-packaging device can be set to be 120 degrees, and an included angle between the bottom face and the top face of the windproof micro-packaging device is set to be 60 degrees.
It should be noted that, in the embodiment of the present invention, the lengths of the first channel 1 and the second channel 2, the channel wall thickness of each channel, the size of the space in each channel, the specifically adopted preparation material, and the like may be set according to actual needs, which is not specifically limited by the present invention, but the specific setting of each parameter of the first channel and the second channel is to reduce wind noise and improve the performance of the sensor.
That is, the first channel 1 according to the embodiment of the present invention is connected to the external environment through the opening of the package housing, and gradually converges from the outside to the connection between the second channel 2 and the first channel 1. On the premise of not influencing the performance, the first channel 1 can play a role in gathering and amplifying the acoustic signals, so that the sensitivity and the signal-to-noise ratio of the sensor can be increased, and the performance of the sensor is improved. On the premise of not affecting the performance, the first channel 1 of the present invention can be designed into various shapes according to the practical application requirement, including but not limited to a polygon terrace, a circular truncated cone, etc. The second channel 2 according to the present invention can be designed into various shapes according to the requirements of practical application without affecting the performance, including but not limited to polygonal column, cylindrical column, etc. On the premise of not influencing the performance, the number and the shape of the sound-transmitting holes can be adjusted according to the actual application requirement.
In specific implementation, in order to better guide wind, in the embodiment of the present invention, the periphery of the first channel 1 is designed to be a smooth streamline structure as a whole, as shown in fig. 4.
Further, in the embodiment of the present invention, the inside of the axial cross section of the second channel 2 is a cylindrical structure, specifically, the inside of the second channel 2 may be various cylindrical structures such as a prism or a cylinder, and a particle vibration velocity sensor 4 is disposed in the second channel 2, and according to the 8-shaped directivity of the particle vibration velocity sensor 4, the direction with the largest sensitivity is directly opposite to the connection between the first channel 1 and the second channel 2, so as to achieve better sound signal collection.
In specific implementation, the shape of the vent structure 3 of the embodiment of the present invention is matched with the axial cross section of the second channel 2, that is, the whole shape of the vent structure 3 of the embodiment of the present invention is prismatic or circular, and the vent structure 3 of the embodiment of the present invention is hermetically connected with the second channel 2.
It should be noted that, in the vent structure 3 in the embodiment of the present invention, a plurality of vents are uniformly distributed, and the number and the shape of the vents may be arbitrarily set according to specific needs, which is not limited in detail in the present invention.
In general, the core idea of the embodiment of the present invention is to reduce the air flow speed in the package structure through the first channel 1, so that the particle velocity sensor 4 located in the second channel 2 can operate in an environment with less air flow disturbance, thereby reducing the wind noise of the sensor. Namely, the wind flows through the inlet of the first channel 1 of the wind-proof microstructure package of the particle vibration velocity sensor 4, flows to the upper surface and the lower surface of the package, does not enter the first channel 1, and provides a stable working environment with small airflow disturbance for the particle vibration velocity sensor 4. Therefore, the windproof microstructure package provided by the embodiment of the invention has good windproof function and sound transmission function, can inhibit wind noise of the sensor on the basis of not influencing the performance and characteristics of the particle vibration velocity sensor 4, and provides a stable working environment with less airflow disturbance for the sensor.
Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, and the scope of the invention should not be limited to the embodiments described above.
Claims (10)
1. A windproof micro-packaging device of a mass point vibration velocity sensor is characterized by comprising a first channel, a second channel and a vent hole structure which are sequentially connected, wherein the mass point vibration velocity sensor is arranged in the second channel according to the 8-shaped directivity of the mass point vibration velocity sensor;
the first channel, the second channel and the air hole structure form a sound passage integrally, target sound signals are converged and amplified through the first channel, and the target sound signals are detected through a particle vibration velocity sensor arranged in the second channel, so that the influence of wind noise on the particle vibration velocity sensor is reduced;
the cross section of the first channel opening of the first channel is larger than that of the second channel opening of the first channel, the second channel opening of the first channel is connected with the first channel opening of the second channel, and the air hole structure is arranged at the second channel opening of the second channel.
2. The apparatus of claim 1,
the first channel opening of the first channel gradually converges towards the second channel opening of the first channel until the first channel opening of the second channel is communicated with the second channel opening of the first channel through the second channel opening of the first channel.
3. The apparatus of claim 2,
the inner part of the axial section of the first channel is of a trapezoidal structure.
4. The apparatus of claim 2,
the interior of the first channel is of a prismatic table or a circular table structure, and the periphery of the first channel is integrally of a smooth streamline structure so as to guide wind.
5. The device of claim 2, wherein the first channel comprises a first end face, a second end face, a third end face, and a fourth end face, wherein the first end face and the third end face are opposite end faces, and the second end face and the fourth end face are opposite end faces;
the included angle between the first end face and the third end face is 30-90 degrees, and the included angle between the second end face and the fourth end face is 90-170 degrees.
6. The apparatus of any one of claims 1-5,
the inner part of the axial section of the second channel is of a straight-tube structure.
7. The apparatus of claim 6,
the interior of the second channel is of a prismatic or cylindrical structure.
8. The apparatus of any one of claims 1-5,
the whole air hole structure is prismatic or circular, and a plurality of air holes are uniformly distributed on the air hole structure.
9. The apparatus of any one of claims 1-5,
and according to the 8-shaped directivity of the particle vibration velocity sensor, the direction with the maximum sensitivity is over against the joint of the first channel and the second channel.
10. The apparatus of any one of claims 1-5,
the overall shape of the windproof micro-packaging device of the particle vibration velocity sensor is set according to the assembly requirement.
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|---|---|---|---|---|
| JP2007187758A (en) * | 2006-01-11 | 2007-07-26 | Yamaha Corp | Sound reproducing system |
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| CN107687890A (en) * | 2017-10-20 | 2018-02-13 | 中国计量大学 | Vector microphone with horn structure |
| CN109827653A (en) * | 2019-02-28 | 2019-05-31 | 曲阜师范大学 | A kind of complete optical fiber vector microphone probe |
| CN209247158U (en) * | 2018-10-12 | 2019-08-13 | 南京粒子声学科技有限公司 | A kind of integrated form acoustic vector sensors |
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2021
- 2021-06-16 CN CN202110667538.8A patent/CN113340406A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007187758A (en) * | 2006-01-11 | 2007-07-26 | Yamaha Corp | Sound reproducing system |
| CN205642606U (en) * | 2016-05-25 | 2016-10-12 | 中国电子科技集团公司第三研究所 | Particle vibration velocity measuring transducer packaging structure |
| CN107687890A (en) * | 2017-10-20 | 2018-02-13 | 中国计量大学 | Vector microphone with horn structure |
| CN209247158U (en) * | 2018-10-12 | 2019-08-13 | 南京粒子声学科技有限公司 | A kind of integrated form acoustic vector sensors |
| CN109827653A (en) * | 2019-02-28 | 2019-05-31 | 曲阜师范大学 | A kind of complete optical fiber vector microphone probe |
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Application publication date: 20210903 |