CN113325616B - Method and device for separating polaroid and glass substrate of waste liquid crystal display screen - Google Patents
Method and device for separating polaroid and glass substrate of waste liquid crystal display screen Download PDFInfo
- Publication number
- CN113325616B CN113325616B CN202110604442.7A CN202110604442A CN113325616B CN 113325616 B CN113325616 B CN 113325616B CN 202110604442 A CN202110604442 A CN 202110604442A CN 113325616 B CN113325616 B CN 113325616B
- Authority
- CN
- China
- Prior art keywords
- box body
- fixedly connected
- push rod
- glass substrate
- liquid crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Processing Of Solid Wastes (AREA)
- Liquid Crystal (AREA)
Abstract
The invention relates to the technical field of resource regeneration, in particular to a method and a device for separating a polaroid and a glass substrate of a waste liquid crystal display screen; the heating plate is fixedly connected with the first box body, the first support frame is positioned above the first box body, the first air cylinder is fixedly connected with the first support frame, the first push rod is movably connected with the first air cylinder, and the first filter plate is rotatably connected with the first push rod and positioned in the first box body; the second box body is positioned on one side of the first box body, the second support frame is fixedly connected with the second box body, the second cylinder is fixedly connected with the second support frame, the second push rod is movably connected with the second cylinder, and the second filter plate is fixedly connected with the second push rod; and dissolving the epoxy resin adhesive between the polarizer and the glass substrate by using the epoxy resin degumming agent, and separating the polarizer from the glass substrate by using water in the second box body.
Description
Technical Field
The invention relates to the technical field of resource regeneration, in particular to a method and a device for separating a polaroid and a glass substrate of a waste liquid crystal display screen.
Background
Most of liquid crystal display screens are formed by sealing two glass substrates engraved with indium electrodes by using epoxy resin, injecting liquid crystal, and then pressing a polarizer on the outer sides of the two glass substrates. Therefore, the key to recycling and disposing the waste liquid crystal panel is to effectively separate the polarizer, the glass substrate, and the ITO film for etching the indium electrode. The waste liquid crystal screen contains valuable resources such as a polaroid, a glass substrate, an ITO (indium tin oxide) coating film and the like. The polaroid and the glass substrate can be recycled, and the ITO coating film is a main raw material for recycling metallic indium.
The treatment mode of the waste liquid crystal screen adopted at present is mainly landfill and incineration, however, if the treatment means is directly adopted, the atmosphere, the soil and the water body are polluted greatly.
Disclosure of Invention
The invention aims to provide a method and a device for separating a polaroid from a glass substrate of a waste liquid crystal display screen, and aims to solve the technical problem that the treatment mode of the waste liquid crystal display screen adopted currently in the prior art is mainly landfill and incineration, but if the treatment mode is directly adopted, the atmosphere, soil and water body are polluted greatly.
In order to achieve the purpose, the invention provides a method for separating a polaroid and a glass substrate of a waste liquid crystal display screen, which comprises the following steps:
firstly adding the epoxy resin degumming agent into the first container, and then adding purified water to form a water cover;
adding a waste liquid crystal display screen into the first container, and heating the first container;
heating for a preset time, fishing out the waste liquid crystal display screen in the first container, and putting the waste liquid crystal display screen in a second container;
and adding purified water into the second container, separating the waste liquid crystal display screen in the second container, floating the polaroid obtained by separation on the water surface, and sinking the glass substrate to the bottom of the water.
Wherein, in the step of adding a waste liquid crystal display screen into the first container and heating the first container:
the heating temperature is 100-110 ℃, and the heating time is 1-1.5 h.
The invention also provides a separation device adopting the method for separating the polaroid from the glass substrate of the waste liquid crystal display screen, and the separation device comprises a soaking box and a separation box, wherein the soaking box comprises a first box body, a first support frame, a heating plate, a first air cylinder, a first push rod and a first filter plate, the heating plate is fixedly connected with the first box body and is positioned on the inner side wall of the first box body, the first support frame is fixedly connected with the first box body and is positioned above the first box body, the first air cylinder is fixedly connected with the first support frame and is positioned inside the first support frame, the first push rod is movably connected with the first air cylinder and is positioned below the first air cylinder, and the first filter plate is rotatably connected with the first push rod, is positioned below the first push rod and is positioned inside the first box body; the separation box comprises a second box body, a second support frame, a second cylinder, a second push rod, a second filter plate and a water outlet valve, the second box body is fixedly connected with the first box body and is positioned on one side of the first box body, the second support frame is fixedly connected with the second box body and is positioned on one side, away from the first box body, of the second box body, a rectangular hole is formed in one side, close to the second support frame, of the second box body, the second cylinder is fixedly connected with the second support frame and is positioned above the second support frame, the second push rod is movably connected with the second cylinder and is positioned between the second cylinder and the second box body, the second push rod is fixedly connected with the second push rod and is positioned in the rectangular hole, a drain hole is formed in the bottom of the second box body, and the water outlet valve is fixedly connected with the box body and is positioned in the drain hole.
And an epoxy resin degumming agent is arranged in the first box body, the epoxy resin bonding agent between the polaroid and the glass substrate is dissolved by using the epoxy resin degumming agent, and then the polaroid is separated from the glass substrate by water in the second box body.
The first filter plate comprises a plate body, a rotating shaft and a magnet block, the rotating shaft is movably connected with the first push rod and is located at the bottom of the first push rod, the plate body is fixedly connected with the rotating shaft and is located below the first push rod, and the magnet block is fixedly connected with the plate body and is located inside the plate body.
The plate body can rotate around the rotating shaft by utilizing the magnetism of the magnet block.
The immersion box further comprises a metal block, wherein the metal block is fixedly connected with the first support frame, is positioned below the first support frame and is positioned above the magnet block.
The metal block is positioned on one side, far away from the second box body, of the first support frame, so that one side, provided with the magnet block, of the plate body is tilted.
The immersion box further comprises inclined plates, and the inclined plates are fixedly connected with the first box body and the second box body respectively and are located above the first box body and the second box body.
After the plate body inclines, the waste liquid crystal display screen on the top slides to the upper part of the inclined plate along the inclined plane, and then slides to the inside of the second box body along the inclined plate.
According to the method and the device for separating the polaroid from the glass substrate of the waste liquid crystal display screen, when separation is carried out, the first filter plate is located at the bottom of the first box body, the epoxy resin degumming agent is arranged in the first box body, the waste liquid crystal display screen is placed into the first box body, the heating plate is started, the epoxy resin degumming agent is used for dissolving the epoxy resin adhesive between the polaroid and the glass substrate, the first air cylinder is started, the first push rod is used for driving the first filter plate to ascend, so that the dissolved waste liquid crystal display screen is lifted, the waste liquid crystal display screen is placed into the second box body, the polaroid is separated from the glass substrate through water in the second box body, due to different densities, the obtained through separation floats on the glass substrate, the glass substrate sinks to the bottom, the second air cylinder is started, the second push rod is used for pushing the second filter plate into the second box body, the polaroid and the glass substrate are separated, the water outlet valve is opened, after drainage, the polaroid falls to the second filter plate, the glass substrate falls to the bottom of the second box body, the glass substrate falls, the epoxy resin degumming agent is used for separating the polaroid from the glass substrate, pollutants can be separated, and water can be recycled, and pollutants can not be generated, and can be generated in the water can be separated.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a flow chart of the steps of the method for separating the polarizer from the glass substrate of the waste liquid crystal display panel according to the present invention.
Fig. 2 is a schematic structural diagram of a device for separating a polarizer from a glass substrate of a waste liquid crystal display panel according to the present invention.
Fig. 3 is a cross-sectional view of the first cylinder provided by the present invention as it contracts.
Fig. 4 is a top view of a first filter plate provided by the present invention.
Fig. 5 is a schematic structural diagram of a circulation assembly provided by the present invention.
1-soaking box, 11-first box body, 12-first support frame, 13-heating plate, 14-first cylinder, 15-first push rod, 16-first filter plate, 161-plate body, 162-rotating shaft, 163-magnet block, 17-metal block, 18-inclined plate, 2-separation box, 21-second box body, 211-rectangular hole, 212-water discharge hole, 22-second support frame, 23-second cylinder, 24-second push rod, 25-second filter plate, 26-water outlet valve, 3-circulation component, 31-water tank, 32-water discharge pipe, 33-booster pump, 34-water outlet pipe, 35-third support frame and 36-spray head.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention. Further, in the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Referring to fig. 1, the present invention provides a method for separating a polarizer from a glass substrate of a waste liquid crystal display, comprising the steps of:
s1: firstly adding the epoxy resin degumming agent into the first container, and then adding purified water to form a water cover;
s2: adding a waste liquid crystal display screen into the first container, and heating the first container at the temperature of 100-110 ℃ for 1-1.5 h;
s3: after heating is completed, fishing out the waste liquid crystal display screen in the first container, and putting the waste liquid crystal display screen in a second container;
s4: and adding purified water into the second container, separating the waste liquid crystal display screen in the second container, floating the polaroid obtained by separation on the water surface, and sinking the glass substrate to the bottom of the water.
In this embodiment, utilize epoxy to take off the gluing agent and dissolve the polaroid, heating temperature is no longer than 120C, can not harm the polaroid, utilizes the density difference of polaroid and glass substrate, separates through water, can not produce the pollutant among the in-process of separation, and can recycle.
Referring to fig. 2 to 5, the present invention further provides a separation apparatus using the above method for separating a used liquid crystal display polarizer from a glass substrate, where the separation apparatus includes a soaking tank 1 and a separation tank 2, the soaking tank 1 includes a first tank 11, a first support frame 12, a heating plate 13, a first cylinder 14, a first push rod 15 and a first filter plate 16, the heating plate 13 is fixedly connected to the first tank 11 and located on an inner side wall of the first tank 11, the first support frame 12 is fixedly connected to the first tank 11 and located above the first tank 11, the first cylinder 14 is fixedly connected to the first support frame 12 and located inside the first support frame 12, the first push rod 15 is movably connected to the first cylinder 14 and located below the first cylinder 14, and the first filter plate 16 is rotatably connected to the first push rod 15 and located below the first push rod 15 and located inside the first tank 11; the separation box 2 comprises a second box body 21, a second support frame 22, a second cylinder 23, a second push rod 24, a second filter plate 25 and a water outlet valve 26, wherein the second box body 21 is fixedly connected with the first box body 11 and is positioned on one side of the first box body 11, the second support frame 22 is fixedly connected with the second box body 21 and is positioned on one side of the second box body 21 far away from the first box body 11, a rectangular hole 211 is formed in one side of the second box body 21 close to the second support frame 22, the second cylinder 23 is fixedly connected with the second support frame 22 and is positioned above the second support frame 22, the second push rod 24 is movably connected with the second cylinder 23 and is positioned between the second cylinder 23 and the second box body 21, the second filter plate 25 is fixedly connected with the second push rod 24 and is positioned in the rectangular hole 211, a water outlet hole 212 is formed in the bottom of the second box body 21, and the water outlet valve 26 is fixedly connected with the box body and is positioned in the water outlet hole 212.
In this embodiment, during separation, the first filter plate 16 is located at the bottom of the first box 11, an epoxy adhesive remover is arranged in the first box 11, and the waste liquid crystal display screen is placed in the first box 11, and the heating plate 13 is started, the epoxy adhesive between the polarizer and the glass substrate is dissolved by the epoxy adhesive remover, and the first cylinder 14 is started to drive the first filter plate 16 to ascend by the first push rod 15, so as to lift the dissolved waste liquid crystal display screen and place the waste liquid crystal display screen into the second box 21, and then the polarizer is separated from the glass substrate by the water in the second box 21, because of different densities, the polarizer obtained by separation floats on the glass substrate, and the glass substrate sinks to the bottom, so as to start the second cylinder 23, and then the second push rod 24 pushes the second filter plate 25 into the second box 21, so as to separate the polarizer from the glass substrate, the water outlet valve 26 is opened, after water drainage, the polarizer falls on the second box 25, the glass substrate falls on the bottom of the second box 21, and the epoxy adhesive remover is used for separating the polarizer from the glass substrate, and pollutants can be separated by the epoxy adhesive remover, and the water recycling pollutants can be generated during separation process.
Further, the first filter plate 16 includes a plate body 161, a rotating shaft 162 and a magnet block 163, the rotating shaft 162 is movably connected to the first push rod 15 and is located at the bottom of the first push rod 15, the plate body 161 is fixedly connected to the rotating shaft 162 and is located below the first push rod 15, and the magnet block 163 is fixedly connected to the plate body 161 and is located inside the plate body 161; the soaking tank 1 further comprises a metal block 17, wherein the metal block 17 is fixedly connected with the first support frame 12, is positioned below the first support frame 12, and is positioned above the magnet block 163; the soaking tank 1 further comprises an inclined plate 18, and the inclined plate 18 is fixedly connected with the first tank body 11 and the second tank body 21 and is positioned above the first tank body 11 and the second tank body 21.
In this embodiment, the magnetism of the magnet block 163 makes the plate body 161 rotate around the rotating shaft 162, after soaking, the first air cylinder 14 lifts the first filter plate 16, the metal block 17 is located on one side of the second box 21 away from the first support frame 12, so that the plate body 161 has one side of the magnet block 163 tilted, after the plate body 161 is tilted, the waste liquid crystal display screen on the top slides to the top of the inclined plate 18 along the inclined plane, and then slides to the inside of the second box 21 along the inclined plate 18.
Further, the device for separating a polarizer from a glass substrate of a waste liquid crystal display screen further comprises a circulating assembly 3, wherein the circulating assembly 3 comprises a water tank 31 and a water drainage pipe 32, the water drainage pipe 32 is fixedly connected with the water outlet valve 26 and is positioned below the second box body 21, and the water tank 31 is fixedly connected with the water drainage pipe 32 and is positioned below the water drainage pipe 32.
In this embodiment, after the outlet valve 26 is opened, water enters the drain pipe 32 through the drain hole 212, and the water used for separation in the second tank 21 is collected by the drain pipe 32, thereby facilitating the next separation.
Further, the circulating assembly 3 further comprises a booster pump 33 and a water outlet pipe 34, the booster pump 33 is fixedly connected with the water tank 31 and is positioned above the water tank 31, and the water outlet pipe 34 is fixedly connected with the booster pump 33 and is positioned above the second tank 21.
In this embodiment, the water in the water tank 31 is pumped out by the booster pump 33 and is sent into the second tank 21 through the water outlet pipe 34, thereby completing automatic water addition.
Further, circulation subassembly 3 still includes third support frame 35, third support frame 35 with second box 21 fixed connection, and be located the top of second box 21, shower nozzle 36 and third support frame 35 fixed connection, and be located the below of third support frame 35, the one end of outlet pipe 34 with booster pump 33 fixed connection, the other end of outlet pipe 34 with shower nozzle 36 fixed connection.
In this embodiment, after the separation, the polarizer falls on the second filter plate 25, and at this time, there is no water in the second box 21, and the water in the water tank 31 is pumped out by the booster pump 33, and the high-pressure water flow is generated by the sprayer 36 to wash the polarizer, so as to remove the residue on the polarizer and improve the separation effect.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention.
Claims (4)
1. A device for separating a polaroid and a glass substrate of a waste liquid crystal display screen adopts a method for separating the polaroid and the glass substrate of the waste liquid crystal display screen, and comprises the following steps: firstly adding the epoxy resin degumming agent into the first container, and then adding purified water to form a water cover; adding a waste liquid crystal display screen into the first container, and heating the first container at the temperature of 100-110 ℃ for 1-1.5 h; heating for a preset time, fishing out the waste liquid crystal display screen in the first container, and putting the waste liquid crystal display screen in a second container; adding purified water into the second container, separating the waste liquid crystal display screen in the second container, floating the polaroid obtained by separation on the water surface, and sinking the glass substrate to the water bottom; it is characterized in that the preparation method is characterized in that,
the device for separating the polaroid from the glass substrate of the waste liquid crystal display screen comprises a soaking box and a separating box, wherein the soaking box comprises a first box body, a first support frame, a heating plate, a first air cylinder, a first push rod and a first filter plate, the heating plate is fixedly connected with the first box body and is positioned on the inner side wall of the first box body, the first support frame is fixedly connected with the first box body and is positioned above the first box body, the first air cylinder is fixedly connected with the first support frame and is positioned in the first support frame, the first push rod is movably connected with the first air cylinder and is positioned below the first air cylinder, and the first filter plate is rotatably connected with the first push rod and is positioned below the first push rod and is positioned in the first box body;
the separation box comprises a second box body, a second supporting frame, a second cylinder, a second push rod, a second filter plate and a water outlet valve, the second box body is fixedly connected with the first box body and is positioned on one side of the first box body, the second supporting frame is fixedly connected with the second box body and is positioned on one side, far away from the first box body, of the second box body, a rectangular hole is formed in one side, close to the second supporting frame, of the second box body, the second cylinder is fixedly connected with the second supporting frame and is positioned above the second supporting frame, the second push rod is movably connected with the second cylinder and is positioned between the second cylinder and the second filter plate, the second push rod is fixedly connected with the second push rod and is positioned inside the rectangular hole, a drain hole is formed in the bottom of the second box body, and the water outlet valve is fixedly connected with the box body and is positioned inside the drain hole.
2. The apparatus of claim 1, wherein the separation device comprises a glass substrate and a polarizer disposed on the glass substrate,
the first filter plate comprises a plate body, a rotating shaft and a magnet block, the rotating shaft is movably connected with the first push rod and is located at the bottom of the first push rod, the plate body is fixedly connected with the rotating shaft and is located below the first push rod, and the magnet block is fixedly connected with the plate body and is located inside the plate body.
3. The apparatus of claim 2, wherein the separating means comprises a separating means for separating the used polarizer from the glass substrate,
the soaking box further comprises a metal block, wherein the metal block is fixedly connected with the first support frame, is positioned below the first support frame and is positioned above the magnet block.
4. The apparatus of claim 3, wherein the separation means comprises a separating means for separating a used polarizer from a glass substrate,
the soaking tank further comprises inclined plates, and the inclined plates are fixedly connected with the first tank body and the second tank body respectively and are positioned above the first tank body and the second tank body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110604442.7A CN113325616B (en) | 2021-05-31 | 2021-05-31 | Method and device for separating polaroid and glass substrate of waste liquid crystal display screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110604442.7A CN113325616B (en) | 2021-05-31 | 2021-05-31 | Method and device for separating polaroid and glass substrate of waste liquid crystal display screen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113325616A CN113325616A (en) | 2021-08-31 |
| CN113325616B true CN113325616B (en) | 2022-11-08 |
Family
ID=77422906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110604442.7A Active CN113325616B (en) | 2021-05-31 | 2021-05-31 | Method and device for separating polaroid and glass substrate of waste liquid crystal display screen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113325616B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101274506A (en) * | 2008-05-20 | 2008-10-01 | 友达光电股份有限公司 | Removing device and removing method for polarizer |
| CN103191903A (en) * | 2013-04-11 | 2013-07-10 | 合肥工业大学 | Method for recycling waste LCD (liquid crystal display) panels |
| CN104793369A (en) * | 2015-04-27 | 2015-07-22 | 上海第二工业大学 | Equipment used for separating and recovering glass and polaroid of waste liquid crystal display |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108405551A (en) * | 2018-02-02 | 2018-08-17 | 西南科技大学 | The method that waste LCD polaroid is detached with glass substrate |
-
2021
- 2021-05-31 CN CN202110604442.7A patent/CN113325616B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101274506A (en) * | 2008-05-20 | 2008-10-01 | 友达光电股份有限公司 | Removing device and removing method for polarizer |
| CN103191903A (en) * | 2013-04-11 | 2013-07-10 | 合肥工业大学 | Method for recycling waste LCD (liquid crystal display) panels |
| CN104793369A (en) * | 2015-04-27 | 2015-07-22 | 上海第二工业大学 | Equipment used for separating and recovering glass and polaroid of waste liquid crystal display |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113325616A (en) | 2021-08-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104766859B (en) | The preparation method and its structure of TFT substrate | |
| CN108623180A (en) | A kind of cutting method of panel display board | |
| CN113325616B (en) | Method and device for separating polaroid and glass substrate of waste liquid crystal display screen | |
| JP2007047351A (en) | Cleaning device for liquid crystal panel, and manufacturing method for liquid crystal device | |
| US7371023B2 (en) | Apparatus for processing substrates and method therefor | |
| CN101234386A (en) | Method for selectively recovering TFT-LCD glass substrate by using deep pool chemical reaction | |
| JP2003233078A (en) | Method for fabricating lcd | |
| JP4997434B2 (en) | Manufacturing method of liquid crystal display device | |
| KR101932629B1 (en) | Apparatus and method for removing foreign material in cleaning bath for cleaning mask of organic light emitting diode | |
| CN1229188C (en) | Washing method, liquid crystal device and manufacturing method thereof | |
| CN106862215B (en) | Method for rinsing display panel by using rinsing machine | |
| JP4343500B2 (en) | Manufacturing method of liquid crystal display device | |
| TW200307651A (en) | Electrooptic panel, electronic machine and manufacturing method of electrooptic panel | |
| KR100824544B1 (en) | Etching Apparatus and etching method | |
| CN1991590A (en) | Method for forming pattern and method for fabricating LCD device using the same | |
| KR20140059480A (en) | Cleaning apparatus of glass substrates | |
| CN1744300A (en) | Manufacturing method of film transistor base plate and stripping composition | |
| JP2007047353A (en) | Manufacturing method for electro-optical device, and washing device for electro-optical panel | |
| KR101903014B1 (en) | Apparatus for separating foreign substance in cleaning bath | |
| CN107413728A (en) | A kind of green electrokinetic cell aluminum hull cleaning device | |
| JP5143731B2 (en) | Stripping composition, method for producing TFT substrate, and recycling method for stripping composition | |
| KR101300524B1 (en) | Etching Apparatus and etching method | |
| KR101576145B1 (en) | Apparatus for recycling chemical fluid for cleaning semiconductor substrate | |
| CN219483609U (en) | Mechanical part cleaning device | |
| CN104014496A (en) | Liquid drainage method and device for washing chamber |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |