CN113325506A - Holographic optical waveguide lens and augmented reality display device - Google Patents
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
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- G02B5/00—Optical elements other than lenses
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
- G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
The invention provides a holographic optical waveguide lens and an augmented reality display device, the holographic optical waveguide lens comprises: a waveguide; a functional region having an optical diffraction function on an upper surface or a lower surface of the waveguide, the functional region including: an incident functional region in which a one-dimensional grating that couples external image light to a waveguide is disposed; and the emergent functional area is internally provided with a two-dimensional grating which couples the image light transmitted in the waveguide out of the waveguide and realizes the expansion of the image light. The invention only needs to set two functional areas of the incident functional area and the emergent functional area, reduces the area requirement on the waveguide and is suitable for a micro display system. In addition, two-dimensional expansion of light is realized through two-dimensional grating in the emergent functional area based on multidirectional diffraction, thereby promoting image contrast and ensuring imaging effect.
Description
Technical Field
The invention relates to a virtual reality display technology, in particular to a holographic optical waveguide lens and an augmented reality display device.
Background
Augmented Reality (AR) technology is a new technology for seamlessly integrating real world information and virtual world information, not only shows the real world information, but also simultaneously displays the virtual information, and the two kinds of information are mutually supplemented and superposed.
One possible solution is to provide a grating waveguide structure that extends the field of view over the entire width of the display. As shown in fig. 1, a grating waveguide structure using in-turn-out in the prior art is shown, which includes a waveguide 10, an in-region 20, a turn region 30 and an out-region 40, wherein gratings are disposed in the in-region 20, the turn region 30 and the out-region 40. The image light is incident from the coupling-in area 20 and is diffracted in the coupling-in area 20, the light meeting the total reflection condition is transmitted to the turning area 30 through total reflection in the waveguide 10, the light interacts with the grating in the turning area 30 and realizes light path bending, the bent light is continuously transmitted to the coupling-out area 40 in a total reflection transmission mode, and finally is coupled out to human eyes by the coupling-out area 40 to realize virtual imaging. In the above process, the light transmitted from the coupling-in region 20 to the inflection region 30 realizes stretching and expansion in the X-axis direction, and the light transmitted from the inflection region 30 to the coupling-out region 40 realizes stretching and expansion in the Y-axis direction, thereby realizing pupil expansion in the two-dimensional space.
This pupil-expanding solution with three separate regions requires the deployment of large area waveguides and is not suitable for miniature display systems (e.g., AR glasses). Another problem is that this approach of two unidirectional diffractive expansions requires a large number of diffractive interactions (each of which results in a loss of scattering), thereby reducing the contrast of the image and affecting the visual effect.
Disclosure of Invention
In order to solve the above technical problems in the prior art, a first aspect of the present invention provides a holographic optical waveguide lens, which can implement two-dimensional expansion of image light only by providing two functional areas, and the specific technical solution is as follows:
a holographic optical waveguide lens, comprising:
a waveguide;
a functional region having an optical diffraction function on an upper surface or a lower surface of the waveguide, the functional region including:
an incident functional region in which a one-dimensional grating that couples external image light to a waveguide is disposed;
and the emergent functional area is internally provided with a two-dimensional grating which couples the image light transmitted in the waveguide out of the waveguide and realizes the expansion of the image light.
In some embodiments, the grating period vector of the one-dimensional grating is parallel to the grating period vector of the two-dimensional grating in one of its orientations, the grating period vectors of the two-dimensional grating in its two orientations being equal and equal to the grating period vector of the one-dimensional grating.
In some embodiments, the refractive index of the waveguide is set to 1.7 to 2.0, and the grating period of the one-dimensional grating and the grating period of the two-dimensional grating in both orientations thereof are 290 to 710 nm.
In some embodiments, the one-dimensional grating is a rectangular grating, a tilted grating, and a scintillating grating with wavelength selectivity.
In some embodiments, the two-dimensional grating is an arrayed waveguide grating having a two-dimensional periodic structure.
In some embodiments, the arrayed waveguide grating comprises a cylindrical arrayed waveguide grating, a rectangular pillar arrayed waveguide grating, and a tapered pillar arrayed waveguide grating.
In some embodiments, the arrayed waveguide grating is provided by a two-dimensional photonic crystal formed within the waveguide, the two-dimensional photonic crystal having periodic nanostructures in both intersecting directions.
In some embodiments, the two-dimensional grating is formed by two overlay exposures, the two overlay exposures being:
fixing the positions of an exposure light source and the waveguide to complete the first exposure to obtain a one-dimensional grating structure;
the exposure light source is kept still, the waveguide rotates for a preset angle along the center, the second exposure is completed, and the two-dimensional grating is obtained;
the exposure light source is composed of two planar waves, and the two planar waves form an exposure interference surface.
Compared with the prior art, the invention only needs to set two functional areas, namely the incident functional area and the emergent functional area, reduces the area requirement on the waveguide, and is suitable for a micro display system. In addition, two-dimensional expansion of light is realized through two-dimensional grating in the emergent functional area based on multidirectional diffraction, thereby promoting image contrast and ensuring imaging effect.
A second aspect of the present invention provides an augmented reality display device, comprising:
a micro-projection device for generating image light;
an optical waveguide lens, the optical waveguide lens being the holographic optical waveguide lens provided by any one of the first aspect of the present invention.
In some embodiments, the number of the micro-projection devices is two, and the micro-projection devices are respectively arranged corresponding to the holographic optical waveguide lenses of the left eye and the right eye.
Drawings
Fig. 1 is a schematic structural diagram of an optical waveguide lens with a two-dimensional pupil expansion effect in the prior art;
FIG. 2 is a schematic structural diagram of a holographic optical waveguide lens of the present invention;
FIG. 3 is a schematic diagram of the optical path of the holographic optical waveguide lens of the present invention;
FIG. 4 is a schematic diagram of the light path of the light in the incident functional area and the exit functional area;
FIG. 5 is a schematic diagram of the light path of light rays in the exit functional area;
FIG. 6 is a schematic diagram of the principle of light diffraction of a rectangular grating;
FIG. 7 is a schematic diagram of the principle of light diffraction for a tilted grating;
FIG. 8 is a schematic diagram of the principle of light diffraction of a scintillation grating;
FIG. 9 is a schematic diagram of several conventional two-dimensional array gratings;
FIG. 10 is a schematic diagram of the arrangement of grating period vectors of a two-dimensional array grating;
fig. 11 is an imaging schematic diagram of an augmented reality display device of the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description of the embodiments, structures, features and effects of the head-up display system and the vehicle according to the present invention with reference to the accompanying drawings and preferred embodiments is as follows:
the foregoing and other technical matters, features and effects of the present invention will be apparent from the following detailed description of preferred embodiments, which is to be read in connection with the accompanying drawings. While the present invention has been described in connection with the preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but is intended to cover various modifications, equivalent arrangements, and specific embodiments thereof.
Fig. 2 is a schematic structural diagram of a holographic optical waveguide lens of the present invention, which is used as a display screen of an augmented reality display device. As shown in fig. 1, the holographic optical waveguide lens includes:
a waveguide 1;
functional regions having an optical diffraction function are provided on the upper surface or the lower surface of the waveguide 1, and as shown in fig. 2, if one surface on which image light is incident and emitted is defined as the upper surface, in the embodiment of fig. 2, both functional regions are provided on the upper surface of the waveguide.
The functional areas comprise an entrance functional area 2 and an exit functional area 3, wherein:
a one-dimensional grating for optically coupling an external image into the waveguide 1 is provided in the incident functional region 2.
And a two-dimensional grating which is used for coupling the image light transmitted from the waveguide out of the waveguide 1 and realizing the expansion of the image light is arranged in the emergent functional area 3.
And as shown in fig. 2, in the present invention, the grating period vector p0 of the one-dimensional grating is parallel to the grating period vector p2 of the two-dimensional grating in one orientation thereof in the grating arrangement. Furthermore, the grating period vectors of the two-dimensional grating in the two orientations are equal and equal to the grating period vector of the one-dimensional grating.
The grating period vector referred to herein refers to a direction vector perpendicular to the grating orientation (the direction in which the channel of the grating extends). Since the one-dimensional grating is formed by arranging a group of mutually parallel grating channels, the one-dimensional grating only has one grating period vector p0, and the two-dimensional grating has two grating period vectors p1 and p 2.
The optical principles of the holographic optical waveguide lens of the present invention will be described below, before which we define the following coordinate axes:
an X axis: the width direction of the waveguide 1 is also the direction of the binocular connecting line of the user;
y-axis: the height direction of the waveguide 1 is also the extension direction of the nose bridge of the user;
z-axis: perpendicular (or orthogonal) to the X-Y plane defined by the X-axis and Y-axis.
It can be seen that the entrance functional region 2 and the exit functional region 3 in the present invention are located on the X-Y plane.
Please refer to fig. 3 to 5: image light emitted by the micro-projection device is incident to the incident functional area 2 at a certain diffusion angle, and the light interacts with the one-dimensional grating in the incident functional area 2 to form diffracted light with the propagation direction perpendicular to the channel direction of the one-dimensional grating. The diffracted light satisfies the total reflection condition of the waveguide, and is thereby guided in the waveguide 1 in a total reflection form and finally guided to the exit functional region 3.
After reaching the exit functional area 3, the light interacts with the two-dimensional grating in the exit functional area 3, part of the light is continuously transmitted forward in a total reflection mode, part of the light is diffracted into three diffracted lights, one diffracted light is transmitted diffraction, the diffracted light transmits out of the functional area 3 and is observed by human eyes, and the other two diffracted lights are reflected diffracted lights, and are reflected back into the waveguide and continuously interact with the two-dimensional grating. It can be seen that through interaction with the two-dimensional grating in the exit functional region 3, the image light guided from the entrance functional region 2 can not only be coupled out of the waveguide 1 to achieve imaging, but also in the process of multiple interactions with the two-dimensional grating, the image light can be expanded and stretched in multiple directions in the X-Y plane, thereby achieving two-dimensional pupil expansion of the image. In addition, in the present invention, the image light can be coupled out at each position of the two-dimensional grating in the exit functional region 3, so that the human eye can see a clear and balanced image in the entire exit functional region 3.
Certainly, in order to achieve the above diffraction effect, the grating orientation and the grating period of the two-dimensional grating must be matched with the grating orientation and the grating period of the one-dimensional grating, so that the grating parameters of the one-dimensional grating and the two-dimensional grating need to be calculated correspondingly based on the grating diffraction formula, and the layout forming of the grating is performed according to the calculation result, and the specific calculation process and the layout forming process of the grating are well known to those skilled in the art, and are not described herein again. After seeing the technical solution of the present invention, a person skilled in the art is fully capable of completing a specific calculation process and layout formation of a grating without any creative effort.
Of course, in order to facilitate the better understanding of the present invention for those skilled in the art, we will briefly describe the grating diffraction formula of the two-dimensional grating in the following, which is a well-known knowledge familiar to those skilled in the art and is not an object of the present invention.
The one-dimensional grating in the invention can adopt a rectangular grating, an inclined grating or a scintillation grating with wavelength selectivity, and specifically comprises the following steps:
as shown in FIG. 6, it shows the light diffraction process of a rectangular grating, the incident light is incident to the surface of the rectangular grating at a certain incident angle and is diffracted, the diffracted light includes zero-order diffracted light T0-1 st order diffracted light T-1And 1 st order diffracted light T1. Wherein: with respect to the example of FIG. 6Shown is zero order diffracted light T0Has the highest diffraction efficiency, and-1 st order diffraction light T-1Second, 1 st order diffracted light T1The lowest diffraction efficiency. The invention can adopt the rectangular grating shown in FIG. 6 as the one-dimensional grating in the incident functional area, and set the grating parameters thereof to make the-1 st order diffraction light T-1Towards the exit functional area 3, thus increasing the diffraction efficiency of the invention.
As shown in FIG. 7, it shows a light diffraction process of a tilted grating, incident light is incident on the surface of the tilted grating at a certain incident angle and is diffracted, and the diffracted light includes zero-order diffracted light T0-1 st order diffracted light T-1And 1 st order diffracted light T1. Wherein: as shown in the example of FIG. 7, the-1 st order diffracted light T-1Has the highest diffraction efficiency (up to 90 percent at present) and the zero-order diffraction light T0Diffraction efficiency of the 1 st order diffraction light T1The lowest diffraction efficiency. The invention can adopt the inclined grating shown in FIG. 7 as the one-dimensional grating in the incidence functional area, and set the grating parameters thereof to lead the-1 st order diffraction light T-1Towards the exit functional area 3, thus increasing the diffraction efficiency of the invention.
As shown in FIG. 8, it shows the light diffraction process of a scintillation grating, the incident light is incident to the surface of the scintillation grating at a certain incident angle and is diffracted, the diffracted light includes zero-order diffracted light T0-1 st order diffracted light T-1And 1 st order diffracted light T1. Wherein: as shown in the example of FIG. 8, the-1 st order diffracted light T-1Has a very high diffraction efficiency (almost 1), and is a zero-order diffraction light T0And 1 st order diffracted light T1The diffraction efficiency of (a) is very low (almost zero). The invention can adopt the scintillation grating shown in figure 8 as a one-dimensional grating in the incidence functional area, and the grating parameters are set, so that the-1 st order diffraction light T is caused-1Towards the exit functional area 3, thus increasing the diffraction efficiency of the invention.
The various forms of one-dimensional grating structures described above may be formed on the surface of the waveguide 1 using known grating formation processes, such as exposure using an interference light source, etching, and the like.
Preferably, the two-dimensional grating in the present invention is an arrayed waveguide grating having a two-dimensional periodic structure, or referred to as a bulk grating. As shown in fig. 9, several typical arrayed waveguide grating structures with two-dimensional periodic structures are shown, in which a is a rectangular pillar arrayed waveguide grating structure, c is a tapered pillar arrayed waveguide grating structure, and b and d are two kinds of cylindrical arrayed waveguide gratings with different grating parameters.
In some embodiments, the various arrayed waveguide grating structures arrayed waveguide gratings having a two-dimensional periodic structure described above may be provided by a two-dimensional photonic crystal formed within the waveguide, the two-dimensional photonic crystal having periodic nanostructures in both of two intersecting directions.
In some embodiments, the two-dimensional grating is formed by two overlay exposures, the two overlay exposures being:
and fixing the positions of the exposure light source and the waveguide to complete the first exposure to obtain the one-dimensional grating structure. And the exposure light source is kept still, the waveguide rotates for a preset angle along the center to complete the second exposure, and the two-dimensional grating is obtained. The exposure light source is composed of two plane waves, and the two plane waves form an exposure interference surface. After the first exposure is completed, the waveguide is rotated by 90 ° ± 1 ° along the center, and then the second exposure is performed, in which it is preferable that the waveguide is rotated by 90 ° along the center.
Hereinafter, we will briefly introduce an arrayed waveguide grating having a two-dimensional periodic structure to facilitate a better understanding of the technical aspects of the present invention by those skilled in the art. Taking the cylindrical arrayed waveguide grating structure in fig. 9 as an example, which includes two grating orientations, a first grating channel direction M and a second grating channel direction N, correspondingly, the rectangular cylindrical arrayed waveguide grating structure includes two grating period vectors: a first grating period vector P1 perpendicular to the first grating channel direction M, and a second grating period vector P2 perpendicular to the second grating channel direction N. Referring to fig. 10 in conjunction with fig. 9, the derivation process of the grating diffraction formula of the two-dimensional grating is as follows:
(1) wave vectors are decomposed into periodic vectors p1(x '), p2 (y'):
wherein the content of the first and second substances,
theta is the angle of incidence,is the incident azimuth angle, thetamnAs the angle of diffraction,the diffraction azimuth angle is epsilon, the complementary angle of the included angle of the periodic vectors is epsilon, and x 'and y' are non-orthogonal coordinate systems m and n formed by the periodic vectors P1 and P2 are diffraction orders. (2) Substitution simplification can be obtained:
(3) and converting to an xyz rectangular coordinate system:
Θmn=θmn
Θmnis the angle of diffraction,. phimnγ is the angle of the periodic vector p1 from the x-axis for the azimuthal angle of diffraction.
In the holographic optical waveguide lens of the present invention:
the refractive index of the waveguide 1 is generally set to 1.7 to 2.0.
The grating period of the one-dimensional grating in the incident functional region 2 is generally set to 290-710 nm, and the included angle between the period vector p0 and the x axis is generally set to 30-60 degrees.
The two grating period vectors of the two-dimensional grating in the exit functional region 2 are both equal in magnitude to the grating period vector of the one-dimensional grating in the entrance functional region 2, and the period vector p0 of the one-dimensional grating in the entrance functional region 2 is parallel to one of the period vectors (p1 or p2) of the two-dimensional grating in the exit functional region 2.
The two period vectors p1, p2 of the preferred two-dimensional grating are angled at 90 ° ± 1 °. Namely, two period vectors p1 and p2 of the two-dimensional grating are arranged orthogonally, so that double images can be avoided from being generated in the images, and the imaging effect is improved.
The diffraction principle of the holographic optical waveguide lens in the present invention will be described below with a specific embodiment in combination with the above mentioned grating diffraction formula:
in this embodiment, the waveguide 1, the incident functional region 2, and the exit functional region 3 of the holographic optical waveguide lens according to the present invention are arranged as follows:
the waveguide 1 has a refractive index of 1.84 and a corresponding total reflection angle of 32.92.
The grating period of the one-dimensional grating in the incident functional area 2 is 420nm, and the included angle between the period vector p0 and the x-axis is 45 °.
Two grating periods of the two-dimensional grating in the emergent functional region 3 are both 420nm, the included angle between the period vectors p1 and p2 is 90 degrees, and the included angle between one period vector p1 (or p2) and the x axis is 45 degrees.
Take the incident light with a wavelength of 620nm as an example:
when the incident angle of the incident light is 0 ° and the azimuth angle is 0 °, the diffraction angle and azimuth angle of the diffraction order transmitted to the exit functional region 3 can be calculated according to the above grating diffraction formula: theta10=53.3481°,Φ10=0°(Θ-10=53.3481°,Φ-10180 deg.) the diffraction angle is greater than the total reflection angle, so this light can be conducted to the exit functional area 3. By again using the grating diffraction formula, only one coupled-out order, Θ, can be calculated-10=0°,Φ-100 °, and the diffraction order of the reflection from the two-dimensional grating of the exit functional region 3 has Θ-1-1=53.3481°,Φ-1-1=-90°;Θ111=53.3481°,Φ-11=90°;Θ00=53.3481°,Φ00The three diffracted beams still satisfy total reflection at 0 °, so when encountering the two-dimensional coupled-out grating again, diffraction can still occur, and the diffraction angles of the outgoing waveguide are all 0 °.
When the incident angle of the incident light is 10 ° and the azimuth angle is 0 °, the diffraction angle and azimuth angle of the diffraction order transmitted to the exit functional region 3 can be calculated according to the above grating diffraction formula: theta10=45.0646°,Φ10=0°(Θ-10=63.7213°,Φ-10180 deg.) the diffraction angle is greater than the total reflection angle, so this light can be conducted to the exit functional area 3. By again using the grating diffraction formula, only one coupled-out order, Θ, can be calculated-10=0°,Φ-10180 deg. and the diffraction order of the two-dimensional grating reflected from the coupling-out area has theta-1-1=53.8824°,Φ-1-1=-96.7090°;Θ-11=53.8824°,Φ-11=-96.7090°;Θ00=45.0646°,Φ00When the three diffracted lights meet the total reflection at 0 °, diffraction can still occur when the two-dimensional coupled-out grating is encountered again, and the diffraction angles of the outgoing waveguide are all 10 °.
The present invention also provides an augmented reality display device, comprising: a micro-projection device for generating image light; the optical waveguide lens adopts the holographic optical waveguide lens provided by any one of the above embodiments of the invention.
The micro-projection device may employ Light Emitting Diodes (LEDs), LCOS (liquid crystal on silicon) devices, OLED (organic light emitting diode) arrays, MEMS (micro-electro-mechanical systems) devices, or any other suitable micro-projection device.
As shown in fig. 11, a set of augmented reality display device is constructed, which generally includes two sets of micro-projection devices and two mixing type monolithic waveguide lenses, and the two sets of micro-projection devices and the two mixing type monolithic waveguide lenses respectively correspond to left and right eye displays.
The invention has been described above with a certain degree of particularity. It will be understood by those of ordinary skill in the art that the description of the embodiments is merely exemplary and that all changes that come within the true spirit and scope of the invention are desired to be protected. The scope of the invention is defined by the appended claims rather than by the foregoing description of the embodiments.
Claims (10)
1. A holographic optical waveguide lens, comprising:
a waveguide;
a functional region having an optical diffraction function on an upper surface or a lower surface of the waveguide, the functional region including:
an incident functional region in which a one-dimensional grating that couples external image light to a waveguide is disposed;
and the emergent functional area is internally provided with a two-dimensional grating which couples the image light transmitted in the waveguide out of the waveguide and realizes the expansion of the image light.
2. The holographic optical waveguide lens of claim 1, wherein a grating period vector of the one-dimensional grating is parallel to a grating period vector of the two-dimensional grating in one orientation thereof, and a grating period vector of the two-dimensional grating in both orientations thereof is equal and equal to the grating period vector of the one-dimensional grating.
3. The holographic optical waveguide lens according to claim 2, wherein the refractive index of the waveguide is set to 1.7 to 2.0, and the grating period of the one-dimensional grating and the grating period of the two-dimensional grating in both orientations thereof are 290 to 710 nm.
4. The holographic optical waveguide lens of claim 1, wherein the one-dimensional grating is a rectangular grating, a slanted grating, and a blinking grating.
5. The holographic optical waveguide lens of claim 1, wherein the two-dimensional grating is an arrayed waveguide grating having a two-dimensional periodic structure.
6. The holographic optical waveguide lens of claim 5, wherein the arrayed waveguide grating comprises a cylindrical arrayed waveguide grating, a rectangular pillar arrayed waveguide grating, and a wedge-shaped pillar arrayed waveguide grating.
7. The holographic optical waveguide lens of claim 5, wherein the arrayed waveguide grating is provided by a two-dimensional photonic crystal formed within the waveguide, the two-dimensional photonic crystal having periodic nanostructures in both intersecting directions.
8. The holographic optical waveguide lens of claim 1, wherein the two-dimensional grating is formed by two superimposed exposures, the two superimposed exposures being:
fixing the positions of an exposure light source and the waveguide to complete the first exposure to obtain a one-dimensional grating structure;
the exposure light source is kept still, the waveguide rotates for a preset angle along the center, the second exposure is completed, and the two-dimensional grating is obtained;
the exposure light source is composed of two planar waves, and the two planar waves form an exposure interference surface.
9. An augmented reality display device, characterized in that: it includes:
a micro-projection device for generating image light;
an optical waveguide lens, which is the holographic optical waveguide lens of any one of claims 1 to 7.
10. The augmented reality display apparatus of claim 9, wherein: the number of the micro-projection devices is two, and the micro-projection devices are respectively arranged corresponding to the holographic optical waveguide lenses corresponding to the left eye and the right eye.
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Cited By (13)
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CN114167532A (en) * | 2021-12-10 | 2022-03-11 | 谷东科技有限公司 | Diffraction grating waveguide, preparation method thereof and near-to-eye display device |
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