CN113324540B - System and method for testing pose of spliced mirror based on scanning galvanometer - Google Patents
System and method for testing pose of spliced mirror based on scanning galvanometer Download PDFInfo
- Publication number
- CN113324540B CN113324540B CN202110618229.1A CN202110618229A CN113324540B CN 113324540 B CN113324540 B CN 113324540B CN 202110618229 A CN202110618229 A CN 202110618229A CN 113324540 B CN113324540 B CN 113324540B
- Authority
- CN
- China
- Prior art keywords
- mirror
- light
- collimated
- spliced
- pose
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000012937 correction Methods 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 25
- 230000007935 neutral effect Effects 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000001427 coherent effect Effects 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 5
- 238000010998 test method Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004429 Calibre Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J2009/002—Wavefront phase distribution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention belongs to the technical field of active optics, and particularly relates to a split joint mirror pose test system and method based on a scanning galvanometer. The whole system is stable, the adjustment efficiency is high, and the system error can be reduced to a great extent; the transmitting unit transmits collimated and expanded beam light; the first beam splitter of the receiving unit receives the collimated and expanded beam, the second lens diverges the collimated and expanded beam, and the scanning galvanometer receives the received collimated and expanded beam and reflects the collimated and expanded beam to the splicing mirror; the second beam splitter of the detection unit receives the reflected light and splits the reflected light, one beam is transmitted to the S-H sensor, and the other beam is reflected to the CCD camera; the correction control unit receives the wave-front phase information, corrects the surface type of the mirror surface of each spliced mirror through algorithm feedback, and the test system completes the space pose test and correction of each spliced mirror of the reflecting mirror, thereby meeting the imaging quality requirement.
Description
Technical Field
The invention belongs to the technical field of active optics, and particularly relates to a split joint mirror pose testing system and method based on a scanning galvanometer.
Background
For an optical telescope, the ability to concentrate light and the angular resolution are two of the most important parameters. According to the Rayleigh criterion, the larger the caliber of the telescope is, the smaller the limit angle resolution is, and the stronger the resolution is. Therefore, astronomists always expect to obtain higher convergent light power and stronger angle resolution by continuously expanding the caliber of the telescope in the development process of the telescope, so as to realize high-resolution observation of more and weaker targets in space. However, the optical error is inevitably increased in the development process of the large-caliber telescope, and the cost of required raw materials is also increased. In the process of putting into use, the dead weight is too big, braced system is too much, leads to mirror surface structure deformation easily, and the mirror surface is heated inhomogeneous possibility bigger, finally leads to imaging distortion, influences the telescope and can not reach due resolution. And simultaneously, great difficulties are brought to the related transportation and installation.
In order to solve the problems, an active optical technology has been developed, and the purpose of the technology is to keep the mirror surface in an optimal state in real time, and timely feed back the mirror surface to a control system when the mirror surface shape is affected by dead weight of a main mirror, external temperature change and the like to correspondingly generate a wavefront error, adjust a supporting structure, change the surface shape of the mirror surface and the relative pose of the mirror surface to control the wavefront error, and ensure imaging image quality.
However, there are also a number of problems with the tiled mirror technology used in active optical technology, where how to achieve adjustment of the relative pose between the mirrors of the tiled mirror is always a prominent problem in engineering that needs to be addressed. In the process of carrying out the indoor experiment of traditional heavy-calibre initiative optics, receive the influence of experiment space, splice mirror diameter and S-H sensor detection bore size, need to integrate the optical path system, the facula size that needs to control the incidence to splice mirror surface is big enough so as to cover full bore and carry out the detection of wave front phase information simultaneously, can introduce certain difficulty for the adjustment of whole optical path system and the adjustment of mirror surface position appearance this moment, the stability of system can be reduced to complicated splice mirror system structure simultaneously, increase whole system error, correspond the staff and also can produce the difficulty in the in-process of control adjustment, consequently, need to put forward a more effective method to the position appearance test of splice mirror.
Disclosure of Invention
In order to solve the problems, the invention provides a mirror pose test system and a method based on a scanning galvanometer, which can meet the relative error detection of a spliced mirror, improve the stability of a test system, enlarge the test range of the test system and reduce the difficulty of detection adjustment, adopt a two-dimensional scanning galvanometer to stably and rapidly scan the spliced mirror, restore wave front information in real time, correct distorted wave front and improve imaging quality,
the specific technical scheme is as follows: the reflecting mirror pose testing system based on the scanning galvanometer comprises a transmitting unit, a receiving unit, a detecting unit and a correcting unit;
the transmitting unit comprises a transmitting unit which comprises,
the laser transmitter 1 is used for generating a coherent light source required in the test modification unit, and the coherent light source is divergent light,
the first lens 2 is for receiving divergent light, refracting the divergent light into parallel light,
the beam expander 3 is used for amplifying the diameter of the parallel light beam proportionally to obtain expanded light,
the first reflecting mirror 4 and the second reflecting mirror 5 are matched for use to change the propagation direction of the beam expanding light, and are combined with the double diaphragms to collimate the beam expanding light so as to obtain collimated beam expanding light;
the receiving unit comprises a receiver unit which,
the spliced reflecting mirror 9 is formed by splicing four spliced mirrors, each spliced mirror is a concave spherical mirror,
the first beam splitter 6 is arranged to transmit the collimated and expanded light to the second lens 7, on the one hand, and to reflect the reflected light to the second beam splitter 10,
the second lens 7 is used for diverging the collimated and expanded beam, so that the beam diameter of the collimated and expanded beam matches the mirror surface size of the single splice mirror,
the scanning galvanometer 8 is used for receiving the collimated and expanded beam transmitted by the second lens 7, adjusting the reflecting angle to reflect the collimated and expanded beam to the corresponding splicing mirror,
each split lens reflects the projected collimated beam-expanding light to obtain reflected light, and the reflected light returns to the first beam splitter 6 in the original path;
the detection unit comprises a detection unit which comprises a detection unit,
the second beam splitter 10 splits the reflected light reflected by the first beam splitter 6 into two beams, one beam is transmitted to the S-H sensor 15, and the other beam is reflected to the CCD camera 13;
the S-H sensor 15 is configured to receive the reflected light transmitted by the second beam splitter 10, and detect to obtain wavefront phase information of each split mirror;
the CCD camera 13 is used for receiving the reflected light reflected by the second beam splitter 10 and detecting the spot position of the reflected light;
the correction unit comprises a correction unit for correcting the correction unit,
the computer system 16 is used for receiving the wave-front phase information from the S-H sensor 15 and correcting the mirror surface type of each splice mirror through algorithm feedback.
Furthermore, the scanning galvanometer 8 is a two-dimensional scanning galvanometer, the scanning galvanometer 8 can be controlled by a signal source to move along the X and Y axis directions to adjust the reflection angle, and the projected collimated and expanded beam light is reflected to each splicing mirror in sequence.
Further, the detecting unit further includes a first neutral density filter 11, a second neutral density filter 14, and a third lens 12, the first neutral density filter 11 being positioned at a reflection side of the second beam splitter 10, the second neutral density filter 14 being positioned at a transmission side of the second beam splitter 10, the first neutral density filter 11 and the second neutral density filter 14 being both for reducing an optical power level of the reflected light,
the third lens 12 is located between the first neutral density filter 11 and the CCD camera 13, and is used for reducing the diameter of the reflected light beam, so that the reflected light beam is captured by the CCD camera 13.
The invention also comprises a test method of the reflector space pose test system, which comprises the following steps,
step 1): the emitting unit emits collimated and expanded beam light,
step 2): a splice lens of the receiving unit receives the collimated and expanded beam light for the first time and returns the collimated and expanded beam light according to the original path to obtain reflected light, the reflected light is set as reference light,
step 3): the detection unit receives the reference light to obtain reference wavefront phase information, stores the reference wavefront phase information, and sets the reference wavefront phase information to ideal non-phase difference wavefront phase information,
step 4): the correction unit calculates the value of the corresponding coefficient of the Zernike polynomial by using a mode method in a wavefront restoration algorithm according to the reference wavefront phase information, precisely adjusts the pose of the spliced mirror, stops adjusting until the tilt amount and the defocus amount of the spliced mirror are small, namely stops adjusting when the Style ratio is more than or equal to 0.8,
step 5): the pose of the splice mirror is kept unchanged, the collimated and expanded light beams emitted by the emission unit are moved to other splice mirrors by controlling the scanning galvanometer 8,
step 6): the detection unit receives the reflected light of other spliced mirrors to obtain actual wave-front phase information,
step 7): the correction unit compares the actual wavefront phase information with the reference wavefront phase information to obtain a phase difference, adjusts the pose of other spliced mirrors according to the magnitude of the phase difference, stops adjusting when the inclination amount and the defocus amount of the other spliced mirrors are small, namely the Style ratio is more than or equal to 0.8,
and repeating the steps 5) to 7) until the space pose test and adjustment of the four spliced mirrors are completed, and then the space pose correction of the reflecting mirrors is completed.
Further, the CCD camera 13 in the detecting unit is configured to detect a position of a light spot of the reflected light, and coarse-adjust the pose of the combiner through the correcting unit until the light spot of the reflected light is detected in the CCD camera 13 to be at a central position of the CCD camera 13, thereby completing the primary alignment adjustment of the combiner.
The beneficial technical effects of the invention are as follows:
(1) The space pose test system of the split joint mirror is reasonable in design, comprises a transmitting unit, a receiving unit, a detecting unit and a correcting unit, is simple in structure, and is beneficial to the construction of integral experimental equipment and the test control of staff. The integration of the test system is high, the requirement of an active optical indoor experiment is met, the stability of the optical system is improved, and the overall error of the test system is reduced; the divergent light emitted by the laser of the emitting unit is refracted by the first lens to form parallel light, the parallel light is expanded by the beam expander to obtain expanded beam light, and the two-sided reflecting mirror and the double diaphragms collimate the expanded beam light to obtain collimated expanded beam light; the first beam splitter of the receiving unit receives the collimated and expanded beam, the second lens diverges the collimated and expanded beam, and the scanning galvanometer receives the diverged collimated and expanded beam and reflects the collimated and expanded beam to the splicing mirror; the second beam splitter of the detection unit receives the reflected light reflected by the first beam splitter and splits the reflected light, one beam is transmitted to the S-H sensor, and the other beam is reflected to the CCD camera; the correction unit receives the wave-front phase information from the S-H sensor, corrects the surface type of the mirror surface of each spliced mirror through algorithm feedback, and the test system completes the space pose test and correction of each spliced mirror of the reflector, thereby meeting the imaging quality requirement;
(2) The invention relates to a testing method of a split joint mirror space pose testing system, which is characterized in that a signal source is controlled to enable a two-dimensional scanning vibrating mirror to move in X and Y axis directions, each split joint mirror is scanned stably, wavefront phase information obtained by a first split joint mirror which is scanned is used as reference wavefront phase information, the reference wavefront phase information is set to be ideal non-phase difference wavefront phase information, the wavefront phase information is respectively compared with the reference wavefront phase according to the wavefront phase information of the other three split joint mirrors detected by S-H, the wavefront phase difference is described based on a Zernike polynomial mode method, the split joint mirror surface relative pose is adjusted according to the phase difference, the scanning path is controlled again after one scanning period is completed, the continuous test is carried out until the inclination and defocus of the system meet certain indexes, namely, the Sitehl ratio is not less than 0.8, the correction process is stopped, the adjustment indexes of the other three split joint mirrors in the correction process need to meet the Tip error control in 0.03 mu rad, the Tilt error control in the Y axis rotation is within 0.013 mu rad, the integral imaging quality is guaranteed, the integral quality is adjusted, and the integral imaging quality is guaranteed.
Drawings
Fig. 1 is a schematic diagram of an optical path structure of a split lens space pose test system according to the present invention.
Fig. 2 is a diagram of the optical path scanning path on the mirror of the present invention.
FIG. 3 is a flow chart of a testing method of the split joint mirror space pose testing system.
Fig. 4 is a graph of the relationship between tilt error and imaging quality of the splice mirror.
Wherein: the laser device comprises a laser transmitter 1, a first lens 2, a beam expander 3, a first reflecting mirror 4, a second reflecting mirror 5, a first beam splitter 6, a second lens 7, a scanning galvanometer 8, a spliced reflecting mirror 9, a second beam splitter 10, a first neutral density filter 11, a third lens 12, a CCD camera 13, a second neutral density filter 14, an S-H sensor 15 and a computer system 16.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the detailed description is presented by way of example only and is not intended to limit the invention.
Example 1
Referring to fig. 1, a split joint mirror pose test system based on a scanning galvanometer comprises a transmitting unit, a receiving unit, a detecting unit and a correcting unit;
the transmitting unit comprises a transmitting unit which comprises,
the laser transmitter 1 is used for generating a coherent light source required in the pose test system, and the coherent light source is divergent light,
the first lens 2 is for receiving divergent light, refracting the divergent light into parallel light,
the beam expander 3 is used for amplifying the diameter of the parallel light beam proportionally to obtain expanded light,
the first reflecting mirror 4 and the second reflecting mirror 5 are matched for use to change the propagation direction of the beam expanding light, and are combined with the double diaphragms to collimate the beam expanding light so as to obtain collimated beam expanding light;
the receiving unit comprises a receiver unit which,
the spliced reflecting mirror 9 is formed by splicing four spliced mirrors, each spliced mirror is a concave spherical mirror,
the first beam splitter 6 is arranged to transmit the collimated and expanded light to the second lens 7, on the one hand, and to reflect the reflected light to the second beam splitter 10,
the second lens 7 is used for diverging the collimated and expanded beam, so that the beam diameter of the collimated and expanded beam matches the mirror surface size of the single splice mirror,
the scanning galvanometer 8 is used for receiving the collimated and expanded beam transmitted by the second lens 7, adjusting the reflecting angle to reflect the collimated and expanded beam to the corresponding splicing mirror,
each split lens reflects the projected collimated beam-expanding light to obtain reflected light, and the reflected light returns to the first beam splitter 6 in the original path;
the detection unit comprises a detection unit which comprises a detection unit,
the second beam splitter 10 splits the reflected light reflected by the first beam splitter 6 into two beams, one beam is transmitted to the S-H sensor 15, and the other beam is reflected to the CCD camera 13;
the S-H sensor 15 is configured to receive the reflected light transmitted by the second beam splitter 10, and detect to obtain wavefront phase information of each split mirror;
the CCD camera 13 is used for receiving the reflected light reflected by the second beam splitter 10 and detecting the spot position of the reflected light;
the correction unit comprises a correction unit for correcting the correction unit,
the computer system 16 is used for receiving the wave-front phase information from the S-H sensor 15 and correcting the mirror surface type of each splice mirror through algorithm feedback.
The scanning galvanometer 8 is a two-dimensional scanning galvanometer, the scanning galvanometer 8 can be controlled by a signal source to move along the X and Y axis directions to adjust the reflection angle, and the projected collimation beam-expanding light is reflected to each spliced mirror in sequence.
Referring to fig. 2, a schematic diagram of the scanning path of the scanning galvanometer 8 on the tiled mirror 9 shows a specific beam scanning path according to which the signal source variation of the scanning galvanometer 8 is controlled. And after the scanning period of the four spliced mirrors of the spliced reflecting mirror 9 is completed, the signal source is controlled again to repeat the scanning path, and the test is continued until the inclination and defocus of the system meet certain indexes, and the correction process is stopped.
The detection unit further comprises a first neutral density filter 11, a second neutral density filter 14 and a third lens 12, wherein the first neutral density filter 11 is positioned on the reflecting side of the second beam splitter 10, the second neutral density filter 14 is positioned on the transmitting side of the second beam splitter 10, the first neutral density filter 11 and the second neutral density filter 14 are both used for reducing the light power degree of the reflected light, and the third lens 12 is positioned between the first neutral density filter 11 and the CCD camera 13 and used for reducing the diameter of the reflected light beam so as to facilitate the capture of the reflected light beam of the CCD camera 13.
Example 2
Referring to fig. 3, a flow chart of a testing method of the above-mentioned split lens pose testing system,
the test method of the reflector space pose test system comprises the following steps:
step 1): the emitting unit emits collimated and expanded beam light,
step 2): a splicing mirror of the receiving unit receives the collimated and expanded beam light and returns the collimated and expanded beam light according to the original path to obtain reflected light,
step 3): the detection unit receives the reflected light of the splicing mirror to obtain reference wavefront phase information and stores the reference wavefront phase information,
step 4): the correction unit calculates the value of the corresponding coefficient of the Zernike polynomial by using a mode method in a wavefront restoration algorithm according to the reference wavefront phase information, precisely adjusts the pose of the spliced mirror, stops adjusting until the tilt amount and the defocus amount of the spliced mirror are small, namely stops adjusting when the Style ratio is more than or equal to 0.8,
step 5): the pose of the splice mirror is kept unchanged, the collimated and expanded light beams emitted by the emission unit are moved to other splice mirrors by controlling the scanning galvanometer 8,
step 6): the detection unit receives the reflected light of other spliced mirrors to obtain actual wave-front phase information,
step 7): the correction unit compares the actual wavefront phase information with the reference wavefront phase information to obtain a phase difference, adjusts the pose of other spliced mirrors according to the magnitude of the phase difference, stops adjusting when the inclination amount and the defocus amount of the other spliced mirrors are small, namely the Style ratio is more than or equal to 0.8,
and repeating the steps 5) to 7) until the space pose test and adjustment of the four spliced mirrors are sequentially completed, and then the space pose correction of the spliced reflecting mirror 9 is completed.
The CCD camera 13 in the detection unit is used for detecting the position of the light spot of the reflected light, and the pose of the splicing mirror is roughly adjusted through the correction unit until the position of the light spot of the reflected light is detected in the CCD camera 13 to be at the center of the CCD camera 13, namely, the preliminary alignment adjustment work of the splicing mirror is completed.
Referring to fig. 4, a graph of the relationship between the Tilt error and the imaging quality of the single split mirrors can be obtained, so that in order to make the imaging quality meet the requirement, i.e. the stell ratio of the imaging quality is equal to or greater than 0.8, the Tip error of each split mirror rotating along the X axis is required to be controlled within 0.03 mu rad, and the Tilt error of each split mirror rotating along the Y axis is required to be controlled within 0.013 mu rad.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (5)
1. A split joint mirror pose test system based on a scanning galvanometer is characterized in that: the test system comprises a transmitting unit, a receiving unit, a detecting unit and a correcting unit;
the transmitting unit comprises a transmitting unit which comprises,
the laser transmitter (1) is used for generating a coherent light source required in the test correction unit, and the coherent light source is divergent light,
the first lens (2) is used for receiving divergent light and refracting the divergent light into parallel light,
the beam expander (3) is used for amplifying the diameter of the parallel light beam proportionally to obtain expanded light,
the first reflecting mirror (4) and the second reflecting mirror (5) are matched for use to change the propagation direction of the beam expanding light, and are combined with the double diaphragms to collimate the beam expanding light so as to obtain collimated beam expanding light;
the receiving unit comprises a receiver unit which,
the spliced reflecting mirror (9) is formed by splicing four spliced mirrors, each spliced mirror is a concave spherical mirror,
the first beam splitter (6) is used for transmitting the collimated and expanded beam to the second lens (7) on the one hand and reflecting the reflected beam to the second beam splitter (10) on the other hand,
the second lens (7) is used for diverging the collimated and expanded beam so that the beam diameter of the collimated and expanded beam matches the mirror surface size of the single splice mirror,
the scanning galvanometer (8) is used for receiving the collimated and expanded beam transmitted by the second lens (7) and adjusting the reflecting angle to reflect the collimated and expanded beam to the corresponding splicing mirror,
each split lens reflects the projected collimated beam-expanding light to obtain reflected light, and the reflected light returns to the first beam splitter (6);
the detection unit comprises a detection unit which comprises a detection unit,
the second beam splitter (10) splits the reflected light reflected by the first beam splitter (6) into two beams, one beam is transmitted to the S-H sensor (15), and the other beam is reflected to the CCD camera (13);
the S-H sensor (15) is used for receiving the reflected light transmitted by the second beam splitter mirror (10) and detecting to obtain wave front phase information of each split mirror;
the CCD camera (13) is used for receiving the reflected light reflected by the second beam splitter (10) and detecting the spot position of the reflected light;
the correction unit comprises a correction unit for correcting the correction unit,
the computer system (16) is used for receiving the wave-front phase information from the S-H sensor (15) and correcting the mirror surface type of each spliced mirror through algorithm feedback.
2. The split joint mirror pose test system based on the scanning galvanometer according to claim 1, wherein the split joint mirror pose test system is characterized in that: the scanning galvanometer (8) is a two-dimensional scanning galvanometer, the scanning galvanometer (8) can be controlled by a signal source to move along the X and Y axis directions to adjust the reflection angle, and the projected collimation and beam expansion light is reflected to each spliced lens in sequence.
3. The split joint mirror pose test system based on the scanning galvanometer according to claim 1, wherein the split joint mirror pose test system is characterized in that: the detection unit further comprises a first neutral density filter (11), a second neutral density filter (14) and a third lens (12), wherein the first neutral density filter (11) is positioned on the reflecting side of the second beam splitter (10), the second neutral density filter (14) is positioned on the transmitting side of the second beam splitter (10), the first neutral density filter (11) and the second neutral density filter (14) are both used for reducing the optical power degree of the reflected light,
the third lens (12) is positioned between the first neutral density filter (11) and the CCD camera (13) and is used for reducing the diameter of the reflected light beam so as to facilitate the capture of the reflected light beam by the CCD camera (13).
4. The test method of the split joint mirror pose test system based on the scanning galvanometer is characterized by comprising the following steps of: comprises the steps of,
step 1): the emitting unit emits collimated and expanded beam light,
step 2): a splice lens of the receiving unit receives the collimated and expanded beam light for the first time and returns the collimated and expanded beam light according to the original path to obtain reflected light, the reflected light is set as reference light,
step 3): the detection unit receives the reference light to obtain reference wavefront phase information, stores the reference wavefront phase information, and sets the reference wavefront phase information to ideal non-phase difference wavefront phase information,
step 4): the correction unit calculates the value of the corresponding coefficient of the Zernike polynomial by using a mode method in a wavefront restoration algorithm according to the reference wavefront phase information, precisely adjusts the pose of the spliced mirror, stops adjusting until the tilt amount and the defocus amount of the spliced mirror are small, namely stops adjusting when the Style ratio is more than or equal to 0.8,
step 5): the pose of the splice mirror is kept unchanged, the collimated and expanded light beams emitted by the emission unit are moved to other splice mirrors by controlling the scanning galvanometer (8),
step 6): the detection unit receives the reflected light of other spliced mirrors to obtain actual wave-front phase information,
step 7): the correction unit compares the actual wavefront phase information with the reference wavefront phase information to obtain a phase difference, adjusts the pose of other spliced mirrors according to the magnitude of the phase difference, stops adjusting when the inclination amount and the defocus amount of the other spliced mirrors are small, namely the Style ratio is more than or equal to 0.8,
and repeating the steps 5) to 7) until the space pose test and adjustment of the four spliced mirrors are completed, and then the space pose correction of the reflecting mirrors is completed.
5. The method for testing the split joint mirror pose testing system based on the scanning galvanometer according to claim 4, wherein the method comprises the following steps: the CCD camera (13) in the detection unit is used for detecting the light spot position of the reflected light, and the pose of the splicing mirror is roughly adjusted through the correction unit until the light spot of the reflected light is detected in the CCD camera (13) to be positioned at the center of the CCD camera (13), namely, the preliminary alignment adjustment work of the splicing mirror is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110618229.1A CN113324540B (en) | 2021-06-03 | 2021-06-03 | System and method for testing pose of spliced mirror based on scanning galvanometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110618229.1A CN113324540B (en) | 2021-06-03 | 2021-06-03 | System and method for testing pose of spliced mirror based on scanning galvanometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113324540A CN113324540A (en) | 2021-08-31 |
| CN113324540B true CN113324540B (en) | 2023-07-07 |
Family
ID=77419443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110618229.1A Active CN113324540B (en) | 2021-06-03 | 2021-06-03 | System and method for testing pose of spliced mirror based on scanning galvanometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113324540B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109556513A (en) * | 2018-11-23 | 2019-04-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of contiguous concatenation mirror detection method and detection system |
| CN111202499A (en) * | 2020-02-27 | 2020-05-29 | 浙江大学 | Rapid and efficient self-adaptive optical compensation stimulated Raman scattering imaging system and method |
| CN111207910A (en) * | 2020-01-16 | 2020-05-29 | 中国科学院长春光学精密机械与物理研究所 | Spliced mirror common-phase error correction method based on dispersion fringe slope analysis |
| CN111551351A (en) * | 2020-06-09 | 2020-08-18 | 中国科学院长春光学精密机械与物理研究所 | Piston error detection system between adjacent splicing mirrors |
| WO2021046973A1 (en) * | 2019-09-09 | 2021-03-18 | 中国科学院苏州生物医学工程技术研究所 | Common beam scanning retina imaging system |
-
2021
- 2021-06-03 CN CN202110618229.1A patent/CN113324540B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109556513A (en) * | 2018-11-23 | 2019-04-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of contiguous concatenation mirror detection method and detection system |
| WO2021046973A1 (en) * | 2019-09-09 | 2021-03-18 | 中国科学院苏州生物医学工程技术研究所 | Common beam scanning retina imaging system |
| CN111207910A (en) * | 2020-01-16 | 2020-05-29 | 中国科学院长春光学精密机械与物理研究所 | Spliced mirror common-phase error correction method based on dispersion fringe slope analysis |
| CN111202499A (en) * | 2020-02-27 | 2020-05-29 | 浙江大学 | Rapid and efficient self-adaptive optical compensation stimulated Raman scattering imaging system and method |
| CN111551351A (en) * | 2020-06-09 | 2020-08-18 | 中国科学院长春光学精密机械与物理研究所 | Piston error detection system between adjacent splicing mirrors |
Non-Patent Citations (1)
| Title |
|---|
| 干涉***在拼接主镜共相位检测上的应用;宋贺伦;鲜浩;姜文汉;王胜千;;红外与激光工程(第S1期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113324540A (en) | 2021-08-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4635299A (en) | Discrete phase conjugate technique for precompensation of laser beams transmitted through turbulence | |
| US20130241761A1 (en) | Beam steering for laser radar and other uses | |
| US4758729A (en) | Apparatus and method for measuring the included angle of a reflective cone | |
| CN111412835B (en) | Novel laser scanning projection method | |
| CN110196023B (en) | Dual-zoom structured light depth camera and zooming method | |
| CN110174075B (en) | Single-zoom-structure optical depth camera and zooming method | |
| CN110632714B (en) | Optical fiber coupling system and coupling method | |
| CN108319091B (en) | Target in-loop laser phased array system and control method | |
| US20130241762A1 (en) | Light-beam scanning for laser radar and other uses | |
| CN112713935B (en) | Free space optical communication scanning tracking method, system, device and medium | |
| EP3952143A1 (en) | Space optical coupling apparatus | |
| Lee et al. | Optical design of a new folding scanning system in MEMS-based lidar | |
| CN112130337A (en) | Synchronous control system and method for phase and inclined phase of fiber laser array piston | |
| CN111367138A (en) | Novel laser scanning projection device | |
| CN109556513A (en) | A kind of contiguous concatenation mirror detection method and detection system | |
| CN113324540B (en) | System and method for testing pose of spliced mirror based on scanning galvanometer | |
| CN113630183B (en) | Multi-light-path optical axis automatic coaxial laser communication ground terminal and coaxial control method | |
| CN115342831A (en) | Active correction system and method for light beam pointing | |
| EP0825471B1 (en) | Beam diameter control method and device | |
| CN110824697B (en) | Self-adaptive optical system combining artificial beacon and wavefront-free detection | |
| CN211698179U (en) | Intelligent optical axis installation and adjustment system based on interference fringes | |
| CN1971232A (en) | Hartmann wavefront sensor with active alignment function and detection method thereof | |
| CN116953671A (en) | Coherent wind-finding laser radar optical axis monitoring and self-adaptive correction device | |
| CN116520619A (en) | Zoom laser infrared light supplementing lamp with laser indication function and control method | |
| CN111487771B (en) | Sodium beacon pre-correction system based on ultra-short pulse multilayer conjugate adaptive optics |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |