CN113309935A - Horizontal adjusting mechanism and processing equipment - Google Patents
Horizontal adjusting mechanism and processing equipment Download PDFInfo
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- CN113309935A CN113309935A CN202110615473.2A CN202110615473A CN113309935A CN 113309935 A CN113309935 A CN 113309935A CN 202110615473 A CN202110615473 A CN 202110615473A CN 113309935 A CN113309935 A CN 113309935A
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- adjusting
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M7/00—Details of attaching or adjusting engine beds, frames, or supporting-legs on foundation or base; Attaching non-moving engine parts, e.g. cylinder blocks
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Abstract
The invention discloses a horizontal adjusting mechanism and processing equipment. Adjusting screw one end with mount pad threaded connection, adjusting screw's the other end is worn to establish in the retaining member. The adjusting ball is connected with the other end of the adjusting screw rod and is clamped in the locking piece. The connecting seat is in threaded connection with the locking piece. The adjusting ball is arranged on the connecting seat, at least part of the adjusting ball extends into the accommodating groove, and the adjusting ball is in wall surface contact with the accommodating groove to form high-pair connection. The horizontal adjusting mechanism of the invention adjusts the horizontal position through the adjusting screw and the connecting seat together, the adjusting screw is roughly adjusted, the connecting seat is arranged on the adjusting ball to realize fine adjustment before locking, and the connecting seat is locked through the locking part after being adjusted, so that the horizontal adjusting mechanism has the advantages of wide application range, small limitation, high precision, strong rigidity and high stability.
Description
Technical Field
The invention relates to the technical field of equipment leveling, in particular to a horizontal adjusting mechanism and processing equipment.
Background
In various machining, the mounting accuracy of machining equipment has a great influence on the quality of a machined product. Especially in high precision devices such as semiconductor devices. The requirements of precision, stability, technical parameters and the like of semiconductor equipment are strict, and the equipment belongs to high-precision equipment, so that the requirements of high-precision equipment such as semiconductor processing equipment and the like on levelness are very high. Before and during the use of high-precision equipment, high levelness needs to be maintained, and the processing precision, the product quality and the stability of the equipment are ensured.
At present, the traditional leveling structure has large limitation and low precision. Poor rigidity and low stability.
Summary of the invention
The invention aims to provide a horizontal adjusting mechanism and a processing device, which have the advantages of small limitation, high precision, strong rigidity and high stability.
The invention discloses a horizontal adjusting mechanism which comprises a mounting seat, an adjusting screw rod, a locking piece, an adjusting ball and a connecting seat. Adjusting screw one end with mount pad threaded connection, adjusting screw's the other end is worn to establish in the retaining member. The adjusting ball is connected with the other end of the adjusting screw rod and is clamped in the locking piece. The connecting seat is in threaded connection with the locking piece. The adjusting ball is arranged on the connecting seat, at least part of the adjusting ball extends into the accommodating groove, and the adjusting ball is in wall surface contact with the accommodating groove to form high-pair connection.
Optionally, the locking member is formed with an accommodating cavity, and the adjusting ball is clamped in the locking member; the side wall of the accommodating cavity is provided with internal threads; the connecting seat comprises a connecting part, an external thread is arranged on the connecting part, and the accommodating groove is arranged at one end of the connecting part facing the adjusting ball; the connecting part extends into the accommodating cavity and is in threaded connection.
Optionally, the horizontal adjustment mechanism further comprises a first fastener; the first fastener is in threaded connection with the connecting seat and is located above the locking piece.
Optionally, the horizontal adjusting mechanism further comprises a second fastener; the second fastener is in threaded connection with one end, close to the mounting seat, of the adjusting screw rod and is located above the mounting seat.
Optionally, the high-pair connection is a line contact or a point contact; when the high-secondary connection is point contact, one or two contact points are provided.
Optionally, the holding groove is conical, and the adjusting ball is in line contact with the bottom wall of the holding groove.
Optionally, the adjusting ball is in point contact with the bottom wall of the accommodating groove, and the number of the contact points is one.
Optionally, the accommodating groove is conical, two opposite protruding strips are arranged on the side wall of the accommodating groove, and two ends of the protruding strips extend towards the bottom surface and the top point of the accommodating groove respectively; the adjusting balls are respectively in point contact with the protruding strips, and the number of the contact points is two.
The invention also discloses processing equipment which comprises the horizontal adjusting mechanism and a machine body arranged on the horizontal adjusting mechanism.
Optionally, the number of the horizontal adjusting mechanisms is four, and the horizontal adjusting mechanisms are arranged in a rectangular shape; the high pairs of the two diagonally arranged horizontal adjusting mechanisms are connected into two contact points, the two contact points are connected into a first straight line, and the first straight lines of the two horizontal adjusting mechanisms are vertical to each other; in the other two diagonally arranged horizontal adjusting mechanisms, the high-pair connection of one horizontal adjusting mechanism is a contact point, and the high-pair connection of the other horizontal adjusting mechanism is a line contact.
The horizontal adjusting mechanism of the invention adjusts the horizontal position through the adjusting screw and the connecting seat together, the adjusting screw is roughly adjusted, the connecting seat is arranged on the adjusting ball to realize fine adjustment before locking, and the connecting seat is locked through the locking part after being adjusted, so that the horizontal adjusting mechanism has the advantages of wide application range, small limitation, high precision, strong rigidity and high stability.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:
FIG. 1 is a schematic view of a leveling mechanism according to an embodiment of the present invention;
FIG. 2 is another schematic view of a leveling mechanism according to an embodiment of the present invention;
FIG. 3 is a schematic view of a receiving chamber and an adjustment ball according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of a leveling mechanism in accordance with an embodiment of the present invention;
FIG. 5 is a schematic view of a connector housing according to an embodiment of the present invention;
FIG. 6 is a cross-sectional view of a connector housing according to an embodiment of the present invention;
FIG. 7 is another cross-sectional view of the leveling mechanism in accordance with an embodiment of the present invention;
FIG. 8 is another schematic view of the connector housing according to the embodiment of the present invention;
FIG. 9 is another cross-sectional view of the connector housing of the present invention;
FIG. 10 is another cross-sectional view of the leveling mechanism in accordance with the embodiment of the present invention;
FIG. 11 is another schematic view of the connector housing according to the embodiment of the present invention;
FIG. 12 is another cross-sectional view of the connector housing of the present invention;
FIG. 13 is another cross-sectional view of the leveling mechanism in accordance with the embodiment of the present invention;
FIG. 14 is a schematic view of a processing apparatus according to an embodiment of the present invention;
FIG. 15 is a schematic diagram of the arrangement of four horizontal adjustment mechanisms according to the embodiment of the present invention;
FIG. 16 is a schematic view of another arrangement of four leveling mechanisms in accordance with an embodiment of the present invention;
wherein, 10, processing equipment; 100. a horizontal adjustment mechanism; 110. a mounting seat; 120. adjusting the screw rod; 130. a locking member; 131. an accommodating cavity; 131a, opening holes; 132. clamping a plate; 140. adjusting the ball; 150. a connecting seat; 151. accommodating grooves; 151a, raised strips; 152. a connecting portion; 153. connecting the flat plates; 160. a first fastener; 170. a second fastener; 200. a body; l, a first straight line.
Detailed Description
It is to be understood that the terminology, the specific structural and functional details disclosed herein are for the purpose of describing particular embodiments only, and are representative, but that the present invention may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.
The invention is described in detail below with reference to the figures and alternative embodiments.
As shown in fig. 1 to 7, as an embodiment of the present invention, a horizontal adjustment mechanism 100 is disclosed, which includes a mounting seat 110, an adjustment screw 120, a locking member 130, an adjustment ball 140, and a connection seat 150. One end of the adjusting screw 120 is connected to the mounting base 110 by a screw thread, and the other end of the adjusting screw 120 is inserted into the locking member 130. The adjusting ball 140 is connected to the other end of the adjusting screw 120 and is caught in the locker 130. The connecting seat 150 is in threaded connection with the locking member 130. Wherein, the connecting seat 150 is provided with a receiving groove 151, and the adjusting ball 140 at least partially extends into the receiving groove 151 and contacts with the wall surface of the receiving groove 151 to form a high-pair connection.
It should be noted that the high-order connection means the contact of a point or a line formed by the adjusting ball 140 and the wall surface of the receiving groove 151. At this time, the adjustment ball 140 and the accommodation groove 151 constitute a high sub mechanism (Higher Pair). The adjustment ball 140 and the accommodation groove 151 are two members of a high-order mechanism, and constitute a kinematic pair by point or line contact. In short, the adjusting balls 140 are in point contact or line contact with the wall surfaces of the accommodating grooves 151.
It should be noted that, as shown in fig. 4, the fact that the adjustment ball 140 is caught in the locking member 130 means that the adjustment ball 140 is located in the locking member 130 and is caught in the locking member 130, and when the locking member 130 is locked, the locking member 130 and the receiving groove 151 press the adjustment ball 140.
The horizontal adjustment mechanism 100 of the present invention can adjust the height of the adjustment screw 120 by rotating the mounting base 110, thereby achieving adjustment of the horizontal height. Meanwhile, the adjusting ball 140 is highly coupled to the wall surface of the receiving groove 151, and the connecting seat 150 and the locking member 130 may rock relative to the adjusting ball 140 and the adjusting screw 120 before the connecting seat 150 is locked. Therefore, the connecting seat 150 can slide on the adjusting ball 140 to finely adjust the horizontal angle of the connecting seat 150. Because of the high pair connection, the connection seat 150 can be adjusted at any horizontal angle. After the height and the horizontal angle are adjusted, the locking member 130 can be screwed, because the locking member 130 is in threaded connection with the connecting seat 150, the locking member 130 and the connecting seat 150 jointly clasp the adjusting ball 140, and at this time, the connecting seat 150 is locked at the required height and the horizontal angle. The horizontal adjusting mechanism 100 of the invention adjusts the horizontal position through the adjusting screw rod 120 and the connecting seat 150 together, the adjusting screw rod 120 is roughly adjusted, the connecting seat 150 is finely adjusted through being arranged on the adjusting ball 140 before locking, and is locked through the locking piece 130 after being adjusted, so that the horizontal adjusting mechanism has the advantages of wide application range, small limitation, high precision, strong rigidity and high stability.
When the leveling mechanism 100 of the present invention is used specifically, the mounting base 110 is mounted on a mounting surface, such as the ground, a mounting rack, etc., and the body 200 to be leveled is mounted on the connecting base 150. The mounting seat 110 may be mounted on a mounting surface by means of screws, etc., and the body 200 may be mounted on the connection seat 150 by means of screws, etc.
Specifically, the adjusting ball 140 may be connected to the adjusting screw 120 by a threaded connection, may be connected by other connection methods, and may even be welded to the adjusting screw 120. If the adjusting ball 140 is connected to the adjusting screw 120 through a threaded connection, during assembly, one end of the adjusting screw 120 is screwed into the mounting seat 110, the other end of the adjusting screw 120 is inserted into the locking member 130, and then the adjusting ball 140 is screwed into the locking member 130 at the other end of the adjusting screw. At this time, since the adjustment ball 140 is caught in the locker 130, the locker 130 cannot be separated from the adjustment screw 120.
The adjusting ball 140 is in the shape of a sphere, and may be a steel ball, for example.
As shown in fig. 7, the horizontal adjustment mechanism 100 further includes a first fastener 160; the first fastening member 160 is screwed with the connecting seat 150 and is located above the locking member 130. The first fastening member 160 is threadedly coupled to the coupling holder 150 and is locked together with the locking member 130 when the coupling holder 150 is locked. Specifically, when the connecting seat 150 is locked, the first locking member 130 is directly rotated or the first fastening member 160 is rotated, and the wall surface of the receiving groove 151 is tightly pressed against the adjustment ball 140 by the screw thread, so that the connecting seat 150 is locked. The first fastening member 160 cooperates with the locking member 130 to effect compression of the adjustment ball 140. In operation, first fastener 160 is rotated to compress adjustment ball 140, and first locking member 130 is also rotated to compress adjustment ball 140. The first fastening member 160 may be a nut.
Further, as shown in fig. 7, the horizontal adjustment mechanism 100 further includes a second fastener 170; the second fastening member 170 is threadedly coupled to an end of the adjusting screw 120 close to the mounting base 110 and is located above the mounting base 110. After the final adjustment of the horizontal height and the horizontal angle, the second fastening member 170 may be tightened to firmly press the end surface thereof against the top surface of the mounting base 110, so that the adjusting screw 120 is more firmly coupled to the mounting base 110. The second fastener 160 may be a nut. When the body 200 is horizontally adjusted, the height of the body can be adjusted by rotating the adjusting screw 120 with a wrench.
As shown in fig. 4, the locking member 130 is formed with a receiving cavity 131, and the adjusting ball 140 is caught in the locking member 130; the side wall of the accommodating cavity 131 is provided with internal threads; the connecting seat 150 includes a connecting portion 152, the connecting portion 152 is provided with an external thread, and the receiving groove 151 is disposed at an end of the connecting portion 152 facing the adjusting ball 140; the connecting portion 152 extends into the receiving cavity 131 and is screwed. Before the connection seat 150 is locked, the connection part 152 and the locker 130 may swing with respect to the adjustment ball 140 and the adjustment screw 120, and thus, the connection part 152 may slide on the adjustment ball 140 to perform fine adjustment of a horizontal angle.
Specifically, the bottom of the accommodating cavity 131 is provided with an opening 131a, and the screw rod passes through the opening 131a and enters the accommodating cavity 131. The bottom of the accommodating cavity 131 is provided with a clamping plate 132; when the locking member 130 locks the connecting seat 150, the locking plate 132 is locked with the adjusting ball 140. After the horizontal angle of the connecting seat 150 is finely adjusted, the locking member 130 or the first fastening member 160 can be rotated to achieve the purpose that the connecting seat 150 is pressed on the adjusting ball 140. When the connection holder 150 is pressed against the adjustment ball 140, the connection holder 150 is locked. When the connection holder 150 is finely adjusted, the connection holder 150, the first fastening member 160 and the locking member 130 are rotated together. After the connecting seat 150 is locked, since the connecting seat 150 and the catch plate 132 are tightly pressed against the top and bottom surfaces of the adjustment ball 140, respectively, the connecting seat 150 is locked to maintain a desired horizontal angle. The card 132 may be provided in one, two, or more.
As shown in fig. 8, the connection socket 150 further includes a connection plate 153, and the connection plate 153 is mounted on a flat plate and connected to the connection portion 152. The body 200 is coupled to the connection plate 153.
On the other hand, as shown in fig. 7, 10 and 13, the high secondary connection is a line contact or a point contact; when the high-secondary connection is point contact, one or two contact points are provided. In the present invention, since the adjusting ball 140 is connected to the wall surface of the receiving groove 151 in a high-level manner, i.e., in a line contact or a point contact manner, the horizontal angle of the connecting seat 150 can be finely adjusted, thereby ensuring the adjusting accuracy of the horizontal adjusting mechanism 100 of the present invention. The line contact means that the position where the adjustment ball 140 contacts the wall surface of the accommodation groove 151 is a line segment, and the point contact means that the position where the adjustment ball 140 contacts the wall surface of the accommodation groove 151 is one point, two points, or more points.
In practical applications, the high-order connection of the adjusting ball 140 and the wall surface of the accommodating groove 151 is line contact or point contact, and can be selected according to the actual adjusting effect. If the point contacts are provided, the number of the point contacts can also be selected according to the actual required adjusting effect. Therefore, in point contact, the contact points may be one, two, three, etc.
Specifically, in one embodiment, as shown in fig. 5 to 7, the receiving groove 151 has a conical shape, and the adjustment ball 140 is in line contact with the bottom wall of the receiving groove 151. At this time, the high pair of contacts where the adjustment ball 140 contacts the wall surface of the accommodation groove 151 is line contact. As shown in fig. 7, the wall surface of the accommodating groove 151 having a conical shape is tangent to the adjusting ball 140, and the tangent points are connected to form a line in an uninterrupted surrounding manner, and the line contact is realized. When the connecting socket 150 is rotated for fine adjustment, the line contact position of the wall surface of the receiving groove 151 with the adjusting ball 140 is changed. When the connecting socket 150 is locked, the line contact position between the wall surface of the receiving groove 151 and the adjusting ball 140 is not changed.
Specifically, in another embodiment, as shown in fig. 8 to 10, the adjustment ball 140 is in point contact with the bottom wall of the accommodation groove 151, and the contact point is one. At this time, the high secondary connection is a point contact, and the contact point is one. That is, as shown in fig. 10, the bottom wall of the accommodating groove 151 having a conical shape is tangent to the adjusting ball 140 at a point of contact, that is, at a point of contact, and has only one tangent point. When the connecting seat 150 is rotated for fine adjustment, the position of the bottom wall of the receiving groove 151 in point contact with the adjustment ball 140 is changed. When the connecting seat 150 is locked, the line contact position of the bottom wall of the receiving groove 151 and the adjusting ball 140 is not changed.
Specifically, in another embodiment, as shown in fig. 11 to 12, the receiving groove 151 is conical, two opposite protruding strips 151a are disposed on the side wall of the receiving groove 151, and two ends of the protruding strips 151a extend to the bottom surface and the vertex of the receiving groove 151 respectively; the adjustment balls 140 are in point contact with the convex bars 151a, respectively, and there are two contact points. At this time, the high secondary connection is point contact, and the number of the contact points is two. Two opposite raised strips 151a are combined to form a V-shape, and are respectively tangent to the adjusting ball 140, and each tangent point has a total of two contact points. When the connecting socket 150 is rotated for fine adjustment, the position of the contact of the protrusion strip 151a with the adjustment ball 140 is changed. When the coupling socket 150 is locked, the line contact position of the protrusion strip 151a with the adjustment ball 140 is not changed.
In other embodiments, the specific shape of the receiving groove 151 may be set to other shapes as long as the contact connection between the receiving groove 151 and the adjustment ball 140 is a high pair connection.
As shown in fig. 14, as another embodiment of the present invention, a processing apparatus 10 is disclosed, which includes the horizontal adjustment mechanism 100 as described above, and a machine body 200 mounted on the horizontal adjustment mechanism 100. In the processing apparatus 10 of the present invention, the machine body 200 is disposed in the horizontal adjustment mechanism 100. The horizontal adjustment mechanism 100 can adjust the horizontal height by rotatably adjusting the height of the adjustment screw 120 on the mounting base 110. Meanwhile, the connecting seat 150 can slide on the adjusting ball 140 to finely adjust the horizontal angle of the connecting seat 150, and the processing equipment 10 has high horizontal precision and stable installation.
Specifically, as shown in fig. 15 and 16, the number of the horizontal adjusting mechanisms 100 is four, and the horizontal adjusting mechanisms are arranged in a rectangular shape; the high pairs of the two diagonally arranged horizontal adjusting mechanisms 100 are connected into two contact points, the two contact points are connected into a first straight line L, and the first straight lines L of the two horizontal adjusting mechanisms 100 are perpendicular to each other. In the other two diagonally disposed horizontal adjustment mechanisms 100, the high-side connection of one horizontal adjustment mechanism 100 is a contact point, and the high-side connection of the other horizontal adjustment mechanism 100 is a line contact.
In this embodiment, the first straight lines L of the two diagonal horizontal adjusting mechanisms 100 are perpendicular to each other, so that the horizontal angle of the connecting seat 150 can be adjusted conveniently in any direction. And in the other two diagonally-arranged horizontal adjustment mechanisms 100, one is point contact in which the contact point is one, and the other is line contact.
More specifically, in two horizontal adjustment mechanisms 100 with first straight lines L perpendicular to each other, the receiving groove 151 of the connecting seat 150 is conical, two opposite protruding strips 151a are disposed on the side walls of the receiving groove 151, and two ends of the protruding strips 151a extend towards the bottom surface and the vertex of the receiving groove 151 respectively; the adjustment balls 140 are in point contact with the convex bars 151a, respectively, and there are two contact points.
The horizontal adjustment mechanism 100 of one contact point, which is connected to the bottom wall of the receiving groove 151 of the seat 150 and contacts the adjustment ball 140, has one contact point. In the horizontal adjusting mechanism 100 with line contact, the receiving groove 151 of the connecting seat 150 is conical, and the adjusting ball 140 is in line contact with the bottom wall of the receiving groove 151.
In a specific application, the mounting seats 110 of the four horizontal adjusting mechanisms 100 can be fixed on a mounting surface, and the machine body 200 is mounted on the connecting seat 150. Then, one of the horizontal adjusting mechanisms 100 is adjusted to a reference level, and the height of the adjusting screw 120 is kept unchanged, and the other three horizontal adjusting mechanisms 100 are adjusted. The adjusting screw 120 is rotated by a wrench to adjust the height, and the horizontal angle of the connecting seat 150 is finely adjusted, so that the machine body 200 can ensure the required horizontal angle and the processing precision. Finally, after the desired horizontal angle is finally reached, the second fastening member 170 is tightened to firmly press the end surface thereof against the top surface of the mounting seat 110, and then the first fastening member 160 is tightened to firmly hold the clamping plate 132 against the bottom of the adjusting ball 140, thereby ensuring the rigidity and stability of the horizontal adjusting mechanism 100.
The foregoing is a more detailed description of the invention in connection with specific alternative embodiments, and the practice of the invention should not be construed as limited to those descriptions. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (10)
1. A leveling mechanism, comprising:
a mounting seat;
one end of the adjusting screw is in threaded connection with the mounting seat;
the other end of the adjusting screw rod penetrates through the locking piece;
the adjusting ball is connected with the other end of the adjusting screw rod and is clamped in the locking piece;
the connecting seat is in threaded connection with the locking piece;
the adjusting ball is arranged on the connecting seat, at least part of the adjusting ball extends into the accommodating groove, and the adjusting ball is in wall surface contact with the accommodating groove to form high-pair connection.
2. The horizontal adjustment mechanism of claim 1, wherein the locking member is formed with a receiving cavity, and the adjustment ball is caught in the locking member; the side wall of the accommodating cavity is provided with internal threads; the connecting seat comprises a connecting part, an external thread is arranged on the connecting part, and the accommodating groove is arranged at one end of the connecting part facing the adjusting ball; the connecting part extends into the accommodating cavity and is in threaded connection.
3. The horizontal adjustment mechanism of claim 1, further comprising a first fastener; the first fastener is in threaded connection with the connecting seat and is located above the locking piece.
4. The horizontal adjustment mechanism of claim 1, further comprising a second fastener; the second fastener is in threaded connection with one end, close to the mounting seat, of the adjusting screw rod and is located above the mounting seat.
5. The leveling mechanism of any one of claims 1 through 4, wherein the high secondary connection is a line contact or a point contact; when the high-secondary connection is point contact, one or two contact points are provided.
6. The leveling mechanism of claim 5, wherein the receiving groove is conical and the adjustment ball is in line contact with a bottom wall of the receiving groove.
7. The leveling mechanism of claim 5, wherein the adjustment ball makes point contact with the bottom wall of the receiving pocket, and wherein there is one point of contact.
8. The horizontal adjustment mechanism as claimed in claim 5, wherein the receiving groove is conical, and two opposite protruding strips are disposed on the side wall of the receiving groove, and both ends of the protruding strips extend towards the bottom surface and the top point of the receiving groove respectively; the adjusting balls are respectively in point contact with the protruding strips, and the number of the contact points is two.
9. A processing apparatus comprising the horizontal adjustment mechanism according to any one of claims 1 to 8, a machine body mounted on the horizontal adjustment mechanism.
10. The processing apparatus as claimed in claim 9, wherein the number of said horizontal adjustment mechanisms is four and arranged in a rectangular shape; the high pairs of the two diagonally arranged horizontal adjusting mechanisms are connected into two contact points, the two contact points are connected into a first straight line, and the first straight lines of the two horizontal adjusting mechanisms are vertical to each other;
in the other two diagonally arranged horizontal adjusting mechanisms, the high-pair connection of one horizontal adjusting mechanism is a contact point, and the high-pair connection of the other horizontal adjusting mechanism is a line contact.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202110615473.2A CN113309935A (en) | 2021-06-02 | 2021-06-02 | Horizontal adjusting mechanism and processing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202110615473.2A CN113309935A (en) | 2021-06-02 | 2021-06-02 | Horizontal adjusting mechanism and processing equipment |
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CN113309935A true CN113309935A (en) | 2021-08-27 |
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CN202110615473.2A Withdrawn CN113309935A (en) | 2021-06-02 | 2021-06-02 | Horizontal adjusting mechanism and processing equipment |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB602683A (en) * | 1945-11-09 | 1948-06-01 | Dermot Philip Johnson | Improvements in or relating to ball and socket universal joints |
JP2005133798A (en) * | 2003-10-29 | 2005-05-26 | Mitsubishi Electric Corp | Spherical seat mechanism |
CN103511481A (en) * | 2012-06-20 | 2014-01-15 | 上海宇航***工程研究所 | Rotation positioning device |
CN205781742U (en) * | 2016-05-31 | 2016-12-07 | 上海微电子装备有限公司 | A kind of substrate sucker installs levelling gear and a kind of laser package equipment |
CN209062373U (en) * | 2018-08-09 | 2019-07-05 | 大族激光科技产业集团股份有限公司 | A kind of leveller and levelling mechanism |
CN209903022U (en) * | 2019-02-25 | 2020-01-07 | 上海麦可洛自动化科技有限公司 | Universal positioner |
-
2021
- 2021-06-02 CN CN202110615473.2A patent/CN113309935A/en not_active Withdrawn
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB602683A (en) * | 1945-11-09 | 1948-06-01 | Dermot Philip Johnson | Improvements in or relating to ball and socket universal joints |
JP2005133798A (en) * | 2003-10-29 | 2005-05-26 | Mitsubishi Electric Corp | Spherical seat mechanism |
CN103511481A (en) * | 2012-06-20 | 2014-01-15 | 上海宇航***工程研究所 | Rotation positioning device |
CN205781742U (en) * | 2016-05-31 | 2016-12-07 | 上海微电子装备有限公司 | A kind of substrate sucker installs levelling gear and a kind of laser package equipment |
CN209062373U (en) * | 2018-08-09 | 2019-07-05 | 大族激光科技产业集团股份有限公司 | A kind of leveller and levelling mechanism |
CN209903022U (en) * | 2019-02-25 | 2020-01-07 | 上海麦可洛自动化科技有限公司 | Universal positioner |
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Effective date of registration: 20220808 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518000 No. 9988 Shennan Road, Nanshan District, Shenzhen, Guangdong Applicant before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |
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