CN113279053A

CN113279053A - Silicon chip crystal pulling device for computer mainboard production

Info

Publication number: CN113279053A
Application number: CN202110554456.2A
Authority: CN
Inventors: 李梦莹
Original assignee: Shenzhen Chengxiang Information Technology Consulting Co ltd
Current assignee: Shenzhen Chengxiang Information Technology Consulting Co ltd
Priority date: 2021-05-20
Filing date: 2021-05-20
Publication date: 2021-08-20

Abstract

The invention relates to the technical field of silicon wafer manufacturing, and discloses a silicon wafer crystal pulling device for computer mainboard production, wherein the output end of an inductor is connected with the input end of a power machine II in a signal connection mode, the inductor controls the torque output by the power machine II through the current between an adjusting plate and a lower contact, so that the weight of a silicon ingot is continuously increased in the forming process, the integral load of a compensation device is increased, the distance between a sliding contact and the lower contact is reduced, the effective length of a resistance rod between the sliding contact and the lower contact is shortened, the resistance is reduced, the current flowing in the resistance is increased, the torque output by the power machine II is also continuously increased along with the continuous increase of the quality of the silicon ingot, the pulling speed of the silicon ingot can be kept in a uniform state, and the problem that the shape of the silicon ingot is irregular due to the continuous decrease of the pulling speed of a pulling wheel caused by the continuous increase of the quality of the silicon ingot is solved, the regularity of silicon ingot forming is improved.

Description

Silicon chip crystal pulling device for computer mainboard production

Technical Field

The invention relates to the technical field of silicon wafer manufacturing, in particular to a silicon wafer crystal pulling device for computer mainboard production.

Background

The shaping of silicon ingots in the chip manufacturing process is a very important step, which directly determines the quality of silicon wafers for manufacturing chips, the existing silicon ingot manufacturing is basically manufactured by the czochralski method, the silicon ingot is formed by seeding through melting raw material silicon at high temperature, the existing crystal pulling is to pull the silicon ingot by a single power system, and the pulling speed is controlled by manually observing the aperture size of a silicon ingot forming surface, so the structure is simpler, and the crystal pulling device which is the most widely used crystal pulling device at present is provided.

However, although the existing crystal pulling device has the advantages, certain limitations still exist in the actual use process, due to the fact that the single power system is adopted for pulling, the load of the power system is increased in the process of continuous travel of the silicon ingot, if the output power of the power system is certain at the moment, the pulling speed is continuously reduced, the silicon ingot is expanded outwards, the silicon ingot is retracted inwards in the same way when the generation speed of the silicon ingot is reduced, the process needs manual operation, and the problem that the silicon ingot is scrapped due to improper operation is prone to occur.

Disclosure of Invention

Aiming at the defects of the existing silicon wafer crystal pulling device for computer mainboard production in the background technology in the use process, the invention provides the silicon wafer crystal pulling device for computer mainboard production, which has the advantage of automatically regulating and controlling the pulling speed in the silicon ingot production process, and solves the problem that the silicon ingot is easily scrapped due to improper operation under manual control.

The invention provides the following technical scheme: the utility model provides a silicon chip crystal pulling device for computer motherboard production, includes the top cap, fixed mounting has engine I on the position that the top cap top is close to one side, fixed mounting has the shell on the position that the top cap top is close to the opposite side, the one end of I output shaft of engine just is located the inside fixed mounting of shell and has the traction wheel, the bottom fixed mounting of top cap has the storehouse of pulling, the equal fixed mounting in both sides of pulling the storehouse inner wall has spacing slide rail, the inside movable mounting who pulls the storehouse has adjusting device and spacing slide rail to cooperate, the surface winding of traction wheel has the one end and the adjusting device fixed connection of haulage rope and this haulage rope, adjusting device's bottom fixed mounting has compensation arrangement.

Preferably, the adjusting device comprises a stroke plate, the two sides of the stroke plate are both provided with matching grooves which are matched with the limiting slide rails, the bottom of the stroke plate is fixedly provided with an adjusting bin, the inside of the adjusting bin is movably provided with an adjusting plate, the two sides of the bottom of the adjusting plate are fixedly sleeved with adjusting rods, the bottoms of the adjusting rods are fixedly connected with the compensating device, the outer side of the adjusting rod is sleeved with a spring, the top of the spring is fixedly connected with the top of the adjusting plate, the bottom of the spring is fixedly connected with the bottom of the inner cavity of the adjusting bin, a resistance rod is fixedly arranged at the middle position of the bottom of the adjusting plate, the bottom of the resistance rod is fixedly connected with the bottom of the inner cavity of the adjusting bin, the outer surface of the adjusting bin is fixedly provided with an induction device, one side of the adjusting plate is fixedly provided with a conducting strip, and the sliding contact is in contact with the induction device.

Preferably, the sensing device comprises a sensor, the sensor is fixedly mounted on one side of the outer surface of the adjusting bin, the top and the bottom of the sensor are fixedly provided with an upper contact and a lower contact which are respectively contacted with the top and the bottom of the resistance rod, the bottom of the lower contact is fixedly provided with a limiting seat, the bottom of the limiting seat is contacted with the bottom of the inner cavity of the adjusting bin, the sliding contact is contacted with the outer surface of the sensor, and the sensor can sense current between the sliding contact and the upper contact and the lower contact on the two sides.

Preferably, the compensation device comprises a compensation bin, the top of the compensation bin is fixedly connected with the bottom of the adjusting rod, the two sides of the inner cavity of the compensation bin are fixedly provided with limit strips, the inner cavity of the compensation bin is movably provided with an anti-rotation displacement plate, the outer surface of the anti-rotation displacement plate is matched with the limit strips, a traction threaded rod is movably arranged at the top of the anti-rotation displacement plate and in the middle of the anti-rotation displacement plate and can not rotate along the axial direction under the limit of the anti-rotation displacement plate, the bottom of the inner cavity of the compensation bin is fixedly sleeved with a bearing, a threaded rotating sleeve is fixedly sleeved inside the bearing, the inner ring of the threaded rotating sleeve is matched with the traction threaded rod through threads, the outer surface of the compensation bin is fixedly provided with a power bin, the interior of the power bin is fixedly provided with a power machine II, and one end of an output shaft of the power machine II is fixedly provided with a driving gear, and the driving gear is meshed with the anti-rotation displacement plate.

Preferably, the output end of the inductor is connected with the input end of the power machine II in a signal connection mode, and the inductor controls the torque output by the power machine II through the current between the adjusting plate and the lower contact.

Preferably, the output end of the inductor is connected with the input end of the feeding equipment in a signal connection mode, and the inductor controls the feeding speed of the feeding equipment through the current variation between the adjusting plate and the upper contact.

The invention has the following beneficial effects:

1. according to the silicon ingot shape forming device, the power machine II is fixedly arranged in the power bin, so that the device is dragged by adopting a double-power mechanism of the power machine I and the power machine II, the power output can be more stable, the problem that the dragging speed of the power machine is reduced along with the continuous increase of the weight of a silicon ingot and the excessive growth of the silicon ingot is caused due to the dragging of a single power structure adopted by the original equipment is solved, and the stability of the silicon ingot shape forming process is improved.

2. The output end of the inductor is connected with the input end of the power machine II in a signal connection mode, the inductor controls the torque output by the power machine II through the current between the adjusting plate and the lower contact, so that the weight of a silicon ingot is continuously increased in the forming process, the integral load of the compensating device is increased, the adjusting plate moves in the vertical downward direction in the figure 5 under the action of the effect, the distance between the sliding contact and the lower contact is reduced, the effective length of the resistance rod between the sliding contact and the lower contact is shortened, the resistance is reduced, the current flowing in the resistance is increased, the output end of the inductor is connected with the input end of the power machine II in a signal connection mode, the inductor controls the torque output by the power machine II through the current between the adjusting plate and the lower contact, and the torque output by the power machine II is continuously increased along with the continuous increase of the mass of the silicon ingot, therefore, the silicon ingot traction speed can be kept in a constant-speed state, the problem that the appearance of the silicon ingot is irregular due to the fact that the traction speed of the traction wheel is continuously reduced due to the fact that the quality of the silicon ingot is continuously increased is solved, the regularity of the silicon ingot forming is improved, in addition, when the forming speed of the silicon ingot is reduced, the reduction speed of the adjusting plate is reduced, the speed of increasing the torque of the power machine II is synchronously reduced, the lifting speed of the traction threaded rod is reduced, the problem that the silicon ingot after forming is subjected to surface shrinkage due to the fact that the traction speed is unchanged due to the fact that the generation speed of the silicon ingot is reduced is solved, and the regularity of the silicon ingot forming is further improved.

3. According to the invention, the output end of the inductor is connected with the input end of the feeding equipment in a signal connection mode, and the inductor controls the feeding speed of the feeding equipment through the current variation between the adjusting plate and the upper contact, so that the adjusting plate moves along the vertical downward direction in the figure 5 in the process of generating and increasing the quality of the silicon ingot, the resistance increasing current of the resistance rod between the adjusting plate and the upper contact is continuously reduced, the stable feeding speed of the feeding system is maintained, the raw materials in the furnace are ensured to be sufficient, the problem that the manufacturing efficiency of the silicon ingot is influenced due to the fact that the generating speed of the silicon ingot is slower and slower is avoided, meanwhile, the feeding can be stopped immediately when the adjusting plate stops moving, and the waste of the raw materials is avoided.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic top view of the structure of the present invention;

FIG. 3 is a schematic cross-sectional view taken at A in FIG. 2 illustrating the structure of the present invention;

FIG. 4 is a schematic cross-sectional view taken at B in FIG. 2 illustrating the structure of the present invention;

FIG. 5 is an enlarged view of the structure of the present invention at A in FIG. 3;

FIG. 6 is an enlarged view of the structure of the present invention at B in FIG. 4.

In the figure: 1. a top cover; 2. a power machine I; 3. a housing; 4. a traction wheel; 5. a traction bin; 6. a limiting slide rail; 7. an adjustment device; 71. a stroke plate; 72. a regulating bin; 73. an adjusting plate; 74. adjusting a rod; 75. a spring; 76. a resistance rod; 77. an induction device; 771. an inductor; 772. an upper contact; 773. a lower contact; 774. a limiting seat; 78. a sliding contact; 8. a compensation device; 81. a compensation bin; 82. a limiting strip; 83. a rotation prevention displacement plate; 84. drawing the threaded rod; 85. a bearing; 86. a thread rotating sleeve; 87. a power bin; 88. a power machine II; 89. the gears are driven.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, a silicon wafer crystal pulling device for producing a computer mainboard comprises a top cover 1, a power machine I2 is fixedly installed at a position, close to one side, of the top cover 1, a shell 3 is fixedly installed at a position, close to the other side, of the top cover 1, a traction wheel 4 is fixedly installed at one end of an output shaft of the power machine I2 and located inside the shell 3, a traction bin 5 is fixedly installed at the bottom of the top cover 1, limiting slide rails 6 are fixedly installed at two sides of the inner wall of the traction bin 5, an adjusting device 7 is movably installed inside the traction bin 5 and matched with the limiting slide rails 6, the adjusting device 7 comprises a stroke plate 71, matching grooves are formed in two sides of the stroke plate 71 and matched with the limiting slide rails 6, an adjusting bin 72 is fixedly installed at the bottom of the stroke plate 71, an adjusting plate 73 is movably installed inside the adjusting bin 72, an adjusting plate 73 is fixedly sleeved on two sides The connection, the outside cover of regulation pole 74 is equipped with spring 75, the top of spring 75 and the top of regulating plate 73 are fixedly connected and the bottom of spring 75 and the bottom of the inner chamber of regulating cabin 72 are fixedly connected, the position of the bottom of regulating plate 73 in the middle is fixedly equipped with resistance rod 76 and the bottom of resistance rod 76 is fixedly connected with the bottom of the inner chamber of regulating cabin 72, the outer surface of regulating cabin 72 is fixedly equipped with sensing device 77, one side of regulating plate 73 is fixedly equipped with conducting strip and the sliding contact 78 contacts with sensing device 77, sensing device 77 includes inductor 771, inductor 771 is fixedly equipped on one side of the outer surface of regulating cabin 72, the top and bottom of inductor 771 are fixedly equipped with upper contact 772 and lower contact 773 respectively contact with the top and bottom of resistance rod 76, the bottom of lower contact 773 is fixedly equipped with spacing seat 774 and the bottom of spacing seat 774 contacts with the bottom of the inner chamber of regulating cabin 72, the sliding contact 78 is in contact with the outer surface of the sensor 771, the sensor 771 can sense the current between the sliding contact 78 and the upper contact 772 and the lower contact 773 on two sides, the traction rope is wound on the outer surface of the traction wheel 4, one end of the traction rope is fixedly connected with the adjusting device 7, the bottom of the adjusting device 7 is fixedly provided with the compensating device 8, the compensating device 8 comprises a compensating bin 81, the top of the compensating bin 81 is fixedly connected with the bottom of the adjusting rod 74, two sides of the inner cavity of the compensating bin 81 are fixedly provided with the limiting strips 82, the inner cavity of the compensating bin 81 is movably provided with the anti-rotation displacement plate 83, the outer surface of the anti-rotation displacement plate 83 is matched with the limiting strips 82, the top of the anti-rotation displacement plate 83 is movably provided with the traction threaded rod 84 at the middle position, the traction threaded rod 84 cannot axially rotate under the limiting of the anti-rotation displacement plate 83, the bottom of the inner cavity of the compensating bin 81 is fixedly sleeved with the bearing 85, the bearing 85 is internally fixedly sleeved with a threaded rotating sleeve 86, the inner ring of the threaded rotating sleeve 86 is matched with a traction threaded rod 84 through threads, the outer surface of a compensation bin 81 is fixedly provided with a power bin 87, the inside of the power bin 87 is fixedly provided with a power machine II 88, so that the device is dragged by adopting a double-power mechanism of the power machine I2 and the power machine II 88, the power output can be more stable, the problem that the dragging speed of the power machine is reduced along with the continuous increase of the weight of a silicon ingot and the excessive growth of the silicon ingot caused by dragging of a single-power structure adopted by the original equipment is avoided, the stability of the shape forming process of the silicon ingot is improved, the output end of an inductor 771 is connected with the input end of the power machine II 88 in a signal connection mode, and the inductor 771 controls the torque output by the power machine II 88 through the current between an adjusting plate 73 and a lower contact 773, the weight of the silicon ingot is continuously increased in the forming process, so that the overall load of the compensating device 8 is increased, at the same time, the adjusting plate 73 moves in the vertical downward direction in fig. 5 under the effect, at the same time, the distance between the sliding contact 78 and the lower contact 773 is reduced, so that the effective length of the resistance rod 76 between the sliding contact 78 and the lower contact 773 is shortened, the resistance is reduced, the current flowing in the resistance is increased, at the same time, the output end of the inductor 771 is connected with the input end of the power machine II 88 in a signal connection mode, the inductor 771 controls the torque output by the power machine II 88 through the current between the adjusting plate 73 and the lower contact 773, so that the torque output by the power machine II 88 is continuously increased along with the continuous increase of the mass of the silicon ingot, the pulling speed of the silicon ingot is ensured to be kept in a constant speed state, and the situation that the pulling speed of the pulling wheel 4 is continuously reduced due to the continuous decrease of the mass, so that the irregular shape of the silicon ingot is avoided In addition, when the forming speed of the silicon ingot is reduced, the reduction speed of the adjusting plate 73 is reduced, so that the speed of increasing the torque of the power machine II 88 is synchronously reduced, the lifting speed of the traction threaded rod 84 is reduced, the problem that the formed silicon ingot is unqualified due to the fact that the surface of the formed silicon ingot shrinks because the traction speed is unchanged because the generation speed of the silicon ingot is reduced is solved, the forming regularity of the silicon ingot is further improved, the output end of the inductor 771 is connected with the input end of the feeding equipment in a signal connection mode, the feeding speed of the feeding equipment is controlled by the inductor 771 through the current change quantity between the adjusting plate 73 and the upper contact 772, the adjusting plate 73 moves in the vertical downward direction in the figure 5 in the process of generating and increasing the quality of the silicon ingot, and the resistance increasing current of the resistance rod 76 between the adjusting plate 73 and the upper contact 772 is continuously reduced, thereby make feed system maintain stable feed speed to guarantee that the interior raw materials of stove is sufficient, avoid the speed that the silicon bulk produced to lead to influencing silicon bulk's manufacturing efficiency more and more slowly, simultaneously, the feed also can stop immediately when regulating plate 73 stop motion, avoids causing the waste of raw materials. One end of the output shaft of the power machine II 88 is fixedly provided with a driving gear 89, and the driving gear 89 is meshed with the anti-rotation displacement plate 83.

The using method of the invention is as follows:

in the using process, the weight of the silicon ingot is continuously increased to increase the overall load of the compensating device 8, at this time, the adjusting plate 73 moves in the vertical downward direction in fig. 5 under the effect, at this time, the distance between the sliding contact 78 and the lower contact 773 is reduced to shorten the effective length of the resistance rod 76 between the sliding contact 78 and the lower contact 773 and to increase the current flowing inside the resistance, at this time, the output end of the inductor 771 is connected with the input end of the power machine ii 88 in a signal connection manner, and the inductor 771 controls the torque output by the power machine ii 88 through the current between the adjusting plate 73 and the lower contact 773, so that the torque output by the power machine ii 88 is continuously increased along with the continuous increase of the mass of the silicon ingot, thereby ensuring that the pulling speed of the silicon ingot can be kept in a uniform state, and when the forming speed of the silicon ingot is reduced, at this time, the descending speed of the adjusting plate 73 is reduced, so that the speed of increasing the torque of the power machine II 88 is synchronously reduced, the ascending speed of the traction threaded rod 84 is reduced, the adjusting plate 73 moves in the vertical downward direction in fig. 5 in the process of generating silicon ingots and increasing the mass of the silicon ingots, and the resistance increasing current of the resistance rod 76 between the adjusting plate 73 and the upper contact 772 is continuously reduced, so that the stable feeding speed of the feeding system is maintained, and the raw materials in the furnace are sufficient.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a silicon chip crystal pulling device for computer motherboard production, includes top cap (1), its characterized in that: fixed mounting has engine I (2) on top cap (1) top is close to the position of one side, fixed mounting has shell (3) on top cap (1) top is close to the position of opposite side, the one end of engine I (2) output shaft just is located shell (3) inside fixed mounting and has traction wheel (4), the bottom fixed mounting of top cap (1) has traction storehouse (5), the equal fixed mounting in both sides of traction storehouse (5) inner wall has spacing slide rail (6), the inside movable mounting who pulls storehouse (5) has adjusting device (7) and adjusting device (7) to cooperate with spacing slide rail (6), the surface winding of traction wheel (4) has the one end and adjusting device (7) fixed connection of haulage rope and this haulage rope, the bottom fixed mounting of adjusting device (7) has compensation arrangement (8).

2. The silicon wafer crystal pulling device for producing the computer main board as claimed in claim 1, wherein: adjusting device (7) includes stroke board (71), the both sides of stroke board (71) have all been seted up cooperation groove and this cooperation groove and have been cooperateed with spacing slide rail (6), the bottom fixed mounting of stroke board (71) has regulation storehouse (72), the inside movable mounting of regulation storehouse (72) has regulating plate (73), the both sides of regulating plate (73) bottom are all fixed the cup joint and are had the bottom and compensation arrangement (8) fixed connection of adjusting pole (74) and adjusting pole (74), the outside cover of adjusting pole (74) is equipped with spring (75), the top of spring (75) and the top fixed connection of regulating plate (73) and the bottom of spring (75) and the bottom fixed connection of regulating storehouse (72) inner chamber, the bottom of regulating plate (73) is located on the position in the middle fixed mounting has the bottom of resistance lever (76) and the bottom fixed connection of regulating storehouse (72) inner chamber, the outer surface of the adjusting bin (72) is fixedly provided with an induction device (77), one side of the adjusting plate (73) is fixedly provided with a conducting strip, and the sliding contact (78) is in contact with the induction device (77).

3. The silicon wafer crystal pulling device for producing the computer main board as claimed in claim 2, wherein: the sensing device (77) comprises a sensor (771), the sensor (771) is fixedly installed on one side of the outer surface of the adjusting bin (72), an upper contact (772) and a lower contact (773) are fixedly installed on the top and the bottom of the sensor (771) and are respectively contacted with the top and the bottom of the resistance rod (76), a limiting seat (774) and a limiting seat (774) are fixedly installed on the bottom of the lower contact (773), the bottom of the limiting seat (774) is contacted with the bottom of the inner cavity of the adjusting bin (72), the sliding contact (78) is contacted with the outer surface of the sensor (771), and the sensor (771) can sense current between the sliding contact (78) and the upper contact (772) and the lower contact (773) on two sides.

4. A silicon wafer crystal pulling apparatus for producing a computer main board as claimed in claim 3, wherein: the compensation device (8) comprises a compensation bin (81), the top of the compensation bin (81) is fixedly connected with the bottom of the adjusting rod (74), limiting strips (82) are fixedly mounted on two sides of the inner cavity of the compensation bin (81), a rotary displacement plate (83) and the outer surface of the rotary displacement plate (83) are movably mounted in the inner cavity of the compensation bin (81), the outer surface of the rotary displacement plate (83) is matched with the limiting strips (82), a traction threaded rod (84) and the traction threaded rod (84) cannot rotate axially under the limiting condition of the rotary displacement plate (83) are movably mounted in the middle position of the top of the rotary displacement plate (83), a bearing (85) is fixedly sleeved at the bottom of the inner cavity of the compensation bin (81), a thread rotating sleeve (86) is fixedly sleeved inside the bearing (85), the inner ring of the thread rotating sleeve (86) is matched with the traction threaded rod (84) through threads, and a power bin (87) is fixedly mounted on the outer surface of the compensation bin (81), a power machine II (88) is fixedly arranged in the power bin (87), a driving gear (89) is fixedly arranged at one end of an output shaft of the power machine II (88), and the driving gear (89) is meshed with the rotation-preventing displacement plate (83).

5. The silicon wafer crystal pulling device for producing the computer main board as claimed in claim 4, wherein: the output end of the inductor (771) is connected with the input end of the power machine II (88) in a signal connection mode, and the inductor (771) controls the torque output by the power machine II (88) through the current between the adjusting plate (73) and the lower contact (773).

6. The silicon wafer crystal pulling device for producing the computer main board as claimed in claim 4, wherein: the output end of the inductor (771) is connected with the input end of the feeding equipment in a signal connection mode, and the inductor (771) controls the feeding speed of the feeding equipment through the current change quantity between the adjusting plate (73) and the upper contact (772).