CN113275563B - Method for preparing sensor mask on surface of turbine blade - Google Patents

Method for preparing sensor mask on surface of turbine blade Download PDF

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Publication number
CN113275563B
CN113275563B CN202110467936.5A CN202110467936A CN113275563B CN 113275563 B CN113275563 B CN 113275563B CN 202110467936 A CN202110467936 A CN 202110467936A CN 113275563 B CN113275563 B CN 113275563B
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China
Prior art keywords
sensor
mask
turbine blade
ink
blade
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CN202110467936.5A
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CN113275563A (en
Inventor
陶智
王毅
邱璐
张盛丰
张梦森
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Beihang University
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Beihang University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • B41J3/413Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material for metal
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • C25D5/022Electroplating of selected surface areas using masking means
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/08Electroplating with moving electrolyte e.g. jet electroplating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples

Abstract

The invention provides a method for preparing a sensor mask on the surface of a turbine blade, and belongs to the field of sensor mask preparation methods. The method comprises the steps of firstly printing an ink deposition pattern in the shape of a sensor mask on the surface of a blade by using an ink-jet printing technology, sintering the ink deposition pattern to obtain a solidified sensor mask, wherein the mask can be weakly adhered to the surface of the blade, and stripping the mask to obtain the sensor after a sensor material is deposited on the surface of the blade by using methods such as vapor deposition or MEMS (micro-electromechanical systems). The method can be applied to various complex curved surfaces, is easy to customize, only consumes a small amount of ink in mask preparation, and saves materials.

Description

Method for preparing sensor mask on surface of turbine blade
Technical Field
The invention belongs to the field of sensor mask preparation methods, and particularly relates to a method for preparing a sensor mask on the surface of a turbine blade.
Background
The design process of the turbine blade needs a great amount of tests, such as surface temperature distribution measurement and the like, temperature sensors need to be arranged on the surface of the blade, and the surface of the turbine blade is generally in a complex shape of bending, twisting and sweeping, so that the process for preparing the sensors on the surface of the blade is complex.
In engineering, a mask and deposition (e.g., MEMS) process are commonly used for manufacturing, and it is a necessary process to manufacture a mask with a specific structure according to different circuit pattern requirements, so how to quickly and flexibly manufacture a mask with complex and fine circuits is a key technology.
In actual engineering, a laminating type hard mask or a metal sheet carved with a sensor pattern is obtained by a casting process, and as the structure of a turbine blade is complex, the requirement on the processing precision of the mask is high and the process is complex and the cost is high in order to ensure the laminating precision; meanwhile, specific masks need to be customized repeatedly according to different pattern requirements, so that the process complexity is increased, the flexibility is poor, and meanwhile, the material waste is easily caused; such hard masks also tend not to be useful for making masks of micro-scale dimensions. Or a mask is prepared on the surface of the blade by adopting a photoresist smearing mode, and the mask used in photoresist etching needs to be further prepared for obtaining the pattern, so that the process flow is more complicated.
Disclosure of Invention
The invention aims to solve the technical problems that the existing method for preparing the sensor mask on the surface of the blade has high mask precision requirement and complex process, and provides a method for preparing the sensor mask on the surface of the turbine blade.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a method of preparing a sensor mask on a turbine blade surface, comprising:
the method comprises the following steps: mask deposition: depositing functional material ink on the surface of the turbine blade by a printer according to a sensor design pattern, wherein the difference between the thermal expansion coefficients of the functional material and the surface material of the turbine blade is 3-5 ppm/DEG C;
step two: and (3) sintering: evaporating and drying the turbine blade deposited in the step one for 30min at a heating platform with the temperature of 100-150 ℃, removing redundant dispersion medium, and sintering at the temperature of 600-1000 ℃ for 1h to obtain a sintered turbine blade;
step three: sensor material deposition: depositing a sensor material on the surface of the sintered turbine blade in the second step to obtain a film;
step four: stripping the mask: and (3) heating the film obtained in the third step for 10-20min at the temperature of 200 ℃ of a hot air gun, and enabling the mask pattern to fall off from the substrate to obtain the sensor.
Preferably, the functional material ink of the first step is nanoparticle ink containing nichrome, nickel-silicon alloy or copper-nickel alloy.
Preferably, the material of the turbine blade surface is alumina ceramic.
Preferably, the material of the step three sensor is a ceramic material or a thermocouple metal material.
Preferably, the step three sensor material is deposited on the surface of the sintered turbine blade by a MEMS, spray coating or electroplating process.
Preferably, the thickness of the sensor material deposited in step three is 1-10 μm.
The invention has the advantages of
The invention provides a method for preparing a sensor mask on the surface of a turbine blade, which comprises the steps of firstly printing an ink deposition pattern in the shape of the sensor mask on the surface of the blade by using an ink-jet printing technology, sintering the ink deposition pattern to obtain a solidified sensor mask, wherein the mask can be weakly adhered to the surface of the blade, and stripping the mask to obtain a sensor after a sensor material is deposited on the surface of the blade by using methods such as vapor deposition or MEMS (micro-electromechanical systems). The method can be applied to various complex curved surfaces, is easy to customize, only consumes a small amount of ink in mask preparation, and saves materials.
Detailed Description
A method of preparing a sensor mask on a turbine blade surface, comprising:
the method comprises the following steps: designing a mask pattern according to a sensor pattern, selecting a functional material ink, wherein the difference between the thermal expansion coefficients of the functional material and the surface material of the turbine blade is large, the thermal expansion coefficient of the functional material is 12-13 ppm/DEG C, the surface of the turbine blade with the thermal barrier coating is ceramic, the expansion coefficient is 8-9 ppm/DEG C, and the difference is 3-5 ppm/DEG C, and depositing the functional material ink on the surface of the turbine blade by using a microfab printer by means of an ink-jet printing technology; the functional material ink is nanoparticle ink containing nickel-chromium alloy, nickel-silicon alloy or copper-nickel alloy.
Step two: removing the excessive liquid dispersion medium of the ink in the mask pattern by sintering, and enabling the deposited particles to be mutually connected to form a mask to densify the particles to form an integral structure, wherein the method comprises the following steps: evaporating and drying the turbine blade deposited in the step one for 30min at a heating platform with the temperature of 100-150 ℃, removing redundant dispersion medium, and sintering at the temperature of 600-1000 ℃ for 1h to obtain a sintered turbine blade;
step three: depositing a sensor material on the surface of the sintered turbine blade in the second step to obtain a film; the sensor material should be selected according to the actual sensor requirements, such as a pressure sensor, preferably a ceramic material, a temperature sensor, preferably a thermocouple metal material, and the thermocouple metal material is preferably nickel silicon, nickel chromium, platinum rhodium or platinum. The sensor material is deposited on the surface of the sintered turbine blade through the existing MEMS, spraying or electroplating process. The sensor material is preferably deposited to a thickness of 1-10 μm.
Step four: by means of the difference of the thermal expansion coefficients of the mask material and the surface material of the turbine blade, the mask pattern generates large thermal stress due to thermal deformation mismatch between the mask pattern and the substrate through heating, so that the mask pattern is separated from the substrate, specifically: and (3) heating the film obtained in the third step for 10-20min at the temperature of 200 ℃ of a hot air gun, and enabling the mask pattern to fall off from the substrate to obtain the sensor.
According to the present invention, the method for preparing the functional material ink preferably comprises:
the method comprises the following steps: preparing K-type thermocouple material into nanometer particles by adopting a gas phase method; the K-type thermocouple material is nickel-chromium alloy (mass ratio of 90:10), nickel-silicon alloy (mass ratio of 97:3) or copper-nickel alloy (mass ratio of 52:48), and the source is commercially available. The method for preparing the nanoparticles by the gas phase method is a conventional preparation method in the field, and is not particularly limited. The average particle diameter of the obtained nanoparticles was 50 nm.
Step two: uniformly stirring and mixing the nano particles and the organic solvent to obtain a mixed solution; the organic solvent is preferably one or more of ethylene glycol, diethylene glycol, isopropanol or ethanol, and the mass ratio of the nanoparticles to the organic solvent is preferably 1: 9;
step three: the second step of depolymerizing the mixed solution to release the aggregation state between the microparticles preferably includes: and (3) putting the mixed solution into an ultrasonic crusher, depolymerizing for 3 hours under the power of 150-180w, filtering, and filtering large particles in the ink to obtain the thermocouple ink suitable for ink-jet printing. The filtration is performed by selecting a PET filter membrane with the diameter of the filter membrane hole of 45-100 μm.
The present invention will be described in further detail with reference to specific examples.
Example 1 preparation of ink containing nanoparticles of a copper-nickel alloy
1. Copper-nickel alloy wires are used as raw materials, copper-nickel nano particles are prepared by a vapor phase method, and the average particle size can reach 50 nm;
2. respectively weighing 1g of copper-nickel nanoparticles, 6.3g of ethylene glycol and 2.7g of isopropanol, placing the copper-nickel nanoparticles, the ethylene glycol and the isopropanol in a beaker, and stirring and mixing the mixture uniformly by using a glass rod to obtain a mixed solution;
3. putting the mixed solution into an ultrasonic crusher, and depolymerizing for 3 hours under the power of 150 w;
4. filtering the ink by adopting a filter membrane with the filter membrane aperture of 45 mu m; finally, the ink containing the copper-nickel particles is obtained.
Example 2
Aeroengine turbine blade surface temperature measurement sensor processing
Firstly, depositing a mask pattern on the surface of a blade by using an ink-jet printing technology, wherein the material is the ink containing copper-nickel particles in the embodiment 1, the diameter of a printer nozzle is 50 micrometers, the diameter of a liquid drop is about 80 micrometers, and the distance between the liquid drops is about 100 micrometers;
evaporating and drying the deposited turbine blade for 30min at a heating platform at 120 ℃, removing redundant dispersion medium, and sintering at 900 ℃ for 1h to obtain a sintered turbine blade;
adopting magnetron sputtering technology, depositing two materials of nickel silicon (97:3) and nickel chromium (90:10) on the sintered turbine blade to be respectively used as a negative electrode and a positive electrode, and forming a high-temperature resistant K-type thermocouple; the sputtering parameters are as follows: the method comprises the following steps of (1) carrying out air pressure vacuum, wherein the power is 150w, the temperature is 200 ℃, the deposition thickness of nickel silicon as a negative electrode material is 2 mu m, and the deposition thickness of nickel chromium as a positive electrode material is 1 mu m;
and finally, integrally heating to 200 ℃ to enable the mask to fall off from the blade, thus obtaining the thermocouple array.
Example 3
Internal temperature measurement of combustion chamber of aircraft engine
Firstly, a mask pattern is deposited on the surface of a blade by using an ink-jet printing technology, the material is selected from the ink containing the copper-nickel particles in the embodiment 1, the diameter of a printer nozzle is 50 micrometers, the diameter of a liquid drop is about 80 micrometers, and the distance between the liquid drops is about 100 micrometers.
Evaporating and drying the deposited turbine blade for 30min at a heating platform at 120 ℃, removing redundant dispersion medium, and sintering at 900 ℃ for 1h to obtain a sintered turbine blade;
adopting magnetron sputtering technology, depositing positive material platinum and rhodium (90:10) and negative material platinum on the sintered turbine blade to form an S-shaped thermocouple; the sputtering parameters are as follows: the method comprises the following steps of (1) carrying out air pressure vacuum, wherein the power is 150w, the temperature is 150 ℃, the deposition thickness of platinum and rhodium serving as anode materials is 2 mu m, and the deposition thickness of platinum serving as cathode materials is 2 mu m;
and finally, integrally heating to about 200 ℃ to enable the mask to fall off from the blade, thus obtaining the thermocouple array.
Example 4
Marine gas turbine engine turbine blade temperature measurement
Firstly, a mask pattern is deposited on the surface of a blade by using an ink-jet printing technology, the material is selected from the ink containing the copper-nickel particles in the embodiment 1, the diameter of a printer nozzle is 50 micrometers, the diameter of a liquid drop is about 80 micrometers, and the distance between the liquid drops is about 100 micrometers.
Evaporating and drying the deposited turbine blade for 30min at a heating platform at 120 ℃, removing redundant dispersion medium, and sintering at 900 ℃ for 1h to obtain a sintered turbine blade;
adopting magnetron sputtering technology, depositing two materials of nickel silicon (97:3) and nickel chromium (90:10) on the sintered turbine blade to be respectively used as a negative electrode and a positive electrode, and forming a high-temperature resistant K-type thermocouple; the sputtering parameters are as follows: the method comprises the following steps of (1) carrying out air pressure vacuum, wherein the power is 200w, the temperature is 150 ℃, the deposition thickness of nickel silicon as a negative electrode material is 2 mu m, and the deposition thickness of nickel chromium as a positive electrode material is 1 mu m;
and finally, integrally heating to about 200 ℃ to enable the mask to fall off from the blade, thus obtaining the thermocouple array.

Claims (6)

1. A method of preparing a sensor mask on a turbine blade surface, comprising:
the method comprises the following steps: mask deposition: depositing functional material ink on the surface of the turbine blade by a printer according to a sensor design pattern, wherein the difference between the thermal expansion coefficients of the functional material and the surface material of the turbine blade is 3-5 ppm/DEG C;
step two: and (3) sintering: evaporating and drying the turbine blade deposited in the step one for 30min at a heating platform with the temperature of 100-150 ℃, removing redundant dispersion medium, and sintering at the temperature of 600-1000 ℃ for 1h to obtain a sintered turbine blade;
step three: sensor material deposition: depositing a sensor material on the surface of the sintered turbine blade in the second step to obtain a film;
step four: stripping the mask: and (3) heating the film obtained in the third step for 10-20min at the temperature of 200 ℃ of a hot air gun, and enabling the mask pattern to fall off from the substrate to obtain the sensor.
2. The method for preparing the sensor mask on the surface of the turbine blade as claimed in claim 1, wherein the ink of the functional material in the first step is a nanoparticle ink containing nichrome, nickel-silicon alloy or copper-nickel alloy.
3. The method as claimed in claim 1, wherein the material of the turbine blade surface is alumina ceramic.
4. The method as claimed in claim 1, wherein the sensor mask is made of a ceramic material or a thermocouple metal material.
5. The method as claimed in claim 1, wherein the step three sensor material is deposited on the surface of the turbine blade by MEMS, spray coating or electroplating.
6. The method of claim 1, wherein the thickness of the sensor material deposited in the third step is 1-10 μm.
CN202110467936.5A 2021-04-28 2021-04-28 Method for preparing sensor mask on surface of turbine blade Active CN113275563B (en)

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Citations (4)

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Publication number Priority date Publication date Assignee Title
RU2013136391A (en) * 2013-08-05 2015-02-10 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") METHOD FOR PRODUCING A THERMAL ANEMOMETER (OPTIONS)
CN107073651A (en) * 2014-08-08 2017-08-18 于利奇研究中心有限公司 Sensor and the method for manufacturing sensor
CN108531848A (en) * 2017-12-27 2018-09-14 中国航发四川燃气涡轮研究院 A kind of thick film thermocouple sensor manufacturing process based on plasma spraying
CN109338290A (en) * 2018-11-02 2019-02-15 中国航空工业集团公司上海航空测控技术研究所 A kind of film temperature sensor for aero engine turbine blades

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8257600B2 (en) * 2010-03-01 2012-09-04 United Technologies Corporation Printed masking process

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2013136391A (en) * 2013-08-05 2015-02-10 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") METHOD FOR PRODUCING A THERMAL ANEMOMETER (OPTIONS)
CN107073651A (en) * 2014-08-08 2017-08-18 于利奇研究中心有限公司 Sensor and the method for manufacturing sensor
CN108531848A (en) * 2017-12-27 2018-09-14 中国航发四川燃气涡轮研究院 A kind of thick film thermocouple sensor manufacturing process based on plasma spraying
CN109338290A (en) * 2018-11-02 2019-02-15 中国航空工业集团公司上海航空测控技术研究所 A kind of film temperature sensor for aero engine turbine blades

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Inventor after: Qiu Lu

Inventor after: Wang Yi

Inventor after: Tao Zhi

Inventor after: Zhang Shengfeng

Inventor after: Zhang Mengsen

Inventor before: Tao Zhi

Inventor before: Wang Yi

Inventor before: Qiu Lu

Inventor before: Zhang Shengfeng

Inventor before: Zhang Mengsen