CN113189709A - Input optical signal generating device for optical fiber array and photoetching system - Google Patents
Input optical signal generating device for optical fiber array and photoetching system Download PDFInfo
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2706—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters
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- G02B6/24—Coupling light guides
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- G02B6/27—Optical coupling means with polarisation selective and adjusting means
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- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2057—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using an addressed light valve, e.g. a liquid crystal device
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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Abstract
The invention discloses an input optical signal generating device for an optical fiber array and a photoetching system. The invention modulates the incident single laser beam into a multi-beam array through a spatial light modulator, then reflects any sub-beam in the beam array to a corresponding micro-lens in the micro-lens array through a digital micro-mirror device, and each sub-beam is focused through the micro-lens and then enters an optical fiber in the optical fiber array. By programming control of the digital micromirror device, high-speed switching of on/off of each path of input optical signals in the optical fiber array can be realized. The invention can effectively utilize the power of the light source to carry out multi-path light beam splitting and couple the light into the optical fiber array, and can realize the independent controllable high-speed optical switch signal input of each optical fiber in the optical fiber array. The invention can be used as a key device to be applied to the fields of optical fiber-based communication, sensing, imaging, optical micromachining and the like.
Description
Technical Field
The invention belongs to the technical field of optics, and particularly relates to an input optical signal generating device for an optical fiber array and a photoetching system.
Background
Optical switching devices play a significant role in many optical systems based on optical fibers. For example, in the fields of fiber-optic communication, sensing, imaging, optical micromachining and the like, it is necessary to implement operations such as transmission and reception of a large number of pulsed light signals or continuous light signals. Currently commercially available optical switching devices for optical fibers are mainly in the form of micro-electro-mechanical systems (MEMS) optical switches, electro-optical (EOM) switches, and acousto-optical (AOM) switches. Because the on-off of the optical path of the optical fiber is controlled by the micro-mechanical movement of the optical switch of the micro-electro-mechanical system, the switching speed is limited, the one-time switching time of the optical switch of the highest micro-electro-mechanical system at present is about 1ms magnitude, and the switching speed cannot meet the application scenes needing high-speed optical signals, such as a point-by-point scanning microscope/endoscope and the like adopting an optical fiber probe. The electro-optical switch and the acousto-optical switch are used for modulating a light field transmitted in a section of light path by means of reversible change of a transmission medium caused by an external electric field or a sound field, so that the optical switch is realized, the two optical switches have high switching speed, the minimum switching time of the currently marketed acousto-optical switch can reach dozens of ns, and the minimum switching time of the electro-optical switch can be less than 1 ns. However, since the electro-optical switch and the acousto-optical switch implement optical field modulation by changing the physical properties of the transmission medium, they are very sensitive to the wavelength of the transmission light and generally can only operate in a certain narrow bandwidth wavelength range. On the other hand, besides that the optical switch of the micro-electro-mechanical system can realize the switching of input optical signals to a plurality of different optical fibers, the current commercially available optical switches of other types can only control the on-off of a single optical fiber, and because the selling price of a single electro-optical switch or acousto-optical switch is tens of thousands of yuan, if the real-time independent control of each optical fiber in the optical fiber array is realized through the two types of switches, the system cost is very high.
The Spatial Light Modulator (SLM) is a device that controls the variation of certain parameters of liquid crystal molecules distributed at different spatial positions, thereby writing some specific information into a transmitted or reflected optical field, and achieving the purpose of modulating an output optical field into a specific distribution form. For example, a single light beam incident on the spatial light modulator is modulated into a plurality of sub-beams to be output, and the position, the interval and the like of the focal point of each sub-beam can be precisely controlled by the spatial light modulator. However, since the spatial light modulator controls the optical field by controlling the change of the liquid crystal molecules, if the change of the output optical field distribution is desired, the switching speed is not high, and the switching frequency of a typical commercially available spatial light modulator is 60 Hz.
Digital Micromirror Devices (DMDs), invented in 1987 by Larry Hornbeck, texas instruments, consist of hundreds of thousands to millions of micromirrors closely packed on a CMOS silicon substrate, where each micromirror typically has dimensions of 14 μm by 14 μm. When receiving digital driving signals from the CMOS RAM, each micro lens can independently rotate at high speed around the hinge below the micro lens. In a typical working scene, the inclination angle of the micro-lens has two states of +/-12 degrees: when the micro mirror is tilted by +12 °, the incident light is reflected to a predetermined direction, and when the micro mirror is tilted by-12 °, the incident light is reflected to a light absorption medium in the digital micro mirror device and absorbed. The dmd can be used as a two-dimensionally distributed reflective optical switch array in which the response speed of each individual optical switch is fast, and the typical maximum switching frequency of the current commercially available dmd is about a few KHz.
In summary, in a system applying a large-scale optical fiber array and requiring independent control of each optical fiber switch, the problems of high cost, slow response speed, sensitivity to operating wavelength, and the like of the optical fiber switch exist.
Disclosure of Invention
The present invention is directed to an input optical signal generating apparatus for an optical fiber array and a lithography system. The invention is based on the realization of Spatial Light Modulators (SLM), Digital Micromirror Devices (DMD) and Micro Lens Arrays (MLA).
The purpose of the invention is realized by the following technical scheme: an input optical signal generating device for an optical fiber array comprises a laser light source, a half-wave plate, a plurality of groups of optical lenses, a spatial light modulator, a digital micromirror device, a micro-lens array and the like. Laser emitted by a laser source sequentially passes through a half-wave plate, a spatial light modulator, a digital micromirror device and a micro-lens array; with an optical lens interposed for beam expansion, collimation, or focusing.
Furthermore, laser emitted by the laser source is linearly polarized light, and the polarization direction of the laser is matched with the polarization direction required by the work of the spatial light modulator through the adjustment of the half-wave plate. The laser beam after the polarization direction is adjusted by the half-wave plate is expanded and collimated by a group of lenses and then enters the spatial light modulator, so that the incident beam covers the reflecting surface of the spatial light modulator to the maximum extent. The spatial light modulator modulates and converts the incident single laser beam into superposition of a series of sub-beams with slight difference of emergent angles. The exit beam of the spatial light modulator is focused by a lens to form a series of discrete focal spots on a focal plane.
Further, the spatial light modulator is a reflective spatial light modulator.
Further, the incident angle of the incident beam to the spatial light modulator is less than 8 °.
Furthermore, the reflecting surface of the digital micromirror device is located on the focal plane of the outgoing light beam of the spatial light modulator after being focused by the lens, and each converged sub-light beam is just projected into a certain micromirror in the digital micromirror array.
Further, the output light beam modulated by the digital micromirror device passes through a group of lenses and then enters the micro lens array. The micro-lens array is positioned on the back focal plane of the group of lenses, and each sub-beam is focused to be incident to a certain micro-lens in the micro-lens array.
Further, the device also comprises an optical fiber fixing device; the rear part of the micro lens array is connected with an optical fiber fixing device; the optical fiber fixing device fixes the input end of each optical fiber in the optical fiber array at the position aligned with each micro lens after the micro lens array, so as to ensure that the sub-beam passing through each micro lens in the micro lens array can be coupled and input into a corresponding optical fiber subsequently.
Further, the optical fiber fixing device is a crystal head provided with a plurality of V-shaped grooves, and the V-shaped grooves are used for clamping the optical fibers.
A multi-channel parallel laser direct writing photoetching system comprises the input optical signal generating device for the optical fiber array, a scanning lens, a microscope objective, a three-dimensional displacement table and a computer control unit. And the three-dimensional displacement platform carries a photoresist sample pool.
The optical signal generated by the input optical signal generating device for the optical fiber array is input into the optical fiber array, the light beam array output by the optical fiber array is focused in the photoresist sample cell after passing through the scanning lens and the microscope objective, and the focused focal spot array is positioned in the same plane; the computer control unit controls the three-dimensional displacement platform to enable the focal spot array to move in the photoresist sample pool in a three-dimensional mode, and controls the on and off of each focal spot in the photoresist sample pool by controlling the on and off of each digital micro-mirror in the digital micro-mirror device.
Further, the device also comprises an optical fiber fixing device; the optical fiber fixing device enables the output end faces of all the optical fibers to be located on the same plane and arranged at equal intervals.
The invention has the beneficial effects that:
1. the invention firstly utilizes a spatial light modulator to modulate an incident single laser beam into a plurality of sub-beams which are matched with the number of optical fibers in an optical fiber array, then focuses each sub-beam into a micro-lens in a digital micro-mirror device through a lens, controls the digital micro-mirror device through a computer to enable any sub-beam to be reflected into one micro-lens in the micro-lens array or to be lost and absorbed, and finally couples the sub-beam of the incident micro-lens array into one optical fiber in the optical fiber array. The optical devices have broadband working wavelength and can cover the whole visible light wave band or near infrared wave band;
2. in theory, the incident single beam can be modulated into any multiple sub-beams with specific spatial distribution by the spatial light modulator, and a typical digital micro-mirror device can realize independent switch control on dozens to millions of sub-beams; by programming control of the digital micromirror device, high-speed switching of on/off of each path of input optical signals in the optical fiber array can be realized. Therefore, the invention has strong applicability and can meet the requirements of a plurality of systems needing to apply large-scale optical fiber arrays.
3. The invention can effectively utilize the power of the light source to carry out multi-path light beam splitting and couple the light into the optical fiber array, and can realize the independent controllable high-speed optical switch signal input of each optical fiber in the optical fiber array; the broadband laser has the characteristics of low cost, high response speed and broadband working wavelength; the optical fiber micro-processing device can be used as a key device in the fields of optical fiber-based communication, sensing, imaging, optical micro-processing and the like.
Drawings
FIG. 1 is a schematic diagram of an input optical signal generating apparatus for an optical fiber array according to the present invention;
FIG. 2 is a schematic view of a microlens array connected to a subsequent fiber array according to the present invention;
FIG. 3 is a schematic diagram of a single row of closely spaced fiber input end fixtures according to the present invention;
FIG. 4 is a schematic diagram of a multi-channel parallel write-through lithography system according to the present invention;
in the figure: 1. a laser light source; 2. a half-wave plate; 3. a first lens; 4. a second lens; 5. a reflective spatial light modulator; 6. a third lens; 7. a digital micromirror device; 8. a fourth lens; 9. a fifth lens; 10. a microlens array; 11. an optical fiber array; 12. a scanning lens; 13. a microscope objective; 14. a high-precision three-dimensional displacement table; 15. a computer control unit.
Detailed Description
In order to more clearly explain the objects, technical solutions and advantages of the present invention, the following detailed description of the present invention is provided with reference to the embodiments and the accompanying drawings.
As shown in fig. 1, the input optical signal generating device for an optical fiber array of the present invention comprises a laser light source 1, a half-wave plate 2, a first lens 3, a second lens 4, a reflective spatial light modulator 5(SLM), a third lens 6, a digital micromirror device 7(DMD), a fourth lens 8, a fifth lens 9, a micro lens array 10(MLA), and an optical fiber input end fixing device.
The laser light source 1 emits linearly polarized light, and laser beams are modulated into a linear polarization direction required by the reflective spatial light modulator 5 through the half-wave plate 2, expanded and collimated through the first lens 3 and the second lens 4, and then emitted to the reflective spatial light modulator 5.
The included angle between the normal of the reflecting surface of the reflective spatial light modulator 5 and the axis of the incident collimated light beam is less than 8 degrees, so that the reflective spatial light modulator 5 can realize the optimal modulation effect on the incident light beam; and the incident beam after beam expansion and collimation covers the reflecting surface of the reflective spatial light modulator 5 to the maximum extent, so that the service efficiency of the reflective spatial light modulator 5 is improved. According to the number and arrangement mode of the optical fibers in the required optical fiber array, the required phase distribution diagram is calculated by a computer and loaded on the reflective spatial light modulator 5, so that the incident light beams are converted into a series of sub-light beams with slightly different transmission directions after being modulated by the spatial light modulator 5. The series of beamlets is focused by lens three 6 to form a series of discrete focal spots on the back focal plane.
The reflective surface of the dmd 7 is approximately located on the back focal surface of the lens three 6, and the focal spot formed by each sub-beam is exactly located in a certain micromirror of the dmd. When the micro lens is in an 'on' state, the sub beam incident on the micro lens can be reflected to enter a subsequent light path; when the micro-mirror is in an off state, the sub-beams incident on the micro-mirror are reflected to the light absorption material in the digital micro-mirror device and absorbed, and do not participate in the formation of the subsequent light path.
The sub-beam array emitted by the dmd 7 passes through a 4F system composed of a lens four 8 and a lens five 9 and then enters a microlens array 10. The 4F system conjugates the image of the discrete focal spot array modulated by the dmd 7 to the plane of the microlens array 10, and makes each of the converged sub-beams enter exactly one microlens in the microlens array 10.
Each microlens in the microlens array is specially designed for coupling spatial light into an optical fiber, and includes the size, numerical aperture, array arrangement and the like of the microlens. As shown in fig. 2, the microlens array 10 is connected to the optical fiber input end fixing device, which is used to connect the optical fiber array input end, so as to ensure that each sub-beam entering the microlens can be input into one optical fiber in the optical fiber array with low loss.
According to the invention, the arrangement mode of the input end of the optical fiber array, the arrangement mode of the micro-lenses in the micro-lens array 10 and the positions of the micro-lenses in practical application in the digital micro-mirror device 7 need to be comprehensively considered, designed and optimized, and finally, a phase distribution diagram loaded by the reflective spatial light modulator 5 is generated according to requirements. As shown in fig. 3, the optical fiber input end fixing device is a special optical fiber crystal head with a plurality of V-grooves, and the optical fiber input end can be clamped in the V-grooves; in this embodiment, a microlens array 10 with a microlens pitch of 150 μm is used, a plurality of optical fibers are arranged in a V-groove of an optical fiber input end fixing device, so that the center pitch of adjacent optical fibers is also 150 μm, and after the optical fiber array arranged in a single row is packaged, the input end surfaces of all the optical fibers are located in the same plane by grinding. With the specially-made fiber input end fixing device of this embodiment, the input end of each fiber exactly matches one microlens in the microlens array 10. In practical application, a plurality of crystal heads can be fixed through a specially-made optical fiber input end fixing device to realize multi-row and multi-column optical fiber array input, and the optical fiber input end fixing device and the micro lens array with special arrangement forms can be customized according to requirements.
The invention has potential application value in various optical systems based on optical fiber arrays. Besides being used as a generating device of multi-path input signals in an optical fiber communication system, the optical fiber communication system can also be used in the fields of optical micromachining and the like.
As shown in fig. 4, the multichannel parallel laser direct writing lithography system of the present invention comprises the input optical signal generating device for the optical fiber array, the optical fiber array 11, an optical fiber output end fixing device, a scanning lens 12, a microscope objective 13, a high-precision three-dimensional displacement stage 14, and a computer control unit 15. The high-precision three-dimensional displacement stage 14 carries a photoresist sample cell. The structure of the optical fiber array output end fixing device is completely the same as that of the optical fiber array input end fixing device.
The optical signal generated by the input optical signal generating device for the optical fiber array is input into the optical fiber array 11, and the optical fiber array output end fixing device enables the output end faces of all the optical fibers to be located on the same plane and arranged at equal intervals. The light beam array output by the optical fiber array 11 passes through the scanning lens 12 and the microscope objective 13 and is focused in the photoresist sample cell, and the two groups of lenses (the scanning lens 12 and the microscope objective 13) are optimized so that the focused focal spot arrays are positioned in the same plane. The high-precision three-dimensional displacement table 14 carrying the photoresist sample pool is controlled by the computer control unit 15, so that the focal spot array can move three-dimensionally in the photoresist sample pool. Meanwhile, the digital micromirror device 7 is controlled by the computer control unit 15, and each optical fiber in the optical fiber array can be switched on and off in real time, so that the on and off of each focal spot in the photoresist sample cell can be controlled in real time. When the focal spot is lit, curing of the photoresist at the corresponding location may be initiated. And traversing the microstructure to be photoetched through the focal spot array, curing the photoresist at the corresponding position, and washing the rest uncured photoresist through a developing solution to obtain the required microstructure. Because the system adopts the focal spot array formed by the emergent light of the multi-path optical fiber to carry out the parallel photoetching, the operating efficiency of the system is greatly improved compared with the traditional single-beam direct-writing photoetching.
It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Those skilled in the art should understand that they can make modifications and equivalents without departing from the spirit and scope of the present invention.
Claims (10)
1. An input optical signal generating device for an optical fiber array is characterized by comprising a laser light source, a half-wave plate, a plurality of groups of optical lenses, a spatial light modulator, a digital micromirror device, a micro-lens array and the like. Laser emitted by a laser source sequentially passes through a half-wave plate, a spatial light modulator, a digital micromirror device and a micro-lens array; with an optical lens interposed for beam expansion, collimation, or focusing.
2. The input optical signal generating device for the optical fiber array as claimed in claim 1, wherein the laser light emitted from the laser light source is linearly polarized light, and the polarization direction of the laser light is matched with the polarization direction required by the operation of the spatial light modulator by adjusting the half-wave plate. The laser beam after the polarization direction is adjusted by the half-wave plate is expanded and collimated by a group of lenses and then enters the spatial light modulator, so that the incident beam covers the reflecting surface of the spatial light modulator to the maximum extent. The spatial light modulator modulates and converts the incident single laser beam into superposition of a series of sub-beams with slight difference of emergent angles. The exit beam of the spatial light modulator is focused by a lens to form a series of discrete focal spots on a focal plane.
3. The input optical signal generating apparatus according to claim 1, wherein the spatial light modulator is a reflective spatial light modulator.
4. The input optical signal generating apparatus of claim 1, wherein the incident angle of the incident optical beam to the spatial light modulator is less than 8 °.
5. The input optical signal generator of claim 1, wherein the reflective surface of the dmd is located on a focal plane of the output beam of the slm focused by the lens, and each converged sub-beam is projected into exactly one micromirror of the dmd.
6. The input optical signal generator of claim 1, wherein the output optical beam modulated by the dmd is incident on the microlens array after passing through a set of lenses. The micro-lens array is positioned on the back focal plane of the group of lenses, and each sub-beam is focused to be incident to a certain micro-lens in the micro-lens array.
7. The input optical signal generating apparatus for an optical fiber array according to claim 1, further comprising an optical fiber fixing device; the rear part of the micro lens array is connected with an optical fiber fixing device; the optical fiber fixing device fixes the input end of each optical fiber in the optical fiber array at the position aligned with each micro lens after the micro lens array, so as to ensure that the sub-beam passing through each micro lens in the micro lens array can be coupled and input into a corresponding optical fiber subsequently.
8. The input optical signal generator for an optical fiber array of claim 7, wherein the optical fiber fixing means is a crystal head having a plurality of V-grooves for holding the optical fibers.
9. A multi-channel parallel laser direct writing lithography system, characterized in that, it comprises the input optical signal generating device for optical fiber array of claim 1, and optical fiber array, scanning lens, microscope objective, three-dimensional displacement table, computer control unit. And the three-dimensional displacement platform carries a photoresist sample pool.
The optical signal generated by the input optical signal generating device for the optical fiber array is input into the optical fiber array, the light beam array output by the optical fiber array is focused in the photoresist sample cell after passing through the scanning lens and the microscope objective, and the focused focal spot array is positioned in the same plane; the computer control unit controls the three-dimensional displacement platform to enable the focal spot array to move in the photoresist sample pool in a three-dimensional mode, and controls the on and off of each focal spot in the photoresist sample pool by controlling the on and off of each digital micro-mirror in the digital micro-mirror device.
10. The multi-channel parallel laser direct write lithography system according to claim 9, further comprising an optical fiber fixture; the optical fiber fixing device enables the output end faces of all the optical fibers to be located on the same plane and arranged at equal intervals.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114019763A (en) * | 2021-09-24 | 2022-02-08 | 之江实验室 | Parallel direct writing device based on ten thousand independent controllable laser dot matrixes |
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| CN115639729A (en) * | 2022-08-30 | 2023-01-24 | 之江实验室 | Optical fiber parallel laser direct writing method and system based on holographic phase splitting |
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