CN113186499A

CN113186499A - High-energy pulse arc evaporation source

Info

Publication number: CN113186499A
Application number: CN202110296512.7A
Authority: CN
Inventors: 王叔晖; 沈平; 孟庆学
Original assignee: Fade Zhejiang Machinery Technology Co ltd
Current assignee: Fade Zhejiang Machinery Technology Co ltd
Priority date: 2021-03-19
Filing date: 2021-03-19
Publication date: 2021-07-30

Abstract

The invention discloses a high-energy pulse arc evaporation source, which relates to the field of metal workpiece processing and comprises a box body, wherein the front part of the box body is movably hinged with a door body, the box body and the door body in a closed state form a hexagonal prism structure, and a plurality of arc ion plating devices are arranged on the inner side wall of the box body and the back surface of the door body; the carousel includes the outer dish and places the dish, and the outer dish is discoid and the activity cup joints at the top of box, and circular recess has been seted up to the upper surface of outer dish, and inner diapire center department of circular recess rotates and is connected with the driving gear, and the bottom surface fixedly connected with of driving gear runs through the rotating tube of outer dish diapire, and the rotating tube is connected for rotating with the outer dish with outer, the interior peripheral face fixedly connected with ring gear of circular recess. The placing disc can do up-and-down reciprocating motion, rotation and revolution periodically, and the workpiece to be coated can receive the evaporated molecular morphology material uniformly, so that the film formed on the surface of the workpiece is as uniform as possible.

Description

High-energy pulse arc evaporation source

Technical Field

The invention relates to the field of metal workpiece processing, in particular to a high-energy pulse arc evaporation source.

Background

In order to plate a desired material on the surface of a workpiece, a thin deposition apparatus is required, which melts the material to be plated by heating to evaporate or sputter it, and the evaporated or sputtered material flies toward the workpiece in the form of molecules in vacuum to be deposited thereon to form a thin film.

The basic principle of the arc coating technology is that in a vacuum chamber, a material to be evaporated is used as a cathode, a high-melting-point metal is used as an anode, an external power supply is used for supplying power to the electrode, arc discharge is generated between the cathode and the anode, high temperature is generated to melt and evaporate the cathode material, the evaporated material flies to a workpiece in a molecular form and finally deposits on the surface of the workpiece to form a film, and the evaporated molecular form material is not uniformly ejected, is mostly in a direction vertical to an evaporation surface, and gradually weakens in a direction deviating from the vertical direction, so that the thickness of the film formed on the surface of the workpiece is not uniform.

Therefore, in order to overcome the uneven electroplating phenomenon, the original equipment is improved, so that the workpiece is prevented from electroplating and enriching on one side.

Disclosure of Invention

Solves the technical problem

Aiming at the defects of the prior art, the invention provides a high-energy pulse arc evaporation source, which solves the problem of uneven film thickness formed on the surface of a workpiece by some existing arc coating devices.

Technical scheme

The high-energy pulse arc evaporation source comprises a box body, wherein a door body is movably hinged to the front part of the box body, the box body and the door body in a closed state form a hexagonal prism structure, a plurality of arc ion plating devices are mounted on the inner side wall of the box body and the back surface of the door body, a rotating disc is mounted on the inner bottom wall of the box body, and the matching of the arc ion plating devices can accelerate the film forming speed of a workpiece and improve the uniformity of a film;

the rotary table comprises an outer disc and a placing disc, the placing disc is used for placing a workpiece to be coated, the outer disc is disc-shaped and is movably sleeved at the top of the box body, the outer disc can be lifted, the upper surface of the outer disc is provided with a circular groove, the center of the inner bottom wall of the circular groove is rotationally connected with a driving gear, the bottom surface of the driving gear is fixedly connected with a rotating pipe which penetrates through the bottom wall of the outer disc, the rotating pipe and the outer disc are both in rotating connection, the inner peripheral side surface of the circular groove is fixedly connected with a gear ring, a plurality of driven gears distributed in an annular array are arranged between the driving gear and the gear ring, the driven gears are respectively meshed with the driving gear and the gear ring, the placing disc is fixedly arranged at the top of the driven gears, when the driving gear rotates, the driven gear can be driven to rotate and revolve around the axis of the driving gear, so that the film forming of a workpiece is more uniform;

a fixed pipe is fixedly embedded in the center of the inner bottom wall of the box body, the rotating pipe is movably sleeved in the fixed pipe, an arc-shaped groove is arranged on the inner peripheral side surface of the fixed tube, a sliding block is fixedly connected with the outer peripheral side surface of the rotating tube and the bottom of the rotating tube, the slide block is connected inside the arc-shaped groove in a sliding manner, a rectangular groove is formed in the center of the bottom surface of the rotating pipe, a motor is connected to the bottom surface of the box body in a bolted manner, and the top output end of the motor is fixedly connected with a rotating shaft which is movably sleeved in the rectangular groove, the rotating shaft can drive the rotating pipe to rotate when rotating, the rotating pipe can slide up and down along the axis direction of the rotating shaft, the rotating shaft drives the rotating pipe to rotate, meanwhile, the sliding block slides in the arc-shaped groove, the rotating pipe can reciprocate up and down while rotating, finally, the workpiece on the placing disc reciprocates up and down, and the film forming of the workpiece is more uniform.

Furthermore, the inner bottom wall of the box body and the two sides of the fixed pipe are provided with jacks, the bottom surface of the outer disc is fixedly provided with two guide rods, and the guide rods are movably sleeved in the jacks, so that the outer disc can only slide up and down and cannot rotate.

Furthermore, a plurality of heating blocks are further installed on the inner side wall of the box body and the back of the door body, the heating blocks are electrically connected with the arc ion plating device, and the heating blocks can provide heat to accelerate evaporation of the target material.

Furthermore, a plurality of the heating blocks are electrically connected, and a plurality of the arc ion plating devices are electrically matched and work independently, so that the working state of electroplating and coating can be adjusted, and composite coating can also be performed.

Furthermore, the arc ion plating device comprises a target holder and arc-leading needles, wherein the target holder and the arc-leading needles are fixedly embedded in the inner side wall of the box body and the back surface of the door body, the arc-leading needles are positioned at the top of the target holder, a target material is fixedly installed at the center of the target holder, and when the arc-leading needles ignite the target material, the target material is evaporated and flies to a workpiece in a molecular form.

Furthermore, the top of outer dish has bolted connection to keep apart the frame, keep apart frame and box looks adaptation, when the carousel rotated, keep apart the frame and can prevent that the work piece from receiving centrifugal force and being thrown away.

Furthermore, the side surface of the periphery of the placing disc is provided with a packaging plate, and the placing disc is rotatably connected to the center of the packaging plate.

Furthermore, the top of the arc-shaped groove is fixedly connected with an inner disc, the packaging plate is connected in an annular groove formed by the outer disc and the inner disc in a sliding mode, and the packaging plate and the inner disc can shield and protect internal parts of the circular groove.

The invention has the beneficial effects that:

1. according to the invention, the metal to be coated is placed on the placing disc, the motor is started, the motor drives the rotating shaft to rotate slowly, the rotating shaft drives the rotating pipe to rotate, the sliding block slides in the arc-shaped groove, the rotating pipe can reciprocate up and down while rotating, finally, the workpiece reciprocates up and down periodically along the axis direction of the jack, and the film formed on the surface of the workpiece is as uniform as possible.

2. When the workpiece to be coated on the placing disc periodically reciprocates up and down, the rotating pipe can drive the driven gear to rotate and revolve around the axis of the rotating pipe through the driving gear, so that the workpiece to be coated periodically rotates and revolves, the coated workpiece can uniformly receive evaporated molecular materials, and the film forming uniformity of the workpiece is further improved.

Drawings

FIG. 1 is a schematic diagram of the overall structure of a high-energy pulse arc evaporation source according to the present invention;

FIG. 2 is a schematic structural diagram of the isolation frame of the present invention;

FIG. 3 is a schematic structural diagram of a turntable according to the present invention;

FIG. 4 is a side view of the overall structure of the present invention;

FIG. 5 is a schematic view of the structure of section A-A of FIG. 4 according to the present invention;

FIG. 6 is an enlarged view taken at A of FIG. 5 in accordance with the present invention;

fig. 7 is a schematic view of a coupling structure of a rotating pipe and a fixed pipe according to the present invention.

In the figure: 1. a box body; 11. a door body; 12. a fixed tube; 121. an arc-shaped slot; 13. A jack; 2. an arc ion plating device; 21. a target holder; 211. a target material; 22. an arc striking needle; 3. a heating block; 4. a turntable; 41. an outer disc; 411. a circular groove; 412. a guide bar; 42. placing a tray; 421. a driving gear; 422. a ring gear; 423. a driven gear; 424. a package board; 425. an inner disc; 426. rotating the tube; 4261. a slider; 5. A motor; 51. a rotating shaft; 6. an isolation frame.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.

Referring to the attached drawings, the high-energy pulse arc evaporation source of the embodiment comprises a box body 1, wherein a door body 11 is movably hinged to the front part of the box body 1, the box body 1 and the door body 11 in a closed state form a hexagonal prism structure, a plurality of arc ion plating devices 2 are installed on the inner side wall of the box body 1 and the back surface of the door body 11, a rotating disc 4 is installed on the inner bottom wall of the box body 1, and the film forming speed of a workpiece can be accelerated and the uniformity of a film can be improved by the cooperation of the arc ion plating devices 2;

the rotating disc 4 comprises an outer disc 41 and a placing disc 42, the placing disc 42 is used for placing a workpiece to be coated, the outer disc 41 is disc-shaped and movably sleeved on the top of the box body 1, the outer disc 41 can be lifted, a circular groove 411 is formed in the upper surface of the outer disc 41, a driving gear 421 is rotatably connected to the center of the inner bottom wall of the circular groove 411, a rotating pipe 426 penetrating through the bottom wall of the outer disc 41 is fixedly connected to the bottom surface of the driving gear 421, the rotating pipe 426 and the outer disc 41 are rotatably connected, a gear ring 422 is fixedly connected to the inner peripheral side surface of the circular groove 411, a plurality of driven gears 423 distributed in an annular array are arranged between the driving gear 421 and the gear ring 422, the driven gears 423 are respectively meshed with the driving gear 421 and the gear ring 422, the placing disc 42 is fixedly installed on the top of the driven gears 423, when the driving gear 421 rotates, the driven gears 423 can be driven to rotate and revolve around the axis of the driving gear 421, the film forming of the workpiece is more uniform;

a fixed pipe 12 is fixedly embedded at the center of the inner bottom wall of the box body 1, a rotating pipe 426 is movably sleeved inside the fixed pipe 12, an arc-shaped groove 121 is formed in the inner peripheral side surface of the fixed pipe 12, a sliding block 4261 is fixedly connected to the outer peripheral side surface of the rotating pipe 426 and is close to the bottom of the rotating pipe 426, the sliding block 4261 is slidably connected inside the arc-shaped groove 121, a rectangular groove is formed in the center of the bottom surface of the rotating pipe 426, a motor 5 is bolted to the bottom surface of the box body 1, a rotating shaft 51 is fixedly connected to the top output end of the motor 5, the rotating shaft 51 is movably sleeved in the rectangular groove, the rotating pipe 426 can be driven to rotate when the rotating shaft 51 rotates, the rotating pipe 426 can slide up and down along the axial direction of the rotating shaft 51, the rotating shaft 51 drives the rotating pipe 426 to rotate while the sliding block 4261 slides in the arc-shaped groove 121, the rotating pipe 426 can reciprocate up and down while rotating, and finally, workpieces on the placing disc 42 can reciprocate up and down, the film forming of the workpiece is more uniform.

Preferably, the inner side wall of the box body 1 and the back surface of the door body 11 are further provided with a plurality of heating blocks 3, the heating blocks 3 are electrically connected with the arc ion plating device 2, and the heating blocks 3 can provide heat to accelerate the evaporation of the target 211.

Preferably, the heating blocks 3 are electrically connected, and the arc ion plating devices 2 are electrically matched and work independently, so that the working state of the electroplating coating can be adjusted, and composite coating can also be performed.

Preferably, the arc ion plating device 2 includes a target holder 21 and an arc-striking needle 22, the target holder 21 and the arc-striking needle 22 are fixedly embedded in the inner side wall of the box 1 and the back of the door 11, the arc-striking needle 22 is located at the top of the target holder 21, a target 211 is fixedly installed at the center of the target holder 21, and when the arc-striking needle 22 strikes the target 211, the target 211 is evaporated and the molecular form flies to the workpiece.

Preferably, the top of the outer disk 41 is bolted with the isolation frame 6, the isolation frame 6 is matched with the box body 1, and when the rotating disk 4 rotates, the isolation frame 6 can prevent the workpiece from being thrown out by centrifugal force.

Preferably, the circumferential side of the placing disk 42 is provided with a packing plate 424, and the placing disk 42 is rotatably connected at the center of the packing plate 424.

Preferably, the top of the arc-shaped slot 121 is fixedly connected with an inner disc 425, the packaging plate 424 is slidably connected in the annular groove formed by the outer disc 41 and the inner disc 425, and the packaging plate 424 and the inner disc 425 can shield and protect the inner parts of the circular groove 411.

Preferably, the inner bottom wall of the box 1 and the two sides of the fixed tube 12 are provided with insertion holes 13, the bottom surface of the outer tray 41 is fixedly provided with two guide rods 412, and the guide rods 412 are movably sleeved in the insertion holes 13, so that the outer tray 41 can only slide up and down and cannot rotate.

The working principle is as follows: the metal to be coated is placed on the placing disc 42, the motor 5 is started, the motor 5 drives the rotating shaft 51 to rotate slowly, the rotating shaft 51 drives the rotating pipe 426 to rotate, meanwhile, the sliding block 4261 slides in the arc-shaped groove 121, the rotating pipe 426 can reciprocate up and down while rotating, so that the outer disc 41 can slide up and down in a reciprocating mode along the axis direction of the insertion hole 13, meanwhile, the rotating pipe 426 can drive the driven gear 423 to rotate and revolve around the axis of the rotating pipe 426 through the driving gear 421, the metal to be coated on the placing disc 42 can periodically reciprocate up and down, rotate and revolve, when the arc striking needle 22 points at the target 211, the workpiece to be coated can uniformly receive evaporated molecular morphological materials, and a film formed on the surface of the workpiece is uniform as much as possible.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. High energy pulse arc evaporation source, including box (1), its characterized in that: the front part of the box body (1) is movably hinged with a door body (11), the box body (1) and the door body (11) in a closed state form a hexagonal prism structure, a plurality of arc ion plating devices (2) are mounted on the inner side wall of the box body (1) and the back surface of the door body (11), and a turntable (4) is mounted on the inner bottom wall of the box body (1);

the rotary disc (4) comprises an outer disc (41) and a placing disc (42), the outer disc (41) is disc-shaped and is movably sleeved at the top of the box body (1), a circular groove (411) is formed in the upper surface of the outer disc (41), a driving gear (421) is rotatably connected to the center of the inner bottom wall of the circular groove (411), a rotating pipe (426) penetrating through the bottom wall of the outer disc (41) is fixedly connected to the bottom surface of the driving gear (421), a gear ring (422) is fixedly connected to the inner peripheral side surface of the circular groove (411), a plurality of driven gears (423) distributed in an annular array are arranged between the driving gear (421) and the gear ring (422), the driven gears (423) are respectively meshed with the driving gear (421) and the gear ring (422), and the placing disc (42) is fixedly installed at the top of the driven gears (423);

fixed pipe (12) have been inlayed fixedly at the inner diapire center department of box (1), rotating tube (426) activity cup joints inside fixed pipe (12), arc wall (121) have been seted up on the interior peripheral side of fixed pipe (12), the periphery side of rotating tube (426) and be close to bottom fixedly connected with slider (4261) of rotating tube (426), slider (4261) sliding connection is inside arc wall (121), the rectangular channel has been seted up at the bottom surface center department of rotating tube (426), motor (5) that the bottom surface bolt of box (1) was connected, just the top output end fixedly connected with pivot (51) of motor (5), pivot (51) activity cup joints in the rectangular channel.

2. The high-energy pulse arc evaporation source according to claim 1, wherein a plurality of heating blocks (3) are further mounted on the inner side wall of the box body (1) and the back surface of the door body (11), and the heating blocks (3) are electrically connected with the arc ion plating device (2).

3. The source according to claim 2, wherein a plurality of said heating blocks (3) are electrically connected to each other, and a plurality of said arc ion plating devices (2) are electrically connected to each other and operated independently of each other.

4. The high-energy pulse arc evaporation source of claim 2, wherein the arc ion plating device (2) comprises a target holder (21) and arc-striking pins (22), a plurality of the target holder (21) and the arc-striking pins (22) are fixedly embedded in the inner side wall of the box body (1) and the back surface of the door body (11), the arc-striking pins (22) are positioned at the top of the target holder (21), and a target material (211) is fixedly arranged at the center of the target holder (21).

5. The high energy pulse arc evaporation source of claim 1, wherein the top of the outer plate (41) is bolted with an isolation frame (6), and the isolation frame (6) is adapted to the box body (1).

6. The high energy pulse arc evaporation source of claim 1, wherein the circumferential side of the placing disc (42) is provided with a packing plate (424), and the placing disc (42) is rotatably connected at the center of the packing plate (424).

7. The high energy pulsed arc evaporation source of claim 6, wherein the top of the arc-shaped groove (121) is fixedly connected with an inner disc (425), and the packaging plate (424) is slidably connected in an annular groove formed by the outer disc (41) and the inner disc (425).

8. The high-energy pulse arc evaporation source of claim 6, wherein the inner bottom wall of the box body (1) and located at two sides of the fixed pipe (12) are provided with insertion holes (13), two guide rods (412) are fixedly installed at the bottom surface of the outer disc (41), and the guide rods (412) are movably sleeved in the insertion holes (13).