CN113175871B - Positioning platform equipment - Google Patents

Abstract

The application discloses positioning platform equipment, including motion platform and actuating mechanism, actuating mechanism includes the stator, coil and active cell, the stator has two sets of drive groups, first group drive group includes two stator arms that set up along the first direction, second group drive group includes two stator arms that set up along the second direction, first group drive group forms U type magnetic flux return circuit, second group drive group also forms U type magnetic flux return circuit, the stator is two U type criss-cross structures in order to guarantee the compactness, set up the active cell in the active region that the stator arm encloses, the motion platform is connected in the active cell drive, every group drive group is all around establishing the coil, thus, under the circumstances that the coil is circular telegram, can realize motion platform along with the motion of active cell in first direction or second direction, this application is through setting up the stator to two U type criss-cross structures, and form the multiaxis motion that the motion platform with the active cell cooperation, can compromise advantages such as high integrated level, lightweight and big stroke, positioning platform equipment comprehensive properties has been improved.

Description

Positioning platform equipment

Technical Field

The application relates to the field of precision driving, in particular to a positioning platform device.

Background

With the development of the ultra-precision manufacturing field, the manufacturing precision of parts has reached the nanometer level, and based on the requirement of the manufacturing precision, processing equipment such as a nanometer machining machine tool, a nanometer laser direct writing lithography machine and the like is created, and meanwhile, in order to meet the requirement of nanometer processing, corresponding nanometer-level metering equipment is created, for example, a nanometer-level positioning platform device can detect the size, the surface quality and the like of the parts placed on the nanometer-level positioning platform device through the nanometer-level positioning precision and the nanometer-level resolution and by adopting the modes such as scanning and the like, and the nanometer-level positioning platform driving modes are mainly divided into two types, namely electromagnetic force driving (such as voice coil motor shear stress electromagnetic driving, positive stress electromagnetic driving) and intelligent material driving (such as piezoelectric magnetic driving and telescopic driving).

Taking an intelligent material drive as an example, although the piezoelectric drive has the performances of small volume, large force density, large rigidity, high bandwidth, high motion resolution and the like, the stroke range is limited due to the characteristics of the piezoelectric material, usually the stroke is dozens of microns, and if an amplifying mechanism of a flexible hinge is adopted to increase the piezoelectric stroke, the overall motion quality is increased and the motion frequency is reduced; the magnetostrictive driving performance is not higher than that of piezoelectric driving, so that the magnetostrictive piezoelectric actuator is not widely applied to the field of micro-nano driving.

Taking electromagnetic force driving as an example, although the nano positioning platform driven by the shearing stress of the voice coil motor can reach millimeter magnitude, the nano positioning platform has low force density, low bandwidth and low energy utilization rate, and cannot meet the use requirement of the nano positioning platform with a stroke of tens of microns or even hundreds of microns; although the normal stress electromagnetic driving forms a linear relation between the driving force and the driving current and displacement by introducing a bias magnetic flux, can better control precise motion, and has the advantages of large force density, large stroke (hundreds of micrometers) and the like, the traditional single-shaft driving units are generally simply combined and superposed during the driving of multi-shaft motion, so that the motion quality and the whole volume of the device are greatly increased, and the performance of the platform such as the stroke, the frequency and the like is reduced.

In summary, the structure of the nano positioning platform in the related art cannot simultaneously consider large stroke, light weight and high integration, and the overall comprehensive performance of the nano positioning platform needs to be improved.

Disclosure of Invention

The invention provides a positioning platform device, in particular to a two-dimensional translation nano positioning platform device, which aims to solve the problems that a positioning platform in the related technology cannot simultaneously meet the requirements of large stroke, light weight and high integration level, and the overall comprehensive performance of the positioning platform cannot be further improved.

The utility model provides a positioning platform equipment, including motion platform and actuating mechanism, actuating mechanism includes the stator, coil and active cell, the stator has the base plate, 4 stator arms are established to the first terminal surface arch of base plate, 4 stator arms enclose into the activity region, the mobilizable setting in the activity region of active cell, actuating mechanism passes through active cell drive connection motion platform, stator arm sets up in pairs and forms two sets of drive groups, two stator arms in the first group drive group set gradually along the first direction, two stator arms in the second group drive group set gradually along the second direction, first direction and second direction are crossing, each drive group is all around being equipped with the coil, under the circumstances that the coil circular telegram, the active cell can be along first direction or second direction motion in the activity region, motion platform can follow the motion of active cell.

Furthermore, the driving mechanism further comprises a magnet, the magnet is fixedly arranged in the movable area, and the magnet, the rotor and the motion platform are sequentially arranged along the direction perpendicular to the first end face.

Furthermore, the rotor is provided with a first driving pole face and a second driving pole face, the first driving pole face is located between two stator arms which are sequentially arranged along a first direction, and the second driving pole face is located between two stator arms which are sequentially arranged along a second direction.

Furthermore, the first driving pole face is perpendicular to the first direction, and the second driving pole face is perpendicular to the second direction.

Further, each stator arm is wound with a coil.

Furthermore, the positioning platform equipment also comprises a guide mechanism, the guide mechanism comprises a first guide piece and a second guide piece, the first guide piece is arranged along the first direction, the second guide piece is arranged along the second direction, the guide mechanism is connected with a moving platform, and the moving platform is respectively in guide fit with the first guide piece and the second guide piece.

Furthermore, the first guide piece and the second guide piece are flexible branched chains, the second guide piece is subjected to bending deformation under the condition that the moving platform moves along the first direction, and the first guide piece is subjected to bending deformation under the condition that the moving platform moves along the second direction.

Further, positioning platform equipment still includes the base, and the base is equipped with first installation face, and the concave mounting groove of establishing of first installation face, actuating mechanism inlay and locate the mounting groove, and motion platform locates one side that actuating mechanism deviates from first installation face, and the support arm is established to first installation face arch, and guiding mechanism sets firmly in the support arm.

Further, the positioning platform equipment further comprises a mounting platform, the guide mechanism is arranged between the mounting platform and the base, the mounting platform is provided with a containing hole and a mounting flange, the mounting platform is sleeved on the moving platform through the containing hole, and the mounting platform penetrates through the mounting flange to be provided with the guide mechanism and is connected with the supporting arm.

Furthermore, positioning platform equipment still includes first sensor and second sensor, and first sensor and second sensor all set firmly in mounting platform, and first sensor and motion platform set gradually along the first direction, and second sensor and motion platform set gradually along the second direction.

The invention has the following beneficial effects:

this application is through carrying out configuration optimization to positioning platform equipment, specifically be setting up including the stator, actuating mechanism including coil and active cell, the stator has two sets of drive groups, first group drive group includes two stator arms that set up along the first direction, second group drive group includes two stator arms that set up along the second direction, first group drive group forms U type magnetic flux return circuit, second group drive group also forms U type magnetic flux return circuit, the stator is two U type criss-cross structures in order to guarantee the compactness, set up the active cell in the activity region that 4 stator arms enclose, actuating mechanism passes through active cell drive connection motion platform, all around establishing the coil in every group drive group, thus, adopt two U type criss-cross structures through the stator, can realize under the circumstances of selecting different coil circular telegrams, realize the active cell along first direction or second direction motion in the activity region with electromagnetic drive's mode, and then realize the motion of motion platform in first direction or second direction.

In conclusion, in the mode of realizing multi-axis motion by the driving mechanism, the stator is arranged to be a double-U-shaped crossed structure, the stator and the rotor are matched with each other to form the electromagnetic driving mechanism, the driving mechanism formed by simply superposing a plurality of single-axis driving mechanisms in the related technology is replaced, the structure of the driving mechanism in the application can be simplified, the compactness of the positioning platform equipment is further improved, the quality and the volume of the positioning platform equipment are also reduced, meanwhile, the stroke of the positioning platform can reach +/-100 micrometers by the electromagnetic driving mode, the positioning platform equipment well considers the advantages of light weight, high integration degree, large stroke and the like, and the comprehensive performance of the positioning platform equipment is improved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

FIG. 1 is a diagram illustrating an overall structure of a positioning platform apparatus according to a first embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a guide mechanism according to a first embodiment of the present invention;

FIG. 3 is a schematic view of a driving mechanism disclosed in a first embodiment of the present invention;

FIG. 4 is a schematic view of the driving mechanism disclosed in the first embodiment of the present invention;

FIG. 5 is a view showing the construction of a base according to the first embodiment of the present invention;

fig. 6 is a structural view of an installation platform disclosed in the first embodiment of the present invention.

Description of reference numerals:

100-mounting platform, 110-receiving hole, 120-first mounting hole, 130-second mounting hole, 140-mounting flange,

200-first sensor,

300-base, 310-supporting arm, 320-mounting groove,

400-driving mechanism, 410-stator, 411-stator arm, 420-coil, 430-magnet, 440-mover, 500-motion platform, 600-second sensor,

700-guide mechanism, 710-first guide member, 720-second guide member, 730-connecting block, 740-connecting frame,

X-a first direction, Y-a second direction.

Detailed Description

To make the objects, technical solutions and advantages of the present application more clear, the technical solutions of the present application will be clearly and completely described below with reference to specific embodiments of the present application and the accompanying drawings. It should be apparent that the described embodiments are only some of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Referring to fig. 1 to 6, the positioning platform apparatus disclosed in the present application may be a nano-scale positioning platform used in the field of ultra-precision manufacturing, and the platform is used as a metrology apparatus for detecting a finished part, which will be described in detail below.

The positioning platform equipment comprises a motion platform 500 and a driving mechanism 400, wherein the motion platform 500 can be used for placing parts to be detected, the driving mechanism 400 can be used for driving the motion platform 500, the parts to be detected can move along with the motion platform 500, and the detection of the size, form and position tolerance and the like of the parts to be detected can be completed by matching with detection modes such as laser scanning and the like in the motion process.

As shown in fig. 3 and 4, the driving mechanism 400 includes a stator 410, a coil 420, and a mover 440, the stator 410 is a base for installing the entire driving mechanism 400, and may provide an installation location for other components, the coil 420 and the mover 440 may be disposed on the stator 410, an electromagnetic driving connection may be performed between the stator 410 and the mover 440, and the coil 420 is a medium for converting an electric field and a magnetic field.

Specifically, the stator 410 may have a base plate, a first end surface of which is protrudingly provided with 4 stator arms 411. The 4 stator arms 411 enclose a moving area, the mover 440 is movably disposed in the moving area, and the driving mechanism 400 is drivingly connected to the moving platform 500 through the mover 440.

The stator arms 411 are arranged in pairs to form two groups of driving groups, and the two stator arms 411 in the first group of driving groups are arranged in sequence along the first direction X. The two stator arms 411 in the second group of driving groups are sequentially arranged along the second direction Y. The first direction X and the second direction Y intersect so that the motion stage 500 can move in two different directions.

Each driving group is wound with a coil 420. With the coil 420 energized, the mover 440 may move in the first direction X or the second direction Y in the active region. Specifically, when the coils 420 arranged in the first group of driving sets are energized, under the action of electromagnetic induction, a magnetic driving force in the first direction X is generated between the two stator arms 411 in the first group of driving sets, and the magnetic driving force drives the mover 440 to move in the first direction X, so that the moving platform 500 can move along with the mover 440 in the first direction X; when the coils 420 of the second group of driving sets are energized, under the action of electromagnetic induction, a magnetic driving force in the second direction Y is generated between the two stator arms 411 of the second group of driving sets, and the magnetic driving force drives the mover 440 to move in the second direction Y, so that the moving platform 500 can move along with the mover 440 in the second direction Y.

It can be seen that the plane defined by the first direction X and the second direction Y is the movement plane of the movement platform 500. Through the electromagnetic drive between the driving mechanism 400 and the moving platform 500, the moving platform 500 can move along the first direction X or the second direction Y, and after the movement of the moving platform 500 in two different directions is combined, the moving platform can move to any required position in the moving plane, so that the detection of the part to be detected placed on the moving platform 500 is realized.

In summary, compared with the arrangement mode that multiple single-axis driving mechanisms need to be simply stacked to achieve multi-axis movement in the related art, the device of the present application optimizes the structure of the stator 410, for example, the stator 410 is set to be a double U-shaped structure, and 4 stator arms on the stator 410 are grouped in pairs to form driving groups located in different directions, so that the driving mechanism 400 forms an electromagnetic driving mechanism capable of achieving multi-axis movement, so that the stator 410 can drive the rotor 440 to move along different directions, thereby achieving multi-axis movement of the movement platform 500, and the arrangement mode improves the compactness of the driving mechanism 400, and further greatly reduces the mass and the volume of the positioning platform device of the present application.

Simultaneously, this kind of electromagnetic drive mode in this application can make the stroke of location platform reach 100 microns, compares relevant technique like this, and the location platform equipment of this application can finely compromise the advantage of high integration, lightweight and big stroke, and the comprehensive properties of location platform equipment obtains great improvement.

Further, for the specific orientation layout of the first direction X and the second direction Y, the first direction X may be perpendicular to the second direction Y, and in the perpendicular layout manner, the first direction X and the second direction Y may be mutually matched to form a plane coordinate system, the preset position of the motion control platform 500 is the origin of the plane coordinate system, and the relative position where the motion control platform 500 needs to reach may be represented in the coordinate system in the form of a coordinate point, which is more beneficial to controlling the motion of the motion control platform 500, thereby ensuring the detection accuracy required by the component to be detected.

More specifically, the driving mechanism 400 may further include a magnet 430, and the magnet 430 is fixedly disposed at the active region. The magnet 430, the mover 440 and the moving platform 500 are sequentially arranged along a direction perpendicular to the first end surface, and the arrangement of the magnet 430 can further ensure the moving precision, and the following detailed principle:

as shown in fig. 4, taking the mover 440 moving in the first direction X as an example, when the coil 420 at the corresponding position is energized, an alternating magnetic flux is formed between the two stator arms 411 in the first driving group, and the magnetic induction of the alternating magnetic flux is B1, while a direct magnetic flux is generated between the magnet 430 and any stator arm 411, and the magnetic induction of the magnet 430 and any stator arm 411 is respectively denoted as B2 and B3, it can be seen that the direction of the alternating magnetic flux is consistent with one of the direct magnetic fluxes and opposite to the other direct magnetic flux, such as the directions of B1 and B2 are consistent, and the directions of B1 and B3 are opposite, so that the magnetic fluxes at one side of the mover 440 are superimposed, i.e., the magnetic flux at one side is B = B1+ B2, and the magnetic flux at the other side is cancelled, i.e., the magnetic flux at the other side is B '= B1-B3, so that a difference in magnetic induction is generated at both sides of the mover 440, i.e., the difference T = B-B' = B2+ B3.

It can be seen that, in this driving manner, the arrangement of the magnet 430 can better control the magnetic driving force required by the movement of the mover 440, and the direct-current magnetic flux generated by the magnet 430 can make the linear relationships between the driving force and the driving current, and between the driving force and the displacement of the mover 440, and the like, so as to better control the movement accuracy of the device of the present application.

Further, as shown in fig. 3 and 4, the mover 440 is provided with a first driving pole face and a second driving pole face, wherein the first driving pole face is located between two stator arms 411 that are sequentially arranged along the first direction X, so that the two stator arms 411 along the first direction X can generate a magnetic driving force on the first driving pole face, thereby driving the mover 440 to move along the first direction X; and the second driving pole face is located between two stator arms 411 sequentially arranged along the second direction Y, so that the two stator arms 411 along the second direction Y can generate a magnetic driving force on the second driving pole face, thereby driving the mover 440 to move along the second direction Y. First drive polar surface and the setting mode of second drive polar surface in active cell 440, magnetic drive power can drive active cell 440 with the mode of face drive, and the drive mode is more steady, and then the motion orbit of easily controlling motion platform 500 and the motion accuracy that can reach more.

More specifically, the first driving pole face can be perpendicular to the first direction X, and the design that the magnetic driving force is perpendicular to the driven surface can make the force density of the first driving pole face, that is, the driving force received by the unit area of the first driving pole face reaches the maximum value, and the two stator arms 411 arranged along the first direction X drive the mover 440 to move in a positive stress driving manner, so that the driving manner is more effective and reasonable. Similarly, the second driving pole face can also be arranged perpendicular to the second direction Y, and is not described in detail here.

More specifically, first drive utmost point face and second drive utmost point face can all set up two, and the looks dorsal part side of active cell 440 is located to two first drive utmost point faces, and the back of the body side that faces away from of active cell 440 is also located to two second drive utmost point faces, and first drive utmost point face and second drive utmost point face set up in turn to two first drive utmost point faces and two second drive utmost point faces enclose into a closed anchor face, and this kind of mode of setting of active cell 440 can further improve drive effect.

More preferably, the mover 440 may be disposed in a cube, i.e., the adjacent first driving electrode surface and the second driving electrode surface are perpendicular to each other, so as to facilitate the manufacturing of the mover 440 and the installation of the driving mechanism 400.

More specifically, each stator arm 411 is wound with a coil 420, specifically, two stator arms 411 arranged along the first direction X are wound with coils 420, and two stator arms 411 arranged along the second direction Y are wound with coils 420, such an arrangement will generate a larger magnetic induction, and thus more effectively drive the mover 440 to move. Meanwhile, the two stator arms 411 in the same driving group are wound with the coil 420, so that the magnetic flux density of the air gap generated between the mover 440 and the stator arms 411 can be ensured to be equal as much as possible, the magnetic circuit is further ensured to be symmetrical, and the driving of the mover 440 is more stable.

In other alternative embodiments, as shown in fig. 1 and 2, the positioning platform apparatus may further include a guide mechanism 700, and the guide mechanism 700 may be used to constrain the motion path of the motion platform 500.

Specifically, the guide mechanism 700 may include a first guide 710 and a second guide 720. The first guide 710 is disposed along a first direction X, the second guide 720 is disposed along a second direction Y, the guide mechanism 700 is connected to the moving platform 500, and the moving platform 500 is respectively matched with the first guide 710 and the second guide 720 in a guiding manner. Thus, the motion platform 500 can maintain the motion along the first direction X under the constraint of the first guide 710; under the constraint of the second guide 720, the motion platform 500 can keep moving along the second direction Y, so as to avoid the abnormality such as deflection in the motion process, and further ensure the motion precision of the motion platform 500.

For the specific structure of the first guide 710 and the second guide 720, both may be configured as a guiding elastic strip, a reed, or the like, so as to implement the motion path constraint on the motion platform 500.

Specifically, in the case where the moving platform 500 moves in the first direction X, the second guide 720 is elastically bent and deformed to prevent the moving platform 500 from being deflected to both sides of the first direction X, and in the case where the moving platform 500 moves in the second direction Y, the first guide 710 is elastically bent and deformed to prevent the moving platform 500 from being deflected to both sides of the second direction Y.

It should be noted that, the flexible branched structures of the first guide 710 and the second guide 720 are elastically bent and deformed, so that the motion platform 500 can be reset in an unstressed state, and then can be restored from the current position to the preset position after finishing the motion for the next use.

More specifically, 8 first guide members 710 and 8 second guide members 720 may be provided, each 4 first guide members 710 are provided in one group, two groups of first guide members 710 are symmetrically provided on two sides of the mover 440 along the first direction X, each two first guide members 710 in each group are provided in one pair, and two pairs of first guide members 710 in the same group are symmetrically provided on two sides of the mover 440 along the second direction Y; similarly, every 4 second guide members 720 are in one group, two groups of second guide members 720 are symmetrically arranged on two sides of the mover 440 along the second direction Y, every two second guide members 720 in each group are in one pair, and two pairs of second guide members 720 in the same group are symmetrically arranged on two sides of the mover 440 along the first direction X. In this way, the whole formed by the 8 first guides 710 and the whole formed by the 8 second guides 720 cross each other to form a cross hinge structure, and the mover 440 is located at the center of the cross structure.

The cross hinge structure formed by the first guide 710 and the second guide 720 may be installed in a connection frame 740, and it can be seen that, since the cross hinge structure is elastically deformed along with the position change of the motion platform 500, after the motion platform 500 finishes being deformed, the motion platform 500 may be reset along with the reset of the cross hinge structure, that is, the motion platform 500 is reset from the current position to the preset position.

Further, as shown in fig. 1 and fig. 5, the positioning platform device further includes a base 300, and the base 300 may serve as a mounting base for other components of the whole positioning platform device. Specifically, the base 300 may have a first mounting surface, the first mounting surface is recessed to form the mounting groove 320, the driving mechanism 400 is embedded in the mounting groove 320, and the moving platform 500 is disposed on a side of the driving mechanism 400 away from the first mounting surface, which may ensure the position stability of the driving mechanism 400 in the positioning platform device.

More specifically, the first mounting surface may be provided with the protruding support arm 310, and the guide mechanism 700 is fixedly disposed on the support arm 310, so that different mounting stations may be provided for the driving mechanism 400 and the guide mechanism 700 by the base 300, thereby ensuring the correctness of the relative positions of the two.

Further, the base of the stator 410 may be configured as a cross-shaped mounting rod structure formed by two crossed mounting rods, and 4 stator arms 411 may be respectively disposed at the end of each mounting rod, that is, two stator arms 411 in the first direction X and one mounting rod form a "U" shaped magnetic flux loop, which is referred to as a first magnetic flux loop, and the mover 440 is located at an opening position of the "U" shaped first magnetic flux loop; the two stator arms 411 and the other mounting rod in the second direction Y form another "U" shaped magnetic flux loop, which is referred to as a second magnetic flux loop, and the mover 440 is also located at an opening position of the "U" shaped second magnetic flux loop. The arrangement of the first magnetic flux circuit and the second magnetic flux circuit enables the appearance of the stator 410 to be in a double U-shaped cross structure, and the structure of the stator 410 can be more compact.

Meanwhile, the mounting groove 320 is also provided with a cross-shaped groove structure, so that the base platform of the cross-shaped mounting rod structure is embedded in the mounting groove 320. The cross-shaped slot structure of the mounting slot 320 can divide one side of the base 300 at the first end surface into four mounting protrusions, the supporting arms 310 can be arranged at four and respectively located on the mounting protrusions, and when the base of the stator 410 is embedded in the mounting slot 320, each stator arm 411 will be located between two adjacent supporting arms 310. Like this, can form more stable support to guiding mechanism 700 through the design of 4 support arms 310, 4 support arms 310 and 4 stator arms 411 can mutually support and form the space complementary simultaneously, and then can improve the compactedness of this application device, increase space utilization.

In further alternative embodiments, as shown in fig. 1, 2 and 6, the positioning platform apparatus may further comprise a mounting platform 100. The guide mechanism 700 is disposed between the mounting platform 100 and the base 300. The mounting platform 100 may be provided with a receiving hole 110 and a mounting flange 140.

The mounting platform 100 is sleeved on the moving platform 500 through the accommodating hole 110, so that the moving range of the moving platform 500 is further limited in the area surrounded by the accommodating hole 110, and by the arrangement mode, the mounting platform 100 can provide peripheral protection for the moving platform 500 and prevent the moving platform 500 from being collided and damaged. It should be noted that, for the sake of uniformity of the overall appearance, the side of the mounting platform 100 facing away from the base 300 may be coplanar with the side of the motion platform 500 facing away from the base 300.

The mounting platform 100 is inserted through the guide mechanism 700 via the mounting flange 140, and the mounting platform 100 is connected to the support arm 310 via the mounting flange 140, so as to ensure the firmness of the installation.

Further, the connection frame 740 may be configured as a square frame, the adjacent first guide 710 and second guide 720 may enclose mounting vias with the connection frame 740, the number of the enclosed mounting vias is 4, the 4 mounting vias are respectively located at four corner positions of the connection frame 740, a connection block 730 may be disposed in each mounting via, and the guide mechanism 700 may be connected to the support arm 310 through the connection block 730.

The number of mounting flanges 140 is also 4, and each mounting flange 140 corresponds one-to-one to the location of a mounting via through which the mounting flange 140 passes and to which the support arm 310 is connected.

More specifically, mounting flange 140 is complementary to the shape of connection block 730 such that mounting flange 140 and connection block 730 fill the mounting vias, which facilitates pre-positioning of mounting platform 100 and ensures that mounting platform 100 is properly positioned.

In other alternative embodiments, as shown in fig. 1, the positioning stage apparatus may further include a first sensor 200 and a second sensor 600. First sensor 200 and second sensor 600 all set firmly in mounting platform 100, and first sensor 200 and second sensor 600 can further guarantee the motion accuracy of this application device. Specifically, the first sensor 200 may be sequentially disposed with the motion platform 500 along the first direction X, such that the first sensor 200 may ensure the position accuracy of the motion platform 500 along the first direction X by detecting the relative distance with the motion platform 500, and the second sensor 600 may be sequentially disposed with the motion platform 500 along the second direction Y, such that the second sensor 600 may ensure the position accuracy of the motion platform 500 along the second direction Y by detecting the relative distance with the motion platform 500.

For the installation of the first sensor 200 and the second sensor 600, the first installation hole 120 and the second installation hole 130 may be disposed on the installation platform 100, and then the first sensor 200 is disposed in the first installation hole 120, and the second sensor 600 is disposed in the second installation hole 130, for example, in a plugging manner, so as to ensure the installation firmness of the two.

The electronic device disclosed in the embodiment of the present application may be a mobile phone, a tablet computer, an electronic book reader, a wearable device (e.g., a smart watch, smart glasses), and the like, and the embodiment of the present application does not limit the specific kind of the electronic device.

The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement or the like made within the spirit and principle of the present application shall be included in the scope of the claims of the present application.

Claims (9)

1. A positioning platform apparatus, characterized by: comprises a motion platform (500) and a driving mechanism (400),

the driving mechanism (400) comprises a stator (410), a coil (420) and a rotor (440),

the stator (410) is provided with a substrate, the first end surface of the substrate is convexly provided with 4 stator arms (411), the 4 stator arms (411) enclose a moving area, the rotor (440) is movably arranged in the moving area, the driving mechanism (400) is in driving connection with the moving platform (500) through the rotor (440),

the stator arms (411) are arranged in pairs to form two groups of driving groups, two stator arms (411) in the first group of driving groups are sequentially arranged along a first direction (X), two stator arms (411) in the second group of driving groups are sequentially arranged along a second direction (Y), and the first direction (X) is intersected with the second direction (Y),

the coil (420) is wound around each driving group, the mover (440) can move along the first direction (X) or the second direction (Y) in the movable area under the condition that the coil (420) is electrified, and the moving platform (500) can move along with the mover (440);

the driving mechanism (400) further comprises a magnet (430), the magnet (430) is fixedly arranged in the movable area,

the magnet (430), the mover (440) and the motion platform (500) are sequentially arranged along a direction perpendicular to the first end face.

2. The positioning platform apparatus of claim 1, wherein: active cell (440) is equipped with first drive polar surface and second drive polar surface, first drive polar surface is located along two that first direction (X) set gradually between stator arm (411), second drive polar surface is located along two that second direction (Y) set gradually between stator arm (411).

3. The positioning platform apparatus of claim 2, wherein: the first driving pole face is perpendicular to the first direction (X) and the second driving pole face is perpendicular to the second direction (Y).

4. The positioning platform apparatus of claim 1, wherein: each stator arm (411) is wound with the coil (420).

5. The positioning platform apparatus of claim 1, wherein: the positioning platform device further comprises a guide mechanism (700), the guide mechanism (700) comprises a first guide piece (710) and a second guide piece (720), the first guide piece (710) is arranged along the first direction (X), the second guide piece (720) is arranged along the second direction (Y),

the guide mechanism (700) is connected with the moving platform (500), and the moving platform (500) is respectively matched with the first guide piece (710) and the second guide piece (720) in a guiding way.

6. The positioning platform apparatus of claim 5, wherein: the first guide (710) and the second guide (720) are both flexible branches,

in the case where the moving platform (500) moves in the first direction (X), the second guide (720) is subjected to bending deformation,

in the case where the moving platform (500) moves in the second direction (Y), the first guide (710) is subjected to bending deformation.

7. The positioning platform apparatus of claim 5, wherein: the positioning platform equipment further comprises a base (300), wherein the base (300) is provided with a first mounting surface, a mounting groove (320) is concavely arranged on the first mounting surface, the driving mechanism (400) is embedded in the mounting groove (320), the motion platform (500) is arranged on one side, deviating from the first mounting surface, of the driving mechanism (400),

the first mounting surface is provided with a supporting arm (310) in a protruding mode, and the guide mechanism (700) is fixedly arranged on the supporting arm (310).

8. The positioning platform apparatus of claim 7, wherein: the positioning platform device further comprises a mounting platform (100), the guide mechanism (700) is arranged between the mounting platform (100) and the base (300), the mounting platform (100) is provided with a containing hole (110) and a mounting flange (140),

the mounting platform (100) is sleeved on the moving platform (500) through the accommodating hole (110),

the installation platform (100) penetrates through the guide mechanism (700) through the installation flange (140) and is connected with the supporting arm (310).

9. The positioning platform apparatus of claim 8, wherein: the positioning platform device further comprises a first sensor (200) and a second sensor (600), both the first sensor (200) and the second sensor (600) being fixedly arranged on the mounting platform (100),

the first sensor (200) and the moving platform (500) are sequentially arranged along the first direction (X), and the second sensor (600) and the moving platform (500) are sequentially arranged along the second direction (Y).

Images