CN113109349B

CN113109349B - Detection method, system, device and computer readable storage medium

Info

Publication number: CN113109349B
Application number: CN202110309424.6A
Authority: CN
Inventors: 陈鲁; 魏林鹏; 胡田军; 林浩; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2021-03-23
Filing date: 2021-03-23
Publication date: 2023-12-26
Anticipated expiration: 2041-03-23
Also published as: CN113109349A

Abstract

The application provides a detection method, a detection system, a detection device and a computer readable storage medium, wherein the detection method comprises the following steps: controlling a laser light source to emit laser and irradiate the surface of the piece to be detected to form a laser spot; controlling the movement of the to-be-measured piece relative to the laser so as to enable the laser to traverse the to-be-measured area on the surface of the to-be-measured piece; receiving detection information of a region to be detected on laser; judging whether the region to be detected has defects according to the detection information, so that whether the surface of the piece to be detected has defects or not is effectively judged. In addition, the detection method in the application also detects the position relation of the plurality of limiting pieces and the laser light spots for limiting the to-be-detected piece in real time, and determines that the shutter for shielding the laser is opened or closed according to the position relation, so that the laser irradiates the surface of the to-be-detected piece or shields the surface of the to-be-detected piece, and the phenomenon that the limiting pieces on the to-be-detected piece reflect to form the light spots after receiving the laser irradiation when rotating to the irradiation range of the laser is avoided, so that the detection accuracy of the to-be-detected piece is affected.

Description

Detection method, system, device and computer readable storage medium

Technical Field

The present application relates to the field of electronic device detection, and in particular, to a detection method, system, apparatus, and computer readable storage medium.

Background

The part to be tested is one of the industry terms of the microelectronics industry. High purity silicon (purity, 99.99..99.. 99, 9-11 9 after the decimal point), typically formed as a cylindrical rod having a diameter of 6 inches, 8 inches or 12 inches.

The integrated circuit manufacturing enterprises cut the silicon rods into extremely thin silicon wafers (round) by laser, then the circuits and electronic components are manufactured by using an optical and chemical etching method, a large number of semiconductor chips (3000-5000 chips can be arranged on each silicon wafer in the case of small-scale circuits or triodes) are arranged on each silicon wafer after manufacturing, and the manufactured round silicon wafers are the pieces to be tested.

The quality of the to-be-tested piece is directly determined by the quality of the finished product of the IC. Because of the different process levels, the part under test may have three defects, namely redundancy, crystal defects and mechanical damage, during the production phase. Therefore, the high-efficiency and accurate detection equipment is used for guaranteeing the high-reliability material of the to-be-detected piece. Compared with the traditional manual detection, the machine vision detection has the advantages of high precision, high efficiency, continuity, non-contact pollution avoidance and the like.

In the related art, a detecting device is generally used to detect the quality of the workpiece. Specifically, the detection device is a device for detecting surface defects of a piece to be detected, and the detection device mainly detects the appearance of the piece to be detected after cutting, for example: size, breakage, grain cracking, porosity, cracking, poor nickel layer, and the like.

At present, the detection device mainly comprises a laser light source, a detection device and a bearing device, when the piece to be detected is detected, the piece to be detected is placed on the bearing device and rotates together with the bearing device, and laser rays emitted by the laser light source irradiate on the piece to be detected and detect the piece to be detected through the detection device.

The specific detection process or detection principle of the detection of the piece to be detected is as follows: and (3) carrying out laser ray irradiation on the surface of the to-be-detected piece, then collecting image information of the to-be-detected piece, and comparing the image information with defect characteristics so as to judge the defect condition of the surface of the to-be-detected piece, thereby realizing quality control of the to-be-detected piece and avoiding the to-be-detected piece with poor quality before packaging the to-be-detected piece.

In the existing detection process of the to-be-detected piece, when laser emitted by a laser source irradiates the edge of the to-be-detected piece, the limiting piece used for clamping the to-be-detected piece at the edge reflects light, so that part of the light is reflected to the to-be-detected surface of the to-be-detected piece, and a large elliptical light spot is formed, so that the detection result of the to-be-detected piece is affected.

Disclosure of Invention

In view of the foregoing, there is a need for a method, a system, an apparatus, and a computer-readable storage medium for detecting an object to be detected.

In a first aspect, an embodiment of the present application provides a detection method, where the detection method is applied to a detection apparatus, where the detection apparatus includes a laser light source, a carrier device, and a light detection unit, and the detection method includes:

controlling a laser light source to emit laser and irradiate the surface of the piece to be detected to form a laser spot;

controlling the movement of the to-be-measured piece relative to the laser so as to enable the laser to traverse the to-be-measured area on the surface of the to-be-measured piece;

the control light detection unit receives detection information of the laser in the region to be detected;

judging whether the region to be detected has defects according to the detection information;

detecting the position relations of a plurality of limiting pieces and laser spots for limiting the to-be-detected piece in real time, and determining that a shutter for shielding laser is opened or closed according to the position relations so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece; the limiting piece moves along with the to-be-detected piece and at least partially traverses the laser.

In one embodiment, the real-time detecting the positional relationship between the plurality of stoppers for limiting the workpiece to be measured and the laser spot, and determining, according to the positional relationship, whether the shutter for shielding the laser is opened or closed includes:

detecting a first irradiation range of the laser spot on the to-be-detected piece in real time;

judging whether the first irradiation range covers at least part of any limiting piece or not;

if yes, controlling a shutter for shielding laser to be closed;

if not, the shutter for shielding the laser is controlled to open.

In one embodiment, the detecting, in real time, the first irradiation range of the laser spot on the to-be-measured piece includes:

determining the first irradiation range through the emergent angle of the laser light source and the relative position of a bearing device for fixing the to-be-detected piece;

or the image acquisition unit is used for acquiring the first irradiation range of the laser spot on the to-be-detected piece.

In one embodiment, the controlling the movement of the part to be measured relative to the laser includes controlling the rotation of the part to be measured, and the determining whether the first irradiation range covers at least a portion of any of the limiting parts includes:

determining the number of the limiting pieces and the distribution angles between the adjacent limiting pieces;

Determining the rotary position coding range of each limiting piece according to the initial position of the laser spot on the piece to be measured before the piece to be measured rotates and the first irradiation range;

detecting a real-time output code of an encoder for controlling rotation of the to-be-detected piece, comparing the real-time output code of the encoder with the rotating position code range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotating position code range of any limiting piece.

In one embodiment, the determining whether the first irradiation range covers at least a portion of any of the stoppers includes:

and receiving a level signal output by a position sensor, wherein the position sensor is used for detecting the position of the limiting piece, triggering and outputting a first level signal when at least part of any limiting piece is positioned in the first irradiation range, and otherwise outputting a second level signal.

In a second aspect, embodiments of the present application provide a detection system, including:

the laser unit is used for controlling the laser source to emit laser and irradiate the surface of the to-be-detected piece to form a laser spot;

the moving unit is used for controlling the to-be-measured piece to move relative to the laser so as to enable the laser to traverse the to-be-measured area on the surface of the to-be-measured piece;

The detection information processing unit is used for receiving the detection information of the laser of the region to be detected and judging whether the region to be detected has defects according to the detection information;

the shutter control unit is used for detecting the position relation between a plurality of limiting pieces used for limiting the to-be-detected piece and the laser spots in real time, and determining whether a shutter used for shielding laser is opened or closed according to the position relation so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece; the limiting piece moves along with the to-be-detected piece and at least partially traverses the laser.

In a third aspect, an embodiment of the present application provides a detection apparatus, including:

the bearing device comprises a base for bearing the to-be-detected piece and a plurality of limiting pieces for limiting the to-be-detected piece;

the laser light source comprises a laser emission unit for emitting laser to the surface of the to-be-detected piece and forming a laser spot, and a shutter for allowing or shielding the laser to emit to the surface of the to-be-detected piece;

the light detection unit is used for receiving reflected light formed by reflecting laser by a to-be-detected area on the surface of the to-be-detected piece and generating detection information based on the reflected light;

the driving mechanism is used for driving the bearing device or the laser emission unit to move so that the laser traverses at least part of the to-be-detected area of the to-be-detected piece and the limiting piece;

The processor is used for controlling the laser light source to emit laser and irradiate the surface of the to-be-detected member, controlling the driving mechanism to act, receiving the detection information output by the light detection unit, and judging whether the surface of the to-be-detected member has defects according to the detection information; and the processor detects the position relations of the plurality of limiting pieces and the laser spots in real time, and determines whether the shutter for shielding laser is opened or closed according to the position relations so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece.

In one embodiment, the processor detects the position relationship between the limiting member and the laser spot in real time, and determines that the shutter for shielding the laser is opened or closed according to the position relationship, which includes:

if yes, controlling a shutter for shielding the laser to be closed;

if not, controlling a shutter shielding the laser to open.

In one embodiment, the processor detects a first irradiation range of the laser spot on the to-be-measured piece in real time, and the method includes:

In one embodiment, the driving mechanism controlling the movement of the workpiece relative to the laser includes controlling the rotation of the workpiece, and the processor determining whether the first irradiation range covers at least a portion of any of the limiting members includes:

detecting an output code of an encoder for controlling rotation of a piece to be detected, comparing the real-time output code of the encoder with the rotating position code range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotating position code range of any limiting piece.

In one embodiment, the processor determines whether the first illumination range covers at least a portion of any of the limiting members, including:

And receiving a level signal output by a position sensor, wherein the position sensor is used for detecting the position of the limiting piece, triggering and outputting a first level signal when at least part of the limiting piece is overlapped with the laser spot, and otherwise outputting a second level signal.

In a fourth aspect, embodiments of the present application provide a computer readable storage medium having stored thereon a program executable by a processor to implement the method described above.

The beneficial effects of the invention are as follows:

the application provides a detection method, a detection system, a detection device and a computer readable storage medium, wherein the detection method comprises the following steps: controlling a laser light source to emit laser and irradiate the surface of the piece to be detected to form a laser spot; controlling the movement of the to-be-measured piece relative to the laser so as to enable the laser to traverse the to-be-measured area on the surface of the to-be-measured piece; receiving detection information of a region to be detected on laser; judging whether the region to be detected has defects according to the detection information, so that whether the surface of the piece to be detected has defects or not is effectively judged. In addition, the detection method in the application also detects the position relation of the plurality of limiting pieces and the laser light spots for limiting the to-be-detected piece in real time, and determines that the shutter for shielding the laser is opened or closed according to the position relation, so that the laser irradiates the surface of the to-be-detected piece or shields the surface of the to-be-detected piece, namely, the shutter is controlled to be opened or closed by judging the position relation between the limiting pieces and the laser light spots so as to selectively irradiate the laser onto the surface of the to-be-detected piece, and the phenomenon that the limiting pieces on the to-be-detected piece reflect to form light spots after receiving the laser irradiation when rotating to the irradiation range of the laser is avoided, so that the detection accuracy of the to-be-detected piece is affected.

Drawings

FIG. 1 is a flow chart of a detection method provided in an embodiment of the present application;

fig. 2 is a circuit configuration diagram of a detection device according to an embodiment of the present application;

fig. 3 a-3 b are schematic diagrams illustrating an outgoing angle of a laser light source on a to-be-measured device according to an embodiment of the present application.

Reference numerals illustrate:

100-laser units; 200-moving units; 300-a detection information processing unit; 400-shutter control unit;

10-a detection device; 11-a carrying device; 12-a laser light source; 121-a laser emitting unit; 122-shutter; 13-a light detection unit; 14-a driving mechanism; 15-a processor; 16-position sensor.

Detailed Description

The invention will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present application. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, some operations associated with the present application have not been shown or described in the specification to avoid obscuring the core portions of the present application, and may not be necessary for a person skilled in the art to describe in detail the relevant operations based on the description herein and the general knowledge of one skilled in the art.

Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.

The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, unless otherwise indicated, mean both direct and indirect coupling (communication).

The application provides a detection method and a detection system, which are applied to detection equipment, wherein the detection equipment is used for detecting whether defects exist on the surface of a piece to be detected. In general, the detection apparatus includes a carrying device, a detection device, a laser light source, and the like; the device comprises a bearing device, a detection device, a limiting piece, a laser source, a detection device and a detection device, wherein the bearing device is fixed on the bearing device in a vacuum adsorption or air floatation mode, the position of the workpiece to be detected is prevented from shifting when the workpiece to be detected rotates on the bearing device through the limiting piece, the laser source emits laser to the workpiece to be detected to enable light spots to be formed on the workpiece to be detected, and the detection device detects the area where the light spots are located to judge the surface defects of the workpiece to be detected.

In general, a plurality of limiting parts are arranged on the periphery of the edge of the bearing device, the limiting parts are used for limiting the to-be-detected parts on the bearing device, the to-be-detected parts are prevented from moving from the bearing device, when laser rays irradiate on the limiting parts, the limiting parts reflect the laser rays and form light spots on the to-be-detected surfaces of the to-be-detected parts, and the light spots influence the detection results of the to-be-detected parts, so that the detection results of the to-be-detected parts are inaccurate.

Therefore, the present application provides a detection method, which is applied to a detection device, and the detection device detects defects on a surface of a piece to be detected, so as to ensure quality of the piece to be detected, where the piece to be detected may be a wafer or a substrate made of other materials. According to the detection method, when the workpiece to be detected rotates to the position where the limiting piece is in the laser spot range, laser irradiation is stopped in time, and laser is prevented from being reflected by the limiting piece to form a laser spot after being irradiated to the limiting piece, so that the detection effect of the workpiece to be detected is affected.

As shown in fig. 1, the detection method includes the steps of: controlling a laser light source to emit laser and irradiate the surface of the piece to be detected to form a laser spot; controlling the movement of the to-be-measured piece relative to the laser so as to enable the laser to traverse the to-be-measured area on the surface of the to-be-measured piece; receiving detection information of the laser of the region to be detected, wherein the detection information is specifically image information of the region to be detected; judging whether the region to be detected has defects according to the detection information; detecting the position relation between a plurality of limiting pieces for limiting the to-be-detected piece and the laser spots in real time, and determining that a shutter for shielding laser is opened or closed according to the position relation so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece; the limiting piece moves along with the to-be-detected piece and at least partially traverses through laser. The shutter is controlled to be opened or closed by judging the position relation between the limiting piece and the laser spot so as to selectively enable the laser to irradiate the surface of the to-be-detected piece, and the phenomenon that the accuracy of detection of the to-be-detected piece is affected due to the fact that the limiting piece receives laser irradiation and then reflects to form the spot when the limiting piece on the to-be-detected piece rotates to be within the irradiation range of the laser is avoided.

The basis for judging whether to open or close the shutter according to the position relation between the to-be-detected piece and the laser light spot is as follows: detecting a first irradiation range of a laser spot on a piece to be detected in real time; judging whether the first irradiation range covers at least part of any limiting piece or not; if yes, controlling a shutter for shielding laser to be closed; if not, the shutter for shielding the laser is controlled to open. When the workpiece to be detected rotates until the limiting piece is completely out of the first irradiation range of the laser, that is, the laser cannot be projected onto the limiting piece at the moment, the shutter can be opened at the moment to enable the laser to irradiate the workpiece to be detected, then detection information of a region to be detected, of the surface of the workpiece to be detected, irradiated by the laser, is obtained, and whether defects exist in the workpiece to be detected is judged and detected according to the detection information; when the piece to be measured rotates to the first irradiation range of the laser ray, namely, the laser ray irradiates any position of any limit piece, the shutter is closed so as to shield the laser from irradiating the piece to be measured, and the laser cannot irradiate the surface of the piece to be measured, so that the detection of the piece to be measured is stopped.

The process of part inspection can be exemplarily explained as follows: the workpiece to be measured is fixed on the bearing device, then the bearing device can move along the vertical direction, the left-right direction or the combination of the vertical direction and the left-right direction, and the workpiece to be measured rotates by taking the center of the workpiece to be measured as an axis. And then, irradiating laser onto the to-be-detected piece, and analyzing according to the image information of the position irradiated by the laser on the surface of the to-be-detected piece after the laser is irradiated onto the to-be-detected piece so as to judge whether the to-be-detected piece has a certain defect.

In addition, in this embodiment, the laser light source is in a normally open state, that is, the laser light source always emits laser, so when the shutter is opened so that the shutter does not block the laser, the laser irradiates the surface of the part to be measured or the limiting member, and when the shutter is closed, the shutter blocks the laser, thereby preventing the laser from irradiating the part to be measured or the limiting member. That is, in this embodiment, the laser is in a state of always irradiating, and only when the workpiece to be measured rotates until the limiting member is within the first irradiation range of the laser spot, the shutter is used for shielding the laser, and the surface of the workpiece to be measured is not irradiated with the laser, so that the detection of the workpiece to be measured is stopped, and the phenomenon that the limiting member reflects the laser to generate the spot after the laser irradiates the limiting member is avoided, and the detection accuracy of the workpiece to be measured is further affected; and the piece that awaits measuring is in the rotation in-process always, and when the piece that awaits measuring rotates to the locating part and is not in the first irradiation range of laser facula, make it not shelter from laser through the shutter opening, then laser can shine the piece that awaits measuring on the convenience and continue to await measuring the piece detection.

The laser beam used for irradiating the workpiece to be measured with the laser beam may be ultraviolet light, and the intensity of the irradiated ultraviolet light may be changed according to actual needs, for example, the intensity of the ultraviolet light may be changed according to the specification of the workpiece to be measured, the processing condition, the intensity of the laser beam suitable for processing, and the like, and the changing method may be to provide a beam splitter to change the irradiation intensity of the ultraviolet light. The specific illumination intensity and illumination wavelength of the ultraviolet rays can be set according to actual needs, and this embodiment is not particularly limited.

In addition, the inspection method of the present embodiment is mainly used for the inspection of the workpiece, but the method of the present embodiment may also be used for the surface inspection of a plate-like member such as a semiconductor substrate made of a semiconductor material or a piezoelectric substrate made of a piezoelectric material. For example, the semiconductor substrate may be made of a crystalline material having a crystalline structure.

Embodiment one:

the detection method of the embodiment comprises the following steps: controlling a laser light source to emit laser and irradiate the surface of the piece to be detected to form a laser spot; controlling the movement of the to-be-measured piece relative to the laser so as to enable the laser to traverse the to-be-measured area on the surface of the to-be-measured piece; receiving detection information of a region to be detected on laser; judging whether the region to be detected has defects according to the detection information; detecting the position relation between a plurality of limiting pieces for limiting the to-be-detected piece and the laser spots in real time, and determining that a shutter for shielding laser is opened or closed according to the position relation so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece; the limiting piece moves along with the to-be-detected piece and at least partially traverses through laser.

Further, detecting in real time the positional relationship between the plurality of stoppers for fixing the member to be measured and the laser spot, and determining the shutter opening or closing for shielding the laser according to the positional relationship includes: detecting a first irradiation range of a laser spot on a piece to be detected in real time; judging whether the first irradiation range covers at least part of any limiting piece or not;

If yes, controlling a shutter for shielding laser to be closed; if not, the shutter for shielding the laser is controlled to open.

Further, detecting the first irradiation range of the laser spot on the to-be-detected member in real time includes: determining a first irradiation range through the emergent angle of the laser light source and the relative position of a bearing device for fixing the to-be-detected piece; or the image acquisition unit is used for acquiring the first irradiation range of the laser spot on the to-be-detected piece.

For example, as shown in fig. 3a, the emission angle of the laser source is 90 °, that is, the laser irradiates vertically on the workpiece to be measured; alternatively, as shown in fig. 3b, when the emission angle of the laser light source is an arbitrary angle a, the position of the laser light source irradiated onto the workpiece is related to the angle a and the distance H between the laser light source and the workpiece. And then determining the relative position of the bearing device, for example, by establishing relative coordinates, determining the initial position of the to-be-measured piece or the bearing device before rotation, and determining the relative position of the first irradiation range of the laser spot according to the relative relation between the laser spot and the relative coordinates.

For another example, the image acquisition unit may directly acquire the position of the laser spot on the to-be-measured member, so as to directly obtain the first irradiation range of the laser spot. The image acquisition component, such as a camera, acquires the first irradiation range of the laser spot. The specific structural model of the camera is selected according to actual needs, and this embodiment is not limited thereto.

Embodiment two:

the present embodiment provides another detection method, which is different from the first embodiment in that, in determining whether the first irradiation range covers at least a portion of any of the stoppers, the method includes: firstly, controlling the to-be-measured piece to move relative to the laser comprises controlling the to-be-measured piece to rotate, which can be as follows: the to-be-measured piece is arranged on the bearing device, and then the bearing device can autorotate along the center of the bearing device as an axis. Secondly, determining the number of limiting pieces and the distribution angle between adjacent limiting pieces; determining the rotary position coding range of each limiting piece according to the initial position of the laser spot on the piece to be measured before the piece to be measured rotates and the first irradiation range; detecting an output code of an encoder for controlling rotation of the to-be-detected piece, comparing the real-time output code of the encoder with the rotating position code range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotating position code range of any limiting piece.

Specifically, the number of limiting pieces and the distribution angle between adjacent limiting pieces are determined, specifically, the number of limiting pieces is set to be n, and n is an integer greater than or equal to 2; then the distribution angle between adjacent limiting members is set to a, a=360°/n; the rotation position coding range of each limiting member is determined according to the initial position of the laser spot on the member to be measured before the member to be measured rotates and the first irradiation range, and the coding method of the rotation position coding range may be, for example, to determine the rotation angle according to the distribution angle of the limiting members, and perform rotation position coding, where the rotation angle is a (n- (n-1)), a (n- (n-2)), … … a (n- (n-n)).

It should be explained that, when the workpiece is scanned, the light emitted by the laser forms a laser spot on the workpiece. And because the locating part sets up in the marginal area of piece that awaits measuring, consequently when the laser facula is in the marginal area of piece that awaits measuring then the laser facula is likely to shine on the locating part, and when the piece that awaits measuring rotates and make the locating part rotate above-mentioned rotation angle and the laser facula is in the marginal area of piece that awaits measuring then the shutter, and when the inside detection area of piece that awaits measuring, namely the laser facula is not in the marginal area of piece that awaits measuring, the laser facula does not form on the locating part this moment, then even the piece that awaits measuring rotates and makes the locating part rotate above-mentioned rotation angle time, also can not close the shutter.

For example, assuming that the number of the limiting members is 2, at this time, the angle a=360°/2 is calculated by the calculation manner of the angle between the adjacent limiting members, that is, the angle is 180 °, thus, the calculated rotation angle is 180 ° (2- (2-1)), 180 ° (2- (2-2)), that is, the rotation angle includes 180 ° and 360 °, then, assuming that in the initial state, one of the two limiting members is located in the laser irradiation range, that is, the first limiting member is located in the position of 0 °, the second limiting member is located in the position of 180 °, after the member to be measured rotates 180 °, the first limiting member is located in the position of 180 ° (that is, coincides with the initial position, that is, the laser irradiation position), that is, before the member to be measured does not rotate, the first limiting member is located in the position of 0 °, at this time, when the member to be measured continues to rotate 180 °, the first limiting member is located in the initial position (that is located in the irradiation position of the laser), the second limiting member is located in the position of 180 °, when the first limiting member is located in the initial position, that is located in the laser irradiation position, and when the first limiting member is located in the laser spot is located at the laser irradiation position, that is required to be stopped, and the laser is located at the laser spot is turned off.

For example, assuming that the number of the limiting members is 3, at this time, the angle between the adjacent limiting members is calculated in a manner of calculating the angle a=360°/3, that is, the angle is 120 °/3, so that the calculated rotation angle is 120 °/3- (3-1)), 120 °/3- (3-2), 120 °/3- (3-3), that is, the rotation angle includes 120 °, 240 ° and 360 °, then assuming that in the initial state, one of the three limiting members is located in the irradiation range of the laser, it is assumed that the first limiting member of the three limiting members is located in 0 ° (i.e., the initial position, the irradiation position of the laser), the second limiting member is located in 120 ° and the third limiting member is located in 240 °, and after the member to be measured rotates 120 °, the third limiting member is located in 360 ° (i.e., the initial position, the irradiation position of the laser), at this time, the second limiting member is located in 240 ° and the first limiting member is located in 120 °; when the workpiece to be measured continues to rotate 240 degrees, the second limiting piece is located at a position (namely an initial position and a laser irradiation position) of 360 degrees, and the like, when the workpiece to be measured rotates by one of the rotating angles and the laser spots are located in the edge area of the workpiece to be measured, the shutter is required to be closed to shield the laser, so that the laser is prevented from being irradiated onto the workpiece to be measured or the limiting piece.

Comparing the real-time output code of the encoder with the rotating position code range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotating position code range of any limiting piece, namely the to-be-detected piece rotates by the rotating angle, wherein at the moment, the shutter is required to be closed to shield laser, so that the laser is prevented from being irradiated to the to-be-detected piece or the limiting piece; when the real-time output code of the encoder is located outside the rotating position code range of any limiting piece, namely, the piece to be detected is not rotated by the rotating angle, it is judged that the laser does not irradiate at least part of any limiting piece, and at the moment, the shutter is opened to allow the laser to irradiate on the piece to be detected so as to detect defects.

Embodiment III:

the present embodiment provides a detecting method, which is different from the first embodiment in that the method for determining whether the first irradiation range covers at least part of any of the limiting members includes: and receiving the level signal output by the position sensor, wherein the position sensor is used for detecting the position of the limiting piece, triggering and outputting a first level signal when at least part of any limiting piece is positioned in a first irradiation range, and otherwise outputting a second level signal.

Specifically, the position sensor is used for detecting the position of the limiting piece to obtain a level signal, and judging whether the laser irradiates at least part of any limiting piece according to the level signal. For example, when the level signal is greater than the working voltage value, a first level signal is output, so that it is determined that laser irradiates at least part of any limiting piece, and at the moment, the shutter is required to be closed to shield the laser, so that the laser is prevented from irradiating on the piece to be detected or the limiting piece; and when the level signal is lower than the working voltage value, outputting a second level signal so as to judge that the laser does not irradiate at least part of any limiting piece, and opening the shutter at the moment so as to allow the laser to irradiate on the piece to be detected.

Because the limiting piece limits the to-be-detected piece, the position of the limiting piece is usually higher than the surface of the to-be-detected piece, so that when the detection level signal is at a high level, the laser can be considered to be irradiated on the limiting piece; when the detection level signal is low, it can be determined that the laser light is not irradiated onto the stopper. The high level may be referred to herein as an example of a first level signal, the low level may be referred to as an example of a second level signal, and the high level or the low level is common knowledge in the art, and thus, the present embodiment does not summarize the high level and the low level. Or the first level signal and the second level signal may be set according to an actual test, which is not limited in this embodiment.

In summary, this embodiment provides three different detection methods for determining whether the laser irradiates on the limiting member or whether the first irradiation range of the laser spot covers any one of the limiting members, so that the laser is blocked by the shutter when the laser irradiates on the limiting member, the laser is prevented from irradiating on the limiting member to be detected, the limiting member reflects the laser to form a reflection spot, and the detection effect or accuracy of the member to be detected is affected.

Based on the detection method, the application provides a detection system for accurately detecting the to-be-detected piece.

As shown in fig. 2, the detection system includes: a laser unit 100, a moving unit 200, a detection information processing unit 300, and a shutter control unit 400. Wherein, the laser unit 100 controls the laser light source to emit laser and irradiates the surface of the workpiece to be measured to form a laser spot; the moving unit 200 controls the to-be-measured piece to move relative to the laser so that the laser traverses the to-be-measured area on the surface of the to-be-measured piece; the detection information processing unit 300 receives detection information of the laser of the region to be detected, and judges whether the region to be detected has a defect according to the detection information; the shutter control unit 400 detects the positional relationship between a plurality of limiting members for limiting the member to be measured and the laser spots in real time, and determines whether the shutter for shielding the laser is opened or closed according to the positional relationship, so that the laser irradiates the surface of the member to be measured or shields the surface of the member to be measured; the limiting piece moves along with the to-be-detected piece and at least partially traverses through laser. That is, the shutter control unit 400 controls the shutter to open or close by judging the position relationship between the limiting member and the laser spot so as to selectively irradiate the laser to the surface of the workpiece to be detected, thereby avoiding that the limiting member receives the laser irradiation and then reflects to form the spot to influence the detection accuracy of the workpiece to be detected when the limiting member on the workpiece to be detected rotates to the irradiation range of the laser.

In an alternative manner, the shutter control unit 400 detects the first irradiation range of the laser spot on the workpiece in real time, including: determining a first irradiation range through the emergent angle of the laser light source and the relative position of a bearing device for fixing the to-be-detected piece; or the image acquisition unit is used for acquiring the first irradiation range of the laser spot on the to-be-detected piece.

For example, as shown in fig. 3a, the emission angle of the laser source is 90 °, that is, the laser irradiates vertically on the workpiece to be measured; alternatively, as shown in fig. 3b, when the emission angle of the laser light source is an arbitrary angle a, the position of the laser light source irradiated onto the workpiece is related to the angle a and the distance H between the laser light source and the workpiece. And then determining the relative position of the bearing device, for example, by establishing relative coordinates, determining the initial position of the to-be-measured piece or the bearing device before rotation, and determining the first irradiation range of the laser spot according to the relative relation between the laser spot and the relative coordinates.

In another alternative, the method of determining whether the first irradiation range covers at least a portion of any of the stoppers by the shutter control unit 400 is: firstly, controlling the to-be-measured piece to move relative to the laser comprises controlling the to-be-measured piece to rotate, which can be as follows: the to-be-measured piece is arranged on the bearing device, and then the bearing device can autorotate along the center of the bearing device as an axis. Secondly, determining the number of limiting pieces and the distribution angle between adjacent limiting pieces; determining the rotary position coding range of each limiting piece according to the initial position of the laser spot on the piece to be measured before the piece to be measured rotates and the first irradiation range; detecting an output code of an encoder for controlling rotation of the to-be-detected piece, comparing the real-time output code of the encoder with the rotating position code range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotating position code range of any limiting piece.

Specifically, the number of limiting pieces and the distribution angle between adjacent limiting pieces are determined, specifically, the number of limiting pieces is set to be n, and n is an integer greater than or equal to 2; then the distribution angle between adjacent limiting members is set to a, a=360°/n; comparing the real-time output code of the encoder with the rotating position code range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotating position code range of any limiting piece, wherein at the moment, a shutter is required to be closed to shield laser, so that the laser is prevented from being irradiated onto the to-be-detected piece or the limiting piece; when the real-time output code of the encoder is located outside the rotating position code range of any limiting piece, it is judged that the laser does not irradiate at least part of any limiting piece, and at the moment, the shutter is opened to allow the laser to irradiate on the piece to be detected so as to detect defects.

In another alternative, the method for determining whether the first irradiation range covers at least part of any of the stoppers by the shutter control unit 400 is: and receiving the level signal output by the position sensor, wherein the position sensor is used for detecting the position of the limiting piece, triggering and outputting a first level signal when at least part of any limiting piece is positioned in the first irradiation range, and otherwise outputting a second level signal.

In addition, as shown in fig. 2 to 3b, the present application further provides a detecting apparatus 10 for detecting whether a defect exists on the surface of the part to be detected. Specifically, the detection apparatus 10 includes a carrier device 11, a laser light source 12, a light detection unit 13, a driving mechanism 14, and a processor 15. The workpiece to be measured is fixed on the carrying device 11, the laser light source 12 emits laser to the workpiece to be measured to generate detection information, such as a light spot image, and the light detection unit 13 receives the light spot image so that the processor 15 analyzes based on the light spot image to determine what kind of defect exists in the workpiece to be measured. The driving mechanism 14 is used for changing the position between the workpiece and the laser source 12, so that the laser emitted by the laser source 12 can comprehensively cover and irradiate the workpiece. The processor 15 may control whether the laser source 12 is emitting onto the surface of the part to be measured.

Specifically, the laser light source 12 may emit ultraviolet rays or the like, and the laser light source 12 may be an ultraviolet emitter or the like, for example. The carrier 11 may be, for example, a rotatable base or foundation, which may be made of metal or plastic material. The light detection unit 13 is configured to compare the received light spot image with the defect feature image, so as to determine whether and what kind of defects exist in the workpiece to be detected. The driving mechanism 14 is used for changing the positional relationship between the workpiece and the laser light source 12, such as a slide rail and a driving motor. The processor 15 may be a processor commonly used in the related art.

The carrying device 11 includes a base for carrying the to-be-tested piece and a plurality of limiting pieces for fixing the to-be-tested piece, where the specific limiting pieces may be a clamping jaw or a buckle, and the like, and are used for rotationally fixing the to-be-tested piece on the base.

The laser light source 12 includes a laser emitting unit 121 for emitting laser light to the surface of the workpiece and forming a laser spot, and a shutter 122 for controlling whether to block the emission of the laser light to the surface of the workpiece, the specific laser emitting unit 121 may emit the laser light under the control of the processor 15 and irradiate the laser light to the workpiece to form the laser spot, the position of the laser light on the workpiece is determined by the laser spot, and in addition, the shutter 122 is disposed in the laser emitting unit 121 or at the light emitting position for allowing the laser light to be emitted or blocking the laser light under the control of the processor 15. The specific shutter 122 and the structure of the laser emitting unit 121 may refer to structures well known in the art, and this embodiment is not particularly limited.

The light detection unit 13 is configured to receive detection information of a to-be-detected area on the surface of the to-be-detected piece, so that the processor 15 determines whether the surface of the to-be-detected piece has a defect according to the detection information, and a specific determination method may be described above, which is not repeated herein.

The driving mechanism 14 is used for driving the carrying device 11 or the laser emitting unit 121 to move under the control of the processor 15, so that the laser traverses at least part of the to-be-measured area and the limiting member. For example, the driving mechanism 14 may include a slide rail and a driving motor, and the laser emitting unit 121 may be in driving connection with the driving motor and be driven by the driving motor to move along the slide rail, so as to change the relative position between the laser emitting unit and the workpiece to be measured; or the driving motor is in power connection with the bearing device 11 or the to-be-detected piece and is used for driving the to-be-detected piece or the bearing device 11 to rotate along the center of the to-be-detected piece or the bearing device; or the driving motor drives the laser emission unit 121 to linearly move along the sliding rail and simultaneously drives the to-be-detected piece or the bearing device 11 to rotate, so that the relative position between the to-be-detected piece and the laser is changed, the surface of the to-be-detected piece is traversed by the laser, detection information is generated after the surface of the to-be-detected piece is irradiated by the laser, and the defect condition of the surface of the to-be-detected piece is judged according to the detection information.

In addition, since the limiting member is used for limiting the workpiece to be tested, when the position of the workpiece to be tested changes relative to the laser, the limiting member may be irradiated by the laser, so that the limiting member is used for preventing the laser from being irradiated on the limiting member, so that the limiting member generates a light spot after reflecting the laser to influence the detection result of the workpiece to be tested, the shutter 122 for shielding the laser is controlled to be opened or closed by the processor 15, and the laser is irradiated on the surface of the workpiece to be tested or the laser is shielded from being irradiated on the surface of the workpiece to be tested. The processor 15 detects the positional relationship of the plurality of stoppers and the laser spots in real time, and determines whether the shutter 122 for shielding the laser is opened or closed according to the positional relationship, so that the laser irradiates the surface of the object to be measured or shields the surface of the object to be measured from being irradiated with the laser. Specifically, the processor 15 determines whether the first irradiation range of the laser spot covers at least part of any of the stoppers; if yes, the shutter 122 for shielding the laser is controlled to be closed; if not, the shutter 122 for blocking the laser light is controlled to open.

In one possible implementation, the processor 15 detecting, in real time, the first irradiation range of the laser spot on the workpiece includes: determining a first irradiation range through the emergent angle of the laser light source and the relative position of a bearing device for fixing the to-be-detected piece; or the image acquisition unit is used for acquiring the first irradiation range of the laser spot on the to-be-detected piece.

In another possible manner, the processor 15 determines whether the first irradiation range covers at least a portion of any of the limiting members by: firstly, controlling the to-be-measured piece to move relative to the laser comprises controlling the to-be-measured piece to rotate, which can be as follows: the to-be-measured piece is arranged on the bearing device, and then the bearing device can autorotate along the center of the bearing device as an axis. Secondly, determining the number of limiting pieces and the distribution angle between adjacent limiting pieces; determining the rotary position coding range of each limiting piece according to the initial position of the laser spot on the piece to be measured before the piece to be measured rotates and the first irradiation range; detecting an output code of an encoder for controlling rotation of the to-be-detected piece, comparing the real-time output code of the encoder with the rotating position code range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotating position code range of any limiting piece. For the specific structure of the encoder, reference may be made to the encoder disclosed in the related art, which is not limited in this embodiment.

Specifically, the number of limiting pieces and the distribution angle between adjacent limiting pieces are determined, specifically, the number of limiting pieces is set to be n, and n is an integer greater than or equal to 2; then the distribution angle between adjacent limiting members is set to a, a=360°/n; determining the rotation position coding range of each limiting piece according to the initial position of a laser spot on the to-be-detected piece before rotation of the to-be-detected piece and a first irradiation range, comparing the real-time output code of the encoder with the rotation position coding range of each limiting piece, and judging that the first irradiation range covers at least part of any limiting piece when the real-time output code of the encoder is positioned in the rotation position coding range of any limiting piece, wherein at the moment, a shutter is required to be closed to shield laser, so that the laser is prevented from being irradiated onto the to-be-detected piece or the limiting piece; when the real-time output code of the encoder is located outside the rotating position code range of any limiting piece, it is judged that the laser does not irradiate at least part of any limiting piece, and at the moment, the shutter is opened to allow the laser to irradiate on the piece to be detected so as to detect defects.

In another possible manner, the processor 15 determines whether the first irradiation range covers at least a portion of any of the limiting members by: and receiving the level signal output by the position sensor, wherein the position sensor is used for detecting the position of the limiting piece, triggering and outputting a first level signal when at least part of any limiting piece is positioned in a first irradiation range, and otherwise outputting a second level signal.

The present application also provides a computer-readable storage medium having a program stored thereon, the program being executable by a processor to implement the detection methods of the first to third embodiments.

It will be apparent to one skilled in the art that all or some of the steps of the methods, systems, functional modules/units in the apparatus disclosed above may be implemented as software (which may be implemented in program code executable by a computing apparatus), firmware, hardware, and suitable combinations thereof. In a hardware implementation, the division between the functional modules/units mentioned in the above description does not necessarily correspond to the division of physical components; for example, one physical component may have multiple functions, or one function or step may be performed cooperatively by several physical components. Some or all of the physical components may be implemented as software executed by a processor, such as a central processing unit, digital signal processor, or microprocessor, or as hardware, or as an integrated circuit, such as an application specific integrated circuit. Such software may be distributed on computer-readable media, which may include computer storage media (or non-transitory media) and communication media (or transitory media), for execution by a computing device, and in some cases, the steps shown or described may be performed in a different order than that described herein. The term computer storage media includes both volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data, as known to those skilled in the art. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital Versatile Disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to store the desired information and which can be accessed by a computer. Furthermore, as is well known to those of ordinary skill in the art, communication media typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal such as a carrier wave or other transport mechanism and includes any information delivery media. Therefore, the present invention is not limited to any specific combination of hardware and software.

The foregoing description of the invention has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the invention pertains, based on the idea of the invention.

Claims

1. A detection method, characterized in that it is applied to a detection apparatus including a laser light source, a carrying device, and a light detection unit, the detection method comprising:

controlling a laser light source to emit laser and irradiate the surface of the piece to be detected to form a laser spot; the piece to be tested is a silicon wafer processed with a semiconductor chip; the laser is ultraviolet;

the control light detection unit receives detection information of the region to be detected;

detecting the position relations of a plurality of limiting pieces and laser spots for limiting the to-be-detected piece in real time, and determining that a shutter for shielding laser is opened or closed according to the position relations so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece; the limiting piece moves along with the to-be-detected piece and at least partially traverses the laser; the limiting piece is used for limiting the piece to be tested through clamping, the limiting piece is arranged in the edge area of the piece to be tested, and the position of the limiting piece is higher than the surface of the piece to be tested;

The method for detecting the position relationship between the plurality of limiting pieces for limiting the to-be-detected piece and the laser light spots in real time, determining whether the shutter for shielding the laser is opened or closed according to the position relationship comprises the following steps:

if yes, controlling a shutter for shielding laser to be closed;

if not, the shutter for shielding the laser is controlled to open.

2. The detection method according to claim 1, wherein,

the real-time detection of the first irradiation range of the laser spot on the piece to be detected comprises the following steps:

3. The inspection method of claim 1, wherein controlling movement of the part under inspection relative to the laser light includes controlling rotation of the part under inspection, and wherein determining whether the first illumination range covers at least a portion of any of the limiting members includes:

4. The method of detecting according to claim 1, wherein the determining whether the first irradiation range covers at least a portion of any of the stoppers includes:

5. A detection system, comprising:

the laser unit is used for controlling the laser source to emit laser and irradiate the surface of the to-be-detected piece to form a laser spot; the piece to be tested is a silicon wafer processed with a semiconductor chip; the laser is ultraviolet;

the detection information processing unit is used for receiving detection information of the region to be detected and judging whether the region to be detected has defects according to the detection information;

the shutter control unit is used for detecting the position relation between a plurality of limiting pieces used for limiting the to-be-detected piece and the laser spots in real time, and determining whether a shutter used for shielding laser is opened or closed according to the position relation so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece; the limiting piece moves along with the to-be-detected piece and at least partially traverses the laser; the limiting piece is used for limiting the piece to be tested through clamping, the limiting piece is arranged in the edge area of the piece to be tested, and the position of the limiting piece is higher than the surface of the piece to be tested;

if yes, controlling a shutter for shielding laser to be closed;

if not, the shutter for shielding the laser is controlled to open.

6. A detection apparatus, characterized by comprising:

the bearing device comprises a base for bearing the to-be-detected piece and a plurality of limiting pieces for limiting the to-be-detected piece; the limiting piece is used for limiting the piece to be tested through clamping, the limiting piece is arranged in the edge area of the piece to be tested, and the position of the limiting piece is higher than the surface of the piece to be tested;

the laser light source comprises a laser emission unit for emitting laser to the surface of the to-be-detected piece and forming a laser spot, and a shutter for allowing or shielding the laser to emit to the surface of the to-be-detected piece; the piece to be tested is a silicon wafer processed with a semiconductor chip; the laser is ultraviolet;

the light detection unit is used for receiving detection information of a to-be-detected area on the surface of the to-be-detected piece;

The processor is used for controlling the laser light source to emit laser and irradiate the surface of the to-be-detected member, controlling the driving mechanism to act, receiving the detection information output by the light detection unit, and judging whether the surface of the to-be-detected member has defects according to the detection information; the processor detects the position relations of the plurality of limiting pieces and the laser spots in real time, and determines whether the shutter for shielding laser is opened or closed according to the position relations so as to enable the laser to irradiate the surface of the to-be-detected piece or shield the laser from irradiating the surface of the to-be-detected piece;

the processor detects the position relation between the limiting piece and the laser spot in real time, and determines whether the shutter for shielding the laser is opened or closed according to the position relation, wherein the method comprises the following steps:

if yes, controlling a shutter for shielding the laser to be closed;

if not, controlling a shutter shielding the laser to open.

7. The inspection apparatus of claim 6, wherein the processor detects the first irradiation range of the laser spot on the part to be inspected in real time, comprising:

8. The inspection apparatus of claim 6 wherein the drive mechanism controlling movement of the part under inspection relative to the laser light includes controlling rotation of the part under inspection, and wherein the processor determining whether the first illumination range covers at least a portion of any of the limiting members includes:

9. The inspection apparatus of claim 6, wherein the processor determining whether the first illumination range covers at least a portion of any of the stoppers comprises:

And receiving a level signal output by a position sensor, wherein the position sensor is used for detecting the position of the limiting piece, triggering and outputting a first level signal when at least part of the limiting piece is positioned in the first irradiation range, and otherwise outputting a second level signal.

10. A computer readable storage medium, characterized in that the medium has stored thereon a program executable by a processor to implement the method of any one of claims 1 to 4.