CN113075894A - CO based on radio frequency power supply2Intelligent development control system for laser - Google Patents

CO based on radio frequency power supply2Intelligent development control system for laser Download PDF

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Publication number
CN113075894A
CN113075894A CN202110315003.4A CN202110315003A CN113075894A CN 113075894 A CN113075894 A CN 113075894A CN 202110315003 A CN202110315003 A CN 202110315003A CN 113075894 A CN113075894 A CN 113075894A
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radio frequency
circuit
power supply
frequency power
laser
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Inventor
唐化江
郑义军
谭荣清
刘俊曦
李辉
宁方晋
孙科
黄文武
钟艳红
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Aerospace Information Research Institute of CAS
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Aerospace Information Research Institute of CAS
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0428Safety, monitoring
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/20Pc systems
    • G05B2219/24Pc safety
    • G05B2219/24215Scada supervisory control and data acquisition

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Semiconductor Lasers (AREA)

Abstract

The invention relates to a CO based on a radio frequency power supply2Laser instrument intelligence development control system includes: the system comprises an upper computer, a communication interface, a control center and a radio frequency power supply provided with a plurality of sensor nodes; the upper computer is provided with a client for displaying and controlling the current system state, and specifically comprises issuing an instruction to remotely turn off and turn on a radio frequency power supply, controlling a motor to adjust the impedance, and performing impedance matching with a laser electrode; the host is connected to a control center through a communication interface, the control center is connected to a plurality of sensor nodes, signal data of a transistor power amplifier circuit, an alarm protection control circuit, a motor control circuit and a camera in the radio frequency power supply are collected through a data collection module and a multi-channel A/D module, the signal data are transmitted to an upper computer client according to the collected signal data, circuit faults are traced according to abnormal data information, and the system is protected in real time.

Description

CO based on radio frequency power supply2Intelligent development control system for laser
Technical Field
The invention belongs to the field of photoelectricity, and particularly relates to CO based on a radio frequency power supply2Laser intelligent development platform.
Background
RF-CO2The laser is a laser which is widely applied in the market at present, the laser mainly depends on import at present, and domestic radio frequency lasers are still restricted by foreign manufacturers on key technologies and core devices. The most important part in the radio frequency laser is the radio frequency power supply, and the radio frequency is always a technical difficulty in order to shorten the RF-CO2Laser development cycle, RF-CO enhancement2Efficiency of laser development, which requires RF-CO2The radio frequency power supply of the laser can be more intelligent, integrated and convenient to control.
At present, the integration of radio frequency high-power transistors is difficult, and RF-CO2The radio frequency power device and the control device in the laser are respectively and independently operated, and RF-CO2The basic components of the RF power supply in the laser are shown in FIG. 1, where 1 is AC/DC conversion system, 2 is oscillation circuit, 3 is transistor power amplifier circuit, 7 is impedance matching circuit, and 9 is RF-CO2The laser load, 10, is the PWM input signal control circuit. After the power is switched on, the alternating current-direct current conversion system 1 provides stable direct current to the oscillating circuit 2, the oscillating circuit 2 is connected with the transistor power amplifier circuit 3 to realize signal amplification, the amplified circuit is connected with the laser load 9 through the impedance matching circuit 7, and finally the duty ratio input condition of the PWM input signal 10 is adjusted, so that CO with certain power can be output2And (4) laser.
In the above conventional solution, there are the following technical drawbacks:
a. development of novel RF-CO2Laser time and powerThe situation that the transistor and the circuit components are burnt occurs frequently.
In the development of a new RF-CO2During the laser instrument, need radio frequency power supply and laser load to carry out joint debugging, according to the demand, radio frequency power supply must last stable output amplified power to feed in the laser instrument load through matching circuit, and because dynamic impedance parameter is indefinite in the matching process, so need constantly adjust radio frequency output power again, in this accommodation process, mostly according to technical staff's experience manual regulation, it is difficult to make clear and determine specific dynamic parameter, consequently, always will have certain reflection to return to transistor power amplifier circuit, it is improper slightly, will cause transistor chip and circuit components and parts to appear burning and lose the problem.
b. The monitoring circuit and the control circuit in the radio frequency circuit part work separately and independently, the monitoring and the control are uncoordinated, and the speed of manual control is far lower than the burning speed of chips and devices.
The output power of the laser is ensured by a power amplifying circuit in the radio frequency power supply, when the output power of the laser is monitored, circuit parameters such as incident voltage, reflected voltage, chip temperature and the like need to be monitored simultaneously, and in order that the laser can output power meeting requirements, parameters of an input signal and an impedance matching circuit need to be adjusted continuously during the same period of monitoring the data. When the monitoring data is abnormal, manual adjustment and shutdown are needed, and a certain time is needed.
Disclosure of Invention
In order to solve the technical problem, the invention provides a CO based on a radio frequency power supply2Laser instrument intelligence development control system includes:
the system comprises an upper computer, a communication interface, a control center and a radio frequency power supply provided with a plurality of sensor nodes;
the upper computer is provided with a client for displaying and controlling the current system state, and specifically comprises issuing an instruction to remotely turn off and turn on a radio frequency power supply, controlling a motor to adjust the impedance, and performing impedance matching with a laser electrode;
the host is connected to a control center through a communication interface, the control center is connected to a plurality of sensor nodes, signal data of a transistor power amplifier circuit, an alarm protection control circuit, a motor control circuit and a camera in the radio frequency power supply are collected through a data collection module and a multi-channel A/D module, the signal data are transmitted to an upper computer client according to the collected signal data, circuit faults are traced according to abnormal data information, and the system is protected in real time.
Further, the radio frequency power supply includes:
the device comprises an alternating current-direct current conversion system, an oscillation circuit, a transistor power amplifier circuit, a data acquisition system, a single chip microcomputer control system, a motor control circuit, an impedance matching circuit, an alarm protection circuit system and a laser load.
Further, the plurality of sensor nodes are arranged as follows: the voltage sampling circuit is connected to an incident voltage point and a reflection voltage point in the transistor power amplifier circuit to collect voltage; the temperature sensor is arranged on a transistor chip of the power amplification circuit and used for collecting the temperature of the transistor; the power sampling circuit is connected with the amplifying output end of the transistor power amplifier circuit and used for collecting power information amplified by radio frequency; the alarm protection control circuit prompts the abnormal state through alarm ring or LED flicker; the motor control circuit adjusts the rotation of the motor to change the total impedance according to the instruction sent by the singlechip control system; and the camera is positioned above the whole radio frequency power supply and used for detecting the whole radio frequency power supply and the peripheral conditions.
Furthermore, the three paths of data collected by the data collection module are transmitted to the singlechip controller by the high-speed multi-channel A/D converter, when the collected data are abnormally mutated or are out of the normal threshold range, the alarm protection control circuit can be started immediately, an alarm bell rings, an alarm lamp flickers, and a radio frequency power supply is automatically turned off, so that the radio frequency circuit is automatically protected, and the transistor chip or circuit components are prevented from being burnt due to overhigh temperature; and the acquired data is transmitted and stored in the upper computer monitoring software, and the circuit fault can be traced according to the abnormal data information.
Furthermore, after the power supply is switched on, alternating current is transmitted to the oscillating circuit through the alternating current-direct current conversion system and then transmitted to the transistor power amplifier circuit to be amplified, the data acquisition system starts to acquire data information on the power amplifier circuit and stores the acquired information into the single chip microcomputer through the high-speed multi-channel A/D converter, the single chip microcomputer control system is connected with the alarm protection circuit system and starts to output laser, and when monitored data are abnormal, the alarm system sounds and automatically turns off the radio frequency circuit.
Further, the upper computer client comprises a data display interface and an instruction control interface;
the data display interface is used for monitoring and storing parameter information of reflected voltage, current, reflected power and circuit temperature, and displaying data change trend in a line graph mode; the client can issue an instruction to the control center, turn on and turn off the radio frequency power supply, control the motor to adjust the impedance, and perform impedance matching with the laser electrode.
Furthermore, after the radio frequency power supply is powered on and started, the data acquisition module starts to work, and continuously starts to read and transmit the data of the incident reflection voltage, the chip temperature and the output power, the data are uploaded to the upper computer software when being normal, are digitally displayed and are converted into a broken line graph, and when any data such as the incident reflection voltage or the transistor chip temperature and the like are abnormal, the alarm control circuit can be excited, the whole radio frequency power supply is closed, and automatic protection is realized.
Furthermore, the communication interface adopts a wired bidirectional communication module to realize data transmission and instruction transmission of the upper computer and the radio frequency power supply.
Further, motor control circuit according to the instruction that single chip microcomputer control system sent, and then the size that the adjustment motor is rotatory to change total impedance specifically includes:
the motor control circuit is characterized in that an upper computer sends an instruction to the single chip microcomputer, the single chip microcomputer drives the motor to act, the motor control objects are capacitors and inductors in dynamic impedance matching, and the capacitors and the inductors are changed by rotating the motor, so that the impedance matching value is adjusted.
Further, the radio frequency power supply feeds the amplified power into a laser load through an impedance matching circuit, wherein the impedance matching comprises dynamic matching and static matching, the static matching is a matching circuit determined according to the design of the amplifying circuit, the impedance value is determined, the dynamic matching is to adjust the output power of the radio frequency power supply and the laser load to a proper matching value so that the laser can output optimally, and the optimal matching is achieved between the radio frequency power supply and the laser load through continuously adjusting the impedance matching circuit.
Has the advantages that:
the invention provides an RF-CO integrated with data acquisition, automatic control and visualization technology2The intelligent development control platform for the laser has the beneficial effects of developing new RF-CO2Laser time:
1. the radio frequency power supply can be quickly responded when data is abnormal, the burning condition of a transistor is reduced, and the occurrence probability of abnormal burning of circuit components is reduced;
2. the data of each monitoring point on the radio frequency circuit can be visualized and traceable in the form of graphs and numbers, and the problem can be conveniently detected when the radio frequency circuit fails;
3. the software debugging and the instruction issuing can be carried out on the computer terminal, and the remote control of the terminal is realized.
4. Can reduce manual operation and shorten RF-CO2The development efficiency is improved by the development period of the laser.
Drawings
FIG. 1 Current RF-CO2The radio frequency power supply of the laser basically forms a schematic diagram;
FIG. 2 CO of the present invention based on radio frequency power supply2A schematic diagram of a laser intelligent development control system scheme;
FIG. 3 is a high-level client workflow diagram of the present invention;
FIG. 4 is a schematic diagram of a transport layer of the present invention;
FIG. 5 is a schematic diagram of a RF power scheme of the device layer of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person skilled in the art based on the embodiments of the present invention belong to the protection scope of the present invention without creative efforts.
According to the embodiment of the invention, the existing radio frequency power supply is improved, an STM32F407ZET singlechip development board is adopted as a radio frequency power supply control center, and the circuit protection of the radio frequency power supply is realized by combining an LED and an alarm; the data acquisition circuit is built by combining the temperature sensor, the sampling resistor, the multi-channel high-speed A/D module, the camera and other equipment to finish RF-CO2Collecting parameters of a laser; the collected circuit information is displayed in a digital and graphical mode by combining a communication module and upper computer software to realize the RF-CO2Monitoring and control of the laser.
The system of the invention is divided into three layers: the specific scheme of the application layer, the transmission layer and the device layer is shown in fig. 2.
The application layer is upper computer software which is used for monitoring and storing parameter information of reflected voltage, current, reflected power and circuit temperature and displaying data change trend in a line graph mode; on the other hand, the control center can send an instruction to turn on and turn off the radio frequency power supply.
The software interface of the upper computer is divided into two parts, namely a data display interface and an instruction control interface, wherein the data display interface can display the digital parameters and the variation trend statistical chart of the incident voltage, the reflected voltage, the output power and the chip temperature; the command control interface issues commands to remotely turn off and turn on the radio frequency power supply on one hand, and controls the motor to adjust the impedance and perform impedance matching with the laser electrode on the other hand.
The software design block diagram is shown in fig. 3, after the radio frequency power supply is powered on and started, the data acquisition module starts to work, continuously starts to read and transmit data such as reflection voltage, chip temperature, output power and the like, and judges whether a command is received or not at the moment according to clock information, if the command is received, the data is uploaded, and if not, the time at the moment is checked. And judging whether data are abnormal or not, if the data are normal, uploading the data to upper computer software to be digitally displayed and converted into a broken line pattern, and if any data such as the acquired incident reflection voltage or the temperature of a transistor chip are abnormal, exciting an alarm control circuit, closing the whole radio frequency power supply and realizing automatic protection.
The transmission layer is a bidirectional communication module, and realizes data transmission and instruction transmission of the application layer and the equipment layer, on one hand, data acquired by the equipment layer is uploaded, and on the other hand, an instruction sent by the application layer is issued. In order to avoid the influence of radio frequency, the transmission layer adopts wired communication. A schematic diagram of which is shown in fig. 4.
The device layer is the improved rf power supply of the present invention, and the schematic diagram thereof is shown in fig. 5.
The device comprises an alternating current-direct current conversion system 1, an oscillation circuit 2, a transistor power amplifier circuit 3, a data acquisition module 4, a single chip microcomputer control system 5, a motor control circuit 6, an impedance matching circuit 7, an alarm protection circuit system 8 and a laser load 9. After the power supply is switched on, alternating current is transmitted to the oscillating circuit 2 through the alternating current-direct current conversion system 1 and then transmitted to the transistor power amplifier circuit 3 for power amplification, the data acquisition module 4 starts to acquire data information on the power amplifier circuit and stores the acquired information into the single chip microcomputer control system through the high-speed multi-channel A/D converter, and the single chip microcomputer control system is connected with the alarm protection circuit system 8. According to the requirements, all parameters are adjusted to be proper in size, laser is output, when monitored data are abnormal, an alarm system sounds and a radio frequency circuit is automatically turned off, and the minimum response time can reach millisecond magnitude.
Just like the RF-CO of FIG. 12As mentioned in the schematic diagram of the laser intelligent development platform, the number of monitoring points of the whole system is six, and the specific distribution is shown in fig. 5. The data acquisition system 4 is provided with three monitoring points which mainly aim at the transistor power amplifier circuit 3, and the voltage sampling circuit is connected to an incident voltage point and a reflection voltage point in the power amplifier circuit to acquire voltage; the temperature sensor is arranged on a core position of the power amplifier circuit, namely a transistor chip, and is used for collecting the temperature of the transistor(ii) a The power sampling circuit is connected with the amplifying output end of the power amplifying circuit and used for collecting power information after radio frequency passes. The fourth monitoring point is positioned in the alarm protection control circuit and used for monitoring whether the current data is abnormal or not so as to enable the alarm bell to sound or the LED to flash, and the LED lamp and the alarm bell are fed back according to the abnormal state of the data acquired by the first three acquisition points. When the ratio of the reflected voltage to the incident voltage is greater than 1 or the collected temperature value is greater than 100 ℃, the alarm LED flickers and emits a sound alarm to indicate that the radio frequency power supply is abnormal. Otherwise, it is in normal state. The fifth monitoring point is located in the motor control circuit, which is a control point. The motor control circuit is characterized in that an upper computer sends an instruction to the single chip microcomputer, the single chip microcomputer drives the motor to act, the motor control objects are capacitors and inductors in dynamic impedance matching, and the capacitors and the inductors are changed by rotating the motor, so that the impedance matching value is adjusted. The motor control circuit adjusts the rotation of the motor to change the total impedance according to the instruction sent by the singlechip control system. The radio frequency power supply feeds the amplified power into a laser load through an impedance matching circuit. The impedance matching comprises dynamic matching and static matching, the static matching is a matching circuit determined according to the design of an amplifying circuit, the impedance value is determined, and the dynamic matching is used for adjusting the output power of the radio frequency power supply and the load of the laser to a proper matching value so that the laser can output optimally. The optimal matching between the radio frequency power supply and the laser load is achieved through the impedance matching circuit, but the impedance value at the position is difficult to determine in one step, and improper discharge of the laser load can cause that the laser load cannot be ignited or reflected to the radio frequency power supply to cause faults, so that continuous adjustment is needed. The sixth monitoring point is a camera which is positioned above the whole radio frequency power supply and used for detecting the whole radio frequency power supply and the peripheral conditions. According to the requirement, the three paths of data collected by the data collection module 4 are transmitted to the STM32 singlechip controller by the high-speed multi-channel A/D converter, when the collected data are abnormally mutated or are out of the normal threshold range, the alarm protection control circuit 8 can be started immediately, the alarm bell rings, the alarm lamp flickers, the radio frequency power supply is automatically turned off, the automatic protection of the radio frequency circuit is realized, and the transistor chip or the circuit element is prevented from further protecting the transistor chip or the circuit elementThe device burns out due to excessive temperature. And the acquired data is transmitted and stored in the upper computer monitoring software, and the circuit fault can be traced according to the abnormal data information.
Although illustrative embodiments of the present invention have been described above to facilitate the understanding of the present invention by those skilled in the art, it should be understood that the present invention is not limited to the scope of the embodiments, but various changes may be apparent to those skilled in the art, and it is intended that all inventive concepts utilizing the inventive concepts set forth herein be protected without departing from the spirit and scope of the present invention as defined and limited by the appended claims.

Claims (10)

1. CO based on radio frequency power supply2Laser instrument intelligence development control system, its characterized in that includes:
the system comprises an upper computer, a communication interface, a control center and a radio frequency power supply provided with a plurality of sensor nodes;
the upper computer is provided with a client for displaying and controlling the current system state, and specifically comprises issuing an instruction to remotely turn off and turn on a radio frequency power supply, controlling a motor to adjust the impedance, and performing impedance matching with a laser electrode;
the host is connected to a control center through a communication interface, the control center is connected to a plurality of sensor nodes, signal data of a transistor power amplifier circuit, an alarm protection control circuit, a motor control circuit and a camera in the radio frequency power supply are collected through a data collection module and a multi-channel A/D module, the signal data are transmitted to an upper computer client according to the collected signal data, circuit faults are traced according to abnormal data information, and the system is protected in real time.
2. The radio frequency power supply-based CO of claim 12The intelligent development control system for the laser is characterized in that the radio frequency power supply comprises:
the device comprises an alternating current-direct current conversion system, an oscillation circuit, a transistor power amplifier circuit, a data acquisition system, a single chip microcomputer control system, a motor control circuit, an impedance matching circuit, an alarm protection circuit system and a laser load.
3. The radio frequency power supply-based CO of claim 12The intelligent development control system of the laser is characterized in that,
the plurality of sensor nodes are arranged as follows: the voltage sampling circuit is connected to an incident voltage point and a reflection voltage point in the transistor power amplifier circuit to collect voltage; the temperature sensor is arranged on a transistor chip of the power amplification circuit and used for collecting the temperature of the transistor; the power sampling circuit is connected with the amplifying output end of the transistor power amplifier circuit and used for collecting power information amplified by radio frequency; the alarm protection control circuit prompts the abnormal state through alarm ring or LED flicker; the motor control circuit adjusts the rotation of the motor to change the total impedance according to the instruction sent by the singlechip control system; and the camera is positioned above the whole radio frequency power supply and used for detecting the whole radio frequency power supply and the peripheral conditions.
4. The radio frequency power supply-based CO of claim 12The intelligent development control system of the laser is characterized in that,
when the acquired data is abnormally mutated or is out of the normal threshold range, the alarm protection control circuit can be started immediately, an alarm bell rings, an alarm lamp flickers, and a radio frequency power supply is automatically turned off, so that the radio frequency circuit is automatically protected, and the transistor chip or circuit components are prevented from being burnt due to overhigh temperature; and the acquired data is transmitted and stored in the upper computer monitoring software, and the circuit fault can be traced according to the abnormal data information.
5. The radio frequency power supply-based CO of claim 12The intelligent development control system of the laser is characterized in that,
after the power supply is switched on, alternating current is transmitted to the oscillating circuit through the alternating current-direct current conversion system and then transmitted to the transistor power amplifier circuit to be amplified, the data acquisition system starts to acquire data information on the power amplifier circuit and stores the acquired information into the single chip microcomputer through the high-speed multi-channel A/D converter, the single chip microcomputer control system is connected with the alarm protection circuit system and starts to output laser, and when monitored data are abnormal, the alarm system sounds and automatically turns off the radio frequency circuit.
6. The radio frequency power supply-based CO of claim 12The intelligent development control system of the laser is characterized in that,
the upper computer client comprises a data display interface and an instruction control interface;
the data display interface is used for monitoring and storing parameter information of reflected voltage, current, reflected power and circuit temperature, and displaying data change trend in a line graph mode; the client can issue an instruction to the control center, turn on and turn off the radio frequency power supply, control the motor to adjust the impedance, and perform impedance matching with the laser electrode.
7. The radio frequency power supply-based CO of claim 12The intelligent development control system of the laser is characterized in that,
after the radio frequency power supply is powered on and started, the data acquisition module starts to work, continuously starts to read and transmit the data of the reflection voltage, the chip temperature and the output power, and uploads the data to the upper computer software when the data are normal so as to be displayed in a digital mode and converted into a broken line graph.
8. The radio frequency power supply-based CO of claim 12The intelligent development control system of the laser is characterized in that,
the communication interface adopts a wired bidirectional communication module to realize data transmission and instruction transmission of the upper computer and the radio frequency power supply.
9. The radio frequency power supply-based CO of claim 12Laser instrument intelligence development control system, its characterized in that, motor control circuit is according to the instruction that single chip microcomputer control system sent, and then the size that the adjustment motor is rotatory to change total impedance specifically includes:
the motor control circuit is characterized in that an upper computer sends an instruction to the single chip microcomputer, the single chip microcomputer drives the motor to act, the motor control objects are capacitors and inductors in dynamic impedance matching, and the capacitors and the inductors are changed by rotating the motor, so that the impedance matching value is adjusted.
10. The radio frequency power supply-based CO of claim 12The intelligent development control system of the laser is characterized in that,
the radio frequency power supply feeds amplified power into a laser load through an impedance matching circuit, wherein the impedance matching comprises dynamic matching and static matching, the static matching is a matching circuit determined according to the design of the amplifying circuit, the impedance value is determined, the dynamic matching aims to adjust the output power of the radio frequency power supply and the laser load to a proper matching value so that the laser can output optimally, and the optimal matching is achieved between the radio frequency power supply and the laser load through continuously adjusting the impedance matching circuit.
CN202110315003.4A 2021-03-24 2021-03-24 CO based on radio frequency power supply2Intelligent development control system for laser Pending CN113075894A (en)

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CN200994038Y (en) * 2006-12-27 2007-12-19 江苏新潮科技集团有限公司 Automatic regulating device of variable capacitor for radio frequency slab CO2 laser matching system
CN102315582A (en) * 2011-07-26 2012-01-11 华中科技大学 RF (radio frequency) power supply used for CO2 (carbon dioxide) laser
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