CN113059250B - Wire bonding machine and bonding head structure thereof - Google Patents
Wire bonding machine and bonding head structure thereof Download PDFInfo
- Publication number
- CN113059250B CN113059250B CN202110606978.2A CN202110606978A CN113059250B CN 113059250 B CN113059250 B CN 113059250B CN 202110606978 A CN202110606978 A CN 202110606978A CN 113059250 B CN113059250 B CN 113059250B
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- CN
- China
- Prior art keywords
- bonding head
- voice coil
- coil motor
- head main
- main body
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/788—Means for moving parts
- H01L2224/78821—Upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/788—Means for moving parts
- H01L2224/78841—Means for moving parts of the pressing portion, e.g. tip or head
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention provides a wire bonding machine and a bonding head structure thereof, wherein the bonding head structure comprises a voice coil motor, a bonding head main body, an energy converter and a chopper; one end of the bonding head main body is mechanically connected with the voice coil motor, the transducer is installed at the other end of the bonding head main body, and the chopper is installed at the front end of the transducer. The voice coil motor comprises a rotor and two stators connected with the rotor; the rotor is mechanically connected with the bonding head main body, and the rotor is clamped between the two stators. The rotor is provided with coils, each stator is internally provided with a magnet with a trapezoidal section, and the two magnets are arranged close to the coils and clamp the coils in the middle. The wire bonding machine and the bonding head structure thereof improve the stability of the force constant in the welding area, and ensure that the pressure output in an important working area is stable, thereby improving the stability of the riving knife at different heights during working and improving the quality of the bonding wire.
Description
Technical Field
The invention relates to the technical field of welding equipment, in particular to a wire bonding machine and a bonding head structure thereof.
Background
Wire bonder is one of the core processes of the subsequent semiconductor package, and the bonding head is the most important component of the wire bonder and is the direct component for performing gold wire bonding. The first and second bonds are important process stages in the overall process of bonding the wires, which determines the quality of the connection to the chip or lead frame. The pressure during welding is directly influenced by the ball shape of the solder ball, the formation of aluminum and alloy, and the pressure during welding is directly given by a voice coil motor of the bonding head.
Referring to fig. 1 and 2, however, since the effective magnetic field area of the voice coil motor of the conventional bonding head is weak and the magnetic field intensity has a peak area, the stability of the force constant of the bonding head in the bonding area is poor, so that the pressure output in an important working area is unstable, and the quality of the bonding wire is finally affected.
Disclosure of Invention
The invention provides a wire bonding machine and a wire bonding head structure thereof, which can effectively improve the stability of the force constant of the wire bonding head in a welding area, thereby improving the stability of a riving knife at different heights during working.
The technical scheme adopted by the invention is as follows: a bonding head structure, comprising: the voice coil motor, the bonding head main body, the transducer and the cleaver; one end of the bonding head main body is mechanically connected with the voice coil motor, the transducer is installed at the other end of the bonding head main body, and the chopper is installed at the front end of the transducer; the voice coil motor drives the bonding head main body to rotate at a high speed in the vertical direction, so as to drive the riving knife to rotate at a high speed;
the voice coil motor comprises a rotor and two stators connected with the rotor; the rotor is mechanically connected with the bonding head main body, and the rotor is clamped between the two stators; the rotor is provided with coils, each stator is internally provided with a magnet with a trapezoidal section, and the two magnets are arranged close to the coils to clamp the coils in the middle; an effective magnetic field area is formed between the two stators.
Further, the angle of the smallest inner angle of the trapezoidal section of the magnet ranges from 3 degrees to 30 degrees.
Further, the minimum internal angle of the trapezoid cross section of the magnet at the front end of the voice coil motor is smaller than or equal to the minimum internal angle of the trapezoid cross section of the magnet at the rear end of the voice coil motor.
Further, the active cell passes through leaf spring bearing or shell fragment with the one end mechanical connection of nation head main part, nation head main part with leaf spring bearing or the shell fragment is rotatory at a high speed as the rotation center.
Furthermore, an encoder is arranged on the bonding head main body.
Furthermore, cooling air connectors are mounted on the two stators.
Further, the bonding head structure further comprises a wire clamp, the wire clamp is installed at the other end of the bonding head main body, and the wire clamp is located above the energy converter.
The invention also provides the following technical scheme: a wire bonding machine comprises the bonding head structure.
Compared with the prior art, the wire bonding machine and the bonding head structure thereof have the advantages that the magnets with the trapezoidal sections are arranged in the stators of the voice coil motors of the bonding head structure, so that the effective magnetic field area is enhanced, the peak value area of the magnetic field intensity is changed into a smooth area, the stability of the force constant of the bonding head structure in the welding area is improved, the pressure output of the bonding head structure in an important working area is stable, the stability of the riving knife at different heights during working is improved, and the quality of welding wires is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings, there is shown in the drawings,
FIG. 1: the magnetic force line distribution schematic diagram of the magnetic field of the voice coil motor in the prior art;
FIG. 2: schematic magnetic field strength of a prior art voice coil motor;
FIG. 3: the invention discloses a perspective view of a bonding head structure;
FIG. 4: side view of the bond head structure of the present invention;
FIG. 5: a perspective view of the voice coil motor of the present invention;
FIG. 6: the invention relates to a sectional view of the front end of a voice coil motor;
FIG. 7: the invention relates to a sectional view of the back end of a voice coil motor;
FIG. 8: the magnetic force lines of the magnetic field of the voice coil motor are distributed schematically;
FIG. 9: the invention discloses a magnetic field intensity schematic diagram of a voice coil motor.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
As shown in fig. 3 and 4, the bonding machine of the present invention includes a bonding head structure, wherein the bonding head structure includes a voice coil motor 1, a bonding head main body 2, a transducer 3, a wire clamp 4, and a riving knife 5; wherein, the one end and the 1 mechanical connection of voice coil motor of nation head main part 2, transducer 3 and fastener 4 are all installed in the other end of nation head main part 2, and fastener 4 is located transducer 3's top, and riving knife 5 installs in transducer 3's front end. The bonding head main body 2 is driven to rotate at a high speed in the vertical direction through the voice coil motor 1, so that the riving knife 5 is driven to rotate at a high speed, and the height position of the riving knife 5 is changed.
Specifically, the voice coil motor 1 is mechanically connected to one end of the bonding head main body 2 through a leaf spring bearing, and it should be understood that, in other embodiments, the leaf spring bearing may be replaced by a leaf spring, which is not limited thereto. The bunghead main body 2 rotates at a high speed by taking the leaf spring bearing as a rotation center 6, so that the acceleration of the riving knife 5 can run to 200-300g, and the efficiency of the riving knife 5 is effectively improved. In addition, the bond head main body 2 is further provided with an encoder 7, and the encoder 7 is partially positioned on the rotation center 6 and used for detecting the rotation speed of the riving knife 5 so as to monitor the rotation speed of the riving knife 5 in real time. Wherein, the voice coil motor 1 is a Halbach Array (Halbach Array) voice coil motor.
As shown in fig. 5 and 6, the voice coil motor 1 includes a mover 8 and two stators 9 connected to the mover 8; wherein the mover 8 is mechanically connected with the leaf spring bearing, and the mover 8 is sandwiched between the two stators 9. All install cooling gas on two stators 9 and connect 10 for connect the cooling gas device, for voice coil motor 1 cooling, effectively avoid voice coil motor 1 high temperature and damage.
As shown in fig. 7 and 8, further, the mover 8 is provided with coils 11, each of the stators 9 is provided therein with a magnet 12 having a trapezoidal section, the angle range of the minimum inner angle α of the trapezoidal section is 3 ° to 30 °, and the two magnets 12 are disposed adjacent to the coils 11 to sandwich the coils 11; an effective magnetic field area is formed between the two stators 9.
Through set up the trapezoidal magnet 12 in each stator 9 of cross-section to strengthen effectual magnetic field region, become a smooth region to the peak value region of magnetic field intensity, improved the stability of the force constant of bond structure in welding area, make bond structure pressure output stability in important work interval, thereby improve the stability that riving knife 5 is in not co-altitude at the during operation, improve the bonding wire quality.
As shown in fig. 6 and 7, in this embodiment, the minimum internal angle α of the trapezoidal cross section of the magnet 12 at the front end of the voice coil motor 1 is smaller than the minimum internal angle α of the trapezoidal cross section of the magnet 12 at the rear end of the voice coil motor 1, that is: the distance between two trapezoidal hypotenuses in the cross section of magnet 12 at the front end of voice coil motor 1 is less, and the edge is closer, and the edge effect is more obvious, and the more towards the rear end of voice coil motor 1, the more the distance between two trapezoidal hypotenuses in the cross section of magnet 12 is. It is understood that in other embodiments, the minimum internal angle of the trapezoid of the cross section of the magnet 12 at the front end of the voice coil motor 1 is equal to the minimum internal angle α of the trapezoid of the cross section of the magnet 12 at the rear end of the voice coil motor 1, and is not limited thereto.
As shown in fig. 8, fig. 8 is a schematic diagram of magnetic field lines distribution of the voice coil motor 1 of the present invention, and it can be known from fig. 8 that: by providing a magnet 12 having a trapezoidal cross section in each stator 9, the effective magnetic field area is increased.
As shown in fig. 9, fig. 9 is a schematic diagram of the magnetic field strength of the voice coil motor 1 of the present invention, and it can be known from fig. 9 that: by providing the magnet 12 having a trapezoidal cross section in each stator 9, the peak region of the magnetic field intensity becomes a smooth region.
In summary, according to the wire bonding machine and the wire bonding head structure thereof disclosed by the invention, the magnet 12 with the trapezoidal section is arranged in each stator 9 of the voice coil motor 1, so that the effective magnetic field area is enhanced, the peak area of the magnetic field intensity is changed into a smooth area, the stability of the force constant of the wire bonding head structure in the welding area is improved, the pressure output of the wire bonding head structure in an important working area is stable, the stability of the riving knife 5 at different heights during working is improved, and the wire bonding quality is improved.
Any combination of the various embodiments of the present invention should be considered as disclosed in the present invention, unless the inventive concept is contrary to the present invention; within the scope of the technical idea of the invention, any combination of various simple modifications and different embodiments of the technical solution without departing from the inventive idea of the present invention shall fall within the protection scope of the present invention.
Claims (7)
1. A bonding head structure, comprising: the voice coil motor, the bonding head main body, the transducer and the cleaver; one end of the bonding head main body is mechanically connected with the voice coil motor, the transducer is installed at the other end of the bonding head main body, and the chopper is installed at the front end of the transducer; the voice coil motor drives the bonding head main body to rotate at a high speed in the vertical direction, so as to drive the riving knife to rotate at a high speed;
the voice coil motor comprises a rotor and two stators connected with the rotor; the rotor is mechanically connected with the bonding head main body, and the rotor is clamped between the two stators; the rotor is provided with coils, three magnets with trapezoidal sections are arranged in each stator, one group of the three magnets is divided into two groups which are respectively arranged at two sides of each coil and are arranged close to the coils, and the coils are clamped in the middle, so that an effective magnetic field area is formed between the two stators; the two magnets are magnets with right trapezoid cross sections, one magnet is a magnet with an isosceles trapezoid cross section, the two magnets with the right trapezoid cross sections are arranged in an axial symmetry manner, and the magnet with the isosceles trapezoid cross section is arranged between the two magnets with the right trapezoid cross sections;
the section of the front end of the voice coil motor is isosceles trapezoid, and the minimum internal angle of the section of the magnet is smaller than that of the section of the rear end of the voice coil motor.
2. The bonding head structure of claim 1, wherein: the angle range of the minimum inner angle of the section trapezoid of the magnet with the isosceles trapezoid section is 3-30 degrees.
3. The bonding head structure of claim 1, wherein: the active cell passes through leaf spring bearing or shell fragment with the one end mechanical connection of nation head main part, nation head main part with leaf spring bearing or the shell fragment is rotatory at a high speed for the rotation center.
4. The bonding head structure of claim 3, wherein: and the nation head main body is provided with an encoder.
5. The bonding head structure of claim 1, wherein: and cooling air connectors are arranged on the two stators.
6. The bonding head structure of claim 1, wherein: the nation head structure still includes the fastener, the fastener install in the other end of nation head main part, just the fastener is located the top of transducer.
7. A wire bonding machine comprising the bond structure of any of claims 1-6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110606978.2A CN113059250B (en) | 2021-06-01 | 2021-06-01 | Wire bonding machine and bonding head structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110606978.2A CN113059250B (en) | 2021-06-01 | 2021-06-01 | Wire bonding machine and bonding head structure thereof |
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| Publication Number | Publication Date |
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| CN113059250A CN113059250A (en) | 2021-07-02 |
| CN113059250B true CN113059250B (en) | 2021-09-28 |
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| CN202110606978.2A Active CN113059250B (en) | 2021-06-01 | 2021-06-01 | Wire bonding machine and bonding head structure thereof |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113814623B (en) * | 2021-11-23 | 2022-02-22 | 大族激光科技产业集团股份有限公司 | Welding force correction method and correction device |
| CN117650087B (en) * | 2024-01-29 | 2024-05-28 | 深圳市泰达智能装备有限公司 | Welding machine head and bonding machine |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7135792B2 (en) * | 2004-05-12 | 2006-11-14 | Dexter Magnetic Technologies, Inc. | High field voice coil motor |
| GB2489995A (en) * | 2011-04-15 | 2012-10-17 | Pss Belgium Nv | Magnetic circuit for a loudspeaker driver |
| CN105789101B (en) * | 2014-12-25 | 2020-05-05 | 北京中电科电子装备有限公司 | Chip supply mechanism and chip bonding machine |
| CN107453580B (en) * | 2016-05-31 | 2020-07-14 | 上海微电子装备（集团）股份有限公司 | Voice coil motor and manufacturing method thereof |
| WO2017208876A1 (en) * | 2016-06-03 | 2017-12-07 | 富士フイルム株式会社 | Voice coil motor, lens moving device, and imaging device |
| CN106160270A (en) * | 2016-07-25 | 2016-11-23 | 惠州市大亚湾永昶电子工业有限公司 | A kind of VCM motor Magnet of improvement |
| CN209439591U (en) * | 2018-09-28 | 2019-09-27 | 广东阿达智能装备有限公司 | Bonding joint device and supersonic bonding machine |
| CN112743264A (en) * | 2020-12-26 | 2021-05-04 | 东莞市凯格精机股份有限公司 | Welding head moving device and wire welding machine |
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Inventor after: Zhang Xinyang Inventor after: He Yunbo Inventor after: Luo Cheng Inventor after: Yan Yijun Inventor after: Liu Qingshan Inventor after: Guan Xiaoming Inventor before: Zhang Xinyang Inventor before: He Yunbo Inventor before: Luo Cheng Inventor before: Yan Yijun Inventor before: Liu Qingshan Inventor before: Guan Xiaoming |