CN113023659A - XY macro-micro motion platform and tail end feedback method thereof - Google Patents
XY macro-micro motion platform and tail end feedback method thereof Download PDFInfo
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- CN113023659A CN113023659A CN202110239657.3A CN202110239657A CN113023659A CN 113023659 A CN113023659 A CN 113023659A CN 202110239657 A CN202110239657 A CN 202110239657A CN 113023659 A CN113023659 A CN 113023659A
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Abstract
An XY macro and micro motion platform and a terminal feedback method thereof, the XY macro and micro motion platform comprises: the device comprises a fine adjustment component, a macro driving component and a position detection device; the macro driving component comprises: the X-direction macro driving unit, the Y-direction macro driving unit, the X-direction flat plate and the Y-direction flat plate; the position detection device is used for acquiring the positions of the self body in the X axis and the Y axis. The XY macro-micro motion platform adopts an XY macro-micro decoupling mode, decoupling arrangement is arranged between macro motion components and micro motion components in each axial direction, decoupling arrangement is carried out between X-direction motion and Y-direction motion on the basis, so that the whole system forms a common horizontal plane in the XY axial direction and decoupling arrangement is formed between the macro motion components and the macro motion components, the motions of all the axes on the structure are not coupled with each other, and the accurate position of the axis can be obtained without complex coordinate transformation; meanwhile, the XY macro-micro motion platform moves on the same horizontal plane, so that tangential interference and influence are reduced, and the precision of the movement is guaranteed.
Description
Technical Field
The invention relates to the technical field of conveying devices, in particular to an XY macro-micro motion platform and a tail end feedback method thereof.
Background
At present, the existing macro micro-processing equipment is designed and combined by a multi-stage structure, for two-dimensional XY macro-micro motion, due to the installation requirements of a current driving part and a sensing device, the influence of error accumulation caused by multi-stage series connection exists on an XY macro-micro structure, and the positioning precision of an operation tail end is greatly influenced; meanwhile, due to the fact that the XY macro-micro driving components and the sensing devices are structurally coupled in a crossed mode, the current structural arrangement cannot achieve full-stroke full-closed-loop precise feedback of the operation tail end, information of the actual position of the tail end is difficult to obtain, implementation of a control method is not facilitated, and operation accuracy is affected.
Disclosure of Invention
The invention aims to provide an XY macro-micro motion platform which is mounted on an X-direction micro-motion unit and a Y-direction micro-motion unit which are connected through a mobile library through a micro-motion unit bearing platform to form a micro-adjustment assembly, and then the micro-adjustment assembly is mounted on a macro driving assembly with coarse positioning, so that the whole platform is decoupled between X-direction motion and Y-direction motion.
The invention also provides a terminal feedback method of the XY macro-micro motion platform, which is used for decoupling, arranging and positioning the XY macro-micro motion platform between the X-direction motion and the Y-direction motion.
In order to achieve the purpose, the invention adopts the following technical scheme:
an XY macro-micro motion platform comprising: the device comprises a fine adjustment component, a macro driving component and a position detection device;
the fine tuning assembly comprises: the X-direction micro-motion unit, the Y-direction micro-motion unit and the micro-motion unit bearing platform;
the X-direction micro-motion unit and the Y-direction micro-motion unit have a driving activity function; the output end of the X-direction micro-motion unit has a loading function and is connected with the position detection device and used for driving the loaded object and the position detection device to move in the X-axis direction; the output end of the Y-direction micro-motion unit is connected with the X-direction micro-motion unit and is used for driving the X-direction micro-motion unit to move along the Y-axis direction;
the macro driving assembly includes: the X-direction macro driving unit, the Y-direction macro driving unit, the X-direction flat plate and the Y-direction flat plate;
the X-direction macro driving units are respectively arranged at two ends of the X-direction flat plate and are used for driving the X-direction flat plate to move along the Y-axis direction; the X-direction flat plate is movably connected with the micromotion unit bearing table between the X-direction macro drive units at two ends, and a moving pair extending along the X-axis direction is formed between the X-direction flat plate and the micromotion unit bearing table;
the Y-direction macro driving units are respectively arranged at two ends of the Y-direction flat plate and are used for driving the Y-direction flat plate to move along the X-axis direction; the Y-direction flat plate is movably connected with the micromotion unit bearing table between the Y-direction macro driving units at two ends, and a moving pair extending along the Y-axis direction is formed between the Y-direction flat plate and the micromotion unit bearing table;
the position detection device is used for acquiring the positions of the self body in the X axis and the Y axis.
Preferably, the X-direction inching unit includes: an X-direction micro-motion block with a moving function;
the Y-direction inching unit comprises: a Y-direction micro-motion block with a moving function;
the X-direction micromotion block is connected with the position detection device and provided with an X-direction limiting head; the Y-direction micro-motion block is provided with a first micro-motion limiting groove, the micro-motion unit bearing platform is provided with a second micro-motion limiting groove, and the X-direction limiting head extends into the first micro-motion limiting groove and can move in the second micro-motion limiting groove;
the X-direction micro-motion block and the Y-direction micro-motion block can be movably connected, and a moving pair extending along the X-axis direction is formed between the X-direction micro-motion block and the Y-direction micro-motion block;
the Y-direction micro-motion block is movably connected with the micro-motion unit bearing table, and a moving pair extending along the Y-axis direction is formed between the Y-direction micro-motion block and the micro-motion unit bearing table.
Preferably, the position detection device includes: a detection receiving device and a detection transmitter device;
the detection receiving device is arranged on the X-direction micromotion block; the detection receiving device is movable inside and/or outside the surface of the detection transmitter device; when the detection receiving device moves on the surface of the detection transmitter device, the detection receiving device obtains the positions of the detection transmitter device on the X axis and the Y axis.
Preferably, the upper end of the X-direction limiting head of the X-direction micromotion block is provided with a top limiting end with a bearing function; the bottom of the top limiting end abuts against the upper surface of the Y-direction micromotion block; the bottom of the Y-direction micromotion block abuts against the upper surface of the micromotion unit bearing table;
the detection receiving device is arranged at the lower end of the X-direction limiting head.
Preferably, the detection receiving device and the detection transmitter device are in contact with each other in opposite directions, and the two devices are in contact with each other through planes arranged in opposite directions.
Preferably, the method further comprises the following steps: an industrial personal computer;
the industrial personal computer is in communication connection with the position detection device; the industrial personal computer is used for controlling the X-direction micro-motion unit, the Y-direction micro-motion unit, the X-direction macro driving unit and the Y-direction macro driving unit.
A terminal feedback method of an XY macro-micro motion platform comprises the following steps:
step 1: the industrial personal computer respectively controls the X-direction macro driving unit and the Y-direction macro driving unit to realize the X-direction and Y-direction macro-motion coarse positioning of the X-direction micro-motion unit;
step 2: and feeding back the precise position information acquired by the position detection device to an industrial personal computer, and when the absolute value of the difference between the target position A 'and the actual position A is within the precision, carrying out X-direction and Y-direction fine positioning on the X-direction fine movement unit and the Y-direction fine movement unit respectively by the industrial personal computer until the absolute value of the difference between the actual position target position A' and the actual position A is within the precision.
Preferably, in the step 2, the positioning in the X direction specifically includes the step (3-1):
setting X-direction macro target positions H1 to an X-direction macro driving unit by an industrial personal computer, and giving control input to enable the X-direction macro driving unit to move; macro driving unit reading H2 from X; when the absolute value of the difference between the target position H1 and the actual position H2 is within the precision E, the X-direction macro driving unit is still, and the X-direction micro-motion unit is started to perform fine positioning; when the absolute value of the difference between the target position H1 and the actual position H2 is out of the precision E, the X-direction macro driving unit is continuously controlled until the absolute value of the difference between the target position H1 and the actual position H2 is within the precision E;
when the X-direction micro-motion unit is started, the industrial personal computer sets an X-direction micro-motion target position W1 to an X-direction micro-drive unit, the detection receiving device acquires an X-direction reading W2, and when the absolute value of the difference between the target position W1 and the actual position W2 is within the precision e, the precise positioning is realized, and the control is finished; when the absolute value of the difference between the target position W1 and the actual position W2 is outside the accuracy e, the X-direction inching unit continues to be controlled until the absolute value of the difference between the target position W1 and the actual position W2 is within the accuracy e.
Preferably, in the step 2, the positioning in the Y direction specifically includes the step (3-2):
setting a Y-direction macro target position H3 to a Y-direction macro driving unit by an industrial personal computer, giving control input to enable the Y-direction macro driving unit to move, and reading H4 from the Y-direction macro driving unit; when the absolute value of the difference between the target position H3 and the actual position H4 is within the precision E1, the Y-direction macro driving unit is still, and the Y-direction micro-motion unit is started to perform fine positioning;
when the absolute value of the difference between the target position H3 and the actual position H4 is out of the precision E1, the Y-direction macro driving unit is continuously controlled until the absolute value of the difference between the target position H3 and the actual position H4 is within the precision E1;
when the Y-direction micro-motion unit is started, the industrial personal computer sets a Y-direction micro-motion target position W1 to a Y-direction micro-drive unit, an X-direction reading W3 is obtained from the plane detection position, and when the absolute value of the difference between the target position W3 and the actual position W4 is within the precision e1, precise positioning can be realized; when the absolute value of the difference between the target position W3 and the actual position W4 is outside the accuracy e1, the X-direction inching unit continues to be controlled until the absolute value of the difference between the target position W3 and the actual position W4 is within the accuracy e 1.
The invention has the beneficial effects that:
the XY macro-micro motion platform adopts an XY macro-micro decoupling mode, decoupling arrangement is arranged between macro motion components and micro motion components in each axial direction, decoupling arrangement is carried out between X-direction motion and Y-direction motion on the basis, so that the whole system forms a common horizontal plane in the XY axial direction and decoupling arrangement is formed between the macro motion components and the macro motion components, the motions of all the axes on the structure are not coupled with each other, and the accurate position of the axis can be obtained without complex coordinate transformation; meanwhile, the XY macro-micro motion platform moves on the same horizontal plane, so that tangential interference and influence are reduced, and the precision of the movement is guaranteed.
Drawings
FIG. 1 is a schematic structural diagram of an XY macro-micro motion platform;
FIG. 2 is a schematic diagram of a trim assembly;
FIG. 3 is a schematic control flow diagram of the XY macro-micro motion platform;
FIG. 4 is a flow chart of X-direction macro-micro fine positioning;
FIG. 5 is a flow chart of Y-direction macro-micro fine positioning;
wherein:
the device comprises a fine adjustment assembly 1, a macro driving assembly 2, a position detection device 3 and an industrial personal computer 4; a support 5;
an X-direction micro-motion unit 11, a Y-direction micro-motion unit 12 and a micro-motion unit bearing table 13;
an X-direction macro driving unit 21, a Y-direction macro driving unit 22, an X-direction flat plate 23 and a Y-direction flat plate 24;
an X-direction micromotion block 111, an X-direction limiting head 112 and a top limiting end 113; a Y-direction jogging block 121 and a first jogging limit groove 122; a second fine motion limiting groove 131;
a detection receiver 31 and a detection transmitter 32.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
An XY macro-micro motion platform comprising: the device comprises a fine adjustment component 1, a macro driving component 2 and a position detection device 3;
the fine adjustment assembly 1 comprises: an X-direction micro-motion unit 11, a Y-direction micro-motion unit 12 and a micro-motion unit bearing table 13;
the X-direction inching unit 11 and the Y-direction inching unit 12 have a driving activity function; the output end of the X-direction micro-motion unit 11 has a carrying function and is connected with the position detection device 3 and used for driving the carrying object 5 and the position detection device 3 to move in the X-axis direction; the output end of the Y-direction micro-motion unit 12 is connected with the X-direction micro-motion unit 11 and is used for driving the X-direction micro-motion unit 11 to move along the Y-axis direction;
the macro driving assembly 2 includes: an X-direction macro driving unit 21, a Y-direction macro driving unit 22, an X-direction plate 23 and a Y-direction plate 24;
the X-direction macro driving units 21 are respectively installed at two ends of the X-direction flat plate 23 and are used for driving the X-direction flat plate 23 to move along the Y-axis direction; the X-direction flat plate 23 is movably connected with the micromotion unit bearing table 13 between the X-direction macro driving units 21 at two ends, and a moving pair extending along the X-axis direction is formed between the X-direction flat plate 23 and the micromotion unit bearing table 13;
the Y-direction macro driving units 22 are respectively installed at two ends of the Y-direction flat plate 24 and are used for driving the Y-direction flat plate 24 to move along the X-axis direction; the Y-direction flat plate 24 is movably connected with the micromotion unit bearing table 13 between the Y-direction macro driving units 22 at two ends, and a moving pair extending along the Y-axis direction is formed between the Y-direction flat plate 24 and the micromotion unit bearing table 13;
the position detection device is used for acquiring X, Y axis two-dimensional position information under the drive of the X-direction macro drive unit, the X-direction micro-motion unit, the Y-direction macro drive unit and the Y-direction micro-motion unit in a full-stroke real-time online closed-loop manner. The online closed loop means that the platform obtains position information while moving, and feeds back the position information at the moment to an industrial personal computer or other control equipment, so as to achieve a better control effect.
The XY macro-micro motion platform adopts an XY macro-micro decoupling mode, decoupling arrangement is arranged between macro motion components and micro motion components in each axial direction, decoupling arrangement is carried out between X-direction motion and Y-direction motion on the basis, so that the whole system forms a common horizontal plane in the XY axial direction and decoupling arrangement is formed between the macro motion components and the macro motion components, the motions of all the axes on the structure are not coupled with each other, and the accurate position of the axis can be obtained without complex coordinate transformation; meanwhile, the XY macro-micro motion platform moves on the same horizontal plane, so that tangential interference and influence are reduced, and the precision of the movement is guaranteed.
Specifically, the X-direction macro driving unit 21 and the Y-direction macro driving unit 22 are well-known mechanisms having a function of driving movement, and only the movement of the X-direction plate 23 and the Y-direction plate 24 is required, such as a linear motor, a ball screw, a cylinder, an oil cylinder, and the like;
the sliding pair is a kinematic pair with the degree of freedom of 1 and can be understood as the matching of a sliding block and a guide rail; for example, in this embodiment, the micro-motion unit carrier 13 may have an X-direction rail 132 parallel to the X-axis and a Y-direction rail 133 parallel to the Y-axis, and the X-direction rail 132 and the Y-direction rail 133 preferably form an angle of 90 degrees; the X-direction plate 23 is mounted on the X-direction rail 132, and the Y-direction plate 24 is mounted on the Y-direction rail 133; under the guiding action of the X-direction rail 132 and the Y-direction rail 133, the X-direction flat plate 23 can move along the X-axis direction, and the Y-direction flat plate 24 can move along the Y-axis direction; therefore, according to the present embodiment, when the position of the X-direction flat plate 23 in the Y-direction needs to be adjusted, the X-direction macro driving unit 21 is started; the X-direction macro driving unit 21 drives the X-direction flat plate 23 to move along the Y-axis direction, and the X-direction rail 132 extends along the X-axis direction, so that the X-direction flat plate 23 can drive the entire micro-motion unit bearing table 13 to move along the Y-axis direction, and the micro-motion unit bearing table 13 is provided with a Y-direction rail 133 parallel to the Y-axis, so that the Y-direction flat plate 24 of the Y-direction rail 133 can provide a guiding function for the Y-axis direction movement of the micro-motion unit bearing table 13, and the moving smoothness of the micro-motion unit bearing table 13 is improved; at this time, the Y-direction macro driving unit 22 can be started simultaneously, the Y-direction macro driving unit 22 drives the Y-direction flat plate 24 to move along the X-axis, and further drives the micro-motion unit bearing platform 13 to move along the X-axis, and the X-direction guide function is provided for the flat plate 23 through the X-direction of the X-direction rail 132; under the combined action of the X-direction macro driving unit 21 and the Y-direction macro driving unit 22, the position detection device 3 of the micro-motion unit bearing platform 13 completes the coarse positioning; starting the X-direction inching unit 11 and the Y-direction inching unit 12, wherein the Y-direction inching unit 12 drives the X-direction inching unit 11 to move so as to drive the position detection device 3 to move along the Y-axis direction; the X-direction micro-motion unit 11 has a driving movement function and can drive the position detection device 3 to move along the X-axis direction, so that the X-axis and Y-axis accurate positioning of the position detection device 3 is realized. In conclusion, the XY macro-micro decoupling mode is adopted in the scheme, decoupling arrangement is arranged between the macro-motion component and the micro-motion component in each axial direction, decoupling arrangement is carried out between X-direction motion and Y-direction motion on the basis, the whole system has the decoupling arrangement between the XY macro-micro motion and the XY motion in the same horizontal plane, tangential interference and influence are reduced due to motion in the same horizontal plane, and precise motion is guaranteed.
Preferably, the X-direction inching unit 11 includes: an X-direction jog block 111 having a move function;
the Y-direction inching unit 12 includes: a Y-direction jog block 121 having a move function;
the X-direction micromotion block 111 is connected with the position detection device 3, and the X-direction micromotion block 111 is provided with an X-direction limiting head 112; the Y-direction micro-motion block 121 is provided with a first micro-motion limiting groove 122, the micro-motion unit bearing table 13 is provided with a second micro-motion limiting groove 131, and the X-direction limiting head 112 extends into and can be movably arranged in the first micro-motion limiting groove 122 and the second micro-motion limiting groove 131;
the X-direction micro-motion block 111 and the Y-direction micro-motion block 121 can be movably connected, and a moving pair extending along the X-axis direction is formed between the X-direction micro-motion block and the Y-direction micro-motion block;
the Y-direction micro-motion block 121 is movably connected with the micro-motion unit bearing table 13, and a moving pair extending along the Y-axis direction is formed between the two.
The X-direction limiting head 112 of the X-direction jogging block 111 extends into the first jogging limiting groove 122 and the second jogging limiting groove 131; the moving pair between the X-direction micromotion block 111 and the Y-direction micromotion block 121 is an X-axis, and the X-direction micromotion block 111 can only move along the X-axis direction under the limiting action of the X-direction limiting head 112 on the two ends of the X-axis of the first micromotion limiting groove 122; at this time, the sliding pair between the Y-direction fine motion block 121 and the fine motion unit bearing table 13 extends in the Y-axis direction, and after the X-direction limiting head 112 extends into the second fine motion limiting groove 131, the second fine motion limiting groove 131 is limited at two ends of the Y-axis, that is, the Y-direction fine motion block 121 moves on the fine motion unit bearing table 13 along the Y-axis direction relatively, and drives the X-direction fine motion block 111 on the surface thereof to move along the Y-axis direction; based on the structure, the X-direction micromotion block 111 provides the limitation of movement only along the X axis, and the Y-direction micromotion block 121 provides the limitation of movement only along the Y axis, so that the fine adjustment of the X axis and the Y axis is realized, and the movement accuracy of the position detection device 3 is improved.
In the scheme, the X-direction micromotion block 111, the Y-direction micromotion block 121 and the micromotion unit bearing table 13 are connected in a stacked mode, and the X-axis and the Y-axis can accurately move through a sliding pair among the three, so that the moving accuracy is improved.
The X-direction inching unit 11 and the Y-direction inching unit 12 may include: a micro-motion driver having a driving movement function to realize the movement function of the X-direction micro-motion block 111 and the Y-direction micro-motion block 121, such as known micro-motion elements such as piezoelectric ceramics and magnetostrictive elements, and the micro-motion elements can be arranged at any positions of the X-direction micro-motion block 111, the Y-direction micro-motion block 121 and the micro-motion unit bearing table 13 or positions among the three according to requirements; in the drawings in the application, it is only expressed by the block structure that the Y-direction micro-motion unit 12 is restricted by a moving pair on the micro-motion unit bearing table 13, and the X-direction micro-motion unit 11 is restricted by a moving pair on the Y-direction micro-motion unit 12.
More preferably, the position detection device 3 comprises: a detection receiving device 31 and a detection transmitter device 32;
the detection receiving device 31 is mounted on the X-direction micromotion block 111; the detection reception means 31 are mobile inside and/or outside the surface of the detection transmitter means 32; when the detection receiving device 31 moves on the surface of the detection transmitter device 32, the detection receiving device 31 obtains the positions of the detection receiver device 31 on the X axis and the Y axis of the detection transmitter device 32.
The detection receiving device 31 is mounted on the X-direction micro-motion block 111, the position of the detection receiving device 31 is roughly positioned by the X-direction macro-driving unit 21 and the Y-direction macro-driving unit 22, the position of the detection receiving device 31 is finely positioned by the X-direction micro-motion unit 11 and the Y-direction micro-motion unit 12, and the receiving sense of the detection receiving device 31 moves on the detection transmitter device 32; in the moving process of the detection transmitter device 32, the detection transmitter device 32 continuously transmits precise position information to the detection receiver device 31 by the detection receiver device 31, the precise position information is fed back to the industrial personal computer 4 by the detection receiver device 31, and the industrial personal computer 4 controls the X-direction micro-motion unit 11, the Y-direction micro-motion unit 12, the X-direction macro-drive unit 21 and the Y-direction macro-drive unit 22 until the absolute value of the difference between the target position and the actual position is within the precision, namely positioning is finished; the detection receiving device 31 is close to or in contact with the detection transmitter device 32, the distance between the two is short, the sensing time is negligible, the identification precision is high, and the displacement positioning precision of the detection receiving device 31 is ensured by matching the X-direction micromotion block 111, the Y-direction micromotion block 121 and the micromotion unit bearing platform 13 in a stacked connection mode and a moving pair between two adjacent stacked layers.
The detection receiving device 31 and the detection transmitter device 32 are generally provided with a sensing device which is matched with a precision position detection device 3 such as a plane grating, a laser ruler and the like, and the precision detection delta is less than or equal to the resolution of the motion platform.
Preferably, the X-direction micromotion block 111 is provided with a top limit end 113 with a bearing function at the upper end of the X-direction limit head 112; the bottom of the top limiting end 113 abuts against the upper surface of the Y-direction micromotion block 121; the bottom of the Y-direction micromotion block 121 abuts against the upper surface of the micromotion unit bearing table 13;
the detection receiving device 31 is mounted at the lower end of the X-direction limiting head 112.
The top limit end 113 has a bearing function and can be used for placing any bearing object 5 which needs to move and transmit, such as precision electronic devices, for example, precision electronic devices such as tiny transistors and small flexible robots; it is ensured that the load 5 is conveyed exactly to a specific position.
The XY macro-micro motion platform can realize the macro-micro compound motion in XY two directions, can perform real-time online closed loop feedback in the whole stroke, adopts the structure that the lower end is fixedly connected with the position detection device 3, and the bearing object 5 is placed at the upper end, so that the position of the bearing object 5 is subjected to real-time online sensing and identification, the operation position of the bearing object 5 is accurately grasped, and the operation precision is improved.
Preferably, the detection receiver 31 and the detection transmitter 32 are in contact with each other through planes disposed opposite to each other.
The detection receiving device 31 is positioned at the lower end of the X-direction limiting head 112, so that when the X-direction limiting head 112 moves, the detection transmitter device 32 can upwards support the detection receiving device 31, and further provides supporting force for the X-direction limiting head 112, the plane contact can improve the moving smoothness of the detection receiving device 31 on the surface of the detection transmitter device 32, the detection transmitter device 32 can support the detection receiving device 31, the moving stability is improved, and the moving resistance is small.
Preferably, the method further comprises the following steps: an industrial personal computer 4;
the industrial personal computer 4 is in communication connection with the position detection device 3; the industrial personal computer 4 is used for controlling the X-direction micro-motion unit 11, the Y-direction micro-motion unit 12, the X-direction macro driving unit 21 and the Y-direction macro driving unit 22.
The industrial personal computer 4 can continuously receive the precise position information, controls the X-direction micro-motion unit 11, the Y-direction micro-motion unit 12, the X-direction macro-drive unit 21 and the Y-direction macro-drive unit 22 through the precise position information, feeds back the absolute displacement record of macro-motion and micro-motion, and compares XY macro-micro errors by combining with an upper computer system to realize high-precision compensation; and determining the high-precision plane positioning of the tail end by adopting a method of X micro motion-X current and Y micro motion-Y current so as to accurately convey the bearing object 5 to a specified position.
A terminal feedback method of an XY macro-micro motion platform comprises the following steps:
step 1: as shown in fig. 3, which is a control flow chart of the overall structure, the industrial personal computer 4 firstly controls the X-direction macro driving unit 21 and the Y-direction macro driving unit 22 respectively to realize the X-direction and Y-direction macro-motion coarse positioning of the X-direction micro-motion unit 117 (the end position);
step 2: and feeding back the precise position information acquired by the position detection device 3 to the industrial personal computer 4, and when the absolute value of the difference between the target position A 'and the actual position A is within the precision, performing X-direction and Y-direction fine positioning on the X-direction fine movement unit 11 and the Y-direction fine movement unit 12 respectively by the industrial personal computer 4 until the absolute value of the difference between the actual position target position A' and the actual position A is within the precision.
Because the position information feedback device of the macro unit in the macro and micro motion platform is far away from the position of the terminal, the overall structure of the macro and micro platform is complex, the problem of high structural nonlinear complexity is caused, the terminal position information cannot be obtained by the position feedback information of the macro driving unit, and the traditional position feedback device (such as a linear grating ruler) can only observe the position information of a single degree of freedom.
The patent provides a terminal feedback method of an XY macro-micro motion platform, wherein a plane detection device receiver is placed at the bottom of a terminal micro-motion unit of the motion platform, an X-direction macro driving unit and a Y-direction macro driving unit drive the integral structure of a micro-motion unit bearing platform 13 to carry out rough positioning of XY positions, error decoupling can be realized by adopting a stacked micro-adjustment assembly 1, the contradiction problems of high speed, high acceleration and high precision in a large stroke are effectively solved, full-stroke two-dimensional large-stroke closed-loop feedback control is realized, and the precise positioning of a bearing object is improved.
More preferably, in the step 2, the positioning in the X direction specifically includes the step (3-1):
step (3-1):
FIG. 4 shows a flow chart of the macro-micro fine positioning in the X direction; setting an X-direction macro-motion target position H1 to an X-direction macro driving unit 21 by the industrial personal computer 4, and giving control input to enable the X-direction macro driving unit 21 to move, wherein the X-direction final positioning D1 is H1+ W1; reading H2 from X to the macro drive unit 21; when the absolute value of the difference between the target position H1 and the actual position H2 is within the accuracy E, the X-direction macro driving unit 21 is still, and the X-direction micro-motion unit 11 is started to perform fine positioning; when the absolute value of the difference between the target position H1 and the actual position H2 is outside the accuracy E, the X-direction macro driving unit 21 is continuously controlled until the absolute value of the difference between the target position H1 and the actual position H2 is within the accuracy E;
when the X-direction micro-motion unit 11 is started, the industrial personal computer 4 sets an X-direction micro-motion target position W1 to an X-direction micro-drive unit, the detection receiving device 31 acquires an X-direction reading W2, when the absolute value of the difference between the target position W1 and the actual position W2 is within the precision e, the precise positioning is realized, and the control is finished; when the absolute value of the difference between the target position W1 and the actual position W2 is outside the accuracy e, the X-direction inching unit 11 is continuously controlled until the absolute value of the difference between the target position W1 and the actual position W2 is within the accuracy e.
Preferably, in step 2, the positioning in the Y direction specifically includes the following steps:
step (3-2):
FIG. 5 is a flow chart of the Y-direction macro-micro fine positioning; final Y-direction position D2 ═ H3+ W3; firstly, setting a Y-direction macro-motion target position H3 to a Y-direction macro driving unit 22 by an industrial personal computer 4, giving control input to enable the Y-direction macro driving unit 22 to move, and reading H4 from the Y-direction macro driving unit 22; when the absolute value of the difference between the target position H3 and the actual position H4 is within the accuracy E1, the Y-direction macro driving unit 22 is still and still, and the Y-direction micro-motion unit 12 is started to perform fine positioning;
when the absolute value of the difference between the target position H3 and the actual position H4 is outside the accuracy E1, the Y-direction macro driving unit 22 is continuously controlled until the absolute value of the difference between the target position H3 and the actual position H4 is within the accuracy E1;
when the Y-direction micro-motion unit 12 is started, the industrial personal computer 4 sets a Y-direction micro-motion target position W1 to a Y-direction micro-drive unit, an X-direction reading W3 is obtained from a plane detection position, and when the absolute value of the difference between the target position W3 and the actual position W4 is within the precision e1, precise positioning can be realized; when the absolute value of the difference between the target position W3 and the actual position W4 is outside the accuracy e1, the X-direction inching unit 11 is continuously controlled until the absolute value of the difference between the target position W3 and the actual position W4 is within the accuracy e 1.
The technical principle of the present invention is described above in connection with specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without inventive effort, which would fall within the scope of the present invention.
Claims (9)
1. An XY macro-micro motion platform, comprising: the device comprises a fine adjustment component, a macro driving component and a position detection device;
the fine tuning assembly comprises: the X-direction micro-motion unit, the Y-direction micro-motion unit and the micro-motion unit bearing platform;
the X-direction micro-motion unit and the Y-direction micro-motion unit have a driving activity function; the output end of the X-direction micro-motion unit has a loading function and is connected with the position detection device and used for driving the loaded object and the position detection device to move in the X-axis direction; the output end of the Y-direction micro-motion unit is connected with the X-direction micro-motion unit and is used for driving the X-direction micro-motion unit to move along the Y-axis direction;
the macro driving assembly includes: the X-direction macro driving unit, the Y-direction macro driving unit, the X-direction flat plate and the Y-direction flat plate;
the X-direction macro driving units are respectively arranged at two ends of the X-direction flat plate and are used for driving the X-direction flat plate to move along the Y-axis direction; the X-direction flat plate is movably connected with the micromotion unit bearing table between the X-direction macro drive units at two ends, and a moving pair extending along the X-axis direction is formed between the X-direction flat plate and the micromotion unit bearing table;
the Y-direction macro driving units are respectively arranged at two ends of the Y-direction flat plate and are used for driving the Y-direction flat plate to move along the X-axis direction; the Y-direction flat plate is movably connected with the micromotion unit bearing table between the Y-direction macro driving units at two ends, and a moving pair extending along the Y-axis direction is formed between the Y-direction flat plate and the micromotion unit bearing table;
the position detection device is used for acquiring X, Y axis two-dimensional position information under the drive of the X-direction macro drive unit, the X-direction micro-motion unit, the Y-direction macro drive unit and the Y-direction micro-motion unit in a full-stroke real-time online closed-loop manner.
2. The XY macro and micro motion platform of claim 1, wherein the X-direction micro motion unit comprises: an X-direction micro-motion block with a moving function;
the Y-direction inching unit comprises: a Y-direction micro-motion block with a moving function;
the X-direction micromotion block is connected with the position detection device and provided with an X-direction limiting head; the Y-direction micro-motion block is provided with a first micro-motion limiting groove, the micro-motion unit bearing platform is provided with a second micro-motion limiting groove, and the X-direction limiting head extends into the first micro-motion limiting groove and can move in the second micro-motion limiting groove;
the X-direction micro-motion block and the Y-direction micro-motion block can be movably connected, and a moving pair extending along the X-axis direction is formed between the X-direction micro-motion block and the Y-direction micro-motion block;
the Y-direction micro-motion block is movably connected with the micro-motion unit bearing table, and a moving pair extending along the Y-axis direction is formed between the Y-direction micro-motion block and the micro-motion unit bearing table.
3. The XY macro-micro motion platform of claim 2, wherein the position detection means comprises: a detection receiving device and a detection transmitter device;
the detection receiving device is arranged on the X-direction micromotion block; the detection receiving device is movable inside and/or outside the surface of the detection transmitter device; when the detection receiving device moves on the surface of the detection transmitter device, the detection receiving device obtains the positions of the detection transmitter device on the X axis and the Y axis.
4. An XY macro-micro motion platform according to claim 3, wherein the X-direction micro motion block is provided with a top limit end with a bearing function at the upper end of the X-direction limit head; the bottom of the top limiting end abuts against the upper surface of the Y-direction micromotion block; the bottom of the Y-direction micromotion block abuts against the upper surface of the micromotion unit bearing table;
the detection receiving device is arranged at the lower end of the X-direction limiting head.
5. An XY macro and micro motion platform according to claim 3, wherein the detection receiving means and the detection transmitter means are in contact with each other through planes disposed in opposition to each other.
6. The XY macro and micro motion platform of any one of claims 1 to 5, further comprising: an industrial personal computer;
the industrial personal computer is in communication connection with the position detection device; the industrial personal computer is used for controlling the X-direction micro-motion unit, the Y-direction micro-motion unit, the X-direction macro driving unit and the Y-direction macro driving unit.
7. The tip feedback method of an XY macro and micro motion platform according to any of claims 1-6, comprising the steps of:
step 1: the industrial personal computer respectively controls the X-direction macro driving unit and the Y-direction macro driving unit to realize the X-direction and Y-direction macro-motion coarse positioning of the X-direction micro-motion unit;
step 2: and feeding back the precise position information acquired by the position detection device to an industrial personal computer, and when the absolute value of the difference between the target position A 'and the actual position A is within the precision, carrying out X-direction and Y-direction fine positioning on the X-direction fine movement unit and the Y-direction fine movement unit respectively by the industrial personal computer until the absolute value of the difference between the actual position target position A' and the actual position A is within the precision.
8. The tip feedback method according to claim 7, wherein in the step 2, the positioning in the X direction specifically comprises the step (3-1):
step (3-1):
setting X-direction macro target positions H1 to an X-direction macro driving unit by an industrial personal computer, and giving control input to enable the X-direction macro driving unit to move; macro driving unit reading H2 from X; when the absolute value of the difference between the target position H1 and the actual position H2 is within the precision E, the X-direction macro driving unit is still, and the X-direction micro-motion unit is started to perform fine positioning; when the absolute value of the difference between the target position H1 and the actual position H2 is out of the precision E, the X-direction macro driving unit is continuously controlled until the absolute value of the difference between the target position H1 and the actual position H2 is within the precision E;
when the X-direction micro-motion unit is started, the industrial personal computer sets an X-direction micro-motion target position W1 to an X-direction micro-drive unit, the detection receiving device acquires an X-direction reading W2, and when the absolute value of the difference between the target position W1 and the actual position W2 is within the precision e, the precise positioning is realized, and the control is finished; when the absolute value of the difference between the target position W1 and the actual position W2 is outside the accuracy e, the X-direction inching unit continues to be controlled until the absolute value of the difference between the target position W1 and the actual position W2 is within the accuracy e.
9. The tip feedback method according to claim 7, wherein the positioning in the Y direction in step 2 specifically comprises the following steps:
step (3-2):
setting a Y-direction macro target position H3 to a Y-direction macro driving unit by an industrial personal computer, giving control input to enable the Y-direction macro driving unit to move, and reading H4 from the Y-direction macro driving unit; when the absolute value of the difference between the target position H3 and the actual position H4 is within the precision E1, the Y-direction macro driving unit is still, and the Y-direction micro-motion unit is started to perform fine positioning;
when the absolute value of the difference between the target position H3 and the actual position H4 is out of the precision E1, the Y-direction macro driving unit is continuously controlled until the absolute value of the difference between the target position H3 and the actual position H4 is within the precision E1;
when the Y-direction micro-motion unit is started, the industrial personal computer sets a Y-direction micro-motion target position W1 to a Y-direction micro-drive unit, an X-direction reading W3 is obtained from the plane detection position, and when the absolute value of the difference between the target position W3 and the actual position W4 is within the precision e1, precise positioning can be realized; when the absolute value of the difference between the target position W3 and the actual position W4 is outside the accuracy e1, the X-direction inching unit continues to be controlled until the absolute value of the difference between the target position W3 and the actual position W4 is within the accuracy e 1.
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