CN113009604A - Micro-lens array, 3D display device and preparation method thereof - Google Patents

Micro-lens array, 3D display device and preparation method thereof Download PDF

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Publication number
CN113009604A
CN113009604A CN202110194479.7A CN202110194479A CN113009604A CN 113009604 A CN113009604 A CN 113009604A CN 202110194479 A CN202110194479 A CN 202110194479A CN 113009604 A CN113009604 A CN 113009604A
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lens
layer
driving
structures
deformation
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CN113009604B (en
Inventor
孟德天
张锋
顾仁权
王利波
侯东飞
董立文
崔钊
刘文渠
宋晓欣
吕志军
黄海涛
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0081Simple or compound lenses having one or more elements with analytic function to create variable power
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/26Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
    • G02B30/27Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving lenticular arrays

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)

Abstract

The invention relates to the technical field of 3D display, in particular to a micro-lens array and a preparation method thereof, and a 3D display device and a preparation method thereof. The microlens array includes: the outer side of the packaging layer of the back plate is electrically connected with a plurality of deformation driving structures which are arranged in an array and correspond to the pixel areas; the lenses are made of electrostrictive materials and are correspondingly arranged on the deformation driving structures; wherein, under the effect of deformation drive structure, the domain control lens is to changing the direction deformation of its hunch height, to sum up, the design of this scheme of adoption can be so that display plane and focal plane are not on a plane, effectively avoids convergence to adjust the conflict to, can guarantee the continuity of viewpoint on the one hand, on the other hand can guarantee resolution ratio, improves user experience and feels.

Description

Micro-lens array, 3D display device and preparation method thereof
Technical Field
The invention relates to the technical field of 3D display, in particular to a micro-lens array and a preparation method thereof, and a 3D display device and a preparation method thereof.
Background
In the five human perception pathways, vision accounts for 70% to 80% of the information sources, while the brain has about 50% of its capacity to process visual information. From daily behavior to complex operations, highly dependent on our visual perception; however, existing image acquisition and display loses visual information in multiple dimensions, forcing us to view the three-dimensional world only through two-dimensional "windows"; the light field display is a method for acquiring multi-dimensional visual information, can simulate the way of sensing light and focusing by human eyes, and dynamically focuses the area where the fixation point of the human eyes is located, so that more natural sense is presented.
The micro-lens array is an important micro-optical component for realizing 3D light field display, and has a plurality of unique optical properties; by adjusting parameters such as shape, focal length, arrangement, duty ratio and the like, the micro-lens array can realize specific functions for imaging; the light field display in the current market mostly uses the basic 3D display technology, for example, the light rays of different pixels are projected to different directions by adopting a cylindrical lens grating mode to enter two eyes to realize the 3D light field display effect.
The technology has the defects that the focal length of the lens is fixed on the same focal plane and cannot be adjusted as required, namely, the depth is simulated on the fixed focal plane, and the stereoscopic vision sense is created. The presentation mode is depth perception formed by binocular parallax, dynamic focus adjustment of two eyes is not supported, although the binocular parallax is changed, the focus is unchanged, and synchronous adjustment for watching the real world cannot be achieved, so that convergence adjustment conflict is easy to occur, and phenomena such as dizziness, nausea and the like are shown; the resolution of the displayed viewpoint image and the number of viewpoints are influenced by the size of the cylindrical lens grating, the grating size is large, the viewpoints are few, and the viewpoints are discontinuous; small size, multiple viewpoints and reduced resolution.
Disclosure of Invention
The present application aims to provide a micro lens array and a manufacturing method thereof, and a 3D display device and a manufacturing method thereof, so as to solve the technical problem that the focal length of a lens in the prior art cannot be adjusted.
Technical scheme (I)
To achieve the above object, a first aspect of the present invention provides a microlens array comprising:
the outer side of the packaging layer of the back plate is electrically connected with a plurality of deformation driving structures which are arranged in an array and correspond to the pixel areas;
the lenses are made of electrostrictive materials and are correspondingly arranged on the deformation driving structures;
and under the action of the deformation driving structure, the field control lens deforms towards the direction of changing the arch height.
Optionally, the deformation driving structure includes:
the first driving electrode is electrically connected to the outer side of the packaging layer;
and the second driving electrode is arranged above the first driving electrode at intervals through a supporting layer, and a lens is arranged in a space formed between the second driving electrode and the first driving electrode.
Optionally, the deformation driving structure includes:
a first drive electrode;
a second drive electrode;
the lens is arranged on the control unit, the control unit is made of electrostrictive materials and is respectively and electrically connected with the first driving electrode and the second driving electrode;
under the action of the first driving electrode and the second driving electrode, the field controls the control unit to deform so as to drive the lens to deform in the direction of changing the arch height of the lens.
Optionally, the first driving electrode and the second driving electrode are both bent into an i-shaped structure, and both ends of the i-shaped structure are respectively lapped on two opposite wall surfaces of the control unit.
Optionally, the control unit is configured as a control groove, the lens is installed in the control groove, and the first driving electrode and the second driving electrode are electrically connected to two ends of the control groove respectively.
Optionally, the deformation driving structure is a micro-nano structure composed of a plurality of protruding structures arranged at intervals, the lens is correspondingly arranged on the micro-nano structure, and the distances between the plurality of protruding structures in the micro-nano structure can be the same or different.
Optionally, the ratio of the distance between every two adjacent protruding structures to the width of the protruding structure is greater than 1.
Optionally, a plurality of focusing structures are further disposed in the microlens array, and the plurality of focusing structures correspond to the plurality of deformation driving structures, so as to prevent compatible adhesion between every two adjacent lenses.
Optionally, the aggregation structure includes:
the first line electrode is electrically connected to the outer side of the packaging layer;
and the second line electrodes are arranged above the first line electrodes in a staggered manner, and lenses are arranged in the areas formed by the second line electrodes and the first line electrodes in a staggered manner.
Optionally, the collecting structure is a hydrophobic layer, and the hydrophobic layer is disposed on the side wall surface of the supporting layer close to the lens.
To achieve the above object, a second aspect of the present invention provides a 3D display device including: the display screen comprises a display screen and the micro-lens array as described in any one of the preceding claims, wherein the micro-lens array is arranged on one side of a light emergent surface of the display screen.
To achieve the above object, a third aspect of the present invention provides a method for manufacturing a microlens array, the method comprising:
preparing a back plate;
a plurality of deformation driving structures corresponding to the pixel regions are formed on the outer side of the packaging layer of the backboard in an array manner;
a plurality of lenses are prepared from electrostrictive materials, and the lenses are correspondingly arranged on the deformation driving structures.
Optionally, a plurality of deformation driving structures corresponding to the pixel regions are formed in an array on the outer side of the package layer of the backplane; adopting electrostrictive material to prepare a plurality of lenses, and correspondingly installing a plurality of lenses on a plurality of deformation driving structures, the method specifically comprises the following steps:
coating a layer of transparent electrode on the outer side of the packaging layer of the back plate, patterning to form a plurality of first driving electrodes, and depositing an insulating layer;
coating a photosensitive PR film to form a PR layer as a mask;
depositing liquid drops made of electrostrictive materials with the same volume onto the corresponding first driving electrode through a PR glue layer, forming a lens after low-temperature curing, and removing the PR glue layer;
coating a layer of rubber material, and forming a supporting layer through patterning;
coating a layer of transparent electrode on one side of the packaging cover plate close to the supporting layer, and patterning to form a plurality of second driving electrodes corresponding to the first driving electrodes;
and installing the packaging cover plate on the supporting layer, and performing edge packaging.
Optionally, in the step of forming a plurality of deformation driving structures corresponding to the pixel regions in an array on the outer side of the package layer of the backplane, the method further includes:
a plurality of gathering structures corresponding to the pixel regions are formed on the outer side of the packaging layer of the back plate in an array mode;
depositing an insulating layer;
the array is formed with a plurality of deformation-driving structures corresponding to the aggregation structure.
To achieve the above object, a fourth aspect of the present invention provides a method for manufacturing a 3D light field display device, the method comprising:
preparing a display screen;
and installing the micro-lens array prepared by the method in any one of the preceding methods on one side of the light emergent surface of the display screen.
(II) advantageous effects
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a micro-lens array, a 3D display device and a preparation method thereof, wherein the preparation method comprises the following steps: the outer side of the packaging layer of the back plate is electrically connected with a plurality of deformation driving structures which are arranged in an array and correspond to the pixel areas; the lenses are made of electrostrictive materials and are correspondingly arranged on the deformation driving structures; and under the action of the deformation driving structure, the field control lens deforms towards the direction of changing the arch height.
For convenience of understanding, when the field direction is set to be the forward direction, the lens is defined to deform towards the direction of increasing the camber, and when the field direction is set to be the reverse direction, the lens is defined to deform towards the direction of decreasing the camber, for example, when the focal length of a certain lens needs to be increased, only the corresponding deformation driving structure needs to be driven to make the field diverge along the forward direction, at this time, the lens deforms towards the direction of increasing the camber under the effect of the field, so that the focal length of the lens is increased, further, the display plane and the focal plane are not on the same plane, thereby effectively avoiding convergence adjustment conflicts, and summarizing, the scheme realizes the random switching of the focal length between the near view and the far view of the image by driving different deformation driving structures, so that human eyes can see different depth-of-view images, moreover, the design of the scheme can ensure the continuity of the viewpoint on one hand, and can ensure the resolution ratio on the other hand, thereby improving the user experience.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for a person skilled in the art that other drawings can be obtained according to the drawings without inventive exercise, wherein:
FIG. 1 is a light path diagram of a 3D light field display device according to the present invention;
FIG. 2 is a schematic diagram of a method for fabricating a microlens array according to one embodiment of the present invention;
FIG. 3 is a schematic view of lens preparation in the microlens array preparation method shown in FIG. 2;
FIG. 4 is a schematic structural diagram of a microlens array fabricated by the method shown in FIG. 2;
FIG. 5 is a top view of the array of unprinted front microlenses of FIG. 4;
FIG. 6 is a schematic structural diagram of a microlens array according to yet another embodiment of the present invention;
FIG. 7 is a schematic view of the lens deformed in the direction of decreasing camber for the field direction of FIG. 6;
FIG. 8 is a schematic structural view of the lens deformed in the direction of increasing camber when the field direction in FIG. 6 is positive;
FIG. 9 is a schematic view of a method for manufacturing a microlens array according to still another embodiment of the present invention;
FIG. 10 is a schematic structural diagram of a microlens array fabricated by the method shown in FIG. 9;
FIG. 11 is a top view of FIG. 10;
FIG. 12 is a schematic diagram showing a structure of a microlens array according to still another embodiment of the present invention;
FIG. 13 is a schematic view of a method of fabricating a microlens array according to yet another embodiment of the present invention;
FIG. 14 is a schematic structural view of a microlens array fabricated by the method shown in FIG. 13;
FIG. 15 is a top view of FIG. 14;
FIG. 16 is a schematic view of a method of fabricating a microlens array according to yet another embodiment of the present invention;
FIG. 17 is a schematic view of lens preparation in the microlens array preparation method shown in FIG. 16;
FIG. 18 is a schematic structural view of a microlens array fabricated by the method shown in FIG. 16;
FIG. 19 is a top view of FIG. 18;
FIG. 20 is a schematic view of the structure of the back plate of the present invention.
In the figure: 1. a back plate; 2. a lens; 3. a first drive electrode; 4. a second drive electrode; 5. a support layer; 6. a control unit; 7. a micro-nano structure; 8. a raised structure; 9. a first line electrode; 10. a second line electrode; 11. a deformation driving structure; 12. (ii) an aggregate structure; 13. a packaging layer; 14. a display screen; 15. packaging the cover plate; 16. a polysilicon layer; 17. a first inorganic layer; 18. a gate insulating layer; 19. a second inorganic layer; 20. a mons tube; 21. a back plate insulating layer; 22. an organic material layer; 23. an anode; 24. a backplane defining layer; 25. a light emitting layer; 26. a cathode ray tube is provided.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
The invention is described in further detail below with reference to the following figures and detailed description:
the micro-lens array is an important micro-optical component for realizing 3D light field display, and has a plurality of unique optical properties; by adjusting parameters such as shape, focal length, arrangement, duty ratio and the like, the micro-lens array can realize specific functions for imaging; the light field display in the current market mostly uses the basic 3D display technology, for example, the light rays of different pixels are projected to different directions to enter two eyes in the mode of adopting the cylindrical lens 2 grating to realize the 3D light field display effect.
The above technology has the defect that the focal length of the lens 2 is fixed on the same focal plane and cannot be adjusted as required, namely, the depth is simulated on the fixed focal plane, and the stereoscopic vision sense is created. The presentation mode is depth perception formed by binocular parallax, dynamic focus adjustment of two eyes is not supported, although the binocular parallax is changed, the focus is unchanged, and synchronous adjustment for watching the real world cannot be achieved, so that convergence adjustment conflict is easy to occur, and phenomena such as dizziness, nausea and the like are shown; the resolution of the displayed viewpoint image and the number of viewpoints are influenced by the grating size of the cylindrical lens 2, the grating size is large, the viewpoints are few, and the viewpoints are discontinuous; small size, multiple viewpoints, and reduced resolution, and therefore, the variable focal length microlens 2 technology is required to solve this problem to achieve a more natural 3D display viewing effect.
In order to solve the technical problem that the focal length of the lens 2 cannot be adjusted in the prior art, as shown in fig. 1 to 20, the present application provides a 3D display device, which specifically includes: the display screen 14 and the micro lens array, the micro lens array is arranged on one side of the light-emitting surface of the display screen 14.
The following description will be made with reference to the accompanying drawings, which illustrate the specific structure of the microlens array:
to achieve the above object, as shown in fig. 1 to 20, the present application provides a microlens array, specifically including:
the backlight module comprises a back plate 1, wherein a plurality of deformation driving structures 11 are electrically connected to the outer side of a packaging layer 13 of the back plate 1, and the deformation driving structures 11 are arranged in an array and correspond to a plurality of pixel areas; wherein, deformation drive structure 11 can with pixel district one-to-one, can also adopt the mode that a deformation drive structure 11 corresponds a plurality of pixel districts, certainly, the resolution ratio that the mode that sets up that a pair of many corresponds is less than the resolution ratio that a pair of many sets up the mode and correspond, in the in-service use, preferentially, deformation drive structure 11 can with the mode of pixel district one-to-one, can guarantee the resolution ratio on the one hand, on the other hand can also realize carrying out accurate control to every pixel district.
And a plurality of lenses 2, wherein the size of the lenses 2 is preferably larger than the size of the pixel regions; the plurality of lenses 2 are made of electrostrictive materials with high transmittance, for example, the electrostrictive materials can be made of polyurethane, polyvinylidene fluoride and other materials, and the materials can deform under the control of a field; the lenses 2 are correspondingly arranged on the deformation driving structures 11; under the action of the deformation driving structure 11, the field control lens 2 deforms in the direction of changing the arch height thereof, preferably, the field is set to be an electric field, and certainly, the field can also be set to be a magnetic field, as long as the field in which the lens 2 deforms is applicable to the present solution, and for convenience of understanding, the following detailed description will be made by setting the field to be an electric field.
Further, in order to ensure accurate control over the lens 2, the shape of the distortion driving structure 11 is adapted to the shape of the lens 2, preferably, as shown in the figure, in the present embodiment, the lens 2 is a circular convex lens 2 structure, and therefore, correspondingly, the distortion driving structure 11 is set to be circular, of course, in the microlens array, the shape of the lens 2 and the shape corresponding to the distortion driving structure 11 are not limited to the circular structure, and other structures, such as a square structure, a hexagon structure, etc., may also be adopted, and in the present embodiment, the shapes are not limited.
In the present embodiment, each layer is isolated by an insulating layer, and the outer side is protected by the package cover 15 and the package structure.
For convenience of understanding, when the field direction is set to the forward direction, it is defined as the deformation of the lens 2 in the direction of increasing the camber, and when the field direction is set to the reverse direction, it is defined as the deformation of the lens 2 in the direction of decreasing the camber, for example, when the focal length of a certain lens 2 needs to be increased, only the corresponding deformation driving structure 11 needs to be driven, so that the field diverges along the forward direction, at this time, the lens 2 deforms in the direction of increasing the camber under the effect of the field, so that the focal length of the lens 2 is increased, and further the display plane and the focal plane are not on the same plane, thereby effectively avoiding convergence adjustment conflicts, and the adjustment processes of the other lenses 2 are the same, so it is not described herein; in summary, according to the present disclosure, different deformation driving structures 11 are driven to change the height change of the lens 2 corresponding to different pixel regions in the vertical direction, so that the different pixel regions are displayed on different focal planes, and the focal length is switched between the close view and the distant view of the image at will, so that human eyes can see different depth-of-field images.
And, along with the change of field intensity, the corresponding lens 2 deformation degree, that is, the vault height, also changes correspondingly, specifically, along with the increase of field intensity, the larger the corresponding lens 2 deformation degree, the higher the vault height, and the larger the focal length.
Specifically, as shown in fig. 1, light rays emitted from each pixel point on the display screen 14 are transmitted through the corresponding lens 2 and enter the human eye, wherein the human eye is equivalent to the lens 2, and is projected onto the retina to form an image after being projected by the human eye, and the image is a real image; light paths of light rays emitted by the pixel points are changed after passing through the micro lens 2, the light rays are converged at one point in a reverse direction, the light rays are emitted from the point, the point is a virtual image A1, the plane where the A1 is located is a focal plane, namely, in the prior art, the display plane where the A1 is located and the focal plane are always located on the same plane and cannot be adjusted as required, namely, the depth is simulated on the fixed focal plane, and stereoscopic vision sense is built. The presentation mode is depth perception formed by binocular parallax, dynamic focus adjustment of two eyes is not supported, although the binocular parallax is changed, the focus is unchanged, and synchronous adjustment for watching the real world cannot be achieved, so that convergence adjustment conflict is easy to occur, and phenomena such as dizziness, nausea and the like are shown;
in order to solve the above technical problems, the present application proposes that each lens 2 in the microlenses 2 is made of an electrostrictive material, and correspondingly, each lens 2 is provided with a deformation driving structure 11, and the height of the arch of each lens 2 in the vertical direction is controlled by a field generated by the deformation driving structure 11, specifically, when the field is in the forward direction, the corresponding lens 2 deforms along the vertical square to increase the height of the arch in the vertical direction; at this time, since the height of the lens 2 is increased, light emitted by the pixel point will be refracted by the micro lens 2 and then reversely converged at a1 ″, as can be seen from the figure, the plane where the a1 ″ is located and the plane where the a1 is located are not located on the same plane, so that the focal length adjustment of a single lens 2 is realized, and of course, the focal lengths of a plurality of lenses 2 can be adjusted according to needs, and the specific adjustment process is the same as the above steps, so that redundant description is not given here; in summary, according to the present disclosure, different deformation driving structures 11 are driven to change the height change of the lens 2 corresponding to different pixel regions in the vertical direction, so that different pixel regions are displayed on different focal planes, that is, the emergent position of the light emitted from each pixel point can be changed, thereby outputting an optical field image, and realizing the random switching of the focal distance between the near view and the far view of the image, so that human eyes can see different depth-of-field images.
As shown in fig. 2 to 5, in one embodiment of the present invention, the deformation driving structure 11 includes:
the first driving electrode 3 is electrically connected to the outer side of the packaging layer 13;
the second driving electrode 4 is arranged above the first driving electrode 3 at intervals through a supporting layer 5, and a lens 2 is arranged in a space formed between the second driving electrode 4 and the first driving electrode 3; preferably, the support layer 5 is provided as a support column.
Specifically, as shown in fig. 4, a space for deformation of the lens 2 is formed between the first driving electrode 3 and the second driving electrode 4 through the supporting layer 5, and in operation, an electric field with adjustable strength is generated between the first driving electrode 3 and the second driving electrode 4, and the electric field penetrates through the lens 2 made of the high-transmittance electrostrictive material, so that the lens 2 deforms according to a direction along the electric field; in the present embodiment, in order to change the vault height of the lens 2 in the vertical direction, therefore, the first driving electrode 3 and the second driving electrode 4 are spaced apart along the vertical direction by the support layer 5; for convenience of understanding, the direction in which the first driving electrode 3 diverges the electric field to the second driving electrode 4 is set to be a forward direction, and the direction in which the second driving electrode 4 diverges the electric field to the first driving electrode 3 is set to be a reverse direction; when the focal length of a certain lens 2 needs to be increased, only the first driving electrode 3 needs to be ensured to disperse the forward electric field to the second driving electrode 4, at this time, the lens 2 is deformed in the direction of increasing the arch height along the vertical direction under the action of the forward electric field, so that the focal length of the lens 2 is increased; when the focal length is required to be restored to the initial length, the power supply of the first driving electrode 3 and the power supply of the second driving electrode 4 are only required to be cut off, the electric field arranged between the first driving electrode and the second driving electrode is ensured to disappear, and at the moment, the lens 2 is restored to the initial state under the action of the elastic force of the lens 2; when the lens 2 is in the initial state, the display screen 14 displays a 2D audio image, and when the height of the lens 2 changes, the display screen 14 displays a 3D audio image, and the free switching between 2D and 3D can be realized by controlling the electric field applied to the lens 2.
In a preferred embodiment, since each lens 2 is controlled by a set of first driving electrode 3 and second driving electrode 4, the microlens array can realize that the camber of a part of the lens 2 changes according to needs, and the part of the lens 2 remains unchanged, while the camber of the changed lens 2 can also change to different degrees according to needs.
According to an embodiment of the present invention, as shown in a and b of fig. 2, a plurality of focusing structures 12 are further disposed in the microlens array, and a plurality of the focusing structures 12 correspond to a plurality of the deformation driving structures 11 for preventing compatible adhesion between every two adjacent lenses 2; specifically, in the present embodiment, the initial state of the lens 2 is a droplet, and the initial state is printed on the corresponding first driving electrode 3 by using a printing technique, and finally the lens 2 is formed by curing, in order to avoid that compatible adhesion occurs between every two connected droplets during the printing process and affects the molding of the lens 2, the present embodiment adds the aggregation structure 12 to avoid the above technical problem, in one embodiment, as shown in a, b and fig. 5 in fig. 2, the aggregation structure 12 includes:
the first wire electrode 9 is electrically connected to the outer side of the packaging layer 13;
the second linear electrodes 10 are arranged above the first linear electrodes 9 in a staggered mode, and lenses 2 are arranged in the areas formed by the second linear electrodes 10 and the first linear electrodes 9 in a staggered mode; the first line electrode 9 and the second line electrode 10 are matched to focus the liquid drops of the lens 2 in the area, and the liquid drops do not spread out of the area.
In another embodiment, as shown in fig. 16-18, the concentrating structures 12 are provided as hydrophobic layers provided on the side wall surfaces of the support layer 5 close to the lenses 2; so that the supporting layer 5 is close to the side wall surface of the lens 2 and different from the surface tension of the lower wall surface, thereby ensuring that the liquid drops of the lens 2 are gathered between two adjacent supporting columns without leaving on the side wall surface of the supporting layer 5, and further ensuring the molding effect of the lens 2.
In yet another embodiment, as shown in fig. 6 to 12, the deformation driving structure 11 includes:
a first drive electrode 3;
a second drive electrode 4;
the control unit 6 is electrically connected to the outer side of the packaging layer 13, the lens 2 is installed on the control unit 6, and the control unit 6 is made of an electrostrictive material and is electrically connected with the first driving electrode 3 and the second driving electrode 4 respectively;
under the action of the first driving electrode 3 and the second driving electrode 4, the field controls the control unit 6 to deform, so as to drive the lens 2 to deform in the direction of changing the arch height.
Specifically, in one embodiment, as shown in fig. 6-8, the first driving electrode 3 and the second driving electrode 4 are both bent into a drum structure, and both ends of the drum structure are overlapped on two opposite wall surfaces of the control unit 6, and in this embodiment, it is preferable that both ends of the drum structure are overlapped on two upper and lower wall surfaces of the control unit 6; as shown in fig. 7, since the centers of the first driving electrode 3 and the second driving electrode 4 are on a straight line, and the straight line is parallel to the backplate 1, the direction of the electric field generated between the first driving electrode 3 and the second driving electrode 4 is also parallel to the backplate 1, that is, the control unit 6 deforms along the horizontal direction under the action of the electric field force, thereby changing the height of the lens 2 in the vertical direction; for convenience of understanding, the direction in which the first driving electrode 3 diverges the electric field to the second driving electrode 4 is set to be a forward direction, and the direction in which the second driving electrode 4 diverges the electric field to the first driving electrode 3 is set to be a reverse direction; as shown in fig. 8, when the focal length of a certain lens 2 needs to be increased, it is only necessary to ensure that the first driving electrode 3 diverges the forward electric field to the second driving electrode 4, at this time, the control unit 6 will perform a deformation reducing action along the horizontal direction under the action of the forward electric field, and at the same time, the control unit 6 will give a focusing force to the lens 2, and the lens 2 will focus towards the center under the action of the focusing force, so as to increase the arch height of the lens 2 in the vertical direction, thereby increasing the focal length of the lens 2; in the same way, as shown in fig. 7, when the focal length of a certain lens 2 needs to be reduced, it is only necessary to ensure that the second driving electrode 4 diverges the reverse electric field to the first driving electrode 3, at this time, the control unit 6 will increase the deformation action along the horizontal direction under the action of the reverse electric field, meanwhile, the control unit 6 will give a diffusing force to the lens 2, the lens 2 will diffuse to the edge under the action of the diffusing force, so as to reduce the height of the lens 2 in the vertical direction, and further, the focal length of the lens 2 is reduced.
In another embodiment of the present invention, as shown in fig. 9-11, a ring electrode is disposed on the outer side of the encapsulation layer 13, one end of each of the two short electrodes is connected to the upper wall surface of the control unit 6, and the other end of each of the two short electrodes is connected to the first driving electrode 3, so as to form the first driving electrode 3 and the second driving electrode 4 connected to the two wall surfaces of the control unit 6, specifically, an electric field parallel to the back plate 1 is generated between the first driving electrode 3 and the second driving electrode 4, so that the control unit 6 deforms along the horizontal direction, thereby changing the arching height of the lens 2 in the vertical direction, and adjusting the focal length of the lens 2, and the specific adjusting process is the same as above, and therefore, it is not described herein again.
In order to avoid the occurrence of compatible adhesion between every two consecutive drops during printing, which affects the formation of the lens 2, the present embodiment adds a focusing structure 12 between the control unit 6 and the lens 2 to avoid the above technical problem, and in one embodiment, as shown in fig. 10, the focusing structure 12 includes: the micro-nano structure 7 is composed of a plurality of protruding structures 8 arranged at intervals, the distance between the protruding structures 8 in each micro-nano structure 7 is the same, liquid drops of the lens 2 are gathered on the micro-nano structure 7 under the gathering action of the micro-nano structure 7, diffusion cannot occur, and the forming effect of the liquid drops is guaranteed, wherein the specific micro-nano structure 7 can adopt structures such as micro-nano gratings, pits and protrusions, and in the embodiment, the micro-nano gratings are preferably selected.
In another embodiment of the present invention, as shown in fig. 12, the control unit 6 is configured as a control slot, the lens 2 is installed in the control slot, the first driving electrode 3 and the second driving electrode 4 are respectively electrically connected to two ends of the control slot, specifically, an electric field parallel to the back plate 1 is generated between the first driving electrode 3 and the second driving electrode 4, so that the control unit 6 deforms along the horizontal direction, further changes the height of the lens 2 in the vertical direction, and adjusts the focal length of the lens 2, and the specific adjustment process is the same as above, and therefore, it is not described herein too much.
According to an embodiment of the invention, as shown in fig. 13 to fig. 15, the deformation driving structure 11 is a micro-nano structure 7 composed of a plurality of protruding structures 8 arranged at intervals, and preferably, a ratio between a distance between every two adjacent protruding structures 8 and a width of each protruding structure 8 is greater than 1, so that a super-hydrophobic surface is formed on a wall surface where the micro-nano structure 7 is in contact with the lens 2; the lens 2 is correspondingly installed on the micro-nano structures 7, the distance between every two adjacent protruding structures 8 in each micro-nano structure 7 is equal, the distances between the protruding structures 8 in the micro-nano structures 7 are different, and preferably, the distances are sequentially increased to reduce the arch height of the lens 2.
Specifically, the liquid drop is in composite contact on the surface of the micro-nano structure 7, and can be represented by a cassie equation in an equilibrium state, wherein the formula is as follows:
cosθ1=f(1+cosθ2)-1
in the formula: theta1Is the apparent contact angle of the gas-liquid-solid composite surface; theta2Is the solid surface contact angle; f is the area fraction of solids in the composite contact surface;
wherein, the larger the surface roughness of the convex structure 8 is, the larger the surface contact angle is; the larger the distance between every two adjacent convex structures 8 is, the larger the contact angle is, and the larger the arch height of the lens 2 is.
In order to avoid that compatible adhesion occurs between every two connected droplets during printing and affects the formation of the lens 2, the present solution adds the focusing structure 12 to avoid the above technical problem, in one embodiment, as shown in fig. 13c and fig. 14, the focusing structure 12 is configured as a hydrophobic layer, and the hydrophobic layer is disposed on the side wall surface of the supporting layer 5 close to the lens 2; so that the supporting layer 5 is close to the side wall surface of the lens 2 and different from the surface tension of the lower wall surface, thereby ensuring that the liquid drops of the lens 2 are gathered between two adjacent supporting columns without leaving on the side wall surface of the supporting layer 5, and further ensuring the molding effect of the lens 2.
As shown in fig. 1-20, the present application provides a method of manufacturing a 3D light field display device, the method comprising:
preparing a display screen 14;
the micro lens array is mounted on one side of the light-emitting surface of the display screen 14.
The following detailed description of the specific fabrication method of the microlens array is made with reference to the accompanying drawings:
a method of making a microlens array, the method comprising:
preparing a back plate 1;
a plurality of deformation driving structures 11 corresponding to the pixel regions are formed on the outer side of the packaging layer 13 of the back plate 1 in an array manner;
a plurality of lenses 2 are made of electrostrictive material, and the plurality of lenses 2 are correspondingly arranged on the plurality of deformation driving structures 11.
According to an embodiment of the present invention, in the step of forming a plurality of deformation driving structures 11 corresponding to pixel regions in an array outside the encapsulation layer 13 of the backplane 1, the method further includes:
a plurality of gathering structures 12 corresponding to the pixel regions are formed on the outer side of the packaging layer 13 of the back plate 1 in an array manner;
depositing an insulating layer;
the array is formed with a plurality of deformation-actuating structures 11 corresponding to the gathering structures 12.
In one embodiment, as shown in fig. 2-5, the method includes:
preparing a back plate 1;
as shown in fig. 20, the film structure sequentially includes from bottom to top: polysilicon layer 16(P-Si) → first inorganic layer 17(GI) → Gate insulating layer 18(Gate) → second inorganic layer 19(ILD) → mons tube 20(SD) → back-plate 1 insulating layer (PVX) → organic layer 22(PLN) → anode 23(AND) → back-plate 1 defining layer (PDL) → light-emitting layer 25(EL) → cathode ray tube 26 (cathode).
The specific lamination process of the film layer is the prior art, and therefore, is not described herein in detail.
As shown in fig. 2a, step S1, coating a transparent electrode on the outer side of the packaging layer 13 of the back plate 1, patterning to form a plurality of first line electrodes 9, and depositing an insulating layer;
wherein, the first electrode is a transverse electrode, namely parallel to the length direction of the back plate 1; and preferably, the transparent electrode is coated on the packaging layer 13 by adopting a sputtering mode; the insulating layer is made of SiO, SiN or the like.
As shown in fig. 2b, step S2, coating a transparent electrode on the outside of the insulating layer, patterning to form a plurality of second line electrodes 10, and depositing an insulating layer;
wherein, the first electrode is a longitudinal electrode, namely is parallel to the width direction of the back plate 1; and preferably, the transparent electrode is coated on the insulating layer in a sputtering mode; the insulating layer is made of SiO, SiN or the like.
As shown in fig. 2c, step S3, coating a transparent electrode on the outside of the insulating layer, and patterning to form a plurality of first driving electrodes 3;
among them, preferably, a plurality of first driving electrodes 3 are patterned by using an etching technique;
as shown in fig. 2d, step S4, depositing an insulating layer, preferably SiO or SiN;
as shown in fig. 2e and 3, a step S5 of coating a photosensitive PR film to form a PR layer as a mask;
specifically, the PR layer is formed through an exposure and development process. To serve as a mask;
depositing liquid drops made of electrostrictive materials with the same volume onto the corresponding first driving electrodes 3 through a PR glue layer, forming lenses 2 after low-temperature curing, and removing the PR glue layer;
specifically, the droplets of the lens 2 are continuously printed on the first driving electrode 3 by an ink-jet printing method, and the arrow direction in the figure is the printing direction.
As shown in fig. 2f, step S6, a layer of glue material is coated and patterned to form the support layer 5;
as shown in fig. 2g, step S7, coating a transparent electrode on the side of the cover 15 close to the support layer 5, and patterning to form a plurality of second driving electrodes 4 corresponding to the first driving electrodes 3;
specifically, and preferably, a transparent electrode is coated on one side of the package cover plate 15 close to the support layer 5 by sputtering;
the package cover 15 is mounted on the support layer 5 and edge-packaged.
Compared with the prior art, the method has simple process, can integrate the micro lens 2 with the device, and realizes the light field display with high brightness, light weight, high resolution, low crosstalk and multiple depths of field.
In yet another embodiment, as shown in fig. 16-19, the method includes:
preparing a back plate 1;
as shown in fig. 16a, a layer of transparent electrode is coated on the outer side of the encapsulation layer 13 of the back plate 1, and a plurality of first driving electrodes 3 are formed by patterning;
among them, preferably, a plurality of first driving electrodes 3 are patterned by using an etching technique;
depositing an insulating layer, preferably SiO or SiN;
as shown in fig. 16b, a layer of glue material is coated, and a supporting layer 5 is formed by patterning;
specifically, the HPDL is formed by patterning in a photolithographic manner and is used as a limiting layer of the lens 2 and the support layer 5, and preferably, the height of the support layer 5 is greater than that of the lens 2;
as shown in fig. 16c, a hydrophobic layer is formed on the wall surface of the support layer 5 on the side close to the lens 2 through exposure, development and other processes, so that the surface tension of the side wall surface and the lower wall surface of the support layer 5 are different, thereby ensuring that the liquid drops of the lens 2 are gathered in the support layer 5.
As shown in fig. 16d, a photosensitive PR film is coated to form a PR layer as a mask;
specifically, the PR layer is formed through an exposure and development process. To serve as a mask;
as shown in fig. 17, droplets made of electrostrictive material with the same volume are deposited on the corresponding first driving electrodes 3 through a PR glue layer, and a lens 2 is formed after low-temperature curing, and the PR glue layer is removed;
specifically, the droplets of the lens 2 are continuously printed on the first driving electrode 3 by adopting an ink-jet printing mode;
as shown in fig. 16e, a transparent electrode is coated on one side of the encapsulating cover 15 close to the supporting layer 5, and a plurality of second driving electrodes 4 corresponding to the first driving electrodes 3 are patterned;
specifically, and preferably, a transparent electrode is coated on one side of the package cover plate 15 close to the support layer 5 by sputtering;
the package cover 15 is mounted on the support layer 5 and edge-packaged.
In a preferred embodiment, as shown in fig. 6-8, the method comprises:
preparing a back plate 1;
coating a layer of electrostrictive material on the outer side of the packaging layer 13 of the back plate 1, and patterning the electrostrictive material by an etching technology to form a control unit 6;
the first driving electrode 3 and the second driving electrode 4 are bent into an I shape and are lapped on the upper surface and the lower surface of the control unit 6;
coating a photosensitive PR film to form a PR layer as a mask;
specifically, the PR layer is formed through an exposure and development process. To serve as a mask;
depositing liquid drops made of electrostrictive materials with the same volume onto the corresponding control unit 6 through a PR glue layer in an ink-jet printing mode, forming a lens 2 after low-temperature curing, and removing the PR glue layer;
the rest of the processes are the same as those in the other embodiments, and therefore, are not described herein.
In yet another embodiment, as shown in fig. 13-15, the method includes:
preparing a back plate 1;
as shown in fig. 13a, a layer of resin adhesive material is coated on the outer side of the encapsulation layer 13 of the back plate 1, and the micro-nano structures 7 with gradually increasing intervals are prepared in a nano-imprinting or EB direct writing manner, wherein the micro-nano gratings are preferred;
as shown in fig. 13b, a layer of photoresist is coated on the upper layer of the micro-nano grating and patterned by means of exposure and development to prepare a support layer 5;
specifically, in this embodiment, PDL is preferably selected as the support layer 5;
as shown in fig. 13c, a layer of hydrophobic material is coated on the support layer 5, and is patterned to leak out the micro-nano grating region;
as shown in fig. 13d, liquid drops are dropped onto every two adjacent support layer 5 micro-nano gratings by means of printing or coating, at this time, due to the fact that the support layer 5 covers the hydrophobic layer and the hydrophobic regulation and control function of the lower micro-nano structure 7, the lens 2 structures with different curvature radiuses are formed and are cured at low temperature;
as shown in fig. 13e, an encapsulating cover plate 15, preferably of transparent glass, is applied over the support layer 5 and edge-encapsulated to ensure that sufficient space for deformation is given to the lens 2.
In yet another embodiment, as shown in fig. 9-11, the method includes:
preparing a back plate 1;
as shown in fig. 9a, a layer of transparent electrode is sputtered on the outer side of the encapsulation layer 13 and patterned into a ring-shaped first driving electrode 3 by photolithography;
as shown in fig. 9b, an insulating layer is deposited and patterned to expose a portion of the electrodes for electrical connection of the second driving electrode 4;
as shown in fig. 9c, a layer of electro-stretch material is coated on the insulating layer and patterned to correspond to the first driving electrode 3;
as shown in fig. 9d, a layer of transparent electrode is deposited and patterned into the second driving electrode 4 by photolithography, and electrically connected to the first driving electrode 3 through the via hole;
as shown in fig. 9e, a plurality of micro-nano structures 7 with the same distance are prepared on the second driving electrode 4 by means of nano-imprinting, EB direct writing or photolithography, in this embodiment, preferably, a micro-nano grating is adopted to ensure the effect of collecting droplets of the lens 2;
as shown in fig. 9f, the droplets are dropped to the micro-nano grating area by printing or coating, the diameter of the droplets is controlled by controlling the amount of the added droplets, and the preferred grating area is larger than the size of the droplets;
as shown in fig. 9g, a layer of resin glue is coated and patterned to prepare a support layer 5;
finally, the cover 15 is closed and sealed at its periphery, as shown in fig. 9 h.
The embodiments in the present description are all described in a progressive manner, and some of the embodiments are mainly described as different from other embodiments, and the same and similar parts among the embodiments can be referred to each other.
It is noted that in the description and claims of the present application and in the above-mentioned drawings, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein.
Also, the terms "comprises," "comprising," and "having," as well as any variations thereof or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not explicitly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications and changes to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (15)

1. A microlens array, comprising:
the display panel comprises a back plate (1), wherein the outer side of a packaging layer (13) of the back plate (1) is electrically connected with a plurality of deformation driving structures (11), and the deformation driving structures (11) are arranged in an array and correspond to a plurality of pixel regions;
the lenses (2) are made of electrostrictive materials, and the lenses (2) are correspondingly arranged on the deformation driving structures (11);
wherein, under the action of the deformation driving structure (11), the field control lens (2) deforms towards the direction of changing the arch height.
2. The microlens array according to claim 1, wherein the deformation driving structure (11) comprises:
the first driving electrode (3) is electrically connected to the outer side of the packaging layer (13);
and the second driving electrode (4) is arranged above the first driving electrode (3) at intervals through a supporting layer (5), and a lens (2) is arranged in a space formed between the second driving electrode (4) and the first driving electrode (3).
3. The microlens array according to claim 1, wherein the deformation driving structure (11) comprises:
a first drive electrode (3);
a second drive electrode (4);
the control unit (6) is electrically connected to the outer side of the packaging layer (13), the lens (2) is installed on the control unit (6), and the control unit (6) is made of an electrostrictive material and is electrically connected with the first driving electrode (3) and the second driving electrode (4) respectively;
under the action of the first driving electrode (3) and the second driving electrode (4), the field controls the control unit (6) to deform so as to drive the lens (2) to deform in the direction of changing the arch height of the lens.
4. Microlens array according to claim 3, characterized in that the first (3) and second (4) drive electrodes are each bent into a drum structure, and both ends of the drum structure are lapped on two opposite walls of the control unit (6).
5. The microlens array as claimed in claim 4, wherein the control unit (6) is configured as a control slot, the lens (2) is installed in the control slot, and the first driving electrode (3) and the second driving electrode (4) are respectively electrically connected to two ends of the control slot.
6. The micro lens array according to claim 1, wherein the deformation driving structure (11) is provided as a micro-nano structure (7) composed of a plurality of protruding structures (8) arranged at intervals, the lenses (2) are correspondingly arranged on the micro-nano structure (7), and the distances between the protruding structures (8) in the micro-nano structure (7) can be the same or different.
7. The microlens array as claimed in claim 6, wherein the ratio of the pitch between every two adjacent raised structures (8) to the width of the raised structures (8) is greater than 1.
8. The microlens array according to claim 7, wherein a plurality of focusing structures (12) are further provided in the microlens array, and a plurality of focusing structures (12) correspond to a plurality of deformation-driving structures (11) for preventing compatible adhesion between every two adjacent lenses (2).
9. The microlens array according to claim 8, wherein the focusing structure (12) comprises:
the first line electrode (9) is electrically connected to the outer side of the packaging layer (13);
and the second linear electrodes (10) are arranged above the first linear electrodes (9) in a staggered manner, and lenses (2) are arranged in the areas formed by the second linear electrodes (10) and the first linear electrodes (9) in a staggered manner.
10. Microlens array according to claim 8, characterized in that the focusing structure (12) is provided as a hydrophobic layer which is provided on a side wall face of the supporting layer (5) which is close to the lenses (2).
11. A3D display device, comprising: display screen (14) and a microlens array according to any of claims 1 to 10, which is arranged on the side of the light exit face of the display screen (14).
12. A method of fabricating a microlens array, the method comprising:
preparing a back sheet (1);
a plurality of deformation driving structures (11) corresponding to the pixel regions are formed on the outer side of the packaging layer (13) of the back plate (1) in an array mode;
a plurality of lenses (2) are prepared from electrostrictive materials, and the lenses (2) are correspondingly arranged on the deformation driving structures (11).
13. The method for manufacturing a micro lens array according to claim 12, wherein a plurality of deformation driving structures (11) corresponding to pixel regions are formed outside the packaging layer (13) of the back plate (1); adopting electrostrictive material to prepare a plurality of lenses (2), and correspondingly installing a plurality of lenses (2) on a plurality of steps on deformation drive structure (11), specifically including:
coating a layer of transparent electrode on the outer side of the packaging layer (13) of the back plate (1), forming a plurality of first driving electrodes (3) in a patterning mode, and depositing an insulating layer;
coating a photosensitive PR film to form a PR layer as a mask;
depositing liquid drops made of electrostrictive materials with the same volume onto the corresponding first driving electrodes (3) through a PR glue layer, forming a lens (2) after low-temperature curing, and removing the PR glue layer;
coating a layer of rubber material, and forming a supporting layer (5) through patterning;
coating a layer of transparent electrode on one side of the packaging cover plate (15) close to the supporting layer (5), and patterning to form a plurality of second driving electrodes (4) corresponding to the first driving electrodes (3);
and mounting the packaging cover plate (15) on the supporting layer (5) and performing edge packaging.
14. The method for manufacturing a micro lens array according to claim 12, wherein the step of forming a plurality of deformation driving structures (11) corresponding to pixel regions on the outer side of the package layer of the backplate (1) further comprises:
a plurality of gathering structures (12) corresponding to the pixel regions are formed on the outer side of the packaging layer (13) of the back plate (1) in an array mode;
depositing an insulating layer;
the array is formed with a plurality of deformation-driving structures corresponding to the gathering structure (12).
15. A method of making a 3D light field display device, the method comprising:
preparing a display screen (14);
mounting a microlens array prepared by the method of any one of claims 12-14 on a light exit surface side of the display screen (14).
CN202110194479.7A 2021-02-20 2021-02-20 Microlens array, 3D display device and preparation method of microlens array Active CN113009604B (en)

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