CN113008453A - Vacuum degree detection method, system and device based on resonator - Google Patents
Vacuum degree detection method, system and device based on resonator Download PDFInfo
- Publication number
- CN113008453A CN113008453A CN202110257548.4A CN202110257548A CN113008453A CN 113008453 A CN113008453 A CN 113008453A CN 202110257548 A CN202110257548 A CN 202110257548A CN 113008453 A CN113008453 A CN 113008453A
- Authority
- CN
- China
- Prior art keywords
- resonator
- signal
- vacuum degree
- vacuum
- excitation signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 45
- 230000005284 excitation Effects 0.000 claims abstract description 47
- 238000012545 processing Methods 0.000 claims abstract description 16
- 230000009471 action Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 6
- 238000002474 experimental method Methods 0.000 claims description 5
- 238000013016 damping Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 6
- 238000009461 vacuum packaging Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
- G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present disclosure provides a vacuum degree detection method based on a resonator, including: sending out an excitation signal; receiving the excitation signal and generating an output signal under the action of the excitation signal; converting the output signal to a digital signal; controlling and adjusting the excitation signal to enable the excitation signal to resonate with the natural frequency of the resonator, and processing the digital signal to obtain a vibration amplitude corresponding to the resonator under the real-time vacuum degree; and processing the vibration amplitude into a real-time vacuum value and displaying the real-time vacuum value. The present disclosure also provides a vacuum degree detection system based on the resonator and a vacuum degree detection device based on the resonator.
Description
Technical Field
The present disclosure relates to the field of detection technologies, and in particular, to a vacuum degree detection method, system, and apparatus based on a resonator.
Background
MEMS (Micro-Electro-Mechanical systems ) generally refers to a System manufactured by combining various Micro-processing technologies such as silicon Micro-processing and precision machining on the order of micrometers, and is suitable for low-cost mass production. The packaging is used as the last procedure in the process manufacturing of the MEME device, on one hand, the connection and the isolation with the outside can be realized, and on the other hand, the performance of the chip, such as the service life and the reliability of the chip, can be improved. In addition, only the packaged chip can become a product for practical application. Encapsulation plays an important role in the maturation and productization of MEMS devices. The packaging is divided into three types, namely metal packaging, ceramic packaging and plastic packaging according to different packaging materials; the packaging method is divided according to the air tightness requirement and comprises non-air tightness packaging, air tightness packaging and vacuum packaging. Because the vacuum packaging can insulate heat and insulate air and damp, the quality factor of the device can be effectively improved, the energy consumed by the system is reduced, and the performance of the device is improved, and some MEMS devices such as a micro-accelerometer, a micro-gyroscope, a flowmeter, a micro-chromatograph and the like are often packaged in vacuum. The conventional MEMS wafer level vacuum packaging technology mainly comprises anodic bonding, silicon-silicon fusion bonding, adhesive bonding, glass solder sintering bonding, eutectic bonding, polycrystalline silicon film deposition packaging and the like, and the difference of vacuum environments provided by different vacuum packaging modes is large. The gas pressure in a vacuum environment is usually represented by vacuum degree, the vacuum degree of a cavity of the device and the maintaining time determine whether the vacuum-packaged MEMS device can normally work, so that the detection and real-time monitoring of the vacuum degree in the cavity are very important for the vacuum-packaged MEMS device.
Because the MEMS device is small in size, the conventional vacuum gauge cannot measure the vacuum degree in a small or miniature vacuum cavity, and the conventional MEMS device vacuum degree detection methods mainly comprise an inert gas helium detection method, a resonator Q value detection method and a miniature Pirani gauge. The helium leak detector manufactured by the helium detection method is very high in price and low in test precision, and the change of the vacuum degree in the cavity cannot be detected in real time. The Q value detection method is used for measuring the Q value of the MEMS resonator in the vacuum packaging cavity, and the measurement error is large. The micro Pirani gauge is limited by the resistance temperature coefficient of the thin film material, and the sensitivity is low.
Therefore, it is an urgent technical problem to find a new vacuum degree detection method to solve the above problems.
Disclosure of Invention
Technical problem to be solved
Based on the above problems, the present disclosure provides a method, a system, and a device for detecting a vacuum degree based on a resonator, so as to alleviate the technical problems of low test accuracy, low sensitivity, high cost, and the like of the method for detecting a vacuum degree of an MEMS device in the prior art.
(II) technical scheme
In one aspect of the present disclosure, a vacuum degree detection method based on a resonator is provided, including: sending out an excitation signal; receiving the excitation signal and generating an output signal under the action of the excitation signal; converting the output signal to a digital signal; controlling and adjusting the excitation signal to enable the excitation signal to resonate with the natural frequency of the resonator, and processing the digital signal to obtain a vibration amplitude corresponding to the resonator under the real-time vacuum degree; and processing the vibration amplitude into a real-time vacuum value and displaying the real-time vacuum value.
In the disclosed embodiment, the emitted excitation signal is a sinusoidal excitation signal with a frequency that varies continuously by generating a constant amplitude with a sinusoidal generator.
In the embodiment of the present disclosure, converting the output signal into a digital signal includes subjecting the output signal to the action of a gain amplifying circuit and a filter circuit, and then sampling the output signal by an analog-to-digital converter and converting the output signal into the digital signal.
In the embodiment of the disclosure, when the vacuum degree in the cavity to be measured changes, the vibration amplitude of the resonator changes due to air damping when the resonator resonates, and the voltage value of the corresponding output signal also changes correspondingly.
In the disclosed embodiment, the vacuum degree value P is:
P＝F-1(x)；
wherein, P is the pressure in the vacuum chamber to be measured, x is the vibration amplitude, and F is the functional relation between the vibration amplitude x obtained by the calibration experiment and the value P to be measured.
In another aspect of the present disclosure, there is also provided a vacuum degree detection system based on a resonator, including: the sine wave generator is used for sending out an excitation signal; the vacuum degree detection device based on the resonator is connected with the sine wave generator and is used for receiving the excitation signal and generating an output signal under the action of the excitation signal; the analog-to-digital converter is connected with the vacuum degree detection device and is used for converting the output signal into a digital signal; the single chip microcomputer is simultaneously connected with the sine wave generator and the analog-to-digital converter, controls and adjusts the working state of the sine wave generator to enable the excitation signal to resonate with the natural frequency of the resonator in the vacuum degree detection device, and processes the digital signal to obtain the vibration amplitude corresponding to the resonator in real-time vacuum degree; and the upper computer is connected with the single chip microcomputer and is used for processing the vibration amplitude into a real-time vacuum degree value and displaying the real-time vacuum degree value.
In the embodiment of the disclosure, the sine wave generator sends out a sine excitation signal with a constant amplitude and continuously changing frequency under the control of the single chip microcomputer.
In still another aspect of the present disclosure, there is also provided a vacuum degree detection apparatus based on a resonator, including: the resonator is arranged in a cavity with the vacuum degree to be detected and used for generating a first signal after an excitation signal is applied; the gain adjusting module is connected with the resonator and used for processing the first signal and then generating a second signal; and the band-pass filtering module is connected with the gain phase adjusting module and used for reducing the noise of the second signal and improving the signal-to-noise ratio to generate an output signal.
In an embodiment of the present disclosure, the gain phase adjustment module includes: an amplifier for amplifying the first signal.
In an embodiment of the present disclosure, the gain phase adjustment module further includes: and the phase adjuster is used for adjusting the phase of the amplified first signal.
(III) advantageous effects
According to the technical scheme, the method, the system and the device for detecting the vacuum degree based on the resonator have at least one or part of the following beneficial effects:
(1) the detection of the pressure of the vacuum cavity in the MEMS device can be realized by using the amplitude change of the detection signal, the vacuum degree can be detected more accurately, and the corresponding adjustment can be made conveniently in time.
(2) The interference of external noise to the resonator is reduced, the output signal is large and stable, and the signal-to-noise ratio of the output signal is improved.
(3) The automatic degree is high, has reduced artifical intensity of labour, has improved detection efficiency, has shortened check-out time, has avoided artifical error.
Drawings
Fig. 1 is a schematic flow chart of a method for detecting a vacuum degree based on a resonator according to an embodiment of the present disclosure.
FIG. 2 is a schematic diagram illustrating a structure of a vacuum detection system based on a resonator according to an embodiment of the present disclosure.
Fig. 3 is a schematic structural diagram of a vacuum degree detection device based on a resonator according to an embodiment of the disclosure.
Detailed Description
The invention provides a vacuum degree detection method, a system and a device based on a resonator, which utilize the characteristics of small volume, stable performance, simple processing and easy integration of the resonator, the resonator is arranged in a tube shell or a cavity of an MEMS device, the detection of the pressure of a vacuum cavity in the MEMS device is realized by detecting the amplitude change of the output signal of the MEMS resonator based on the principle that the amplitude of the output signal of the resonator can change along with the vacuum (pressure) and the amplitude and the voltage have a relation, under the condition of constant excitation, the amplitude of the output signal of the resonator in vacuum packaging is indirectly obtained by measuring the output voltage of the resonator, the pressure in the cavity is converted according to the amplitude change, and the vacuum degree in the cavity of the MEMS device is detected.
For the purpose of promoting a better understanding of the objects, aspects and advantages of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.
In an embodiment of the present disclosure, a method for detecting a vacuum degree based on a resonator is provided, as shown in fig. 1, the method includes:
operation S1: sending out an excitation signal;
operation S2: receiving the excitation signal and generating an output signal under the action of the excitation signal;
operation S3: converting the output signal to a digital signal;
in operation S3, the output signal is subjected to the action of a gain amplifier circuit and a filter circuit, and then sampled by an analog-to-digital converter, and converted to obtain a digital signal;
operation S4: controlling and adjusting the excitation signal to enable the excitation signal to resonate with the natural frequency of the resonator, and processing the digital signal to obtain a vibration amplitude corresponding to the resonator under the real-time vacuum degree;
operation S5: and processing the vibration amplitude into a real-time vacuum value and displaying the real-time vacuum value.
And calculating the vacuum degree value through the function relation between the amplitude and the vacuum degree value to be measured, and finally displaying the vacuum degree value on the upper computer in real time.
Through a calibration experiment, the functional relation between the vacuum degree value P and the amplitude x is obtained as follows:
x＝F(P)；
through mathematical transformation, the vacuum value P to be measured is obtained through the back-stepping of a functional relation formula obtained by a calibration experiment:
P＝F-1(x)；
wherein, P reflects the pressure in the vacuum chamber, x is the amplitude, and F is the function relation between the amplitude x obtained by the calibration experiment and the value P to be measured.
In operation S1, a sinusoidal excitation signal Vi of constant amplitude and continuously varying frequency is generated by a sine wave generator.
In an embodiment of the present disclosure, as shown in fig. 2, there is provided a resonator-based vacuum degree detection system for performing the above-mentioned detection method, the detection system including:
the sine wave generator is used for sending out an excitation signal;
the vacuum degree detection device based on the resonator is connected with the sine wave generator and is used for receiving the excitation signal and generating an output signal under the action of the excitation signal;
the analog-to-digital converter is connected with the vacuum degree detection device and is used for converting the output signal into a digital signal;
the single chip microcomputer is simultaneously connected with the sine wave generator and the analog-to-digital converter, controls and adjusts the working state of the sine wave generator to enable a resonator in the vacuum degree detection device to generate resonance, and processes the digital signal to obtain the amplitude value of the cavity to be detected under the real-time vacuum degree; and
and the upper computer is connected with the single chip microcomputer and is used for processing the amplitude into a real-time vacuum degree value and displaying the real-time vacuum degree value.
The single chip microcomputer is used for controlling the sine wave generator to generate a sine excitation signal Vi with constant amplitude and continuously changing frequency;
and the upper computer realizes the communication of the control command and the digital command. The single chip microcomputer receives a control command signal of the upper computer and starts to detect the vacuum degree in the cavity; and the vacuum degree is displayed on an upper computer in real time, so that the automatic detection of the vacuum degree is realized.
In an embodiment of the present disclosure, there is further provided a vacuum degree detection apparatus based on a resonator, which is shown in fig. 2 and 3, and includes:
the resonator is arranged in a cavity with the vacuum degree to be detected and used for generating a first signal after an excitation signal is applied;
the gain phase adjustment module (which can be added with phase adjustment) is connected with the resonator and is used for amplifying and phase-adjusting the first signal to generate a second signal; and
and the band-pass filtering module is connected with the gain phase adjusting module and used for reducing the noise of the second signal and improving the signal-to-noise ratio to generate an output signal.
The excitation signal is a sinusoidal signal of constant amplitude and continuously varying frequency.
The gain phase adjustment module includes:
an amplifier for amplifying the first signal; and
and the phase adjuster is used for adjusting the phase of the amplified first signal.
A sinusoidal excitation signal Vi of constant amplitude and continuously varying frequency is applied to the driving electrodes of the resonator, and when the frequency of the excitation signal and the natural frequency of the resonator are equal, both will resonate, with the maximum amplitude of vibration at the resonant frequency of the resonator.
The resonance frequency of the resonator is unchanged under constant excitation, but when the air pressure (vacuum degree) in the cavity changes, the vibration amplitude of the resonator changes due to air damping, the amplitude value and the voltage have a certain corresponding relation, and the voltage value of the corresponding output signal also changes correspondingly. The vacuum degree is calculated through the function relation among the amplitude, the voltage and the vacuum degree. And finally, the real-time detection of the vacuum degree in the cavity is realized by detecting the amplitude change of the resonator at the resonance frequency point.
So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. Further, the above definitions of the various elements and methods are not limited to the various specific structures, shapes or arrangements of parts mentioned in the examples, which may be easily modified or substituted by those of ordinary skill in the art.
From the above description, those skilled in the art should clearly recognize that the present disclosure is based on a method, system, and apparatus for detecting vacuum level of a resonator.
In summary, the present disclosure provides a method, a system, and a device for detecting a vacuum degree based on a resonator, which can accurately detect the vacuum degree, reduce interference of external noise, and improve a signal-to-noise ratio of an output signal.
It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", and the like, used in the embodiments are only directions referring to the drawings, and are not intended to limit the scope of the present disclosure. Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present disclosure.
And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
In addition, unless steps are specifically described or must occur in sequence, the order of the steps is not limited to that listed above and may be changed or rearranged as desired by the desired design. The embodiments described above may be mixed and matched with each other or with other embodiments based on design and reliability considerations, i.e., technical features in different embodiments may be freely combined to form further embodiments.
Those skilled in the art will appreciate that the modules in the device in an embodiment may be adaptively changed and disposed in one or more devices different from the embodiment. The modules or units or components of the embodiments may be combined into one module or unit or component, and furthermore they may be divided into a plurality of sub-modules or sub-units or sub-components. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the processes or elements of any method or apparatus so disclosed, may be combined in any combination, except combinations where at least some of such features and/or processes or elements are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also in the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware.
The above-mentioned embodiments are intended to illustrate the objects, aspects and advantages of the present disclosure in further detail, and it should be understood that the above-mentioned embodiments are only illustrative of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present disclosure should be included in the scope of the present disclosure.
Claims (10)
1. A vacuum degree detection method based on a resonator comprises the following steps:
sending out an excitation signal;
receiving the excitation signal and generating an output signal under the action of the excitation signal;
converting the output signal to a digital signal;
controlling and adjusting the excitation signal to enable the excitation signal to resonate with the natural frequency of the resonator, and processing the digital signal to obtain a vibration amplitude corresponding to the resonator under the real-time vacuum degree; and
and processing the vibration amplitude into a real-time vacuum value and displaying the real-time vacuum value.
2. The resonator-based vacuum level detection method of claim 1, wherein the emitted excitation signal is a sinusoidal excitation signal with a frequency that varies continuously by a sinusoidal wave generator generating a constant amplitude.
3. The method of claim 1, wherein converting the output signal to a digital signal comprises subjecting the output signal to a gain amplifier circuit and a filter circuit, sampling with an analog-to-digital converter, and converting to a digital signal.
4. The method for detecting the vacuum degree based on the resonator according to claim 1, wherein when the vacuum degree in the cavity to be detected changes, the vibration amplitude of the resonator changes when the resonator resonates due to air damping, and the voltage value of the corresponding output signal also changes correspondingly.
5. The method of claim 1, wherein the vacuum degree value P is:
P＝F-1(x)；
wherein, P is the pressure in the vacuum chamber to be measured, x is the vibration amplitude, and F is the functional relation between the vibration amplitude x obtained by the calibration experiment and the value P to be measured.
6. A resonator-based vacuum detection system, comprising:
the sine wave generator is used for sending out an excitation signal;
the vacuum degree detection device based on the resonator is connected with the sine wave generator and is used for receiving the excitation signal and generating an output signal under the action of the excitation signal;
the analog-to-digital converter is connected with the vacuum degree detection device and is used for converting the output signal into a digital signal;
the single chip microcomputer is simultaneously connected with the sine wave generator and the analog-to-digital converter, controls and adjusts the working state of the sine wave generator to enable the excitation signal to resonate with the natural frequency of the resonator in the vacuum degree detection device, and processes the digital signal to obtain the vibration amplitude corresponding to the resonator in real-time vacuum degree; and
and the upper computer is connected with the single chip microcomputer and is used for processing the vibration amplitude into a real-time vacuum degree value and displaying the real-time vacuum degree value.
7. The resonator-based vacuum detection system of claim 1, the sine wave generator emitting a sine excitation signal of constant amplitude and continuously varying frequency under control of the single chip microcomputer.
8. A resonator-based vacuum detection apparatus, comprising:
the resonator is arranged in a cavity with the vacuum degree to be detected and used for generating a first signal after an excitation signal is applied;
the gain adjusting module is connected with the resonator and used for processing the first signal and then generating a second signal; and
and the band-pass filtering module is connected with the gain phase adjusting module and used for reducing the noise of the second signal and improving the signal-to-noise ratio to generate an output signal.
9. The resonator-based vacuum detection apparatus of claim 8, the gain phase adjustment module comprising:
an amplifier for amplifying the first signal.
10. The resonator-based vacuum detection apparatus of claim 9, the gain phase adjustment module further comprising:
and the phase adjuster is used for adjusting the phase of the amplified first signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110257548.4A CN113008453A (en) | 2021-03-09 | 2021-03-09 | Vacuum degree detection method, system and device based on resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110257548.4A CN113008453A (en) | 2021-03-09 | 2021-03-09 | Vacuum degree detection method, system and device based on resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113008453A true CN113008453A (en) | 2021-06-22 |
Family
ID=76403398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110257548.4A Pending CN113008453A (en) | 2021-03-09 | 2021-03-09 | Vacuum degree detection method, system and device based on resonator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113008453A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114804013A (en) * | 2022-06-24 | 2022-07-29 | 河北美泰电子科技有限公司 | Wafer level packaging vacuum degree test method and wafer level packaging structure |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1127885A (en) * | 1995-01-23 | 1996-07-31 | 东南大学 | Electromagnetic force driven diaphragm vacuum gauge |
| JP2005331362A (en) * | 2004-05-20 | 2005-12-02 | Canon Inc | Vacuum gauge |
| JP2010127796A (en) * | 2008-11-28 | 2010-06-10 | Fuji Electric Holdings Co Ltd | Vacuum gauge |
| CN102103030A (en) * | 2009-12-16 | 2011-06-22 | 中国石油天然气股份有限公司 | Embedded heat insulation pipe vacuum degree online testing device and testing method |
| JP2011196833A (en) * | 2010-03-19 | 2011-10-06 | Fuji Electric Co Ltd | Vacuum gauge |
| JP2011196831A (en) * | 2010-03-19 | 2011-10-06 | Fuji Electric Co Ltd | Vacuum gauge |
| CN103134636A (en) * | 2013-01-22 | 2013-06-05 | 中国计量学院 | Optical fiber harmonic oscillator vacuum sensor |
| CN103940548A (en) * | 2014-04-15 | 2014-07-23 | 西安交通大学 | Double-end clamped quartz beam resonant mode vacuum degree sensor |
| CN104776954A (en) * | 2014-01-09 | 2015-07-15 | 中国计量学院 | Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor |
| CN105222949A (en) * | 2014-06-24 | 2016-01-06 | 中芯国际集成电路制造(上海)有限公司 | The method and apparatus of test vacuum tightness |
-
2021
- 2021-03-09 CN CN202110257548.4A patent/CN113008453A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1127885A (en) * | 1995-01-23 | 1996-07-31 | 东南大学 | Electromagnetic force driven diaphragm vacuum gauge |
| JP2005331362A (en) * | 2004-05-20 | 2005-12-02 | Canon Inc | Vacuum gauge |
| JP2010127796A (en) * | 2008-11-28 | 2010-06-10 | Fuji Electric Holdings Co Ltd | Vacuum gauge |
| CN102103030A (en) * | 2009-12-16 | 2011-06-22 | 中国石油天然气股份有限公司 | Embedded heat insulation pipe vacuum degree online testing device and testing method |
| JP2011196833A (en) * | 2010-03-19 | 2011-10-06 | Fuji Electric Co Ltd | Vacuum gauge |
| JP2011196831A (en) * | 2010-03-19 | 2011-10-06 | Fuji Electric Co Ltd | Vacuum gauge |
| CN103134636A (en) * | 2013-01-22 | 2013-06-05 | 中国计量学院 | Optical fiber harmonic oscillator vacuum sensor |
| CN104776954A (en) * | 2014-01-09 | 2015-07-15 | 中国计量学院 | Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor |
| CN103940548A (en) * | 2014-04-15 | 2014-07-23 | 西安交通大学 | Double-end clamped quartz beam resonant mode vacuum degree sensor |
| CN105222949A (en) * | 2014-06-24 | 2016-01-06 | 中芯国际集成电路制造(上海)有限公司 | The method and apparatus of test vacuum tightness |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114804013A (en) * | 2022-06-24 | 2022-07-29 | 河北美泰电子科技有限公司 | Wafer level packaging vacuum degree test method and wafer level packaging structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101970339B (en) | Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas | |
| US6481288B1 (en) | Measuring the speed of sound of a gas | |
| Tatar et al. | Stress effects and compensation of bias drift in a MEMS vibratory-rate gyroscope | |
| CN110902640B (en) | High-sensitivity MEMS resonant temperature sensor chip | |
| CN105940288A (en) | Electro-mechanical miniaturized device for pressure measurements | |
| CN113008453A (en) | Vacuum degree detection method, system and device based on resonator | |
| CN108007559A (en) | Vibrating sensor laser calibrating equipment and method under the conditions of a kind of thermal vacuum | |
| CN111412974B (en) | System and method for calibrating co-vibration vector sensor | |
| CN107748274B (en) | Method for detecting internal vacuum degree of accelerometer through servo circuit frequency sweep | |
| CN115031896B (en) | Capacitive film vacuum gauge detection device, vacuum gauge and detection method | |
| CN109141793B (en) | Shallow spherical thin shell vibration detection control device and method | |
| CN112964242B (en) | System and method for testing mechanical coupling error of quartz tuning fork gyroscope gauge head | |
| CN1401980A (en) | Method for mfg. microstructure resonance beam pressure sensor using SiNx as beam | |
| CN109855791B (en) | Vacuum detection device based on multi-folding supporting beam comb resonator | |
| CN104931193A (en) | MEMS Pirani gauge with reference vacuum chamber | |
| AU738992B2 (en) | Method and apparatus for determining a frequency at which a resonator resonates | |
| CN112798060B (en) | Resonant flow sensor | |
| CN207675357U (en) | A kind of pressure-detecting device based on synchro-resonance | |
| Hagleitner et al. | CMOS single-chip multisensor gas detection system | |
| EP3918294B1 (en) | System and method to determine temperature compensated pressure of a pressure transducer | |
| CN116124220A (en) | Multi-mode-based high-precision multi-trace-mass-position synchronous sensing device and method | |
| Zhao et al. | A high-performance oscillator based on RF MEMS resonator and low-noise sustaining circuit for timing applications | |
| CN116046220B (en) | Quartz resonance type pressure sensor based on single pressure conversion element | |
| CN114166934B (en) | Gas detection device and method based on graphene coated quartz tuning fork | |
| JPH0544619B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210622 |