CN112994517A - Ultrathin piezoelectric ultrasonic motor for microminiature equipment and driving method thereof - Google Patents
Ultrathin piezoelectric ultrasonic motor for microminiature equipment and driving method thereof Download PDFInfo
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- CN112994517A CN112994517A CN202110444227.5A CN202110444227A CN112994517A CN 112994517 A CN112994517 A CN 112994517A CN 202110444227 A CN202110444227 A CN 202110444227A CN 112994517 A CN112994517 A CN 112994517A
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- 238000005452 bending Methods 0.000 claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 230000005284 excitation Effects 0.000 claims description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 5
- 229920001971 elastomer Polymers 0.000 description 4
- 239000000806 elastomer Substances 0.000 description 4
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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Abstract
The invention relates to an ultrathin piezoelectric ultrasonic motor for microminiature equipment and a driving method thereof, belonging to the field of precision machinery. The piezoelectric ultrasonic motor comprises a harmonic oscillator (1) and a driven piece (2), wherein the harmonic oscillator (1) comprises a rectangular hollow elastic body (1-1), a bending piezoelectric piece group (1-2) and a clamping piezoelectric piece group (1-3). The driven piece (2) is annular and can be internally provided with an optical lens of a camera, and the driven piece (2) is arranged in the rectangular hollow elastic body (1-1) in a close fit mode. Sequential control electric signals are applied to the bending piezoelectric sheet group (1-2) and the clamping piezoelectric sheet group (1-3), so that the rectangular hollow elastic body (1-1) can be excited to generate elliptical motion, and the driven piece (2) is driven to move linearly. The invention has the beneficial effects that: the structure is compact, the cost is low, and the device can be used for precise driving in a limited space; meanwhile, a larger optical lens can be placed in the rectangular hollow elastic body, and the optical lens is particularly suitable for various precise optical equipment.
Description
Technical Field
The invention relates to the field of precision machinery, in particular to an ultrathin piezoelectric ultrasonic motor for microminiature equipment and a driving method thereof. The hollow elastic body and the driven piece can be used for placing a large-size optical lens, and camera zooming is facilitated.
Background
The piezoelectric ultrasonic motor plays a great role in precision instruments and aerospace due to the characteristics of no electromagnetic interference, quick response, high precision and the like. However, in the existing piezoelectric ultrasonic motor, the motor is either a rotary motor or a motor with a large volume, or the motor is not a hollow structure, and is not suitable for precise movement of micro-miniature equipment, such as focusing of a camera lens of a mobile phone. The high torque density ultrasonic motor similar to the ultrasonic motor with the application number of CN 202020498538.0 is a rotary motor, and is not applicable to the field of focusing of the camera lens of the mobile phone. The linear ultrasonic motor similar to the linear ultrasonic motor with the application number of CN 201610009699.7 has larger volume, and is not suitable for the field of focusing of camera lenses of micro-devices such as mobile phones. Patent CN2017114767690 applied by the limited company of instruments and equipment for controlling the sun, english and english, its structure is not hollow, it is impossible to integrate the optical lens of the camera into the ultrasonic motor, and it is also not suitable for focusing the camera lens of the micro-devices such as mobile phones.
Disclosure of Invention
The invention aims to provide an ultrathin piezoelectric ultrasonic motor for microminiature equipment and a driving method thereof, and solves the problems in the prior art. The large-size optical lens placed through the hollow elastic body and the driven piece is beneficial to focusing of the camera.
The above object of the present invention is achieved by the following technical solutions:
an ultra-thin piezoelectric ultrasonic motor for microminiature equipment is characterized in that: comprises a harmonic oscillator and a driven part; the harmonic oscillator comprises a rectangular hollow elastic body, a bending piezoelectric plate group and a clamping piezoelectric plate group; the driven piece is annular and can be internally provided with a camera optical lens; the driven piece is arranged in the rectangular hollow elastic body in a close fit mode; the bending piezoelectric plate groups for exciting the rectangular hollow elastic body to drive the driven piece to linearly move are symmetrically adhered to two ends of the rectangular hollow elastic body along the thickness direction (z direction); clamping piezoelectric plate groups for exciting the rectangular hollow elastic body clamping driven piece are symmetrically adhered to two ends of the rectangular hollow elastic body along the width direction (y direction).
The rectangular hollow elastic body comprises a thin connecting part, a thick connecting part and a mounting and fixing hole; the hollow part of the rectangular hollow elastic body is oval, and the long axis of the oval is arranged along the length direction (x direction) of the rectangular hollow elastic body; the short axis direction of the ellipse of the hollow part of the rectangular hollow elastic body is intersected with the thin connecting part, and the long axis direction of the ellipse is intersected with the thick connecting part; the mounting and fixing holes are used for mounting and fixing.
The bending piezoelectric plate group consists of a first bending piezoelectric plate group and a second bending piezoelectric plate group; the first clamping piezoelectric patch group consists of a piezoelectric patch I and a piezoelectric patch II, and the piezoelectric patch I and the piezoelectric patch II are adhered to one side of the rectangular hollow elastomer in the-x direction of the elliptic major axis in the thickness direction in a mechanical series connection mode; the second clamping piezoelectric patch group consists of a piezoelectric patch III and a piezoelectric patch IV, and the piezoelectric patch III and the piezoelectric patch IV are adhered to one side of the rectangular hollow elastomer in the x direction of the elliptic major axis in the thickness direction in a mechanical series connection mode; the piezoelectric sheets I, II, III and IV are electrically connected in parallel; the rectangular hollow elastic body can be directionally bent by applying a sinusoidal electric signal to the bending piezoelectric sheet group.
The clamping piezoelectric sheet group consists of a first clamping piezoelectric sheet and a second clamping piezoelectric sheet; the first clamping piezoelectric sheet and the second clamping piezoelectric sheet are adhered to two sides of the rectangular hollow elastic body along the width direction (y axis) in a mechanical parallel connection mode; the first clamping piezoelectric sheet and the second clamping piezoelectric sheet are wired in an electrical series connection mode; the rectangular hollow elastic body can clamp the driven piece by applying a sinusoidal electric signal to the clamping piezoelectric sheet group.
Another object of the present invention is to provide a method for driving an ultra-thin piezoelectric ultrasonic motor for a micro-miniature device, comprising the steps of:
a) applying an electric signal of u-Asin (2 pi ft) to the clamping piezoelectric sheet group to excite the longitudinal mode of the rectangular hollow elastic body, so that the rectangular hollow elastic body clamps the driven piece;
b) applying an electric signal u-Asin (2 pi ft) to the bending piezoelectric sheet group to excite the bending mode of the rectangular hollow elastic body, and under the common excitation of the bending piezoelectric sheet group and the clamping piezoelectric sheet group, the rectangular hollow elastic body drives the driven piece to linearly move along the z direction;
c) the rectangular hollow elastic body drives the driven piece to linearly move along the-z direction by applying an electric signal u-Asin (2 pi ft) to the clamping piezoelectric sheet group and applying an electric signal u-Acos (2 pi ft) to the bending piezoelectric sheet group at the same time.
The invention has the beneficial effects that: the structure is simple and compact, and the large-size optical lens placed through the hollow elastic body and the driven piece is beneficial to zooming of the camera. The invention also expands the application field and the application occasion of the piezoelectric ultrasonic motor.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic structural view of an ultra-thin piezoelectric ultrasonic motor according to the present invention;
FIG. 2 is a schematic view of a rectangular hollow elastomer structure according to the present invention;
FIG. 3 is a schematic view showing the polarization direction and bonding position of the piezoelectric sheet according to the present invention;
FIG. 4 is a schematic diagram of the xoy plane wiring of the present invention;
FIG. 5 is a schematic xoz face wiring diagram of the present invention;
FIG. 6 is a schematic diagram illustrating longitudinal mode shape simulation according to the present invention;
FIG. 7 is a schematic view of a simulation of bending mode shape according to the present invention;
wherein: 1. a harmonic oscillator; 1-1, a rectangular hollow elastomer; 1-1-1, a thin connecting portion; 1-1-2, thick connecting portions; 1-1-3, installing a fixing hole; 1-2, bending the piezoelectric sheet set; 1-2-1, a first bending piezoelectric sheet group; 1-2-1-1, piezoelectric patch I; 1-2-1-2 and a piezoelectric sheet II; 1-2-2, a second bending piezoelectric sheet group; 1-2-2-1 and a piezoelectric sheet III; 1-2-2-2 and a piezoelectric sheet IV; 1-3, clamping the piezoelectric plate group; 1-3-1, a first clamping piezoelectric patch; 1-3-2, a second clamping piezoelectric sheet; 2. a driven member.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 7, the present invention relates to an ultra-thin piezoelectric ultrasonic motor for a micro-miniature device, which realizes linear motion of a driven member by exciting longitudinal mode clamping and bending modes of a harmonic oscillator. The structure is simple and compact, and the large-size optical lens placed through the hollow elastic body and the driven piece is beneficial to zooming of the camera. The invention also expands the application field and the application occasion of the piezoelectric ultrasonic motor.
The ultra-thin piezoelectric ultrasonic motor for the microminiature device is characterized in that: comprises a harmonic oscillator (1) and a driven part (2); the harmonic oscillator (1) comprises a rectangular hollow elastic body (1-1), a bending piezoelectric plate group (1-2) and a clamping piezoelectric plate group (1-3); the driven piece (2) is annular and can be internally provided with a camera optical lens; the driven piece (2) is arranged in the rectangular hollow elastic body (1-1) in a close fit manner; the bending piezoelectric plate groups (1-2) for exciting the rectangular hollow elastic body (1-1) to drive the driven piece (2) to do linear motion are symmetrically adhered to the two ends of the rectangular hollow elastic body (1-1) along the thickness direction (z direction); clamping piezoelectric plate groups (1-3) used for exciting the rectangular hollow elastic body (1-1) to clamp the driven piece (2) are symmetrically adhered to two ends of the rectangular hollow elastic body (1-1) along the width direction (y direction).
The rectangular hollow elastic body (1-1) comprises a thin connecting part (1-1-1), a thick connecting part (1-1-2) and a mounting and fixing hole (1-1-3); the hollow part of the rectangular hollow elastic body (1-1) is oval, and the long axis of the oval is arranged along the length direction (x direction) of the rectangular hollow elastic body (1-1); the short axis direction of the hollow part of the rectangular hollow elastic body (1-1) is intersected with the thin connecting part (1-1-1), and the long axis direction of the ellipse is intersected with the thick connecting part; the mounting and fixing holes (1-1-3) are used for mounting and fixing.
The bending piezoelectric sheet group (1-2) consists of a first bending piezoelectric sheet group (1-2-1) and a second bending piezoelectric sheet group (1-2-2); the first clamping piezoelectric patch group (1-2-1) consists of a piezoelectric patch I (1-2-1-1) and a piezoelectric patch II (1-2-1-2), and the piezoelectric patch I (1-2-1-1) and the piezoelectric patch II (1-2-1-2) are adhered to one side of the rectangular hollow elastic body (2) in the direction of-x of the elliptic major axis in the thickness direction in a mechanical series connection mode; the second clamping piezoelectric patch group (1-2-2) consists of a piezoelectric patch III (1-2-2-1) and a piezoelectric patch IV (1-2-2-2), and the piezoelectric patch III (1-2-2-1) and the piezoelectric patch IV (1-2-2-2) are adhered to one side of the elliptic major axis of the rectangular hollow elastic body (2) along the thickness direction in a mechanical series connection mode; the piezoelectric patch I (1-2-1-1) and the piezoelectric patch II (1-2-1-2), and the piezoelectric patch III (1-2-2-1) and the piezoelectric patch IV (1-2-2-2) are wired in an electrical parallel mode; the rectangular hollow elastic body (1-1) can be directionally bent by applying a sinusoidal electric signal to the bending piezoelectric sheet group (1-2).
The clamping piezoelectric sheet group (1-3) consists of a first clamping piezoelectric sheet (1-3-1) and a second clamping piezoelectric sheet (1-3-2); the first clamping piezoelectric piece (1-3-1) and the second clamping piezoelectric piece (1-3-2) are adhered to two sides of the rectangular hollow elastic body (2) along the width direction (y axis) in a mechanical parallel mode; the first clamping piezoelectric sheet (1-3-1) and the second clamping piezoelectric sheet (1-3-2) are wired in an electrical series connection mode; the rectangular hollow elastic body (1-1) can clamp the driven piece (2) by applying a sinusoidal electric signal to the clamping piezoelectric sheet group (1-3).
Another object of the present invention is to provide a method for driving an ultra-thin piezoelectric ultrasonic motor for a micro-miniature device, comprising the steps of:
a) applying an electric signal of u-Asin (2 pi ft) to the clamping piezoelectric sheet group (1-3) to excite the longitudinal mode of the rectangular hollow elastic body (2) so that the rectangular hollow elastic body (2) clamps the driven piece (2);
b) applying an electric signal of u-Asin (2 pi ft) to the bending piezoelectric sheet group (1-2) to excite the bending mode of the rectangular hollow elastic body (2), and under the common excitation of the bending piezoelectric sheet group (1-2) and the clamping piezoelectric sheet group (1-3), the rectangular hollow elastic body (2) drives the driven piece (2) to linearly move along the z direction;
c) the rectangular hollow elastic body (2) can drive the driven piece (2) to linearly move along the-z direction by applying an electric signal u-Asin (2 pi ft) to the clamping piezoelectric piece group (1-3) and applying an electric signal u-Acos (2 pi ft) to the bending piezoelectric piece group (1-2).
Claims (5)
1. An ultra-thin piezoelectric ultrasonic motor for microminiature equipment is characterized in that: comprises a harmonic oscillator (1) and a driven part (2); the harmonic oscillator (1) comprises a rectangular hollow elastic body (1-1), a bending piezoelectric plate group (1-2) and a clamping piezoelectric plate group (1-3); the driven piece (2) is annular and can be internally provided with a camera optical lens; the driven piece (2) is arranged in the rectangular hollow elastic body (1-1) in a close fit manner; the bending piezoelectric plate groups (1-2) for exciting the rectangular hollow elastic body (1-1) to drive the driven piece (2) to do linear motion are symmetrically adhered to the two ends of the rectangular hollow elastic body (1-1) along the thickness direction (z direction); clamping piezoelectric plate groups (1-3) used for exciting the rectangular hollow elastic body (1-1) to clamp the driven piece (2) are symmetrically adhered to two ends of the rectangular hollow elastic body (1-1) along the width direction (y direction).
2. The ultra-thin piezoelectric ultrasonic motor for a microminiature device as set forth in claim 1, wherein: the rectangular hollow elastic body (1-1) comprises a thin connecting part (1-1-1), a thick connecting part (1-1-2) and a mounting and fixing hole (1-1-3); the hollow part of the rectangular hollow elastic body (1-1) is oval, and the long axis of the oval is arranged along the length direction (x direction) of the rectangular hollow elastic body (1-1); the short axis direction of the hollow part of the rectangular hollow elastic body (1-1) is intersected with the thin connecting part (1-1-1), and the long axis direction of the ellipse is intersected with the thick connecting part; the mounting and fixing holes (1-1-3) are used for mounting and fixing.
3. The ultra-thin piezoelectric ultrasonic motor for a microminiature device as set forth in claim 1, wherein: the bending piezoelectric sheet group (1-2) consists of a first bending piezoelectric sheet group (1-2-1) and a second bending piezoelectric sheet group (1-2-2); the first clamping piezoelectric patch group (1-2-1) consists of a piezoelectric patch I (1-2-1-1) and a piezoelectric patch II (1-2-1-2), and the piezoelectric patch I (1-2-1-1) and the piezoelectric patch II (1-2-1-2) are adhered to one side of the rectangular hollow elastic body (1-1) in the-x direction of the elliptic major axis in the thickness direction in a mechanical series connection mode; the second clamping piezoelectric patch group (1-2-2) consists of a piezoelectric patch III (1-2-2-1) and a piezoelectric patch IV (1-2-2-2), and the piezoelectric patch III (1-2-2-1) and the piezoelectric patch IV (1-2-2-2) are adhered to one side of the elliptic major axis of the rectangular hollow elastic body (1-1) in the x direction in the thickness direction in a mechanical series connection mode; the piezoelectric patch I (1-2-1-1) and the piezoelectric patch II (1-2-1-2), and the piezoelectric patch III (1-2-2-1) and the piezoelectric patch IV (1-2-2-2) are wired in an electrical parallel mode; the rectangular hollow elastic body (1-1) can be directionally bent by applying a sinusoidal electric signal to the bending piezoelectric sheet group (1-2).
4. The ultra-thin piezoelectric ultrasonic motor for a microminiature device as set forth in claim 1, wherein: the clamping piezoelectric sheet group (1-3) consists of a first clamping piezoelectric sheet (1-3-1) and a second clamping piezoelectric sheet (1-3-2); the first clamping piezoelectric piece (1-3-1) and the second clamping piezoelectric piece (1-3-2) are adhered to two sides of the rectangular hollow elastic body (1-1) along the width direction (y axis) in a mechanical parallel mode; the first clamping piezoelectric sheet (1-3-1) and the second clamping piezoelectric sheet (1-3-2) are wired in an electrical series connection mode; the rectangular hollow elastic body (1-1) can clamp the driven piece (2) by applying a sinusoidal electric signal to the clamping piezoelectric sheet group (1-3).
5. A method for driving an ultrathin piezoelectric ultrasonic motor for microminiature equipment is characterized by comprising the following steps: the method comprises the following steps:
a) applying an electric signal of u-Asin (2 pi ft) to the clamping piezoelectric sheet group (1-3) to excite the longitudinal mode of the rectangular hollow elastic body (2) so that the rectangular hollow elastic body (1-1) clamps the driven piece (2);
b) applying an electric signal of u-Asin (2 pi ft) to the bending piezoelectric sheet group (1-2) to excite the bending mode of the rectangular hollow elastic body (2), and under the common excitation of the bending piezoelectric sheet group (1-2) and the clamping piezoelectric sheet group (1-3), the rectangular hollow elastic body (1-1) drives the driven piece (2) to linearly move along the z direction;
c) the rectangular hollow elastic body (1-1) can drive the driven piece (2) to move linearly along the-z direction by applying an electric signal u-Asin (2 pi ft) to the clamping piezoelectric piece group (1-3) and applying an electric signal u-Acos (2 pi ft) to the bending piezoelectric piece group (1-2).
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Publication number | Priority date | Publication date | Assignee | Title |
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CN116107135A (en) * | 2023-02-20 | 2023-05-12 | 哈尔滨工业大学 | Centimeter-level optical imaging system driven by ultrasonic motor and driving method |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5416375A (en) * | 1992-06-15 | 1995-05-16 | Olympus Optical Co., Ltd. | Ultrasonic motor |
JPH08163879A (en) * | 1994-12-07 | 1996-06-21 | Olympus Optical Co Ltd | Ultrasonic oscillator and ultrasonic motor |
CN201075845Y (en) * | 2007-09-05 | 2008-06-18 | 清华大学 | Screwed cap type ultrasound electric machine |
CN101364775A (en) * | 2008-09-28 | 2009-02-11 | 浙江大学 | Flat dual-stator thread driving ultrasonic minimized motor having thread pair pretensioning |
CN107742993A (en) * | 2017-11-21 | 2018-02-27 | 河南师范大学 | Single-phase stimulable type in plane vibration ultrasound electric machine and its single-phase motivational techniques |
CN215222041U (en) * | 2021-04-23 | 2021-12-17 | 吉林大学 | Ultra-thin piezoelectric ultrasonic motor for microminiature equipment |
-
2021
- 2021-04-23 CN CN202110444227.5A patent/CN112994517B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5416375A (en) * | 1992-06-15 | 1995-05-16 | Olympus Optical Co., Ltd. | Ultrasonic motor |
JPH08163879A (en) * | 1994-12-07 | 1996-06-21 | Olympus Optical Co Ltd | Ultrasonic oscillator and ultrasonic motor |
CN201075845Y (en) * | 2007-09-05 | 2008-06-18 | 清华大学 | Screwed cap type ultrasound electric machine |
CN101364775A (en) * | 2008-09-28 | 2009-02-11 | 浙江大学 | Flat dual-stator thread driving ultrasonic minimized motor having thread pair pretensioning |
CN107742993A (en) * | 2017-11-21 | 2018-02-27 | 河南师范大学 | Single-phase stimulable type in plane vibration ultrasound electric machine and its single-phase motivational techniques |
CN215222041U (en) * | 2021-04-23 | 2021-12-17 | 吉林大学 | Ultra-thin piezoelectric ultrasonic motor for microminiature equipment |
Non-Patent Citations (1)
Title |
---|
陈廉清, 任敏杰, 张振祥: "直线型超声波电机及其应用综述", 微电机, no. 04, 28 August 2005 (2005-08-28) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116107135A (en) * | 2023-02-20 | 2023-05-12 | 哈尔滨工业大学 | Centimeter-level optical imaging system driven by ultrasonic motor and driving method |
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