CN112985279A - Detection device - Google Patents

Detection device Download PDF

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Publication number
CN112985279A
CN112985279A CN202110247223.8A CN202110247223A CN112985279A CN 112985279 A CN112985279 A CN 112985279A CN 202110247223 A CN202110247223 A CN 202110247223A CN 112985279 A CN112985279 A CN 112985279A
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China
Prior art keywords
light
detection
laser
transmitting
transmission path
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CN202110247223.8A
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Chinese (zh)
Inventor
苏胜飞
田井宇
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Shenzhen Huaxun Ark Photoelectric Technology Co Ltd
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Shenzhen Huaxun Ark Photoelectric Technology Co Ltd
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Priority to CN202110247223.8A priority Critical patent/CN112985279A/en
Publication of CN112985279A publication Critical patent/CN112985279A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The application discloses detection device, this detection device includes: a light source for generating excitation light; the detection probe receives the exciting light and generates first detection light and second detection light under the action of the exciting light, and the transmission path of the first detection light is different from that of the second detection light. This application detects the light through the different first detection light and the second of two way transmission path of a test probe output, realizes carrying out thickness detection to the diapire and the lateral wall of refrigerator inner bag, improves detection efficiency and production efficiency.

Description

Detection device
Technical Field
The application relates to the field of refrigerator liner thickness detection, in particular to a detection device.
Background
A common terahertz probe only has one detection beam, and an inner container of a refrigerator comprises a bottom wall and four side walls. When the thickness of an inner container of the refrigerator needs to be detected, five surfaces such as a bottom wall and four side walls need to be detected, when the terahertz time-domain spectrometer is used for detection, one terahertz probe needs to perform complex rotation operation to complete scanning of 5 surfaces, and the complex rotation operation can reduce certain production efficiency.
Disclosure of Invention
The application provides a detection device, this detection device includes:
a light source for generating excitation light;
the detection probe receives the exciting light and generates first detection light and second detection light under the action of the exciting light, and the transmission path of the first detection light is different from that of the second detection light.
Optionally, the detection probe comprises:
a transmitting antenna for receiving the exciting light to generate terahertz waves;
the first light splitting device is arranged on a transmission path of the terahertz wave and used for transmitting and reflecting the terahertz wave to generate first detection light and second detection light;
the first diaphragm is arranged on a transmission path of the first detection light;
the second diaphragm is arranged on a transmission path of the second detection light;
the first diaphragm and the second diaphragm are used for controlling the detection probe to output first detection light or second detection light.
Optionally, the axial direction of the detection probe is the same as the transmission direction of the second detection light, and the detection probe is rotated in the axial direction to adjust the transmission direction of the first detection light.
Optionally, the detecting device is used for detecting an inner container of the refrigerator, and the first detecting light is used for detecting a side wall of the inner container so that the side wall reflects the first reflected light; the second detection light is used for detecting the bottom wall of the inner container, so that the bottom wall reflects the second reflection light.
Optionally, the detection probe further comprises:
a receiving antenna for receiving the first reflected light or the second reflected light by the first spectroscopic device and generating an electric signal based on the first reflected light or the second reflected light;
and the reflector is arranged on the output path of the transmitting antenna and changes the transmission direction of the terahertz wave so that the transmission direction of the terahertz wave is the same as the transmission direction of the first detection light.
Optionally, the detection device further comprises:
the light splitting component receives the exciting light to generate a first laser and a second laser;
the first coupling components are used for respectively transmitting the first laser to the transmitting antennas so as to enable the transmitting antennas to start working;
and the second coupling assemblies are used for respectively transmitting the second laser to the receiving antennas so as to enable the receiving antennas to start working.
Optionally, the light splitting assembly comprises:
the second light splitting device is used for reflecting and transmitting the exciting light so as to generate first laser light and second laser light;
and the movable reflector is arranged on the transmission path of the first laser and used for changing the transmission direction of the first laser so as to enable the transmission direction of the first laser to be consistent with the transmission direction of the second laser.
Optionally, the first coupling assembly comprises:
the first coupling lens is arranged on a transmission path of the first laser;
and the first optical fiber is used for coupling the first laser through the first coupling lens and transmitting the first laser to the transmitting antenna.
Optionally, the second coupling assembly comprises:
the second coupling lens is arranged on a transmission path of the second laser;
and the second optical fiber is coupled with the second laser through the second coupling lens and transmits the second laser to the receiving antenna.
Optionally, the detection device further comprises a controller, the controller is connected with the receiving antenna, and the thickness of the inner container is obtained according to the electric signal.
The beneficial effect of this application is: be different from prior art, this application receives the exciting light that the light source produced through setting up the test probe to produce first detection light and second and detect the light under the effect of exciting light, and the transmission path of first detection light is different with the transmission path of second detection light, realize by the different first detection light of two ways transmission path of a test probe output and second detection light, two ways detect the light and are used for carrying out thickness detection to the diapire and the lateral wall of refrigerator inner bag respectively, improve detection efficiency and production efficiency.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic view of a first embodiment of the detection apparatus of the present application;
FIG. 2 is a second schematic structural diagram of an embodiment of the detecting device of the present application;
FIG. 3 is a schematic view of a first embodiment of the detection apparatus of the present application;
FIG. 4 is a second schematic structural view of another embodiment of the detection apparatus of the present application;
fig. 5 is a schematic structural diagram of another embodiment of the detection device of the present application.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present application, the following describes the detection device provided in the present application in further detail with reference to the accompanying drawings and the detailed description. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terms "first", "second", etc. in this application are used to distinguish between different objects and not to describe a particular order. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.
Referring to fig. 1, fig. 1 is a schematic diagram of a first structure of an embodiment of a detection apparatus of the present application. As shown in fig. 1, the detecting device 1 includes a light source 10 and a detecting probe 20. The light source 10 is used for generating excitation light, the detection probe 20 receives the excitation light, and generates a first detection light S1 and a second detection light S2 under the action of the excitation light, and a transmission path of the first detection light S1 is different from a transmission path of the second detection light S2.
Specifically, the detection device is used for detecting the thickness of the inner container of the refrigerator, the first detection light S1 and the second detection light S2 are transmitted to the inner container of the refrigerator to be detected and are reflected by the inner container to form first reflection light and second reflection light, and the thickness of the inner container of the refrigerator to be detected can be obtained through the first reflection light and the second reflection light.
Optionally, in this embodiment, the first detection light S1 is used to detect the thickness of the side wall of the inner container of the refrigerator to be detected, so that the side wall reflects the first reflection light; the second detecting light S2 is used for detecting the thickness of the bottom wall of the inner container of the refrigerator to be detected, so that the bottom wall reflects the second reflected light.
The inner container of the refrigerator may specifically include a bottom wall and four side walls, and when the thickness of the side walls is detected by using the first detecting light S1, the detecting probe 20 or the inner container of the refrigerator to be detected needs to be rotated so that the first detecting light S1 can be transmitted to the four side walls, respectively.
The detecting device 1 of the present embodiment uses the transmission direction of the second detecting light S2 as the axial direction of the rotating shaft of the detecting probe 20, and rotates the detecting probe 20 in the axial direction to adjust the transmission direction of the first detecting light S1. When the detection probe 20 rotates along the axial direction, the first detection light S1 is sequentially transmitted to the four side walls of the inner container of the refrigerator to be detected, and the thickness detection of the four side walls is completed.
Alternatively, in other embodiments, the detection device 1 may detect the thickness of the bottom wall of the inner container of the refrigerator to be tested using the first detection light S1, and detect the thickness of the side wall of the inner container of the refrigerator to be tested using the second detection light S2.
Referring further to fig. 2, fig. 2 is a schematic diagram of a second structure of an embodiment of the detection apparatus of the present application. As shown in fig. 2, the detection probe 20 includes a transmitting antenna 21, a receiving antenna 22, a reflecting mirror 23, a first light splitting device 24, a first diaphragm 25, and a second diaphragm 26.
The transmitting antenna 21 receives the exciting light generated by the light source 10, so that the transmitting antenna 21 starts to work to generate terahertz waves; at the same time, the receiving antenna 22 receives the excitation light generated by the light source 10, so that the receiving antenna 22 starts to operate.
The reflecting mirror 23 is disposed on the output path of the transmitting antenna 21, and is used for changing the transmission direction of the terahertz wave generated by the transmitting antenna 21 so that the transmission direction of the terahertz wave is the same as the transmission direction of the first detection light S1.
Optionally, in this embodiment, the reflecting mirror 23 is a single-sided plane mirror, and is configured to change a transmission direction of the terahertz wave, so that an included angle between the transmission direction of the terahertz wave before passing through the reflecting mirror 23 and the transmission direction of the terahertz wave after passing through the reflecting mirror 23 is 90 °, and the terahertz wave is further perpendicularly incident on the first light splitting device 24.
Alternatively, in other embodiments, the reflecting mirror 23 may be a multi-surface plane mirror to form a reflecting mirror group, and further control the transmission direction of the terahertz wave.
The first light splitting device 24 is disposed on a transmission path of the terahertz wave, and the mirror 23 emits the terahertz wave so that the terahertz wave enters the first light splitting device 24. The first light splitting device 24 is used for transmitting and reflecting the terahertz wave to generate the first detection light S1 and the second detection light S2.
Alternatively, in this embodiment, the first light splitting device 24 is a light splitting prism, and the light splitting prism is an optical element that is formed by plating a multilayer film structure on an inclined surface of a right-angle prism and then gluing the multilayer film structure into a cubic structure, and by utilizing the property that when a light ray enters at the brewster angle, the P-polarization transmittance is 1 and the S-polarization transmittance is less than 1, the light ray passes through the multilayer film structure at the brewster angle for multiple times, so that the P-polarization component is completely transmitted and most of the S-polarization component is reflected (at least 90% or more).
The first diaphragm 25 is disposed on the transmission path of the first detection light S1; the second diaphragm 26 is disposed on the transmission path of the second detecting light S2, and the first diaphragm 25 and the second diaphragm 26 are used for controlling the detecting probe 20 to output the first detecting light S1 or the second detecting light S2.
Specifically, the inspection apparatus 1 controls whether the inspection probe 20 outputs the first inspection light S1 by controlling the switching of the first diaphragm 25; the inspection apparatus 1 controls the opening and closing of the second diaphragm 26 to control whether or not the inspection probe 20 outputs the second inspection light S2.
Optionally, the detection device 1 may control the first diaphragm 25 to open, control the second diaphragm 26 to close, and the detection probe 20 outputs the first detection light S1 to the side wall of the inner container of the refrigerator to be detected to detect the thickness of the side wall; the detection device 1 can control the first diaphragm 25 to close and the second diaphragm 26 to open, and the detection probe 20 outputs the second detection light S2 to the bottom wall of the inner container of the refrigerator to be detected so as to detect the thickness of the bottom wall.
The receiving antenna 22 receives the first reflected light or the second reflected light through the first light-splitting device 24, and generates an electric signal based on the first reflected light or the second reflected light.
Specifically, the detecting device 1 controls the first diaphragm 25 to open, controls the second diaphragm 26 to close, and the detecting probe 20 outputs the first detecting light S1 to the side wall of the inner container of the refrigerator to be detected, the side wall reflects the first reflected light, the first reflected light enters the first light splitter 24 along the transmission path of the first detecting light S1, and the first light splitter 24 reflects the first reflected light, so that the first reflected light is input to the receiving antenna 22, and an electrical signal is formed at the receiving antenna 22.
The detection device 1 controls the first diaphragm 25 to close, controls the second diaphragm 26 to open, and the detection probe 20 outputs the second detection light S2 to the bottom wall of the inner container of the refrigerator to be detected, the bottom wall reflects the second reflection light, the second emission light enters the first light splitter 24 along the transmission path of the second detection light S2, and the first light splitter 24 transmits the second reflection light, so that the second reflection light is input to the receiving antenna 22, and an electrical signal is formed at the receiving antenna 22.
In the prior art, the method for detecting the thickness of the refrigerator liner by using the multi-purpose ultrasonic waves can meet the requirement of thickness detection, but the ultrasonic waves need to be assisted by a coupling agent when being used for detection, so that the method is difficult to be applied to a production line on a large scale. On the common terahertz detection equipment, only one probe has one beam of terahertz emergent light, so that the detection efficiency is not high.
The thickness of this embodiment detection device 1 through using the inner bag of terahertz wave detection refrigerator need not contact the refrigerator inner bag, need not additionally use the couplant to carry out the auxiliary detection simultaneously, has the quick efficient characteristics of non-contact. In addition, the detecting device 1 of the present embodiment outputs the first detecting light S1 or the second detecting light S2 through the detecting probe 20, so as to detect the thickness of the side wall and the bottom wall of the inner container of the refrigerator to be detected; and through controlling the detection probe 20 to rotate along the axial direction, the detection probe 20 can realize the thickness detection of the four side walls of the inner container of the refrigerator to be detected without carrying out complex rotating operation, thereby simplifying the operation of the detection probe 20 and improving the detection efficiency and the production efficiency.
Referring further to fig. 3, fig. 3 is a schematic view of a first structure of another embodiment of the detecting device of the present application. As shown in fig. 3, on the basis of the above-mentioned embodiment, the detecting device 1 further includes a light splitting component 30, a first coupling component 40 and a second coupling component 50.
The light splitting unit 30 is disposed on a transmission path of the excitation light output from the light source 10. In the embodiment, the light source 10 is a femtosecond laser, and the generated excitation light is excitation light, so the light splitting assembly 30 receives the excitation light to generate the first laser and the second laser.
The first coupling component 40 is disposed on a transmission path of the first laser light, and is used for transmitting the first laser light to the transmitting antenna 21 so as to enable the transmitting antenna 21 to start operating.
The second coupling component 50 is disposed on the transmission path of the second laser, and is used for transmitting the second laser to the receiving antenna 22, so as to enable the receiving antenna 22 to start operating.
With reference to fig. 3 and further referring to fig. 4, fig. 4 is a schematic diagram of a second structure of another embodiment of the detection apparatus of the present application. As shown in fig. 4, the light splitting assembly 30 includes a second light splitting device 31 and a movable mirror 32.
The second light splitting device 31 is disposed on a transmission path of the excitation light output from the light source 10, and reflects and transmits the excitation light to generate the first laser light and the second laser light. Optionally, in this embodiment, the second light splitting device 31 is a light splitting prism.
Specifically, the first laser light generated by reflection by the second light splitting device 31 is transmitted to the first coupling component 40 through the movable mirror 32, and further transmitted to the transmitting antenna 21 through the first coupling component 40, so that the transmitting antenna 21 starts to operate;
the second laser light generated by the transmission of the second light splitting device 31 is transmitted to the second coupling member 50 through the movable mirror 32, and further transmitted to the receiving antenna 22 through the second coupling member 50, so that the receiving antenna 22 starts to operate.
The movable mirror 32 is disposed on the transmission path of the first laser light, and is configured to change the transmission direction of the first laser light, so that the transmission direction of the first laser light is consistent with the transmission direction of the second laser light.
When the movable reflector 32 is located at the first position, the receiving antenna 22 receives the reflected light from the front surface or the rear surface of the bottom wall or the side wall of the inner container of the refrigerator to be tested; when the movable mirror 32 is moved to the second position, the receiving antenna 22 receives the reflected light from the rear surface or the front surface of the bottom wall or the side wall of the inner container of the refrigerator to be tested, and the rear surface of the bottom wall or the side wall interferes with the reflected light from the front surface, so that the receiving antenna 22 detects the interference signal of the front surface and the rear surface of the bottom wall or the side wall.
Optionally, in this embodiment, the movable mirror 32 includes two opposite mirrors, and a fixing member for fixing the two mirrors, an included angle between a transmission direction of the first laser light after passing through the first mirror and a transmission direction of the first laser light before passing through the first mirror is 90 °, and the first laser light is transmitted to the second mirror; an angle between the transmission direction of the first laser light after passing through the second reflecting mirror and the transmission direction of the first laser light before passing through the second reflecting mirror is 90 °, so that the transmission direction of the first laser light input into the movable reflecting mirror 32 is parallel to the transmission direction of the first laser light output through the movable reflecting mirror 32.
Alternatively, in other embodiments, the movable mirror 32 may be formed of a plurality of mirrors, for example, three mirrors, such that the transmission direction of the first laser light transmitted to the first coupling component 40 coincides with the transmission direction of the second laser light transmitted to the second coupling component 50.
The first coupling assembly 40 includes a first coupling lens 41 and a first optical fiber 42. The first coupling lens 41 is disposed on a transmission path of the first laser light, and is configured to couple the first laser light into the first optical fiber 42; the first optical fiber 42 couples the first laser light through the first coupling lens 41 and transmits the first laser light to the transmitting antenna 21, so as to excite the transmitting antenna 21 to operate.
The second coupling assembly 50 includes a second coupling lens 51 and a second optical fiber 52. The second coupling lens 51 is disposed on a transmission path of the second laser light, and is configured to couple the second laser light into the second optical fiber 52; the second optical fiber 52 couples the second laser light through the second coupling lens 51 and transmits the second laser light to the receiving antenna 22, so as to excite the receiving antenna 22 to operate.
Optionally, in this embodiment, the number of the first coupling lens 41 and the second coupling lens 51 is one, that is, the first coupling component 40 and the second coupling component 50 respectively couple the first laser light into the first optical fiber 42 and the second laser light into the second optical fiber 52 by way of single lens coupling. Meanwhile, isolators may be disposed between the first coupling lens 41 and the first optical fiber 42, and between the second coupling lens 51 and the second optical fiber 52, for isolating the influence of the backward light on the preceding stage unit.
Alternatively, in other embodiments, the number of the first coupling lens 41 and the second coupling lens 51 may be two, that is, the first coupling component 40 and the second coupling component 50 each couple the first laser light into the first optical fiber 42 and the second laser light into the second optical fiber 52 by means of dual-lens coupling, respectively.
Referring to fig. 5, fig. 5 is a schematic structural diagram of another embodiment of the detection device of the present application. On the basis of the above embodiment, the detecting device 1 further includes a controller 60 and a motor 70. The controller 60 is connected with the receiving antenna 22, and obtains the thickness of the refrigerator inner container through the electric signal generated by the receiving antenna 22. A motor 70 is coupled to the movable mirror 32 for controlling movement of the movable mirror 32.
Specifically, in the detection apparatus 1 of the present embodiment, the motor 70 controls the movement of the movable mirror 32, so that the receiving antenna 22 receives the reflected light from the front and rear surfaces of the inner liner wall, and further can detect the interference signals of the front and rear surfaces of the inner liner wall, and the controller 60 can detect the optical path difference between the front and rear surfaces of the inner liner wall by detecting the delay of the two reflection peaks, and then calculate the thickness of the inner liner by dividing the refractive index of the inner liner.
This application detection device 1 receives the exciting light that light source 10 produced through setting up the test probe 20, and produce first test light S1 and second test light S2 under the effect of exciting light, and the transmission path of first test light S1 is different with the transmission path of second test light S2, realize outputting the different first test light S1 and the second test light S2 of two routes transmission path by a test probe 20, two routes test light are used for carrying out thickness detection to the diapire and the lateral wall of refrigerator inner bag respectively, detection efficiency and production efficiency improve. In addition, the detection apparatus 1 of the present application is provided with the first aperture 25 and the second aperture 26, and controls the detection probe 20 to output the first detection light S1 or the second detection light S2 by controlling the opening and closing of the first aperture 25 and the second aperture 26, thereby realizing targeted detection and improving detection efficiency.
In addition, this application detection device 1 uses the transmission direction of second detection light S2 as the axial of the rotation axis of test probe 20, and along the axial rotatory test probe 20 to make first detection light S1 transmit in proper order to the four lateral walls of the inner bag of the refrigerator that awaits measuring on, accomplish the thickness detection to four lateral walls, simplify detection operation, improve detection efficiency.
Meanwhile, the thickness of the inner container of the refrigerator is detected by the detection device 1 through the terahertz waves, the inner container of the refrigerator does not need to be contacted, meanwhile, the couplant does not need to be additionally used for auxiliary detection, and the detection device has the characteristics of non-contact high speed and high efficiency.
The above embodiments are merely examples, and not intended to limit the scope of the present application, and all modifications, equivalents, and flow charts using the contents of the specification and drawings of the present application, or those directly or indirectly applied to other related arts, are included in the scope of the present application.

Claims (10)

1. A detection device, comprising:
a light source for generating excitation light;
and the detection probe receives the exciting light and generates first detection light and second detection light under the action of the exciting light, and the transmission path of the first detection light is different from that of the second detection light.
2. The inspection device of claim 1, wherein the inspection probe comprises:
the transmitting antenna receives the exciting light to generate terahertz waves;
a first light splitting device arranged on a transmission path of the terahertz wave and used for transmitting and reflecting the terahertz wave to generate the first detection light and the second detection light;
a first diaphragm disposed on a transmission path of the first detection light;
a second diaphragm disposed on a transmission path of the second detection light;
the first diaphragm and the second diaphragm are used for controlling the detection probe to output the first detection light or the second detection light.
3. The sensing device of claim 1 or 2, wherein the sensing probe has an axial direction that is the same as the direction of transmission of the second sensing light and is rotated in the axial direction to adjust the direction of transmission of the first sensing light.
4. The detection device according to claim 3, wherein the detection device is used for detecting an inner container of a refrigerator, and the first detection light is used for detecting a side wall of the inner container so that the side wall reflects first reflection light; the second detection light is used for detecting the bottom wall of the inner container, so that the bottom wall reflects second reflection light.
5. The inspection device of claim 4, wherein the inspection probe further comprises:
a receiving antenna for receiving the first reflected light or the second reflected light by the first light splitting device and generating an electric signal based on the first reflected light or the second reflected light;
and the reflecting mirror is arranged on an output path of the transmitting antenna and changes the transmission direction of the terahertz wave so that the transmission direction of the terahertz wave is the same as the transmission direction of the first detection light.
6. The detection device according to claim 5, wherein the detection device further comprises:
the light splitting component receives the exciting light to generate first laser and second laser;
the first coupling components are used for respectively transmitting the first laser to the transmitting antennas so as to enable the transmitting antennas to start to work;
and the second coupling components are used for respectively transmitting the second laser to the receiving antennas so as to enable the receiving antennas to start working.
7. The detection device of claim 6, wherein the light splitting assembly comprises:
the second light splitting device is used for reflecting and transmitting the exciting light so as to generate the first laser light and the second laser light;
and the movable reflector is arranged on the transmission path of the first laser and used for changing the transmission direction of the first laser so as to enable the transmission direction of the first laser to be consistent with the transmission direction of the second laser.
8. The detection apparatus of claim 6, wherein the first coupling assembly comprises:
the first coupling lens is arranged on a transmission path of the first laser;
and the first optical fiber is used for coupling the first laser through the first coupling lens and transmitting the first laser to the transmitting antenna.
9. The detection apparatus of claim 6, wherein the second coupling assembly comprises:
the second coupling lens is arranged on a transmission path of the second laser;
and the second optical fiber is used for coupling the second laser through the second coupling lens and transmitting the second laser to the receiving antenna.
10. The detecting device for detecting the thickness of the inner container of the automobile engine as claimed in claim 6, further comprising a controller, wherein the controller is connected with the receiving antenna, and the thickness of the inner container is obtained according to the electric signal.
CN202110247223.8A 2021-03-05 2021-03-05 Detection device Pending CN112985279A (en)

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Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007248100A (en) * 2006-03-14 2007-09-27 Hitachi Ltd Terahertz device
CN101918813A (en) * 2007-11-16 2010-12-15 霍尼韦尔阿斯卡公司 Be used to obtain the Materials Measurement system and the correlation technique of consistent characteristic
US20120120231A1 (en) * 2010-11-15 2012-05-17 Fujitsu Limited Electromagnetic wave imaging apparatus
CN203298748U (en) * 2013-06-07 2013-11-20 南通友联数码技术开发有限公司 Supersonic device for testing thickness of pipe wall
CN103575654A (en) * 2013-11-05 2014-02-12 湖北久之洋红外***股份有限公司 Method and system for improving terahertz scanning imaging speed
US20140319356A1 (en) * 2011-08-31 2014-10-30 Fraunhofer-Gesellschaft zur Förderung der angewardten Forschung e.V. Method and apparatus for determining a substance using thz radiation
US20150176974A1 (en) * 2013-12-20 2015-06-25 Tokyo Electron Limited Apparatus and method for measuring thickness and temperature and substrate processing system
CN105548083A (en) * 2015-12-08 2016-05-04 电子科技大学 Double-optical-path terahertz time-domain spectrometer
JP2016114371A (en) * 2014-12-11 2016-06-23 パイオニア株式会社 Terahertz wave measurement device
WO2017085862A1 (en) * 2015-11-20 2017-05-26 パイオニア株式会社 Measurement device, measurement method, and computer program
CN108106578A (en) * 2018-01-19 2018-06-01 沈阳仪表科学研究院有限公司 Ultrasound calibrates wall thickness pipeline internal detector
CN109373943A (en) * 2018-10-23 2019-02-22 谢小东 One kind is for measuring thickness device and thickness detecting method in pipeline
CN109507146A (en) * 2018-11-30 2019-03-22 深圳市华讯方舟太赫兹科技有限公司 A kind of terahertz time-domain spectroscopy detection device
CN109597220A (en) * 2018-11-26 2019-04-09 中国电子科技集团公司第四十研究所 A kind of fiber coupling photoconduction transmitting antenna
US20200173766A1 (en) * 2017-07-04 2020-06-04 Inoex Gmbh Innovationen Und Ausruestungen Fuer Die Extrusionstechnik Terahertz measuring device and terahertz measuring method for measuring objects to be inspected

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007248100A (en) * 2006-03-14 2007-09-27 Hitachi Ltd Terahertz device
CN101918813A (en) * 2007-11-16 2010-12-15 霍尼韦尔阿斯卡公司 Be used to obtain the Materials Measurement system and the correlation technique of consistent characteristic
US20120120231A1 (en) * 2010-11-15 2012-05-17 Fujitsu Limited Electromagnetic wave imaging apparatus
US20140319356A1 (en) * 2011-08-31 2014-10-30 Fraunhofer-Gesellschaft zur Förderung der angewardten Forschung e.V. Method and apparatus for determining a substance using thz radiation
CN203298748U (en) * 2013-06-07 2013-11-20 南通友联数码技术开发有限公司 Supersonic device for testing thickness of pipe wall
CN103575654A (en) * 2013-11-05 2014-02-12 湖北久之洋红外***股份有限公司 Method and system for improving terahertz scanning imaging speed
US20150176974A1 (en) * 2013-12-20 2015-06-25 Tokyo Electron Limited Apparatus and method for measuring thickness and temperature and substrate processing system
JP2016114371A (en) * 2014-12-11 2016-06-23 パイオニア株式会社 Terahertz wave measurement device
WO2017085862A1 (en) * 2015-11-20 2017-05-26 パイオニア株式会社 Measurement device, measurement method, and computer program
CN105548083A (en) * 2015-12-08 2016-05-04 电子科技大学 Double-optical-path terahertz time-domain spectrometer
US20200173766A1 (en) * 2017-07-04 2020-06-04 Inoex Gmbh Innovationen Und Ausruestungen Fuer Die Extrusionstechnik Terahertz measuring device and terahertz measuring method for measuring objects to be inspected
CN108106578A (en) * 2018-01-19 2018-06-01 沈阳仪表科学研究院有限公司 Ultrasound calibrates wall thickness pipeline internal detector
CN109373943A (en) * 2018-10-23 2019-02-22 谢小东 One kind is for measuring thickness device and thickness detecting method in pipeline
CN109597220A (en) * 2018-11-26 2019-04-09 中国电子科技集团公司第四十研究所 A kind of fiber coupling photoconduction transmitting antenna
CN109507146A (en) * 2018-11-30 2019-03-22 深圳市华讯方舟太赫兹科技有限公司 A kind of terahertz time-domain spectroscopy detection device

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