CN112985043A - Air knife structure and mechanism thereof - Google Patents
Air knife structure and mechanism thereof Download PDFInfo
- Publication number
- CN112985043A CN112985043A CN201911297218.7A CN201911297218A CN112985043A CN 112985043 A CN112985043 A CN 112985043A CN 201911297218 A CN201911297218 A CN 201911297218A CN 112985043 A CN112985043 A CN 112985043A
- Authority
- CN
- China
- Prior art keywords
- air knife
- air
- knife
- main body
- structure according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Solid Materials (AREA)
Abstract
An air knife structure and its organization, wherein the air knife structure further includes an air knife main body, the air knife main body has a first body and a second body, there is an inclined front knife edge at the bottom end of the first body and the second body, the said first air flow channel has a connecting pipe of admitting air, in addition, offer an air knife organization, mainly connect to the air filter equipment through the connecting pipe of admitting air, the air filter equipment provides the filtered air to the air knife main body, utilize the front knife edge to clean, dry a plaque with the compressed air; because the air knife main body and the substrate are vertically arranged, the distance between the air knife main body and the substrate is shorter, external air source equipment can blow or dry the substrate in a low energy consumption mode, and the main effect of energy conservation is achieved.
Description
Technical Field
The present invention relates to a mechanism for drying or blowing a substrate, and more particularly to an air knife structure and a mechanism thereof, which has a structure for saving energy and improving blowing efficiency.
Background
In many drying and cleaning apparatuses for large-area substrates, an air knife structure is used to blow dry air onto the surface of the substrate to remove residual solvent and moisture on the substrate.
The air knife structure currently used in the industry is shown in fig. 1, the air knife 500 and the suspension system (not shown) are disposed at an inclination angle θ 1 of 37 degrees, but such a disposition would result in a limited distance between the air knife outlet 501 and the substrate a and a poor blowing efficiency; the air knife 500 is disposed such that the main body cannot be brought closer to the substrate a, and if the air knife 500 is forced to be brought closer and then the outlet collides with the substrate a, the distance between the air knife 500 and the substrate a is too large, the wind power must be increased, but this causes a problem of energy consumption in a factory, and if the wind power is not increased, the solvent and moisture may remain on the surface of the substrate.
In addition, the position of the main body is adjusted by the conventional air knife 500, generally, the main body is prone to sag gradually due to gravity when being used for a long time, and due to the arrangement of the inclined air knife 500, the testing stage before installation is complex and tedious, the testing is time-consuming, and the labor cost is increased.
How to improve the conventional structure deficiency is a problem that related manufacturers actively overcome.
Disclosure of Invention
The invention aims to overcome the defects that the air knife structure is vertically arranged, so that the air knife main body and the substrate can be drawn to be close, and after the air flow passes through the narrow slit, the direction of the knife edge forms an air flow, thereby effectively saving the efficiency and the cost of factory supply and improving the drying efficiency.
The secondary purpose of the invention is to effectively save the process steps before assembly after the distance between the air knife body and the substrate is shortened, thereby shortening the time and achieving the benefits of saving time and cost.
The structure for achieving the above object mainly provides an air knife structure, which mainly comprises: the air knife main body consists of a first body and a second body, the first body is provided with at least one first air flow channel, the second body is further provided with an air inlet connecting pipe connected with the first air flow channel, the lower ends of the first body and the second body are provided with an inclined front knife edge, an air knife included angle is formed between the front knife edge and the first body, and the air knife included angle is 30-50 degrees.
In an embodiment of the present invention, the air cleaner further includes a third body, the second body is connected to the front end of the first body and forms the front blade, the third body is connected to the rear end of the first body, a second air flow channel is disposed between the third body and the first body, and a lower end of the third body and the lower end of the first body are disposed along the rear blade.
In an embodiment of the invention, the air knife main body further includes a third body, the second body is connected to the front end of the first body and forms the front knife edge, the third body is connected to the rear end of the first body, and a second air flow channel is arranged between the third body and the first body,
in an embodiment of the present invention, a rear knife edge is further disposed at the lower end of the third body.
In an embodiment of the invention, the air knife main body is arranged perpendicular to a substrate direction.
In an embodiment of the present invention, the front blade and the air blade of the first body form an included angle of 40 degrees.
In an embodiment of the present invention, a suspension device is further disposed at the upper end of the air knife main body, and the suspension device has a U-shaped connection region.
In an embodiment of the present invention, a suspension device is further disposed at the upper end of the air knife main body, and the suspension device has an H-shaped connection region.
In an embodiment of the invention, the suspension means may be rectangular.
In the foregoing embodiments, the suspension device is made of sheet metal or steel.
In an embodiment of the present invention, the distance between the air knife body and a substrate is between 1 cm and 3 cm.
In the aforementioned embodiment, the distance between the air knife main body and the substrate is between 1 cm and 1.5 cm.
In the embodiment of the invention, the air consumption of the front edge of the air knife main body is 55-75% of the whole air consumption, and the air consumption of the rear edge is 25-45% of the whole air consumption.
In an embodiment of the invention, the air knife structure further includes a substrate, and the substrate is a display panel.
In order to achieve the above object, an air knife mechanism is provided, which at least comprises: the air knife device further comprises at least one air knife structure, at least one air filtering device and a conveying platform; the air filtering device is connected to two sides of the air knife main body; the conveying platform is arranged below the air knife main body of the air knife structure, wherein the air filtering device further comprises at least one adjusting component and at least one filtering component.
In an embodiment of the invention, the air knife main body of the air knife structure forms a main body setting angle and is arranged below the conveying platform, and the main body setting angle is obliquely arranged at an angle of 20-40 degrees.
In an embodiment of the present invention, the adjusting component further comprises a flow monitor.
In an embodiment of the present invention, the adjusting assembly further includes a flow regulating valve connected to the flow monitor.
Therefore, the effect of the present invention according to the technical means of the present invention can be briefly described as follows.
1. The air knife main body is vertically arranged with the substrate, so that the air knife main body can be stably fixed and can be prevented from drooping and touching the substrate.
2. The air knife main body is vertically designed with the substrate, so that the space can be saved, the air knife main body is closer to the substrate, and the drying is accelerated and the cleaning effect is achieved.
3. By means of the configuration between the air knife main body and the substrate, the distance between the air knife main body and the substrate is shortened, the air blowing cleaning efficiency can be improved, and the energy consumption of an air compressor is reduced.
4. Through the vertical design of the air knife main body, the height and the position of the air knife main body can be adjusted very easily without angle adjustment, and the convenience of the whole use is improved.
Drawings
FIG. 1 is a view of a conventional air knife.
Fig. 2 is an external view of the air knife body of the present invention.
FIG. 3 is a cross-sectional view (I) of the air knife body of the present invention, showing a single blade structure.
Fig. 4 is a sectional view of the air knife body of the present invention, which shows a double-blade structure.
FIG. 5 is a diagram of a preferred embodiment of the present invention.
Fig. 6 is a perspective view of the air knife mechanism.
Fig. 7A is a block diagram of the air knife mechanism according to the first embodiment.
Fig. 7B is a block diagram of a second embodiment of the air knife mechanism.
Fig. 8 is a view (one) showing a usage state of the suspension device.
Fig. 9 shows a usage of the suspension device (ii).
Fig. 10 is a schematic view of a preferred embodiment of the air knife mechanism.
Description of the figure numbers:
1 air knife mechanism
100 air knife device
10 air knife main body
10' air knife body
11 first body
111 first air flow channel
12 second body
121 air inlet connecting pipe
13 front knife edge
13' second front edge
14 third body
141 second air flow path
15 rear knife edge
15' second rear edge
200 air filter
210 adjustment assembly
211 first adjusting assembly
212 second adjustment assembly
213 third regulating assembly
214 fourth adjustment assembly
220 filter assembly
221 first filter assembly
222 second filter assembly
223 third filter assembly
224 fourth filter assembly
230 flow monitoring meter
231 first flow monitor
232 second flow monitor
233 third flow monitor
234 fourth flow monitor
240 flow regulating valve
241 first flow regulating valve
242 second flow regulating valve
300 suspension device
400 conveying platform
500 air knife
501 air knife outlet
600 air compressor device
601 first air compressor
602 second air compressor
603 third air compressor
604 fourth air compressor
A substrate
Theta third body knife edge angle
Angle of inclination of theta 1
Theta 2 air knife included angle
Theta 3 arrangement angle
And theta 4 air knife setting angle.
Detailed Description
Referring to fig. 1 to 5, the air knife structure of the present invention mainly includes: an air knife main body 10, the air knife main body 10 is composed of a first body 11 and a second body 12, the first body 11 is provided with at least one first air flow channel 111, the second body 12 is further provided with an air inlet connecting pipe 121 connected with the first air flow channel 111, the lower ends of the first body 11 and the second body 12 are provided with an inclined front knife edge 13, the front knife edge 13 and the first body 11 form an air knife included angle theta 2, and the air knife included angle theta 2 is between 30 degrees and 50 degrees; the air consumption of the front blade 13 of the air knife main body 10 is 55% to 75% of the whole air consumption, and the air consumption of the rear blade 15 is 25% to 45% of the whole air consumption, so that the air flow of the blown air can be increased, and the drying efficiency can be increased.
The air knife main body 10 is arranged perpendicular to a substrate A, so that the configuration angle theta 3 between the air knife main body 10 and the substrate A is 90 degrees, the distance between the substrate A and the air knife main body 10 can be effectively shortened, the air knife main body 10 is closer to the substrate, and drying is accelerated and a cleaning effect is achieved; in addition, the front blade 13 and the air knife included angle θ 2 of the first body 11 are configured such that the optimal value of the air knife included angle θ 2 is 40 degrees.
As shown in fig. 4, in the embodiment of the present invention, a third body 14 is further included, the second body 12 is connected to the front end of the first body 11 and forms the front blade 13, the third body 14 is connected to the rear end of the first body 11, and a second air flow channel 141 is disposed between the third body 14 and the first body 11, wherein a rear blade 15 is further disposed at the lower end of the third body 14, and a third body blade angle θ is disposed at the edge of the rear blade 15 and the third body 14, wherein the third body blade angle θ is between 0 degree and 90 degrees, preferably between 30 degrees and 70 degrees.
Wherein, the wind knife included angle θ 2 between the front knife edge 13 and the first body 11, the optimal value of the wind knife included angle θ 2 is 40 degrees, and the included angle between the rear knife edge 15 and the third body 14 is 0 degree.
As shown in fig. 5, since the substrate a is cleaned up and down at the same time, the upper and lower ends of the substrate a are respectively provided with the air knife main body 10 and the air knife main body 10 ', because the air knife main body 10 of the present invention is disposed in a vertical direction with respect to the substrate a, so that the disposition angle θ 3 between the air knife main body 10 and the substrate a is 90 degrees, the distance between the air knife main body 10 and the air knife main body 10' and the substrate a can be shortened, and basically, the distance between the air knife main body 10 and the substrate a of the present invention, the distance between the air knife main body 10 'and the substrate a, and the distance between the air knife main body 10' and the substrate a; the optimum value of the spacing is between 1 cm and 1.5 cm.
As shown in fig. 6, 7A and 7B, in an embodiment of the present invention, the air knife device 100 described above is installed on an air knife mechanism 1, and the air knife mechanism 1 at least includes: an air knife device 100, the air knife device 100 further comprises at least one air knife structure as described above, the air knife structure is preferably composed of two, at least one air filtering device 200, and a conveying platform 400; the air filter 200 is connected to both sides of the air knife body 10; the conveying platform 400 is disposed below the air knife main body 10 of the air knife structure, wherein the air filtering device 200 further comprises at least one adjusting component 210 and at least one filtering component 220.
Wherein, the second body 12 of the air knife structure further has an air inlet connection pipe 121 connected to the first air flow channel 111, the air inlet connection pipe 121 further can be provided with at least one air filtering device 200, and the air filtering device 200 is connected to two sides of the air knife main body 10; wherein the air filtering device 200 further comprises at least one conditioning element 210 and at least one filtering element 220; wherein, the air filter device 200 can be further provided with an air compressor device 600; the compressed air flows through the first air flow channel 111 and is then blown out from the front blade 13, so that moisture, solvent and dust on the substrate a are removed by the compressed air, and the drying efficiency is improved. In addition, the adjusting component 210 further comprises a flow monitor 230, and the adjusting component 210 further comprises a flow adjusting valve 240 connected to the flow monitor 230; therefore, the air knife device 100 performs pressure regulation and flow monitoring through the regulating component 210, performs air filtration cleaning treatment through the filtering component 220, and then reaches the first air flow channel 111 of the air knife main body 10 through the air inlet connecting pipe 121, so that after passing through the narrow slit, an air flow sheet is formed in the front and rear knife edges and is blown out.
In a preferred embodiment of the present invention, the air knife mechanism 1 comprises an air knife device 100, the air knife device 100 further comprises at least one air knife main body 10, preferably two air knife main bodies 10 and 10', and the number of the adjusting components 210 is preferably four, respectively a first adjusting component 211, a second adjusting component 212, a third adjusting component 213 and a fourth adjusting component 214; the number of filter elements 220 is preferably four, and each filter element is a first filter element 221, a second filter element 222, a third filter element 223, and a fourth filter element 224; wherein, each of the adjusting components 210 is further connected to each of the flow monitoring meters 230; the flow monitoring meters 230 are preferably four, which are a first flow monitoring meter 231, a second flow monitoring meter 232, a third flow monitoring meter 233 and a fourth flow monitoring meter 234; and the flow control valves 240 connected to the flow monitoring meters 230, wherein in an embodiment of the present invention, the flow control valves 240 are preferably two, and each of the two flow control valves 240 is composed of a first flow control valve 241 connected to the first flow monitoring meter 231 and the second flow monitoring meter 232, a second flow control valve 242 connected to the third flow monitoring meter 233 and the fourth flow monitoring meter 234, and a conveying platform 400; in the present embodiment; the air knife main body 10 and the air knife main body 10' are of a double-knife-edge structure. Therefore, the first adjusting component 211 corresponds to a first filtering component 221 and then corresponds to the front edge 13 of the air knife main body 10, and the second adjusting component 212 corresponds to a second filtering component 222 and then corresponds to the second front edge 13 'of the air knife main body 10'; the third adjusting component 213 corresponds to a third filtering component 223 and further corresponds to the rear blade edge 15 of the air knife main body 10, and the fourth adjusting component 214 corresponds to a fourth filtering component 224 and further corresponds to the second rear blade edge 15 'of the air knife main body 10', wherein the air knife main body 10 of the air knife structure is obliquely arranged below the conveying platform 400 at an angle of 20-40 degrees.
As shown in fig. 6 and 7B, the air knife body 10 is disposed at an angle of 30 degrees with respect to the base plate a; the substrate a is disposed on the conveying platform 400, and during operation, the first adjusting component 211, the second adjusting component 212, the third adjusting component 213, and the fourth adjusting component 214 are respectively connected to a first air compressor 601, a second air compressor 602, a third air compressor 603, and a fourth air compressor 604 of the air compressor device 600 through pipelines, so as to provide clean compressed air to the air knife main body 10 and the air knife main body 10' to dry the dust and the solvent on the surface of the substrate a with multiple air flows, thereby drying the surface of the substrate a.
As shown in fig. 8 or fig. 9, the upper end of the air knife main body 10 is further provided with a suspension device 300. Wherein the hanging device 300 has a U-shaped connection region, and as shown in fig. 9, the hanging device 300 has an H-shaped connection region, so that the air knife body 10 is assembled to the air knife mechanism 1; further, the suspension device 300 is made of sheet metal or steel, and the suspension device 300 may be rectangular. The suspension device 300 further comprises a fine adjustment component, and the corresponding position of the air knife structure can be quickly adjusted by tightening or loosening the screw.
Referring to fig. 10, in an embodiment of the present invention, the air knife main body 10 of the air knife structure forms an air knife setting angle θ 4 and is disposed below the conveying platform 400, the air knife setting angle θ 4 is inclined at an angle of 20 degrees to 40 degrees, the substrate a is fed into the air knife mechanism through the conveying platform 400, and the air knife main body 10' utilize the first air compressor to the fourth air compressor (not shown in fig. 10) to clean and dry the substrate a.
In addition, the proximity of the air knife main body 10 and the air knife main body 10' to the substrate a can improve the drying efficiency of the substrate a and prevent dust from blowing on the substrate a.
Claims (18)
1. An air knife structure, characterized in that, at least comprises: the air knife comprises an air knife main body (10), wherein the air knife main body (10) is composed of a first body (11) and a second body (12), the first body (11) is provided with at least one first air flow channel (111), the second body (12) is provided with an air inlet connecting pipe (121) connected with the first air flow channel (111), the lower ends of the first body (11) and the second body (12) are provided with an inclined front knife edge (13), the front knife edge (13) and the first body (11) form an air knife included angle (theta 2), and the air knife included angle (theta 2) is between 30 degrees and 50 degrees.
2. The air knife structure of claim 1, wherein the second body (12) is connected to the front end of the first body (11) and forms the front blade (13), the air knife body (10) comprises a third body (14), the third body (14) is connected to the rear end of the first body (11), and a second air flow channel (141) is disposed between the third body (14) and the first body (11).
3. An air knife structure according to claim 1, characterized in that the third body (14) is provided with a rear knife edge (15).
4. An air knife structure according to any one of claims 1 to 3, characterized in that the air knife body (10) is arranged perpendicular to a base plate (A).
5. An air knife structure according to any one of claims 1 to 3, characterized in that the air knife included angle (θ 2) between the front edge (13) and the first body (11) is 40 degrees.
6. An air knife structure according to claim 1, characterized in that the upper end of the air knife body (10) is provided with a suspension device (300), and the suspension device (300) is provided with a U-shaped connection region.
7. An air knife structure according to claim 1, characterized in that the upper end of the air knife body (10) is provided with a suspension device (300), and the suspension device (300) has an H-shaped connection region.
8. An air knife structure according to claim 6 or 7, characterized in that the suspension means (300) is rectangular.
9. An air knife structure according to claim 6 or 7, characterized in that the suspension means (300) is formed by sheet metal or steel.
10. An air knife structure according to any one of claims 1 to 3, characterized in that the air knife body (10) is spaced from a base plate (A) by a distance of between 1 cm and 3 cm.
11. A wind knife structure according to any of claims 1 to 3, characterized in that the distance between the wind knife body (10) and a base plate (a) is between 1 cm and 1.5 cm.
12. An air knife structure according to claim 3, characterized in that the air consumption of the front edge (13) of the air knife body (10) is between 55 and 75% of the total air consumption, and the air consumption of the rear edge (15) is between 25 and 45% of the total air consumption.
13. The air knife structure of claim 4, 10 or 11, wherein the air knife structure comprises a substrate (a), and the substrate (a) is a display panel.
14. An air knife mechanism, characterized in that the air knife mechanism (1) comprises at least:
an air knife device (100), the air knife device (100) comprising at least one air knife structure according to claim 1 or 2, at least one air filtering device (200), and a conveying platform (400); the air filtering device (200) is connected to two sides of the air knife main body (10);
the conveying platform (400) is arranged below the air knife main body (10) of the air knife structure, wherein the air filtering device (200) comprises at least one adjusting component (210) and at least one filtering component (220).
15. The air knife mechanism of claim 14, wherein the air knife body (10) of the air knife structure forms an air knife setting angle (θ 4) and is disposed below the conveying platform (400), and the air knife setting angle (θ 4) is inclined at an angle of 20 to 40 degrees.
16. An air knife mechanism according to claim 14 or 15, characterised in that the adjustment assembly (210) is connected to a flow monitor meter (230).
17. The air knife mechanism of claim 16, wherein the regulating assembly (210) comprises a flow regulating valve (240) connected to the flow monitor (230).
18. An air knife mechanism according to claim 16, characterised in that each air filter device (200) is provided with at least one air compressor device (600).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911297218.7A CN112985043A (en) | 2019-12-17 | 2019-12-17 | Air knife structure and mechanism thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911297218.7A CN112985043A (en) | 2019-12-17 | 2019-12-17 | Air knife structure and mechanism thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112985043A true CN112985043A (en) | 2021-06-18 |
Family
ID=76341785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911297218.7A Withdrawn CN112985043A (en) | 2019-12-17 | 2019-12-17 | Air knife structure and mechanism thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112985043A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113458080A (en) * | 2021-07-05 | 2021-10-01 | 长鑫存储技术有限公司 | Air knife and cleaning equipment |
| CN114739144A (en) * | 2022-05-11 | 2022-07-12 | 广东嘉拓自动化技术有限公司 | Baking oven |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435058A (en) * | 2011-07-08 | 2012-05-02 | 友达光电股份有限公司 | Drying equipment, photoresist removing equipment and drying method |
| CN202254722U (en) * | 2011-08-10 | 2012-05-30 | 亚智科技股份有限公司 | Double-edge air knife device |
| CN103017500A (en) * | 2012-12-04 | 2013-04-03 | 彩虹（佛山）平板显示有限公司 | Drying process of cleaning machine for cover plate glass |
| CN204007044U (en) * | 2014-08-07 | 2014-12-10 | 熊丹 | Air knife adjusting device and air knife type plate cleaning equipment |
| CN105318693A (en) * | 2014-06-16 | 2016-02-10 | 三星显示有限公司 | Apparatus for drying substrate |
| CN107680916A (en) * | 2016-06-28 | 2018-02-09 | 株式会社荏原制作所 | Cleaning device, the plater and cleaning method with the cleaning device |
| CN207849979U (en) * | 2017-11-24 | 2018-09-11 | 昆山龙腾光电有限公司 | A kind of air knife and apparatus for drying |
| CN211601505U (en) * | 2019-12-17 | 2020-09-29 | 亚智科技股份有限公司 | Air knife structure and mechanism thereof |
-
2019
- 2019-12-17 CN CN201911297218.7A patent/CN112985043A/en not_active Withdrawn
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435058A (en) * | 2011-07-08 | 2012-05-02 | 友达光电股份有限公司 | Drying equipment, photoresist removing equipment and drying method |
| CN202254722U (en) * | 2011-08-10 | 2012-05-30 | 亚智科技股份有限公司 | Double-edge air knife device |
| CN103017500A (en) * | 2012-12-04 | 2013-04-03 | 彩虹（佛山）平板显示有限公司 | Drying process of cleaning machine for cover plate glass |
| CN105318693A (en) * | 2014-06-16 | 2016-02-10 | 三星显示有限公司 | Apparatus for drying substrate |
| CN204007044U (en) * | 2014-08-07 | 2014-12-10 | 熊丹 | Air knife adjusting device and air knife type plate cleaning equipment |
| CN107680916A (en) * | 2016-06-28 | 2018-02-09 | 株式会社荏原制作所 | Cleaning device, the plater and cleaning method with the cleaning device |
| CN207849979U (en) * | 2017-11-24 | 2018-09-11 | 昆山龙腾光电有限公司 | A kind of air knife and apparatus for drying |
| CN211601505U (en) * | 2019-12-17 | 2020-09-29 | 亚智科技股份有限公司 | Air knife structure and mechanism thereof |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113458080A (en) * | 2021-07-05 | 2021-10-01 | 长鑫存储技术有限公司 | Air knife and cleaning equipment |
| WO2023279412A1 (en) * | 2021-07-05 | 2023-01-12 | 长鑫存储技术有限公司 | Air knife and cleaning apparatus |
| CN114739144A (en) * | 2022-05-11 | 2022-07-12 | 广东嘉拓自动化技术有限公司 | Baking oven |
| CN114739144B (en) * | 2022-05-11 | 2023-08-04 | 广东嘉拓自动化技术有限公司 | Baking oven |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211601505U (en) | Air knife structure and mechanism thereof | |
| CN112985043A (en) | Air knife structure and mechanism thereof | |
| US6821310B2 (en) | Device and method for air filtration | |
| CN104500231A (en) | Efficient recycling air filtration device used for gas turbine | |
| CN110773341A (en) | Atomization cooling device, automatic processing equipment and method | |
| CN104500230A (en) | High efficiency and energy saving blowback device used for gas turbine air inlet system | |
| CN217368952U (en) | Production line for workpiece surface spraying | |
| JP2001091005A (en) | Clean room equipment | |
| CN204344283U (en) | A kind of energy-efficient back-blowing device for gas turbine inlet air system | |
| TWM595744U (en) | Wind knife structure and its mechanism | |
| CN104533627A (en) | Air inlet apparatus used for gas turines | |
| JP2001330303A (en) | Clean room equipment | |
| TW202124896A (en) | Air knife structure and its mechanism capable of effectively saving the energy consumption and cost and enhancing the blow drying efficiency | |
| CN206593211U (en) | A kind of air-conditioning with eddy flow function air-out nozzle | |
| CN204344277U (en) | A kind of air inlet system for gas turbine | |
| CN101050881B (en) | Blowing outlet for air condition | |
| CN205025590U (en) | A high -efficient noise elimination air inlet unit for gas turbine | |
| CN208289697U (en) | Mobile Sanding Room dust pelletizing system and mobile Sanding Room | |
| CN204018287U (en) | A kind of cleaning device | |
| CN204337913U (en) | A kind of three grades of air filtering systems | |
| CN220624346U (en) | High-efficient supply-air outlet | |
| CN115646942A (en) | Cleaning control and detection device and method for blowing-sucking integrated light beam synthesis system | |
| CN217785353U (en) | Temperature control device | |
| CN209060743U (en) | A kind of air filter | |
| CN210220157U (en) | Integrated circuit production is with energy-saving equipment of airing exhaust |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20210618 |