CN112941625A - System and method for synthesizing diamond by utilizing methane - Google Patents
System and method for synthesizing diamond by utilizing methane Download PDFInfo
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- CN112941625A CN112941625A CN202110300351.4A CN202110300351A CN112941625A CN 112941625 A CN112941625 A CN 112941625A CN 202110300351 A CN202110300351 A CN 202110300351A CN 112941625 A CN112941625 A CN 112941625A
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- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 title claims abstract description 132
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 60
- 239000010432 diamond Substances 0.000 title claims abstract description 60
- 230000002194 synthesizing effect Effects 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000000746 purification Methods 0.000 claims abstract description 24
- 238000006243 chemical reaction Methods 0.000 claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 238000010248 power generation Methods 0.000 claims abstract description 13
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 12
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 36
- 239000013078 crystal Substances 0.000 claims description 24
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 7
- 238000003860 storage Methods 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000000855 fermentation Methods 0.000 claims description 3
- 230000004151 fermentation Effects 0.000 claims description 3
- 238000003698 laser cutting Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000000087 stabilizing effect Effects 0.000 claims description 3
- 238000010189 synthetic method Methods 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 150000002605 large molecules Chemical class 0.000 claims 1
- 229920002521 macromolecule Polymers 0.000 claims 1
- 150000003384 small molecules Chemical class 0.000 claims 1
- 238000002360 preparation method Methods 0.000 abstract description 2
- 230000008569 process Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000001069 Raman spectroscopy Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10L—FUELS NOT OTHERWISE PROVIDED FOR; NATURAL GAS; SYNTHETIC NATURAL GAS OBTAINED BY PROCESSES NOT COVERED BY SUBCLASSES C10G, C10K; LIQUEFIED PETROLEUM GAS; ADDING MATERIALS TO FUELS OR FIRES TO REDUCE SMOKE OR UNDESIRABLE DEPOSITS OR TO FACILITATE SOOT REMOVAL; FIRELIGHTERS
- C10L3/00—Gaseous fuels; Natural gas; Synthetic natural gas obtained by processes not covered by subclass C10G, C10K; Liquefied petroleum gas
- C10L3/06—Natural gas; Synthetic natural gas obtained by processes not covered by C10G, C10K3/02 or C10K3/04
- C10L3/10—Working-up natural gas or synthetic natural gas
- C10L3/101—Removal of contaminants
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E50/00—Technologies for the production of fuel of non-fossil origin
- Y02E50/30—Fuel from waste, e.g. synthetic alcohol or diesel
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Abstract
The invention belongs to the technical field of diamond preparation, and discloses a system and a method for synthesizing diamond by utilizing methane, wherein the system for synthesizing diamond by utilizing methane is provided with a methane tank, and the methane tank is sequentially connected with a power generation device and a power supply device; the methane tank is also connected with a gas purification device, the gas purification device is connected with the vacuum reaction chamber through a gas pipeline, and the power supply device is connected with the vacuum reaction chamber through an energy transmission device to provide energy for the vacuum reaction chamber. The system for synthesizing diamond by using methane provided by the invention can ensure stable electric quality and no power failure, effectively improve the yield of diamond synthesis and reduce the cost.
Description
Technical Field
The invention belongs to the technical field of diamond preparation, and particularly relates to a system and a method for synthesizing diamond by utilizing methane.
Background
At present, the single crystal diamond synthesis technology is widely applied, but two key problems still exist, and the process of mass production is difficult to solve.
First is electric power unstability, what generally adopt is the electric direct energy supply of electric wire netting, turn into the electric energy the synthetic required energy of diamond, but because diamond synthesis time is longer, it is higher to the quality requirement of electricity, can not have undulantly, if power failure suddenly will lead to diamond crystal to produce the crackle and lead to the product to scrap, the commercial power has the peak period power consumption in addition and leads to the commercial power unstability greatly, fluctuation about the voltage also will lead to the unstability of product, although also carry out the optimization of electric energy through modes such as constant voltage power supply, group battery at present, but fundamentally solves the problem, so lead to the product rejection rate high, lead to the cost on the high side.
Secondly, the gas purity is unstable, what adopted at present is to store and use through the mode of changing the gas cylinder, because the gas cylinder storage capacity is limited, the diamond synthesis process is a process that lasts and takes a long time, and the device needs to change gas, then produces very easily and leaks and sneak into impurity, and security and quality all can not obtain effectual assurance.
Therefore, the development of a system for yield improvement of diamond products is a problem that is urgently needed to be solved at present.
Through the above analysis, the problems and defects of the prior art are as follows:
(1) the electric power is unstable in the process of synthesizing the single crystal diamond.
(2) The gas purity is unstable during the synthesis of single crystal diamond.
(3) In the synthesis process of the prior art, internal defects are formed in the crystal growth due to unstable factors, which are mainly reflected in unstable input power, and the second is unstable gas purity, and pressure difference and uncontrollable impurities are generated in the crystal growth due to continuous replacement of a gas cylinder.
The significance of solving the problems and the defects is as follows:
by improving the power utilization quality, a plurality of methods can be used, such as solar power generation, but as the growth is continuously carried out, the solar energy can be fully supplied by the day, and the stability cannot be ensured due to large energy consumption at night; the power quality is improved by a voltage-stabilized power supply and the like, and accidental power failure cannot be guaranteed, and due to the fact that the crystal growth temperature is high, if power failure occurs suddenly, the crystal is damaged due to cracks generated by thermal shock; therefore, the project adopts the methane for power generation, so that the methane can be stored in advance and stably supplied for a long time;
gas purification solves the methane purity problem through purification technology, but can produce pressure differential in the methane gas cylinder replacement process, leads to system vacuum stability to be destroyed to the gas cylinder has certain safety hazard.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a system and a method for synthesizing diamond by utilizing methane. The invention improves the quality of the product, reduces the defect density of the crystal and improves the production stability.
The system for synthesizing diamond by utilizing methane is provided with the methane tank, and the methane tank is sequentially connected with a power generation device and a power supply device;
the methane tank is also connected with a gas purification device, the gas purification device is connected with the vacuum reaction chamber through a gas pipeline, and the power supply device is connected with the vacuum reaction chamber through an energy transmission device to provide energy for the vacuum reaction chamber.
Further, the capacity of the methane tank is 10-1000 cubic meters; the power of the power generation device is 10-1000 kw; the flow of the gas purification device is 10slm-1000slm, and the purity of gas in the gas purification device is more than 99.99%.
Further, the power supply device includes: one of a direct current/alternating current power supply, a microwave power supply or a direct current power supply is divided into a direct current/alternating current power supply adopted by a hot wire cvd, a microwave power supply adopted by the microwave cvd and a direct current power supply adopted by the direct current cvd according to the principle of synthesizing the diamond.
Further, the energy transmission device comprises: the waveguide tube or the electric wire is used for energy transmission, the transmission is distinguished according to different principles, the microwave cvd adopts the waveguide tube for energy transmission, and the hot wire cvd and the direct current cvd are transmitted through the electric wire.
Furthermore, the gas pipeline is made of stainless steel pipes, and the size of the stainless steel pipes ranges from one inch of four parts to three inches of eight parts.
Further, a sample stage is placed in the vacuum reaction chamber, a substrate is arranged on the sample stage, the vacuum reaction chamber is made of stainless steel or aluminum, and the size of the cavity is 100-300 mm; the substrate is made of crystal material silicon, molybdenum or a diamond sheet required by diamond synthesis, and the size of the substrate is 1-200 mm; the sample platform is made of copper or aluminum material, and the diameter of the sample platform is 30-200 mm.
Another object of the present invention is to provide the method of the system for synthesizing diamond by using biogas, wherein the method for synthesizing diamond by using biogas comprises the following steps:
step one, collecting organic matters into a methane tank, performing fermentation treatment to generate methane, collecting and storing the methane by using a gas storage tank, and collecting and storing the methane;
selecting a substrate, cleaning the substrate and drying the substrate;
step three, placing the substrate into a cavity of a plasma CVD device, and then vacuumizing the substrate to 1 x 10-4Pa, then introducing 1-1000sccm hydrogen into each device, inputting energy, generating discharge, adjusting the seed crystal temperature to 600-800 ℃, and treating for 1-120 min;
step four, introducing purified methane and hydrogen for growth;
and step five, taking out the substrate after the growth is finished, and performing laser cutting and polishing treatment to obtain the required product.
Further, the biogas is conveyed in two types; one part of the marsh gas is used for conveying to a gas purification device for separation and purification, the other part of the marsh gas is used for generating electricity, and the voltage is stabilized at 380V through a power generation device and a voltage stabilizing device for storage and input into equipment.
Further, in the second step, the biogas is separated into micromolecular gas hydrogen and macromolecular gas methane, the micromolecular gas hydrogen and the macromolecular gas methane are respectively purified, the purity is improved to be more than 99.99%, and the flow is controlled to be 10slm-1000 slm.
Further, cleaning the substrate by using acetone and alcohol volatile liquid to clean organic impurities on the surface of the substrate;
the substrate temperature is controlled at 800-1000 ℃ and the growth is carried out for 10-100 hours.
By combining all the technical schemes, the invention has the advantages and positive effects that:
the system for synthesizing diamond by using methane can ensure stable electric quality without power failure, effectively improve the yield of diamond synthesis and reduce the cost.
The power system is input into the synthesis equipment through a stable power system, the risk of sudden power failure of a power grid can be solved, the continuity of the synthesis process can be guaranteed, the product efficiency is improved, and the production cost can be effectively reduced through self power supply.
FIG. 2(a) is an enlarged view of a single crystal diamond synthesized by a conventional process, which is unstable and has more defects at the edge and center;
FIG. 2(b) is a diagram showing the effect of the synthesized product of the present invention; after the method improves the stability of the product, the stress distribution of the existing product is more uniform, and the product performance is better.
(2) According to the system for synthesizing diamond by using methane, provided by the invention, as the methane tank is connected with the gas purification device and is connected with the vacuum reaction chamber through the gas pipeline, the gas is pure and continuous supply is realized, and the problems of impurities and unsafe risks introduced in the process of replacing the gas cylinder can be solved.
(3) The system for synthesizing diamond by using methane provided by the invention is green and environment-friendly, solves the problem of emission of organic matters in life, digests the organic matters, obtains reasonable utilization of resources, and can be converted into products with high added values.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained from the drawings without creative efforts.
Fig. 1 is a schematic diagram of a system for synthesizing diamond by using biogas according to an embodiment of the present invention.
In the figure: 1. a biogas generating pit; 2. a power generation device; 3. a gas purification device; 4. a power supply device; 5. an energy transmission device; 6. a gas conduit; 7. a vacuum reaction chamber; 8. a substrate; 9. a sample stage.
Fig. 2 is an optical enlarged view of a single crystal diamond synthesized by a conventional process and a product effect diagram synthesized by the present invention. FIG. 2(a) an optical magnified view of a single crystal diamond synthesized by a prior art process. FIG. 2(b) is a diagram showing the effect of the synthesized product of the present invention.
Fig. 3 is a surface optical magnification topography of the test raman provided by the embodiment of the present invention.
Fig. 4 is a raman peak diagram of a high quality single crystal diamond provided by an embodiment of the present invention.
Fig. 5 is a graph showing the effect of the infrared transmittance test of the single crystal diamond according to the embodiment of the present invention.
Fig. 6 is a diagram of a product developed by the present invention according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The system provided by the invention can change a large amount of existing methane into valuable, solves the problem of waste treatment in life, changes the methane into diamond, realizes reasonable utilization of resources, provides stable electric energy and pure gas raw materials for the growth process of the diamond, ensures the quality of diamond products and improves the yield. The present invention will be described in detail below with reference to the accompanying drawings.
A system for synthesizing diamond by biogas, comprising: the methane tank is sequentially connected with the power generation device and the power supply device, the methane tank is also connected with the gas purification device, the gas purification device is connected with the vacuum reaction chamber through a gas pipeline, and the power supply device is connected with the vacuum reaction chamber through an energy transmission device to provide energy for the vacuum reaction chamber.
Further preferably, the capacity of the methane tank is 10-1000 cubic meters; the power of the power generation device is 10-1000 kw; the flow of the gas purification device is 10slm-1000slm, and the purity of gas in the gas purification device is more than 99.99%.
Further preferably, the power supply device includes: one of a direct current/alternating current power supply, a microwave power supply or a direct current power supply is divided into a direct current/alternating current power supply adopted by a hot wire cvd, a microwave power supply adopted by the microwave cvd and a direct current power supply adopted by the direct current cvd according to the principle of synthesizing the diamond.
Further preferably, the energy transmission device includes: the waveguide tube or the electric wire is used for energy transmission, the transmission is distinguished according to different principles, the microwave cvd adopts the waveguide tube for energy transmission, and the hot wire cvd and the direct current cvd are transmitted through the electric wire.
Further preferably, the gas pipeline is made of stainless steel pipes and has the size of one-fourth inch to three-eighths inch
Preferably, a sample stage is placed in the vacuum reaction chamber, a substrate is arranged on the sample stage, the vacuum reaction chamber is made of stainless steel or aluminum, and the size of the cavity is 100-300 mm; the substrate is made of crystal material silicon, molybdenum or a diamond sheet required by diamond synthesis, and the size of the substrate is 1-200 mm; the sample platform is made of copper or aluminum material, and the diameter of the sample platform is 30-200 mm.
On the other hand, the invention also provides a using method of the system for synthesizing diamond by using methane, which comprises the following specific steps:
collecting organic matters into a methane tank, performing fermentation treatment to generate methane, collecting and storing the methane by using a gas storage tank, and collecting and storing the methane;
2. selecting a substrate, cleaning the substrate and drying the substrate;
3. placing the substrate in a cavity of a plasma CVD apparatus (hot filament CVD, microwave CVD, DC CVD, etc.), and then evacuating to 1 x 10-4Pa, then introducing 1-1000sccm hydrogen into each device, inputting energy (including hot wire, microwave, direct current, etc.), generating discharge, adjusting the temperature of the seed crystal to 600-800 ℃, and treating for 1-120 min;
4. introducing purified methane and hydrogen for growth;
5. and taking out the substrate after growth is finished, and carrying out laser cutting and polishing treatment to obtain the required product.
Further preferably, the biogas is conveyed in two types; one part of the marsh gas is used for conveying to a gas purification device for separation and purification, the other part of the marsh gas is used for generating electricity, and the voltage is stabilized at 380V (plus or minus 10V) through a power generation device and a voltage stabilizing device for storage and input into equipment.
Preferably, in the step 2, the biogas is separated into micromolecular gas hydrogen and macromolecular gas methane, the micromolecular gas hydrogen and the macromolecular gas methane are respectively purified, the purity is improved to be more than 99.99%, and the flow is controlled to be 10slm-1000 slm;
preferably, the substrate is cleaned by using acetone and alcohol volatile liquid to clean organic impurities on the surface of the substrate.
Further preferably, the substrate temperature is controlled at 800-.
The present invention will be further described with reference to specific experimental effects.
The high-purity single crystal diamond is developed by the improved technology of the invention. FIG. 3 is a surface optical magnification topography of a test Raman. Fig. 4 is a raman peak diagram of a high quality single crystal diamond.
FIG. 5 is a graph showing the effect of infrared transmittance test of single crystal diamond. The single crystal diamond infrared transmittance test developed by the technology has better optical characteristics.
FIG. 6 is a pictorial representation of a product developed in accordance with the present invention. The material object diagram developed by the technology realizes high-quality mass production, and the yield is improved by 1 time.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The above description is only for the purpose of illustrating the present invention and the appended claims are not to be construed as limiting the scope of the invention, which is intended to cover all modifications, equivalents and improvements that are within the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The method for synthesizing the diamond by using the methane is characterized by comprising the following steps of:
step one, collecting organic matters into a methane tank, performing fermentation treatment to generate methane, collecting and storing the methane by using a gas storage tank, and collecting and storing the methane;
selecting a substrate, cleaning the substrate and drying the substrate;
step three, placing the substrate into a cavity of a plasma CVD device, and then vacuumizing the substrate to 1 x 10-4Pa, then introducing 1-1000sccm hydrogen into each device, inputting energy,discharging, adjusting the temperature of the seed crystal to 600-800 ℃, and treating for 1-120 min;
step four, introducing purified methane and hydrogen for growth;
and step five, taking out the substrate after the growth is finished, and performing laser cutting and polishing treatment to obtain the required product.
2. A synthetic method of diamond using biogas as set forth in claim 1, wherein the biogas is delivered in two categories; one part of the marsh gas is used for conveying to a gas purification device for separation and purification, the other part of the marsh gas is used for generating electricity, and the voltage is stabilized at 380V through a power generation device and a voltage stabilizing device for storage and input into equipment.
3. A method for synthesizing diamond using marsh gas as claimed in claim 1, wherein in step two, marsh gas is separated into small molecule gas hydrogen and large molecule gas methane, which are purified respectively to increase purity to above 99.99%, and flow rate is controlled at 10slm-1000 slm.
4. A synthetic method of diamond using biogas as described in claim 1, wherein the substrate is cleaned by using acetone and alcohol volatile liquid to clean organic impurities on the surface of the substrate;
the substrate temperature is controlled at 800-1000 ℃ and the growth is carried out for 10-100 hours.
5. A system for synthesizing diamond by utilizing methane is characterized in that the system for synthesizing diamond by utilizing methane is provided with a methane tank, and the methane tank is sequentially connected with a power generation device and a power supply device;
the methane tank is also connected with a gas purification device, the gas purification device is connected with the vacuum reaction chamber through a gas pipeline, and the power supply device is connected with the vacuum reaction chamber through an energy transmission device to provide energy for the vacuum reaction chamber.
6. A system for synthesizing diamond using methane according to claim 1, wherein the capacity of the methane tank is 10 cubic meters to 1000 cubic meters; the power of the power generation device is 10-1000 kw; the flow of the gas purification device is 10slm-1000slm, and the purity of gas in the gas purification device is more than 99.99%.
7. A system for synthesizing diamond using biogas as set forth in claim 1, wherein the power supply means comprises: one of a direct current/alternating current power supply, a microwave power supply or a direct current power supply is divided into a direct current/alternating current power supply adopted by a hot wire cvd, a microwave power supply adopted by the microwave cvd and a direct current power supply adopted by the direct current cvd according to the principle of synthesizing the diamond.
8. A system for synthesizing diamond using biogas as set forth in claim 1, wherein the energy transmission means comprises: the waveguide tube or the electric wire is used for energy transmission, the transmission is distinguished according to different principles, the microwave cvd adopts the waveguide tube for energy transmission, and the hot wire cvd and the direct current cvd are transmitted through the electric wire.
9. A system for synthesizing diamond using biogas as set forth in claim 1, wherein the gas pipe is made of stainless steel pipe having a size of one-fourth inch to three-eighths inch.
10. The system for synthesizing diamond by using methane according to claim 1, wherein a sample stage is placed in the vacuum reaction chamber, a substrate is arranged on the sample stage, the vacuum reaction chamber is made of stainless steel or aluminum, and the size of the chamber is 100-300 mm; the substrate is made of crystal material silicon, molybdenum or a diamond sheet required by diamond synthesis, and the size of the substrate is 1-200 mm; the sample platform is made of copper or aluminum material, and the diameter of the sample platform is 30-200 mm.
Priority Applications (1)
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