CN112928887A

CN112928887A - Displacement device

Info

Publication number: CN112928887A
Application number: CN202110146570.1A
Authority: CN
Inventors: 丁晨阳; 苏新艺; 龚威; 彭仁强; 杨晓峰
Original assignee: Fudan University; Shanghai Precision Measurement Semiconductor Technology Inc
Current assignee: Fudan University; Shanghai Precision Measurement Semiconductor Technology Inc
Priority date: 2021-02-03
Filing date: 2021-02-03
Publication date: 2021-06-08

Abstract

The invention discloses a displacement device, which comprises a first frame part and a second frame part, wherein the first frame part comprises a first coil array, a second coil array, a third coil array, a fourth coil array, a fifth coil array, a sixth coil array, a seventh coil array and an eighth coil array, the first coil array, the second coil array and the fourth coil array are all arranged on a first plane parallel to a first direction; the second frame portion comprises a plurality of magnet arrays, the first magnet array and projections of the first coil array and the second coil array on a first plane respectively have an intersection, the second magnet array and projections of the third coil array and the fourth coil array on the first plane respectively have an intersection, the third magnet array and projections of the fifth coil array and the sixth coil array on a second plane respectively have an intersection, and the fourth magnet array and projections of the seventh coil array and the eighth coil array on a third plane respectively have an intersection.

Description

Displacement device

Technical Field

The invention relates to the field of automatic equipment, in particular to a displacement device.

Background

In the 21 st century, the precision of production facilities such as semiconductor devices has been increasing, and the demand for productivity has been increasing. The large-stroke motion platform technology is the core technology of an automatic equipment manufacturing system, and is always highly valued in the industry. The performance and the productivity of the automatic equipment also put higher requirements on the performances of the motion platform, such as speed acceleration, positioning accuracy and the like. The traditional large-stroke motion platform system usually adopts a technical mode of a linear motor and a mechanical guide rail, or adopts a technical mode of the linear motor and an air floatation guide rail. The technical mode of the linear motor and the mechanical guide rail introduces mechanical friction, and limits the improvement of performance. Although the technical mode of the linear motor and the air-floating guide rail reduces the influence of mechanical friction, the requirement on the flatness of the large-size air-floating support surface is very high, the processing and manufacturing difficulty is increased, the production cost is increased, and more importantly, the mode cannot be applied to a vacuum environment. The magnetic levitation technology mainly has the following remarkable advantages: the air floatation device has the advantages of no mechanical contact and friction, capability of meeting the requirement of an ultra-clean manufacturing environment, capability of realizing large thrust with small current, low maintenance cost, long service life, high rigidity, large bearing capacity, larger suspension clearance (more than 200 microns and 20 times of the air floatation clearance) and lower environmental requirement, and is suitable for vacuum environment and the like compared with air floatation. Meanwhile, the manufacturing industry is gradually moving towards intellectualization and flexibility, which also puts higher requirements on the motion table, namely modularization, expandability and flexibility, and generally needs the motion table to realize control of multiple degrees of freedom. The existing motion table is difficult to meet all the requirements, so the development problem of the novel multi-degree-of-freedom magnetic suspension motion table needs to be solved and perfected.

Disclosure of Invention

The invention aims to provide a displacement device, which solves the problem of independently controlling six degrees of freedom of a rotor.

In order to achieve the object defined above, the invention provides a displacement device comprising at least one first frame part and at least one second frame part, each first frame part being movable relative to the corresponding second frame part, characterized in that,

each first frame portion includes a first frame and a plurality of coil arrays including:

a first coil array, a second coil array, a third coil array, and a fourth coil array, all disposed on a first plane of the first frame parallel to the first direction; the first coil array comprises a plurality of first coils, the second coil array comprises a plurality of second coils, the third coil array comprises a plurality of third coils, and the fourth coil array comprises a plurality of fourth coils; the plurality of first coils, the plurality of second coils, the plurality of third coils and the plurality of fourth coils are respectively arranged adjacently in pairs along the first direction;

a fifth coil array and a sixth coil array each arranged on a second plane of the first frame parallel to the first direction; the fifth coil array comprises a plurality of fifth coils, and the sixth coil array comprises a plurality of sixth coils; the plurality of fifth coils and the plurality of sixth coils are respectively arranged along the first direction in a pairwise adjacent mode;

a seventh coil array and an eighth coil array each arranged on a third plane of the first frame parallel to the first direction; the seventh coil array comprises a plurality of seventh coils, and the eighth coil array comprises a plurality of eighth coils; the seventh coil and the eighth coil are respectively arranged two by two adjacently along the first direction;

wherein the first plane and the second plane are not parallel to each other, and the second plane and the third plane are parallel to each other;

the second frame portion includes a second frame and a plurality of magnet arrays including:

the first magnet array and the second magnet array are arranged on a fourth plane of the second frame parallel to the first plane, and the first magnet array intersects with projections of the first coil array and the second coil array on the first plane respectively; the second magnet array intersects with projections of the third coil array and the fourth coil array on a first plane respectively; the first magnet array comprises a plurality of first N magnets and a plurality of first S magnets, the first N magnets and the first S magnets are alternately arranged along the first direction, and the magnetization directions of the first N magnets and the first S magnets are different from each other; the second magnet array comprises a plurality of second N magnets and a plurality of second S magnets, the second N magnets and the second S magnets are alternately arranged along the first direction, and the magnetization directions of the second N magnets and the second S magnets are different from each other;

a third magnet array disposed on a fifth plane of the second frame parallel to the second plane, the third magnet array intersecting projections of the fifth coil array and the sixth coil array on the second plane, respectively; the third magnet array comprises a plurality of third N magnets and a plurality of third S magnets, the third N magnets and the third S magnets are alternately arranged along the first direction, and the magnetization directions of the third N magnets and the third S magnets are different from each other;

a fourth magnet array disposed on a sixth plane of the second frame parallel to the third plane, the fourth magnet array intersecting projections of the seventh coil array and the eighth coil array on the third plane, respectively; the fourth magnet array includes a plurality of fourth N magnets and a plurality of fourth S magnets, and the fourth N magnets and the fourth S magnets are alternately arranged in the first direction, and magnetization directions of the fourth N magnets and the fourth S magnets are different from each other.

According to the technical scheme provided by the invention, the relative movement of the frames is realized through the interaction force between the electrified coil and the magnet, different displacements can be realized according to various requirements, the frames are not in direct mechanical contact, the equipment and maintenance operation are convenient, and the manufacturing cost and the use cost can be effectively reduced for large-scale use. The invention solves the problem that the six degrees of freedom of the rotor can not be controlled independently in the prior art, and realizes the decoupling control of the six degrees of freedom of the rotor.

In one embodiment, each coil array contains N coils, where N is 3 × k, and k is a positive integer.

In one embodiment, the first frame further comprises a seventh plane and an eighth plane, the seventh plane and the eighth plane being parallel to the first plane, respectively;

the seventh plane and the eighth plane are respectively configured with a first reluctance motor array and a second reluctance motor array, wherein the first reluctance motor array comprises a plurality of first reluctance motors, and the first reluctance motors are adjacently configured in pairs along the first direction; the second reluctance motor array comprises a plurality of second reluctance motors which are arranged in a pairwise adjacent mode along the first direction.

In one embodiment, the first frame further comprises a ninth plane and a tenth plane, the ninth plane and the tenth plane being parallel to and disposed opposite to the first plane of the first frame, respectively; the surfaces of the ninth plane and the tenth plane are provided with ferromagnetic structures, the first reluctance motor array and the projections of the ferromagnetic structures on the ninth plane respectively have an intersection, and the second reluctance motor array and the projections of the ferromagnetic structures on the tenth plane respectively have an intersection.

In one embodiment, the displacement device further comprises a power amplifier for driving the coil array to generate a first magnetic field, which first magnetic field is generated by the coil array and a second magnetic field generated by a magnet array arranged opposite the coil array to act such that the first frame part is moved in one or more of six directions relative to the second frame part.

In one embodiment, the first magnet array further comprises a first H magnet, the plurality of first H magnets are arranged between the first N magnet and the first S magnet, and the first N magnet and the first S magnet are alternately arranged along the first direction, and the magnetization direction of the first H magnet is directed to the first N magnet by the adjacent first S magnet and is parallel to the first direction;

and/or

The second magnet array further comprises second H magnets, the plurality of second H magnets are arranged between the second N magnets and the second S magnets, and the second N magnets and the second S magnets are alternately arranged along the first direction, and the magnetization direction of the second H magnets is directed to the second N magnets from the adjacent second S magnets and is parallel to the first direction;

and/or

The third magnet array further comprises third H magnets, the plurality of third H magnets are arranged between the third N magnets and the third S magnets, the third N magnets and the third S magnets are alternately arranged along the first direction, and the magnetization direction of the second H magnets is directed to the third N magnets from the adjacent third S magnets and is parallel to the first direction;

and/or

The fourth magnet array further includes fourth H magnets, the plurality of fourth H magnets are disposed between the fourth N magnets and the fourth S magnets, and the fourth N magnets and the fourth S magnets are alternately arranged along the first direction, and a magnetization direction of the fourth H magnet is directed from an adjacent fourth S magnet to the fourth N magnet and is parallel to the first direction.

In one embodiment, the displacement device further comprises a first position sensor;

one of the dimensions of the first magnet array and the first coil array in the second direction has a smaller dimension differential than the other, the dimension differential forming a first differential space within which the first position sensor is located for measuring a moving displacement produced in the first direction;

and/or

The displacement device further comprises a second position sensor;

one of the dimensions of the first magnet array and the second coil array along a second direction has a smaller dimension differential than the other, the dimension differential forming a second differential space within which the second position sensor is located for measuring a moving displacement generated along the first direction;

and/or

The displacement device further comprises a third position sensor;

one of the dimensions of the second magnet array and the third coil array in a third direction has a smaller dimension differential than the other, the dimension differential forming a third differential space within which the third position sensor is located to measure the resulting displacement of motion in the first direction;

and/or

The displacement device further comprises a fourth position sensor;

one of the dimensions of the second magnet array and the fourth coil array in a third direction has a dimension differential portion less than the other, the dimension differential portion forming a fourth differential space within which the fourth position sensor is located for measuring a displacement of motion produced in the first direction;

and/or

The displacement device further comprises a fifth position sensor;

one of the dimensions of the third magnet array and the fifth coil array in a third direction has a smaller dimension differential than the other, the dimension differential forming a fifth differential space within which the fifth position sensor is located to measure the resulting displacement of motion in the first direction;

and/or

The displacement device further comprises a sixth position sensor;

one of the dimensions of the third magnet array and the sixth coil array in a third direction has a smaller dimension differential than the other, the dimension differential forming a sixth differential space within which the sixth position sensor is located to measure the resulting kinematic displacement in the first direction;

and/or

The displacement device further comprises a seventh position sensor;

one of the dimensions of the third magnet array and the seventh coil array in a third direction has a smaller dimension differential than the other, the dimension differential forming a seventh differential space, the seventh position sensor being located within the seventh differential space for measuring a displacement of motion produced in the first direction;

and/or

The displacement device further comprises an eighth position sensor;

one of the dimensions of the fourth magnet array and the eighth coil array in the third direction has a dimension differential portion less than the other, the dimension differential portion forming an eighth differential space within which the eighth position sensor is located to measure the resulting displacement of motion in the first direction.

In one embodiment, the displacement device comprises at least two first frame parts and at least one second frame part arranged in a first direction, the at least two first frame parts being controlled by the same or different controllers to move in the first direction relative to the second frame part to form the multi-mover structure.

In one embodiment, the displacement device comprises at least one first frame part arranged in a first direction, which is controlled by a controller, and at least two second frame parts moving in the first direction relative to the at least one first frame part to form the multi-mover structure.

Drawings

FIG. 1 is a perspective view of a displacement device according to a first embodiment of the present invention;

fig. 2 is a perspective view of a first frame part of the first embodiment of the invention;

fig. 3 is a perspective view of a second frame part of the first embodiment of the invention;

FIG. 4 is an X-Z view of a first magnet array and first and second coil arrays in accordance with a first embodiment of the present invention;

FIG. 5 is a schematic illustration of the Lorentz forces and torques of the displacement apparatus of the first embodiment of the present invention;

FIG. 6 is a schematic diagram of a position sensor arrangement of a first embodiment of the present invention;

FIG. 7 is a perspective view of a displacement device according to a second embodiment of the present invention;

fig. 8 is a perspective view of a multi-stage displacement apparatus according to some embodiments of the present invention.

DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION

The embodiments of the present invention will be described in detail below with reference to the accompanying drawings in order to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.

In the following description, for the purposes of illustrating various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that the embodiments may be practiced without one or more of the specific details. In other instances, well-known devices, structures and techniques associated with this application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

Throughout the specification and claims, the word "comprise" and variations thereof, such as "comprises" and "comprising," are to be understood as an open, inclusive meaning, i.e., as being interpreted to mean "including, but not limited to," unless the context requires otherwise.

Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the context clearly dictates otherwise.

In the following description, for the purposes of clearly illustrating the structure and operation of the present invention, directional terms will be used, but terms such as "front", "rear", "left", "right", "outer", "inner", "outer", "inward", "upper", "lower", etc. should be construed as words of convenience and should not be construed as limiting terms.

A first embodiment of the present invention is described below with reference to the drawings. The displacement device as shown in fig. 1 and 2 comprises a first frame part 1 and a second frame part 2 arranged opposite to the first frame part 1, and the first frame part 1 is located at the top and the outer side relative to the second frame part 2 in a half-enclosed structure; the first frame part 1 can be displaced in relation to the second frame part 2. The first frame section 1 includes a first frame and a plurality of coil arrays including a first coil array 12, a second coil array 13, a third coil array 14, and a fourth coil array 15, which are fixedly arranged on a first plane 111 of the first frame, respectively. The plurality of coil arrays further includes a fifth coil array 16, a sixth coil array 17, a seventh coil array 18, and an eighth coil array 19. The fifth coil array 16 and the sixth coil array 17 are arranged on the second plane 112 of the first frame. The seventh coil array 18 and the eighth coil array 19 are arranged on a third plane 113 of the first frame, wherein the first plane 111, the second plane 112, and the third plane 113 are all parallel to the first direction (X-axis direction), and the first plane 111 is not parallel to the second plane 112 and the third plane 113, respectively. Preferably, the first plane 111 is orthogonal to the third direction (Z-axis direction), and the second plane 112 and the third plane 113 are orthogonal to the second direction (Y-axis direction). However, it is understood that the first plane 111 and the second plane 112 may not be orthogonal, and the planes may be at an angle.

In some embodiments, only one coil array, i.e. the fifth coil array 16 or the sixth coil array 17, is arranged on the second plane 112, and only one coil array, i.e. the seventh coil array 18 or the eighth coil array 19, is arranged on the third plane 113; in some embodiments, only one coil array, i.e. the fifth coil array 16 or the sixth coil array 17, is arranged on the second plane 112, and two coil arrays, i.e. the seventh coil array 18 and the eighth coil array 19, are arranged on the third plane 113; in some embodiments, two coil arrays, namely a fifth coil array 16 and a sixth coil array 17, are arranged on the second plane 112, and only one coil array, namely a seventh coil array 18 or an eighth coil array 19, is arranged on the third plane 113.

The first frame part 11 and the second frame part 12 may be disposed vertically or disposed in any other direction in a space, and are not limited herein. In addition, in the embodiment of the present invention, the X direction is a first direction, the Y direction is a second direction, and the Z direction is a third direction, which are taken as examples for description, however, it can be understood by those skilled in the art that the present invention is not limited thereto, and various embodiments of the present invention may be implemented by taking any direction in a three-dimensional rectangular coordinate system as the first direction, and taking the other two directions as the second direction and the third direction, respectively, and will not be repeated below.

As shown in fig. 2, the first coil array 12 includes a plurality of first coils 121, the second coil array 13 includes a plurality of second coils 131, the third coil array 14 includes a plurality of third coils 141, the fourth coil array 15 includes a plurality of fourth coils 151, the fifth coil array 16 includes a plurality of fifth coils 161, the sixth coil array 17 includes a plurality of sixth coils 171, the seventh coil array 18 includes a plurality of seventh coils 181, and the eighth coil array 19 includes a plurality of eighth coils 191, wherein the plurality of first coils 121, the plurality of second coils 131, the plurality of third coils 141, and the plurality of fourth coils 151 are respectively arranged adjacent to each other in the X-axis direction. Each coil array includes at least 3 coils, that is, the number n of the coils included in each coil array satisfies n-3 × k (k is a positive integer greater than or equal to 1), so as to form k coil groups, and each coil group includes three coils. In this embodiment, the number of coils in each coil array is 3, and the coils and the corresponding magnet arrays generate interaction force by passing current through the coils.

As shown in fig. 3, the second frame part 2 includes a second frame and a plurality of magnet arrays including a first magnet array 21, a second magnet array 22, a third magnet array 23, and a fourth magnet array 24, the first magnet array 21, the second magnet array 22 being fixedly arranged on a fourth plane 251 of the second frame, the third magnet array 23 being arranged on a fifth plane 252 of the second frame; the fourth magnet array 24 is disposed on the sixth plane 253 of the second frame; the fourth plane 251 is disposed opposite to the first plane 111 and parallel to the first plane 111, the fifth plane 252 is disposed opposite to the second plane 112 and parallel to the second plane 112, and the sixth plane 253 is disposed opposite to the third plane 113 and parallel to the third plane 113.

As shown in fig. 3 and 4, the first magnet array 21 includes a plurality of first magnets 211, and the first magnets 211 include at least two kinds of magnets having different magnetization directions, i.e., first N magnets 211A and first S magnets 211B, the first N magnets 211A being alternately arranged with the first S magnets 211B in the X-axis direction. The second magnet array 22 includes a plurality of second magnets 221, the second magnets 221 include at least two kinds of magnets having different magnetization directions, i.e., a second N magnet and a second S magnet, the third magnet array 23 includes a plurality of third magnets 231, the third magnets 231 include at least two kinds of magnets having different magnetization directions, i.e., a third N magnet and a third S magnet, also the fourth magnet array 24 includes a plurality of fourth magnets 241, the fourth magnets 241 include at least two kinds of magnets having different magnetization directions, i.e., a fourth N magnet and a fourth S magnet, and the second magnets 221, the third magnets 231 and the fourth magnets 241 are similar to the first magnets 211, and thus, description thereof is omitted. However, it is understood that the "alternating" arrangement described above includes not only the first N magnet and the first S magnet arranged alternately in sequence along the X-axis direction, but also an alternating arrangement in which the first N magnet and the first S magnet are spaced by another type of magnet. In addition, the first N magnet and the first S magnet mentioned above are named according to the functional surfaces used, and specifically, in general, the magnet includes an N-pole surface and an S-pole surface, and when a magnetic field of the N-pole surface of the magnet needs to be used, the magnet is referred to as an N magnet, and when a magnetic field of the S-pole surface of the magnet needs to be used, the magnet is referred to as an S magnet, and the names of the second N magnet, the third N magnet, and the fourth N magnet, and the second S magnet, the third S magnet, and the fourth S magnet mentioned in this application are the same and are not repeated for the sake of brevity.

In some embodiments, as shown in fig. 4, the first magnet 211 may include three types of magnets, i.e., a first N magnet 211A, a first S magnet 211B, and a first H magnet 211C. The first H magnets 211C are disposed between the first N magnets 211A and the first S magnets 211B, and the first N magnets 211A and the first S magnets 211B are alternately arranged in the X-axis direction, and the magnetization direction of the first H magnets 211C is directed from the adjacent first S magnets 211B to the first N magnets 211A, and is parallel to the X-axis direction. This arrangement allows the magnetic field in which the first coil 121 is located to be strengthened, whereby the interaction force of the first magnet 211 and the first coil 121 can be enhanced. It should be noted that the first H magnet is named according to the functional surface used by it, in particular, the first H magnet is located between the first N magnet and the first S magnet, and when it is desired to use the magnetic field of the magnet directed from the adjacent first S magnet to the first N magnet, this magnet is called the first H magnet, and the names of the second H magnet, the third H magnet and the fourth H magnet mentioned below are the same and are not repeated for the sake of brevity.

In addition, the magnetization direction of each of the first N magnet 211A and the first S magnet 211B of the first magnet array 21 is orthogonal to the third plane 113, and the magnetization direction of the first N magnet 211A is directed to the first coil 121 of the first coil array 12, and the second coil 131 of the second coil array 13; the magnetization direction of the first S-magnet 211B is away from the first coil 121 of the first coil array 12, and the second coil 131 of the second coil array 13. The magnetization direction of the first H magnet 211C is parallel to the X-axis direction, and the adjacent first S magnet 211B is directed to the adjacent first N magnet 211A, thereby providing a magnetic field space. In addition, similar to the first magnet 211, the second magnet 221, the third magnet 231, and the fourth magnet 241 in fig. 1 may also include three types of magnets arranged in the same arrangement to reinforce the magnetic field of the third coil 141, the fourth coil 151, the fifth coil 161, the sixth coil 171, the seventh coil 181, and the eighth coil 191, which will not be described herein again.

As shown in fig. 5, after the first coil array 12 and the second coil array 13 are supplied with the driving current, the first coil array 12 and the first magnet array 21 interact with each other to generate a force F on the first coil 121 along the X-axis direction and the Z-axis direction₁₁And F₁₂。

After the second coil array 13 is supplied with the driving current, the second coil array 13 interacts with the second magnet array 21 to generate forces F along the X-axis direction and the Z-axis direction on the second coil 131₂₁And F₂₂。

Similarly, third coil array 14 and fourth coil array 15, when energized, interact with respective second magnet arrays 22 to produce forces, F respectively, on the respective coils in the X-axis and Z-axis directions₃₁And F₃₂、F₄₁And F₄₂。

Four Z-axis forces (F)₁₁,F₂₁,F₃₁,F₄₁) The rotor of the displacement device generates displacement in the Z-axis direction and rotation around the X-axis direction and the Y-axis direction, so that floating in the Z-axis direction and fine adjustment of postures around the X-axis direction and the Y-axis direction are realized. Four forces in the X-axis direction (F)₁₂,F₂₂,F₃₂,F₄₂) The rotor of the displacement device generates displacement along the X-axis direction and rotation around the Z-axis direction, and movement in the X-axis direction and fine adjustment of the posture around the Z-axis direction are achieved.

Similarly, when the fifth coil array 16, the sixth coil array 17, the seventh coil array 18 and the eighth coil array 19 are energized, they will interact with the corresponding third magnet array 23 and the fourth magnet array 24, respectively, to generate forces in the X-axis direction and the Y-axis direction, respectively, on the respective coils, F₅₁And F₅₂、F₆₁And F₆₂、F₇₁And F₇₂、F₈₁And F₈₂。

Acting force F₅₁And F₅₂、F₆₁And F₆₂、F₇₁And F₇₂、F₈₁And F₈₂Providing the driving force in the Y-axis direction and the X-axis direction and the rotation around the Z-axis direction to realize the micro adjustment of the displacement in the X-axis direction and the displacement in the Y-axis direction andand adjusting the posture in the Z-axis direction.

The above forces can realize the movement of the mover in six degrees of freedom (X-axis direction, Y-axis direction, Z-axis direction, around X-axis direction, around Y-axis direction, and around Z-axis direction).

In some embodiments, the displacement device further comprises a power amplifier for driving the coil array to generate a first magnetic field, the first magnetic field generated by the coil array and a second magnetic field generated by a magnet array arranged opposite the coil array acting to move the first frame part relative to the second frame part in one or more of the six directions.

Specifically, the power amplifier is used for amplifying current input to the plurality of coil arrays and driving the plurality of coil arrays to generate a first magnetic field, and the plurality of magnet arrays generate a second magnetic field; the first magnetic field generated by the coil array acts on the second magnetic field of the magnet array arranged opposite to the first magnetic field, so that the first frame part moves relative to the second frame part in one or more of six directions, wherein the six directions comprise an X-axis direction, a Y-axis direction, a Z-axis direction, an X-axis-surrounding direction, a Y-axis-surrounding direction and a Z-axis-surrounding direction, and six degrees of freedom are controlled. It should be noted that, as can be seen from the above description, these forces are redundant for controlling the mover of the displacement device with six degrees of freedom, so that in practical applications, the appropriate force can be selected according to specific requirements for control, that is, the unnecessary force can be set to zero.

According to the technical scheme provided by the invention, the relative movement of the frame is realized through the interaction force between the electrified coil and the magnet, different displacements can be realized according to various requirements, and the frames are not in direct mechanical contact, so that the movement precision of the device is improved, the device is convenient to assemble and maintain, and the manufacturing cost and the use cost can be effectively reduced for large-scale use. The invention solves the problem that the six degrees of freedom of the rotor can not be controlled independently in the prior art, and realizes the decoupling control of the six degrees of freedom of the rotor.

In addition, the flexible expansion and modification is also an advantage of the present invention: the first frame part and the second frame part can be extended and spliced in a modularized manner according to the requirements of actual stroke, motion trail and the like; the plurality of first frame parts and the plurality of second frame parts may be provided, so that the plurality of movers can be configured and each mover can be independently controlled. This advantage enables the present invention to meet the need for a flexible production line for smart manufacturing.

In some embodiments, the displacement device further comprises a first position sensor, one of the dimensions of the first magnet array and the first coil array along the second direction having a smaller differential dimension than the other, the differential dimension forming a first differential space, the first position sensor being located in the first differential space for measuring the displacement of the motion occurring along the first direction.

Specifically, as shown in fig. 6, the size of the first magnet array 21 in the Y-axis direction is different from the size of the first coil array 12 in the Y-axis direction, for example, when the size of the first magnet array 21 in the Y-axis direction is larger than the size of the first coil array 12 in the Y-axis direction, the first magnet array 21 has a portion protruding from the first coil array 12 in the Y-axis direction, the first coil array 12 forms a first difference space corresponding to the first magnet array 21 in the Y-axis direction, and this first difference space can be used to arrange the first position sensor 1C1 therein, it is understood that, of course, when the size of the first magnet array 21 in the Y-axis direction is smaller than the size of the first coil array 12 in the Y-axis direction, the first coil array 12 has a portion protruding from the first magnet array 21 in the Y-axis direction, and the first magnet array 21 also forms a first difference space corresponding to the first coil array 12 in the Y-axis direction, the first position sensor 1C1 may be configured, and the first position sensor 1C1 is used to measure a long-distance displacement generated in the X-axis direction. The first position sensor 1C1 may be a hall sensor, or may be other sensors, and is not limited in particular.

Similarly, the first magnet array 21 and the second coil array 13 are also similar to the first magnet array 21 and the first coil array 12, that is, the second coil array 13 and the first magnet array 21 form a second differential space for configuring a second position sensor (not shown in the figure), and the second position sensor may be the same type as the first position sensor 1C1 or different type, and detailed description thereof is omitted here.

In addition, the second magnet array 22 and the fourth coil array 15 are also similar to the first magnet array 21 and the first coil array 12, that is, the second magnet array 22 and the fourth coil array 15 form a fourth differential space for configuring the fourth position sensor 1C4, and the fourth position sensor 1C4 may be the same type as the first position sensor 1C1 or different types, and detailed description thereof is omitted here. Similarly, the second magnet array 22 and the third coil array 14 are also similar to the second magnet array 22 and the fourth coil array 15, that is, the second magnet array 22 and the third coil array 14 form a third difference space for configuring a third position sensor (not shown in the figure), and the third position sensor may be the same type as or different type from the first position sensor 1C1, and detailed description thereof is omitted here.

In addition, the third magnet array 23 and the fifth coil array 16 are also similar to the first magnet array 21 and the first coil array 12, that is, the third magnet array 23 and the fifth coil array 16 form a fifth difference space for configuring the fifth position sensor 1C5, and the fifth position sensor 1C5 may be the same type as the first position sensor 1C1 or different types, and detailed description thereof is omitted here. Similarly, the third magnet array 23 and the sixth coil array 17 are also similar to the third magnet array 23 and the fifth coil array 16, that is, the third magnet array 23 and the fifth coil array 16 form a sixth difference space for configuring a sixth position sensor (not shown in the figure), and the sixth position sensor may be the same type as the first position sensor 1C1 or different type, and is not described herein again.

In addition, the fourth magnet array 24 and the eighth coil array 19 are also similar to the first magnet array 21 and the first coil array 12, that is, the fourth magnet array 24 and the eighth coil array 19 form an eighth difference space for configuring the eighth position sensor 1C8, and the eighth position sensor 1C8 may be the same type as the first position sensor 1C1 or different types, and detailed description thereof is omitted here. Similarly, the fourth magnet array 24 and the seventh coil array 18 are also similar to the fourth magnet array 24 and the eighth coil array 19, that is, the fourth magnet array 24 and the eighth coil array 19 form a seventh difference space for configuring a seventh position sensor (not shown in the drawings), and the seventh position sensor may be the same type as the first position sensor 1C1 or different type, and is not described herein again.

It should be noted that, the position sensors in this embodiment can be used to measure the displacement in the X-axis direction, so that eight position sensors may not operate simultaneously, and when one of the position sensors is in an operating state, the other seven position sensors may be in a standby state. Of course, any number of eight positions may be used for mutual calibration, for example, three position sensors may be used, a first threshold may be set, and if the difference between the displacements of the first position sensor and the second position sensor at a certain position does not exceed the first threshold, and the difference between the displacements of the first position sensor and the third position sensor at that position exceeds the first threshold, it may be preliminarily determined that the third position sensor at that position has a problem or an error exceeding an allowable range, and the third position sensor may be checked or replaced, so as to better control the risk of position sensor error.

A second embodiment of the invention relates to a displacement device. The second embodiment is based on an extension of the first embodiment, the main difference being that the displacement device of the second embodiment also provides a reluctance motor for gravity compensation. The first frame of the displacement device of this embodiment further includes a seventh plane and an eighth plane, where the seventh plane and the eighth plane are respectively configured with a first reluctance motor array and a second reluctance motor array, where the first reluctance motor array includes a plurality of first reluctance motors; the second reluctance motor array includes a plurality of second reluctance motors.

Specifically, as shown in fig. 7, the first frame further includes a seventh plane 114 and an eighth plane 115, wherein the seventh plane 114 and the eighth plane 115 are parallel to the first plane 111, respectively. The seventh plane 114 and the eighth plane 115 are respectively configured with a first reluctance motor array 1A and a second reluctance motor array 1B, wherein the first reluctance motor array 1A includes two first reluctance motors 1A1, and the two first reluctance motors 1A1 are configured two by two adjacent to each other along the X-axis direction; the second reluctance motor array 1B includes two second reluctance motors 1B1, and the two second reluctance motors 1B1 are disposed adjacent to each other in the X-axis direction. Preferably, the number of the first reluctance motors 1a1 is 4, and the number of the second reluctance motors 1B1 is 4. It should be noted that the first reluctance motor array 1A and the second reluctance motor array 1B may be disposed on the seventh plane 114 and the eighth plane 115, respectively, as shown in fig. 7, or may be disposed in an inner recess (not shown) of the first frame, and the surfaces of the first reluctance motor array 1A and the second reluctance motor array 1B are disposed not to exceed the seventh plane 114 and the eighth plane 115.

When the first reluctance motor 1a1 is energized, it interacts with the ninth plane 254 shown in fig. 3, generating a force F in the Z-axis direction_A1And F_A2Wherein a ferromagnetic structure is arranged on the ninth plane 254 with corresponding ferromagnetic material thereon, and the ferromagnetic structure has a higher intersection with the projection of the first reluctance motor 1a1 on the ninth plane 254. When the second reluctance motor 1B1 is energized, it interacts with the tenth plane 255 shown in fig. 3, and generates a force F in the Z-axis direction_B1And F_B2Wherein a ferromagnetic structure is arranged on the tenth plane 255 with corresponding ferromagnetic material thereon, and the ferromagnetic structure has a higher intersection with the projection of the second reluctance motor 1B1 on the tenth plane 255. At F_A1、F_A2、F_B1And F_B2The weight of the first frame part can be balanced. Through balancing the gravity of the first frame part, the rotor can be controlled independently under the influence of irrelevant factors, and decoupling control of the degree of freedom of the rotor is facilitated.

It is however understood that in some embodiments the first frame part may also be fixed, using the same principle for balancing the weight of the second frame part, and will not be described here in detail. In addition, the number and the arrangement direction of the reluctance motors can be adjusted according to actual situations, and are not limited herein.

Since this embodiment is an extension of the first embodiment, the related technical details mentioned in the first embodiment are still valid in this embodiment, and the technical effect achieved in the first embodiment can also be achieved in this embodiment, and is not described here again in order to reduce repetition.

In some embodiments, the displacement device comprises at least two first frame parts and at least one second frame part arranged in the first direction, the at least two first frame parts being controlled by the same or different controller to move in the first direction relative to the second frame part to form the multi-mover structure. It should be noted that, here, the mover is the first frame portion, and since at least two first frame portions are adopted, the mover has a multi-mover structure; by way of specific example, as shown in fig. 8, the displacement device comprises two first frame parts (1A, 1B) and one second frame part 2, the movement of which between the two first frame parts (1A, 1B) can be controlled by the same or different controllers, thus acting as a first and a second work table, respectively.

However, it is understood that the two first frame parts (1A, 1B) can also be controlled independently by the same or different controllers, for example by controlling the two first frame parts (1A, 1B) to move in opposite directions, or by controlling the first frame part 1A to move and the first frame part 1B to be stationary, just as an example. One second frame part 2 extends linearly or substantially linearly as a base in the X-axis direction. The two first frame parts (1A, 1B) are arranged on the second frame part 2 at a distance from one another. The two first frame parts (1A, 1B) and the second frame part 2 form a multi-mover structure, i.e. a multi-stage displacement device system.

However, it is understood that the at least one second frame portion may also be two or more second frame portions, and the second frame portions may be connected by mechanical splicing, may be spliced on the tooling rack, or may be spliced by self-fastening, and is not limited herein. According to the embodiment of the invention, the first workbench and the second workbench are independently driven, so that the operation freedom degree of the workbench is greatly increased, the working efficiency is improved, the modular design is adopted to meet the expansion requirement of the motion system, the motion system is extended, a new structure is not required to be redesigned, the maintenance is more convenient, and the production, manufacturing and use cost can be effectively reduced.

In some embodiments, the displacement device comprises at least one first frame part arranged in a first direction, the at least one first frame part being controlled by the controller, and at least two second frame parts moving in the first direction relative to the at least one first frame part to form the multi-mover structure. By way of specific example, the displacement device comprises one first frame part 1 as shown in fig. 1 and two second frame parts 2 as shown in fig. 1. One first frame part 1 can extend linearly or substantially linearly as a base in the X-axis direction. The first frame part 1 can be controlled by a controller to work with its corresponding coil to generate a magnetic field, which interacts with the magnetic field generated by the magnets of the second frame part 2 to move the two second frame parts 2 relative to the first frame part 1 to form a multi-mover structure as a first and second table, respectively. The above are examples only. The two second frame parts 2 are arranged on the first frame part 1 separately from each other at a distance. The one first frame part 1 and the two second frame parts 2 constitute a multi-mover structure, i.e. a multi-stage displacement device system.

However, it is understood that the at least one first frame portion may also be two or more first frame portions, the plurality of first frame portions may be connected by mechanical splicing, may be spliced on the tooling rack, or may be spliced by a buckle of the first frame portion, and is not limited herein. In addition, the plurality of first frame parts can be controlled by the same or different controllers.

It will be appreciated that in the case of a plurality of first frame parts, these may also be controlled independently by the same or different controllers, for example by controlling the movement in opposite directions between the first frame parts individually, or by moving some of the first frame parts and leaving others stationary, just as an example.

According to the embodiment of the invention, the first workbench and the second workbench are independently driven, so that the operation freedom degree of the workbench is greatly increased, the working efficiency is improved, the expansion requirement of the motion system can be met by adopting a modular design, the motion system is extended, a new structure does not need to be redesigned, the maintenance is more convenient, and the production, manufacturing and use cost can be effectively reduced.

In conclusion, the first frame part and the second frame part can be extended and spliced in a modularized manner according to the actual requirements of stroke, motion track and the like; the plurality of first frame parts and the plurality of second frame parts may be provided, so that the plurality of movers can be configured and each mover can be independently controlled. This advantage enables the present invention to meet the need for a flexible production line for smart manufacturing.

The multi-stage displacement device provided by the invention can be applied to a motion stage system of an automatic device, and the motion stage system of the automatic device can adjust the relative positions of the first frame part and the second frame part and the arrangement number of the first frame part and the second frame part according to the requirements of an actual motion stroke and a control strategy plan.

While the preferred embodiments of the present invention have been described in detail above, it should be understood that aspects of the embodiments can be modified, if necessary, to employ aspects, features and concepts of the various patents, applications and publications to provide yet further embodiments.

These and other changes can be made to the embodiments in light of the above detailed description. In general, in the claims, the terms used should not be construed to be limited to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled.

Claims

1. A displacement device comprising at least one first frame part and at least one second frame part, each first frame part being movable relative to the corresponding second frame part,

2. A displacement device according to claim 1 wherein each coil array comprises N coils, where N-3 x k is a positive integer.

3. A displacement device according to claim 1 wherein the first frame further comprises seventh and eighth planes, the seventh and eighth planes being parallel to the first plane, respectively;

4. A displacement device according to claim 3 wherein the first frame further comprises ninth and tenth planes, the ninth and tenth planes being parallel to and disposed opposite the first plane of the first frame, respectively; the surfaces of the ninth plane and the tenth plane are provided with ferromagnetic structures, the first reluctance motor array and the projections of the ferromagnetic structures on the ninth plane respectively have an intersection, and the second reluctance motor array and the projections of the ferromagnetic structures on the tenth plane respectively have an intersection.

5. Displacement device according to claim 1,

the displacement device further comprises a power amplifier for driving the coil array to generate a first magnetic field, which first magnetic field generated by the coil array and a second magnetic field generated by a magnet array arranged opposite the coil array act to move the first frame part relative to the second frame part in one or more of six directions.

6. The displacement device according to claim 1, wherein the first magnet array further comprises first H magnets, the plurality of first H magnets are disposed between the first N magnets and the first S magnets, and the first N magnets and the first S magnets are alternately arranged along the first direction, and the magnetization direction of the first H magnets is directed from the adjacent first S magnets to the first N magnets and is parallel to the first direction;

and/or

7. Displacement device according to claim 1,

the displacement device further comprises a first position sensor;

a size differential portion of the first magnet array and the first coil array being smaller in one of the sizes in the second direction than the other, the size differential portion forming a first differential space within which the first position sensor is located for measuring a movement displacement generated in the first direction;

and/or

The displacement device further comprises a second position sensor;

and/or

The displacement device further comprises a third position sensor;

and/or

The displacement device further comprises a fourth position sensor;

and/or

The displacement device further comprises a fifth position sensor;

and/or

The displacement device further comprises a sixth position sensor;

and/or

The displacement device further comprises a seventh position sensor;

and/or

The displacement device further comprises an eighth position sensor;

8. A displacement device according to any one of claims 1-7, characterized in that the displacement device comprises at least two first frame parts and at least one second frame part arranged in a first direction, which at least two first frame parts are controlled by the same or different controllers to move in the first direction relative to the second frame part to form a multi-mover structure.

9. A displacement device according to any one of claims 1-7, wherein the displacement device comprises at least one first frame part arranged in a first direction, which is controlled by a controller, and at least two second frame parts moving in the first direction relative to the at least one first frame part to form a multi-mover structure.