CN112901592A - Hydraulic driver based on magnetoelectric displacement detection - Google Patents
Hydraulic driver based on magnetoelectric displacement detection Download PDFInfo
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- CN112901592A CN112901592A CN202110234734.6A CN202110234734A CN112901592A CN 112901592 A CN112901592 A CN 112901592A CN 202110234734 A CN202110234734 A CN 202110234734A CN 112901592 A CN112901592 A CN 112901592A
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- 238000001514 detection method Methods 0.000 title claims abstract description 63
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 40
- 239000000463 material Substances 0.000 claims description 18
- 239000004020 conductor Substances 0.000 claims description 11
- 239000000696 magnetic material Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 5
- 229910000889 permalloy Inorganic materials 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 3
- 239000006249 magnetic particle Substances 0.000 claims description 3
- 230000004308 accommodation Effects 0.000 claims 3
- XWHPIFXRKKHEKR-UHFFFAOYSA-N iron silicon Chemical compound [Si].[Fe] XWHPIFXRKKHEKR-UHFFFAOYSA-N 0.000 claims 1
- 230000008859 change Effects 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005690 magnetoelectric effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 230000033772 system development Effects 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/08—Characterised by the construction of the motor unit
- F15B15/14—Characterised by the construction of the motor unit of the straight-cylinder type
- F15B15/1423—Component parts; Constructional details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B19/00—Testing; Calibrating; Fault detection or monitoring; Simulation or modelling of fluid-pressure systems or apparatus not otherwise provided for
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Actuator (AREA)
Abstract
The invention provides a hydraulic driver based on magnetoelectric displacement detection, which comprises a driver shell, a detection assembly, a driving body and an output rod, the driver shell is provided with a first accommodating space, the detection assembly is arranged on the driver shell and arranged along the circumferential direction of the first accommodating space, the output rod comprises a first end part and a second end part which are connected in sequence, the second end part is installed in the first accommodating space and can be driven by the driving body to move, and the first end part can be moved to the outside of the first accommodating space, when the driving body drives the output rod to move, the magnetic field around the detection assembly can be changed, and then the output signal of the detection assembly is changed, so that the displacement generated due to the movement can be obtained.
Description
Technical Field
The invention relates to the field of detection sensor technology and precision executive devices, in particular to a hydraulic driver based on magnetoelectric displacement detection.
Background
With the development of miniature propulsion systems in aerospace, cell titration drug delivery in bioengineering, deep sea exploration and the like, the combination of new material technology, ultra-precise positioning technology and hydraulic technology to realize large-stroke high-precision driving is a trend of fluid control system development, so that higher requirements are provided for hydraulic driving execution devices and automation degree.
The current precision hydraulic executive device generally adopts a method of an external sensing device, and the integration level of the system is poor. There are also many designs in the prior art, for example, patent document CN109854567B discloses a hydraulic actuator which provides a hydraulic actuator with a complicated structure, but the design does not have a position output detection capability. For another example, patent document CN105723101B discloses a hydraulic actuator and a method of discontinuously changing the position output of the hydraulic actuator, providing a complicated position output changing method.
However, these designs do not have the capability of detecting position output, and cannot well realize the integrated design of the automation system.
Disclosure of Invention
In view of the defects in the prior art, the invention aims to provide a hydraulic driver based on magnetoelectric displacement detection.
The invention provides a hydraulic driver based on magnetoelectric displacement detection, which comprises a driver shell, a detection assembly, a driving body and an output rod, wherein the detection assembly is arranged on the driver shell;
the driver shell is provided with a first accommodating space, and the detection assembly is mounted on the driver shell and arranged along the circumferential direction of the first accommodating space;
the output rod comprises a first end part and a second end part which are connected in sequence, and the second end part is installed inside the first accommodating space and can be driven by the driving body to move and can enable the first end part to move to the outside of the first accommodating space;
when the driving body drives the output rod to move, the magnetic field around the detection assembly can be changed, and then the output signal of the detection assembly is changed, so that the displacement generated by the movement can be obtained.
Preferably, the detection assembly comprises a magnetic yoke, a coil, a magnetostrictor and a piezoelectric body; the magnetostrictive body and the piezoelectric body are sequentially arranged on the magnetic yoke, and the coil is arranged along the circumferential direction of the magnetostrictive body.
Preferably, the magnetostrictive body is capable of operating in a resonant state and a non-resonant state upon excitation of the coil.
Preferably, the magnetostrictive body and the piezoelectric body are made of magnetostrictive materials and piezoelectric materials respectively.
Preferably, the second end portion is movable between a first position and a second position toward one end of the driving body, the first receiving space forms a second receiving space between the first position and the second position, and the detection assembly is arranged along a circumferential direction of the second receiving space.
Preferably, the driver housing is made of a non-magnetic material.
Preferably, the non-magnetic conductive material is any one of plastic, aluminum alloy and titanium alloy.
Preferably, the second end portion is made of any one of the following materials:
-a magnetically permeable material;
-a permanent magnet material;
-a non-magnetically conductive material.
Preferably, the magnetic conductive material is made of any one of the following materials:
-permalloy;
-electrically pure iron;
-silicon steel;
-an amorphous alloy.
Preferably, the drive body employs any one of the following fluids:
-water;
-water comprising magnetic particles;
-a magnetic liquid.
Compared with the prior art, the invention has the following beneficial effects:
1. the hydraulic driver has the advantages of simple structure, high integration level and easiness in ensuring the machining and manufacturing precision.
2. The invention innovatively integrates the magnetoelectric displacement detection part into the hydraulic driver, so that the driver has position detection capability and can easily realize the control of the position output of the driver.
3. In the invention, the detection of the output position can be realized by selecting the material of the output rod part or the composition of the liquid medium in the driver, the detection can be flexibly set according to the specific application scene, and the practicability is strong.
4. The displacement detection mode based on the magnetoelectric effect is convenient to use, can perform ultra-precise detection on the micro displacement generated by the fluid or the micro displacement generated by the output rod, and has high measurement precision.
5. The invention can realize the self-detection of the displacement in the driving process, further realize the self-control driving of the preset displacement and has high automation degree.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of the structure and operation of embodiment 2 of the present invention;
fig. 2 is a schematic diagram of the structure and the operation principle of embodiment 3 of the present invention.
The figures show that:
1-driver housing 3-driver body
2-detection assembly 4-output rod
21-magnetic yoke 41-first end
22-coil 42-second end
23-magnetostriction body d-output rod output displacement
24-piezo V-piezo output voltage signal
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
Example 1:
the invention provides a hydraulic driver based on magnetoelectric displacement detection, which comprises a driver shell 1, a detection assembly 2, a driving body 3 and an output rod 4, wherein a first accommodating space 5 is arranged on the driver shell 1, and the detection assembly 2 is arranged on the driver shell 1 and is arranged along the circumferential direction of the first accommodating space; the output rod 4 comprises a first end part 41 and a second end part 42 which are connected in sequence, the first accommodating space 5 is used as a passage for the extending and retracting movement of the output rod 4, the second end part 42 is installed in the first accommodating space 5 and can move synchronously with the first end part 41 under the driving of the driving body 3, the first end part 41 can be driven to move to the outside of the first accommodating space 5 and is connected with other equipment to realize corresponding functions and used as a transmission part for outputting the driving force by a hydraulic driver; when the driving body 3 drives the output rod 4 to move, the magnetic field around the detection assembly 2 can be changed, and then the displacement of the output rod 4 can be obtained.
Further, the change of the magnetic field around the sensing assembly 2 may be caused by the movement of the magnetic member on the output rod 4 or the movement of the driving body 3 in the first receiving space 5.
Specifically, the second end portion 42 is movable between a first position and a second position toward one end of the driving body 3, the first accommodating space 5 forms a second accommodating space between the first position and the second position, and the detection assembly 2 is arranged along a circumferential direction of the second accommodating space.
Specifically, the second end 42 can be made of a magnetic material, such as permalloy, electrical pure iron, silicon steel, amorphous alloy, etc. And if the permanent magnet is made of permanent magnet material. The second end 42 may be made of a non-magnetic material, such as a non-magnetic material.
Specifically, the detection assembly 2 includes a magnetic yoke 21, a magnetostrictive body 23, and a piezoelectric body 24, and the magnetostrictive body 23 and the piezoelectric body 24 are sequentially mounted on the magnetic yoke 21. The coil 22 is preferably provided in the circumferential direction of the magnetostrictive body 23, and the magnetostrictive body 23 can operate in a resonant state and a non-resonant state by excitation of the coil 22, and can enhance a voltage signal that changes in the piezoelectric body 24, thereby enhancing detection sensitivity.
Specifically, the driver housing 1 is made of a non-magnetic material, and the non-magnetic material is any one or more of plastic, aluminum alloy, and titanium alloy.
Specifically, the driving body 3 can be made of a fluid such as water, water containing magnetic particles, or magnetic liquid, and the driving body 3 can be made of a solid material made of a metal magnetic conductive material or a non-magnetic conductive material, so that the driving effect of the present invention can be obtained.
Example 2:
this embodiment is a preferred embodiment of embodiment 1.
In the present embodiment, a hydraulic actuator based on magnetoelectric displacement detection includes an actuator housing 1, a detection unit 2, a driver 3, and an output rod 4, as shown in fig. 1, the detection unit 2 generates a magnetic field under excitation of a coil 22, a closed magnetic circuit is formed by the driver output rod 4 and the driver 3, and when the driver 3 drives the output rod 4 to generate output displacement, the proportion of the output rod 4 and the driver 3 in the closed magnetic circuit changes, so that the magnetic field finally acting on the magnetoelectric displacement detection unit 2 changes, and the magnetostrictive body 23 can be extended or shortened, and therefore, the degree of the piezoelectric body 24 being pressed by the magnetostrictive body 23 changes, and a detection voltage that is relatively strained from the output displacement of the output rod 4 is detected from the piezoelectric body 24. The driver shell 1 is made of a non-magnetic-conductive plastic material, the first end portion 41 of the driver output rod 4 is made of a non-magnetic-conductive material, the second end portion 42 of the driver output rod is made of a permalloy magnetic-conductive material, and the driving body 3 is made of pure water.
Further, the detection assembly 2 includes a coil 22, a magnetostrictive body 23, a piezoelectric body 24, and a magnetic yoke 21, wherein the magnetostrictive body 23 and the piezoelectric body 24 are respectively made of a magnetostrictive material and a piezoelectric material, a limiting space is provided in the magnetic yoke 21, the magnetostrictive body 23 and the piezoelectric body 24 are sequentially mounted in the magnetic yoke 21, and when the magnetostrictive body 23 changes due to a surrounding magnetic field, a change of extension or contraction occurs to change a pressing force on the piezoelectric body 24, so as to finally change a voltage signal of the piezoelectric body 24.
Specifically, the detection unit 2 is operated in a resonant state by being excited by the coil 22, the output rod 4 generates an output displacement d by the driving body 3, and a magnetic field acting on the detection unit 2 changes with the change of d, so that the magnetostrictive body 23 extends or contracts, and a detection voltage signal that changes the piezoelectric body 24 is generated.
And finally, the driver output displacement sensing is realized.
Example 3:
example 3 is a modification of example 1.
The present embodiment is different from embodiment 2 in that:
the present embodiment provides a hydraulic actuator based on magnetoelectric displacement detection, as shown in fig. 2, the actuator output rod 4 adopts a non-magnetic conductive material, the actuator 3 adopts a magnetic liquid, the proportion of the magnetic liquid in a closed magnetic circuit increases with the increase of the output displacement d, and thus the magnetic field acting on the detection assembly 2 changes with the change of d.
And finally, the driver output displacement sensing is realized.
The working principle of the invention is as follows:
the detection assembly 2 generates a magnetic field under the excitation of the coil 22, a closed magnetic circuit is formed by the output rod 4 and the driving body 3, when the driving body 3 drives the output rod 4 to generate output displacement d, the proportion of the output rod 4 and the driving body 3 in the closed magnetic circuit is changed, so that the magnetic field acting on the magnetostrictive body 23 is finally changed, the magnetostrictive body 23 is stretched or shortened under the action of the changed magnetic field, the extrusion degree of the piezoelectric body 24 is changed, a changed voltage signal V is generated by the piezoelectric body 24, a detection voltage corresponding to the output displacement is obtained, and finally the output displacement sensing of the driver is realized.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (10)
1. A hydraulic driver based on magnetoelectric displacement detection is characterized by comprising a driver shell (1), a detection assembly (2), a driving body (3) and an output rod (4);
a first accommodating space (5) is arranged on the driver shell (1), and the detection assembly (2) is mounted on the driver shell (1) and arranged along the circumferential direction of the first accommodating space;
the output rod (4) comprises a first end part (41) and a second end part (42) which are connected in sequence, and the second end part (42) is installed in the first accommodating space (5) and can move under the driving of the driving body (3) and can drive the first end part (41) to move to the outside of the first accommodating space (5);
when the driving body (3) drives the output rod (4) to move, the magnetic field around the detection assembly (2) can be changed, and then the output signal of the detection assembly (2) can be changed, so that the displacement generated by the movement can be obtained.
2. The hydraulic actuator based on magnetoelectric displacement detection according to claim 1, characterized in that the detection assembly (2) comprises a magnetically conductive yoke (21), a coil (22), a magnetostrictive body (23) and a piezoelectric body (24);
the magnetostrictive body (23) and the piezoelectric body (24) are sequentially mounted on the magnetic conduction magnetic yoke (21), and the coil (22) is arranged along the circumferential direction of the magnetostrictive body (23).
3. The hydraulic drive based on magnetoelectric displacement detection according to claim 2, characterized in that the magnetostrictive body (23) is capable of operating in a resonant state and a non-resonant state under excitation of the coil (22).
4. The hydraulic driver based on magnetoelectric displacement detection according to claim 2, characterized in that the magnetostrictive body (23) and the piezoelectric body (24) are made of magnetostrictive material and piezoelectric material, respectively.
5. The hydraulic drive based on magnetoelectric displacement detection according to claim 1, characterized in that the end of the second end portion (42) facing the drive body (3) is movable between a first position and a second position, the first accommodation space (5) forms a second accommodation space between the first position and the second position, and the detection assembly (2) is arranged along a circumferential direction of the second accommodation space.
6. The hydraulic drive based on magnetoelectric displacement detection according to claim 1, characterized in that the drive housing (1) employs a non-magnetic material.
7. The hydraulic driver based on magnetoelectric displacement detection according to claim 6, characterized in that the non-magnetic conductive material is any one of plastic, aluminum alloy, titanium alloy.
8. The hydraulic actuator based on magnetoelectric displacement detection according to claim 1, characterized in that the second end portion (42) is made of any one of the following materials:
-a magnetically permeable material;
-a permanent magnet material;
-a non-magnetically conductive material.
9. The hydraulic driver based on magnetoelectric displacement detection according to claim 8, characterized in that the magnetic conductive material is made of any one of the following materials:
-permalloy;
-electrically pure iron;
-silicon steel;
-an amorphous alloy.
10. Hydraulic drive based on magnetoelectric displacement detection according to claim 1, characterized in that the drive body (3) employs any of the following fluids:
-water;
-water comprising magnetic particles;
-a magnetic liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110234734.6A CN112901592B (en) | 2021-03-03 | 2021-03-03 | Hydraulic driver based on magneto-electric displacement detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110234734.6A CN112901592B (en) | 2021-03-03 | 2021-03-03 | Hydraulic driver based on magneto-electric displacement detection |
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| Publication Number | Publication Date |
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| CN112901592A true CN112901592A (en) | 2021-06-04 |
| CN112901592B CN112901592B (en) | 2024-04-19 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1564452A (en) * | 2004-03-19 | 2005-01-12 | 浙江大学 | Phase change temp controlling super magneto strictive extension microshifting actuator |
| JP2005192361A (en) * | 2003-12-26 | 2005-07-14 | Takashi Fujita | Super magnetostriction actuator |
| JP2007078708A (en) * | 1996-03-16 | 2007-03-29 | Amitec:Kk | Straight line position detector |
| CN200962571Y (en) * | 2006-10-25 | 2007-10-17 | 武汉理工大学 | Combined temperature control ultra-magnetic telescopic driver |
| CN102374255A (en) * | 2010-08-05 | 2012-03-14 | 香港中文大学 | Self-powered and self-sensing magnetorheological (MR) fluid damper |
| CN203627413U (en) * | 2013-09-30 | 2014-06-04 | 宝山钢铁股份有限公司 | Displacement detecting device for walking beam hoisting cylinder |
| JP2014174114A (en) * | 2013-03-12 | 2014-09-22 | Aisin Seiki Co Ltd | Displacement sensor |
| JP2015014479A (en) * | 2013-07-03 | 2015-01-22 | カヤバ工業株式会社 | Displacement sensor |
| JP2019049489A (en) * | 2017-09-11 | 2019-03-28 | Ｋｙｂ株式会社 | Displacement detector and calibration method of displacement detector |
| CN214465243U (en) * | 2021-03-03 | 2021-10-22 | 南京伶机宜动驱动技术有限公司 | Magneto-electric hydraulic driver |
-
2021
- 2021-03-03 CN CN202110234734.6A patent/CN112901592B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007078708A (en) * | 1996-03-16 | 2007-03-29 | Amitec:Kk | Straight line position detector |
| JP2005192361A (en) * | 2003-12-26 | 2005-07-14 | Takashi Fujita | Super magnetostriction actuator |
| CN1564452A (en) * | 2004-03-19 | 2005-01-12 | 浙江大学 | Phase change temp controlling super magneto strictive extension microshifting actuator |
| CN200962571Y (en) * | 2006-10-25 | 2007-10-17 | 武汉理工大学 | Combined temperature control ultra-magnetic telescopic driver |
| CN102374255A (en) * | 2010-08-05 | 2012-03-14 | 香港中文大学 | Self-powered and self-sensing magnetorheological (MR) fluid damper |
| JP2014174114A (en) * | 2013-03-12 | 2014-09-22 | Aisin Seiki Co Ltd | Displacement sensor |
| JP2015014479A (en) * | 2013-07-03 | 2015-01-22 | カヤバ工業株式会社 | Displacement sensor |
| CN203627413U (en) * | 2013-09-30 | 2014-06-04 | 宝山钢铁股份有限公司 | Displacement detecting device for walking beam hoisting cylinder |
| JP2019049489A (en) * | 2017-09-11 | 2019-03-28 | Ｋｙｂ株式会社 | Displacement detector and calibration method of displacement detector |
| CN214465243U (en) * | 2021-03-03 | 2021-10-22 | 南京伶机宜动驱动技术有限公司 | Magneto-electric hydraulic driver |
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| CN112901592B (en) | 2024-04-19 |
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