CN112865596B - Large-stroke piezoelectric inertia driving platform - Google Patents
Large-stroke piezoelectric inertia driving platform Download PDFInfo
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- CN112865596B CN112865596B CN202110343064.1A CN202110343064A CN112865596B CN 112865596 B CN112865596 B CN 112865596B CN 202110343064 A CN202110343064 A CN 202110343064A CN 112865596 B CN112865596 B CN 112865596B
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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Abstract
The invention relates to a large-stroke piezoelectric inertia driving platform, and belongs to the field of precision machinery. Comprises a base, a sliding guide rail, a mass block, a piezoelectric element, an inertial mechanism, a flexible hinge and a sliding platform. The piezoelectric element converts electric energy into kinetic energy based on the inverse piezoelectric effect of piezoelectric ceramics and drives the mass block to move by utilizing the inertia principle; and the time lag effect of the flexible hinge is utilized to enable the additional mass block to generate secondary inertial motion, so that the single-step travel of the inertial platform is improved. The inertial mechanism comprises a flexible structure and a mass structure and generates inertial motion; the sliding guide rail is fixed on the base, the moving part is fixed below the sliding platform through threaded connection, and the sliding platform slides in the guide rail, so that the sliding guide rail has the characteristics of stable movement, simple structure, easiness in control, easiness in realization of large-stroke movement, no electromagnetic interference, compact structure and light weight. At present, the method has good application prospect in the fields of nanotechnology, optical instruments and micromanipulation.
Description
Technical Field
The invention relates to the field of precision machinery, in particular to a large-stroke piezoelectric inertia driving platform which can be used in the fields of aviation, medical equipment, micromanipulation, optical instruments and the like.
Background
The piezoelectric driving technology is a precise driving technology for controlling mechanical deformation of the piezoelectric material based on the inverse piezoelectric effect of the piezoelectric material so as to output force and displacement, has the characteristics of simple structure, high accuracy, high resolution, electromagnetic interference resistance and the like, and has important application in the fields of optical instruments, nanotechnology, medical instruments and the like. The piezoelectric driving device has a plurality of types of motion principles, mainly comprises an inertial motion principle, an inchworm motion principle, a resonance principle and the like at present, wherein the inertial motion principle is divided into a friction inertial principle and an impact inertial principle, and has the characteristic of simple structure; the inertial actuator is widely applied in the fields of microsurgery microscope, semiconductor manufacturing, precise optical alignment and the like due to the characteristics of long distance, ultra-precision and microminiaturization. Because of the driving characteristic, the inertia principle needs to overcome friction force to enable the inertia principle to move, so that the efficiency and the stroke can be affected to a certain extent.
In summary, although the inertial driving principle has a simple structure, the problems of stroke and efficiency are also remarkable, and some improvements on the structure of the inertial mechanism are needed to further improve the stroke.
Disclosure of Invention
The invention aims to provide a large-stroke piezoelectric inertia driving platform which solves the problems. The invention utilizes the inertia driving principle to enable the mechanism to generate motion in the extension and shortening process of the piezoelectric element, and utilizes the time lag effect of the flexible hinge to enable the mass block to generate inertia impact on the mechanism, so that the sliding platform slides along the sliding track, and the linear large-stroke motion is realized. The large-stroke piezoelectric inertia driving platform provided by the invention has the characteristics of long stroke, low cost, simple control, high positioning precision, optimized efficiency and the like.
The above object of the present invention is achieved by the following technical solutions:
a large-stroke piezoelectric inertia driving platform increases a single-step stroke by utilizing an inertia driving principle and a time lag effect of a flexible hinge; the device comprises a base 1, a sliding track 2, an inertial mechanism 3, a piezoelectric element 4, a flexible hinge 5, a mass block 6 and a sliding platform 7; the inertial mechanism 3 comprises a flexible structure and a mass structure, and the inertial mechanism 3 is provided with two flexible hinges fixed at the installation positions and is fixed below the sliding platform 7 through threaded connection; the piezoelectric element 4 drives the inertial mechanism 3 to produce inertial motion under the action of the electric signal in the working process, and drives the sliding platform 7 to slide on the sliding track 2.
The piezoelectric element 4 is mounted in the mounting groove of the inertial mechanism 3 after being preloaded, is stimulated by an electric signal to generate deformation which slowly extends and rapidly contracts, the deformation is transferred to the mass structure of the inertial mechanism 3 through the flexible structure of the inertial mechanism 3, and the mass structure continuously drives the inertial mechanism 3 forwards due to inertia to integrally generate forward motion.
One end of the flexible hinge 5 is connected with the inertial mechanism 3, the other end of the flexible hinge is connected with the mass block 6, and inertial motion of the inertial mechanism 3 is transmitted to the mass block 6 at the other end; due to the time lag effect generated by the deformation of the flexible hinge, the inertial motion generated by the inertial structure 3 is transmitted to the mass block 6 after a certain delay; the kinetic energy of the mass 6 imparts an inertial impact on the mechanism, causing additional travel to the inertial mechanism 3.
The sliding rail 2 is fixed on the base 1, the sliding platform 7 slides on the sliding rail 2, a threaded hole is formed in the lower portion of the sliding platform 7 and used for installing the inertial mechanism 3, and the sliding platform 7 generates macroscopic linear motion by accumulating forward displacement through periodic electric signal excitation.
The invention has the beneficial effects that: inertial motion is realized by using the time lag effect of the flexible hinge, and single-step travel is improved. Compact structure, low cost, simple control and no electromagnetic interference, and has good application prospect in the fields of optical instruments, medical instruments and micromanipulation.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate and explain the invention and together with the description serve to explain the invention.
FIG. 1 is a schematic view of the overall structure of the present invention
FIG. 2 is a schematic diagram of an inertial structure according to the present invention
FIG. 3 is a schematic view of a flexible hinge of the present invention
FIG. 4 is a motion schematic of the present invention
FIG. 5 is a diagram of the driving electric signal according to the present invention
In the figure: 1. a base; 2. a sliding rail; 3. an inertial mechanism; 4. a piezoelectric element; 5. a flexible hinge; 6. a mass block; 7. a sliding platform; 31. a flexible structure; 32. and (5) a quality structure.
Detailed Description
The details of the present invention and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 and 4, the invention relates to a large-stroke piezoelectric inertia driving platform, and belongs to the field of precision machinery. Comprises a base, a sliding guide rail, a mass block, a piezoelectric element, an inertial mechanism, a flexible hinge and a sliding platform. The piezoelectric element converts electric energy into kinetic energy based on the inverse piezoelectric effect of piezoelectric ceramics and drives the mass block to move by utilizing the inertia principle; and the time lag effect of the flexible hinge is utilized to enable the additional mass block to generate secondary inertial motion, so that the single-step travel of the inertial platform is improved. The inertial mechanism comprises a flexible structure and a mass structure and generates inertial motion; the sliding guide rail is fixed on the base, the moving part is fixed below the sliding platform through threaded connection, and the sliding platform slides in the guide rail, so that the sliding guide rail has the characteristics of stable movement, simple structure, easiness in control, easiness in realization of large-stroke movement, no electromagnetic interference, compact structure and light weight. At present, the method has good application prospect in the fields of nanotechnology, optical instruments and micromanipulation.
Referring to fig. 1 and 4, the large-stroke piezoelectric inertia driving platform of the present invention increases a single-step stroke by using an inertia driving principle and a time lag effect of a flexible hinge, and includes: the device comprises a base, a sliding track, an inertial mechanism, a piezoelectric element, a flexible hinge, a mass block and a sliding platform.
The inertial mechanism 3 comprises a flexible structure and a mass structure, and the inertial mechanism 3 is provided with two flexible hinges fixed at the installation positions and is fixed below the sliding platform 7 through threaded connection; the piezoelectric element 4 drives the inertial mechanism 3 to produce inertial motion under the action of the electric signal in the working process, and drives the sliding platform 7 to slide on the sliding track 2.
The piezoelectric element 4 is mounted in the mounting groove of the inertial mechanism 3 after being preloaded, is stimulated by an electric signal to generate deformation which slowly extends and rapidly contracts, the deformation is transferred to the mass structure of the inertial mechanism 3 through the flexible structure of the inertial mechanism 3, and the mass structure continuously drives the inertial mechanism 3 forwards due to inertia to integrally generate forward motion.
One end of the flexible hinge 5 is connected with the inertial mechanism 3, the other end of the flexible hinge is connected with the mass block 6, and inertial motion of the inertial mechanism 3 is transmitted to the mass block 6 at the other end. Due to the time lag effect generated by the deformation of the flexible hinge, the inertial motion generated by the inertial structure 3 is transmitted to the mass block 6 after a certain delay; the kinetic energy of the mass 6 imparts an inertial impact on the mechanism, causing additional travel to the inertial mechanism 3.
The sliding rail 2 is fixed on the base 1, the sliding platform 7 slides on the sliding rail 2, a threaded hole is formed in the lower portion of the sliding platform 7 and used for installing the inertial mechanism 3, and the sliding platform 7 generates macroscopic linear motion by accumulating forward displacement through periodic electric signal excitation.
Referring to fig. 2, the inertial mechanism is composed of a flexible structure 31, a mass structure 32; the deformation of the piezoelectric element 4 is transferred via the flexible structure 31 to the mass structure 32, causing inertial movement.
As shown in fig. 3, the stressed deformation portion of the flexible hinge 5 is arc-shaped, which effectively reduces the rigidity of the structure and provides deformation space for transmitting the motion generated by the piezoelectric element 3.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. of the present invention should be included in the protection scope of the present invention.
Claims (1)
1. The utility model provides a large-stroke piezoelectricity inertia drive platform which characterized in that: the single-step travel is increased by utilizing the inertia driving principle and the time lag effect of the flexible hinge; the device comprises a base (1), a sliding track (2), an inertial mechanism (3), a piezoelectric element (4), a flexible hinge (5), a mass block (6) and a sliding platform (7); the inertial mechanism (3) comprises a flexible structure and a mass structure, and the inertial mechanism (3) is provided with two fixed flexible hinges at the installation positions and is fixed below the sliding platform (7) through threaded connection; under the action of an electric signal in the working process, the piezoelectric element (4) drives the inertial mechanism (3) to produce inertial motion and drives the sliding platform (7) to slide on the sliding track (2);
the piezoelectric element (4) is arranged in the mounting groove of the inertial mechanism (3) after being pre-tightened, is subjected to the excitation of an electric signal to generate slow-extension and fast-contraction deformation, and transmits the deformation to the mass structure of the inertial mechanism (3) through the flexible structure of the inertial mechanism (3), and the mass structure continuously drives the inertial mechanism (3) forwards due to inertia to integrally generate forward motion;
one end of the flexible hinge (5) is connected with the inertial mechanism (3), the other end of the flexible hinge is connected with the mass block (6), and inertial motion of the inertial mechanism (3) is transmitted to the mass block (6) at the other end of the flexible hinge; due to the time lag effect generated by the deformation of the flexible hinge, the inertial motion generated by the inertial structure (3) is transmitted to the mass block (6) after a certain delay; the kinetic energy of the mass block (6) generates inertial impact on the mechanism, so that the inertial mechanism (3) generates additional travel; the stressed deformation part of the flexible hinge (5) is an arc;
the sliding track (2) is fixed on the base (1), the sliding platform (7) slides on the sliding track (2), the lower part of the sliding platform (7) is provided with a threaded hole for installing the inertial mechanism (3), and the sliding platform (7) generates macroscopic linear motion by accumulating positive displacement through periodic electric signal excitation.
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