CN112858795A - Integrated optical waveguide electric field sensor and system based on balance detection - Google Patents
Integrated optical waveguide electric field sensor and system based on balance detection Download PDFInfo
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- 230000005684 electric field Effects 0.000 title claims abstract description 85
- 230000003287 optical effect Effects 0.000 title claims abstract description 79
- 238000001514 detection method Methods 0.000 title claims abstract description 36
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- 230000010287 polarization Effects 0.000 claims abstract description 23
- 238000012545 processing Methods 0.000 claims abstract description 20
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 11
- 230000000694 effects Effects 0.000 claims abstract description 7
- 238000005516 engineering process Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 2
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- 150000002739 metals Chemical class 0.000 claims description 2
- 238000004148 unit process Methods 0.000 claims description 2
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
- G01R29/0878—Sensors; antennas; probes; detectors
- G01R29/0885—Sensors; antennas; probes; detectors using optical probes, e.g. electro-optical, luminescent, glow discharge, or optical interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
- G01R15/241—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices using electro-optical modulators, e.g. electro-absorption
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Abstract
The invention provides an integrated optical waveguide electric field sensor and a system based on balance detection, wherein the electric field sensor is characterized in that a double-parallel asymmetric MZI type optical waveguide structure is manufactured on the surface of a lithium niobate wafer, segmented electrodes are manufactured on two sides of each straight waveguide arm of the double-parallel asymmetric MZI, and electro-optic modulation in opposite directions is realized. The electric field balance detection system provided by the invention comprises: the device comprises a polarization maintaining laser, a polarization maintaining optical fiber, an optical waveguide electric field sensor, a single mode optical fiber, a balanced photoelectric detector and an electric signal processing unit; the output light of the polarization maintaining laser is input into the optical waveguide electric field sensor through the polarization maintaining optical fiber, the electric field sensor outputs two beams of modulated light after detecting a space electric field, and the balance photoelectric detector receives two paths of differential mode signals and then converts the signals to output light current. The current signals are differentiated to realize the effect of inhibiting common mode noise in the signals by a difference method, so that the sensitivity of the electric field sensing system is improved.
Description
Technical Field
The invention relates to the field of electric field measurement, in particular to an integrated optical waveguide electric field sensor and system based on balanced detection.
Background
With the rapid development of electronic science and technology, Electromagnetic field detection near a radiation source becomes more and more important in Electromagnetic Compatibility (EMC) tests of electronic circuits and devices. However, the radio frequency electric field in the EMC field is often very weak, so that accurate measurement of the electric field is beneficial to detecting external electromagnetic radiation and interference of electrical and electronic instruments and researching the influence of the environmental electric field on the operation of electronic equipment.
The passive optical electric field sensor based on optical technology, especially the optical waveguide electric field sensor based on integrated optical technology, has become a hotspot for electric field measurement, especially for transient strong electric field measurement research, because of its advantages of fast response, small volume, wide bandwidth, strong anti-electromagnetic interference capability, small interference to the measured electric field, etc. Through sensitivity analysis of an electric field detection system, intrinsic phase difference and Relative Intensity Noise (RIN) have a main influence on detection sensitivity. The sensor considering the inherent phase difference and the RIN factor is not reported yet, so that the aim of controlling the working point and designing the segmented electrode to obtain a differential signal to achieve balanced detection is achieved by designing the double-asymmetric MZI, the RIN is eliminated, and the sensitivity of the electric field detection system is improved.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an integrated optical waveguide electric field sensor and a system based on balance detection. And finally, a balanced photoelectric detection circuit formed by two PIN type photodiodes which are connected in parallel and have consistent responsivity is designed to realize the suppression of common mode noise, so that the sensitivity of the integrated optical waveguide electric field sensing system is improved.
In order to solve the technical problems, the technical scheme of the invention is as follows: an integrated optical waveguide electric field sensor based on balance detection comprises a lithium niobate wafer, wherein a double-parallel asymmetric integrated optical waveguide MZI structure is manufactured on the surface of the lithium niobate wafer, segmented electrodes are manufactured on two sides of each straight waveguide arm of the double-parallel asymmetric integrated optical waveguide MZI structure, and electro-optic modulation effects in opposite directions are achieved.
Preferably, the manufacturing process of the double-parallel asymmetric integrated optical waveguide MZI structure is as follows: and manufacturing a Y-shaped optical waveguide on the surface of the lithium niobate wafer by adopting a proton exchange technology, and manufacturing MZI optical waveguides formed by an input Y-shaped optical waveguide, two asymmetric waveguide arms and an output Y-shaped optical waveguide on two branches of the Y-shaped optical waveguide respectively.
Preferably, the segmented electrode is composed of two or more segments of electrodes, and the materials of the segmented electrodes are gold, chromium, aluminum or other metals. The whole electrode is equivalent to a receiving antenna, and the volume is reduced and the design is simplified through the combination of the antenna and the modulating electrode.
In another aspect, the present invention further provides an electric field balance detection system using the electric field sensor as a core probe, wherein the detection system includes:
the polarization maintaining laser is used for generating linearly polarized light beams;
the polarization maintaining optical fiber is used for inputting linearly polarized light output by the polarization maintaining laser into a double-parallel asymmetric integrated optical waveguide MZI in the electric field sensor;
the electric field sensor is used for receiving a measured electric field signal and realizing the modulation of the voltage formed by the segmented electrodes on the light wave in the optical waveguide between the segmented electrodes;
the single-mode optical fiber is used for inputting the modulated light output by the electric field sensor into the balanced photoelectric detector;
the balance photoelectric detector is used for converting the optical signals into electric signals, and the two paths of electric signals are further subjected to difference and then are sent to the next-stage electric signal processing unit;
and the electric signal processing unit is used for extracting the electric field to be detected and obtaining the information of the electric field to be detected after calculation processing.
As a further description of the above technical solution: the polarization maintaining laser is connected with the electric field sensor through the polarization maintaining optical fiber, two paths of outputs of the electric field sensor are connected with two paths of inputs of the balance photoelectric detector through the single mode optical fiber, and the electric signal processing unit processes the electric signal output by the balance photoelectric detector to obtain a measured electric field signal.
Preferably, the polarization maintaining laser, the polarization maintaining optical fiber, the single mode optical fiber and the balanced photodetector are commercial optical fibers or devices for optical fiber communication with a central wavelength of 1550 nm.
The invention has the following characteristics: the invention realizes the electro-optic modulation effect in opposite directions by manufacturing an integrated optical waveguide double-parallel asymmetric MZI structure based on balance detection on the surface of a lithium niobate wafer and manufacturing segmented electrodes on two sides of each straight waveguide arm of the double-parallel asymmetric MZI, connects a balance photoelectric detector at an output end to convert an optical signal into an electric signal to obtain an output photocurrent, and finally performs signal processing at the output end of a measurement system by adopting an electric signal processing unit to obtain an electric field value; the balance detection eliminates the direct current component in the signal, plays a role in inhibiting the common-mode signal and improves the sensitivity of the electric field sensor.
Compared with the prior art, the invention has the following beneficial effects: according to the invention, segmented electrodes are manufactured on two sides of each straight waveguide arm of the double-parallel asymmetric MZI, electro-optic modulation effects in opposite directions are realized, and balanced detection makes a difference on current signals, so that the effect of suppressing common-mode noise in the signals by a difference method is realized, thus the sensitivity of the electric field sensor is improved, and a new effective means is provided for the field of weak signal detection.
Drawings
FIG. 1 is a diagram of the MZI structure size of a double parallel asymmetric integrated optical waveguide in an electric field sensor provided by the present invention;
FIG. 2 is a diagram of the structural dimensions of the segmented electrodes in mm in the electric field sensor provided by the present invention;
FIG. 3 is a schematic structural diagram of an electric field sensor provided in the present invention;
FIG. 4 is a block diagram of a detection system of an integrated optical waveguide electric field sensor based on balanced detection according to the present invention;
the labels in the figure are: the device comprises a 1-lithium niobate wafer, a 2-integrated optical waveguide double-parallel asymmetric MZI, a 3-segmented electrode, a 4-polarization maintaining optical fiber, a 5-single mode optical fiber, a 6-antenna, a 7-polarization maintaining laser, an 8-balanced photoelectric detector and a 9-electric signal processing unit.
Detailed Description
The technical solutions of the present invention will be described in further detail with reference to the drawings and specific examples, but the present invention is not limited to the following technical solutions.
Example 1
As shown in fig. 1 to 3, an integrated optical waveguide electric field sensor based on balanced detection includes:
the lithium niobate wafer 1 is used as a substrate of the integrated optical waveguide electric field sensor;
in the double-parallel asymmetric integrated optical waveguide Mach-zehnder interferometer (MZI) structure 2, a Y-shaped optical waveguide is fabricated on the surface of the lithium niobate wafer 1 by adopting a proton exchange technology, and two MZI optical waveguides formed by an input Y-shaped optical waveguide, two asymmetric waveguide arms and an output Y-shaped optical waveguide are fabricated on two branches of the Y-shaped optical waveguide respectively, so that a monolithic integrated double-parallel asymmetric MZI optical waveguide structure is formed, as shown in fig. 1. Specific parameters of the dual parallel asymmetric MZI optical waveguide structure in fig. 1 are shown in table 1.
TABLE 1
Segmented electrodes 3 in each straight waveguide arm L of the MZI optical waveguide5A segmented electrode is fabricated around, and the entire electrode corresponds to the receiving antenna 6. By the combination of the antenna and the electrode, the volume is reduced and the design is simplified. The structural design of the electrode is simulated and optimized by HFSS software, the structural size of the electrode is shown in figure 2, the device in the embodiment comprises 10 sections of segmented electrodes, an antenna 6 is used for accessing to an electric field signal to be detected and forming induced voltage between the segmented electrodes, so that the light wave transmitted in the optical waveguide between the segmented electrodes is modulated;
as shown in fig. 2-3, the segmented electrodes in the integrated optical waveguide electric field sensor are composed of ten segmented electrodes. The segmented electrodes are arranged on two sides of each straight waveguide arm in the double-parallel asymmetric integrated optical waveguide MZI. The materials for the segmented electrodes are gold, chromium, aluminum or other metal materials.
The manufacturing process of the segmented electrode is as follows: and evaporating a layer of chromium and gold by adopting an electron beam vacuum technology. The use of chromium metal solves this problem because gold has a weak adsorption force with the wafer molecules and is not firmly fixed. First a layer of chromium (thickness) is evaporated
) Then a layer of gold (thickness) is evaporated
) And photoetching is carried out to complete the electrode pattern. Then, the thickness of the electrode is increased by electroplating. If the chrome gold is too thick, etching after photolithography is difficult, and jaggies are liable to occur at the edge of the electrode. However, the thickness is thin, which cannot meet the design requirement, and therefore, electroplating is needed to meet the design requirement. Too thick plated electrodes cannot be realized due to the limitations of experimental processes.
As shown in fig. 4, an electric field balance detection system using an integrated optical waveguide electric field sensor based on balance detection as a core probe provided by the invention includes:
the polarization maintaining optical fiber 4 is used for inputting linearly polarized light output by the polarization maintaining laser into the integrated optical waveguide double-parallel asymmetric MZI 2;
the electric field sensor is used for receiving a detected electric field signal and realizing the modulation of the voltage formed between the segmented electrodes on the light wave in the light waveguide between the electrodes;
the single-mode optical fiber 5 is used for inputting the modulated light output by the electric field sensor into the balanced photoelectric detector 7;
a polarization maintaining laser 7 for generating a linearly polarized light beam;
the balance photoelectric detector 8 is used for converting the optical signals into electric signals, and the two paths of electric signals are further subjected to differential amplification and then sent to the next-stage electric signal processing unit 9;
the electric signal processing unit 9 is used for processing the electric signal output by the balanced photoelectric detector 8 to obtain the measured voltage, and further calculating and processing to obtain the information of the measured electric field;
the polarization maintaining laser, the polarization maintaining optical fiber, the single mode optical fiber and the balanced photoelectric detector are commercial optical fibers and devices for optical fiber communication with the central wavelength of 1550 nm.
As shown in fig. 3, when the integrated optical waveguide electric field sensor and system based on balanced detection provided by the present invention is used to measure an electric field, the antenna 6 is used to access a measured electric field signal and form an induced voltage between the segmented electrodes, and the induced voltage will modulate the light wave transmitted in the optical waveguide between the segmented electrodes 3 by using the electro-optic effect of the lithium niobate crystal, that is, the measured electric field e (t) is loaded on the light wave; the output end of the optical waveguide electric field sensor uses a balanced photoelectric detector 8 to convert the modulated optical signal into an electric signal, and then a signal processing unit 9 carries out processing calculation to obtain the measured electric field value.
The specific process of measuring the electric field by adopting the integrated optical waveguide electric field balance detection system comprises the following steps:
because the segment electrodes are of a symmetrical structure, induced voltages generated at the upper part and the lower part of the segment electrodes are equal in magnitude and opposite in direction, so that the optical waves in the upper MZI and the lower MZI are modulated in opposite phases. According to the basic principle of the mach-zehnder modulator, when the sensor receives the external electric field e (t), the optical power output by the sensor can be expressed as:
in the formulae (1) and (2), Pin1And Pin2For sensor input power PinSplit into two equal parts by the first left Y branch. α and β are the loss and extinction coefficients. EπIs the half wave electric field of the sensor.
Is the inherent phase difference resulting from the optical waveguide asymmetry of the prepared MZI. An asymmetric integrated optical waveguide MZI with a length difference Δ L is designed, thus in equations (1) and (2)
Is written as
In the formula (3), λ is the operating wavelength of the sensor, and N is the effective refractive index of the optical waveguide. As can be seen from the formula (3), the operating wavelength λ can be controlled
Equal to pi/2. If E isπ> E (t), i.e. π E (t)/EπVery little, the formulae (1) and (2) become
According to the equations (4) and (5), when the sensor operates in the linear working region, the output optical power of the sensor and the measured electric field are in a linear relationship, i.e. the electric field e (t) can be obtained by detecting the output optical power of the sensor.
Sensor output light signal Pout1And Pout2The optical signal is converted into an electric signal through a balanced photoelectric detector with the transimpedance gain of A, and a voltage V is outputoutIs composed of
In the formula (6), R1And R2Is to balance the responsivity of the two photodiodes in detection. If R is R ═ R1＝R2When the circuit only receives the single-path optical signal, the output voltage VoutComprises the following steps:
comparing equations (6) and (7), it can be seen that the balance detection eliminates the dc component in the signal, suppresses the common mode signal, and increases the amplitude of the output voltage signal by 6dB, thereby improving the sensitivity of the sensor.
In summary, the present invention provides an integrated optical waveguide electric field sensor and system based on balanced detection: by adopting the integrated optical processing technology, the optical waveguide and the electrode are integrated on a wafer to form the monolithic integration of the electric field sensing unit, the effective value and the phase of the electric field are simultaneously measured by utilizing the characteristic of wide optical sensing bandwidth, and the measured electric field can be obtained by using a balanced photoelectric detector and an electric signal processing unit at the output end of the measuring sensor. The measuring sensor has the advantages of high sensitivity, miniaturization, strong anti-interference capability and good insulating property.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (6)
1. An integrated optical waveguide electric field sensor based on balance detection comprises a lithium niobate wafer and is characterized in that a double-parallel asymmetric integrated optical waveguide MZI structure is manufactured on the surface of the lithium niobate wafer, segmented electrodes are manufactured on two sides of each straight waveguide arm of the double-parallel asymmetric integrated optical waveguide MZI structure, and electro-optic modulation effects in opposite directions are achieved.
2. The integrated optical waveguide electric field sensor based on balanced detection according to claim 1, characterized in that the double parallel asymmetric integrated optical waveguide MZI structure is fabricated as follows: and manufacturing a Y-shaped optical waveguide on the surface of the lithium niobate wafer by adopting a proton exchange technology, and manufacturing MZI optical waveguides formed by an input Y-shaped optical waveguide, two asymmetric waveguide arms and an output Y-shaped optical waveguide on two branches of the Y-shaped optical waveguide respectively.
3. The balanced detection based integrated optical waveguide electric field sensor according to claim 1, characterized in that the segmented electrode is composed of two or more segments of electrodes, and the material of the segmented electrode is gold, chromium, aluminum or other metals.
4. An electric field balance detection system using the electric field sensor as claimed in any one of claims 1 to 3 as a core probe, the detection system comprising:
the polarization maintaining laser is used for generating linearly polarized light beams;
the polarization maintaining optical fiber is used for inputting the linearly polarized light output by the polarization maintaining laser into a double-parallel asymmetric integrated optical waveguide MZI of the electric field sensor;
the electric field sensor is used for receiving a measured electric field signal and realizing the modulation of the voltage formed by the segmented electrodes on the light wave in the optical waveguide between the segmented electrodes;
the single-mode optical fiber is used for inputting the modulated light output by the electric field sensor into the balanced photoelectric detector;
the balance photoelectric detector is used for converting the optical signals into electric signals, and the two paths of electric signals are further subjected to difference and then are sent to the next-stage electric signal processing unit;
and the electric signal processing unit is used for extracting the electric field to be detected and obtaining the information of the electric field to be detected after calculation processing.
5. The electric field balance detection system according to claim 4, wherein the polarization maintaining laser is connected to the electric field sensor through a polarization maintaining fiber, two outputs of the electric field sensor are connected to two inputs of the balance photodetector through a single mode fiber, and the electric signal processing unit processes the electric signal output by the balance photodetector to obtain the measured electric field signal.
6. The electric field balance detection system according to claim 4, wherein the polarization maintaining laser, the polarization maintaining optical fiber, the single mode optical fiber and the balance photodetector are commercial optical fibers or devices for optical fiber communication with a center wavelength of 1550 nm.
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| CN113341236A (en) * | 2021-05-31 | 2021-09-03 | 昆明理工大学 | Polarization maintaining optical fiber coupling type electro-optical crystal electric field sensor |
| CN113433368A (en) * | 2021-07-02 | 2021-09-24 | 北京森馥科技股份有限公司 | Lithium niobate integrated MZI type optical waveguide heavy current sensor and measurement system |
| CN114720780A (en) * | 2022-06-09 | 2022-07-08 | 杭州微纳智感光电科技有限公司 | High-power high-frequency microwave field intensity sensing method and device |
| CN115267361A (en) * | 2022-08-11 | 2022-11-01 | 西北核技术研究所 | Electrode antenna integrated split type optical three-dimensional pulse electric field detector |
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| CN114720780B (en) * | 2022-06-09 | 2022-09-09 | 杭州微纳智感光电科技有限公司 | High-power high-frequency microwave field intensity sensing method and device |
| CN115267361A (en) * | 2022-08-11 | 2022-11-01 | 西北核技术研究所 | Electrode antenna integrated split type optical three-dimensional pulse electric field detector |
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