CN112853494A - Temperature adjusting device for graded temperature reduction and heat control of top cavity of high-temperature furnace for preparing single crystal material - Google Patents
Temperature adjusting device for graded temperature reduction and heat control of top cavity of high-temperature furnace for preparing single crystal material Download PDFInfo
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- CN112853494A CN112853494A CN202011631460.6A CN202011631460A CN112853494A CN 112853494 A CN112853494 A CN 112853494A CN 202011631460 A CN202011631460 A CN 202011631460A CN 112853494 A CN112853494 A CN 112853494A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
- C30B29/48—AIIBVI compounds wherein A is Zn, Cd or Hg, and B is S, Se or Te
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B9/00—Single-crystal growth from melt solutions using molten solvents
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Abstract
The invention relates to a high-temperature furnace top cavity graded temperature reduction and heat control temperature adjusting device for preparing a single crystal material, which belongs to the technical field of crystal material preparation and comprises an outer heat insulation cover body, a primary temperature reduction and heat control temperature adjusting cylinder, a primary temperature adjusting cylinder thermocouple supporting seat, a primary temperature adjusting cylinder lower cavity thermocouple, a secondary temperature reduction and heat control temperature adjusting cylinder, a secondary temperature adjusting cylinder thermocouple supporting seat, a secondary temperature adjusting cylinder thermocouple, a power supply cable, a primary temperature adjusting cylinder hole nozzle, a primary temperature adjusting cylinder thermocouple wiring package, a cable protection tube, a secondary temperature adjusting cylinder hole nozzle and a secondary temperature adjusting cylinder thermocouple wiring package; the invention realizes the transition connection of the high-temperature area in the high-temperature furnace core and the low-temperature area of the indoor environment by grading temperature reduction, heat control and temperature regulation, so that the uniformity of the radial temperature and the axial temperature gradient in the furnace cavity is not influenced, and the heat-resistant cylinder body can not be cracked. The invention can improve the uniformity of radial temperature and axial temperature gradient of the inner cavity at the top of the crystal growth furnace chamber, and prepare high-quality single crystal material.
Description
Technical Field
The invention belongs to the technical field of crystal material preparation, and particularly relates to a temperature regulating device for graded temperature reduction and heat control of a top cavity of a high-temperature furnace for preparing a single crystal material.
Background
When the tellurium-zinc-cadmium ternary single crystal or other double-component single crystal or single-component single crystal materials are prepared, the raw materials with higher purity are placed into a quartz ampoule, vacuum pumping is carried out, then packaging is carried out, and after the processes of high-temperature melting, swinging mixing and the like, the raw materials are placed into a crystal material growth furnace to grow for 15-20 days, so that the single crystal materials can be grown. The growth furnace is generally composed of 7 sections to 11 sections, the temperature of the inner cavity of each section of the hearth is controlled at a certain constant temperature value in a range of 950-1150 ℃, and different growth temperature gradients are formed by the combination mode of different temperatures of the sections of the growth furnace, so that the growth quality of crystal materials is influenced. The furnace top is used as the highest point of the high-temperature furnace and is directly contacted with the atmosphere, the temperature of the furnace top is usually close to the indoor environment temperature, the transition from high temperature in the hearth to indoor low temperature needs to be processed by the crystal growth furnace, and otherwise, the uniformity of radial temperature and axial temperature gradient in the hearth can be directly influenced.
The prior art adopts a method as shown in figure 3, and the structure of the top of a high-temperature furnace prepared from single crystal materials is as follows: furnace body roof 6 supports in furnace body support 1 top, furnace body support 1 internal fixation is furnace body heat preservation insulating layer 2, furnace body heat preservation insulating layer 2 is inside to have thermocouple support frame 4, thermocouple support frame 4 will heat thermocouple 3 and fix, it is wrapping up high temperature wick 5 to heat thermocouple 3, high temperature wick 5 is just right sets up top heat exchanger 7 outside the chamber, the top separates the top chamber 8 of heat exchanger 7 lower chamber wall direct UNICOM high temperature wick 5, the temperature in top chamber 8 is in furnace inner chamber temperature at 950 ~ 1150 ℃ intervals, the top surface of top heat exchanger 7 is in room temperature environment. The temperature difference between the lower top surface and the upper top surface of the top heat shield 7 is about 950-1150 ℃, the lower bottom surface of the top heat shield 7 is greatly expanded by high-temperature thermal expansion due to the thermal expansion of materials, the top surface is almost not expanded at room temperature, and the top heat shield 7 is easily broken due to the difference of expansion deformation. In addition, the temperature difference between the lower top surface and the upper top surface of the top heat shield 7 reaches 950-1150 ℃, the temperature of the upper top surface is close to 20 ℃ of the room temperature, the high temperature difference can lead the top of the top heat shield 7 to conduct heat quickly, the top cavity 8 quickly dissipates a large amount of heat to the room, the heating thermocouple 3 is difficult to accurately control the temperature of the inner cavity of the high-temperature furnace core 5 due to quick heat dissipation, the radial temperature and the axial temperature gradient in the hearth are not uniform enough, and the preparation performance of single crystal materials is affected.
In order to overcome the defects of the device for preparing the heat shield on the outer top surface of the high-temperature furnace chamber by using the single crystal material, which is shown in FIG. 3, the device shown in FIG. 4 is provided. Compared with the device shown in fig. 3, the device for preparing the inner top surface heat shield of the high-temperature furnace chamber from the single crystal material shown in fig. 4 comprises the heat-insulating outer cylinder 29 and the inner top surface heat shield 30, the heat shield is moved to the position where the inner cavity of the high-temperature furnace core 5 is close to the upper top surface of the heating thermocouple 3, so that the outer bottom surface of the inner top surface heat shield 30 is close to the upper top surface of the top cavity 32 of the high-temperature furnace core, the inner cavity 31 of the inner top surface heat shield 30 is located in the inner cavity of the heat-insulating outer cylinder 29, and the temperature of the inner cavity 31 is higher than the indoor temperature under the action of heat transfer of the wall surfaces of the high-temperature furnace core 5, the inner top surface heat shield 30 and the heat-insulating outer cylinder 29, thereby reducing the influence of the heat transfer on the uniformity of the radial temperature and the axial temperature gradient in the furnace chamber, and high-temperature fragments after the bottom, still easily cracked, and still great influence to radial temperature in the furnace and axial temperature gradient homogeneity.
Disclosure of Invention
In order to overcome the problems in the background art, the invention provides a temperature regulating device for graded temperature reduction and heat control of a top cavity of a high-temperature furnace for preparing a single crystal material, which realizes graded temperature reduction and heat control transition connection between a high-temperature area in a high-temperature furnace core and a low-temperature area of an indoor environment, ensures that the uniformity of radial temperature and axial temperature gradient in a furnace chamber is not influenced, and does not cause the fragmentation of a heat insulating layer. The invention can improve the uniformity of radial temperature and axial temperature gradient of the inner cavity at the top of the crystal growth furnace chamber, and prepare high-quality single crystal material.
In order to realize the purpose, the invention is realized by the following technical scheme:
a temperature adjusting device for high-temperature furnace top cavity graded temperature reduction and heat control for preparing single crystal materials comprises an outer heat insulation cover body 8, a primary temperature reduction and heat control temperature adjusting cylinder 9, a primary temperature adjusting cylinder lower cavity thermocouple supporting seat 10, a primary temperature adjusting cylinder lower cavity thermocouple 11, a secondary temperature reduction and heat control temperature adjusting cylinder 12, a secondary temperature adjusting cylinder thermocouple supporting seat 13, a secondary temperature adjusting cylinder thermocouple 14, a connecting cable 15, a primary temperature adjusting cylinder hole nozzle 18, a primary temperature adjusting cylinder thermocouple wiring package 19, a cable protecting tube 20, a secondary temperature adjusting cylinder hole nozzle 21 and a secondary temperature adjusting cylinder thermocouple wiring package 22, wherein the outer heat insulation cover body 8 is arranged outside the primary temperature reduction and heat control temperature adjusting cylinder 9, the inner cavity of the primary temperature reduction and heat control temperature adjusting cylinder 9 is divided into a primary temperature adjusting cylinder lower cavity 16 positioned at the lower part and a secondary temperature adjusting cylinder inner cavity 17 positioned above the primary temperature adjusting cylinder lower cavity 16, the primary temperature adjusting cylinder lower cavity 16 is provided with the primary temperature adjusting cylinder lower cavity thermocouple supporting seat 10 on the side wall, a primary temperature-regulating cylinder lower cavity thermocouple 11 is arranged on a primary temperature-regulating cylinder lower cavity thermocouple supporting seat 10, a secondary temperature-reducing and temperature-controlling temperature-regulating cylinder 12 is arranged in a secondary temperature-regulating cylinder inner cavity 17, a secondary temperature-regulating cylinder thermocouple supporting seat 13 is arranged on the inner wall of the secondary temperature-reducing and temperature-controlling temperature-regulating cylinder 12, a secondary temperature-regulating cylinder thermocouple 14 is arranged on the secondary temperature-regulating cylinder thermocouple supporting seat 13, a primary temperature-regulating cylinder hole nozzle 18 is arranged between the two secondary temperature-regulating cylinder inner cavities 17, a power supply cable 15 is arranged in the primary temperature-regulating cylinder hole nozzle 18, a primary temperature-regulating cylinder thermocouple wiring package 19 is arranged in the primary temperature-regulating cylinder hole nozzle 18, the power supply cable 15 passes through the primary temperature-regulating cylinder thermocouple wiring package 19 through a cable protection tube 20 to be connected with the primary temperature-regulating cylinder lower cavity thermocouple 11, a secondary temperature-regulating cylinder hole nozzle 21 is arranged on the secondary temperature, the power supply cable 15 is connected with the secondary temperature control cylinder thermocouple 14 through the cable protection tube 20 passing through the secondary temperature control cylinder thermocouple connection encapsulation 22.
Further, a first temperature regulating cylinder temperature sensor 23 and a second temperature regulating cylinder temperature sensor 24 are respectively arranged in the first temperature regulating cylinder lower cavity 16 and the second temperature regulating cylinder inner cavity 17, the first temperature regulating cylinder temperature sensor 23 and the crystal growth furnace high-temperature inner cavity temperature sensor 34 are respectively connected with a PID control arithmetic unit 33, the PID control arithmetic unit 33 is connected with a PLC (programmable logic controller) 25, the PLC 25 is respectively connected with the first temperature regulating cylinder lower cavity thermocouple 11 and the second temperature regulating cylinder thermocouple 14 through relays, and a temperature display instrument 28 is arranged on the PLC 25.
Further, a screw hole is formed in the furnace body top plate 6, a circle of edge protruding outwards is arranged at the bottom of the outer heat insulation cover body 8, and the outer heat insulation cover body 8 is fixedly installed on the furnace body top plate 6 through an installation seat 26 with the screw hole formed in the outer heat insulation cover body and a screw 27 matched with the screw hole.
The invention has the beneficial effects that:
the invention realizes the transition connection of the high-temperature area in the high-temperature furnace core and the low-temperature area of the indoor environment by graded temperature reduction, heat control and temperature regulation, so that the uniformity of the radial temperature and the axial temperature gradient in the furnace cavity is not influenced, and the wall surface of the cylinder body cannot be cracked. The invention can improve the uniformity of radial temperature and axial temperature gradient of the inner cavity at the top of the crystal growth furnace chamber, and prepare high-quality single crystal material.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the present invention in use;
FIG. 3 is a schematic structural diagram of a single crystal material high temperature furnace top cavity outer top surface heat shield device;
FIG. 4 is a schematic structural diagram of a top surface heat shield device in a top cavity of a high temperature furnace made of single crystal materials;
FIG. 5 is a schematic diagram of a control circuit according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention and the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in the figures 1, 2 and 5, the temperature regulating device for high-temperature furnace top cavity graded temperature reduction and heat control for single crystal material preparation comprises an outer heat insulation cover body 8, a primary temperature reduction and heat control temperature regulating cylinder 9, a primary temperature regulating cylinder lower cavity thermocouple supporting seat 10, a primary temperature regulating cylinder lower cavity thermocouple 11, a secondary temperature reduction and heat control temperature regulating cylinder 12, a secondary temperature regulating cylinder thermocouple supporting seat 13, a secondary temperature regulating cylinder thermocouple 14, a power supply cable 15, a primary temperature regulating cylinder hole nozzle 18, a primary temperature regulating cylinder thermocouple wiring package 19, a cable protection pipe 20, a secondary temperature regulating cylinder hole nozzle 21 and a secondary temperature regulating cylinder thermocouple wiring package 22.
The outer side of the primary temperature-reducing and controlling thermal-regulating cylinder 9 is provided with an outer heat-insulating cover body 8, and the inner cavity of the primary temperature-reducing and controlling thermal-regulating cylinder 9 is divided into a primary temperature-regulating cylinder lower cavity 16 positioned at the lower part and a secondary temperature-regulating cylinder inner cavity 17 positioned above the primary temperature-regulating cylinder lower cavity 16. The heating temperature of the lower cavity 16 of the primary temperature-regulating cylinder is 650-800 ℃, the temperature of the inner cavity of the hearth is 950-1150 ℃, so the temperature difference between the inside and outside of the wall surface of the lower part of the primary temperature-reducing and temperature-controlling cylinder 9 is 300-350 ℃, when the material is heated and expanded, the difference of the deformation of the upper wall surface and the lower wall surface of the bottom surface due to thermal expansion is only 1/3 in the prior art, the heat emitted by the wall surface is only 1/3 in the prior art, the primary temperature-reducing and temperature-controlling cylinder 9 is made of a proper heat-resistant ceramic material, the temperature difference can be borne without fragmentation, the heating amount of the heating thermocouple 3 can be compensated, and the temperature control precision of the inner cavity of the high-temperature furnace core 5 can meet the. The heating temperature of the inner cavity 17 of the secondary temperature adjusting cylinder is 350-400 ℃, and the heating temperature of the lower cavity 16 of the primary temperature adjusting cylinder is 650-800 ℃, so the temperature difference between the lower cavity 16 of the primary temperature adjusting cylinder of the primary temperature-reducing and temperature-controlling temperature adjusting cylinder 9 and the inner cavity 17 of the secondary temperature adjusting cylinder is 300-350 ℃, and the middle layer of the primary temperature-reducing and temperature-controlling temperature adjusting cylinder 9 can bear the temperature difference and cannot be cracked. The top surface of the outer heat-insulating cover body 8 is exposed to the room temperature environment, so the temperature difference between the bottom surface of the top of the secondary temperature-reducing and temperature-controlling heat-adjusting cylinder 12 and the top surface of the top of the outer heat-insulating cover body 8 is between 350 ℃ and 400 ℃, and the secondary temperature-reducing and temperature-controlling heat-adjusting cylinder 12 and the top body of the outer heat-insulating cover body 8 can bear the temperature difference and cannot be cracked. A first-stage temperature-regulating cylinder lower cavity thermocouple supporting seat 10 is arranged on the side wall of a first-stage temperature-regulating cylinder lower cavity 16, a first-stage temperature-regulating cylinder lower cavity thermocouple 11 is arranged on the first-stage temperature-regulating cylinder lower cavity thermocouple supporting seat 10, a second-stage temperature-regulating cylinder 12 is arranged on the inner wall of a second-stage temperature-regulating cylinder inner cavity 17, a second-stage temperature-regulating cylinder thermocouple supporting seat 13 is arranged on the inner wall of the second-stage temperature-regulating cylinder 12, a second-stage temperature-regulating cylinder thermocouple 14 is arranged on the second-stage temperature-regulating cylinder thermocouple supporting seat 13, a first-stage temperature-regulating cylinder hole nozzle 18 is arranged between the two second-stage temperature-regulating cylinder inner cavities 17, a power supply cable 15 is arranged on the outer wall of the first-stage temperature-regulating cylinder hole nozzle 18, a first-stage temperature-regulating cylinder thermocouple wiring package 19 is arranged in the first-stage temperature-regulating cylinder hole nozzle 18, the power supply cable 15 passes through the first-stage temperature-, a secondary temperature adjusting cylinder thermocouple wiring package 22 is arranged in the secondary temperature adjusting cylinder hole nozzle 21, and the power supply cable 15 passes through the secondary temperature adjusting cylinder thermocouple wiring package 22 through a cable protection pipe 20 to be connected with the secondary temperature adjusting cylinder thermocouple 14. Two temperature-adjusting intermediate temperature areas, namely a secondary temperature-adjusting cylinder inner cavity 17 and a primary temperature-adjusting cylinder lower cavity 16, are added between the direct connection of the high temperature area in the high-temperature furnace core 5 and the indoor environment low temperature area. The transition connection of the high-temperature region in the high-temperature furnace core 5 and the low-temperature region of the indoor environment for graded temperature reduction, temperature control and temperature regulation is realized, meanwhile, in the invention, a primary temperature regulating cylinder temperature sensor 23 and a secondary temperature regulating cylinder temperature sensor 24 are respectively arranged in a primary temperature regulating cylinder lower cavity 16 and a secondary temperature regulating cylinder inner cavity 17, the primary temperature regulating cylinder temperature sensor 23 and the secondary temperature regulating cylinder temperature sensor 24 are respectively connected with a PID control arithmetic unit 33 (based on proportion, differentiation and integral calculation), the arithmetic unit 33 is connected with a PLC (programmable logic controller) 25, and the PLC 25 is respectively connected with a primary temperature regulating cylinder lower cavity thermocouple 11 and a secondary temperature regulating cylinder thermocouple 14 through relays. The PID control arithmetic unit 33 carries out operation comparison on temperature measurement values of the first-stage temperature-adjusting cylinder lower cavity thermocouple 11 and the crystal growth furnace high-temperature inner cavity temperature sensor 34, the comparison result is sent to the PLC controller 25 through the PID control arithmetic unit 33, the PID arithmetic unit 33 gives out more accurate control parameters of the PLC controller 25, the PLC controller 25 is respectively heated with the first-stage temperature-adjusting cylinder lower cavity thermocouple 11 and the second-stage temperature-adjusting cylinder thermocouple 14 through a relay, temperature regulation and control in two temperature regulation areas of the first-stage temperature-adjusting cylinder lower cavity 16 and the second-stage temperature-adjusting cylinder inner cavity 17 are realized, the temperature difference between the first-stage temperature-adjusting cylinder lower cavity 16 and the second-stage temperature-adjusting cylinder inner cavity 17 is stabilized between 300 ℃ and 350 ℃, the wall surface of the graded temperature-reducing and temperature-controlling temperature-adjusting cylinder is small in thermal expansion when the material is heated, the temperature difference can be borne without fragmentation, and the heating thermocouple heating control of the crystal growth furnace high, the temperature control precision of the high-temperature inner cavity of the crystal growth furnace is ensured to meet the growth requirement of crystal materials, the uniformity of the radial temperature and the axial temperature gradient in the hearth is not affected, and the outer heat insulation cover body 8 is not caused. By adopting the invention, the uniformity of the radial temperature and the axial temperature gradient of the inner cavity 32 at the top of the crystal growth furnace chamber can be improved, and the high-quality single crystal material can be prepared.
In the invention, a screw hole is arranged on the furnace body top plate 6, a circle of outwards protruding edges are arranged at the bottom of the outer heat insulation cover body 8, and the outer heat insulation cover body 8 is fixedly arranged on the furnace body top plate 6 through a mounting seat 26 with the screw hole and a screw 27 matched with the screw hole.
Finally, it is noted that the above-mentioned preferred embodiments illustrate rather than limit the invention, and that, although the invention has been described in detail with reference to the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the invention as defined by the appended claims.
Claims (3)
1. The utility model provides a temperature regulating device that high temperature furnace roof chamber was stepped to be reduced temperature and is controlled heat for single crystal material preparation which characterized in that: the temperature adjusting device for the graded temperature reduction and heat control of the top cavity of the high-temperature furnace for preparing the single crystal material comprises an outer heat insulation cover body (8), a primary temperature reduction and heat control temperature adjusting cylinder (9), a primary temperature adjusting cylinder lower cavity thermocouple supporting seat (10), a primary temperature adjusting cylinder lower cavity thermocouple (11), a secondary temperature reduction and heat control temperature adjusting cylinder (12), a secondary temperature adjusting cylinder thermocouple supporting seat (13), a secondary temperature adjusting cylinder thermocouple (14), a power supply cable (15), a primary temperature adjusting cylinder hole nozzle (18), a primary temperature adjusting cylinder thermocouple wiring package (19), a cable protecting pipe (20), a secondary temperature adjusting cylinder hole nozzle (21) and a secondary temperature adjusting cylinder thermocouple wiring package (22), wherein the outer side of the primary temperature reduction and heat control temperature adjusting cylinder (9) is provided with the outer heat insulation cover body (8), the inner cavity of the primary temperature reduction and heat control temperature adjusting cylinder (9) is divided into a primary temperature adjusting cylinder lower cavity (16) positioned at the lower part and a secondary temperature adjusting cylinder inner cavity (17) positioned above the primary temperature adjusting, a first-stage temperature regulating cylinder lower cavity thermocouple supporting seat (10) is arranged on the side wall of a first-stage temperature regulating cylinder lower cavity (16), a first-stage temperature regulating cylinder lower cavity thermocouple (11) is installed on the first-stage temperature regulating cylinder lower cavity thermocouple supporting seat (10), a second-stage temperature reducing and controlling temperature regulating cylinder (12) is arranged in a second-stage temperature regulating cylinder inner cavity (17), a second-stage temperature regulating cylinder thermocouple supporting seat (13) is installed on the inner wall of the second-stage temperature reducing and controlling temperature regulating cylinder (12), a second-stage temperature regulating cylinder thermocouple (14) is installed on the second-stage temperature regulating cylinder thermocouple supporting seat (13), a first-stage temperature regulating cylinder hole nozzle (18) is arranged between the two second-stage temperature regulating cylinder inner cavities (17), a power supply cable (15) is arranged in the first-stage temperature regulating cylinder hole nozzle (18), a first-stage temperature regulating cylinder thermocouple wiring package (19) is arranged in the first-stage temperature regulating cylinder hole nozzle (18), and the power supply cable (15) penetrates through the first-stage temperature The secondary temperature adjusting cylinder hole nozzle (21) is provided with a secondary temperature adjusting cylinder hole nozzle (21), a secondary temperature adjusting cylinder thermocouple wiring package (22) is arranged in the secondary temperature adjusting cylinder hole nozzle (21), and a power supply cable (15) penetrates through the secondary temperature adjusting cylinder thermocouple wiring package (22) through a cable protection pipe (20) to be connected with the secondary temperature adjusting cylinder thermocouple (14).
2. The temperature regulating device for graded temperature reduction and heat control of the high-temperature furnace top cavity for preparing the single crystal material according to claim 1, characterized in that: one-level temperature cylinder temperature sensor (23) and second grade temperature cylinder temperature sensor (24) are respectively arranged in one-level temperature cylinder lower cavity (16) and second grade temperature cylinder inner cavity (17), one-level temperature cylinder temperature sensor (23) and crystal growth furnace high temperature inner cavity temperature sensor (34) are respectively connected with PID control arithmetic unit (33), PID control arithmetic unit (33) is connected with PLC controller (25), PLC controller (25) is respectively connected with one-level temperature cylinder lower cavity thermocouple (11) and second grade temperature cylinder thermocouple (14) through relay, and PLC controller (25) is provided with temperature display instrument (28).
3. The temperature adjusting device for graded temperature reduction and heat control of the high-temperature furnace top cavity for single crystal material preparation according to claim 1 or 2, characterized in that: the furnace body top plate (6) is provided with a screw hole, the bottom of the outer heat insulation cover body (8) is provided with a circle of edge protruding outwards, and the outer heat insulation cover body (8) is fixedly arranged on the furnace body top plate (6) through a mounting seat (26) provided with the screw hole and a screw (27) matched with the screw hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011631460.6A CN112853494A (en) | 2020-12-31 | 2020-12-31 | Temperature adjusting device for graded temperature reduction and heat control of top cavity of high-temperature furnace for preparing single crystal material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011631460.6A CN112853494A (en) | 2020-12-31 | 2020-12-31 | Temperature adjusting device for graded temperature reduction and heat control of top cavity of high-temperature furnace for preparing single crystal material |
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| CN112853494A true CN112853494A (en) | 2021-05-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011631460.6A Pending CN112853494A (en) | 2020-12-31 | 2020-12-31 | Temperature adjusting device for graded temperature reduction and heat control of top cavity of high-temperature furnace for preparing single crystal material |
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Citations (5)
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| CN108711588A (en) * | 2018-04-16 | 2018-10-26 | 西北工业大学 | A kind of high efficiency thermoelectric module with multistage temperature-control coating |
| CN208023112U (en) * | 2018-02-02 | 2018-10-30 | 天津市宇航兴达真空设备制造有限公司 | A kind of multiple temperature control sapphire growth furnace convenient for observation |
| CN208904070U (en) * | 2018-12-05 | 2019-05-24 | 合肥鑫晟光电科技有限公司 | Temperature-adjusting device |
| CN209355705U (en) * | 2018-12-28 | 2019-09-06 | 中建材蚌埠玻璃工业设计研究院有限公司 | A kind of protective device of high-temperature experiment electric stove furnace roof |
| CN111534680A (en) * | 2020-05-18 | 2020-08-14 | 青岛科技大学 | Heating temperature equalizing method for local induction heat treatment after welding of thick-wall pressure-bearing equipment |
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2020
- 2020-12-31 CN CN202011631460.6A patent/CN112853494A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208023112U (en) * | 2018-02-02 | 2018-10-30 | 天津市宇航兴达真空设备制造有限公司 | A kind of multiple temperature control sapphire growth furnace convenient for observation |
| CN108711588A (en) * | 2018-04-16 | 2018-10-26 | 西北工业大学 | A kind of high efficiency thermoelectric module with multistage temperature-control coating |
| CN208904070U (en) * | 2018-12-05 | 2019-05-24 | 合肥鑫晟光电科技有限公司 | Temperature-adjusting device |
| CN209355705U (en) * | 2018-12-28 | 2019-09-06 | 中建材蚌埠玻璃工业设计研究院有限公司 | A kind of protective device of high-temperature experiment electric stove furnace roof |
| CN111534680A (en) * | 2020-05-18 | 2020-08-14 | 青岛科技大学 | Heating temperature equalizing method for local induction heat treatment after welding of thick-wall pressure-bearing equipment |
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Application publication date: 20210528 |