CN112833027A - Internal support type magnetic suspension pump - Google Patents
Internal support type magnetic suspension pump Download PDFInfo
- Publication number
- CN112833027A CN112833027A CN202110271863.2A CN202110271863A CN112833027A CN 112833027 A CN112833027 A CN 112833027A CN 202110271863 A CN202110271863 A CN 202110271863A CN 112833027 A CN112833027 A CN 112833027A
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- winding assembly
- central axis
- rotating
- pump
- suspension
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D13/00—Pumping installations or systems
- F04D13/02—Units comprising pumps and their driving means
- F04D13/06—Units comprising pumps and their driving means the pump being electrically driven
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/007—Details, component parts, or accessories especially adapted for liquid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/04—Shafts or bearings, or assemblies thereof
- F04D29/046—Bearings
- F04D29/048—Bearings magnetic; electromagnetic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/586—Cooling; Heating; Diminishing heat transfer specially adapted for liquid pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Thermal Sciences (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention discloses an internal support type magnetic suspension pump which comprises a motor, an impeller rotor and a sealing shell, wherein the impeller rotor is sealed in the sealing shell, the rotating central axis of the impeller rotor is superposed with the central axis of a hollow cavity in the sealing shell, a sealing cavity component is arranged above the motor, and the central axis of the motor is superposed with the central axis of the hollow cavity in the sealing cavity component; liquid is sucked into the hollow cavity from a liquid inlet above the central axis of the sealing shell, the impeller rotor in a high-speed suspension rotating state accelerates the liquid to generate centrifugal force, the centrifugal force is thrown to the inner surface of the sealing cavity assembly to form pressure, and the pressure flows out from a liquid outlet communicated with the hollow cavity. The invention has smaller axial size and radial size, smaller flow pulsation when the flow is low at low rotating speed and small flow, and larger flow range which can be accurately and stably controlled.
Description
Technical Field
The invention relates to an internal support type magnetic suspension pump.
Background
In the high-end semiconductor manufacturing process, a chemical liquid supply system is an indispensable functional unit of high-end semiconductor equipment (such as an immersion lithography machine, a wafer cleaning machine, a chemical mechanical polishing system, a glue coating and developing machine, and the like). And the harsh process conditions require that the liquid supply system has the characteristics of chemical corrosion resistance, no generation of particle pollutants, compact structure, large and stable pressure and flow regulation range, low pulsation, high reliability and the like, and the magnetic suspension pump is the most suitable choice. The magnetic suspension pump supports and restrains the impeller rotor based on the magnetic suspension principle, and can be sealed in an ultra-clean closed cavity body completely without contact. The impeller rotor does not have any mechanical contact with the inner wall of the cavity, so that mechanical friction does not exist, particle pollution and abrasion are not generated, and the service life is longer.
At present, most of existing magnetic suspension pumps are magnetically suspended at the outer side, the inner side of the existing magnetic suspension pumps is connected with a magnetic ring at the tail end of a motor through the magnetic ring, the existing magnetic suspension pumps are large in axial size and complex in structure, mechanical rotary support still exists, and the service life is short; the suspension windings and the driving coils are arranged on the outer side of the rotor, but two sets of magnetic suspension windings are needed, the structure is complex, and the axial size is large; there is also a method for directly driving the rotor to rotate by arranging a rotating winding at the center of the rotor (for example, the invention patents with the publication numbers of CN110714926A and CN 101682229B), however, the radial structure of the rotor tends to be larger because a sufficient number of rotating windings need to be arranged at the center, and the size can be reduced by reducing the number of driving coils, so that the cogging of the rotor at low speed is strong, and the flow pulsation is large.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides an internal support type magnetic suspension pump, which is more reasonable in structure and more excellent in performance through an innovative design on structural arrangement.
In order to achieve the purpose, the invention adopts the technical scheme that the internal support type magnetic suspension pump comprises:
the sealing shell comprises a hollow cavity;
the impeller rotor is arranged in the hollow cavity, and the rotating central shaft of the impeller rotor is superposed with the central axis of the hollow cavity; and
the sealing shell is arranged above the motor, and the central axis of the motor is also superposed with the central axis of the hollow cavity; the motor comprises a base, a rotating winding assembly, a suspension winding assembly and an eddy current sensor assembly, wherein the rotating winding assembly, the suspension winding assembly and the eddy current sensor assembly are all arranged on the base, and the central axes of the rotating winding assembly, the suspension winding assembly and the eddy current sensor assembly are all coincided with the central axis of the base; the impeller rotor is positioned between the rotating winding assembly and the suspension winding assembly, and the suspension winding assembly is positioned inside the impeller rotor; the eddy current sensor assembly is used for detecting the position of the impeller rotor.
In an embodiment of the present invention, a winding assembly mounting surface is disposed on the base, the winding assembly mounting surface is composed of a discontinuous central surface and an outer plane, the rotating winding assembly is located on the outer plane, and the central axis of the rotating winding assembly coincides with the central axis of the outer plane; the suspension winding assembly is located on the central plane, and the suspension winding assembly is overlapped with the central axis of the central plane.
In an embodiment of the present invention, the motor further includes a heat dissipation cover, a lower surface of the heat dissipation cover is connected to the base, and the heat dissipation cover is located at an outer periphery of the rotating winding assembly. The base is respectively provided with a first upper surface, a second upper surface and a third upper surface from bottom to top, and the third upper surface consists of a discontinuous central plane and an external plane; the lower surface of the eddy current sensor assembly coincides with the second upper surface of the base, and the central axis of the eddy current sensor assembly coincides with the central axis of the second upper surface.
In an embodiment of the present invention, the sealing shell includes a spiral case and a pump cover, the pump cover is installed above the spiral case, a central axis of the pump cover coincides with a central axis of the spiral case, an inner side of the spiral case protrudes downward to form a hollow cavity, the spiral case is provided with a through-hole flow passage, and the through-hole flow passage is communicated with the hollow cavity. The center of the pump cover is provided with a liquid inlet, the liquid inlet is communicated with the hollow cavity, a through hole flow channel is arranged along the tangential direction of the inner wall of the volute, and liquid can flow from the liquid inlet to the liquid outlet through the through hole flow channel.
In an embodiment of the present invention, the motor further includes a sealing cover, a central axis of the sealing cover coincides with a central axis of the base, an outer lower surface of the sealing cover is closely connected to an upper surface of the rotating winding assembly, and a rotor groove is formed in the sealing cover between an inscribed circle of the rotating winding assembly and an circumscribed circle of the floating winding assembly. The downward protruding portion of the volute is matched with the rotor groove.
In an embodiment of the present invention, the vane wheel rotor includes a permanent magnet rotor and a vane wheel rotor, the permanent magnet rotor is sleeved inside the vane wheel rotor, and a shape of the vane wheel rotor is matched with a shape of the hollow cavity.
In one embodiment of the invention, the impeller rotor at least comprises a framework, blades and an end cover, wherein the framework, the blades and the end cover are fixedly connected, the blades are arranged above the framework, the end cover is arranged above the blades, and the center of the end cover is provided with an overflowing small hole; the permanent magnet motor is characterized in that a hollow ring which is consistent with the shape of the permanent magnet rotor is arranged in the framework, and the permanent magnet rotor is arranged in the hollow ring. The framework is a hollow cylindrical ring, the permanent magnet rotor is a flaky circular ring, the blades are streamline, and the streamline blades are uniformly distributed along the circumferential direction and expand from the center to the outside.
In an embodiment of the present invention, the eddy current sensor assembly includes a signal conditioning circuit board, a coil backing and eddy current coils, a lower surface of the coil backing is connected to an upper surface of the signal conditioning circuit board, an end surface of the eddy current coil is attached to a side surface of the coil backing, a combination of the eddy current coil and the coil backing surrounds a central axis of the base, and the eddy current coils are uniformly installed facing a radial outer side of the signal conditioning circuit board.
In an embodiment of the present invention, the rotating winding assembly includes a rotating yoke and a rotating winding, and the rotating yoke is provided with the rotating winding uniformly distributed in an inner circumferential direction.
In an embodiment of the present invention, the suspension winding assembly includes a suspension yoke and suspension windings, and the suspension windings are uniformly distributed in an outer circumferential direction of the suspension yoke.
The technical scheme has the following beneficial effects:
compared with the prior art, the invention has smaller axial size and radial size because the suspension winding and the sensor are arranged at the center of the permanent magnet rotor and the rotating winding is arranged at the outer side of the permanent magnet rotor. Under the same size condition, the flow pulsation is smaller when the flow is low at a low rotating speed. Furthermore, the rotating winding is arranged on the outer side of the permanent magnet rotor, and the motor can stably work at a higher rotating speed by directly exchanging heat with the heat dissipation cover, so that the stable rotating speed range of the rotor can be widened, and the flow range capable of being accurately and stably controlled is larger.
Drawings
Fig. 1 is a schematic structural diagram of an internal support type magnetic suspension pump according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a motor 1 according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a base 1A according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a heat dissipation cover 1B according to an embodiment of the invention;
FIG. 5 is a schematic structural diagram of an eddy current sensor assembly 1E in accordance with an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a levitation winding assembly 1D according to an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a rotating winding assembly 1C according to an embodiment of the present invention;
fig. 8 is a schematic structural view of an impeller rotor 2 according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of the sealing case 3 according to an embodiment of the present invention.
Detailed Description
The invention will now be further described with reference to the following examples and figures 1 to 9.
The utility model provides an interior support formula magnetic suspension pump, as shown in figure 1, includes motor 1, impeller rotor 2 and seal shell 3, impeller rotor 2 seals in seal shell 3, the central axis coincidence of cavity in impeller rotor 2's the rotatory central axis and the seal shell 3, seal shell 3 installs in motor 1 top, the central axis of motor 1 and the central axis coincidence of cavity in the seal cavity subassembly 3. Liquid is sucked into the hollow cavity from the liquid inlet 111 above the central axis of the seal shell 3, the impeller rotor 2 in a high-speed suspension rotation state accelerates the liquid to generate centrifugal force, the centrifugal force is thrown to the inner surface of the seal cavity assembly 3 to form pressure, and the pressure flows out 222 from the liquid outlet communicated with the hollow cavity.
As shown in fig. 2, the motor 1 includes a base 1A, a heat dissipation cover 1B, a rotating winding assembly 1C, a suspension winding assembly 1D, an eddy current sensor assembly 1E, and a sealing cover 1F. As shown in fig. 3, the base 1A is provided with a first upper surface 1A1, a second upper surface 1A2, and a third upper surface 1A3 from bottom to top, respectively. The second upper surface 1A2 is composed of discontinuous outer annular surface 1A2a and central surface 1A2 b; the second upper surface 1a2 is a winding assembly mounting surface for mounting a floating winding assembly and a rotating winding assembly. The third upper surface 1A3 is composed of a discontinuous central plane 1A3a and an outer plane 1A3 b.
The first upper surface 1A1 of the base 1A is connected with the lower surface of the heat dissipation cover 1B, and the central axes are coincident, that is, the two are coaxially mounted; the lower surface of the eddy current sensor assembly 1E coincides with the second upper surface 1A2 of the base 1A, and the central axis coincides; the rotating winding assembly 1C coincides with the outer plane 1A3b of the third upper surface 1A3 of the base 1A, with the central axis coinciding; the suspension winding assembly 1D coincides with the central plane 1A3a of the third upper surface 1A3 of the base 1A, and the central axis coincides; the rotating winding and the suspension winding are located at the same horizontal position.
The central line axis of the sealing cover 1F is superposed with the central axis of the base 1A; the lower surface of the outer side of the sealing cover 1F is superposed with the upper surface of a magnetic yoke of the rotating winding assembly 1C; the outer edge surface of the sealing cover 1F is superposed with the inner surface of the heat dissipation cover 1B; the seal cover 1F is provided with a rotor groove between an inscribed circle of the rotating winding assembly 1C and an circumscribed circle of the floating winding assembly 1D.
The heat dissipation cover 1B is a hollow column as shown in fig. 4, the outer surface 1B1 of the heat dissipation cover 1B is provided with a large number of heat dissipation ribs, the heat dissipation ribs are of a tooth groove structure, and the tooth groove structure is uniformly distributed along the circumferential direction of the heat dissipation cover. The inner surface of the heat dissipation cover 1B is a smooth cylindrical surface 1B2, and a liquid cooling flow channel can be further arranged on the outer side of the heat dissipation cover 1B to increase the heat dissipation effect, so that the rotating winding assembly 1C can still stably work under the conditions of high rotating speed and large flow.
The eddy current sensor assembly 1E, as shown in fig. 5, includes a signal conditioning circuit board 1E1, a coil backing 1E2, and an eddy current coil 1E 3; the lower surface of the coil backing 1E2 is connected with the upper surface of the signal conditioning circuit board 1E 1; the coil backing 1E2 is provided with positioning columns on the side surface; the center of the eddy current coil 1E3 is provided with a mounting hole, the mounting hole is coaxially mounted with a positioning column on the side surface of the coil backing 1E2, and the end surface of the mounting hole is attached to the side surface of the coil backing 1E 2; the assembly of eddy current coil 1E3 and coil backing 1E2 surrounds a central axis with the coils mounted evenly facing radially outward.
The suspension winding assembly 1D, as shown in fig. 6, includes a suspension yoke 1D1 and a suspension winding 1D2, wherein the suspension yoke 1D1 is formed by laminating thin silicon steel sheets, four grooves are uniformly distributed in the outer circumferential direction, and the same number of suspension windings 1D2 are arranged in the grooves. The suspension winding 1D2 is located on the signal conditioning circuit board 1E1, and the suspension yoke 1D1 is mounted on the central surface 1A3a of the third upper surface 1 A3.
The rotating winding assembly 1C, as shown in fig. 7, includes a rotating yoke 1C1 and a rotating winding 2C2, the rotating yoke 1C1 is formed by laminating thin silicon steel sheets, a plurality of grooves are uniformly distributed in the inner circumferential direction, and the same number of rotating windings 1C2 are arranged in the grooves. The outer side lower surface of the seal cover is closely attached to the upper surface of the rotating yoke 1C1, and is used for sealing the rotating coil assembly 1C.
The impeller rotor 2, as shown in fig. 8, includes a permanent magnet rotor 2A and an impeller 2B. The permanent magnet rotor 2A is a flaky circular ring; the impeller 2B comprises at least a skeleton 2B1, a blade 2B2 and an end cap 2B 3; the framework 2B1 is a hollow cylindrical ring, a hollow ring with the same shape as the permanent magnet rotor 2A is arranged in the ring wall, and the permanent magnet rotor 2A is arranged in the hollow ring in the ring wall; a plurality of streamline blades 2B2 are arranged above the framework 2B1 and expand from the center to the outside; the streamline blades 2B2 are uniformly distributed along the circumferential direction; an end cover 2B3 is arranged above the blade 2B 2; the center of the end cover 2B3 is provided with a small through-flow hole.
The seal housing 3, as shown in fig. 9, includes a scroll housing 3A and a pump cover 3B. The inner side of the volute 3A protrudes downwards to form a hollow cavity, and a through hole flow channel is arranged along the tangential direction of the inner wall; the pump cover 3B is arranged above the volute 3A, and the central axis of the pump cover 3B is superposed with the central axis of the volute 3A; the edge of the pump cover 3B is provided with a step which can be buckled above the volute 3A. During assembly, the volute of the sealing shell 3 is placed in a rotor groove of the motor, and then the periphery of the volute is locked and fixed through screws. The center of the pump cover 3B is provided with a liquid inlet 111, the liquid inlet 111 is communicated with the hollow cavity, a through hole flow channel is arranged along the tangential direction of the inner wall of the volute, and liquid can flow from the liquid inlet 111 to the liquid outlet 222 through the through hole flow channel.
The working process of the invention is as follows: the eddy current sensor assembly 1E detects the position of the impeller rotor 2, obtains the offset of the impeller rotor 2 through differential amplification calculation, and controls the current and direction of each suspension winding in the suspension winding assembly 1D according to the offset of the impeller rotor 2 so that the impeller rotor 2 is suspended relative to the motor 1; the impeller rotor 2 is driven by the rotating winding assembly 1C to rotate at a high speed; liquid is sucked into the sealing cavity from an inlet flow channel above the central axis of the sealing shell 3, the impeller rotor 2 in a high-speed suspension rotating state accelerates the liquid to generate centrifugal force, the centrifugal force is thrown to the inner surface of the sealing shell 3 to form pressure, and the pressure flows out from a liquid outlet penetrating through the inner surface of the hollow cavity; the steadily rotating impeller rotor 2 will generate a continuously steady pressure, thereby achieving a low pulsation delivery of the liquid.
The invention can reduce the size of the pump in the radial and axial directions at the same time, and can make the pulsation smaller when rotating at low speed, the magnetic field coupling is small and the structure is simpler under the condition of maintaining the same size; on the other hand, the rotary winding is arranged on the outer side of the motor and is in direct contact with the heat dissipation cover, so that the heat dissipation condition of the rotary winding under the condition of high rotating speed and large flow can be effectively improved, and the rotary winding can still stably work under the working condition of high rotating speed and large flow.
The suspension winding assembly and the eddy current sensor are arranged in the impeller rotor, so that more tooth grooves can be arranged on the outer edge with longer circumference to enable the rotor to still smoothly transit when rotating at low speed, the pump can still work at low pulsation under the condition of low speed and low flow, and the flow range of low pulsation pressure is expanded. In addition, the heat dissipation cover is arranged on the outer side of the rotary winding and is directly contacted with the rotary winding for heat conduction, so that the heat dissipation condition of the rotary winding under the conditions of high rotating speed and large flow is effectively improved, and the rotary winding can still stably work under the working conditions of high rotating speed and large flow.
The above-described embodiments are intended to illustrate rather than to limit the invention, and any changes and alterations made without inventive step within the spirit and scope of the claims are intended to fall within the scope of the invention.
Claims (10)
1. An internally supported magnetic levitation pump, comprising:
the sealing shell comprises a hollow cavity;
the impeller rotor is arranged in the hollow cavity, and the rotating central shaft of the impeller rotor is superposed with the central axis of the hollow cavity; and
the sealing shell is arranged above the motor, and the central axis of the motor is also superposed with the central axis of the hollow cavity; the motor comprises a base, a rotating winding assembly, a suspension winding assembly and an eddy current sensor assembly, wherein the rotating winding assembly, the suspension winding assembly and the eddy current sensor assembly are all arranged on the base, and the central axes of the rotating winding assembly, the suspension winding assembly and the eddy current sensor assembly are all coincided with the central axis of the base; the impeller rotor is positioned between the rotating winding assembly and the suspension winding assembly, and the suspension winding assembly is positioned inside the impeller rotor; the eddy current sensor assembly is used for detecting the position of the impeller rotor.
2. The internal support type magnetic levitation pump as recited in claim 1, wherein the base is provided with a winding assembly mounting surface, the winding assembly mounting surface is composed of a discontinuous central plane and an outer plane, the rotating winding assembly is located on the outer plane, and the rotating winding assembly is coincident with the central axis of the outer plane; the suspension winding assembly is located on the central plane, and the suspension winding assembly is overlapped with the central axis of the central plane.
3. The internal support type magnetic levitation pump of claim 2, wherein the motor further comprises a heat dissipation cover, wherein a lower surface of the heat dissipation cover is connected with the base, and the heat dissipation cover is located at the periphery of the rotating winding assembly.
4. The internal support type magnetic suspension pump according to claim 1, wherein the seal shell comprises a volute and a pump cover, the pump cover is mounted above the volute, the central axis of the pump cover coincides with the central axis of the volute, the inner side of the volute protrudes downwards to form a hollow cavity, a through-hole flow passage is arranged on the volute, and the through-hole flow passage is communicated with the hollow cavity.
5. The internal support type magnetic levitation pump as recited in claim 1, wherein the motor further comprises a sealing cap, a central axis of the sealing cap coincides with a central axis of the base, an outer lower surface of the sealing cap is in close contact with an upper surface of the rotating winding assembly, and the sealing cap is provided with a rotor groove between an inscribed circle of the rotating winding assembly and a circumscribed circle of the levitation winding assembly.
6. The internal support type magnetic suspension pump as claimed in claim 1, wherein the impeller rotor comprises a permanent magnet rotor and an impeller rotor, the permanent magnet rotor is sleeved inside the impeller rotor, and the shape of the impeller rotor is matched with that of the hollow cavity.
7. The internal support type magnetic suspension pump as claimed in claim 6, wherein the impeller rotor at least comprises a framework, blades and an end cover, the framework, the blades and the end cover are fixedly connected, the blades are arranged above the framework, the end cover is arranged above the blades, and an overflow small hole is formed in the center of the end cover; the permanent magnet motor is characterized in that a hollow ring which is consistent with the shape of the permanent magnet rotor is arranged in the framework, and the permanent magnet rotor is arranged in the hollow ring.
8. The internally supported magnetic suspension pump of claim 7, wherein the eddy current sensor assembly comprises a signal conditioning circuit board, a coil backing and eddy current coils, wherein the lower surface of the coil backing is connected with the upper surface of the signal conditioning circuit board, the end surfaces of the eddy current coils are attached to the side surfaces of the coil backing, the assembly of the eddy current coils and the coil backing surrounds the central axis of the base, and the eddy current coils are uniformly installed towards the radial outer side of the signal conditioning circuit board.
9. The internal support type magnetic levitation pump as recited in any one of claims 1 to 8, wherein the rotating winding assembly comprises a rotating yoke and a rotating winding, and the rotating yoke is provided with the rotating winding uniformly distributed in an inner circumferential direction.
10. The internal support type magnetic levitation pump as recited in claim 9, wherein the levitation winding assembly comprises a levitation yoke and levitation windings, and the levitation yoke is provided with the uniform distribution of the levitation windings in the outer circumferential direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110271863.2A CN112833027B (en) | 2021-03-12 | 2021-03-12 | Internal support type magnetic suspension pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110271863.2A CN112833027B (en) | 2021-03-12 | 2021-03-12 | Internal support type magnetic suspension pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112833027A true CN112833027A (en) | 2021-05-25 |
| CN112833027B CN112833027B (en) | 2022-12-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110271863.2A Active CN112833027B (en) | 2021-03-12 | 2021-03-12 | Internal support type magnetic suspension pump |
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| Country | Link |
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| CN (1) | CN112833027B (en) |
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| US20070224059A1 (en) * | 2006-03-23 | 2007-09-27 | Cheng-Tien Lai | Miniature pump for liquid cooling system |
| CN101513546A (en) * | 2009-03-26 | 2009-08-26 | 浙江大学 | Hydrodynamic suspension bearing for artificial heart |
| CN101682229A (en) * | 2008-01-29 | 2010-03-24 | 株式会社易威奇 | Magnetic levitaion motor and pump |
| CN106377810A (en) * | 2016-10-11 | 2017-02-08 | 内蒙古工业大学 | Centrifugal left ventricle assisting device |
| CN107261231A (en) * | 2017-07-25 | 2017-10-20 | 中国医学科学院阜外医院 | A kind of Axial feedback controls magnetic levitation axial flow blood pump |
| CN207098863U (en) * | 2016-10-14 | 2018-03-13 | Ifp新能源公司 | Enclosed rotary motor and synchronous magnetic resistance motor |
| CN107837430A (en) * | 2017-12-14 | 2018-03-27 | 山东科技大学 | A kind of magnetic suspension shaft streaming self power generation artificial heart pump |
| CN111852883A (en) * | 2019-04-29 | 2020-10-30 | 苏州苏磁智能科技有限公司 | High-efficiency magnetic coupling suspension pump |
| CN112303121A (en) * | 2020-10-27 | 2021-02-02 | 浙江大学 | Magnetic suspension pump with three-degree-of-freedom magnetic bearing |
-
2021
- 2021-03-12 CN CN202110271863.2A patent/CN112833027B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070224059A1 (en) * | 2006-03-23 | 2007-09-27 | Cheng-Tien Lai | Miniature pump for liquid cooling system |
| CN101682229A (en) * | 2008-01-29 | 2010-03-24 | 株式会社易威奇 | Magnetic levitaion motor and pump |
| CN101513546A (en) * | 2009-03-26 | 2009-08-26 | 浙江大学 | Hydrodynamic suspension bearing for artificial heart |
| CN106377810A (en) * | 2016-10-11 | 2017-02-08 | 内蒙古工业大学 | Centrifugal left ventricle assisting device |
| CN207098863U (en) * | 2016-10-14 | 2018-03-13 | Ifp新能源公司 | Enclosed rotary motor and synchronous magnetic resistance motor |
| CN107261231A (en) * | 2017-07-25 | 2017-10-20 | 中国医学科学院阜外医院 | A kind of Axial feedback controls magnetic levitation axial flow blood pump |
| CN107837430A (en) * | 2017-12-14 | 2018-03-27 | 山东科技大学 | A kind of magnetic suspension shaft streaming self power generation artificial heart pump |
| CN111852883A (en) * | 2019-04-29 | 2020-10-30 | 苏州苏磁智能科技有限公司 | High-efficiency magnetic coupling suspension pump |
| CN112303121A (en) * | 2020-10-27 | 2021-02-02 | 浙江大学 | Magnetic suspension pump with three-degree-of-freedom magnetic bearing |
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| Publication number | Publication date |
|---|---|
| CN112833027B (en) | 2022-12-06 |
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