CN112817067B - Nano composite resonant cavity periodic array super-surface multi-channel infrared filter - Google Patents
Nano composite resonant cavity periodic array super-surface multi-channel infrared filter Download PDFInfo
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- 230000000737 periodic effect Effects 0.000 title claims abstract description 42
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- 230000005540 biological transmission Effects 0.000 claims abstract description 106
- 239000002086 nanomaterial Substances 0.000 claims abstract description 30
- 239000002131 composite material Substances 0.000 claims abstract description 23
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000010931 gold Substances 0.000 claims abstract description 19
- 229910052737 gold Inorganic materials 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 18
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- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 11
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 11
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 11
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 10
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- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
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- 230000008878 coupling Effects 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 3
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- 238000010586 diagram Methods 0.000 description 16
- 230000000694 effects Effects 0.000 description 16
- 238000000411 transmission spectrum Methods 0.000 description 15
- 230000010287 polarization Effects 0.000 description 10
- 230000009471 action Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000001914 filtration Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
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- 230000009022 nonlinear effect Effects 0.000 description 2
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The invention relates to a nano composite resonant cavity periodic array super-surface multi-channel infrared filter, which comprises: is arranged on SiO2A gold film with a nanostructure on a substrate, the gold film with the nanostructure being a super-surface; the nano-structure on the super-surface is a composite resonant cavity of a periodic array, the composite resonant cavity comprises a horizontal resonant cavity and two vertical resonant cavities perpendicular to the horizontal resonant cavity, the two vertical resonant cavities are arranged on two sides of the horizontal resonant cavity, and the two vertical resonant cavities are communicated with the cavity of the horizontal resonant cavity; the widths of the horizontal resonant cavity and the vertical resonant cavity are in the sub-wavelength order; the super-surface has three transmission enhancement peaks, a first transmission enhancement peak being generated by a horizontal resonant cavity, a second transmission enhancement peak and a third transmission enhancement peak being generated by two vertical resonant cavities, respectively. The filter is formed on the basis of the super surface with the nano structure, selectively transmits light waves with specific frequency on the nano level, and breaks through the limitation of the optical diffraction limit.
Description
Technical Field
The invention relates to the technical field of electronics, in particular to a nano composite resonant cavity periodic array super-surface multi-channel infrared filter.
Background
The super-surface of the plasma of the single metal nano resonant cavity has extraordinary optical characteristics such as super-transmission, strong nonlinear effect, negative refractive index and the like, is an active research field in the past decades, and has application prospects in the aspects of biosensing, visible light filters, nonlinear effect generators and the like. But the plasma super-surface of the single metal nano resonant cavity is difficult to realize the function of multi-channel infrared filtering.
Furthermore, the function of the all-dielectric resonant cavity in the prior art on a small size has limitation, so that it is difficult to extrude light to a deep sub-wavelength scale.
Therefore, it is necessary to provide a nano-composite resonant cavity periodic array super-surface multichannel infrared filter to solve the problems in the prior art that the plasma super-surface of a single metal nano resonant cavity is difficult to realize the function of multichannel infrared filtering and the full-dielectric resonant cavity is difficult to extrude light to the deep sub-wavelength scale.
Disclosure of Invention
The invention aims to provide a nano-composite resonant cavity periodic array super-surface multichannel infrared filter, which solves the problems that in the prior art, the function of multichannel infrared filtering is difficult to realize by a single metal nano resonant cavity plasma super-surface and light is difficult to extrude to a deep sub-wavelength scale by an all-dielectric resonant cavity.
In order to solve the problems in the prior art, the invention provides a nano-composite resonant cavity periodic array super-surface multi-channel infrared filter, which comprises:
the nano-structured gold film is arranged on the SiO2 substrate and is a super surface;
the nano-structure on the super-surface is a composite resonant cavity of a periodic array, the composite resonant cavity comprises a horizontal resonant cavity and two vertical resonant cavities perpendicular to the horizontal resonant cavity, the two vertical resonant cavities are arranged at two sides of the horizontal resonant cavity, and the two vertical resonant cavities are communicated with the cavity of the horizontal resonant cavity; the widths of the horizontal resonant cavity and the vertical resonant cavity are in a sub-wavelength order;
the super-surface has three transmission enhancement peaks, a first transmission enhancement peak is generated by a horizontal resonant cavity, a second transmission enhancement peak and a third transmission enhancement peak are respectively generated by two vertical resonant cavities, the horizontal resonant cavity generates a bright mode, the vertical resonant cavity generates a dark mode, and the second transmission enhancement peak and the third transmission enhancement peak are formed under the excitation of the first transmission enhancement peak.
Optionally, in the super-surface multichannel infrared filter of the periodic array of nano-composite resonant cavities, the depth of the composite resonant cavity is equal to the thickness of the super-surface, and the depth is of a sub-wavelength order.
Optionally, in the nanocomposite resonant cavity periodic array super-surface multi-channel infrared filter,
the thickness of the super-surface is adjusted to enhance or attenuate plasmon wave resonance in the horizontal resonant cavity, resulting in a change in the first transmission enhancement peak amplitude and wavelength.
Optionally, in the nanocomposite resonant cavity periodic array super-surface multi-channel infrared filter,
the positions of the two vertical resonant cavities from the ends of the horizontal resonant cavity are adjusted to affect the coupling between the plasmon wave resonances in the two vertical resonant cavities of the super-surface to vary the resonant wavelengths of the second and third transmission enhancement peaks to control the spectral positions and spacings of the second and third transmission enhancement peaks.
Optionally, in the nanocomposite resonant cavity periodic array super-surface multi-channel infrared filter,
the lengths of the two vertical resonant cavities are adjusted respectively to adjust the wavelengths of the second transmission enhancement peak and the third transmission enhancement peak respectively.
Optionally, in the nano-composite resonant cavity periodic array super-surface multichannel infrared filter, a plurality of rectangular periods with the same length and width are uniformly arranged on the super-surface;
a composite resonant cavity structure is arranged on a rectangular period.
Optionally, in the nanocomposite resonant cavity periodic array super-surface multi-channel infrared filter,
adjusting the length of a side of the rectangular period parallel to the width of the vertical resonant cavity, the wavelengths of the second and third transmission enhancement peaks varying;
the wavelength of the first transmission enhancement peak is varied by adjusting the length of the side of the rectangular period parallel to the width of the horizontal resonant cavity.
Optionally, in the nanocomposite resonant cavity periodic array super-surface multi-channel infrared filter,
the ambient refractive index is adjusted to adjust the wavelengths of the first, second, and third transmission enhancement peaks.
The invention also provides a method for manufacturing the nano composite resonant cavity periodic array super-surface multichannel infrared filter, which comprises the following steps of:
simulating the size of a preset nano structure, wherein the nano structure is a composite resonant cavity of a periodic array;
depositing a gold film on a SiO2 substrate;
preparing a nano-composite resonant cavity periodic array super-surface on a gold film according to a simulation preset size to form a super-surface multi-channel infrared filter; the composite resonant cavity comprises a horizontal resonant cavity and two vertical resonant cavities perpendicular to the horizontal resonant cavity, the two vertical resonant cavities are arranged on two sides of the horizontal resonant cavity, and the two vertical resonant cavities are communicated with the cavity of the horizontal resonant cavity; the widths of the horizontal resonant cavity and the vertical resonant cavity are in a sub-wavelength order;
and detecting the super-surface multi-channel infrared filter.
Optionally, in the method for manufacturing the nano-composite resonant cavity periodic array super-surface multi-channel infrared filter,
the width of the rectangular period is 1100nm, and the length is 1200 nm;
the widths of the horizontal resonant cavity and the vertical resonant cavity are 100 nm;
the length of the horizontal resonant cavity is 800 nm;
the lengths of the two vertical resonant cavities are respectively 200nm and 300 nm;
the thickness of the gold film is 225 nm;
the refractive index of SiO2 is 1.45;
the ambient refractive index is 1.
Compared with the prior art, the invention has the following advantages:
(1) the super surface with the nano structure is used as a novel material, and parameters such as the amplitude, the phase, the polarization and the like of optical waves can be adjusted and controlled on the sub-wavelength level;
(2) the filter is formed on the basis of the super surface with the nano structure, selectively transmits light waves with specific frequency on the nano level, and breaks through the limitation of the optical diffraction limit.
Drawings
FIG. 1 is a schematic structural diagram of a nanostructured super-surface provided by an embodiment of the present invention;
FIG. 2a is a schematic diagram of a transmission spectrum under the effect of incident light with a specific polarization direction according to an embodiment of the present invention;
FIGS. 2b-2d are schematic diagrams of plasmon resonance under the action of incident light with a specific polarization direction according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the effect of thickness variation of a gold film on the transmission characteristics of a super-surface with nanostructures according to an embodiment of the present invention;
FIGS. 4a-4b are schematic diagrams illustrating the effect of two vertical resonant cavity position changes on the transmission characteristics of a nanostructured super-surface according to an embodiment of the present invention;
FIGS. 5a-5b are schematic diagrams illustrating the effect of two vertical resonant cavity length variations on the transmission characteristics of a nanostructured super-surface according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of the effect of rectangular period variation on the transmission characteristics of a super-surface with nanostructures according to an embodiment of the present invention;
FIG. 7 is a schematic illustration of the effect of ambient refractive index changes on the transmission properties of a nanostructured super-surface provided by an embodiment of the present invention;
FIG. 8 is a super-surface transmission spectrum of a periodic array of nano-composite resonant cavities according to an embodiment of the present invention.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
In the description that follows, it will be understood that when a layer (or film), region, pattern, or structure is referred to as being "on" a substrate, layer (or film), region, and/or pattern, it can be directly on another layer or substrate, and/or one or more intervening layers may also be present. In addition, it will be understood that when a layer is referred to as being "under" another layer, it can be directly under the other layer, and/or one or more intervening layers may also be present. In addition, references to "on" and "under" layers may be made based on the drawings.
Also, in the following, the terms "first", "second", and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances. Similarly, if a method described herein includes a series of steps, the order in which the steps are presented herein is not necessarily the only order in which the steps may be performed, and some of the described steps may be omitted and/or some other steps not described herein may be added to the method.
The function of multi-channel infrared filtering is difficult to realize by the plasma super surface of the single metal nano resonant cavity in the prior art; furthermore, the full-dielectric resonator has a limitation in its small size, and thus it is difficult to push light to the deep sub-wavelength scale.
Therefore, there is a need to provide a nano-composite resonant cavity periodic array super-surface multichannel infrared filter, as shown in fig. 1, fig. 1 is a schematic structural diagram of a super-surface with a nano-structure provided in an embodiment of the present invention, where the super-surface multichannel infrared filter includes:
the nano-structured gold film is arranged on the SiO2 substrate and is a super surface;
the nano-structure on the super-surface is a composite resonant cavity of a periodic array, the composite resonant cavity comprises a horizontal resonant cavity and two vertical resonant cavities perpendicular to the horizontal resonant cavity, the two vertical resonant cavities are arranged at two sides of the horizontal resonant cavity, and the two vertical resonant cavities are communicated with the cavity of the horizontal resonant cavity; the widths of the horizontal resonant cavity and the vertical resonant cavity are in a sub-wavelength order;
the super-surface has three transmission enhancement peaks, a first transmission enhancement peak is generated by a horizontal resonant cavity, a second transmission enhancement peak and a third transmission enhancement peak are respectively generated by two vertical resonant cavities, the horizontal resonant cavity generates a bright mode, the vertical resonant cavity generates a dark mode, and the second transmission enhancement peak and the third transmission enhancement peak are formed under the excitation of the first transmission enhancement peak.
The invention adopts the super surface with the nano structure as a new material, and can adjust and control parameters such as the amplitude, the phase, the polarization and the like of optical waves on the sub-wavelength level; the filter is formed on the basis of the super surface with the nano structure, selectively transmits light waves with specific frequency on the nano level, and breaks through the limitation of the optical diffraction limit.
Furthermore, a plurality of rectangular periods with the same length and width are required to be uniformly arranged on the super surface; a composite resonant cavity structure is arranged on a rectangular period. And the depth of the composite resonant cavity is equal to the thickness of the super surface, and the depth is in the order of sub-wavelength.
As shown in fig. 2a-2d, fig. 2a is a schematic diagram of a transmission spectrum under the effect of incident light with a specific polarization direction according to an embodiment of the present invention; fig. 2b-2d are schematic diagrams of plasmon resonance under the action of incident light with a specific polarization direction according to an embodiment of the present invention. The light mode and the dark mode are generated by a horizontal resonant cavity and a vertical resonant cavity respectively. Further, in one embodiment, the transmission spectra of the super-surfaces of the horizontal resonant cavity, the super-surfaces of the two vertical resonant cavities, and the super-surface structure of the composite resonant cavity can be separately calculated using finite difference time domain algorithm. Specifically, for the super-surface structure of the single horizontal resonant cavity, the transmission spectrum under the action of incident light in the Y polarization direction in fig. 1 is shown by dotted lines in fig. 2a, and the transmission spectrum has a transmission enhancement peak at a wavelength of 1132nm, and the transmittance is 82%; the electric field energy distribution and plasmon resonance at the position of the transmission enhancement peak are shown in fig. 2b, and surface plasmon resonance occurs in the horizontal resonant cavity, resulting in enhanced transmission, so that the horizontal resonant cavity produces a bright mode. For the super-surface structure of two vertical resonant cavities, the transmission spectrum under the action of incident light in the X polarization direction in FIG. 1 is shown by the dotted line in FIG. 2a, the transmission spectrum has a transmission enhancement peak at 1280nm wavelength, the transmittance is 89%, and at 1205nm wavelength, the transmission enhancement peak has a transmission enhancement peak, the transmittance is 23%; the electric field energy distribution and the plasmon resonance at the transmission enhancement peak positions of the two vertical resonant cavities are as shown in fig. 2c, and the incident light generates surface plasmon resonance in the two vertical resonant cavities respectively, so as to form two plasmon transmission enhancement windows; since these two resonance modes cannot be directly excited by incident light polarized in the Y direction in fig. 1, a dark mode is generated. For the super-surface structure of the composite resonant cavity, the transmission spectrum under the action of incident light in the Y polarization direction is shown as the solid line in FIG. 2a, the transmission spectrum realizes multi-window transmission enhancement at 1126nm, 1255n and 1350nm respectively, and the transmittance reaches 80%, 36% and 43% respectively; at the first transmission enhancement peak, as shown in fig. 2d, the electric field enhancement in the horizontal resonant cavity is directly caused by the bright mode, and at the second transmission enhancement peak and the third transmission enhancement peak, the dark mode is excited by the bright mode to cause the electric field enhancement in the L-shaped structure composed of the vertical resonant cavity and the horizontal resonant cavity, so that the multi-transmission enhancement peak phenomenon is realized by the super-surface of the periodic array of the nano-composite resonant cavities, thereby forming the super-surface multi-channel infrared wave filter.
As shown in fig. 3, fig. 3 is a schematic diagram illustrating an effect of a thickness variation of a gold film on a transmission characteristic of a super-surface with a nanostructure according to an embodiment of the present invention, and the present invention may analyze an effect of a thickness of the super-surface on a transmission spectrum of a multi-channel infrared filter of the super-surface by using finite time domain differential logical software. In fig. 3, the thickness of the super-surface is increased from 200nm to 400nm, i.e. the depth of the composite resonant cavity is changed, the half-wave width of the first transmission enhancement peak is broadened, the first transmission enhancement peak exhibits a significant red-shift and higher transmission, the second transmission enhancement peak and the third transmission enhancement peak are only slightly blue-shifted, and the first transmission enhancement peak and the second transmission enhancement peak overlap when the thickness of the super-surface exceeds 350 nm. It is understood that the change of the electric field energy in the horizontal resonant cavity can be directly adjusted by adjusting the thickness of the super-surface, thereby leading to the resonance enhancement or attenuation of the plasma wave in the horizontal resonant cavity and causing the change of the amplitude and the wavelength of the first transmission enhancement peak. The second and third transmission enhancement peaks result from coupling between dark and light modes, the plasmon wave resonance of which is hardly affected by the thickness of the super-surface.
4a-4b, FIGS. 4a-4b are schematic diagrams illustrating the effect of the variation of the positions of two vertical resonant cavities on the transmission characteristics of the super-surface with nano-structure according to the embodiment of the present invention, which is to adjust the positions of the two vertical resonant cavities away from the end of the horizontal resonant cavity, so as to affect the coupling between the plasmon resonances in the two vertical resonant cavities of the super-surface, so as to vary the resonant wavelengths of the second transmission enhancement peak and the third transmission enhancement peak, thereby controlling the spectral positions and intervals of the second transmission enhancement peak and the third transmission enhancement peak. In one embodiment, referring to FIGS. 1 and 4a-4b, the distance parameter S of a vertical resonant cavity can be analyzed using FDTD software1And S2Influence on the transmission spectrum of the super-surface multi-channel infrared filter. With S1And S2With increasing distance between the two vertical resonant cavities, the first transmission enhancement peak remains almost constant while the second and third transmission enhancement peaks are both shifted. Due to S1And S2Coupling between the plasmon wave resonances in the two vertical resonant cavities is effected resulting in a change in the plasmon wavelength of the second and third transmission enhancement peaks. Thus, adjusting the distance between the vertical resonant cavities can control the spectral position and spacing of the second and third transmission enhancement peaks.
5a-5b, FIGS. 5a-5b are schematic diagrams illustrating the effect of two vertical resonant cavity length variations on the transmission characteristics of a nanostructured super-surface according to an embodiment of the present invention; the invention respectively adjusts the wavelength of the second transmission enhancement peak and the third transmission enhancement peak by respectively adjusting the length of the two vertical resonant cavities. In one embodiment, referring to FIGS. 1 and 5a-5b, FDTD software can be used to analyze the effect of the lengths of two vertical resonant cavities on the transmission spectrum of the ultra-surface multi-channel infrared filter. Length L of single vertical resonant cavity2Increasing from 0 to 400nm, the second transmission enhancement peak is red-shifted and the first and third transmission enhancement peaks remain almost unchanged as shown in fig. 5 a. Similarly, the vertical resonant cavity length L3An increase in (b) results in only a red-shift of the third transmission enhancement peak. The length change of a single vertical resonant cavity only affectsThe transmission mode of the surface plasmon wave is affected and has no influence on other transmission enhancement peaks of the super-surface.
FIG. 6 is a schematic diagram illustrating the effect of the variation of the rectangular period on the transmission characteristics of the super-surface with nanostructures according to an embodiment of the present invention, wherein the wavelength of the second transmission enhancement peak and the third transmission enhancement peak is varied by adjusting the length of the side of the rectangular period parallel to the width of the vertical resonant cavity; the wavelength of the first transmission enhancement peak is varied by adjusting the length of the side of the rectangular period parallel to the width of the horizontal resonant cavity. In one embodiment, referring to fig. 1 and 6, the effect of the rectangular period on the transmission spectrum of the super-surface multi-channel infrared filter is analyzed using FDTD software. The first transmission enhancement peak undergoes a slight blue shift while the second and third transmission enhancement peaks undergo a red shift as the Px side of the rectangular period increases from 1100nm to 1300nm, and the first transmission enhancement peak undergoes a significant red shift while the second and third transmission enhancement peaks hardly change as the Py side of the rectangular period increases from 1000nm to 1250 nm. It will be understood that the interaction of the second and third transmission enhancement peaks is influenced primarily by the X-direction rectangular period Px side, while the interaction of the first transmission enhancement peak is influenced primarily by the Y-direction rectangular period Py side. The different transmission enhancement peaks are modulated by the sides of the rectangular period in different directions, respectively.
As shown in fig. 7, fig. 7 is a schematic diagram illustrating an effect of a change in an ambient refractive index on a transmission characteristic of a super-surface having a nanostructure according to an embodiment of the present invention, in which the wavelengths of a first transmission enhancement peak, a second transmission enhancement peak, and a third transmission enhancement peak are adjusted by adjusting the ambient refractive index. In one embodiment, the effect of ambient refractive index on the transmission spectrum of the ultra-surface multi-channel infrared filter is analyzed using FDTD software. As shown in the left graph of fig. 7, the first, second, and third transmission enhancement peaks are red-shifted as the ambient refractive index increases; as shown in the right diagram of fig. 7, the present embodiment also provides a calculation method of the ambient refractive index sensitivity S, which is δ λ/δ n, specifically 1143nm/RIU, 1245nm/RIU, and 1360 nm/RIU. It can be readily seen that the spectral position of the transmission enhancement peak is sensitive to changes in the ambient refractive index.
The invention also provides a method for manufacturing the nano composite resonant cavity periodic array super-surface multichannel infrared filter, which comprises the following steps of:
simulating the size of a preset nano structure, wherein the nano structure is a composite resonant cavity of a periodic array, and the preset size comprises the length and width of a rectangular period, the length, width, depth and the like of a horizontal resonant cavity and two vertical resonant cavities;
depositing a gold film on a SiO2 substrate;
preparing a nano-composite resonant cavity periodic array super-surface on a gold film according to a simulation preset size to form a super-surface multi-channel infrared filter; the composite resonant cavity comprises a horizontal resonant cavity and two vertical resonant cavities perpendicular to the horizontal resonant cavity, the two vertical resonant cavities are arranged on two sides of the horizontal resonant cavity, and the two vertical resonant cavities are communicated with the cavity of the horizontal resonant cavity; the widths of the horizontal resonant cavity and the vertical resonant cavity are in a sub-wavelength order;
and detecting the super-surface multi-channel infrared filter.
In one embodiment, electron beam evaporation techniques may be used on SiO2Depositing a gold film on the substrate; preparing a nano composite resonant cavity periodic array super surface on the gold film by using an electron beam exposure technology and an ion beam etching technology, wherein each processing region has any rectangular period; and a Fourier infrared spectrometer is adopted to detect the super surface of the periodic array of the nano composite resonant cavity, and the prepared super-surface multi-channel infrared filter realizes the phenomenon of multiple transmission enhanced peaks in a near infrared region and realizes the function of nano multi-channel filtering.
In one implementation, the rectangular period has a width of 1100nm and a length of 1200 nm; the widths of the horizontal resonant cavity and the vertical resonant cavity are 100 nm; the length of the horizontal resonant cavity is 800 nm; the lengths of the two vertical resonant cavities are respectively 200nm and 300 nm; the thickness of the gold film is 225 nm; the refractive index of SiO2 is 1.45; the ambient refractive index is 1. After the size of the super-surface multichannel infrared filter provided by the invention is preset, the error of single digit can be allowed during preparation. Of course, in other embodiments, the data size of the above parameters needs to be adjusted according to specific situations.
Preferably, the method can also adjust the transmission characteristic and the like of the super-surface multichannel infrared filter by changing parameters, if the transmission characteristic and the like are changed by changing the size of the nano structure on the super-surface, the size of the preset nano structure needs to be simulated again, and then the preparation is carried out; if it is desired to change the transmission characteristics, etc. by changing the ambient refractive index, only the preparation environment needs to be adjusted.
Compared with the prior art, the invention has the following advantages:
(1) the super surface with the nano structure is used as a novel material, and parameters such as the amplitude, the phase, the polarization and the like of optical waves can be adjusted and controlled on the sub-wavelength level;
(2) the filter is formed on the basis of the super surface with the nano structure, selectively transmits light waves with specific frequency on the nano level, and breaks through the limitation of the optical diffraction limit.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A nano-composite resonant cavity periodic array super-surface multi-channel infrared filter is characterized by comprising:
is arranged on SiO2A gold film with a nanostructure on a substrate, the gold film with the nanostructure being a super-surface;
the nano-structure on the super-surface is a composite resonant cavity of a periodic array, the composite resonant cavity comprises a horizontal resonant cavity and two vertical resonant cavities perpendicular to the horizontal resonant cavity, the two vertical resonant cavities are arranged at two sides of the horizontal resonant cavity, and the two vertical resonant cavities are communicated with the cavity of the horizontal resonant cavity; the widths of the horizontal resonant cavity and the vertical resonant cavity are in a sub-wavelength order;
the super-surface has three transmission enhancement peaks, a first transmission enhancement peak is generated by a horizontal resonant cavity, a second transmission enhancement peak and a third transmission enhancement peak are respectively generated by two vertical resonant cavities, the horizontal resonant cavity generates a bright mode, the vertical resonant cavity generates a dark mode, and the second transmission enhancement peak and the third transmission enhancement peak are formed under the excitation of the first transmission enhancement peak.
2. The nano-composite resonant cavity periodic array super-surface multichannel infrared filter according to claim 1, wherein the depth of the composite resonant cavity is equal to the thickness of the super-surface, and the depth is in the order of sub-wavelength.
3. The nanocomposite resonant cavity periodic array ultra-surface multichannel infrared filter according to claim 2,
the thickness of the super-surface is adjusted to enhance or attenuate plasmon wave resonance in the horizontal resonant cavity, resulting in a change in the first transmission enhancement peak amplitude and wavelength.
4. The nanocomposite resonant cavity periodic array ultra-surface multichannel infrared filter according to claim 1,
the positions of the two vertical resonant cavities from the ends of the horizontal resonant cavity are adjusted to affect the coupling between the plasmon wave resonances in the two vertical resonant cavities of the super-surface to vary the resonant wavelengths of the second and third transmission enhancement peaks to control the spectral positions and spacings of the second and third transmission enhancement peaks.
5. The nanocomposite resonant cavity periodic array ultra-surface multichannel infrared filter according to claim 1,
the lengths of the two vertical resonant cavities are adjusted respectively to adjust the wavelengths of the second transmission enhancement peak and the third transmission enhancement peak respectively.
6. The nanocomposite resonant cavity periodic array ultra-surface multichannel infrared filter according to claim 1,
a plurality of rectangular periods with the same length and width are uniformly arranged on the super surface;
a composite resonant cavity structure is arranged on a rectangular period.
7. The nanocomposite resonant cavity periodic array super-surface multichannel infrared filter according to claim 6,
adjusting the length of a side of the rectangular period parallel to the width of the vertical resonant cavity, the wavelengths of the second and third transmission enhancement peaks varying;
the wavelength of the first transmission enhancement peak is varied by adjusting the length of the side of the rectangular period parallel to the width of the horizontal resonant cavity.
8. The nanocomposite resonant cavity periodic array ultra-surface multichannel infrared filter according to claim 1,
the ambient refractive index is adjusted to adjust the wavelengths of the first, second, and third transmission enhancement peaks.
9. A method for manufacturing a nano composite resonant cavity periodic array super-surface multi-channel infrared filter is characterized by comprising the following steps:
simulating the size of a preset nano structure, wherein the nano structure is a composite resonant cavity of a periodic array;
in SiO2Depositing a gold film on the substrate;
preparing a nano-composite resonant cavity periodic array super-surface on a gold film according to a simulation preset size to form a super-surface multi-channel infrared filter; the composite resonant cavity comprises a horizontal resonant cavity and two vertical resonant cavities perpendicular to the horizontal resonant cavity, the two vertical resonant cavities are arranged on two sides of the horizontal resonant cavity, and the two vertical resonant cavities are communicated with the cavity of the horizontal resonant cavity; the widths of the horizontal resonant cavity and the vertical resonant cavity are in a sub-wavelength order;
and detecting the super-surface multi-channel infrared filter.
10. The method for fabricating a nano-composite resonant cavity periodic array ultra-surface multi-channel infrared filter as defined in claim 9,
a plurality of rectangular periods with the same length and width are uniformly arranged on the super surface, the width of each rectangular period is 1100nm, and the length of each rectangular period is 1200 nm;
the widths of the horizontal resonant cavity and the vertical resonant cavity are 100 nm;
the length of the horizontal resonant cavity is 800 nm;
the lengths of the two vertical resonant cavities are respectively 200nm and 300 nm;
the thickness of the gold film is 225 nm;
the refractive index of SiO2 is 1.45;
the ambient refractive index is 1.
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