CN112816055B - Self-calibration optical micro-vibration detection method - Google Patents
Self-calibration optical micro-vibration detection method Download PDFInfo
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- CN112816055B CN112816055B CN202011638199.2A CN202011638199A CN112816055B CN 112816055 B CN112816055 B CN 112816055B CN 202011638199 A CN202011638199 A CN 202011638199A CN 112816055 B CN112816055 B CN 112816055B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
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Abstract
The invention relates to a self-calibration optical micro-vibration detection method, which comprises the following steps: acquiring an interference light intensity signal at the 0 th diffraction level and an interference light intensity signal at any odd diffraction level output by the grating interference structure at the moment t; obtaining a first voltage signal according to the interference light intensity signal at the 0 th diffraction stage, and obtaining a second voltage signal according to the interference light intensity signal at any odd diffraction stage; carrying out weighted average on the first voltage signal and the second voltage signal according to the saturation amplitude proportional coefficient to obtain a weighted average voltage signal; calculating a compensated first voltage signal and a compensated second voltage signal according to the weighted average voltage signal; obtaining a group of orthogonal voltage signals according to the compensated first voltage signal and the compensated second voltage signal; and demodulating the orthogonal voltage signal to obtain the vibration displacement to be measured. The invention can solve the problem of working point deviation of the optical interference detection method and obtain an accurate detection result.
Description
Technical Field
The invention relates to the field of optical detection, in particular to a self-calibration optical micro-vibration detection method.
Background
The optical detection method can realize a high-performance sensing function by utilizing the optical wave characteristics, wherein the optical interference type detection method converts the phase change of light generated by responding to the to-be-measured into the phase difference modulation light intensity change, not only utilizes the high sensitivity advantage of the optical phase modulation method, but also adopts mature light intensity signal detection, and is particularly suitable for the development of a high-precision sensing technology. Aiming at the wide application requirements of the current intelligent sensor in the portable equipment, the grating interference type detection method can introduce a high-performance optical interference detection method into a highly integrated interference cavity detection structure through grating coupling, and is favorable for the practical development of the MOEMS (micro-opto-electro-mechanical system) sensor.
A key problem limiting practical application of the optical interference type micro-displacement sensing technology at present is the shift problem of a static working point. The static working point of the optical interference type detection structure can obtain the highest sensitivity, linearity and dynamic range when the static working point is at the optimal position. However, due to cross interference such as manufacturing errors and environmental factors, the static operating point of the sensor during the initial or detection process may deviate from the optimal position, thereby reducing the detection performance and limiting the practical development of the high-sensitivity optical interference detection method.
In order to overcome the problem, the existing solution mostly focuses on constructing a multi-wavelength or broadband detection optical path system to obtain orthogonal detection signals for phase demodulation to avoid the problem of working points, but the method is effective, but adds a high-requirement optical device and a complex optical path design in the detection system, greatly increases the cost and power consumption of the detection system, and is not beneficial to large-scale popularization and application.
Disclosure of Invention
The invention aims to provide a self-calibration optical micro-vibration detection method, which can solve the problem of working point deviation of an optical interference type detection method and obtain an accurate detection result.
In order to achieve the purpose, the invention provides the following scheme:
a self-calibrating optical micro-vibration detection method, the method comprising:
acquiring an interference light intensity signal at the 0 th diffraction level and an interference light intensity signal at any odd diffraction level output by the grating interference structure at the moment t;
obtaining a first voltage signal according to the interference light intensity signal at the 0 th diffraction stage, and obtaining a second voltage signal according to the interference light intensity signal at any odd diffraction stage;
carrying out weighted average on the first voltage signal and the second voltage signal according to the saturation amplitude proportional coefficient to obtain a weighted average voltage signal;
calculating a compensated first voltage signal and a compensated second voltage signal according to the weighted average voltage signal;
obtaining a group of orthogonal voltage signals according to the compensated first voltage signal and the compensated second voltage signal;
and demodulating the orthogonal voltage signal to obtain the vibration displacement to be measured.
Optionally, using formulas
Calculating the weighted average voltage signal, wherein Va(t) is a weighted average voltage signal, V0(t) is a first voltage signal, V1And (t) is a second voltage signal, and alpha is a saturation amplitude scaling factor.
Optionally, using formulas
Calculating the compensated first voltage signal, wherein V0,c(t) is the compensated first voltage signal, V0(t) is a first voltage signal, VaAnd (t) is a weighted average voltage signal.
Optionally, using formulas
Calculating the compensated second voltage signal, wherein V1,c(t) is the compensated second voltage signal, α is the saturation amplitude scaling factor, V1(t) is a second voltage signal, VaAnd (t) is a weighted average voltage signal.
Optionally, using formulas
And
calculating the quadrature voltage signal, wherein V0,q(t) is a first quadrature voltage signal, V1,q(t) is a second quadrature voltage signal, the first and second quadrature voltage signals being in quadrature, V0,c(t) is the compensated first voltage signal, V1,cAnd (t) is the compensated second voltage signal.
Optionally, using formulas
And
calculating the vibration displacement to be measured, wherein delta d (t) is the vibration displacement to be measured, lambda is the wavelength of incident light, Vd(t) is a voltage signal obtained by cross-multiplying the first orthogonal voltage signal and the second orthogonal voltage signal, V0,q(t) is a first quadrature voltage signal, V1,qAnd (t) is a second quadrature voltage signal.
Optionally, using formulas
Calculating the saturation amplitude scaling factor, wherein Vpp,0Is the saturated peak-to-peak value, V, of the first voltage signalpp,1The second voltage signal is saturated with peak-to-peak values.
Optionally, the grating interference detection apparatus is subjected to full-scale pretesting, where a full-scale peak-to-peak value of a first voltage signal is a saturated peak-to-peak value of the first voltage signal, and a full-scale peak-to-peak value of a second voltage signal is a saturated peak-to-peak value of the second voltage signal.
Optionally, a photoelectric detection module is used to obtain the interference light intensity signal at the 0 th diffraction stage to obtain a first voltage signal, and obtain the interference light intensity signal at any odd diffraction stage to obtain a second voltage signal.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention utilizes the complementary characteristic of two diffraction orders of a grating interference detection structure to output interference light signals, obtains the amplitude value of the real-time incident light intensity effect through the operation and separation of weighted average, and then eliminates the amplitude value from each output signal, namely, the amplitude value calibration is carried out on the output signals, thereby eliminating the influence of the incident light intensity of a detection device on the output signals and the vibration displacement detection result; then, the invention obtains a group of orthogonal signals by performing evolution operation on the two paths of interference signals after the amplitude is calibrated, and then the vibration displacement can be directly obtained by adopting conventional orthogonal phase demodulation operation without being influenced by a static working point.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a flow chart of a self-calibrating optical micro-vibration detection method of the present invention;
FIG. 2 is a schematic diagram of the working principle of the grating interference detection device of the present invention;
FIG. 3 is a schematic structural diagram of a grating interference detection device according to the present invention;
FIG. 4 is a graph showing the variation of the light intensity of the interference light output by each diffraction order with the vibration displacement according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention aims to provide a self-calibration optical micro-vibration detection method, which can simultaneously solve the problems of incident light intensity fluctuation and static working point offset of an optical interference type detection method and obtain an accurate detection result.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1, the present invention discloses a self-calibration optical micro-vibration detection method, which is suitable for detecting micro-vibration displacement based on a grating interferometer device, and comprises:
step 101: acquiring an interference light intensity signal at the 0 th diffraction level and an interference light intensity signal at any odd diffraction level output by the grating interference structure at the moment t;
step 102: obtaining a first voltage signal according to the interference light intensity signal at the 0 th diffraction stage, and obtaining a second voltage signal according to the interference light intensity signal at any odd diffraction stage;
step 103: carrying out weighted average on the first voltage signal and the second voltage signal according to the saturation amplitude proportional coefficient to obtain a weighted average voltage signal;
step 104: calculating a compensated first voltage signal and a compensated second voltage signal according to the weighted average voltage signal;
step 105: obtaining a group of orthogonal voltage signals according to the compensated first voltage signal and the compensated second voltage signal;
step 106: and demodulating the orthogonal voltage signal to obtain the vibration displacement to be measured.
Specifically, the method of the present invention is applied to detect micro-vibration displacement by a grating interference detection device, a schematic diagram of the grating interference detection device is shown in fig. 2, a coherent light source enters a grating interference detection structure composed of a vibration detection plane and a grating, interference light signals of each diffraction order are output from one side of the grating interference detection structure, and micro-vibration displacement of the vibration detection plane modulates the output interference light signals of each diffraction order by changing the cavity length of the interference detection structure. The method mainly provides selective signal detection of the grating interference detection structure and an operation demodulation method of a detection signal in a computer or a microprocessor. In combination with the required photoelectric detection module, a schematic diagram of a grating interference detection device corresponding to the method of the present invention is shown in fig. 3, the listed device fig. 3 is an example, as long as it can detect light intensity and output a corresponding effective voltage signal and has a required operation function, and in addition, it needs to be noted that the wavelength λ of the incident light used and the grating constant Λ in the grating interference structure at least satisfy the condition: lambda < lambda.
The method is based on the principle that the interference light intensity of two diffraction orders output by the grating interference structure has a complementary relation with the change of the interference cavity length, and specifically comprises the following steps:
according to the scalar diffraction theory analysis of the grating interference structure model, the relationship between the output light intensity signal of each diffraction order interference and the vibration displacement of the grating interference detection structure at a certain moment (or state) is as follows:
in the formula IinIs the intensity of the incident light, I0、I±1、I±3The light intensity of interference light at diffraction orders 0, 1 and 3 of the grating respectively, wherein lambda is the wavelength of incident light; d is the cavity length (distance from the grating plane to the vibration plane) of the grating interference detection structure, and has the relation d ═ d0+ Δ d, wherein d0The distance from the grating plane to the static position of the detection vibration plane, i.e. the initial distance without vibration, Δ d is the distance change caused by the vibration displacement. Then, the above formula shows that the 0 th diffraction order interference light intensity and the rest odd diffraction order interference light intensity are in a complementary relationship with the change of the vibration displacement to be detected, as shown in fig. 4.
Thus, the embodiments of the present invention are as follows:
synchronously detecting interference light intensity signals at 0 th diffraction level and interference light intensity signals at any odd diffraction level of the grating interference detection structure at the time t by adopting a photoelectric detection module to obtain corresponding time domain voltage signals V0(t) and V1(t) wherein V0(t) is the first voltage signal, V1(t) is the second voltage signal;
the first voltage signal and the second voltage signal obtained by detection at each moment are subjected to saturation amplitude proportionality coefficient (alpha-V)pp，0/Vpp，1) Weighted average is performed, see equation (4), result Va(t) is the weighted average voltage signal characterizing the effect of the real-time incident light intensityThe magnitude of the voltage signal of (a);
wherein, Vpp,0(t) is the first voltage signal saturation peak-to-peak value, Vpp,1And (t) is the second voltage signal saturation peak-to-peak value, both of which are constant parameters obtained by performing full-scale pretesting on the grating interference detection device, wherein the first voltage signal full-scale peak-to-peak value is the first voltage signal saturation peak-to-peak value, and the second voltage signal full-scale peak-to-peak value is the second voltage signal saturation peak-to-peak value.
Then dividing the first voltage signal and the second voltage signal at each moment by the weighted average voltage signal according to the proportionality coefficient, see equations (5) and (6), obtaining two voltage signals after amplitude compensation, V0,c(t) is the compensated first voltage signal, V1,c(t) is said compensated second voltage signal, thereby eliminating the effect of incident light intensity;
squaring the compensated first voltage signal and the compensated second voltage signal at each time to obtain a set of orthogonal voltage signals, see equations (7) and (8), V0,q(t) is the first quadrature voltage signal, V1,q(t) is the second quadrature voltage signal;
finally, the first orthogonal voltage signal and the second orthogonal voltage signal at each moment are subjected to conventional orthogonal phase demodulation operation to obtain accurate vibration displacement delta d (t) to be measured, see equations (9) and (10), VdAnd (t) is a voltage signal obtained by cross multiplying the orthogonal voltage signals.
In addition, when any odd diffraction order interference optical signal is selected, the 1 st diffraction order interference optical signal is preferably selected to complete the detection method.
The invention also discloses the following technical effects:
compared with the prior art, the self-calibration optical micro-vibration detection method can simultaneously compensate and correct the problems of incident light intensity fluctuation and light interference static working point offset suffered by the detection system, and improves the stability and accuracy.
For the incident light intensity fluctuation problem, according to the change relation of the output interference light intensity of each diffraction order of the grating interference detection structure along with the vibration displacement, the actual incident light intensity of the interference structure influences the amplitude of an output light intensity signal. The invention utilizes the complementary characteristics of the output light signals of two diffraction orders, cancels the differential term which changes along with the vibration displacement through the operation of weighted average, separates and obtains the amplitude value of the real-time incident light intensity effect, and then cancels the amplitude value from each output signal, namely, the amplitude value calibration is carried out on the output signal, thereby eliminating the influence of the incident light intensity of the detection device on the output signal and the vibration displacement detection result.
For the problem of static working point offset, the invention obtains a group of orthogonal signals by performing evolution operation on two paths of interference signals after amplitude calibration, and can directly obtain the vibration displacement amount without being influenced by the static working point by adopting conventional orthogonal phase demodulation operation subsequently.
The self-calibration optical micro-vibration detection method has the characteristics of simple required system, low power consumption cost and real-time compensation, and is particularly suitable for high-precision micro-vibration displacement micro-detection equipment with complex working conditions.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (9)
1. A method of self-calibrating optical micro-vibration detection, the method comprising:
acquiring an interference light intensity signal at the 0 th diffraction level and an interference light intensity signal at any odd diffraction level output by the grating interference structure at the moment t;
obtaining a first voltage signal according to the interference light intensity signal at the 0 th diffraction stage, and obtaining a second voltage signal according to the interference light intensity signal at any odd diffraction stage;
carrying out weighted average on the first voltage signal and the second voltage signal according to the saturation amplitude proportional coefficient to obtain a weighted average voltage signal;
calculating a compensated first voltage signal and a compensated second voltage signal according to the weighted average voltage signal;
obtaining a group of orthogonal voltage signals according to the compensated first voltage signal and the compensated second voltage signal;
and demodulating the orthogonal voltage signal to obtain the vibration displacement to be measured.
2. The self-calibrating optical microvibration detection method of claim 1, wherein a formula is used
Calculating the weighted average voltage signal, wherein Va(t) is a weighted average voltage signal, V0(t) is a first voltage signal, V1And (t) is a second voltage signal, and alpha is a saturation amplitude scaling factor.
3. The self-calibrating optical microvibration detection method of claim 1, wherein a formula is used
Calculating the compensated first voltage signal, wherein V0,c(t) is the compensated first voltage signal, V0(t) is a first voltage signal, VaAnd (t) is a weighted average voltage signal.
4. The self-calibrating optical microvibration detection method of claim 1, wherein a formula is used
Calculating the compensated second voltage signal, wherein V1,c(t) is the compensated second voltage signal, α is the saturation amplitude scaling factor, V1(t) is a second voltage signal, VaAnd (t) is a weighted average voltage signal.
5. The self-calibrating optical microvibration detection method of claim 1, wherein a formula is used
And
calculating the positiveAn alternating voltage signal of which V0,q(t) is a first quadrature voltage signal, V1,q(t) is a second quadrature voltage signal, the first and second quadrature voltage signals being in quadrature, V0,c(t) is the compensated first voltage signal, V1,cAnd (t) is the compensated second voltage signal.
6. The self-calibrating optical microvibration detection method of claim 1, wherein a formula is used
And
calculating the vibration displacement to be measured, wherein delta d (t) is the vibration displacement to be measured, lambda is the wavelength of incident light, Vd(t) is a voltage signal obtained by cross-multiplying the first orthogonal voltage signal and the second orthogonal voltage signal, V0,q(t) is a first quadrature voltage signal, V1,qAnd (t) is a second quadrature voltage signal.
7. The self-calibrating optical microvibration detection method of claim 1, wherein a formula is used
Calculating the saturation amplitude scaling factor, wherein Vpp,0Is the saturated peak-to-peak value, V, of the first voltage signalpp,1The second voltage signal is saturated with peak-to-peak values.
8. The method of claim 7, wherein a full-scale pre-test is performed on the grating interference detection device, wherein the full-scale peak-to-peak value of the first voltage signal is the saturation peak-to-peak value of the first voltage signal, and wherein the full-scale peak-to-peak value of the second voltage signal is the saturation peak-to-peak value of the second voltage signal.
9. The self-calibrating optical micro-vibration detection method of claim 1, wherein a photo-detection module is used to obtain the interference light intensity signal at the 0 th diffraction stage to obtain a first voltage signal, and obtain the interference light intensity signal at any odd diffraction stage to obtain a second voltage signal.
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Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1104326A (en) * | 1993-12-21 | 1995-06-28 | 中国科学院长春物理研究所 | Testing method for vibration of optical table |
| AU2586697A (en) * | 1996-04-19 | 1997-11-12 | University Of Michigan, The | Active fiber-optic opto-acoustic detector |
| CN1254851A (en) * | 1998-11-25 | 2000-05-31 | 富士通株式会社 | Optical modulator and method for controlling optical modulator |
| JP2006106726A (en) * | 2004-09-13 | 2006-04-20 | Hitachi Maxell Ltd | Polarized light diffracting element |
| CN101592472A (en) * | 2008-05-28 | 2009-12-02 | 中国科学院电子学研究所 | Time-resolved single-grating interferometer |
| EP2107410A3 (en) * | 2008-04-03 | 2010-06-30 | Samsung Electronics Co., Ltd. | Optical scanning apparatus and image forming apparatus including the same |
| JP5669182B2 (en) * | 2010-10-14 | 2015-02-12 | 大学共同利用機関法人 高エネルギー加速器研究機構 | Vibration measuring apparatus and vibration measuring method by white interference method |
| CN104764476A (en) * | 2015-04-03 | 2015-07-08 | 大连理工大学 | Wavelength circulation tuning compensation interferential sensor operating point drift method and system |
| CN107864667A (en) * | 2014-12-27 | 2018-03-30 | 贾迪安光学技术有限公司 | For the system and method for the multiple vibrations for detecting surface |
| CN207763811U (en) * | 2018-01-24 | 2018-08-24 | 合肥正阳光电科技有限责任公司 | A kind of miniature diffraction grating sound pressure sensor |
| CN108801438A (en) * | 2018-06-15 | 2018-11-13 | 山东理工大学 | A kind of vibration displacement measuring device based on optical interference |
| CN109855743A (en) * | 2019-01-04 | 2019-06-07 | 北方工业大学 | Device and method for measuring large-size optical plane by double-frequency laser heterodyne interference phase |
| CN110595604A (en) * | 2019-09-16 | 2019-12-20 | 武汉理工大学 | High-dynamic-range dual-wavelength distributed optical fiber vibration demodulation system and method |
| CN111457843A (en) * | 2019-04-26 | 2020-07-28 | 上海微电子装备（集团）股份有限公司 | Displacement measuring device, displacement measuring method and photoetching equipment |
-
2020
- 2020-12-31 CN CN202011638199.2A patent/CN112816055B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1104326A (en) * | 1993-12-21 | 1995-06-28 | 中国科学院长春物理研究所 | Testing method for vibration of optical table |
| AU2586697A (en) * | 1996-04-19 | 1997-11-12 | University Of Michigan, The | Active fiber-optic opto-acoustic detector |
| CN1254851A (en) * | 1998-11-25 | 2000-05-31 | 富士通株式会社 | Optical modulator and method for controlling optical modulator |
| JP2006106726A (en) * | 2004-09-13 | 2006-04-20 | Hitachi Maxell Ltd | Polarized light diffracting element |
| EP2107410A3 (en) * | 2008-04-03 | 2010-06-30 | Samsung Electronics Co., Ltd. | Optical scanning apparatus and image forming apparatus including the same |
| CN101592472A (en) * | 2008-05-28 | 2009-12-02 | 中国科学院电子学研究所 | Time-resolved single-grating interferometer |
| JP5669182B2 (en) * | 2010-10-14 | 2015-02-12 | 大学共同利用機関法人 高エネルギー加速器研究機構 | Vibration measuring apparatus and vibration measuring method by white interference method |
| CN107864667A (en) * | 2014-12-27 | 2018-03-30 | 贾迪安光学技术有限公司 | For the system and method for the multiple vibrations for detecting surface |
| CN104764476A (en) * | 2015-04-03 | 2015-07-08 | 大连理工大学 | Wavelength circulation tuning compensation interferential sensor operating point drift method and system |
| CN207763811U (en) * | 2018-01-24 | 2018-08-24 | 合肥正阳光电科技有限责任公司 | A kind of miniature diffraction grating sound pressure sensor |
| CN108801438A (en) * | 2018-06-15 | 2018-11-13 | 山东理工大学 | A kind of vibration displacement measuring device based on optical interference |
| CN109855743A (en) * | 2019-01-04 | 2019-06-07 | 北方工业大学 | Device and method for measuring large-size optical plane by double-frequency laser heterodyne interference phase |
| CN111457843A (en) * | 2019-04-26 | 2020-07-28 | 上海微电子装备（集团）股份有限公司 | Displacement measuring device, displacement measuring method and photoetching equipment |
| CN110595604A (en) * | 2019-09-16 | 2019-12-20 | 武汉理工大学 | High-dynamic-range dual-wavelength distributed optical fiber vibration demodulation system and method |
Non-Patent Citations (5)
| Title |
|---|
| A Lower Frequency Shift Based on Mode Conversion for Optical Heterodyne Micro-Vibration Measurement;Longkun Zhang;《 Journal of Lightwave Technology 》;20200625;第38卷(第21期);6057-6062 * |
| Dynamics Analysis and Control of a Bird Scale Underactuated Flapping-Wing Vehicle;Guangping He;《IEEE Transactions on Control Systems Technology 》;20190415;第28卷(第4期);1233-1242 * |
| 一种自调频动力吸振器及其吸振特性研究;赵全亮等;《应用力学学报》;20140831;第31卷(第4期);626-630+13 * |
| 激光测量中干扰的光路自动补偿方法;于达仁等;《仪器仪表学报》;20030430;第24卷(第2期);123-126 * |
| 衍射光栅外差激光干涉法角振动校准技术研究;于梅等;《计量学报》;20151130;第35卷(第6期);561-564 * |
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