CN112809507A - Crystal bar fixing and polishing device manufactured intelligently - Google Patents
Crystal bar fixing and polishing device manufactured intelligently Download PDFInfo
- Publication number
- CN112809507A CN112809507A CN202110002370.9A CN202110002370A CN112809507A CN 112809507 A CN112809507 A CN 112809507A CN 202110002370 A CN202110002370 A CN 202110002370A CN 112809507 A CN112809507 A CN 112809507A
- Authority
- CN
- China
- Prior art keywords
- crystal bar
- fixed mounting
- carousel
- polishing device
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/007—Weight compensation; Temperature compensation; Vibration damping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/067—Work supports, e.g. adjustable steadies radially supporting workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention relates to the technical field of semiconductor processing, and discloses an intelligently manufactured crystal bar fixing and polishing device which comprises a shell, wherein a workbench is fixedly arranged at the bottom end of the inner wall of the shell, heat conducting fins are fixedly arranged on the left side and the right side of the workbench, cooling cavities are rotatably arranged on the left side and the right side of the top end of the inner wall of the shell, thermistors are fixedly arranged in the cooling cavities, and fan blades are fixedly arranged in the middle of the cooling cavities. This fixed and grinding device of crystal bar that intelligence was made can carry out the centre gripping to the crystal bar of different shapes, has both saved the extra cost that needs different anchor clamps to the centre gripping of equidimension crystal bar not, has still accelerated the machining efficiency to the crystal bar, can reduce the damage of polishing piece and crystal bar rigidity collision when polishing the crystal bar surface, can also blow to the crystal bar man-hour, has not only reduced the processing temperature, still makes the processing field of vision better for the machining precision improves.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to an intelligently manufactured crystal bar fixing and polishing device.
Background
The semiconductor need dip the seed crystal of specific crystal orientation into supersaturated pure silicon melt soup and pull out the crystal bar at the in-process of processing, it is fixed to it to need to use anchor clamps at the in-process that polishes to the crystal bar, but the crystal bar of equidimension not needs different anchor clamps, make the cost improve, the in-process of polishing is carried out to the crystal bar, grinding apparatus and crystal bar take place the rigidity collision and easily lead to the grinding apparatus to damage, influence machining efficiency, the process of polishing produces high temperature and makes the hardness of crystal bar change, easily cause the influence to the machining precision.
In order to solve the problems, the inventor provides an intelligently manufactured crystal bar fixing and polishing device, crystal bars in different shapes can be clamped, extra cost of clamping different crystal bars in different sizes is saved, machining efficiency of the crystal bars is improved, damage caused by rigid collision of a polishing block and the crystal bars can be reduced when the surfaces of the crystal bars are polished, air can be blown to the crystal bars during machining, machining temperature is reduced, the machining visual field is better, and machining precision is improved.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides an intelligently manufactured crystal bar fixing and polishing device, which has the advantages of clamping crystal bars with different shapes and sizes, reducing rigid collision damage during polishing and performing air cooling on a workpiece, and solves the problems that different clamping fixtures are required for clamping, a polishing block and the workpiece are rigidly collided to cause damage and the processing precision is reduced due to high processing temperature.
(II) technical scheme
In order to realize the purposes of clamping crystal bars with different shapes and sizes, reducing rigid collision damage during polishing and performing air cooling on a workpiece, the invention provides the following technical scheme: an intelligently manufactured crystal bar fixing and polishing device comprises a shell, wherein a workbench is fixedly installed at the bottom end of the inner wall of the shell, heat conducting fins are fixedly installed at the left side and the right side of the workbench, a cooling cavity is rotatably installed at the left side and the right side of the top end of the inner wall of the shell, a thermistor is fixedly installed in the cooling cavity, a fan blade is fixedly installed at the middle part of the inside of the cooling cavity, a power supply is fixedly installed at the left side and the right side of the inside of the cooling cavity, a spray head is fixedly installed at the bottom end of the cooling cavity, a connecting rod is movably connected to the top end of the inner wall of the shell, a telescopic rod is fixedly installed at the middle part of the connecting rod, a spring rod is fixedly installed at the middle part of the connecting rod at the top end of the inner wall of the shell, a polishing block is fixedly installed, the utility model discloses a rotary table, including the carousel center, the top fixed mounting of electromagnet has reset spring, reset spring's other end fixed mounting has magnet, the other end fixed mounting of magnet has the slider, the fixed surface of carousel installs the resistor strip, the sliding surface of resistor strip is connected with the contact, the one end slidable mounting that carousel surface slider is close to the carousel center has the slide bar, the one end fixed mounting that the slide bar is close to the carousel center has the fixed block, the inside fixed mounting of fixed block has fixed spring, fixed spring is close to the one end fixed mounting at carousel center has the stopper, the one end fixed mounting that the fixed block is close to the carousel center has spacing.
Preferably, the other end of the heat conducting sheet is connected with a thermistor through a heat conducting wire, and the thermistor adjusts the resistance value according to the temperature of a workpiece.
Preferably, the thermistor is a negative temperature coefficient resistor, and the resistance value decreases with an increase in temperature.
Preferably, the power supply is electrically connected to the fan blade.
Preferably, the electromagnet is electrified to have the same magnetic pole as the adjacent end of the magnet.
Preferably, one end of the sliding block, which is close to the center of the turntable, is arc-shaped, and the sliding block drives the sliding rod to move through the arc-shaped structure when moving.
Preferably, the resistance value of the resistor strip is reduced along with the anticlockwise rotation of the turntable, and the resistor strip is electrically connected with the electromagnet.
(III) advantageous effects
Compared with the prior art, the invention provides an intelligently manufactured crystal bar fixing and polishing device, which has the following beneficial effects:
1. this fixed and grinding device of crystal bar that intelligence was made, rotate through the drive carousel, the carousel rotates the surface slip of taking the moving contact at the resistance strip, make the resistance value of circuit reduce, and the magnetism reinforcing of resistance strip electric connection's electromagnet, the electromagnet repels magnet, make magnet tensile reset spring remove to the direction of keeping away from the electromagnet, magnet drives the slider and removes, the slider drives the slide bar and drives the fixed block to the direction removal slide bar that is close to the carousel center and removes, the fixed block drives spacing removal, tentatively fix the crystal bar, the stopper is fixed the center department of crystal bar when the fixed block removed, make fixed effect more obvious, and can adapt to the diameter of different crystal bars according to the rotational speed of carousel, make the great increase of practicality of device.
2. This fixed and grinding device of crystal bar that intelligence was made, through when the sanding block takes place the rigidity collision with the crystal bar, the sanding block passes through the flexible damage that reduces the collision and bring of spring beam, because the sanding block processes the crystal bar and leads to the temperature rising at the in-process of polishing, the conducting strip gives thermistor with heat energy transfer, the rising of thermistor temperature leads to the resistance value of circuit to reduce, the power increases to the drive power of fan piece, the fan piece rotates and cools down through the shower nozzle to the surface of crystal bar, and blow away the processing sweeps on crystal bar surface, make the processing field of vision better, and then improved the machining precision.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic front view of the structure of the present invention;
FIG. 3 is an enlarged view of the structure A of FIG. 1 according to the present invention;
FIG. 4 is a schematic view of a polishing structure according to the present invention;
FIG. 5 is a schematic view of a clamping structure according to the present invention.
In the figure: 1. a housing; 2. a work table; 3. a heat conductive sheet; 4. a cooling cavity; 5. a thermistor; 6. a fan blade; 7. a power source; 8. a spray head; 9. a connecting rod; 10. a telescopic rod; 11. a spring lever; 12. grinding blocks; 13. a turntable; 14. an electromagnet; 15. a return spring; 16. a magnet; 17. a slider; 18. a resistor strip; 19. a contact; 20. a slide bar; 21. a fixed block; 22. fixing the spring; 23. a limiting block; 24. and (5) a limiting strip.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, an intelligently manufactured crystal bar fixing and polishing device comprises a casing 1, a worktable 2 is fixedly installed at the bottom end of the inner wall of the casing 1, heat-conducting fins 3 are fixedly installed at the left side and the right side of the worktable 2, the other end of the heat-conducting fins 3 is connected with a thermistor 5 through heat-conducting wires, the thermistor 5 adjusts the resistance value thereof according to the temperature of a workpiece, a cooling cavity 4 is rotatably installed at the left side and the right side of the top end of the inner wall of the casing 1, the thermistor 5 is fixedly installed in the cooling cavity 4, the thermistor 5 is a negative temperature coefficient resistor, the resistance value is reduced along with the rise of the temperature, a fan sheet 6 is fixedly installed at the middle part of the inside of the cooling cavity 4, a power supply 7 is fixedly installed at the left side and the right side of the inside of the cooling cavity 4, the power supply 7 is electrically connected with the, an expansion link 10 is fixedly installed in the middle of a connecting rod 9, a spring rod 11 is fixedly installed in the middle of the connecting rod 9 at the top end of the inner wall of a shell 1, a polishing block 12 is fixedly installed at the bottom end of the spring rod 11, a rotary table 13 is rotatably installed above a workbench 2 at the bottom of the shell 1, an electromagnet 14 is fixedly installed at the edge of the surface of the rotary table 13, the electromagnet 14 is electrified and has the same magnetic pole with the similar end of the electromagnet 16, a return spring 15 is fixedly installed at the top end of the electromagnet 14, a magnet 16 is fixedly installed at the other end of the return spring 15, a sliding block 17 is fixedly installed at the other end of the magnet 16, one end of the sliding block 17 close to the center of the rotary table 13 is arc-shaped, the sliding block 17 drives a sliding rod 20 to move through an arc-shaped structure when moving, a resistor strip 18 is fixedly installed on the surface of the, a sliding rod 20 is slidably mounted at one end, close to the center of the rotary table 13, of a sliding block 17 on the surface of the rotary table 13, a fixed block 21 is fixedly mounted at one end, close to the center of the rotary table 13, of the sliding rod 20, a fixed spring 22 is fixedly mounted inside the fixed block 21, a limiting block 23 is fixedly mounted at one end, close to the center of the rotary table 13, of the fixed spring 22, and a limiting strip 24 is fixedly mounted at one end, close to the center.
The working principle is that a crystal bar is placed above a workbench 2, a rotating disc 13 is driven to rotate, the rotating disc 13 rotates to drive a moving contact 19 to slide on the surface of a resistor strip 18, so that the resistance value of a circuit is reduced, the magnetism of an electromagnet 14 electrically connected with the resistor strip 18 is enhanced, the electromagnet 14 repels the magnet 16, the magnet 16 stretches a return spring 15 to move towards the direction far away from the electromagnet 14, the magnet 16 drives a sliding block 17 to move, the sliding block 17 drives a sliding rod 20 to move towards the direction close to the center of the rotating disc 13 to move the sliding rod 20 to drive a fixed block 21 to move, the fixed block 21 drives a limiting strip 24 to move to primarily fix the crystal bar, a limiting block 23 fixes the center of the crystal bar while the fixed block 21 moves, the fixing effect is more obvious, the crystal bar can adapt to the diameters of different crystal bars according to the rotating speed of the rotating disc 13, select suitable height after to polish the crystal bar, when the sanding block 12 and crystal bar take place the rigidity collision, sanding block 12 reduces the damage that the collision brought through the flexible of spring beam 11, because sanding block 12 processes the crystal bar and leads to the temperature rising at the in-process of polishing, conducting strip 3 gives thermistor 5 with heat energy transfer, the rising of thermistor 5 temperature leads to the resistance value of circuit to reduce, power 7 increases the drive power of fan piece 6, fan piece 6 rotates and cools down through shower nozzle 8 to the surface of crystal bar, and blow up the processing sweeps on crystal bar surface, make the processing field of vision better, and then improved the machining precision.
In summary, the intelligently manufactured crystal bar fixing and polishing device drives the rotary disc 13 to rotate, the rotary disc 13 rotates to drive the movable contact 19 to slide on the surface of the resistor strip 18, so that the resistance value of the circuit is reduced, the electromagnet 14, which is electrically connected to the resistor strip 18, has increased magnetic properties, the electromagnet 14 repels the magnet 16, so that the magnet 16 stretches the return spring 15 to move away from the electromagnet 14, the magnet 16 drives the slide block 17 to move, the slide block 17 drives the slide rod 20 to move the slide rod 20 in a direction close to the center of the rotary disk 13 to drive the fixed block 21 to move, the fixed block 21 drives the limit strip 24 to move, the crystal bar is preliminarily fixed, the fixed block 21 moves, the limit block 23 fixes the center of the crystal bar, the fixing effect is more obvious, and the diameters of different crystal bars can be adapted according to the rotating speed of the rotating disc 13, so that the practicability of the device is greatly improved.
And, this fixed and grinding device of crystal bar that intelligence was made, when taking place the rigidity collision through sanding block 12 and crystal bar, sanding block 12 reduces the damage that the collision brought through the flexible of spring beam 11, because sanding block 12 processes the crystal bar and leads to the temperature rising in the process of polishing, conducting strip 3 transmits heat energy for thermistor 5, the rising of thermistor 5 temperature leads to the resistance value of circuit to reduce, power 7 increases to the drive power of fan piece 6, fan piece 6 rotates and cools down through shower nozzle 8 to the surface of crystal bar, and blow up the processing sweeps on crystal bar surface, make the processing field of vision better, and then improved the machining precision.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a fixed and grinding device of crystal bar that intelligence was made, includes casing (1), its characterized in that: the bottom fixed mounting of casing (1) inner wall has workstation (2), the left and right sides fixed mounting of workstation (2) has conducting strip (3), the left and right sides on casing (1) inner wall top rotates and installs cooling chamber (4), the inside fixed mounting of cooling chamber (4) has thermistor (5), the inside middle part fixed mounting of cooling chamber (4) has fan piece (6), the inside left and right sides fixed mounting of cooling chamber (4) has power (7), the bottom fixed mounting of cooling chamber (4) has shower nozzle (8), the top swing joint of casing (1) inner wall has connecting rod (9), the middle part fixed mounting of connecting rod (9) has telescopic link (10), the middle part fixed mounting of casing (1) inner wall top connecting rod (9) has spring beam (11), the bottom fixed mounting of spring beam (11) has sanding block (12), the top of casing (1) bottom workstation (2) is rotated and is installed carousel (13), the marginal fixed mounting on carousel (13) surface has electromagnet (14), the top fixed mounting of electromagnet (14) has reset spring (15), the other end fixed mounting of reset spring (15) has magnet (16), the other end fixed mounting of magnet (16) has slider (17), the fixed surface of carousel (13) installs resistor strip (18), the sliding surface of resistor strip (18) is connected with contact (19), the one end slidable mounting that carousel (13) surface slider (17) is close to carousel (13) center has slide bar (20), the one end fixed mounting that slide bar (20) are close to carousel (13) center has fixed block (21), the inside fixed mounting of fixed block (21) has fixed spring (22), fixed spring (22) are close to the one end fixed mounting at carousel (13) center and have stopper (23), fixed block (21) are close to the one end fixed mounting at carousel (13) center and have spacing (24).
2. The intelligently manufactured crystal bar fixing and polishing device according to claim 1, characterized in that: the other end of the heat conducting sheet (3) is connected with a thermistor (5) through a heat conducting wire.
3. The intelligently manufactured crystal bar fixing and polishing device according to claim 1, characterized in that: the thermistor (5) is a negative temperature coefficient resistor.
4. The intelligently manufactured crystal bar fixing and polishing device according to claim 1, characterized in that: the power supply (7) is electrically connected with the fan blade (6).
5. The intelligently manufactured crystal bar fixing and polishing device according to claim 1, characterized in that: the electromagnet (14) and the adjacent end of the magnet (16) have the same magnetic pole after being electrified.
6. The intelligently manufactured crystal bar fixing and polishing device according to claim 1, characterized in that: one end of the sliding block (17) close to the center of the rotating disc (13) is arc-shaped.
7. The intelligently manufactured crystal bar fixing and polishing device according to claim 1, characterized in that: the resistance value of the resistor strip (18) is reduced along with the anticlockwise rotation of the rotary disc (13), and the resistor strip (18) is electrically connected with the electromagnet (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110002370.9A CN112809507A (en) | 2021-01-04 | 2021-01-04 | Crystal bar fixing and polishing device manufactured intelligently |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110002370.9A CN112809507A (en) | 2021-01-04 | 2021-01-04 | Crystal bar fixing and polishing device manufactured intelligently |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112809507A true CN112809507A (en) | 2021-05-18 |
Family
ID=75856885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110002370.9A Withdrawn CN112809507A (en) | 2021-01-04 | 2021-01-04 | Crystal bar fixing and polishing device manufactured intelligently |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112809507A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114151322A (en) * | 2021-11-23 | 2022-03-08 | 冯德旭 | Bidirectional plunger hydraulic pump |
| CN115673895A (en) * | 2022-11-11 | 2023-02-03 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Semiconductor material chip synthesis equipment |
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| CN108247494A (en) * | 2018-01-03 | 2018-07-06 | 深圳市中科智诚科技有限公司 | A kind of good safe intelligent sander of effect of polishing |
| CN108922847A (en) * | 2018-09-12 | 2018-11-30 | 江苏英锐半导体有限公司 | A kind of face grinder assembly for wafer production processing |
| CN108972306A (en) * | 2018-07-16 | 2018-12-11 | 陈东兴 | A kind of new material technology exploitation tube surfaces processing unit easy to clean |
| US20200180930A1 (en) * | 2019-10-11 | 2020-06-11 | Jili Ye | Grinding apparatus for curved neck of ceramic bottle |
| CN111300210A (en) * | 2020-02-27 | 2020-06-19 | 洛阳龙跃机械制造有限公司 | Grinding device is used in processing of low temperature ferrite ball-milling ironware |
| CN111872772A (en) * | 2020-07-27 | 2020-11-03 | 彭琦 | Processing method of PVC (polyvinyl chloride) pipe |
| CN112123065A (en) * | 2020-09-29 | 2020-12-25 | 刘鹏华 | A high-efficient clearance mar device for door and window glass |
| CN112139984A (en) * | 2020-09-27 | 2020-12-29 | 高明春 | Intelligent cooling liquid control device capable of adjusting injection amount according to rotating speed |
| CN112139925A (en) * | 2020-09-27 | 2020-12-29 | 张家贵 | Polishing device applicable to ceramic products of different specifications |
-
2021
- 2021-01-04 CN CN202110002370.9A patent/CN112809507A/en not_active Withdrawn
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108247494A (en) * | 2018-01-03 | 2018-07-06 | 深圳市中科智诚科技有限公司 | A kind of good safe intelligent sander of effect of polishing |
| CN108972306A (en) * | 2018-07-16 | 2018-12-11 | 陈东兴 | A kind of new material technology exploitation tube surfaces processing unit easy to clean |
| CN108922847A (en) * | 2018-09-12 | 2018-11-30 | 江苏英锐半导体有限公司 | A kind of face grinder assembly for wafer production processing |
| US20200180930A1 (en) * | 2019-10-11 | 2020-06-11 | Jili Ye | Grinding apparatus for curved neck of ceramic bottle |
| CN111300210A (en) * | 2020-02-27 | 2020-06-19 | 洛阳龙跃机械制造有限公司 | Grinding device is used in processing of low temperature ferrite ball-milling ironware |
| CN111872772A (en) * | 2020-07-27 | 2020-11-03 | 彭琦 | Processing method of PVC (polyvinyl chloride) pipe |
| CN112139984A (en) * | 2020-09-27 | 2020-12-29 | 高明春 | Intelligent cooling liquid control device capable of adjusting injection amount according to rotating speed |
| CN112139925A (en) * | 2020-09-27 | 2020-12-29 | 张家贵 | Polishing device applicable to ceramic products of different specifications |
| CN112123065A (en) * | 2020-09-29 | 2020-12-25 | 刘鹏华 | A high-efficient clearance mar device for door and window glass |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114151322A (en) * | 2021-11-23 | 2022-03-08 | 冯德旭 | Bidirectional plunger hydraulic pump |
| CN115673895A (en) * | 2022-11-11 | 2023-02-03 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Semiconductor material chip synthesis equipment |
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| PB01 | Publication | ||
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Application publication date: 20210518 |