CN112792669A - Online dressing method for titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel - Google Patents

Online dressing method for titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel Download PDF

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Publication number
CN112792669A
CN112792669A CN202011620829.3A CN202011620829A CN112792669A CN 112792669 A CN112792669 A CN 112792669A CN 202011620829 A CN202011620829 A CN 202011620829A CN 112792669 A CN112792669 A CN 112792669A
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China
Prior art keywords
grinding wheel
grinding
titanium oxide
metal bond
generated
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CN202011620829.3A
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Chinese (zh)
Inventor
吕冰海
傅琳
段世祥
祝佳俊
邵蓝樱
杨居儒
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Priority to CN202011620829.3A priority Critical patent/CN112792669A/en
Publication of CN112792669A publication Critical patent/CN112792669A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/05Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/73Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process

Abstract

An online dressing method for a titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel comprises the steps of adding a lubricant, an extreme pressure additive, an antirust agent, a defoaming agent and a surfactant into deionized water to obtain a mixed solution, adding titanium oxide into the mixed solution, and preparing a grinding fluid; in the processing process, grinding fluid firstly enters a reaction cavity irradiated by ultraviolet light in a circulating system, two strong oxidants of hydroxyl free radicals and hydrogen peroxide free radicals are generated in the grinding fluid under the catalytic action of the ultraviolet light and titanium oxide, then the strong oxidants are sprayed to the surface of a grinding wheel through a nozzle, and the strong oxidants react with a metal bond of the grinding wheel on the surface of the grinding wheel to generate an oxide layer; in the machining process, the friction force between the workpiece and the grinding wheel removes the oxide layer, so that the worn abrasive particles are easy to fall off, and the new abrasive particles are easy to expose, thereby realizing the on-line sharpening of the metal bond superhard grinding wheel. The invention improves the removal rate of processed materials and the processing efficiency.

Description

Online dressing method for titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel
Technical Field
The invention relates to the technical field of grinding, in particular to an online dressing method of a titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel
Background
At present, the grinding wheel (diamond grinding wheel, CBN grinding wheel) using the super-hard abrasive is a main tool for precise and efficient grinding processing of hard and brittle materials such as super-hard alloy, semiconductor material, ceramics and the like. The metal bond superhard grinding wheel has the advantages of high hardness, high strength, good profile retentivity of the grinding wheel, good wear resistance and the like, and is widely used for precise and ultra-precise grinding of hard and brittle difficult-to-machine materials. However, the metal bond is very difficult to repair due to the characteristics of high hardness, good wear resistance and the like of the metal bond, and the friction between the grinding wheel and the forming surface of the workpiece completes the removal of materials along with the grinding process, wherein along with the generation of a large amount of heat, a part of heat flows out along with abrasive dust, and most of the heat is remained on the surface of the grinding wheel and the surface of the workpiece. When the hardness of the grinding wheel is high, the holding force of the binding agent on the abrasive particles is high, the tips of the abrasive particles cannot fall off in time after being worn, namely, the self-sharpening performance of the grinding wheel is poor, the chip grooves are blocked, the grinding capacity of the grinding wheel is reduced, grinding burns on the surface of a workpiece and reduction of shape accuracy are caused, and even the workpiece is possibly damaged. Therefore, the dull-ground grinding wheel must be dressed to ensure good cutting performance.
The dressing of the grinding wheel is generally divided into two procedures of shaping and dressing, wherein the shaping refers to the dressing of the grinding wheel, the circle run-out error of the grinding wheel during the rotation of a grinding machine and the unevenness of the surface of a grinding layer along the bus direction of the grinding wheel are reduced, the dressing refers to the fact that abrasive particles are exposed out of the surface of the grinding wheel to form a new cutting edge, and the bonding agent is removed to enable the abrasive particles to have the protruding height exceeding the particle size 1/3, so that the grinding wheel obtains good cutting performance.
The traditional superhard grinding wheel dressing method usually achieves the purpose of dressing by removing abrasive particles through shearing and extrusion, the dressing process is difficult to control, the dressing precision is low, and the grinding wheel loss is large. For this reason, researchers at home and abroad have proposed various trimming methods, such as electrolytic in-process trimming (ELID), Electrochemical in-process controlled trimming (ECD), dry ECD, contact electrical discharge trimming (ECDD), Electrochemical discharge machining (ECDM), Laser-assisted trimming (Laser-assisted trimming and driving), jet pressure trimming (Water-jet in-process trimming), Ultrasonic vibration trimming (Ultrasonic trimming), and the like. With ELID technology being the most typical. Generally, the thickness of the oxide film generated by electrolysis in the ELID grinding process is between tens of microns and hundreds of microns, so that a considerable part of the abrasive is separated from the grinding wheel before the cutting action (abrasion) on the workpiece is not generated, and the ineffective loss of the grinding wheel is increased. In addition, due to the nonlinearity of the electrolytic trimming process, the cutting force is unstable due to the damage of the insulating layer on the surface of the grinding wheel in the ELID grinding process, and the shearing force rises and falls suddenly; when the electrolytic current is small, the formation and destruction processes of the electrolytic layer are long, making the cutting force unstable. When the current is large, the grinding wheel is excessively dressed, and the loss is excessive. Meanwhile, a special electrolysis power supply and an electrode system are needed, the equipment is complex, and the use cost is high.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides an online dressing method of a titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel, which improves the removal rate of processed materials and the processing efficiency.
In order to solve the technical problems, the invention provides the following technical scheme:
in the mixed solution, 15-20% by volume of the lubricant, 2-5% by volume of the extreme pressure additive, 3-5% by volume of the antirust agent, 1% by volume of the defoaming agent, 1% by volume of the surfactant and 3-5% by volume of the surfactant are added; adding titanium oxide into the mixed solution to prepare a grinding fluid, wherein the titanium oxide accounts for 3-6% of the total mass of the grinding fluid; the grinding fluid passes through an ultraviolet irradiation cavity in a circulating system, and hydroxyl radicals with strong oxidizability are generated in the grinding fluid under the catalytic action of ultraviolet light and titanium oxide; the grinding fluid with strong oxidizing property is sprayed to the surface of the grinding wheel by a nozzle and is subjected to oxidation reaction with a metal bond on the surface of the grinding wheel to form an oxide layer; the oxide layer is removed under the action of friction force between the grinding wheel and the workpiece, so that the passivated abrasive particles gradually fall off, new abrasive particles are exposed out of the surface of the grinding wheel, and the online sharpening of the metal bond superhard grinding wheel is completed, so that the grinding performance of the grinding wheel is maintained, and the high-quality grinding of the workpiece is realized.
Furthermore, the grinding wheel is a metal bond superhard grinding wheel, a strong oxidant hydroxyl radical and a hydrogen peroxide radical generated by photocatalysis in the grinding process oxidize the metal bond of the grinding wheel to obtain an oxide layer, the generation mechanism is as follows, and the wavelength of water decomposed by ultraviolet light is increased from 165nm to 380nm under the catalysis of titanium oxide. When the titanium oxide is exposed to ultraviolet rays, a pair of free electrons and positive holes are firstly generated, and the positive holes are then reacted with hydroxide ions adsorbed on the surface of the titanium oxide to generate hydroxyl radicals; on the other hand, the free electrons reduce tetravalent titanium ions into trivalent titanium ions, then the trivalent titanium ions give an electron to oxygen molecules adsorbed on the surface of titanium oxide, and the generated superoxide ions are combined with hydrogen ions to form another radical hydrogen peroxide radical; in this way, the two radicals generated oxidize the metal bond of the grinding wheel to the oxide layer.
Further, after the grinding fluid is sprayed to the surface of the grinding wheel, hydroxyl radicals and hydrogen peroxide radicals and a metal binding agent generate oxidation-reduction reaction; hydroxyl radicals and hydrogen peroxide radicals deprive electrons of metal simple substances to obtain metal cations and hydroxide ions, and metal hydroxide is generated; the metal hydroxide is precipitated and oxidized on the surface of the grinding wheel to form a non-conductive oxide layer, and the oxidation layer generated is more compact as the oxidation-reduction reaction speed is higher, and is more loose.
Still further, the speed and thickness of oxide film formation can directly influence the surface quality after grinding, and the speed and thickness of oxide film formation can be controlled by adjusting the intensity of ultraviolet light to change the rate of oxidant formation.
Furthermore, the grinding wheel bonding agent is oxidized by the strong oxidant generated after photocatalysis, the strong oxidant is generated in the reaction cavity, the strong oxidant is pumped out by the centrifugal pump and sprayed to the surface of the grinding wheel, and the oxide layer formed by the strong oxidant and the grinding wheel metal bonding agent can be controlled by controlling the flow of the sprayed grinding fluid.
The invention has the following beneficial effects:
1) the online dressing method of the metal bond superhard grinding wheel assisted by the titanium oxide photocatalyst greatly improves the removal rate of the processed material and the processing efficiency.
2) The thicker oxide layer formed in the machining process can play a role of a polishing pad, on one hand, the thicker oxide layer serves as a buffer and can absorb radial vibration generated in the grinding process to improve the quality of a machined surface, and on the other hand, the thicker oxide layer can prevent the grinding wheel from being excessively worn.
Drawings
FIG. 1 is a schematic illustration of the grinding process of the present invention;
FIG. 2 is a schematic view of the processing principle of the present invention;
FIG. 3 is a schematic diagram of the reaction principle of the present invention.
Detailed Description
The following further describes embodiments of the present invention with reference to the accompanying drawings:
referring to fig. 1-3, a method for dressing a superhard grinding wheel with a titanium oxide photocatalyst auxiliary metal binder on line, a workpiece 2 is fixed on a magnetic suction base 1; the magnetic suction base 1 translates left and right to enable the workpiece 1 and the grinding wheel 3 to move relatively; the grinding wheel 3 rotates at a high speed for grinding, and can feed up and down to control the processing depth; the grinding fluid 9 is filled in a container 11 and is pumped into the reaction cavity 8 by a pump 9; the ultraviolet light emitter 6 is arranged above the reaction cavity 8, and the light intensity is adjustable; after the grinding fluid 9 enters the reaction cavity, the surface layer grinding fluid is irradiated by ultraviolet light and is subjected to catalytic reaction by titanium oxide to obtain a strong oxidant; the pump 5 pumps the polishing solution after reaction at the upper layer in the reaction cavity 8 through the floating platform 7 and then sprays the polishing solution onto the grinding wheel 3 through the nozzle 4.
Adding a lubricant, an extreme pressure additive, an antirust agent, a defoaming agent and a surfactant into deionized water to obtain a mixed solution, wherein in the mixed solution, the volume percentage of the lubricant is 15-20%, the volume percentage of the extreme pressure additive is 2-5%, the volume percentage of the antirust agent is 3-5%, the volume percentage of the defoaming agent is 1%, the volume percentage of the surfactant is 1%, and the volume percentage of the surfactant is 3-5%; adding titanium oxide into the mixed solution to prepare a grinding fluid, wherein the titanium oxide accounts for 3-6% of the total mass of the grinding fluid; the grinding fluid passes through an ultraviolet irradiation cavity in a circulating system, and hydroxyl radicals with strong oxidizability are generated in the grinding fluid under the catalytic action of ultraviolet light and titanium oxide; the grinding fluid with strong oxidizing property is sprayed to the surface of the grinding wheel 3 through a nozzle and is subjected to oxidation reaction with the metal bond on the surface of the grinding wheel 1 to form an oxide layer; the oxide layer is removed under the action of the friction force between the grinding wheel 3 and the workpiece 2, so that the passivated abrasive particles gradually fall off, new abrasive particles are exposed out of the surface of the grinding wheel, and the online dressing of the metal bond superhard grinding wheel is completed, thereby maintaining the grinding performance of the grinding wheel 3 and realizing the high-quality grinding of the workpiece.
Further, the grinding wheel 3 is a metal bond superhard grinding wheel, and a strong oxidant hydroxyl radical and a hydrogen peroxide radical generated by photocatalysis in the grinding process oxidize the metal bond of the grinding wheel to obtain an oxide layer. The generation mechanism is that under the catalytic action of titanium oxide, the wavelength of water decomposed by ultraviolet light is increased from 165nm to 380 nm. When the titanium oxide is exposed to ultraviolet rays, a pair of free electrons and positive holes are firstly generated, and the positive holes are then reacted with hydroxide ions adsorbed on the surface of the titanium oxide to generate hydroxyl radicals; on the other hand, the free electrons reduce tetravalent titanium ions to trivalent titanium ions. Then, the trivalent titanium ion gives an electron to the oxygen molecule adsorbed on the surface of the titanium oxide, and the generated superoxide ion is combined with hydrogen ion to form another radical, namely hydrogen peroxide radical; in this way, the two radicals generated oxidize the metal bond of the grinding wheel to the oxide layer.
Further, after the grinding fluid is sprayed to the surface of the grinding wheel, hydroxyl radicals and hydrogen peroxide radicals and a metal bond undergo oxidation-reduction reaction; hydroxyl radicals and hydrogen peroxide radicals deprive electrons of metal simple substances to obtain metal cations and hydroxide ions, and metal hydroxide is generated; the metal hydroxide is precipitated and oxidized on the surface of the grinding wheel to form a non-conductive oxide layer, and the oxidation layer generated is more compact as the oxidation-reduction reaction speed is higher, and is more loose.
Still further, the speed and thickness of oxide film formation can directly influence the surface quality after grinding, and the speed and thickness of oxide film formation can be controlled by adjusting the intensity of ultraviolet light to change the rate of oxidant formation.
Furthermore, the grinding wheel binder is oxidized by a strong oxidant generated after photocatalysis. The strong oxidant is generated in the reaction cavity, is pumped out by a centrifugal pump and is sprayed to the surface of the grinding wheel, and the strong oxidant and the metal bond of the grinding wheel form an oxide layer, so that the forming rate and the thickness of the oxide layer can be controlled by controlling the flow of the sprayed grinding fluid.
Referring to fig. 2, as grinding progresses, the abrasive grains on the surface of the grinding wheel are broken and passivated abrasive grains 13 appear; the grinding fluid 14 with strong oxidizer is sprayed on the surface of the grinding wheel to oxidize the metal bond 15 of the grinding wheel to generate an oxide layer 12; as the soft oxide layer is removed by the friction between the grinding wheel and the workpiece, the passivated abrasive particles 13 fall off, and the new abrasive particles 16 are exposed to realize the online sharpening of the metal bond superhard grinding wheel.
Referring to fig. 3, titanium oxide molecules 18, water molecules 23, tetravalent titanium ions 29 and oxygen molecules 17 in the grinding fluid undergo redox reaction under the irradiation of ultraviolet light 22; the titanium oxide molecules 18 first generate a pair of free electrons and positive holes under the irradiation of the ultraviolet rays 22, and the positive holes then react with the hydroxide ions decomposed from water to generate hydroxyl radicals 20. In addition, the free electrons reduce tetravalent titanium ions to trivalent titanium ions, and then the trivalent titanium ions will deprive oxygen molecules 21 of one electron to change into tetravalent titanium ions 19 again, and the oxygen molecules losing one electron combine with the hydrogen ions decomposed from water to form hydrogen peroxide radicals 17.
The embodiments described in this specification are merely illustrative of implementations of the inventive concepts, which are intended for purposes of illustration only. The scope of the present invention should not be construed as being limited to the particular forms set forth in the examples, but rather as being defined by the claims and the equivalents thereof which can occur to those skilled in the art upon consideration of the present inventive concept.

Claims (5)

1. An online dressing method of a titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel is characterized in that a mixed solution is obtained by adding a lubricant, an extreme pressure additive, an antirust agent, a defoaming agent and a surfactant into deionized water, wherein in the mixed solution, the volume percentage of the lubricant is 15-20%, the volume percentage of the extreme pressure additive is 2-5%, the volume percentage of the antirust agent is 3-5%, the volume percentage of the defoaming agent is 1%, the volume percentage of the surfactant is 1%, and the volume percentage of the surfactant is 3-5%; adding titanium oxide into the mixed solution to prepare a grinding fluid, wherein the titanium oxide accounts for 3-6% of the total mass of the grinding fluid; the grinding fluid passes through an ultraviolet irradiation cavity in a circulating system, and hydroxyl radicals with strong oxidizability are generated in the grinding fluid under the catalytic action of ultraviolet light and titanium oxide; the grinding fluid with strong oxidizing property is sprayed to the surface of the grinding wheel by a nozzle and is subjected to oxidation reaction with a metal bond on the surface of the grinding wheel to form an oxide layer; the oxide layer is removed under the action of friction force between the grinding wheel and the workpiece, so that the passivated abrasive particles gradually fall off, new abrasive particles are exposed out of the surface of the grinding wheel, and the online sharpening of the metal bond superhard grinding wheel is completed, so that the grinding performance of the grinding wheel is maintained, and the high-quality grinding of the workpiece is realized.
2. The method for dressing a metal bond superhard grinding wheel on line with the assistance of the titanium oxide photocatalyst as claimed in claim 1, wherein the grinding wheel is a metal bond superhard grinding wheel, and a strong oxidant hydroxyl radical and a hydrogen peroxide radical generated by photocatalysis in the grinding process oxidize the metal bond of the grinding wheel to obtain an oxide layer, wherein the generation mechanism is that under the catalytic action of titanium oxide, the wavelength of water decomposed by ultraviolet light is increased from 165nm to 380 nm; when the titanium oxide is exposed to ultraviolet rays, a pair of free electrons and positive holes are firstly generated, and the positive holes are then reacted with hydroxide ions adsorbed on the surface of the titanium oxide to generate hydroxyl radicals; on the other hand, the free electrons reduce tetravalent titanium ions into trivalent titanium ions, then the trivalent titanium ions give an electron to oxygen molecules adsorbed on the surface of titanium oxide, and the generated superoxide ions are combined with hydrogen ions to form another radical hydrogen peroxide radical; in this way, the two radicals generated oxidize the metal bond of the grinding wheel to the oxide layer.
3. The method for dressing a superhard grinding wheel with a metal bond by the aid of a titanium oxide photocatalyst in an online manner according to claim 1 or 2, wherein after the grinding fluid is sprayed on the surface of the grinding wheel, hydroxyl radicals and hydrogen peroxide radicals undergo an oxidation-reduction reaction with the metal bond; hydroxyl radicals and hydrogen peroxide radicals deprive electrons of metal simple substances to obtain metal cations and hydroxide ions, and metal hydroxide is generated; the metal hydroxide is precipitated and oxidized on the surface of the grinding wheel to form a non-conductive oxide layer, and the oxidation layer generated is more compact as the oxidation-reduction reaction speed is higher, and is more loose.
4. The method for dressing a superhard grinding wheel with a titanium oxide photocatalyst auxiliary metal bond in an online manner as claimed in claim 1 or 2, wherein the forming speed and thickness of the oxide film are controlled by adjusting the intensity of ultraviolet light to change the forming speed of the oxidant.
5. The method for on-line dressing of a metal bond superhard grinding wheel with the aid of the titanium oxide photocatalyst as claimed in claim 1 or 2, wherein the grinding wheel bond is oxidized by a strong oxidant generated after the photocatalyst, the strong oxidant is generated in the reaction chamber, the strong oxidant is pumped out by a centrifugal pump and sprayed on the surface of the grinding wheel, and the strong oxidant and the grinding wheel metal bond form an oxide layer, so that the forming rate and the thickness of the oxide layer can be controlled by controlling the flow of the sprayed grinding fluid.
CN202011620829.3A 2020-12-30 2020-12-30 Online dressing method for titanium oxide photocatalyst auxiliary metal bond superhard grinding wheel Pending CN112792669A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW474847B (en) * 1999-08-20 2002-02-01 Ebara Corp Polishing apparatus and dressing method
JP2002263990A (en) * 2001-03-12 2002-09-17 Nami Cho Super-precision surface working method and working system
JP2003334762A (en) * 2002-05-17 2003-11-25 Isel Co Ltd Grinding wheel and grinding work method using the grinding wheel and grinding machine
JP2013123792A (en) * 2011-12-16 2013-06-24 Fujitsu Ltd Method for manufacturing semiconductor device, and grinding device
CN104669075A (en) * 2014-12-08 2015-06-03 沈阳工业大学 Photocatalytic auxiliary cutter sharpening method and device for diamond cutter
CN105773399A (en) * 2016-03-29 2016-07-20 清华大学 Polishing solution, polishing machine and polishing method
CN105935912A (en) * 2015-03-03 2016-09-14 株式会社迪思科 Grinding wheel, grinding apparatus, and method of grinding wafer
CN110774160A (en) * 2019-11-14 2020-02-11 河南工业大学 Superfine superhard abrasive grinding wheel ultra-precision grinding method assisted by abrasive particle jet flow

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW474847B (en) * 1999-08-20 2002-02-01 Ebara Corp Polishing apparatus and dressing method
JP2002263990A (en) * 2001-03-12 2002-09-17 Nami Cho Super-precision surface working method and working system
JP2003334762A (en) * 2002-05-17 2003-11-25 Isel Co Ltd Grinding wheel and grinding work method using the grinding wheel and grinding machine
JP2013123792A (en) * 2011-12-16 2013-06-24 Fujitsu Ltd Method for manufacturing semiconductor device, and grinding device
CN104669075A (en) * 2014-12-08 2015-06-03 沈阳工业大学 Photocatalytic auxiliary cutter sharpening method and device for diamond cutter
CN105935912A (en) * 2015-03-03 2016-09-14 株式会社迪思科 Grinding wheel, grinding apparatus, and method of grinding wafer
CN105773399A (en) * 2016-03-29 2016-07-20 清华大学 Polishing solution, polishing machine and polishing method
CN110774160A (en) * 2019-11-14 2020-02-11 河南工业大学 Superfine superhard abrasive grinding wheel ultra-precision grinding method assisted by abrasive particle jet flow

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Application publication date: 20210514