CN112787616B - 一种谐振器的调频方法 - Google Patents
一种谐振器的调频方法 Download PDFInfo
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- CN112787616B CN112787616B CN202110006473.2A CN202110006473A CN112787616B CN 112787616 B CN112787616 B CN 112787616B CN 202110006473 A CN202110006473 A CN 202110006473A CN 112787616 B CN112787616 B CN 112787616B
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- resonator
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- piezoelectric layer
- piezoelectric
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- 238000000034 method Methods 0.000 title claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 11
- 230000001788 irregular Effects 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 7
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000004891 communication Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
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CN202110006473.2A CN112787616B (zh) | 2021-01-05 | 2021-01-05 | 一种谐振器的调频方法 |
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CN202110006473.2A CN112787616B (zh) | 2021-01-05 | 2021-01-05 | 一种谐振器的调频方法 |
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CN112787616A CN112787616A (zh) | 2021-05-11 |
CN112787616B true CN112787616B (zh) | 2024-04-09 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007295306A (ja) * | 2006-04-25 | 2007-11-08 | Matsushita Electric Works Ltd | バルク弾性波共振器、フィルタ回路、及びバルク弾性波共振器の製造方法 |
US8367305B1 (en) * | 2010-09-17 | 2013-02-05 | Sandia Corporation | Method for fabricating a microelectromechanical resonator |
CN105322905A (zh) * | 2014-05-30 | 2016-02-10 | 珠海东精大电子科技有限公司 | 高频率49s石英晶体谐振器的制备方法 |
CN110880922A (zh) * | 2019-11-18 | 2020-03-13 | 武汉大学 | 一种二维超高频谐振器 |
CN112134539A (zh) * | 2020-08-19 | 2020-12-25 | 合肥先微企业管理咨询合伙企业(有限合伙) | 可调反射腔的射频压电谐振器及制备方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100599083B1 (ko) * | 2003-04-22 | 2006-07-12 | 삼성전자주식회사 | 캔틸레버 형태의 압전 박막 공진 소자 및 그 제조방법 |
-
2021
- 2021-01-05 CN CN202110006473.2A patent/CN112787616B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007295306A (ja) * | 2006-04-25 | 2007-11-08 | Matsushita Electric Works Ltd | バルク弾性波共振器、フィルタ回路、及びバルク弾性波共振器の製造方法 |
US8367305B1 (en) * | 2010-09-17 | 2013-02-05 | Sandia Corporation | Method for fabricating a microelectromechanical resonator |
CN105322905A (zh) * | 2014-05-30 | 2016-02-10 | 珠海东精大电子科技有限公司 | 高频率49s石英晶体谐振器的制备方法 |
CN110880922A (zh) * | 2019-11-18 | 2020-03-13 | 武汉大学 | 一种二维超高频谐振器 |
CN112134539A (zh) * | 2020-08-19 | 2020-12-25 | 合肥先微企业管理咨询合伙企业(有限合伙) | 可调反射腔的射频压电谐振器及制备方法 |
Non-Patent Citations (1)
Title |
---|
AIN Checker-mode Resonators with Routing Structures;孙成亮等;《IEEE》;20191208;全文 * |
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CN112787616A (zh) | 2021-05-11 |
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