CN112763480B - Diagnosis method for atmospheric pressure induction coupling plasma temperature field - Google Patents
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Abstract
The method obtains the radiation intensity of local points in plasma and the monochromatic gray images of a plurality of rotation spectral lines in the whole plasma radiation light through an emission spectrometer, a plurality of monochromatic filter light paths and a high-speed CCD camera, obtains a quantitative relational expression of gray values and radiation intensity by utilizing the one-to-one mapping relation of the radiation intensity of the local points and the gray values in the monochromatic gray images, further obtains the monochromatic radiation images of the plurality of rotation spectral lines in the plasma radiation light, obtains a plurality of monochromatic radiation images of each point by utilizing a Boltzmann slope method, and finally obtains the gas temperature field distribution of the plasma by utilizing the molecular rotation temperature of the point, namely the gas temperature, and analogizing other points. The method solves the problem that the temperature field distribution of the atmospheric pressure inductively coupled plasma cannot be obtained by the existing plasma diagnosis means.
Description
Technical Field
The invention belongs to the field of plasma diagnosis science and technology, and particularly relates to a diagnosis method of an atmospheric pressure induction coupling plasma temperature field.
Background
Atmospheric pressure inductively coupled plasma has been widely used in many industries, and industrial application thereof can be better realized only by more deeply understanding the physical process of the inductively coupled plasma. Among the discharge parameters of the atmospheric pressure inductively coupled plasma, the gas temperature is a very important physical parameter, which directly affects the performance of the inductively coupled plasma. Therefore, in order to accurately know the operating state of the atmospheric pressure inductively coupled plasma torch, it is necessary to diagnose the physical parameters of the inductively coupled plasma, especially the molecular rotation temperature, i.e., the gas temperature, and accurately obtain the plasma temperature parameters, which is of great scientific significance for studying the performance of the inductively coupled plasma torch and developing the application of the inductively coupled plasma.
There are many methods for diagnosing temperature at present, but the temperature of the atmospheric pressure induction coupled plasma torch is easily over 2000K, so that many conventional diagnostic methods such as a probe method and a thermocouple method in a contact diagnostic method cannot be applied. The non-contact diagnosis method does not contact with the plasma, so that the non-contact diagnosis method does not cause interference to the atmospheric pressure inductively coupled plasma, and the non-contact diagnosis method generally completes diagnosis by detecting light radiation, so that the non-contact diagnosis method has higher spatial resolution and time resolution, and can detect the dynamic change condition of the temperature of the inductively coupled plasma. Among these non-contact methods, emission spectroscopy has the advantage of being non-interfering and non-direct contact compared to other diagnostic means (e.g., probe method), and is therefore often used to diagnose some basic physical parameters of plasma.
In the prior art, for plasma with a gas temperature higher than 5000K, the plasma is basically in a state close to a local thermodynamic equilibrium, and the gas temperature of the plasma is close to an electron excitation temperature, so that the gas temperature of the plasma at this time can be solved by solving the electron excitation temperature, but for plasma with a gas temperature lower than 5000K, measuring the gas temperature is difficult, and in patent document CN102184831A, the gas temperature is obtained by a conventional boltzmann slope method, a plurality of radiation intensity values of local points are obtained by using an emission spectrometer, and are substituted into a boltzmann formula to perform straight line fitting, so that the slope of a straight line is obtained, namely, the gas temperature value is obtained by using a boltzmann diagram method. However, the conventional boltzmann slope method can only determine the gas temperature value at a local point, and the spectrometer cannot capture the spectral line of the whole temperature field. In atmospheric pressure discharge plasma, it can be generally considered that the gas temperature is approximately equal to the molecular rotation temperature, and therefore the gas temperature can be obtained by calculating the molecular rotation temperature. Diatomic molecular OH rotation spectrum fitting method: the rotational spectral line of diatomic molecular OH is collected by an emission spectrometer, the spectrum simulated by a computer is compared with the actually measured OH spectrum, if the shapes of the spectral lines are consistent, the temperature selected during simulation is the plasma rotational temperature, but the spectrometer of the method cannot capture the spectral line of the whole temperature field, and only the gas temperature value of a local point can be obtained. Therefore, in the conventional boltzmann slope method and the OH rotation spectrum fitting method, since the spectrometer cannot capture the spectral line of the entire temperature field, only the rotation temperature of the local point of the plasma, that is, the gas temperature value, can be obtained, and the gas temperature field distribution of the plasma cannot be obtained.
Therefore, how to calculate the temperature field distribution of the atmospheric pressure inductively coupled plasma gas is a problem that needs to be solved urgently at present.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a diagnosis method of an atmospheric pressure induction coupling plasma temperature field, which solves the problem of temperature field diagnosis of the atmospheric pressure induction coupling plasma and effectively overcomes the problem that the current plasma diagnosis means can not obtain the temperature field distribution of the atmospheric pressure induction coupling plasma.
The technical scheme of the invention is as follows: the method for diagnosing the temperature field of the atmospheric pressure induction coupled plasma comprises the following steps:
step 1, dividing radiation light of a plurality of local points in a plasma temperature field into a plurality of monochromatic light beams by using a light splitting system of a gas temperature diagnosis platform, and obtaining the radiation intensity of the local points in the plasma and monochromatic gray images of a plurality of rotation spectral lines in the whole plasma radiation light by using an emission spectrometer, a plurality of monochromatic filter light paths and a high-speed CCD (charge coupled device) camera;
step 2, obtaining a quantitative relational expression of gray values and radiation intensity by utilizing the one-to-one mapping relation between the radiation intensity of the local points and the gray values in the monochromatic gray image, and further obtaining a monochromatic radiation image of a plurality of rotating spectral lines in plasma radiation light;
and 3, obtaining the molecular rotation temperature of each local point, namely the gas temperature, of the point by utilizing a Boltzmann slope method for the plurality of monochromatic radiation images of each local point, and finally obtaining the gas temperature field distribution of the plasma.
The gas temperature diagnosis platform comprises an emission spectrometer, a plurality of monochromatic filtering light paths and a high-speed CCD camera;
the monochromatic filtering optical path comprises a lens, a semi-transparent semi-reflecting mirror, a monochromatic band-pass filter and a blade prism; the plasma radiation light is changed into parallel light after passing through the lens, the parallel light is divided into a plurality of beams of light through the plurality of reflecting mirrors and the semi-transparent semi-reflecting mirror, one of the beams of light is sent into the emission spectrometer to obtain the radiation intensity of a local point in the plasma, the rest beams of light are changed into a plurality of beams of monochromatic light after passing through the reflecting mirrors and the monochromatic band-pass filter, the monochromatic light is sent into the CCD camera through the blade prism, and a plurality of monochromatic gray level images are formed in the CCD camera.
In the method, an emission spectrometer is used for collecting the rotation spectral line of diatomic molecules to obtain the radiation intensity of local points in the plasma, and the rotation peak can be OH, or,
The gas temperature diagnosis platform utilizes monochromatic band-pass filters to filter a plurality of parallel lights to obtain a plurality of monochromatic lights, the number of the monochromatic band-pass filters is n, n is a positive integer greater than or equal to three, OH is selected for a rotation peak, and the wavelength range of the monochromatic lights is 306-312 nm.
Wherein the quantitative relation between the gray value and the radiation intensity is
I＝f(G)＝k*G+b......(1)
Wherein k and b are constants, G represents a gray value, and I is the radiation intensity; substituting the gray value G in the plurality of monochromatic radiation images into a relational expression (1) to obtain the radiation intensity of a plurality of rotating spectral lines in the whole plasma radiation light; for a plurality of radiation intensities of each point, the gas temperature, which is the molecular rotation temperature of the point, is obtained by a boltzmann slope method.
Wherein the Boltzmann slope method is as follows:
wherein, I J'J” Denotes the radiation intensity, λ denotes the transition wavelength, S J'J” Is Hall-London factor, E J' Represents upper excitation energy, K B Is Boltzmann constant, T rot C is a constant for the rotation temperature; I.C. A J'J” Obtained from the relationship between the grey value and the radiation intensity, λ being determined directly by the monochromatic bandpass filter, with the upper excitation energy E of each line of rotation J' As the abscissa, in
For ordinate mapping, the data points were fitted using the least squares method to obtain a straight line slope of
The slope of the line and the molecular rotation temperature T rot Inversely proportional, obtaining the molecular rotation temperature of the local point, namely the gas temperature; and for other local points, and so on, finally obtaining the gas temperature field distribution of the plasma.
In summary, the advantages and positive effects of the invention are: the invention solves the problem of temperature field diagnosis of the atmospheric pressure induction coupled plasma, and effectively solves the problem that the current plasma diagnosis means can not obtain the temperature field distribution of the atmospheric pressure induction coupled plasma.
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In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a method for diagnosing an atmospheric pressure inductively coupled plasma temperature field according to the present invention;
the reference numbers in the figures mean: 1. a plasma flame; 2. a lens; 3-1 of a first half mirror, 3-2 of a second half mirror, 3-3 of a third half mirror, 3-4 of a fourth half mirror and 3-5 of a fifth half mirror; 4-2 parts of a first monochromatic band-pass filter, 4-3 parts of a third monochromatic band-pass filter, 4-4 parts of a fourth monochromatic band-pass filter and 4-5 parts of a fifth monochromatic band-pass filter; 5-1 a first reflector, 5-2 a second reflector, 5-3 a third reflector, 5-4 a fourth reflector, 5-5 a fifth reflector, 5-6 a sixth reflector, 5-7 a seventh reflector, 5-8 an eighth reflector and 5-9 a ninth reflector; 6. a blade prism; 7. a high-speed CCD camera; 8. a computer; 9. an emission spectrometer.
Detailed Description
In order to make the technical solutions in the embodiments of the present invention well understood by those skilled in the art, the following will be described in detail with reference to the accompanying drawings in the embodiments of the present invention. It should be apparent that the embodiments described below are only some, but not all, of the embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments described in the invention without inventive step, are within the scope of protection of the invention.
The invention aims to solve the problem of temperature field diagnosis of an atmospheric pressure induction coupling plasma torch and effectively overcome the problem that the atmospheric pressure induction coupling plasma temperature field distribution cannot be obtained by the existing plasma diagnosis means. Please refer to fig. 1. The technical scheme of the invention is as follows: a method for diagnosing the temperature field of the atmospheric pressure induction coupled plasma is provided, which comprises the following steps:
step 1, dividing radiation light of a plurality of local points in a plasma temperature field into a plurality of monochromatic light beams by using a light splitting system of a gas temperature diagnosis platform, and obtaining the radiation intensity of the local points in the plasma and a monochromatic gray image of a plurality of rotation spectral lines in the whole plasma radiation light by using a transmission spectrometer 9, a plurality of monochromatic filter light paths and a high-speed CCD camera 7;
step 2, obtaining a quantitative relational expression of the gray value and the radiation intensity by utilizing the one-to-one mapping relation of the radiation intensity of the local point and the gray value in the monochromatic gray image, and further obtaining the monochromatic radiation image of a plurality of rotating spectral lines in the plasma radiation light;
and 3, obtaining the molecular rotation temperature of each local point, namely the gas temperature, of the point by utilizing a Boltzmann slope method for the plurality of monochromatic radiation images of each local point, and finally obtaining the gas temperature field distribution of the plasma.
The gas temperature diagnosis platform of the atmospheric pressure induction coupled plasma comprises an emission spectrometer 9, a plurality of monochromatic filter light paths and a high-speed CCD camera 7. The monochromatic filtering light path comprises a lens 2, a first half-mirror 3-1, a second half-mirror 3-2, a third half-mirror 3-3, a fourth half-mirror 3-4, a fifth half-mirror 3-5, a first reflector 5-1, a second reflector 5-2, a third reflector 5-3, a fourth reflector 5-4, a fifth reflector 5-5, a sixth reflector 5-6, a seventh reflector 5-7, an eighth reflector 5-8, a ninth reflector 5-9, a first monochromatic band-pass filter 4-1, a first monochromatic band-pass filter 4-2, a third monochromatic band-pass filter 4-3, a fourth monochromatic band-pass filter 4-4, a fifth monochromatic band-pass filter 4-5 and a knife edge prism 6. The plasma radiation light becomes parallel light after passing through the lens 2, the parallel light is divided into a plurality of beams of light by a first half mirror 3-1, a second half mirror 3-2, a third half mirror 3-3, a fourth half mirror 3-4, a fifth half mirror 3-5, a second mirror 5-2, a fourth mirror 5-4, a sixth mirror 5-6 and an eighth mirror 5-8, one of the plurality of beams of light is sent to the emission spectrometer 9 to obtain the radiation intensity of a local point in the plasma, the rest beams of light are sent to the emission spectrometer 9 through a first monochromatic band-pass filter 4-2, a third monochromatic band-pass filter 4-3, a fourth monochromatic band-pass filter 4-4, a fifth monochromatic band-pass filter 4-5, a first mirror 5-1, a third mirror 5-3, a fifth mirror 5-5, a seventh mirror 5-7 and a ninth mirror 5-9 to become monochromatic light, the plurality of monochromatic light is sent to a high-speed CCD camera through a knife edge 6 to form a high-speed gray scale image.
Wherein, the emission spectrometer 9 is used for collecting the rotation spectral line of the diatomic molecule to obtain the radiation intensity of a local point in the plasma, and the rotation peak can be selected from OH, and,
The atmospheric pressure induction coupling plasma gas temperature diagnosis platform utilizes a first monochromatic band-pass filter 4-2, a third monochromatic band-pass filter 4-3, a fourth monochromatic band-pass filter 4-4 and a fifth monochromatic band-pass filter 4-5 to filter a plurality of parallel lights to obtain a plurality of monochromatic lights, the number of the monochromatic band-pass filters is set to be n (n is a positive integer greater than or equal to three), OH is selected for a rotation peak, and the wavelength range of the monochromatic lights is 306-312 nm.
Wherein, the quantitative relation between the gray value and the radiation intensity is as follows:
I＝f(G)＝k*G+b......(1)
wherein k and b are constants, G represents a gray value, and I is radiation intensity; substituting the gray values in the plurality of monochromatic radiation images into the relational expression (1) to obtain the radiation intensity of a plurality of rotating spectral lines in the whole plasma radiation light; for a plurality of radiation intensities of each point, the gas temperature, which is the molecular rotation temperature of the point, is obtained by a boltzmann slope method.
Wherein the Boltzmann slope method is:
wherein, I J'J” Denotes the radiation intensity, λ denotes the transition wavelength, S J'J” Is Hall-London factor, E J' Represents an upper excitation energy, K B Is Boltzmann constant, T rot C is a constant for the rotation temperature; i is J'J” Obtained from the relationship between the grey value and the radiation intensity, lambda is directly determined by the monochromatic band-pass filter. With upper excitation energy E of each line of rotation J' As the abscissa, in
For ordinate mapping, the data points were fitted using the least squares method to obtain a straight line slope of
The slope of the line and the molecular rotation temperature T rot Inversely proportional, obtaining the molecular rotation temperature of the local point, namely the gas temperature; and for other local points, and so on, finally obtaining the gas temperature field distribution of the plasma.
The principle of the invention is as follows:
the annular coil carrying the radio frequency current can generate an axial alternating magnetic field in the coil, the axial alternating magnetic field can generate an annular induction electric field, and the induction electric field discharges to form the induction coupling plasma. Obtaining the radiation intensity of local points in the plasma and the monochromatic gray-scale image of a plurality of rotating spectral lines in the whole plasma radiation light through an emission spectrometer, a plurality of monochromatic filter light paths and a high-speed CCD camera, obtaining a quantitative relation formula I = f (G) = k G + b of the gray-scale value and the radiation intensity by utilizing the one-to-one mapping relation of the radiation intensity of the local points and the gray-scale value in the monochromatic gray-scale image, further obtaining the monochromatic radiation image of a plurality of rotating spectral lines in the plasma radiation light, and then utilizing a Boltzmann slope method for a plurality of monochromatic images of each point
The molecular rotation temperature of the point, namely the gas temperature, can be obtained, and for other points, the analogy is repeated, and finally the gas temperature field distribution of the plasma is obtained.
Claims (3)
1. A diagnosis method for an atmospheric pressure induction coupling plasma temperature field is characterized by comprising the following steps:
step 1, dividing radiation light of a plurality of local points in a plasma temperature field into a plurality of monochromatic light beams by using a light splitting system of a gas temperature diagnosis platform, and obtaining the radiation intensity of the local points in the plasma and a monochromatic gray image of a plurality of rotation spectral lines in the whole plasma radiation light by using an emission spectrometer, a plurality of monochromatic filter light paths and a high-speed CCD camera; collecting the rotation spectral line of diatomic molecules by using an emission spectrometer to obtain the radiation intensity of local points in the plasma, wherein OH and N are selected as the rotation peaks 2+ ；
Step 2, obtaining a quantitative relational expression of the gray value and the radiation intensity by utilizing the one-to-one mapping relation of the radiation intensity of the local point and the gray value in the monochromatic gray image, and further obtaining the monochromatic radiation image of a plurality of rotating spectral lines in the plasma radiation light;
step 3, obtaining the molecular rotation temperature of each local point, namely the gas temperature, of the point by utilizing a Boltzmann slope method for the plurality of monochromatic radiation images of each local point, and finally obtaining the gas temperature field distribution of the plasma;
the quantitative relation between the gray value and the radiation intensity is as follows:
I＝f(G)＝k*G+b......(1)
wherein k and b are constants, G represents a gray value, and I is the radiation intensity; substituting the gray value G in the plurality of monochromatic radiation images into a relational expression (1) to obtain the radiation intensity of a plurality of rotating spectral lines in the whole plasma radiation light; for a plurality of radiation intensities of each point, obtaining the molecular rotation temperature of the point, namely the gas temperature, by using a Boltzmann slope method;
the Boltzmann slope method is as follows:
wherein, I J'J” Denotes the radiation intensity, λ denotes the transition wavelength, S J'J” Is Hall-London factor, E J' Represents upper excitation energy, K B Is the Boltzmann constant, T rot C is a constant for rotational temperature; i is J'J” Obtained from the relationship between the grey value and the radiation intensity, λ being determined directly by the monochromatic bandpass filter, with the upper excitation energy E of each line of rotation J' As the abscissa, in
For ordinate mapping, the data points were fitted using the least squares method to obtain a straight line slope of
The slope of the line and the molecular rotation temperature T rot Inversely proportional to the local point, and obtaining the molecular rotation temperature of the local point, namely the gas temperature; and for other local points, and so on, finally obtaining the gas temperature field distribution of the plasma.
2. The method of claim 1, wherein the method comprises:
the gas temperature diagnosis platform comprises an emission spectrometer, a plurality of monochromatic filtering light paths and a CCD camera;
the monochromatic filtering light path comprises a lens, a semi-transparent semi-reflecting mirror, a monochromatic band-pass filter and a blade prism; the plasma radiation light is changed into parallel light after passing through the lens, the parallel light is divided into a plurality of beams of light through the plurality of reflecting mirrors and the semi-transparent semi-reflecting mirror, one of the beams of light is sent into the emission spectrometer to obtain the radiation intensity of a local point in the plasma, the rest beams of light are changed into a plurality of beams of monochromatic light after passing through the reflecting mirrors and the monochromatic band-pass filter, the monochromatic light is sent into the CCD camera through the blade prism, and a plurality of monochromatic gray level images are formed in the CCD camera.
3. The method of claim 2, wherein the method comprises the steps of:
the gas temperature diagnosis platform utilizes monochromatic band-pass filters to filter a plurality of parallel lights to obtain a plurality of monochromatic lights, the number of the monochromatic band-pass filters is n, n is a positive integer greater than or equal to three, OH is selected for a rotation peak, and the wavelength range of the monochromatic lights is 306-312 nm.
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