CN112748558A - Wide-spectrum large-dynamic-range optical system and test calibration method - Google Patents
Wide-spectrum large-dynamic-range optical system and test calibration method Download PDFInfo
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- CN112748558A CN112748558A CN202011618009.0A CN202011618009A CN112748558A CN 112748558 A CN112748558 A CN 112748558A CN 202011618009 A CN202011618009 A CN 202011618009A CN 112748558 A CN112748558 A CN 112748558A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 72
- 238000012360 testing method Methods 0.000 title claims abstract description 34
- 238000001228 spectrum Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 7
- 238000003384 imaging method Methods 0.000 claims abstract description 35
- 238000006243 chemical reaction Methods 0.000 claims abstract description 5
- 238000001914 filtration Methods 0.000 claims description 27
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000007935 neutral effect Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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Abstract
The invention provides a wide-spectrum large-dynamic-range optical system and a test calibration method.emergent light of a wide-spectrum light source sequentially passes through an attenuation sheet and an optical filter, is reflected to a main spherical reflector through a plane reflector after passing through a target, then reaches a secondary spherical reflector through the reflection of the main spherical reflector, then reaches the main spherical reflector through the reflection of the secondary spherical reflector, and finally reaches an imaging focal plane after being reflected by the main spherical reflector. The off-axis three-mirror optical system is adopted, the test calibration of the resolution, the illuminance response and the wide spectrum response condition of the imaging chip can be completed at one time, and the resolution of the imaging chip is tested through the resolution plate on the target; the testing of the illuminance response of the imaging chip is completed through the combination of a plurality of attenuation pieces and the conversion of optical filters with different specifications; and the testing of the wide-spectrum response of the imaging chip is realized by switching a plurality of wide-spectrum light sources.
Description
Technical Field
The invention belongs to the technical field of optics, and relates to a wide-spectrum and large-dynamic-range optical system.
Background
With the continuous development of optical systems, higher requirements are put on the resolving power and the coverage of the optical systems. At present, an optical system with wide spectrum, large dynamic range, no chromatic aberration and high resolution is relatively lacked, and the system is widely applied to aspects such as chip test calibration and the like. The spectral range of a conventional optical system is narrow, the resolution of the conventional optical system from visible light to far infrared broad spectrum and under a plurality of monochromatic wavelength points cannot be realized, and the illumination of the conventional optical system in a large dynamic range of 10 < -4 > to 104lx can be adjusted.
Disclosure of Invention
In order to meet the requirements of wide-spectrum large-dynamic-range, non-chromatic aberration and high-resolution optical imaging, the invention provides a wide-spectrum large-dynamic-range optical system.
The basic principle of the invention is as follows:
the invention adopts an off-axis three-mirror optical system, adopts two main spherical reflectors and two secondary spherical reflectors which are arranged in parallel and on the same axis, a resolution plate is positioned at one side of the axis, and the resolution plate and an imaging focal plane are symmetrical about the axis, thereby completing the requirements of non-shielding and wide-spectrum imaging; switching of a plurality of light sources and a plurality of optical filters is adopted to realize monochromaticity of wavelength; the large-range adjustment of the illumination is realized by mutually combining and switching attenuation pieces with different specifications.
The technical scheme of the invention is as follows:
a wide-spectrum large-dynamic-range optical system comprises an optical flat plate, and a light source system, a target assembly, a reflector assembly, a secondary mirror assembly and a primary reflector assembly which are fixed on the optical flat plate;
the light source system comprises a light source component, a light intensity adjusting component and a filtering component;
the light source assembly comprises a plurality of broad spectrum light sources and a switching displacement table, and the plurality of broad spectrum light sources are connected to the switching displacement table in a sliding mode;
the light intensity adjusting component comprises a plurality of attenuation pieces with different specifications and a plurality of linear push rods, and the attenuation pieces are fixedly arranged on the linear push rods;
the filtering component comprises a light filter, a filtering rotating wheel and a servo mechanism, wherein a plurality of light filters and a blank area are embedded in the circumferential direction of the filtering rotating wheel, and the servo mechanism is connected with the filtering rotating wheel;
the reflector component comprises a plane reflector, the secondary reflector component comprises a secondary spherical reflector, and the main reflector component comprises a main spherical reflector;
the secondary spherical reflector and the main spherical reflector are coaxially arranged, and a reflector is arranged on one side of the coaxial axis of the secondary spherical reflector and the main spherical reflector;
the target assembly comprises a target and a target mounting seat, and the target is detachably mounted on the target mounting seat;
the emergent light of the broad spectrum light source passes through in proper order attenuator, light filter, from the target transmission back, on plane reflector reflection arrived main spherical reflector earlier, on the reflection by main spherical reflector reachs secondary spherical reflector again, later warp again the reflection of secondary spherical reflector reachs main spherical reflector finally passes through on arriving the formation of image focal plane after the reflection of main spherical reflector.
Further, the wide-spectrum light source group comprises a visible light source and an infrared light source.
Further, the light intensity adjusting assembly further comprises a fixed mounting structure, and the linear push rod is connected with the fixed mounting structure in a sliding mode.
Further, light source system still includes that fixed mounting is dull and stereotyped, supports the mounting bracket, the dull and stereotyped fixed connection of fixed mounting is in on the optics is dull and stereotyped, fixed mounting structure sets up support on the mounting bracket, support the mounting bracket light source subassembly, filtering subassembly fixed mounting be in on the fixed mounting is dull and stereotyped.
Further, still include the optics bench of filling up, target subassembly, reflector component and secondary mirror subassembly fixed mounting are on the optics bench of filling up.
Further, the reflector component further comprises a first mirror frame and a first supporting and fixing support which can be adjusted in a two-dimensional mode, the plane reflector is installed on the first mirror frame, the first mirror frame is connected to the first supporting and fixing support, and the first supporting and fixing support is fixedly installed on the optical padding table.
Furthermore, the secondary mirror assembly comprises a second mirror frame and a second supporting and fixing support which can be adjusted in a two-dimensional mode, the spherical reflector is installed on the second mirror frame, the second mirror frame is connected to the second supporting and fixing support, and the second supporting and fixing support is installed on the optical height-increasing table.
Furthermore, the main reflector assembly comprises a mirror frame capable of adjusting the angle of the mirror surface and a third supporting and fixing support, the spherical reflector is mounted on the mirror frame, the mirror frame is connected with the third supporting and fixing support, and the third supporting and fixing support is mounted on the optical flat plate.
Furthermore, the target assembly further comprises a target base and a target adapter, the target is installed on the target adapter, the target adapter is detachably connected with the target installation seat, the target installation seat is installed at the top of the target base, and the target base is installed on the optical cushion table.
And the sealed shell covers the light source system, the target assembly, the reflector assembly, the secondary mirror assembly and the main reflector assembly and is fixedly connected with the optical flat plate.
The method for testing and calibrating the imaging chip by using the wide-spectrum large-dynamic-range optical system comprises the following steps:
1) selecting a required target and installing the target on a target conversion seat;
2) placing the light source system on an optical flat plate, and aligning the light outlet position of the light filtering component with a target;
3) placing an imaging chip to be tested at an imaging focal plane of the whole optical system;
4) testing the illuminance response of the imaging chip to be tested:
4.1) switching a visible light source in the light source component to a use position through program control, and turning on a light source switch;
4.2) all the attenuation pieces in the light intensity adjusting component are withdrawn through program control;
4.3) rotating a filtering rotating wheel in the filtering component to a neutral gear through program control;
and 4.4) carrying out illuminance response test on the imaging chip to be tested, and testing the response condition of the imaging chip under different illuminances through the combination of the attenuation sheets.
5) Testing the resolution of the imaging chip to be tested:
5.1) selecting a proper resolution ratio plate to be installed at the position of a target;
5.2) switching different light sources through program control, and respectively testing the resolution ratios under different broad spectrum light sources;
and 5.3) testing the corresponding illuminance and the resolution at each wavelength point through the combination of the attenuation sheets in the light intensity adjusting assembly and the selection of the optical filter in the optical filtering assembly.
Compared with the prior art, the invention has the following beneficial effects:
(1) the off-axis three-mirror optical system is adopted, the test calibration of the resolution, the illuminance response and the wide spectrum response condition of the imaging chip can be completed at one time, and the resolution of the imaging chip is tested through the resolution plate on the target in the target assembly; the combination of a plurality of attenuation pieces is realized through the extension and contraction of a linear push rod in the light intensity adjusting assembly, and the conversion of optical filters with different specifications is realized through the rotation of the filtering rotating wheel, so that the test of the illuminance response of the imaging chip is completed; the testing of the imaging chip wide spectrum response is realized by switching the plurality of wide spectrum light sources through the switching displacement table in the light source component.
(2) According to the invention, through the closed shell, the influence of repeated installation of the imaging chip, external illumination and the like on the test result is reduced, and an accurate test calibration platform is provided for the development of a high-performance imaging chip.
Drawings
FIG. 1 is a light path diagram of the present invention;
FIG. 2 is a schematic diagram of a broad-spectrum, large-dynamic-range optical system according to the present invention;
FIG. 3 is a schematic view of the light source, light intensity adjustment and filtering assembly installation;
FIG. 4 is a schematic view of a light source module;
FIG. 5 is a schematic view of a light intensity adjusting assembly;
FIG. 6 is a schematic view of a filter assembly;
FIG. 7 is a schematic view of a target assembly;
1-optical flat plate, 2-light source system, 3-target assembly, 4-reflector assembly, 6-secondary mirror assembly, 7-main reflector assembly, 21-light source assembly, 22-light intensity adjusting assembly, 23-filtering assembly, 211-visible light source, 212-infrared light source, 213-switching displacement table, 221-attenuator, 222-linear push rod, 231-optical filter, 232-filtering runner, 233-servo mechanism, 231-optical filter, 42-plane reflector, 62-spherical reflector, 72-main spherical reflector, 32-target, 34-target mounting seat, 223-fixed mounting structure, 24-fixed mounting flat plate, 25-supporting mounting frame, 5-optical cushion high table, 31-target base, 33-target adapter.
Detailed Description
The following detailed description of the present invention is provided in conjunction with the accompanying drawings, but it should be understood that the scope of the present invention is not limited to the specific embodiments.
As shown in fig. 1-7, the wide-spectrum large-dynamic-range optical system comprises an optical flat plate 1, and a light source system 2, a target assembly 3, a mirror assembly 4, a secondary mirror assembly 6 and a primary mirror assembly 7 which are fixed on the optical flat plate 1; the light source system 2 comprises a light source component 21, a light intensity adjusting component 22 and a filtering component 23; the light source assembly 21 comprises a visible light source 211-1, an infrared light source 211-2 and a switching displacement table 212, wherein a plurality of wide-spectrum light sources 211 are slidably connected to the switching displacement table 212; the light intensity adjusting assembly 22 comprises a plurality of attenuation pieces 221 with different specifications and a plurality of linear push rods 222, wherein the attenuation pieces 221 are fixedly arranged on the linear push rods 222; the filtering assembly 23 comprises a filter 231, a filtering wheel 232 and a servo mechanism 233, wherein a plurality of filters 231 and a blank area are embedded in the circumferential direction of the filtering wheel 232, and the servo mechanism is connected with the filtering wheel 232; the mirror assembly 4 comprises a plane mirror 42, the secondary mirror assembly 6 comprises a secondary spherical mirror 62, and the primary mirror assembly 7 comprises a primary spherical mirror 72; the secondary spherical reflector 62 and the main spherical reflector 72 are coaxially arranged, and the reflector 42 is arranged on one side of the coaxial axis of the plane secondary spherical reflector 62 and the main spherical reflector 72; the target assembly 3 comprises a target 32 and a target mounting seat 34, wherein the target 32 is detachably mounted on the target mounting seat 34;
emergent light of broad spectrum light source 211 passes through in proper order attenuator 221, light filter 231, from the target 32 back of passing through, reflect main spherical mirror 72 through plane mirror 42 earlier on, on the reflection by main spherical mirror 72 reachs secondary spherical mirror 62, later pass through again secondary spherical mirror 62's reflection reachs main spherical mirror 72, finally the warp arrive on the formation of image focal plane after the reflection of main spherical mirror 72.
Wherein, the light intensity adjusting assembly 22 further comprises a fixed mounting structure 223, and the linear push rod 222 is slidably connected with the fixed mounting structure 223.
The light source system 2 further comprises a fixed mounting plate 24 and a supporting mounting frame 25, the fixed mounting plate 24 is fixedly connected to the optical plate 1, the fixed mounting structure 223 is arranged on the supporting mounting frame 25, and the supporting mounting frame 25, the light source assembly 21 and the light filtering assembly 23 are fixedly mounted on the fixed mounting plate 24.
The device also comprises an optical height-increasing table 5, and the target assembly 3, the reflector assembly 4 and the secondary mirror assembly 6 are fixedly arranged on the optical height-increasing table 5.
The mirror assembly 4 further includes a first mirror frame and a first supporting and fixing support, the first mirror frame and the first supporting and fixing support are two-dimensionally adjustable, the plane mirror 42 is installed on the first mirror frame, the first mirror frame is connected to the first supporting and fixing support, and the first supporting and fixing support is fixedly installed on the optical heightening table 5.
The secondary mirror assembly 6 comprises a second mirror frame and a second supporting and fixing support, the second mirror frame can be adjusted in two dimensions, the spherical reflector 62 is installed on the second mirror frame, the second mirror frame is connected to the second supporting and fixing support, and the second supporting and fixing support is installed on the optical cushion elevation table 5.
The main reflector assembly 7 comprises a mirror frame with an adjustable mirror surface angle and a third supporting fixed support, the spherical reflector 72 is installed on the mirror frame, the mirror frame is connected with the third supporting fixed support, and the third supporting fixed support is installed on the optical flat plate 1.
The target assembly 3 further comprises a target base 31 and a target adapter 33, the target 32 is installed on the target adapter 33, the target adapter 33 is detachably connected with a target installation seat 34, the target installation seat 34 is installed at the top of the target base 31, and the target base 31 is installed on the optical cushion elevation table 5.
The optical flat plate device further comprises a sealing shell, wherein the sealing shell covers the light source system 2, the target component 3, the reflector component 4, the secondary reflector component 6 and the main reflector component 7, and is fixedly connected with the optical flat plate 1.
The method for testing and calibrating the imaging chip by using the wide-spectrum large-dynamic-range optical system comprises the following steps:
1) selecting a required target 32 and installing the target on a target conversion seat 33;
2) placing the light source system 2 on the optical flat plate 1, and aligning the light outlet position of the filter assembly 23 with the target 32;
3) placing an imaging chip to be tested at an imaging focal plane of the whole optical system;
4) testing the illuminance response of the imaging chip to be tested:
4.1) switching the visible light source in the light source component 21 to a use position through program control, and turning on a light source switch;
4.2) all the attenuation plates 221 in the light intensity adjusting assembly 22 are withdrawn through program control;
4.3) rotating the filter wheel 232 in the filter assembly 23 to a neutral position through program control;
4.4) carrying out illuminance response test on the imaging chip to be tested, and testing the response condition of the imaging chip under different illuminances through the combination of the attenuation sheet 221.
5) Testing the resolution of the imaging chip to be tested:
5.1) selecting a proper resolution plate to be installed at the position of the target 32;
5.2) switching different light sources through program control, and respectively testing the resolution ratios under different broad spectrum light sources;
5.3) testing the corresponding illumination intensity and the resolution at each wavelength point through the combination of the attenuation sheets 221 in the light intensity adjusting assembly 22 and the selection of the optical filter 231 in the optical filter assembly 23.
The above disclosure is only for the specific embodiment of the present invention, but the embodiment of the present invention is not limited thereto, and any variations that can be made by those skilled in the art should fall within the scope of the present invention.
Claims (10)
1. A wide-spectrum, large-dynamic-range optical system, characterized by: the device comprises an optical flat plate (1), and a light source system (2), a target assembly (3), a reflector assembly (4), a secondary mirror assembly (6) and a main reflector assembly (7) which are fixed on the optical flat plate (1);
the light source system (2) comprises a light source component (21), a light intensity adjusting component (22) and a filtering component (23);
the light source assembly (21) comprises a plurality of wide-spectrum light sources (211) and a switching displacement table (212), wherein the plurality of wide-spectrum light sources (211) are connected on the switching displacement table (212) in a sliding mode;
the light intensity adjusting component (22) comprises a plurality of attenuation pieces (221) with different specifications and a plurality of linear push rods (222), wherein the attenuation pieces (221) are fixedly arranged on the linear push rods (222);
the filtering component (23) comprises a filter (231), a filtering rotating wheel (232) and a servo mechanism (233), wherein a plurality of filters (231) and a blank area are embedded in the circumferential direction of the filtering rotating wheel (232), and the servo mechanism is connected with the filtering rotating wheel (232);
the reflector assembly (4) comprises a plane reflector (42), the secondary reflector assembly (6) comprises a secondary spherical reflector (62), and the primary reflector assembly (7) comprises a primary spherical reflector (72);
the secondary spherical reflector (62) and the main spherical reflector (72) are coaxially arranged, and a reflector (42) is arranged on one side of the coaxial axis of the planar secondary spherical reflector (62) and the main spherical reflector (72);
the target assembly (3) comprises a target (32) and a target mounting seat (34), wherein the target (32) is detachably mounted on the target mounting seat (34);
emergent light of broad spectrum light source (211) passes through in proper order attenuator (221), light filter (231) pass through from target (32) after passing through, reflect to main spherical reflector (72) through plane reflecting mirror (42) earlier on, on the reflection by main spherical reflector (72) reachs secondary spherical reflector (62), later pass through again the reflection of secondary spherical reflector (62) reachs main spherical reflector (72), final warp arrive on the formation of image focal plane after the reflection of main spherical reflector (72).
2. The broad spectrum high dynamic range optical system of claim 1 wherein: the plurality of broad spectrum light sources include a visible light source (211-1), an infrared light source (211-2).
3. The broad spectrum high dynamic range optical system of claim 2, wherein: the light intensity adjusting assembly (22) further comprises a fixed mounting structure (223), and the linear push rod (222) is connected with the fixed mounting structure (223) in a sliding mode.
4. The broad spectrum high dynamic range optical system of claim 2, wherein: light source system (2) still include the dull and stereotyped (24) of fixed mounting, support mounting bracket (25), dull and stereotyped (24) fixed connection of fixed mounting is in on the optics flat board (1), fixed mounting structure (223) set up support on mounting bracket (25), support mounting bracket (25) light source subassembly (21), filtering subassembly (23) fixed mounting be in on the dull and stereotyped (24) of fixed mounting.
5. The broad spectrum high dynamic range optical system of claim 1 wherein: the device is characterized by further comprising an optical cushion elevation platform (5), wherein the target assembly (3), the reflector assembly (4) and the secondary mirror assembly (6) are fixedly mounted on the optical cushion elevation platform (5).
6. The broad spectrum high dynamic range optical system of claim 5 wherein: the reflecting mirror assembly (4) further comprises a first mirror frame and a first supporting and fixing support which can be adjusted in two dimensions, the plane reflecting mirror (42) is installed on the first mirror frame, the first mirror frame is connected to the first supporting and fixing support, and the first supporting and fixing support is fixedly installed on the optical heightening table (5);
secondary mirror subassembly (6) support fixing support including second mirror holder, the second that can carry out two-dimentional regulation, spherical reflecting mirror (62) are installed on the second mirror holder, the second mirror holder is connected on second support fixing support, second support fixing support is installed on optics pad high platform (5).
7. The broad spectrum high dynamic range optical system of claim 1 wherein: the main reflector component (7) comprises a mirror frame and a third supporting and fixing support, the mirror surface angle of the mirror frame can be adjusted, the spherical reflector (72) is installed on the mirror frame, the mirror frame is connected with the third supporting and fixing support, and the third supporting and fixing support is installed on the optical flat plate (1).
8. The broad spectrum high dynamic range optical system of claim 1 wherein: target subassembly (3) still include target base (31), target adapter (33), install on target adapter (33) target (32), target adapter (33) with target mount pad (34) can be dismantled the connection, install at target base (31) top target mount pad (34), install target base (31) on optical pad high platform (5).
9. The broad spectrum high dynamic range optical system of claim 1 wherein: the optical flat mirror device is characterized by further comprising a sealing shell, wherein the sealing shell covers the light source system (2), the target assembly (3), the reflector assembly (4), the secondary reflector assembly (6) and the main reflector assembly (7) and is fixedly connected with the optical flat plate (1).
10. An imaging chip test calibration method is characterized in that: a method for imaging chip test calibration performed by the broad spectrum high dynamic range optical system of any one of claims 1-9, comprising the steps of:
1) selecting a required target (32) and installing the target on a target conversion seat (33);
2) placing the light source system (2) on the optical flat plate (1), and aligning the light outlet position of the light filtering component (23) with the target (32);
3) placing an imaging chip to be tested at an imaging focal plane of the whole optical system;
4) testing the illuminance response of the imaging chip to be tested:
4.1) switching a visible light source in the light source component (21) to a use position through program control, and turning on a light source switch;
4.2) all the attenuation sheets (221) in the light intensity adjusting component (22) are withdrawn through program control;
4.3) rotating a filter wheel (232) in the filter assembly (23) to a neutral gear area through program control;
4.4) carrying out illuminance response test on the imaging chip to be tested, and testing the response condition of the imaging chip under different illuminances through the combination of the attenuation sheet (221);
5) testing the resolution of the imaging chip to be tested:
5.1) selecting a proper resolution plate to be installed at the position of a target (32);
5.2) switching different light sources through program control, and respectively testing the resolution ratios under different broad spectrum light sources;
5.3) testing the corresponding illuminance and the resolution at each wavelength point through the combination of the attenuation sheets (221) in the light intensity adjusting assembly (22) and the selection of the optical filter (231) in the optical filter assembly (23).
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| CN202011618009.0A CN112748558A (en) | 2020-12-31 | 2020-12-31 | Wide-spectrum large-dynamic-range optical system and test calibration method |
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| CN202011618009.0A CN112748558A (en) | 2020-12-31 | 2020-12-31 | Wide-spectrum large-dynamic-range optical system and test calibration method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115876446A (en) * | 2023-02-10 | 2023-03-31 | 武汉加特林光学仪器有限公司 | Detection device and method suitable for near-to-eye display products with different diopters |
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