CN112710256A - Electromechanical performance test system and method for scanning grating micro-mirror - Google Patents
Electromechanical performance test system and method for scanning grating micro-mirror Download PDFInfo
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Abstract
The invention discloses a system and a method for testing electromechanical performance of a scanning grating micro-mirror, which comprises a laser, a beam splitter, a PSD, a signal generator and an upper computer, wherein the relative positions of a scanning grating micro-mirror to be tested, the beam splitter and the laser are fixed, light emitted by the laser is reflected to the scanning grating micro-mirror through the beam splitter, when the scanning grating micro-mirror is driven to vibrate, the light is reflected to the PSD through the scanning grating micro-mirror, a signal processing circuit of the PSD can capture the motion track of a light spot on the PSD, data of the motion track is intercepted and curve fitted through the upper computer to obtain the scanning line length A of the light spot on the PSD, and then an optical scanning half-angle theta of the scanning grating micro-mirror is obtained through a laser triangulation method according to the distance L from the scanning grating micro-mirror to the PSD, so as to obtain the mechanical scanning half0. The invention can be used for testing the mechanical scanning half angle of the scanning grating micro-mirror.
Description
Technical Field
The invention belongs to the technical field of micro-opto-electro-mechanical technology, and particularly relates to a method and a device for testing the electromechanical performance of a scanning grating micro-mirror.
Background
The scanning grating micro-mirror is a novel MOEMS (micro-optical-electro-mechanical-optical system) device with optical scanning and spectrum splitting functions, has the remarkable advantages of small volume, high integration level, low cost and the like, is a core device of a new generation of spectrum detection equipment, and is widely applied to the fields of micro-spectrometers and the like.
The characterization and calibration of the mechanical scanning angle, the resonant frequency and other electromechanical properties of the scanning grating micro-mirror are not only used for judging the performance of the device, but also have an important role in guiding the optimization design of the device, and simultaneously provide important experimental data for the calibration of a closed-loop control system of the scanning grating micro-mirror. The accuracy of the characterization calibration greatly influences the control precision of the system in a specific application system.
In the research aspect of the electromechanical performance test method of the scanning micro-mirror, a. tortschanoff et al, in 2010, proposed a method for determining a mechanical scanning angle of the scanning micro-mirror by using two photodetectors with fixed relative positions, but in practical application, the method has the problems that the positions of the two photodetectors are difficult to determine, and the included angle between the photodetectors has a certain influence on measurement data. A Jogeon and courage team of the northwest industry university in 2016 provides a system and a method (CN 106248347B) for measuring performance parameters of an MEMS (micro electro mechanical system) scanning mirror, wherein a vibration amplitude value of the scanning mirror is obtained by performing sine fitting on position information of a light spot reflected to a PSD (one-dimensional position sensitive detector), and then an angle value of the vibration of the scanning mirror is obtained by calculating according to the vibration amplitude value of the scanning mirror and combining a distance between the PSD and a mirror surface of the scanning mirror. However, the method has the problems that the position and the relative angle of the structural part are difficult to determine, the requirements on the sampling rate and the PSD response speed are high, and the like; meanwhile, the measurement method mentioned by a Tortschanoff team or a heroic and courage team is developed and designed aiming at the scanning micro-mirror, and the main idea is to measure the change rule of the position of a scanning light spot on a certain plane along with time by using a point photoelectric detector and a fixed test fixture and solve the mechanical rotation angle of a device through geometric optical analysis. Because the reflecting surface of the micro scanning grating micro-mirror is a grating, when incident light is reflected by the grating surface, emergent light spots of the micro scanning grating micro-mirror are a series of light spots which are spread according to the grades. When the micro scanning grating micro-mirror is in a working state, the emergent light spots of the micro scanning grating micro-mirror can generate a secondary overlapping phenomenon. When the two testing methods have the phenomenon of overlapping of the orders, the testing and the characterization of the mechanical and electrical performance of the scanning grating micro-mirror cannot be finished because the order from which each light spot comes cannot be distinguished.
Disclosure of Invention
The invention provides a system and a method for testing electromechanical performance of a scanning grating micro-mirror, which can be used for testing the mechanical scanning half angle of the scanning grating micro-mirror.
In a first aspect, the electromechanical performance testing system of the scanning grating micro-mirror comprises a laser, a beam splitter, a PSD (one-dimensional position sensitive detector), a signal generator and an upper computer; the relative position relationship among the laser, the beam splitter, the PSD and the scanning grating micro-mirror to be measured should meet the following requirements:
when the scanning grating micro-mirror is in a static state and no driving voltage is applied to the scanning grating micro-mirror, emergent light of the laser is vertically incident to the beam splitter, the incident light is vertically incident to the mirror surface of the scanning grating micro-mirror through the beam splitter, and the 0 th-level light spot reflected by the scanning grating micro-mirror is vertically incident to the central position of the PSD photosensitive surface through the beam splitter;
the output end of the signal generator is connected with a driving coil of the scanning grating micro-mirror, and the PSD is electrically connected with an upper computer; the signal generator is used for outputting a driving signal with a preset amplitude value to drive the scanning grating micro-mirror to vibrate, and light emitted by the laser passes through the beam splitter and then is reflected by the scanning grating micro-mirror to form light which is scanned on the PSD photosensitive surface; the track of the light moving on the PSD is read out by a signal processing circuit of the PSD and input to an upper computer for processing to obtain the length A of the scanning line; and calculating the optical scanning half-angle theta according to the scanning line length A and the distance L from the scanning grating micro-mirror to the PSD photosensitive surface, and calculating the mechanical scanning half-angle theta according to the optical scanning half-angle theta0The calculation formula is as follows:
in a second aspect, the present invention provides a method for testing electromechanical performance of a scanning grating micro-mirror, which employs the system for testing electromechanical performance of a scanning grating micro-mirror, and the method includes the following steps:
the PSD calibration model is a corresponding relation between the amplitude of a curve fitted by an output signal of a PSD-based signal processing circuit and the distance from an emergent light spot to the center of the PSD, and the length A of the scanning line is equal to the distance from the emergent light spot to the center of the PSD multiplied by 2.
Measuring the linear distance from the grating scanning micromirror to the PSD photosensitive surface for multiple times by using a laser ranging module, and taking the average value of each measurement data as the distance L from the scanning grating micromirror to the PSD photosensitive surface; to ensure the testing accuracy.
Further, when the light path is adjusted, the emergent light of the laser is kept perpendicular to the surface of the beam splitter, and the reflected light of the beam splitter is kept perpendicular to the scanning grating micro-mirror.
Further, the signal processing circuit of the PSD outputs two analog output quantities which are sum current and difference current respectively, the non-overlapped part of the light level on the photosensitive surface of the PSD is distinguished based on the sum current, the ratio of the sum current and the difference current of the non-overlapped part of the light level is calculated, curve fitting is carried out on the calculated data of the ratio of the sum current and the difference current of the non-overlapped part of the light level, the fitting result is brought into a PSD calibration model, and the length A of the scanning line is obtained.
The invention has the following advantages:
(1) when the phenomenon of overlapping of the orders occurs, the order from which each light spot comes can be accurately distinguished, so that the mechanical scanning half-angle test of the scanning grating micro-mirror can be realized, and the problem that the traditional test method cannot test the electromechanical performance of the scanning grating micro-mirror is solved;
(2) the invention utilizes the performance of the beam splitter, improves the accuracy and efficiency of light path adjustment, and improves the reliability and efficiency of test;
(3) the PSD is used, so that the problems of installation and less sampling points when a point detector is used are solved, and the test precision is improved;
(4) through screening and curve fitting two paths of analog output signals of the signal processing circuit of the PSD, the influence of noise on the test signals is reduced, and the robustness and the test precision of the test system are improved.
Drawings
FIG. 1 is a diagram illustrating a scanning grating micro-mirror in a resting state according to the present embodiment;
FIG. 2 is a schematic diagram illustrating the non-overlapping light output levels according to the present embodiment;
FIG. 3 is a schematic diagram illustrating the overlapping of the light output levels in the present embodiment;
FIG. 4 is a diagram illustrating the relationship between the distance from the emergent light spot to the center of the PSD and the amplitude of the curve;
in the figure: 1. the device comprises a laser, 2, a beam splitter, 3, a scanning grating micro mirror, 4, PSD, 5, a signal generator, 6, an upper computer, 7, a signal processing circuit, 8, a 0 th-order light spot, 9, a 1 st-order light spot, 10 and a-1 st-order light spot.
Detailed Description
The following detailed description of the present embodiments is made with reference to the accompanying drawings.
As shown in fig. 1 to fig. 3, in the present embodiment, an electromechanical performance testing system of a scanning grating micro-mirror includes a laser 1, a beam splitter 2, a PSD4, a signal generator 5, and an upper computer 6; the relative position relationship among the laser 1, the beam splitter 2, the PSD4 and the scanning grating micro mirror 3 to be measured should satisfy the following requirements:
when the scanning grating micro-mirror 3 is in a static state and no driving voltage is applied to the scanning grating micro-mirror 3, the emergent light of the laser 1 is vertically incident to the beam splitter 2, the incident light is vertically incident to the mirror surface of the scanning grating micro-mirror 3 through the beam splitter 2, and the 0 th-order light spot reflected by the scanning grating micro-mirror 3 is vertically incident to the central position of the photosensitive surface of the PSD4 through the beam splitter 2.
The output end of the signal generator 5 is connected with a driving coil of the scanning grating micro-mirror 3, and the PSD4 is electrically connected with the upper computer 6; the signal generator 5 is used for outputting a driving signal with a preset amplitude (for example, a sinusoidal signal with a fixed amplitude) to drive the scanning grating micro-mirror 3 to vibrate, and light emitted by the laser 1 passes through the beam splitter 2 and then is reflected by the scanning grating micro-mirror 3 to form light which is scanned on a photosensitive surface of the PSD 4; the track of the light moving on the PSD4 is read out by the signal processing circuit 7 of the PSD4 and input to the upper computer 6 for processing to obtain the length A of a scanning line; calculating the optical scanning half angle theta by a laser triangulation method according to the length A of the scanning line and the distance L from the scanning grating micro-mirror 3 to the PSD4 photosensitive surface, and calculating the mechanical scanning half angle theta according to the optical scanning half angle theta0The calculation formula is as follows:
in this embodiment, the laser is a laser emitting module, and the laser wavelength is 650 nm; scanning the grating micro-mirror to be a device to be tested; the PSD and the signal processing circuit thereof are used for sensing the light intensity and the position information of the emergent light spot and converting the light intensity and the position information into voltage signals; the upper computer is provided with data processing software which is used for processing and counting signals output by the PSDCalculating and obtaining a mechanical scanning half angle theta0And so on.
In this embodiment, the upper computer is a computer.
In this embodiment, a method for testing electromechanical performance of a scanning grating micro-mirror adopts the system for testing electromechanical performance of a scanning grating micro-mirror as described in this embodiment, and the method includes the following steps:
When a driving voltage with a larger amplitude is applied to the scanning grating micro-mirror 3 and a signal frequency is equal to a driving signal of the resonance frequency of the scanning grating micro-mirror, the scanning grating micro-mirror 3 is in a resonance state and has a larger amplitude, at the moment, an emergent light spot of the scanning grating micro-mirror 3 performs periodic reciprocating scanning on a PSD4 photosensitive surface according to the same frequency, and a plurality of mutually overlapped scanning lines are presented on a PSD 4; as shown in fig. 3. The information of the position of the scanning light spot changing along with the time is output to an upper computer 6 through a signal processing circuit 7 of a PSD 4; the upper computer 6 performs curve fitting on the output signal of the signal processing circuit 7, and brings the amplitude of the fitted curve into a PSD calibration model to obtain the length A of the scanning line; the method specifically comprises the following steps:
the signal processing circuit 7 of the PSD4 outputs two analog output quantities, namely a sum current (XH) and a difference current (XC), wherein the ratio (XC/XH) of the sum current and the difference current can be used for accurately reflecting the motion track of the light spot on the photosensitive surface of the PSD 4; meanwhile, the sum current value can also accurately reflect the intensity of the light received by the photosensitive surface of the PSD4, and the non-overlapped part of the light level on the PSD4 can be distinguished based on the sum current, wherein in the embodiment, the non-overlapped part of the light level is the motion track of the 0-th-level light spot 8 on the photosensitive surface of the PSD 4. And calculating the ratio of the sum current to the difference current of the non-overlapped part of the light level based on the non-overlapped part of the light level, performing curve fitting on the calculated data of the ratio of the sum current to the difference current of the non-overlapped part of the light level, and bringing the amplitude of the fitted curve into a PSD calibration model to obtain the length A of the scanning line.
In this embodiment, the PSD calibration model is a corresponding relationship (as shown in fig. 4, the two are in a direct ratio relationship) between the amplitude of a curve fitted based on the output signal of the signal processing circuit 7 of the PSD4 and the distance from the emergent light spot to the center of the PSD4, and the scan line length a is equal to the distance from the emergent light spot to the center of the PSD multiplied by 2.
According to the length A of the scanning line and the distance L from the scanning grating micro-mirror 3 to the photosensitive surface of PSD4, the optical scanning half-angle theta can be calculated by the laser triangulation method, and the mechanical scanning half-angle theta can be calculated according to the optical scanning half-angle theta0The calculation formula is as follows:
in this embodiment, the laser ranging module is used to measure the linear distance from the raster scanning micromirror to the PSD4 photosensitive surface for multiple times (e.g. 5 times), and the average of the five times of measured data is taken as the distance L from the scanning raster micromirror 3 to the PSD4 photosensitive surface.
In this embodiment, when the optical path is adjusted, the outgoing light of the laser 1 is kept perpendicular to the surface of the beam splitter 2, and the reflected light of the beam splitter 2 is kept perpendicular to the scanning grating micromirror 3. The 0 th level light spot reflected by the scanning grating micro-mirror 3 is vertically incident to the central position of the PSD4 photosensitive surface through the beam splitter 2; to ensure the testing accuracy.
Claims (5)
1. A scanning grating micro-mirror electromechanical performance test system is characterized in that: the device comprises a laser (1), a beam splitter (2), a PSD (4), a signal generator (5) and an upper computer (6); the relative position relation among the laser (1), the beam splitter (2), the PSD (4) and the scanning grating micro-mirror (3) to be measured should meet the following requirements:
when the scanning grating micro-mirror (3) is in a static state and no driving voltage is applied to the scanning grating micro-mirror (3), emergent light of the laser (1) is vertically incident to the beam splitter (2), the incident light is vertically incident to the mirror surface of the scanning grating micro-mirror (3) through the beam splitter (2), and a 0-level light spot (8) reflected by the scanning grating micro-mirror (3) is vertically incident to the central position of the photosensitive surface of the PSD (4) through the beam splitter (2);
the output end of the signal generator (5) is connected with a driving coil of the scanning grating micro-mirror (3), and the PSD (4) is electrically connected with an upper computer (6); the signal generator (5) is used for outputting a driving signal with a preset amplitude value to drive the scanning grating micro-mirror (3) to vibrate, and light emitted by the laser (1) passes through the beam splitter (2) and then is reflected by the scanning grating micro-mirror (3) to form light which is scanned on the photosensitive surface of the PSD (4); the track of the light moving on the PSD (4) is read by a signal processing circuit (7) of the PSD (4) and input to an upper computer (6) for processing to obtain the length A of a scanning line; and calculating the optical scanning half angle theta according to the scanning line length A and the distance L from the scanning grating micro-mirror (3) to the photosensitive surface of the PSD (4), and calculating the mechanical scanning half angle theta according to the optical scanning half angle theta0The calculation formula is as follows:
2. a method for testing electromechanical performance of a scanning grating micro-mirror is characterized in that: the electromechanical performance testing system using the scanning grating micro-mirror as claimed in claim 1, wherein the method comprises the steps of:
step 1, adjusting a light path: when the scanning grating micro-mirror (3) is in a static state and no driving voltage is applied to the scanning grating micro-mirror (3), emergent light of the laser (1) is vertically incident to the beam splitter (2), the incident light is vertically incident to the mirror surface of the scanning grating micro-mirror (3) through the beam splitter (2), and a 0-level light spot (8) reflected by the scanning grating micro-mirror (3) is vertically incident to the central position of the photosensitive surface of the PSD (4) through the beam splitter (2);
step 2, testing: the signal generator (5) outputs a driving signal with a preset amplitude to the scanning grating micro-mirror (3), drives the scanning grating micro-mirror (3) to vibrate, and enables the scanning grating micro-mirror (3) to be in a resonance state by adjusting the frequency of the driving signal; at the moment, the emergent light spots of the scanning grating micro-mirror (3) are periodically scanned back and forth on the photosensitive surface of the PSD (4) according to the same frequency, and a plurality of mutually overlapped scanning lines are shown on the PSD (4); the information of the position of the scanning light spot changing along with the time is output to an upper computer (6) through a signal processing circuit (7) of the PSD (4); the upper computer (6) performs curve fitting on the output signal of the signal processing circuit (7), and brings the amplitude of the fitted curve into a PSD calibration model to obtain the length A of the scanning line; calculating an optical scanning half angle theta according to the scanning line length A and the distance L from the scanning grating micro-mirror (3) to the photosensitive surface of the PSD (4), and calculating a mechanical scanning half angle theta according to the optical scanning half angle theta0The calculation formula is as follows:
the PSD calibration model is a corresponding relation between the amplitude of a curve fitted by an output signal of a signal processing circuit (7) based on the PSD (4) and the distance from an emergent light spot to the center of the PSD (4), and the length A of the scanning line is equal to the distance from the emergent light spot to the center of the PSD multiplied by 2.
3. The method for testing the electromechanical performance of a scanning grating micro-mirror according to claim 2, wherein: the laser ranging module is used for measuring the linear distance from the grating scanning micro-mirror to the photosensitive surface of the PSD (4) for multiple times, and the average value of the measured data is taken as the distance L from the scanning grating micro-mirror (3) to the photosensitive surface of the PSD (4).
4. The method for testing the electromechanical performance of the scanning grating micro-mirror according to claim 2 or 3, wherein: when the light path is adjusted, the emergent light of the laser (1) is kept vertical to the surface of the beam splitter (2), and the reflected light of the beam splitter (2) is kept vertical to the scanning grating micro-mirror (3).
5. The method for testing the electromechanical performance of the scanning grating micro-mirror as claimed in claim 4, wherein: the signal processing circuit (7) of the PSD (4) outputs two analog output quantities which are sum current and difference current respectively, the non-overlapped part of the light level on the photosensitive surface of the PSD (4) is distinguished based on the sum current, the ratio of the sum current and the difference current of the non-overlapped part of the light level is calculated, curve fitting is carried out on the calculated data of the ratio of the sum current and the difference current of the non-overlapped part of the light level, the fitting result is brought into a PSD calibration model, and the length A of a scanning line is obtained.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184547A (en) * | 2021-11-29 | 2022-03-15 | 重庆川仪自动化股份有限公司 | Control method for scanning grating micro-mirror mechanical swing angle based on double closed loops |
| CN116106717A (en) * | 2023-04-12 | 2023-05-12 | 合肥瀚博智能科技有限公司 | Intelligent detection and analysis system for integrated micro-optical-electromechanical semiconductor device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR780051A (en) * | 1933-10-12 | 1935-04-18 | Emi Ltd | Improvements to television devices and similar systems |
| CN101093584A (en) * | 2007-08-02 | 2007-12-26 | 中兴通讯股份有限公司 | Method and device for creating thick line |
| CN210776030U (en) * | 2019-11-26 | 2020-06-16 | 西安知微传感技术有限公司 | Resonant scanning mirror based on photoelectric feedback |
| CN111982028A (en) * | 2020-07-23 | 2020-11-24 | 浙江大学 | Laser radar scanning galvanometer three-dimensional angle measuring device and method |
-
2020
- 2020-12-19 CN CN202011512332.XA patent/CN112710256B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR780051A (en) * | 1933-10-12 | 1935-04-18 | Emi Ltd | Improvements to television devices and similar systems |
| CN101093584A (en) * | 2007-08-02 | 2007-12-26 | 中兴通讯股份有限公司 | Method and device for creating thick line |
| CN210776030U (en) * | 2019-11-26 | 2020-06-16 | 西安知微传感技术有限公司 | Resonant scanning mirror based on photoelectric feedback |
| CN111982028A (en) * | 2020-07-23 | 2020-11-24 | 浙江大学 | Laser radar scanning galvanometer three-dimensional angle measuring device and method |
Non-Patent Citations (1)
| Title |
|---|
| 罗彪等: "MOEMS扫描微镜的测试实验与分析", 《纳米技术与精密工程》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184547A (en) * | 2021-11-29 | 2022-03-15 | 重庆川仪自动化股份有限公司 | Control method for scanning grating micro-mirror mechanical swing angle based on double closed loops |
| CN114184547B (en) * | 2021-11-29 | 2024-05-14 | 重庆川仪自动化股份有限公司 | Control method for mechanical swing angle of scanning grating micro-mirror based on double closed loops |
| CN116106717A (en) * | 2023-04-12 | 2023-05-12 | 合肥瀚博智能科技有限公司 | Intelligent detection and analysis system for integrated micro-optical-electromechanical semiconductor device |
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