CN112657946A - Cleaning device and exposure machine - Google Patents
Cleaning device and exposure machine Download PDFInfo
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- CN112657946A CN112657946A CN202011392120.2A CN202011392120A CN112657946A CN 112657946 A CN112657946 A CN 112657946A CN 202011392120 A CN202011392120 A CN 202011392120A CN 112657946 A CN112657946 A CN 112657946A
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- suction nozzle
- cleaning device
- adsorption part
- exposure machine
- cleaning
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Abstract
The embodiment of the application discloses cleaning device and exposure machine, wherein, this cleaning device includes: a housing including a bottom plate and a sidewall; the suction nozzle is arranged on the bottom plate and used for sucking dust particles on the bearing table into the suction nozzle; the electrostatic adsorption piece is fixed on the shell and comprises a first adsorption part and a second adsorption part, the first adsorption part is arranged on the first side of the suction nozzle, and the second adsorption part is arranged on the second side of the suction nozzle; and the delivery pipe is connected with the suction nozzle and used for delivering the dust particles in the suction nozzle. The cleaning device and the exposure machine of the embodiment of the application can improve the cleaning effect.
Description
Technical Field
The application relates to the technical field of display, in particular to a cleaning device and an exposure machine.
Background
In the process of manufacturing a Liquid Crystal Display (LCD) panel, an exposure machine is a key device for manufacturing a fine pixel pattern. As shown in fig. 1, in order to prevent static electricity, the carrier 10' of the conventional exposure machine is usually a non-flat structure (i.e. the carrier 101 is a non-flat surface), but this structure is easy to accumulate dust, grinding dust, etc. during the panel running process or no-load state, and the dust will cause deformation of the glass surface on the bottom surface of the glass, and during the exposure process, the color resistance cross-linking reaction is not uniform due to the deformation of the glass surface, and further the brightness is not uniform, thereby causing abnormal display quality.
At present, an adhesive tool is mainly used for cleaning the bearing table, but the bearing table with a non-flat structure cannot be effectively cleaned in the mode, and the cleaning effect is reduced.
Disclosure of Invention
The embodiment of the application provides a cleaning device and an exposure machine, which can improve the cleaning effect.
The embodiment of the application provides a cleaning device, which is used for cleaning a bearing table of an exposure machine; it includes:
a housing including a bottom plate and a sidewall;
the suction nozzle is arranged on the bottom plate and used for sucking dust particles on the bearing table into the suction nozzle;
the electrostatic adsorption piece is fixed on the shell and comprises a first adsorption part and a second adsorption part, the first adsorption part is arranged on the first side of the suction nozzle, and the second adsorption part is arranged on the second side of the suction nozzle;
and the guide-out pipe is connected with the suction nozzle and used for guiding out the dust particles in the suction nozzle.
The invention also provides an exposure machine which comprises the cleaning device.
The cleaning device and the exposure machine comprise a shell, a cleaning device and a light source, wherein the shell comprises a bottom plate and a side wall; the suction nozzle is arranged on the bottom plate and used for sucking dust particles on the bearing table into the suction nozzle; the electrostatic adsorption piece is fixed on the shell and comprises a first adsorption part and a second adsorption part, the first adsorption part is arranged on the first side of the suction nozzle, and the second adsorption part is arranged on the second side of the suction nozzle; the delivery pipe is connected with the suction nozzle and is used for delivering the dust particles in the suction nozzle; because the adsorption mode is adopted for cleaning, the cleaning effect is improved, and the product yield is further improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic cross-sectional view of a conventional susceptor.
Fig. 2 is a schematic structural diagram of a cleaning device according to an embodiment of the present application.
Fig. 3 is a schematic structural diagram of a first cleaning portion according to an embodiment of the present disclosure.
Fig. 4 is a schematic structural diagram of a cleaning device according to another embodiment of the present application.
Fig. 5 is a schematic structural diagram of an exposure machine according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
Referring to fig. 2 to 5, fig. 2 is a schematic structural diagram of a cleaning device according to an embodiment of the present disclosure.
As shown in fig. 2, the cleaning device 100 is used for cleaning a carrying table of an exposure machine; the cleaning device 100 includes: the electrostatic chuck includes a housing 10, a suction nozzle 20, an electrostatic adsorbing member 30, and a delivery pipe 40.
The housing 10 includes a bottom plate 11 and a side wall 12. In one embodiment, the base plate 11 may be provided with a lug 13. Wherein the side walls 12 are disposed at both sides of the bottom plate 11.
A suction nozzle 20 is arranged on the bottom plate 11, and the suction nozzle 20 is used for sucking dust particles on the bearing platform into the suction nozzle; in one embodiment, the suction nozzle 20 may be flat, so as to increase the suction range and improve the suction effect. The cross-sectional shape of the suction nozzle 20 may be an ellipse. Of course, in other embodiments, the cross-sectional shape of the nozzle 20 can be rectangular, trapezoidal, circular, etc.
An electrostatic adsorption member 30 is fixed on the housing 10, the electrostatic adsorption member 30 includes a first adsorption part 31 and a second adsorption part 32, the first adsorption part 31 is disposed on a first side of the suction nozzle 20, and the second adsorption part 32 is disposed on a second side of the suction nozzle 20; the first side is for example a front side and the second side is for example a rear side. In a preferred embodiment, the first adsorption part 31 and the second adsorption part 32 may be arranged side by side.
The delivery pipe 40 is connected with the suction nozzle 20, and the delivery pipe 40 is used for delivering the dust particles in the nozzle of the suction nozzle 20. In one embodiment, the housing 10 is fastened to the delivery tube 40 in order to further increase the stability of the cleaning device 100, wherein the lugs 13 can be fastened to the delivery tube 40 in order to further increase the stability of the cleaning device 100. For example, in one embodiment, the lugs 13 are bolted to the delivery tube 40. The specific fixing manner is not limited thereto.
In one embodiment, in order to improve the suction effect, referring to fig. 3, the first suction part 31 includes a roller 311 and an electrostatic absorption layer 312, the electrostatic absorption layer 312 covers the side surface of the roller 311, and both ends of the roller 311 are fixed on the side walls 12. In one embodiment, the electrostatic absorption layer 312 is an antistatic adhesive layer. The second suction part 32 has the same structure as the first suction part 31. When the first adsorption part adopts the structure and the roller rolls, the suction nozzle can be driven to move on the bearing platform, so that the particle foreign matters on the whole bearing platform can be adsorbed.
In an embodiment, returning to fig. 2, in order to increase the flexibility of the cleaning device, the cleaning device 100 further comprises a connecting tube 50; the delivery tube 40 is connected to the suction nozzle 20 through the connection tube 50. In one embodiment, the connection pipe 50 is a hose so that the housing can be flexibly rotated in order to improve the flexibility of the cleaning apparatus. Wherein the inner diameter of the delivery tube 40 is slightly larger than the outer diameter of the connection tube 50. In one embodiment, one end of the connection pipe 50 is inserted into the delivery pipe 40, and one end of the connection pipe 50 is inserted into the suction nozzle 20. In one embodiment, the two ends of the connection tube 50 can be fixed to the delivery tube 40 and the suction nozzle 20 by a fixing member, respectively.
In one embodiment, the delivery tube 40 is a metal tube to increase the rigidity of the delivery tube, i.e., the delivery tube 40 may be used as a handle.
In one embodiment, as shown in fig. 4, the cleaning device 100 may further include a suction device 60; the end of the delivery tube 40 away from the connection tube 50 is connected to the suction device 60. The suction device 60 may be a central suction system or a mobile suction machine, and the specific structure is not limited.
In the specific working process, the delivery pipe 40 is connected to a vacuum air source from the outside, and the suction nozzle 20 sucks away dust particles on the bearing platform, so as to clean the bearing platform.
It is to be understood that fig. 2 to 4 are only given as examples and are not intended to limit the present invention.
As shown in fig. 5, the present embodiment further provides an exposure machine 200, which includes any one of the cleaning devices 100 described above.
In one embodiment, the exposure machine 200 includes a support stage 70, the support stage 70 has a support surface 71, and the support surface 71 is used for supporting the display panel;
the cleaning device 100 is disposed on the supporting surface 71, the supporting surface 71 is a non-flat surface, and the structure of the supporting surface 71 may be the same as that of 101 in fig. 1.
It is to be understood that fig. 5 is only an example and is not intended to limit the present invention.
The cleaning device and the exposure machine comprise a shell, a cleaning device and a light source, wherein the shell comprises a bottom plate and a side wall; the suction nozzle is arranged on the bottom plate and used for sucking dust particles on the bearing table into the suction nozzle; the electrostatic adsorption piece is fixed on the shell and comprises a first adsorption part and a second adsorption part, the first adsorption part is arranged on the first side of the suction nozzle, and the second adsorption part is arranged on the second side of the suction nozzle; the delivery pipe is connected with the suction nozzle and is used for delivering the dust particles in the suction nozzle; because the adsorption mode is adopted for cleaning, the bearing table with the non-flat structure can be effectively cleaned, the cleaning effect is improved, and the product yield is further improved.
The cleaning device and the exposure machine provided by the embodiments of the present application are described in detail above, and the principles and embodiments of the present application are explained herein by applying specific examples, and the descriptions of the above embodiments are only used to help understanding the present application. Meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. The cleaning device is characterized by being used for cleaning a bearing table of an exposure machine; it includes:
a housing including a bottom plate and a sidewall;
the suction nozzle is arranged on the bottom plate and used for sucking dust particles on the bearing table into the suction nozzle;
the electrostatic adsorption piece is fixed on the shell and comprises a first adsorption part and a second adsorption part, the first adsorption part is arranged on the first side of the suction nozzle, and the second adsorption part is arranged on the second side of the suction nozzle;
and the guide-out pipe is connected with the suction nozzle and used for guiding out the dust particles in the suction nozzle.
2. The cleaning apparatus of claim 1,
the first adsorption part and the second adsorption part comprise rollers and electrostatic adsorption layers, the electrostatic adsorption layers are coated outside the side faces of the rollers, and two ends of each roller are fixed on the side walls.
3. The cleaning device of claim 2, wherein the electrostatic adsorption layer is an antistatic glue layer.
4. The cleaning device of claim 1, further comprising a connecting tube;
the delivery pipe is connected with the suction nozzle through the connecting pipe.
5. The cleaning apparatus defined in claim 4, further comprising a suction device;
and one end of the delivery pipe, which is far away from the connecting pipe, is connected with the air suction device.
6. The cleaning apparatus of claim 1,
the shell is fixed on the delivery pipe.
7. The cleaning apparatus of claim 6,
the bottom plate is provided with a lug which is fixed on the delivery pipe.
8. The cleaning apparatus of claim 1,
the suction nozzle is flat.
9. An exposure machine characterized by comprising the cleaning device according to any one of claims 1 to 8.
10. Exposure machine according to claim 9,
the exposure machine comprises a bearing table, wherein the bearing table is provided with a bearing surface for placing a display panel;
the cleaning device is arranged on the bearing surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011392120.2A CN112657946A (en) | 2020-12-02 | 2020-12-02 | Cleaning device and exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011392120.2A CN112657946A (en) | 2020-12-02 | 2020-12-02 | Cleaning device and exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112657946A true CN112657946A (en) | 2021-04-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011392120.2A Pending CN112657946A (en) | 2020-12-02 | 2020-12-02 | Cleaning device and exposure machine |
Country Status (1)
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| CN (1) | CN112657946A (en) |
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Application publication date: 20210416 |