CN112635366B - UV machine wafer iron frame positioner - Google Patents
UV machine wafer iron frame positioner Download PDFInfo
- Publication number
- CN112635366B CN112635366B CN202011549660.7A CN202011549660A CN112635366B CN 112635366 B CN112635366 B CN 112635366B CN 202011549660 A CN202011549660 A CN 202011549660A CN 112635366 B CN112635366 B CN 112635366B
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 title claims abstract description 160
- 229910052742 iron Inorganic materials 0.000 title claims abstract description 80
- 238000009434 installation Methods 0.000 claims description 2
- 230000035515 penetration Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000003760 hair shine Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a UV machine wafer iron frame positioning device which comprises a UV machine irradiation platform body, a limiting groove and a fastening block, wherein an irradiation lens is arranged at the inner bottom of the UV machine irradiation platform body, a connecting frame is arranged at the outer side of the irradiation lens, the limiting groove is formed in the bottom of the connecting frame, a fixing plate is fixedly arranged at the top of the connecting frame, the fastening block is inlaid at the left end and the right end of the inner part of the top of the connecting frame, a limiting block is arranged above the irradiation lens, a first fixing groove is formed in the irradiation lens, a first placing groove is connected to the outer side of the first fixing groove, a connecting groove is connected to the bottom of the first placing groove, a positioning iron frame is arranged above the limiting block, and a connecting block is connected to the bottom of the positioning iron frame. The wafer iron frame positioning device of the UV machine is not only difficult to enable the wafer iron frame to tilt and convenient to detach, but also difficult to enable the surface of the device to fall ash.
Description
Technical Field
The invention relates to the technical field of UV machines, in particular to a wafer iron frame positioning device of a UV machine.
Background
The UV machine is a device for wafer blue film de-sizing in the semiconductor industry, and the wafer iron frame positioning disc is a fixing device which is placed on the wafer irradiation platform and used for positioning the iron frame and preventing the iron frame from being placed and offset to cause surface scratch of the wafer.
At present, a conventional positioning device for a wafer iron frame of a UV machine still has certain disadvantages, such as:
1. the conventional use method of the wafer iron frame positioning device of the UV machine is that an iron frame positioning disc on an irradiation platform of the UV machine is a plane, a person manually places a wafer on the positioning disc, the phenomenon that one end of the wafer is tilted due to the fact that the iron frame is not placed in place is easy to occur due to the fact that the positioning disc is not provided with a device for fixing the iron frame position, and then the person easily scratches the tilted wafer surface when closing an upper cover of the UV machine, so that the product is lost;
2. the conventional wafer iron frame positioning device of the UV machine is inconvenient to detach, so that the cleaning of parts in the wafer iron frame positioning device is inconvenient to wipe and is not thorough;
3. the conventional wafer iron frame positioning device of the UV machine has no shielding after the use, and dust is easy to accumulate, so that the correct use of the wafer iron frame positioning device is affected.
Therefore, we propose a positioning device for a wafer iron frame of a UV machine, so as to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to provide a wafer iron frame positioning device of a UV machine, which solves the problems that the wafer iron frame is easy to tilt, the wafer iron frame is inconvenient to detach and the surface of the device is easy to fall ash in the conventional wafer iron frame positioning device of the UV machine provided by the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a UV machine wafer iron frame positioner, includes UV machine irradiation platform body, spacing groove and fastening piece, the inside bottom of UV machine irradiation platform body is installed and is shone the lens, and shines the outside of lens and install connecting frame, the spacing groove is seted up in connecting frame's bottom position, and connecting frame's top fixed mounting has the fixed plate, the fastening piece all has the mosaic installation at connecting frame's inside left and right sides both ends in connecting frame's top, the stopper is installed to the top of shining the lens, and shines the inside of lens and has seted up first fixed slot, the outside of first fixed slot is connected with first standing groove, and the bottom of first standing groove is connected with the spread groove, the top of stopper is installed and is connected with the connecting block, the top of positioning iron frame is inlayed and is installed the carrier block, the second carrier groove has been seted up to connecting frame's front side, and the inside of second carrier groove has seted up first spacing hole, the central point of connecting frame is put and has the fixed orifices, the central point of stopper is put and installs the stopper in the top rubber, the rubber top is seted up the rubber top of rubber mounting groove, the bottom plate has the second side of rubber mounting groove has the bottom plate, the bottom plate has the bottom plate, the bottom of the bottom plate has the second side of the top of two side of the rubber mounting groove, the top of two rubber mounting groove has the top of the UV machine, the top of two side of the UV machine mounting plate has the top UV machine bottom to be all set up the top hole, the inside of first spacing hole runs through and installs the fastening rod.
Preferably, the connecting frame, the limiting groove and the fixing plate are of an integrated structure, and the fixing plate is obliquely arranged in the connecting frame.
Preferably, the connecting frame is fixedly arranged with the UV machine irradiation platform body through a fastening rod, and the connection mode between the UV machine irradiation platform body and the fastening rod is threaded connection.
Preferably, the fastening block is arranged corresponding to the bearing block, and the fastening block is magnetically connected with the bearing block.
Preferably, the first fixing groove, the first placing groove and the connecting groove are communicated, and the width of the first fixing groove is larger than that of the first placing groove.
Preferably, a rotating structure is formed between the positioning iron frame and the limiting block, and a disassembling structure is formed between the positioning iron frame and the UV machine irradiation platform body.
Preferably, the connection mode between the positioning iron frame and the rubber cover plate is lap joint, and the positioning iron frame and the connecting block are of an integrated structure.
Preferably, the upper surface of the rubber cover plate and the upper surface of the UV machine irradiation platform body are in the same plane, and the central axis of the UV machine irradiation platform body is coincident with the central axis of the rubber cover plate.
Preferably, the lifting device comprises a lifting rod and a lifting handle, the lifting rod is arranged in the second placing groove, and a rotating structure is formed between the lifting rod and the rubber cover plate;
the length of the lifting rod is greater than that of the rubber cover plate, and the diameter of the rubber cover plate is equal to that of the second limiting hole.
Compared with the prior art, the invention has the beneficial effects that: the wafer iron frame positioning device of the UV machine not only is not easy to enable the wafer iron frame to tilt and is convenient to detach, but also is not easy to enable the surface of the device to fall ash;
1, an irradiation lens is mounted at the bottom of an irradiation platform body of a UV machine in a clamping manner, so that the irradiation lens is attached to a rubber cover plate, the rubber cover plate can shield the irradiation platform body of the UV machine, dust falling of the device when the device is not used is avoided, a rotating structure is formed between the rubber cover plate and a lifting rod, and the rubber cover plate and the irradiation platform body of the UV machine are convenient to detach;
2. the first fixing groove, the first placing groove and the connecting groove are formed in the limiting block, the connecting block is fixedly arranged at the bottom of the positioning iron frame, the vertical section of the connecting block is of a T-shaped structure, and the positioning iron frame and the limiting block are convenient to fix;
3. the bearing block is installed to the inside mosaic of location chase, and the bearing block corresponds the setting with the fastening piece, and the connected mode between bearing block and the fastening piece is magnetic connection, can make location chase and stopper closely laminate, avoids the device to fix a position the chase perk in the in-process of using to the convenience is dismantled the location chase.
Drawings
FIG. 1 is a schematic view of the front cut-away structure of the present invention;
FIG. 2 is a schematic top view of the present invention;
FIG. 3 is a schematic top view of a positioning iron frame according to the present invention;
FIG. 4 is a schematic view of the overall structure of the connecting frame of the present invention;
FIG. 5 is a schematic diagram of a top view of the connection between the UV machine irradiation platform body and the connection frame;
FIG. 6 is a schematic diagram of a structure of a rubber cover plate and a lifting device in a top view;
FIG. 7 is a schematic diagram showing a top view of a first placement slot and a connecting slot connection structure according to the present invention;
fig. 8 is an enlarged schematic view of the structure of fig. 1 a according to the present invention.
In the figure: 1. irradiating the platform body by a UV machine; 2. irradiating the lens; 3. a connection frame; 4. a limit groove; 5. a fastening block; 6. a limiting block; 7. a first fixing groove; 8. a first placement groove; 9. a connecting groove; 10. positioning an iron frame; 11. a connecting block; 12. a bearing block; 13. a first limiting hole; 14. a fixing hole; 15. a connection hole; 16. a rubber cover plate; 17. a rubber bottom plate; 18. a lifting device; 1801. a lifting rod; 1802. a lifting handle; 19. a first placement hole; 20. a second fixing groove; 21. a first carrying groove; 22. a second limiting hole; 23. a second placement groove; 24. a fixing plate; 25. a second placement hole; 26. a second carrying groove; 27. and a fastening rod.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-8, the present invention provides a technical solution: the utility model provides a UV machine wafer iron frame positioner, including UV machine irradiation platform body 1, irradiation lens 2, the connection frame 3, spacing groove 4, fastening piece 5, stopper 6, first fixed slot 7, first standing groove 8, connecting groove 9, location iron frame 10, connecting block 11, carrier block 12, first spacing hole 13, fixed orifices 14, connecting hole 15, rubber apron 16, rubber bottom plate 17, pulling device 18, first standing hole 19, second fixed slot 20, first carrier groove 21, second spacing hole 22, second standing groove 23, fixed plate 24, second standing hole 25, second carrier groove 26 and fastening rod 27, irradiation lens 2 is installed to the inside bottom of UV machine irradiation platform body 1, and the connecting frame 3 is installed in the outside of irradiation lens 2, connecting frame 3, spacing groove 4 and fixed plate 24 are integrated structure, and fixed plate 24 inclines to set up in the inside of connecting frame 3, the fixing plate 24 facilitates the positioning of the iron frame 10, the upper surface of the positioning iron frame 10 and the upper surface of the UV machine irradiation platform body 1 are positioned in the same plane, the limiting groove 4 is arranged at the bottom of the connecting frame 3, the fixing plate 24 is fixedly arranged at the top of the connecting frame 3, the fastening block 5 is embedded at the left and right ends of the inside of the top of the connecting frame 3, the limiting block 6 is arranged above the irradiation lens 2, the first fixing groove 7 is arranged in the irradiation lens 2, the first placing groove 8 is connected with the outer side of the first fixing groove 7, the bottom of the first placing groove 8 is connected with the connecting groove 9, the connecting frame 3 is fixedly arranged with the UV machine irradiation platform body 1 through the fastening rod 27, the connecting mode between the UV machine irradiation platform body 1 and the fastening rod 27 is in threaded connection, the UV machine irradiation platform body 1 and the fastening rod 27 are convenient to fix, the fastening block 5 and the bearing block 12 are correspondingly arranged, the connection mode between the fastening block 5 and the bearing block 12 is magnetic connection, the fastening block 5 and the bearing block 12 are convenient to fix, the first fixing groove 7, the first placing groove 8 and the connecting groove 9 are communicated, the width of the first fixing groove 7 is larger than that of the first placing groove 8, the connecting block 11 can be placed by the first fixing groove 7, the locating iron frame 10 is arranged above the limiting block 6, the connecting block 11 is connected with the bottom of the locating iron frame 10, a rotating structure is formed between the locating iron frame 10 and the limiting block 6, a disassembling structure is formed between the locating iron frame 10 and the UV machine irradiation platform body 1, the locating iron frame 10 and the limiting block 6 are convenient to fix, the connection mode between the locating iron frame 10 and the rubber cover plate 16 is lap joint, the locating iron frame 10 and the connecting block 11 are of an integrated structure, the rubber cover plate 16 can shield the central position of the UV machine irradiation platform body 1, avoid the surface dust falling of the UV machine irradiation platform body 1, the top of the positioning iron frame 10 is embedded and provided with the bearing block 12, the front side of the connecting frame 3 is provided with the second bearing groove 26, the inside of the second bearing groove 26 is provided with the first limit hole 13, the central position of the connecting frame 3 is provided with the fixed hole 14, the central position of the limit block 6 is provided with the connecting hole 15, the rubber cover plate 16 is arranged above the limit block 6, the upper surface of the rubber cover plate 16 is in the same plane with the upper surface of the UV machine irradiation platform body 1, the central axis of the UV machine irradiation platform body 1 coincides with the central axis of the rubber cover plate 16, the rubber cover plate 16 is not easy to fall off from the upper surface of the UV machine irradiation platform body 1, the bottom of the rubber cover plate 16 is connected with the rubber bottom plate 17, the top of the rubber cover plate 16 is provided with the lifting device 18, the first hole 19 of placing has been seted up to the central point of location chase 10, and the second fixed slot 20 has all been seted up at the left and right sides both ends of location chase 10, first loading groove 21 has been seted up to the inside bottom of UV machine irradiation platform body 1, and the second spacing hole 22 has been seted up at the inside bottom top of UV machine irradiation platform body 1, the second standing groove 23 has been seted up at the top central point of rubber apron 16, and the second hole 25 of placing has all been seted up to the left and right sides of second standing groove 23, the inside through-mounting of first spacing hole 13 has fastening rod 27.
As shown in fig. 6, the pulling device 18 includes a pulling rod 1801 and a pulling handle 1802, the pulling rod 1801 is installed inside the second placing groove 23, a rotating structure is formed between the pulling rod 1801 and the rubber cover 16, and the pulling rod 1801 and the pulling handle 1802 rotate to facilitate pulling the rubber cover 16.
As shown in fig. 2 and 6, the length of the lifting rod 1801 is greater than the length of the rubber cover plate 16, and the diameter of the rubber cover plate 16 is equal to the diameter of the second limiting hole 22, so that the lifting rod 1801 and the rubber cover plate 16 are fixed, the lifting rod 1801 is not easy to fall off from the rubber cover plate 16, after the lifting rod 1801 is rotated, the lifting rod 1801 is in a state parallel to the rubber cover plate 16, at this time, the lifting rod 1801 is placed in the second placing groove 23, and the lifting rod 1801 cannot exceed the upper surface of the rubber cover plate 16.
Working principle: when the UV machine wafer iron frame positioning device is used, as in the case of FIG. 1, a first bearing groove 21 is formed in the UV machine irradiation platform body 1, the first bearing groove 21 can be used for placing an irradiation lens 2, the irradiation lens 2 is tightly attached to the UV machine irradiation platform body 1, the connection mode between the UV machine irradiation platform body 1 and the connection frame 3 is in clamping connection, the connection frame 3 is fixedly arranged with the UV machine irradiation platform body 1 through a fastening rod 27, the connection mode between the irradiation lens 2 and a limiting block 6 is lap joint, a first fixing groove 7, a first placing groove 8 and a connecting groove 9 are formed in the inner part of the limiting block 6, a connecting block 11 is fixedly arranged at the bottom of the positioning iron frame 10, the connecting block 11 is inserted into the first fixing groove 7 when in use, the positioning iron frame 10 is rotated, the positioning iron frame 10 and the limiting block 6 are fixed, a bearing block 12 is embedded in the inner part of the positioning iron frame 10, the bearing block 12 is correspondingly arranged with the fastening block 5, the connection mode between the bearing block 12 and the fastening block 5 is magnetic connection, the positioning iron frame 10 is further fixed, the positioning iron frame 10 is prevented from tilting in the using process of the device, the positioning iron frame 10 is protected, meanwhile, the positioning iron frame 10 is conveniently taken down from the limiting block 6, the irradiation lens 2 is arranged at the bottom of the UV machine irradiation platform body 1, the rubber cover plate 16 is mounted above the irradiation lens 2 in a fitting way, the rubber cover plate 16 can shield the UV machine irradiation platform body 1, ash falling of the device when the device is not used is avoided, a rotating structure is formed between the rubber cover plate 16 and the lifting rod 1801, the rubber cover plate 16 is conveniently lifted, the left end and the right end of the positioning iron frame 10 are provided with the second fixing grooves 20, gaps are reserved between the second fixing grooves 20 and the connecting frame 3, the locating iron frame 10 is convenient to take down, the locating iron frame 10 is convenient to clean, the second bearing groove 26 is formed in the front end of the connecting frame 3, the limiting block 6 and the locating iron frame 10 are convenient to take out, and the whole working process of the locating device for the wafer iron frame of the UV machine is achieved.
What is not described in detail in this specification is prior art known to those skilled in the art. Standard parts used in the invention can be purchased from the market, special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of all parts adopt conventional means such as mature bolts, rivets and welding in the prior art, the machinery, the parts and the equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection modes in the prior art, so that the details are not described.
Although the present invention has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present invention.
Claims (10)
1. The utility model provides a UV machine wafer iron frame positioner, includes UV machine irradiation platform body (1), spacing groove (4) and fastening piece (5), its characterized in that: the UV machine irradiates the inside bottom of platform body (1) and installs and shine lens (2), and the outside of shining lens (2) is installed connecting frame (3), the bottom position at connecting frame (3) is seted up in spacing groove (4), and the top fixed mounting of connecting frame (3) has fixed plate (24), both ends all have the mosaic installation about the top of connecting frame (3) are in fastening piece (5), the stopper (6) are installed to the top of shining lens (2), and the inside of shining lens (2) has seted up first fixed slot (7), the outside of first fixed slot (7) is connected with first standing groove (8), and the bottom of first standing groove (8) is connected with connecting groove (9), location iron frame (10) are installed to the top of stopper (6), and the bottom of location iron frame (10) is connected with connecting block (11), the top of location iron frame (10) is inlayed and is installed carrier block (12), the front side of connecting frame (3) has been seted up second carrier groove (26), and the inside of connecting frame (3) has been seted up first fixed slot (26), and the centre position (14) has the centre bore (13), and rubber apron (16) are installed to the top of stopper (6), rubber bottom plate (17) are connected to the bottom of rubber apron (16), and carry and draw device (18) are installed at the top of rubber apron (16), first hole (19) of placing have been seted up to the central point of location chase (10), and second fixed slot (20) have all been seted up at the left and right sides both ends of location chase (10), first loading groove (21) have been seted up to the inside bottom of UV machine irradiation platform body (1), and second spacing hole (22) have been seted up at the inside bottom top of UV machine irradiation platform body (1), second standing groove (23) have been seted up at the top central point of rubber apron (16), and second standing hole (25) have all been seted up to the left and right sides of second standing groove (23), fastening rod (27) are installed in the inside penetration of first spacing hole (13).
2. The UV machine wafer iron frame positioning device of claim 1, wherein: the connecting frame (3), the limiting groove (4) and the fixing plate (24) are of an integrated structure, and the fixing plate (24) is obliquely arranged in the connecting frame (3).
3. The UV machine wafer iron frame positioning device of claim 1, wherein: the connecting frame (3) is fixedly arranged with the UV machine irradiation platform body (1) through the fastening rod (27), and the connection mode between the UV machine irradiation platform body (1) and the fastening rod (27) is threaded connection.
4. The UV machine wafer iron frame positioning device of claim 1, wherein: the fastening blocks (5) are arranged corresponding to the bearing blocks (12), and the fastening blocks (5) are magnetically connected with the bearing blocks (12).
5. The UV machine wafer iron frame positioning device of claim 1, wherein: the first fixing groove (7), the first placing groove (8) and the connecting groove (9) are communicated, and the width of the first fixing groove (7) is larger than that of the first placing groove (8).
6. The UV machine wafer iron frame positioning device of claim 1, wherein: a rotating structure is formed between the positioning iron frame (10) and the limiting block (6), and a disassembling structure is formed between the positioning iron frame (10) and the UV machine irradiation platform body (1).
7. The UV machine wafer iron frame positioning device of claim 1, wherein: the connection mode between the positioning iron frame (10) and the rubber cover plate (16) is lap joint, and the positioning iron frame (10) and the connecting block (11) are of an integrated structure.
8. The UV machine wafer iron frame positioning device of claim 1, wherein: the rubber cover plate (16) is tightly attached to the irradiation lens (2), and the irradiation lens (2) is connected with the connecting frame (3) in a clamping way.
9. The UV machine wafer iron frame positioning device of claim 1, wherein: the upper surface of the rubber cover plate (16) and the upper surface of the UV machine irradiation platform body (1) are in the same plane, and the central axis of the UV machine irradiation platform body (1) is coincident with the central axis of the rubber cover plate (16).
10. The UV machine wafer iron frame positioning device of claim 1, wherein: the lifting device (18) comprises a lifting rod (1801) and a lifting handle (1802), the lifting rod (1801) is arranged in the second placing groove (23), and a rotating structure is formed between the lifting rod (1801) and the rubber cover plate (16);
the length of the lifting rod (1801) is larger than that of the rubber cover plate (16), and the diameter of the rubber cover plate (16) is equal to that of the second limiting hole (22).
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| CN202011549660.7A CN112635366B (en) | 2020-12-24 | 2020-12-24 | UV machine wafer iron frame positioner |
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| CN202011549660.7A CN112635366B (en) | 2020-12-24 | 2020-12-24 | UV machine wafer iron frame positioner |
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| CN112635366B true CN112635366B (en) | 2024-03-12 |
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| JP2019192915A (en) * | 2018-04-28 | 2019-10-31 | エスゼット ディージェイアイ テクノロジー カンパニー リミテッドＳｚ Ｄｊｉ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．，Ｌｔｄ | Semiconductor apparatus |
| CN110716391A (en) * | 2018-07-11 | 2020-01-21 | 上海微电子装备（集团）股份有限公司 | Large-size substrate exposure machine |
| CN109226978A (en) * | 2018-09-18 | 2019-01-18 | 袁永华 | A kind of chip production device and manufacturing method |
| CN208999761U (en) * | 2018-11-20 | 2019-06-18 | 深圳市艾永特电子科技有限公司 | A kind of auxiliary device for the exposure machine printing two-sided PCB |
| CN109599355A (en) * | 2019-01-10 | 2019-04-09 | 江苏汇成光电有限公司 | A kind of wafer closes frame and tears adhesive dispenser |
| CN110196476A (en) * | 2019-05-09 | 2019-09-03 | 中国科学院西安光学精密机械研究所 | In one kind/long wave heavy caliber Infrared Lens flexible support structure |
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