CN112629727B - Limiting support and friction force online monitoring integrated device in annular polishing process - Google Patents
Limiting support and friction force online monitoring integrated device in annular polishing process Download PDFInfo
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- 238000005259 measurement Methods 0.000 claims abstract description 9
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- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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Abstract
The invention discloses a limiting support and friction force online monitoring integrated device in an annular polishing process. The whole annular polishing machine is not arranged on the sliding table, so that large additional mass is generated, the precision of friction force measurement is improved, and the requirement of measuring the friction force when the size of a workpiece is small or the pressure is small is met. Because the invention does not add extra mechanism, only processes the dumbbell-shaped groove on the original shifting fork, does not change the original annular polishing process state, and further improves the effectiveness of friction force measurement. The invention has the advantages of small change to the traditional annular polishing machine, simple structure and reduced equipment upgrading and transforming cost.
Description
Technical Field
The invention relates to the technical field of annular polishing, in particular to an integrated device for limiting support and online monitoring of friction force in an annular polishing process.
Background
With the continuous development and application of optical technology, the demand for planar optical elements is increasing. In order to achieve high precision and high surface quality machining of planar optical elements, it is necessary to ring polish the workpiece. The stability of the annular polishing process is crucial to improving the processing efficiency. The friction force borne by the workpiece during annular polishing is closely related to the material removal process, so that the online monitoring of the friction force is beneficial to improving the stability and the control capability of the annular polishing processing process, and the technical support is provided for improving the processing efficiency and the yield.
At present, many scholars recognize the importance of friction force on-line monitoring on the control of the annular polishing process, and research is carried out on a friction force measuring device in the annular polishing process. The part of scholars place the slip table below the annular burnishing machine, and the lower plate of slip table is fixed on the steel table, and the upper top plate concreties on the annular burnishing machine, and the frictional force in the annular polishing operation can let the upper top plate slide along a certain direction relative to the lower plate, and the degree of sliding is quantified by the force cell of concreting between upper top plate and lower plate. The method maintains the actual annular polishing state, but the friction force is small in the annular polishing process, the error caused by placing the whole annular polishing machine on the sliding table is large, and the high-precision measurement requirement is difficult to meet. And the other part of scholars externally connect a force sensor on a shifting fork part of the limiting and supporting device, and the shifting fork deformation caused by the friction force is quantified through the force sensor. The method can realize real-time measurement of the friction force among friction interfaces formed by the workpiece, the abrasive particles and the tool disc, but the additionally added force measuring sensor obstructs the working space of normal annular polishing, changes the direction of the supporting force of the guide wheel to the workpiece or the eccentric amount of the workpiece relative to the tool disc, and still cannot accurately measure the friction force in the actual annular polishing state.
In summary, the following problems still exist in the current research on the apparatus for measuring the friction force in the ring polishing process:
(1) the existing measuring method adds a force measuring device on the original structure, so that the additional mass is overlarge, and the measuring precision of the small friction force is limited.
(2) The force sensor is additionally arranged on the shifting fork of the limiting and supporting structure, so that the real annular polishing state is changed, the measuring result cannot accurately reflect the actual situation, and the force sensor cannot be applied to the actual annular polishing process.
(3) The traditional annular polishing equipment is greatly changed, and the equipment cost is increased.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to design a limiting support and friction force online monitoring integrated device which has high precision and small change and does not influence the normal annular polishing operation in the annular polishing process.
In order to achieve the above purpose, the basic idea of the invention is as follows: a dumbbell-shaped groove is formed in a shifting fork of a traditional limiting and supporting device, strain flowers are pasted on the side edge of the shifting fork at the groove, strain values are monitored in real time in the annular polishing process so as to solve the friction force between a workpiece and a tool disc, and the stability of the annular polishing state of the workpiece is further reflected.
The technical scheme of the invention is as follows:
a limit support and friction force online monitoring integrated device in an annular polishing process comprises a base, a tool disc and a limit support and friction force monitoring mechanism;
the tool disc and the limiting support and friction force monitoring mechanism are positioned on the base; the tool disc is installed on a main shaft of the base through screws, and the limiting support and friction force monitoring mechanism is installed on the edge of the upper surface of the base through screws.
The limiting support and friction force monitoring mechanism comprises a balancing weight, a guide wheel, a shifting fork, a strain gage and a connecting plate; the connecting plate is arranged on the base through screws, and the shifting fork is arranged on the connecting plate through screws; the two guide wheels are respectively a guide wheel A and a guide wheel B, and the guide wheels A and the guide wheels B are respectively arranged at two ends of the shifting fork and are suspended above the tool disc; the number of the strain flowers is four, namely a strain flower A, a strain flower B, a strain flower C and a strain flower D, wherein the strain flower A and the strain flower B are positioned behind the guide wheel A, and the strain flower C and the strain flower D are positioned behind the guide wheel B. The balancing weight is in gapless contact with the two guide wheels and synchronously rotates along with the two guide wheels in the annular polishing process, a workpiece is adhered to the bottom surface of the balancing weight, and the workpiece and the balancing weight are coaxial. The distance between the centers of the two guide wheels is 3d/2-4d/3, the included angle between the connecting line of the center of the guide wheel A and the center of the workpiece and the connecting line of the center of the guide wheel B and the center of the workpiece is 100 plus 110 degrees, and d is the diameter of the workpiece.
Dumbbell-shaped grooves are respectively arranged beside the positions of the two guide wheels on the upper surface of the shifting fork, the diameters of circles at two ends of the dumbbell-shaped grooves are d/20-d/30, the distance between the circle centers is d/5-d/6, and the distance between the circles and the edge of the shifting fork is 0.5-2 mm. The dumbbell-shaped groove on the side edge of the shifting fork is provided with a straight groove, and the length of the straight groove is d/4-d/3.
The working method of the integrated device for limiting support and online friction monitoring in the annular polishing process comprises the following steps:
A. calculating the functional relationship between the friction force and the supporting force
In the horizontal direction in the annular polishing process, the bottom surface of the workpiece is subjected to the friction force of the tool disc, and meanwhile, the side surface of the workpiece is subjected to the supporting force of the guide wheel transmitted by the balancing weight. The supporting force of the guide wheel and the friction force of the tool disc keep stress balance, so that the accurate measurement of the supporting force is the accurate calculation of the friction force, and the function between the friction force and the supporting force is calculated as follows:
wherein, FfRepresenting the friction between the workpiece and the tool plate, F1Showing the holding force of the guide wheel A to the workpiece, F2The supporting force of the guide wheel B to the workpiece is shown, and alpha is F1And F2The included angle therebetween.
B. Calibrating the relationship between support force and strain
The guide wheel causes the shifting fork to deform due to the counter force of the supporting force of the workpiece, the rigidity of the side edge of the shifting fork is reduced by arranging the dumbbell-shaped groove on the shifting fork, so that the deformation of the side edge of the shifting fork is amplified, the strain flower is stuck to the side edge of the shifting fork, and the measured strain and the supporting force F are1And F2Which are in positive correlation. The pressure heads of the two push-pull force meters respectively abut against the position where the guide wheel A is in contact with the workpiece and the position where the guide wheel B is in contact with the workpiece, the supporting force and the strain value are observed, and the function relation between the two supporting forces and the four strain flower main strains is calibrated through a plurality of tests as follows:
wherein epsilonARepresents the principal strain, ε, of a strain flower ABIndicating strain flowersPrincipal strain of B,. epsilonCRepresents the principal strain, ε, of a strain flower CDThe main strain of the strain flower D is shown, and a and B respectively show the main strains of the strain flower A and the strain flower B and F1C and D represent the main strains and F of the strain flowers C and D, respectively2Coefficient of (d) between.
B. Actually measuring the friction between the workpiece and the tool plate
And starting the annular polishing machine to perform annular polishing on the workpiece, acquiring the main strains of the four strain flowers in real time, substituting the main strains into the formulas (1) - (2) to solve the real-time friction force, and when the fluctuation of the friction force is less than 5%, observing that the workpiece is in a stable operation state, thereby providing an important basis for adjusting process parameters by automation equipment or engineers.
Compared with the prior art, the invention has the following beneficial effects:
1. the whole annular polishing machine is not arranged on the sliding table, so that large additional mass is generated, the precision of friction force measurement is improved, and the requirement of measuring the friction force when the size of a workpiece is small or the pressure is small is met.
2. Because the invention does not add extra mechanism, only processes the dumbbell-shaped groove on the original shifting fork, does not change the original annular polishing process state, and further improves the effectiveness of friction force measurement.
3. The invention has the advantages of small change to the traditional annular polishing machine, simple structure and reduced equipment upgrading and transforming cost.
Drawings
FIG. 1 is a schematic diagram of the apparatus of the present invention.
FIG. 2 is a schematic view of a limit support and friction monitoring mechanism.
Fig. 3 is a schematic diagram of a strain gage attachment.
FIG. 4 is a fork embodiment for machining a dumbbell shaped groove.
In the figure: 1. the device comprises a base, 2, a tool disc, 3, a limiting support and friction force monitoring mechanism, 4, a workpiece, 31, guide wheels A and 32, strain flowers A and 33, strain flowers B and 34, strain flowers C and 35, strain flowers D and 36, a shifting fork, 37, a connecting plate, 38, guide wheels B and 39 and a balancing weight.
Detailed Description
The invention is further described with reference to the accompanying drawings, as shown in fig. 1-4, an integrated device for limiting support and friction force on-line monitoring in the annular polishing process comprises a base 1, a tool disc 2 and a limiting support and friction force monitoring mechanism 3;
the tool disc 2 and the limiting support and friction force monitoring mechanism 3 are both positioned on the base 1; the tool disc 2 is installed on a main shaft of the base 1 through screws, and the limiting support and friction force monitoring mechanism 3 is installed on the edge of the upper surface of the base 1 through screws.
The limiting support and friction force monitoring mechanism 3 comprises a balancing weight 39, a guide wheel, a shifting fork 36, a strain gauge and a connecting plate 37; the connecting plate 37 is installed on the base 1 through screws, and the shifting fork 36 is installed on the connecting plate 37 through screws; the two guide wheels are respectively a guide wheel A31 and a guide wheel B38, the guide wheel A31 and the guide wheel B38 are respectively arranged at two ends of the shifting fork 36 and are suspended above the tool disc 2; the number of the strain flowers is four, namely a strain flower A32, a strain flower B33, a strain flower C34 and a strain flower D35, the strain flower A32 and the strain flower B33 are located behind the guide wheel A31, and the strain flower C34 and the strain flower D35 are located behind the guide wheel B38. The balancing weight 39 is in gapless contact with the two guide wheels and synchronously rotates along with the two guide wheels in the annular polishing process, a workpiece 4 is adhered to the bottom surface of the balancing weight 39, and the workpiece 4 and the balancing weight 39 are coaxial. The distance between the centers of the two guide wheels is 3d/2-4d/3, the included angle between the connecting line between the center of the guide wheel A31 and the center of the workpiece 4 and the connecting line between the center of the guide wheel B38 and the center of the workpiece 4 is 100 plus 110 degrees, and d is the diameter of the workpiece 4.
Dumbbell-shaped grooves are respectively arranged beside the positions of the two guide wheels on the upper surface of the shifting fork 36, the diameters of the circles at the two ends of the dumbbell-shaped grooves are d/20-d/30, the distance between the circle centers is d/5-d/6, and the distance between the circles and the edge of the shifting fork 36 is 0.5-2 mm. A straight groove is formed in the dumbbell-shaped groove on the side edge of the shifting fork 36, and the length of the straight groove is d/4-d/3.
The working method of the integrated device for limiting support and online friction monitoring in the annular polishing process comprises the following steps:
A. calculating the functional relationship between the friction force and the supporting force
In the horizontal direction during the ring polishing, the bottom surface of the workpiece 4 is subjected to the frictional force of the tool tray 2, while the side surface of the workpiece 4 is subjected to the supporting force of the guide roller transmitted through the weight 39. The supporting force of the guide wheel and the friction force of the tool disc 2 keep stress balance, so that the accurate measurement of the supporting force is the accurate calculation of the friction force, and the function between the friction force and the supporting force is calculated as follows:
wherein, FfRepresenting the friction between the workpiece 4 and the tool plate 2, F1Showing the holding force of the guide roller A31 to the workpiece 4, F2The supporting force of the guide wheel B38 to the workpiece 4 is shown, and alpha is F1And F2The included angle therebetween.
B. Calibrating the relationship between support force and strain
The shift fork 36 is deformed by the counterforce of the supporting force of the guide wheel to the workpiece 4, the rigidity of the side edge of the shift fork 36 is reduced by arranging the dumbbell-shaped groove on the shift fork 36, so that the deformation of the side edge of the shift fork 36 is amplified, the strain flower is stuck to the side edge of the shift fork 36, and the measured strain and the supporting force F are1And F2Which are in positive correlation. The pressure heads of the two push-pull force meters respectively abut against the position where the guide wheel A31 contacts the workpiece 4 and the position where the guide wheel B38 contacts the workpiece 4, the values of the supporting force and the strain are observed, and after a plurality of tests, the functional relation between the two supporting forces and the four strain flower main strains is calibrated as follows:
wherein epsilonARepresents the principal strain, ε, of a strain flower A32BRepresents the principal strain, ε, of a strain flower B33CRepresents the principal strain, ε, of a strain flower C34DShowing the principal strain of the strain flower D35, a and b showing the strain flowers A32 andprincipal strain and F of strain flower B331The coefficients between C and D represent the principal strains and F of the strain flowers C34 and D35, respectively2Coefficient of (d) between.
C. Measuring the friction between the workpiece 4 and the tool plate 2
And starting the annular polishing machine to perform annular polishing on the workpiece 4, acquiring main strains of the four strain flowers in real time, substituting the main strains into the formulas (1) - (2) to solve the real-time friction force, and when the fluctuation of the friction force is less than 5%, observing that the workpiece 4 is in a stable operation state, thereby providing an important basis for adjusting process parameters by automation equipment or engineers.
The present invention is not limited to the embodiment, and any equivalent idea or change within the technical scope of the present invention is to be regarded as the protection scope of the present invention.
Claims (1)
1. A limiting support and friction force online monitoring integrated device in an annular polishing process comprises a base (1), a tool disc (2) and a limiting support and friction force monitoring mechanism (3);
the tool disc (2) and the limiting support and friction force monitoring mechanism (3) are both positioned on the base (1); the tool disc (2) is installed on a main shaft of the base (1) through a screw, and the limiting support and friction force monitoring mechanism (3) is installed on the edge of the upper surface of the base (1) through a screw;
the limiting support and friction force monitoring mechanism (3) comprises a balancing weight (39), a guide wheel, a shifting fork (36), a strain gauge and a connecting plate (37); the connecting plate (37) is mounted on the base (1) through screws, and the shifting fork (36) is mounted on the connecting plate (37) through screws; the number of the guide wheels is two, namely a guide wheel A (31) and a guide wheel B (38), the guide wheel A (31) and the guide wheel B (38) are respectively installed at two ends of a shifting fork (36) and are suspended above the tool disc (2); the number of the strain flowers is four, namely a strain flower A (32), a strain flower B (33), a strain flower C (34) and a strain flower D (35), the strain flower A (32) and the strain flower B (33) are positioned behind the guide wheel A (31), and the strain flower C (34) and the strain flower D (35) are positioned behind the guide wheel B (38); the balancing weight (39) is in gapless contact with the two guide wheels and synchronously rotates along with the two guide wheels in the annular polishing process, a workpiece (4) is adhered to the bottom surface of the balancing weight (39), and the workpiece (4) and the balancing weight (39) are coaxial; the distance between the circle centers of the two guide wheels is 3d/2-4d/3, the included angle between the connecting line of the circle center of the guide wheel A (31) and the circle center of the workpiece (4) and the connecting line of the circle center of the guide wheel B (38) and the circle center of the workpiece (4) is 100 degrees, 110 degrees and d is the diameter of the workpiece (4);
dumbbell-shaped grooves are respectively arranged beside the positions of the two guide wheels on the upper surface of the shifting fork (36), the circular diameters of the two ends of each dumbbell-shaped groove are d/20-d/30, the circle center distance is d/5-d/6, and the circular distance is 0.5-2mm from the edge of the shifting fork (36); a straight groove is formed in the dumbbell-shaped groove on the side edge of the shifting fork (36), and the length of the straight groove is d/4-d/3;
the working method of the integrated device for limiting support and online friction monitoring in the annular polishing process comprises the following steps:
A. calculating the functional relationship between the friction force and the supporting force
In the horizontal direction in the annular polishing process, the bottom surface of the workpiece (4) is subjected to the friction force of the tool disc (2), and the side surface of the workpiece (4) is subjected to the supporting force of a guide wheel transmitted by a balancing weight (39); the supporting force of the guide wheel and the friction force of the tool disc (2) keep stress balance, so that accurate measurement of the supporting force is accurate calculation of the friction force, and the function between the friction force and the supporting force is calculated as follows:
wherein, FfRepresenting the friction between the workpiece (4) and the tool plate (2), F1Indicates the supporting force of the guide wheel A (31) to the workpiece (4), F2The supporting force of the guide wheel B (38) to the workpiece (4) is shown, alpha is F1And F2The included angle between them;
B. calibrating the relationship between support force and strain
The shifting fork (36) is deformed due to the counterforce of the supporting force of the guide wheel on the workpiece (4), the rigidity of the side edge of the shifting fork (36) is reduced by arranging the dumbbell-shaped groove on the shifting fork (36), so that the deformation of the side edge of the shifting fork (36) is amplified, and the shifting fork (36) is arranged on the side edge of the shifting fork (36)Sticking strain patterns at the edges, measuring the strain and the supporting force F1And F2Which are in positive correlation; the pressure heads of the two push-pull force meters respectively abut against the position where the guide wheel A (31) is in contact with the workpiece (4) and the position where the guide wheel B (38) is in contact with the workpiece (4), the supporting force and the strain value are observed, and after multiple tests, the functional relation between the two supporting forces and the four strain flower main strains is calibrated as follows:
wherein epsilonARepresents the principal strain, ε, of a strain flower A (32)BRepresents the main strain, ε, of the strain flower B (33)CRepresents the principal strain, ε, of a strain flower C (34)DShows the main strain of the strain flower D (35), and a and B show the main strain and F of the strain flower A (32) and the strain flower B (33), respectively1C and D represent the main strains and F of the strain flowers C (34) and D (35), respectively2The coefficient between;
B. actually measuring the friction between the workpiece (4) and the tool plate (2)
And starting the annular polishing machine to perform annular polishing on the workpiece (4), acquiring main strains of the four strain flowers in real time, substituting the main strains into the formulas (1) - (2) to solve the real-time friction force, and when the fluctuation of the friction force is less than 5%, observing that the workpiece (4) is in a stable operation state, thereby providing an important basis for adjusting process parameters by automation equipment or engineers.
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| CN109540720A (en) * | 2018-12-20 | 2019-03-29 | 蚌埠学院 | Abrasion of grinding wheel detection device and its detection method |
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| US6102777A (en) * | 1998-03-06 | 2000-08-15 | Keltech Engineering | Lapping apparatus and method for high speed lapping with a rotatable abrasive platen |
| KR20010036681A (en) * | 1999-10-11 | 2001-05-07 | 윤종용 | End point detector for chemical mechanical polishing |
| DE602005017894D1 (en) * | 2005-09-16 | 2010-01-07 | Abb Ab | Industrial robot with sensor means in the area of a tool flange |
| JP2009039827A (en) * | 2007-08-09 | 2009-02-26 | Fujitsu Ltd | Polishing apparatus, substrate manufacturing method, and electronic device manufacturing method |
| CN101716747B (en) * | 2009-11-18 | 2011-07-20 | 大连理工大学 | Piezoelectric type grinding force measuring device for ultraprecise grinding machine of silicon wafer |
| CN102157413B (en) * | 2011-01-20 | 2012-08-15 | 大连理工大学 | On-line measuring device for frictional force generated during polishing of small-sized wafer |
| CN102879135B (en) * | 2012-09-27 | 2014-08-13 | 宁波大学 | Measuring method for friction distribution of inner wall of confining device |
| WO2014127739A1 (en) * | 2013-02-22 | 2014-08-28 | Hong Tao | Space diagonal-type overrunning clutch, coupling, hinge and drive wheel |
| CN108608328B (en) * | 2018-07-06 | 2023-09-26 | 中国工程物理研究院激光聚变研究中心 | Polishing friction force measuring device and measuring method thereof |
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| Cleansing orthodontic brackets with air-powder polishing: effects on frictional force and degree of debris;Brisa dos Santos Leite 等;《Dental Press J Orthod》;20160830;全文 * |
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