CN112588740B - Caking removing device used in waste gas purification guide pipe and use method thereof - Google Patents
Caking removing device used in waste gas purification guide pipe and use method thereof Download PDFInfo
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- CN112588740B CN112588740B CN202011347390.1A CN202011347390A CN112588740B CN 112588740 B CN112588740 B CN 112588740B CN 202011347390 A CN202011347390 A CN 202011347390A CN 112588740 B CN112588740 B CN 112588740B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/04—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes
- B08B9/049—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes having self-contained propelling means for moving the cleaning devices along the pipes, i.e. self-propelled
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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Abstract
The invention discloses a caking removal device used in a waste gas purification guide pipe, which comprises an oxidation chamber, an air inlet assembly and an induced draft fan, wherein a filter is arranged in an oxygen chamber, an air pipe is arranged in the filter, the air pipe penetrates through the oxygen chamber and upwards leads to the outside of the oxygen chamber, the induced draft fan is arranged at the upper end of the air pipe, a removal device is arranged on the oxygen chamber at one side of the air pipe, the removal device comprises a controller, a switching valve, an air cylinder and a guide rod, the controller is connected with the switching valve, the switching valve is connected with the air cylinder, the air cylinder is provided with the guide rod, the guide rod is connected with a baffle plate, the guide rod is arranged in the air inlet device, the air inlet device comprises a vertical pipe and an air inlet pipe, one side of the vertical pipe is provided with an air inlet hole, the air inlet hole and the air inlet pipe form an included angle for fixed connection, the invention scrapes off particles which are attached to the pipe wall and are generated after the oxidation of process tail gas, and the blockage at the inlet of the process tail gas pipeline is prevented.
Description
Technical Field
The invention relates to the technical field of electronic semiconductor processing, belongs to relevant equipment for chip manufacturing, and particularly relates to a caking removing device used in a waste gas purification guide pipe in a chip manufacturing process and a using method thereof.
Background
In the manufacturing processes of electronic Semiconductor industries such as chip manufacturing and package testing, for example, processes such as Chemical Vapor Deposition (CVD), Epitaxy (epitoxy), and Semiconductor Compound (Compound Semiconductor) are used. A large amount of process gas is generated which is liable to self-ignition. Among such process gases, typical examples are silane, borane, trimethylaluminum, etc., which are extremely easily oxidized with oxygen in the air. After being oxidized by oxygen in the air, the silicon dioxide, boron oxide, aluminum oxide and other particle powder are directly generated. Particulate matter powder is easily hung on the pipe wall at the process tail gas inlet, namely the mixing position of the particulate matter powder and air/oxygen, and is collected. And plugging of the process off-gas line inlet is easily formed. Causing negative effects on the safe and stable operation of the process tail gas treatment system. When powder build-up and clogging occurs, the process off-gas flow into the oxidation is gradually reduced and eventually adversely affects the front end normal production activities. And even pose a threat to safe production.
Therefore, the operation of a common spontaneous combustion process tail gas treatment device requires manual regular maintenance and cleaning of an inlet pipeline system, so that negative effects on normal process production and tail gas treatment caused by pipeline blockage are avoided.
Disclosure of Invention
The object of the present invention is to provide a lump removing apparatus for use in an exhaust gas purifying duct, which solves the problems of the background art mentioned above, and a baffle plate is provided on a shaft of a cylinder. When the baffle plate is switched to move in a reciprocating mode by the cylinder shaft, the baffle plate runs back and forth at an inlet pipe section of process tail gas and scrapes off particles attached to the pipe wall and generated after the process tail gas is oxidized, and therefore the purpose of automatic cleaning is achieved. Meanwhile, the design of the baffle adopts a special structural design, so that the flow speed of the process tail gas is accelerated while the influence on the pressure and the flow of the process tail gas is reduced in the automatic cleaning process, the filtering efficiency is improved, the structural design of a process tail gas inlet and a mixing port is optimized, and the reliable and stable operation of the air cylinder is ensured.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a caking clearing device for among exhaust gas purification pipe, includes oxidizing chamber, air intake subassembly and draught fan, its characterized in that, install the filter in the oxygen chamber, the filter internally mounted has the trachea, the trachea passes the oxygen chamber upwards accesss to the oxygen chamber outside, the trachea upper end is installed the draught fan, trachea one side install clearing device on the oxygen chamber, clearing device includes controller, diverter valve, cylinder and guide arm, the controller with the diverter valve is connected, the diverter valve with the cylinder is connected, be provided with the guide arm on the cylinder, be connected with the baffle on the guide arm, the guide arm is installed in air inlet unit, air inlet unit includes riser and intake pipe, riser one side is provided with the inlet port, the inlet port with the intake pipe becomes contained angle fixed connection; the purification and adsorption of the process waste gas can be completed through the filter provided with the oxidation chamber, and the particle aggregate formed by the reaction of the process tail gas is cleaned through the removing device in the adsorption process.
Preferably, the baffle comprises an upper retainer ring and a lower baffle, the upper retainer ring is mounted at the edge of the lower baffle, a rotating pipe is mounted at the center of the lower baffle, a rotating shaft is mounted in the rotating pipe, the rotating shaft is rotatably connected with a rotary cleaning device, and the rotary cleaning device is mounted on the guide rod; can form the intermediate layer between them through the setting of last retaining ring and lower baffle, the intermediate layer is used for placing rotatory cleaning device, guarantees that rotatory cleaning device can fix a position the rotation and prevents flying of rotatory in-process particulate matter, and it is fixed through the guide arm to go up the retaining ring simultaneously.
Preferably, the lower baffle comprises an outer ring, an inner ring, ribs, fixing holes and air holes, the outer ring is connected with the inner ring through the ribs, the inner ring is provided with the fixing holes, and the air holes are formed among the outer ring, the inner ring and the ribs; the outer ring and the inner ring are arranged to ensure that the process tail gas can smoothly pass through the baffle in the falling process, and aggregated particles on the inner wall of the vertical pipe are scraped in the process of not influencing the process tail gas treatment, so that the automatic cleaning is facilitated.
Preferably, the rotary cleaning device comprises a rotary motor and a rotary disc, the rotary disc is fixed on the rotary motor, and the rotary disc extends to the edge between the upper baffle and the upper retainer; the rotary disk mainly is scraping in scraping back inner tube friction, through guaranteeing the thorough clearance of inner wall, can be smooth with the inner wall friction simultaneously, prolongs the cycle of granule gathering.
Preferably, the rotating disc comprises a plurality of rotating plates which are connected through a peripheral ring, a metal brush is mounted on one side of the peripheral ring, and the metal brush is fixed on the peripheral ring on one side of the peripheral ring; the main design objective of the design of a plurality of rotor plates is to accelerate the velocity of flow of technology tail gas through the rotation, improves filter speed, plugs up the bleeder vent when not rotating simultaneously, prevents to rise in-process technology tail gas and to rise, reduces harm equipment probability.
Preferably, the shape of the air hole is the same as that of the rotating plate, and the same shape of the air hole is used for blocking the air hole through the rotating plate, so that the process tail gas can penetrate through the air hole to damage the equipment.
Preferably, the rib is provided with an electrified coil, and the electrified coil is arranged on the upper end face of the rib; the circular telegram coil can be fixed in the air vent upper end with the rotor plate when the circular telegram, does not let it rotate, reaches the effect of rotating electrical machines brake.
Preferably, the rotating plate is in a bird wing shape; the rotary plate is arranged to be of a bird wing shape, so that the air draft effect on the process tail gas is formed in the rotating process, and the speed of the process tail gas entering the oxidation chamber is increased.
Preferably, a pushing knife is arranged at the periphery extension position of the lower baffle plate, the pushing knife is welded at the lower end of the lower baffle plate, and the pushing knife extends towards the outer side of the lower baffle plate; can shovel down gathering the granule on the riser inner wall through the propulsion sword, reduce the resistance when the cylinder drives the guide arm and descends, guarantee to clear away and relax, do not cause the harm to the cylinder, prolong the life of cylinder.
A preferred method of using a lump-removing apparatus for use in an exhaust gas purifying duct includes the steps of:
s1: the process tail gas flow is converged with the vertical pipe through the air inlet pipe, then enters the oxidation chamber through an inclined opening face with an angle designed to be 10-80 degrees, reaction is carried out, in the process that air is immersed through the inlet pipe, industrial tail gas reacts to form particles which are gathered on the inner wall of the front end of the vertical pipe, the vertical pipe is blocked, the process tail gas cannot enter conveniently, the controller automatically controls the process tail gas flow, a control signal is output to a coil of the switching valve, an interface is opened, and the process tail gas flow enters one end of the air cylinder through the interface. The guide rod of the cylinder is pushed under the action of instrument gas inside the cylinder, and the guide rod slides downwards under the condition that the pressure is released inside the cylinder and communicated with the interface, the interface and the interface environment. The baffle is arranged on the guide rod, and the baffle moves downwards along with the guide rod in the gliding process. And in the moving process, the particles collected on the inner wall of the vertical pipe are scraped, so that the aim of automatically cleaning the inner wall of the pipe is fulfilled.
S2: in order to ensure thorough cleaning in the cleaning process, the baffle is arranged on the stop rod in the descending process, the rotating motor rotates to drive the rotating disk to rotate, the rotating plate on the rotating disk rotates along with the rotating disk in the rotating process, air in the vertical pipe is driven to flow in the rotating process, meanwhile, the rotating plate is designed into a bird wing shape to drive air to flow towards the lower part of the vertical pipe, the speed of process tail gas passing through the air holes is increased, the reaction rate is increased, and meanwhile, the metal brushes outside the periphery on the rotating disk in the rotating process rub and clean the inner arm of the vertical pipe, so that thorough cleaning and scraping of aggregated particles are ensured.
S3: after the cleaning is finished, the controller controls the switching valve to control the air cylinder to back press and drive the guide rod to return, the process that the return rises can be accelerated to make the process tail gas flow back downwards due to the air holes, the rotating motor stops rotating and does not influence the inflow speed of the process tail gas, when the baffle returns to rise to the upper end of the air inlet hole, the magnetic effect is formed on the rib by electrifying the coil, the rotating plate is guaranteed to stop at the upper end of the air holes to cover the air holes, and the process tail gas can be prevented from rising to the upper end of the baffle at the moment.
S4: ambient air enters the oxidation chamber through an inlet on the wall of the oxidation chamber, and is mixed with the spontaneous combustion process tail gas entering the oxidation chamber in the oxidation chamber to generate oxidation reaction. The generated particles are intercepted by the filter and stay in the oxidation chamber after reaction, and the gas resultant is pumped out of the oxidation chamber by the induced draft fan through the gas pipe and enters the next-stage treatment process or is discharged.
Compared with the prior art, the invention has the beneficial effects that:
(1) the purification and adsorption of the process waste gas can be completed through the filter provided with the oxidation chamber, and the particle aggregate formed by the reaction of the process tail gas is cleaned through the removing device in the adsorption process.
(2) Can form the intermediate layer between them through the setting of last retaining ring and lower baffle, the intermediate layer is used for placing rotatory cleaning device, guarantees that rotatory cleaning device can fix a position the rotation and prevents flying of rotatory in-process particulate matter, and it is fixed through the guide arm to go up the retaining ring simultaneously.
(3) The main design objective of the design of a plurality of rotor plates is to accelerate the velocity of flow of technology tail gas through the rotation, improves filter speed, plugs up the bleeder vent when not rotating simultaneously, prevents to rise in-process technology tail gas and to rise, reduces harm equipment probability.
(4) The air holes are identical to the rotating plate in shape, so that the air holes are blocked through the rotating plate, and process tail gas is guaranteed to penetrate through the air holes to damage equipment.
(5) Can shovel down gathering the granule on the riser inner wall through the propulsion sword, reduce the resistance when the cylinder drives the guide arm and descends, guarantee to clear away and relax, do not cause the harm to the cylinder, prolong the life of cylinder.
Drawings
Fig. 1 is a schematic view showing the overall structure of a lump removing apparatus in an exhaust gas purifying duct according to the present invention.
FIG. 2 is a schematic view of the structure of the rotary cleaning device of the present invention.
FIG. 3 is a schematic diagram of a lower baffle structure according to the present invention.
FIG. 4 is a schematic diagram of the structure of the rotary disk of the present invention.
FIG. 5 is a second structural view of the shape of the vent hole of the present invention.
FIG. 6 is a third structural view showing a shape of the venting holes according to the present invention.
Reference numerals: 1. the device comprises an oxidation chamber, 2, an air inlet assembly, 3, an induced draft fan, 4, a filter, 5, an air pipe, 6, a clearing device, 7, a controller, 8, a switching valve, 9, an air cylinder, 10, a guide rod, 11, a baffle plate, 12, an air inlet device, 13, a vertical pipe, 14, an air inlet pipe, 15, an air inlet hole, 16, an upper baffle ring, 17, a lower baffle plate, 18, a rotating pipe, 19, a rotary cleaning device, 20, an outer ring, 21, an inner ring, 22, a rib, 23, a fixing hole, 24, an air hole, 25, a rotary motor, 26, a rotary disk, 27, an outer ring, 28, a metal brush, 29, a rotary plate, 30, an electrified coil, 31 and a propelling knife.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings.
Examples
The utility model provides a caking clearing device for among exhaust gas purification pipe, includes oxidation chamber 1, subassembly 2 and draught fan 3 of admitting air, install filter 4 in the oxygen chamber 1, 4 internally mounted of filter have trachea 5, trachea 5 passes oxygen chamber 1 upwards accesss to 1 outsides in the oxygen chamber, install trachea 5 upper end draught fan 3, trachea 5 one side install clearing device 6 on the oxygen chamber 1, clearing device 6 includes controller 7, diverter valve 8, cylinder 9 and guide arm 10, controller 7 with diverter valve 8 is connected, diverter valve 8 with cylinder 9 is connected, be provided with guide arm 10 on the cylinder 9, be connected with baffle 11 on the guide arm 10, guide arm 10 is installed in air inlet unit 12, air inlet unit 12 includes riser 13 and intake pipe 14, riser 13 one side is provided with inlet port 15, the air inlet holes 15 and the air inlet pipe 14 form an included angle for fixed connection; the purification and adsorption of the process waste gas can be completed by arranging the filter 4 of the oxidation chamber 1, and the particle aggregate formed by the reaction of the process tail gas is cleaned by the removing device 6 in the adsorption process.
The baffle 11 comprises an upper baffle 16 and a lower baffle 17, the upper baffle 16 is mounted at the edge of the lower baffle 17, a rotating pipe 18 is mounted at the center of the lower baffle 17, a rotating shaft is mounted in the rotating pipe 18, the rotating shaft is rotatably connected with a rotating cleaning device 19, and the rotating cleaning device 19 is mounted on the guide rod 10; can form the intermediate layer between them through the setting of going up retaining ring 16 and lower baffle 17, the intermediate layer is used for placing rotatory cleaning device 19, guarantees that rotatory cleaning device 19 can fix a position the rotation and prevents flying of rotatory in-process particulate matter, and it is fixed through guide arm 10 to go up retaining ring 16 simultaneously.
The lower baffle 17 comprises an outer ring 20, an inner ring 21, ribs 22, fixing holes 23 and air holes 24, wherein the outer ring 20 is connected with the inner ring 21 through the ribs 22, the inner ring 21 is provided with the fixing holes 23, and the air holes 24 are formed among the outer ring 20, the inner ring 21 and the ribs 22; the outer ring 20 and the inner ring 21 are arranged to ensure that the process tail gas can smoothly pass through the baffle in the falling process, and aggregate particles on the inner wall of the vertical pipe 13 are scraped in the process of not influencing the process tail gas treatment, so that the automatic cleaning is convenient.
The rotary cleaning device 19 comprises a rotary motor 25 and a rotary disc 26, the rotary disc 26 is fixed on the rotary motor 25, and the rotary disc 26 extends to the edge between the upper baffle plate 16 and the upper retainer ring 17; the rotating disc 26 mainly performs inner tube friction scraping after scraping, and can smooth the inner wall friction and prolong the particle gathering period by ensuring thorough cleaning of the inner wall.
The rotating disc 26 comprises a plurality of rotating plates 29, the rotating plates 29 are connected through a peripheral ring 27, a metal brush 28 is arranged on one side of the peripheral ring 27, and the metal brush 28 is fixed on the peripheral ring on one side of the peripheral ring 27; the plurality of rotating plates 29 are designed to increase the flow rate of the process exhaust gas through rotation, increase the filtering speed, and simultaneously block the air holes 24 when the rotating plates are not rotated, so as to prevent the process exhaust gas from rising upwards in the rising process and reduce the possibility of damaging equipment.
As shown in fig. 3, 5 and 6, the shape of the ventilation hole 24 is the same as that of the rotating plate 29, and the shape 24 of the ventilation hole is the same as that of the rotating plate 29 in order to block the ventilation hole 24 through the rotating plate and ensure that the process exhaust gas passes through the ventilation hole 24 to damage the equipment, and the ventilation hole 24 may have various shapes such as a sector shape, a circular shape, a groove arc shape, and the like.
An electrified coil 30 is arranged on the rib 22, and the electrified coil 30 is arranged on the upper end surface of the rib 22; the energizing coil 30 can fix the rotating plate 29 to the upper end of the air hole 24 while energizing, so that the rotating plate is not rotated, thereby achieving the effect of braking the rotating electric machine.
The rotating plate 29 is in a bird wing shape; the rotation plate 29 is designed to be a bird wing shape, so that the air draft effect on the process tail gas is formed in the rotation process, and the speed of the process tail gas entering the oxidation chamber is increased.
A pushing knife 31 is arranged at the periphery extension position of the lower baffle 17, the pushing knife 31 is welded at the lower end of the lower baffle 17, and the pushing knife 31 extends towards the outer side of the lower baffle 17; can shovel down the granule that gathers on riser 13 inner wall through propulsion sword 31, reduce the resistance when the cylinder drives the guide arm and descends, guarantee to clear away and relax, do not cause the harm to the cylinder, prolong the life of cylinder.
A method of using a lump-removing apparatus for use in an exhaust gas purification conduit, comprising the steps of:
s1: the process tail gas flow is converged with the vertical pipe 13 through the air inlet pipe 14, then enters the oxidation chamber 1 through an inclined opening surface with an angle designed to be 10-80 degrees, reaction is carried out, in the process that air is immersed through the inlet pipe, the industrial tail gas reacts to form particles which are gathered on the inner wall of the front end of the vertical pipe 13, the vertical pipe is blocked, the process tail gas cannot enter conveniently, the controller 7 automatically controls the process tail gas flow, a control signal is output to the coil of the switching valve 8, the interface is opened, and the control signal enters one end of the air cylinder 9 through the interface. The guide rod 10 of the cylinder 9 slides down by pushing in the instrument gas inside the cylinder and in the cylinder inside the interface, the connection and the interface environment in communication and releasing the pressure. The baffle 11 is mounted on the guide rod 10 through the baffle 11, and the baffle 11 moves downwards along with the guide rod 10 in the process of sliding downwards. And in the moving process, the particles collected on the inner wall of the vertical pipe are scraped, so that the aim of automatically cleaning the inner wall of the pipe is fulfilled.
S2: in order to ensure thorough cleaning in the cleaning process, the rotating motor 25 arranged on the guide rod 10 rotates to drive the rotating disc 26 to rotate in the descending process of the baffle plate 11, the rotating disc 29 on the rotating disc 26 rotates in the rotating process, air in the vertical pipe 13 is driven to flow in the rotating process, meanwhile, the rotating disc 29 is designed into a bird wing shape to drive air to flow below the vertical pipe 13, the speed of process tail gas passing through the air holes 24 is increased, the reaction rate is increased, and meanwhile, the metal brushes outside the periphery on the rotating disc 26 rub and clean the inner arm of the vertical pipe 13 in the rotating process, so that thorough cleaning and scraping of aggregated particles are ensured.
S3: after the clearance is accomplished through controller 7 control 8 control of diverter valve 9 back pressure drives the guide arm 10 carries out the return, because the existence of bleeder vent 24 can accelerate the downward backward flow of technology tail gas at the in-process that the return rises, rotating electrical machines 25 stops the rotation and does not influence the inflow speed of technology tail gas, rises at baffle 11 return during the inlet port 15 upper end, through circular telegram coil 30 circular telegram makes form the magnetic effect on the muscle 22, guarantee that rotor plate 29 stops 24 upper ends of bleeder vent cover the bleeder vent, can prevent technology tail gas to rise to baffle 11 upper end this moment.
S4: ambient air enters the oxidation chamber 1 through an inlet on the wall of the oxidation chamber 1, and is mixed with the spontaneous combustion process tail gas entering the oxidation chamber 1 in the oxidation chamber 1 to generate oxidation reaction. After the reaction, generated particles are intercepted by the filter 4 and stay in the oxidation chamber 1, and gas products are pumped out of the oxidation chamber 1 by the induced draft fan 3 through the air pipe 5 and enter the next-stage treatment process or are discharged.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions are considered to be within the protective scope of the present invention.
Claims (8)
1. The utility model provides a caking clearing device for among exhaust gas purification pipe, includes oxidation chamber, subassembly and draught fan of admitting air, its characterized in that, installs the filter in the oxidation chamber, the filter internally mounted has the trachea, the trachea passes the oxidation chamber upwards accesss to the oxidation chamber outside, the trachea upper end is installed the draught fan, trachea one side install clearing device on the oxidation chamber, clearing device includes controller, diverter valve, cylinder and guide arm, the controller with the diverter valve is connected, the diverter valve with the cylinder is connected, be provided with the guide arm on the cylinder, be connected with the baffle on the guide arm, the guide arm is installed in air inlet unit, air inlet unit includes riser and intake pipe, riser one side is provided with the inlet port, the inlet port with intake pipe becomes contained angle fixed connection;
the baffle comprises an upper baffle ring and a lower baffle plate, the upper baffle ring is arranged at the edge of the lower baffle plate, a rotating pipe is arranged at the center of the lower baffle plate, a rotating shaft is arranged in the rotating pipe, the rotating shaft is rotatably connected with a rotary cleaning device, and the rotary cleaning device is arranged on the guide rod;
the lower baffle comprises an outer ring, an inner ring, ribs, fixing holes and air holes, the outer ring is connected with the inner ring through the ribs, the inner ring is provided with the fixing holes, and the outer ring is provided with the air holes between the inner ring and the ribs.
2. A lump-removing apparatus in an exhaust gas cleaning duct according to claim 1, wherein said rotary cleaning apparatus comprises a rotary motor and a rotary disk fixed to said rotary motor, said rotary disk extending at an edge between a lower baffle plate and said upper baffle ring.
3. The agglomeration removing apparatus for an exhaust gas purifying duct according to claim 2, wherein the rotating plate comprises a plurality of rotating plates, the plurality of rotating plates are connected by a peripheral ring, a metal brush is installed at one side of the peripheral ring, and the metal brush is fixed to the peripheral ring at one side of the peripheral ring.
4. The device as claimed in claim 3, wherein the ventilation hole has the same shape as the rotary plate.
5. The lump removing apparatus for use in an exhaust gas purifying duct according to claim 4, wherein an electric coil is mounted on the rib, and the electric coil is mounted on an upper end surface of the rib.
6. The lump-removing apparatus for use in an exhaust gas purifying duct as claimed in claim 3, wherein said rotating plate is in the shape of a bird's wing.
7. The lump-removing device for an exhaust gas purifying duct as claimed in claim 1, wherein a pushing blade is provided at an outer circumference of the lower baffle, the pushing blade being welded to a lower end of the lower baffle, the pushing blade extending outward of the lower baffle.
8. A method for using a lump-removing apparatus in an exhaust gas purifying duct, wherein the lump-removing apparatus in an exhaust gas purifying duct is the lump-removing apparatus of any one of claims 5 to 7, comprising the steps of:
s1: the process tail gas flow is converged with the vertical pipe through the air inlet pipe, then enters the oxidation chamber through an inclined opening surface with an angle designed to be 10-80 degrees for reaction, and in the process of entering air through the air inlet pipe, the industrial tail gas reacts to form particles which are accumulated on the inner wall of the front end of the vertical pipe, so that the vertical pipe is blocked, the process tail gas is inconvenient to enter, the controller is used for automatically controlling, a control signal is output to electrify the coil of the switching valve, the switching valve opens the interface at the moment, instrument gas enters one end of the cylinder through the interface, a guide rod of the cylinder is pushed in the cylinder, pressure is released when the interface is communicated with the external environment, thereby the guide rod slides downwards and is arranged on the guide rod through the baffle plate, the baffle plate moves downwards along with the guide rod in the sliding process, in the moving process, particles accumulated on the inner wall of the vertical pipe are scraped, so that the aim of automatically cleaning the inner wall of the pipe is fulfilled;
s2: in order to ensure thorough cleaning in the cleaning process, the rotating motor arranged on the guide rod rotates in the descending process of the baffle plate to drive the rotating disc to rotate, the rotating plate on the rotating disc rotates in the rotating process to drive air in the vertical pipe to flow, and meanwhile, the rotating plate is designed into a bird wing shape to drive air to flow towards the lower part of the vertical pipe, so that the speed of process tail gas passing through the air holes is increased, the reaction rate is improved, and meanwhile, the metal brushes outside the circumference of the outer circumference ring on the rotating disc rub and clean the inner wall of the vertical pipe in the rotating process to ensure thorough cleaning and scraping of the aggregated particles;
s3: after cleaning is finished, the switching valve is controlled by the controller to control the air cylinder to back press to drive the guide rod to return, downward backflow of process tail gas can be accelerated due to the existence of the air holes in the process of return and rising, the rotating motor stops rotating and does not influence the inflow speed of the process tail gas, when the baffle returns and rises to the upper end of the air inlet hole, the magnetic effect is formed on the rib by electrifying the coil, the rotating plate is guaranteed to stay at the upper end of the air holes to cover the air holes, and the process tail gas can be prevented from rising to the upper end of the baffle at the moment;
s4: the environmental air enters the oxidation chamber through an inlet on the wall of the oxidation chamber, and is mixed with the spontaneous combustion process tail gas entering the oxidation chamber in the oxidation chamber to generate oxidation reaction, the generated particles are intercepted by the filter and stay in the oxidation chamber after the reaction, and the gas resultant is pumped out of the oxidation chamber by the induced draft fan through the air pipe to enter the next stage of treatment process or be discharged.
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| CN202011347390.1A CN112588740B (en) | 2020-11-26 | 2020-11-26 | Caking removing device used in waste gas purification guide pipe and use method thereof |
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| CN202011347390.1A CN112588740B (en) | 2020-11-26 | 2020-11-26 | Caking removing device used in waste gas purification guide pipe and use method thereof |
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| CN203980298U (en) * | 2014-02-13 | 2014-12-03 | 胜豹上桥科技股份有限公司 | Process the burning structure of tail gas |
| CN205372581U (en) * | 2016-01-26 | 2016-07-06 | 上海旭熠电子技术有限公司 | Do not need silanes exhaust gas treatment equipment of ignition and automatic clearance |
| CN205730720U (en) * | 2016-06-08 | 2016-11-30 | 上海盛剑环境***科技有限公司 | A kind of emission-control equipment |
| CN106180094A (en) * | 2016-07-17 | 2016-12-07 | 杨越 | Unmanned boat pipeline cleaning instrument |
| CN209550158U (en) * | 2018-12-12 | 2019-10-29 | 天津市力拓钢制品有限公司 | A kind of steel pipe inner wall cleaning plant |
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2020
- 2020-11-26 CN CN202011347390.1A patent/CN112588740B/en active Active
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