CN112548991A - Mechanical arm for semiconductor manufacturing - Google Patents
Mechanical arm for semiconductor manufacturing Download PDFInfo
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- CN112548991A CN112548991A CN202011384746.9A CN202011384746A CN112548991A CN 112548991 A CN112548991 A CN 112548991A CN 202011384746 A CN202011384746 A CN 202011384746A CN 112548991 A CN112548991 A CN 112548991A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 230000006835 compression Effects 0.000 claims description 14
- 238000007906 compression Methods 0.000 claims description 14
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/102—Gears specially adapted therefor, e.g. reduction gears
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
- B25J9/123—Linear actuators
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a mechanical arm for manufacturing a semiconductor, which comprises a bottom plate and is characterized in that: the top right side recess slip joint of bottom plate has the rectangular block, the top of rectangular block is equipped with the diaphragm, the bottom of diaphragm and the top fixed connection of rectangular block, the top of horizontal pole is equipped with robotic arm, robotic arm's bottom is laminated with the top of diaphragm mutually, the left and right sides of diaphragm all is equipped with the frid, the inboard below of frid respectively with the diaphragm about both ends fixed connection, the top of diaphragm is equipped with fixing device. This robotic arm for semiconductor manufacturing, through bottom plate, rectangular piece, frid, robotic arm, diaphragm and fixing device's cooperation, upwards stimulate the round bar, the round bar drives the straight board rebound, and the straight board drives the slider rebound, and then makes the curved bar leave the inboard logical groove of straight board, and then realizes the dismantlement to robotic arm and diaphragm, and the staff of being convenient for maintains robotic arm, saves operating time, improves work efficiency.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a mechanical arm for manufacturing a semiconductor.
Background
The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, and has applications in the fields of integrated circuits, consumer electronics, communication systems, photovoltaic power generation, illumination, high-power conversion and the like, for example, a diode is a device made of the semiconductor, and a mechanical arm is often used in the production of the semiconductor.
The mechanical arm for semiconductor manufacturing among the prior art is not convenient for dismantle robotic arm and diaphragm, and then is not convenient for the staff and maintains robotic arm, and then extravagant operating time, and work efficiency is low, and the device can't control about robotic arm, and then leads to robotic arm's working range to receive the limitation, and application scope is little, and the practicality is not high.
Disclosure of Invention
The invention aims to provide a mechanical arm for manufacturing a semiconductor, which aims to solve the problems that the mechanical arm for manufacturing the semiconductor in the prior art proposed in the background art is inconvenient to disassemble the mechanical arm and a transverse plate, further is inconvenient for workers to maintain the mechanical arm, further wastes working time and is low in working efficiency.
In order to achieve the purpose, the invention provides the following technical scheme: a mechanical arm for semiconductor manufacturing comprises a bottom plate, wherein a long block is connected with the right side of the top of the bottom plate in a sliding clamping mode through a groove, a transverse plate is arranged above the long block, the bottom of the transverse plate is fixedly connected with the top of the long block, a mechanical arm is arranged above the transverse rod, the bottom of the mechanical arm is attached to the top of the transverse plate, groove plates are arranged on the left side and the right side of the transverse plate, the lower portion of the inner side of each groove plate is fixedly connected with the left end and the right end of the transverse plate respectively, and a fixing device is arranged above the transverse plate;
the fixing device comprises a curved bar, a sliding block, a compression spring, a short plate, a round bar and a straight plate;
the outer wall of slider and the right side recess slip joint of frid, the right side of slider is equipped with straight board, the left end of straight board and the right-hand member fixed connection of slider, the top of straight board is equipped with the round bar, the bottom of round bar and the top left side fixed connection of straight board, the outer wall top of round bar and the right side of short slab lead to inslot wall clearance fit, the outer wall clearance fit of round bar has compression spring, compression spring's top and the bottom right side fixed connection of short slab, compression spring's bottom and the top left side fixed connection of straight board, the right side of straight board leads to inslot wall clearance fit and has the curved bar, the right side below of curved bar and robotic arm's left side below fixed connection.
Preferably, the sliding block and the groove plate form a sliding structure.
Preferably, the straight plates are axially symmetrically distributed by taking the bottom plate as an axis.
Preferably, a handle is fixedly connected above the outer wall of the round rod.
Preferably, the left side and the right side of the bottom plate are fixedly connected with bases.
Preferably, a moving device is arranged above the bottom plate;
the moving device comprises a motor, a first gear, a fourth gear, a vertical block, a second gear, a third gear, a long plate, a vertical plate, a long rod, a square plate and an annular plate;
a motor base preset below the motor is fixedly connected with the left side of the top of the bottom plate, a first gear is arranged in front of the motor, the rear end of the first gear is fixedly connected with the output end of the motor, a third gear is arranged on the right side of the first gear, the left side of the third gear is meshed with the right side of the first gear, the rear end of the third gear is rotatably connected with the upper part of the front end face of the vertical plate through a pin shaft, the bottom of the vertical plate is fixedly connected with the left side of the top of the bottom plate, the upper part of the front end face of the third gear is rotatably connected with the rear end of the second gear through a pin shaft, the front end of the second gear is rotatably connected with the front end face of the vertical block through a pin shaft, the outer wall of the vertical block is slidably clamped with the inner wall of the annular plate, a fourth gear is arranged below the second gear, and the upper part of the left side of the fourth gear, the front end of fourth gear and the rear end left side fixed connection of rectangular plate, the bottom right side of rectangular plate and the top fixed connection of square plate, the bottom of square plate and the top left side fixed connection of bottom plate, the right side of annular plate is equipped with the stock, the left end of stock and the right side below fixed connection of annular plate, the outer wall right side of stock and the top of square plate lead to groove inner wall clearance fit, the right-hand member of stock and the left side top fixed connection of left frid.
Preferably, the output shaft of the motor is perpendicular to the first gear.
Preferably, the transmission ratio of the first gear to the third gear is as follows.
Compared with the prior art, the invention has the beneficial effects that:
this robotic arm for semiconductor manufacturing, through bottom plate, rectangular piece, frid, robotic arm, diaphragm and fixing device's cooperation for the device can be through upwards pulling the round bar when using, and the round bar drives straight board rebound, and straight board drives slider rebound, and then makes the curved bar leave the inboard logical groove of straight board, and then realizes the dismantlement to robotic arm and diaphragm, and the staff of being convenient for maintains robotic arm, saves operating time, improves work efficiency.
This robotic arm for semiconductor manufacturing, through the bottom plate, the long piece, the frid, robotic arm, diaphragm and mobile device's cooperation, make the device when using, can drive third gear rotation through first gear, the third gear drives second gear rotation, and then make the second gear rotate at the outer wall of fourth gear, and then make the second gear drive the riser and rotate, the riser drives the annular slab and removes about, the annular slab drives the stock and removes about, and then make the stock drive left frid and remove, and then realize controlling robotic arm's removal, avoid robotic arm's working range to receive the limitation, increase application scope, the practicality is high.
This robotic arm for semiconductor manufacturing, through the bottom plate, the long piece, the frid, robotic arm, diaphragm and mobile device's cooperation, make the device when using, can drive third gear rotation through first gear, the third gear drives second gear rotation, and then make the second gear rotate at the outer wall of fourth gear, and then make the second gear drive the riser and rotate, the riser drives the annular slab and removes about, the annular slab drives the stock and removes about, and then make the stock drive left frid and remove, and then realize controlling robotic arm's removal, and the automation degree is high, further save the labour, and work efficiency is improved.
This robotic arm for semiconductor manufacturing, through bottom plate, long piece, frid, robotic arm, diaphragm, fixing device and mobile device's cooperation for the device is simple to use, and convenient operation is convenient for the staff to use.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the structure of the motor, the first gear and the third gear of FIG. 1;
FIG. 3 is a schematic structural view of the vertical block, the second gear and the third gear of FIG. 1;
FIG. 4 is a schematic view showing the structure of the long plate, the long rod and the square plate of FIG. 1;
FIG. 5 is a schematic structural view of the curved bar, the slider and the straight plate of FIG. 1;
fig. 6 is a schematic view showing the structure of the compression spring, the short plate and the round bar in fig. 1.
In the figure: 1. the base plate, 2, the mobile device, 201, the motor, 202, the first gear, 203, the fourth gear, 204, the riser, 205, the second gear, 206, the third gear, 207, the long board, 208, the riser, 209, the stock, 210, the square slab, 211, the annular plate, 3, fixing device, 301, the curved bar, 302, the slider, 303, compression spring, 304, the short slab, 305, the round bar, 306, the straight board, 4, the long block, 5, the frid, 6, robotic arm, 7, the diaphragm, 8, the base.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution:
example 1
The utility model provides a robotic arm for semiconductor manufacturing, comprising a base plate 1, the top right side recess sliding connection of bottom plate 1 has rectangular block 4, the equal rigid coupling in bottom left and right sides of bottom plate 1 has base 8, the design can make the device more stable like this, the top of rectangular block 4 is equipped with diaphragm 7, the bottom of diaphragm 7 and the top fixed connection of rectangular block 4, the top of horizontal pole 7 is equipped with robotic arm 6, robotic arm 6's bottom is laminated with diaphragm 7's top mutually, diaphragm 7's the left and right sides all is equipped with frid 5, both ends fixed connection about frid 5's inboard below respectively with diaphragm 7.
Example 2
As an optional situation, referring to fig. 1, 5 and 6, in the robot arm for semiconductor manufacturing, a fixing device 3 is disposed above a transverse plate 7, the fixing device 3 includes a curved rod 301, a slider 302, a compression spring 303, a short plate 304, a round rod 305 and a straight plate 306, an outer wall of the slider 302 is slidably engaged with a right groove of the slot plate 5, the slider 302 and the slot plate 5 form a sliding structure, the slider 302 can slide up and down in the inner groove of the slot plate 5 when being stressed, the right side of the slider 302 is provided with the straight plate 306, a left end of the straight plate 306 is fixedly connected with a right end of the slider 302, the round rod 305 is disposed above the straight plate 306, a handle is fixedly connected above an outer wall of the round rod 305, the handle is more convenient for a worker to pull the round rod 305, a bottom of the round rod 305 is fixedly connected with a top left side of the straight plate 306, an upper side of the outer wall of the round rod 305 is in clearance fit with an inner wall of a right through groove of the, outer wall clearance fit of round bar 305 has compression spring 303, compression spring 303 presses and gives straight board 306 decurrent power, the top of spring 303 contracts and the bottom right side fixed connection of short slab 304, compression spring 303's bottom and straight board 306's top left side fixed connection, straight board 306 uses bottom plate 1 to be axisymmetric distribution as the axle, the design can be more stable fix robotic arm 6 like this, straight board 306's the logical inslot wall clearance fit in right side has curved bar 301, curved bar 301's right side below and robotic arm 6's left side below fixed connection.
The scheme in this embodiment can be selectively combined with the scheme in other embodiments.
Example 3
As an optional case, referring to fig. 1-4, a robot arm for semiconductor manufacturing, a moving device 2 is disposed above a base plate 1, the moving device 2 includes a motor 201, a first gear 202, a fourth gear 203, a vertical block 204, a second gear 205, a third gear 206, a long plate 207, a vertical plate 208, a long rod 209, a square plate 210 and a circular plate 211, a motor base disposed below the motor 201 is fixedly connected to the left side of the top of the base plate 1, the motor 201 is of the ECMA-E11320RS type, the first gear 202 is disposed in front of the motor 201, the rear end of the first gear 202 is fixedly connected to the output end of the motor 201, the output shaft of the motor 201 is disposed vertically to the first gear 202, when the motor 201 starts to operate, the motor 201 can drive the first gear 202 to rotate, the right side of the first gear 202 is disposed with the third gear 206, the left side of the third gear 206 is engaged with the right side of the first gear 202, the transmission ratio of the first gear 202 to the third gear 206 is 2:1, so that the mechanical arm 6 can move more slowly leftwards and rightwards, the material clamped by the mechanical arm 6 is prevented from falling off, the rear end of the third gear 206 is rotatably connected with the upper part of the front end surface of the vertical plate 208 through a pin shaft, the third gear 206 can rotate above the front end surface of the vertical plate 208 when being stressed by the pin shaft, the bottom of the vertical plate 208 is fixedly connected with the left side of the top of the bottom plate 1, the upper part of the front end surface of the third gear 206 is rotatably connected with the rear end of the second gear 205 through the pin shaft, the second gear 205 can rotate on the front end surface of the third gear 206 when being stressed, the front end of the second gear 205 is rotatably connected with the front end surface of the vertical block 204 through the pin shaft, the outer wall of the vertical block 204 is slidably clamped with the inner wall of the annular plate 211, the fourth gear 203 is arranged below the second gear 205, the upper part of, the front end of fourth gear 203 and the rear end left side fixed connection of rectangular plate 207, the bottom right side of rectangular plate 207 and the top fixed connection of square plate 210, the bottom of square plate 210 and the top left side fixed connection of bottom plate 1, the right side of annular plate 211 is equipped with stock 209, the left end of stock 209 and the right side below fixed connection of annular plate 211, the logical inslot wall clearance fit in the top of the outer wall right side of stock 209 and square plate 210, can remove about the logical groove in the top of square plate 210 during stock 209 atress, the right-hand member of stock 209 and the left side top fixed connection of left frid 5.
The scheme in this embodiment can be selectively combined with the scheme in other embodiments.
Example 4
When the mechanical arm for manufacturing the semiconductor is used, firstly, the motor 201 is connected with an external power supply, the motor 201 starts to work, the motor 201 drives the first gear 202 to rotate, the first gear 202 drives the third gear 206 to rotate, the third gear 206 drives the second gear 205 to rotate, further, the second gear 205 rotates on the outer wall of the fourth gear 203, further, the second gear 205 drives the vertical block 204 to rotate, the vertical block 204 drives the annular plate 211 to move left and right, the annular plate 211 drives the long rod 209 to move left and right, further, the long rod 209 drives the left slotted plate 5 to move left and right, further, the mechanical arm 6 is moved left and right, further, the working range of the mechanical arm 6 is enlarged, when the mechanical arm 6 needs to be maintained, the round rod 305 is pulled upwards, the round rod 305 drives the straight plate 306 to move upwards, the straight plate 306 drives the sliding block 302 to move upwards, and then the curved bar 301 leaves the inside through groove of the straight plate 306, so that the mechanical arm 6 and the transverse plate 7 can be disassembled, and the maintenance of the mechanical arm 6 by a worker is facilitated.
In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," "secured," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A robot arm for semiconductor manufacturing, comprising a base plate (1), characterized in that: the top right side recess sliding connection of bottom plate (1) has long piece (4), the top of long piece (4) is equipped with diaphragm (7), the bottom of diaphragm (7) and the top fixed connection of long piece (4), the top of horizontal pole (7) is equipped with robotic arm (6), the bottom of robotic arm (6) is laminated with the top of diaphragm (7) mutually, the left and right sides of diaphragm (7) all is equipped with frid (5), the inboard below of frid (5) respectively with diaphragm (7) control both ends fixed connection, the top of diaphragm (7) is equipped with fixing device (3).
2. The robot arm for manufacturing semiconductor device according to claim 1, wherein: the fixing device (3) comprises a curved rod (301), a sliding block (302), a compression spring (303), a short plate (304), a round rod (305) and a straight plate (306); the outer wall of the sliding block (302) is in sliding clamping connection with the right groove of the groove plate (5), the right side of the sliding block (302) is provided with a straight plate (306), the left end of the straight plate (306) is fixedly connected with the right end of the sliding block (302), a round rod (305) is arranged above the straight plate (306), the bottom of the round rod (305) is fixedly connected with the left side of the top of the straight plate (306), the upper part of the outer wall of the round rod (305) is in clearance fit with the inner wall of the right through groove of the short plate (304), the outer wall of the round rod (305) is in clearance fit with a compression spring (303), the top of the compression spring (303) is fixedly connected with the right side of the bottom of the short plate (304), the bottom of the compression spring (303) is fixedly connected with the left side of the top of the straight plate (306), the inner wall of the right through groove of the straight plate (306) is in clearance fit with a curved rod (301), the lower part of the right side of the curved lever (301) is fixedly connected with the lower part of the left side of the mechanical arm (6).
3. The robot arm for semiconductor manufacturing according to claim 2, wherein: the sliding block (302) and the groove plate (5) form a sliding structure.
4. The robot arm for semiconductor manufacturing according to claim 2, wherein: the straight plates (306) are axially symmetrically distributed by taking the bottom plate (1) as an axis.
5. The robot arm for semiconductor manufacturing according to claim 2, wherein: a handle is fixedly connected to the upper portion of the outer wall of the round rod (305).
6. The robot arm for manufacturing semiconductor device according to claim 1, wherein: the left side and the right side of the bottom plate (1) are fixedly connected with bases (8).
7. The robot arm for manufacturing semiconductor device according to claim 1, wherein: a moving device (2) is arranged above the bottom plate (1); the moving device (2) comprises a motor (201), a first gear (202), a fourth gear (203), a vertical block (204), a second gear (205), a third gear (206), a long plate (207), a vertical plate (208), a long rod (209), a square plate (210) and a ring plate (211); the motor cabinet that the below of motor (201) is predetermine and the top left side fixed connection of bottom plate (1), the place ahead of motor (201) is equipped with first gear (202), the rear end of first gear (202) and the output fixed connection of motor (201), the right side of first gear (202) is equipped with third gear (206), the left side of third gear (206) and the right side meshing of first gear (202) are connected, the rear end of third gear (206) is rotated through the round pin axle and is connected with the preceding terminal surface top of riser (208), the bottom of riser (208) and the top left side fixed connection of bottom plate (1), the preceding terminal surface top of third gear (206) is rotated through round pin axle and second gear (205) rear end and is connected, the front end of second gear (205) is rotated through the round pin axle and is connected with the preceding terminal surface of vertical block (204), the outer wall and the inner wall slip joint of vertical block (204) are connected, the below of second gear (205) is equipped with fourth gear (203), the left side top of fourth gear (203) is connected with the right side below meshing of second gear (205), the front end of fourth gear (203) and the rear end left side fixed connection of rectangular plate (207), the bottom right side of rectangular plate (207) and the top fixed connection of square plate (210), the bottom of square plate (210) and the top left side fixed connection of bottom plate (1), the right side of annular plate (211) is equipped with stock (209), the left end of stock (209) and the right side below fixed connection of annular plate (211), the logical inslot wall clearance fit in the outer wall right side of stock (209) and the top of square plate (210), the right-hand member of stock (209) and the left side top fixed connection of left frid (5).
8. The robot arm for semiconductor manufacturing according to claim 7, wherein: the output shaft of the motor (201) is perpendicular to the first gear (202).
9. The robot arm for semiconductor manufacturing according to claim 7, wherein: the first gear (202) and the third gear (206) have a gear ratio of 2: 1.
10. Use of a robot arm for semiconductor fabrication according to any of claims 1 to 9, characterized by the following steps: when the mechanical arm for manufacturing the semiconductor is used, firstly, the motor (201) is connected with an external power supply, the motor (201) starts to work, the motor (201) drives the first gear (202) to rotate, the first gear (202) drives the third gear (206) to rotate, the third gear (206) drives the second gear (205) to rotate, the second gear (205) further rotates on the outer wall of the fourth gear (203), the second gear (205) further drives the vertical block (204) to rotate, the vertical block (204) drives the annular plate (211) to move left and right, the annular plate (211) drives the long rod (209) to move left and right, the long rod (209) further drives the left groove plate (5) to move left and right, so that the left and right movement of the mechanical arm (6) is realized, the working range of the mechanical arm (6) is enlarged, when the mechanical arm (6) needs to be maintained, the round rod (305) is pulled upwards, round bar (305) drive straight board (306) rebound, and straight board (306) drive slider (302) rebound, and then make curved bar (301) leave the inboard logical groove of straight board (306), and then realize the dismantlement to robotic arm (6) and diaphragm (7), and the staff of being convenient for maintains robotic arm (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011384746.9A CN112548991B (en) | 2020-12-01 | 2020-12-01 | Mechanical arm for semiconductor manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011384746.9A CN112548991B (en) | 2020-12-01 | 2020-12-01 | Mechanical arm for semiconductor manufacturing |
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| Publication Number | Publication Date |
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| CN112548991A true CN112548991A (en) | 2021-03-26 |
| CN112548991B CN112548991B (en) | 2022-10-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011384746.9A Active CN112548991B (en) | 2020-12-01 | 2020-12-01 | Mechanical arm for semiconductor manufacturing |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105479456A (en) * | 2016-01-11 | 2016-04-13 | 安徽工业大学 | Movable four-axis robot |
| CN108145700A (en) * | 2018-02-27 | 2018-06-12 | 郑州神盾智能科技有限公司 | A kind of composite intelligent captures robot |
| CN111168644A (en) * | 2020-01-14 | 2020-05-19 | 罗厚镇 | Driving system of mechanical arm |
| CN111890346A (en) * | 2020-08-21 | 2020-11-06 | 马鞍山斯博尔机械技术服务有限公司 | Multi-station manipulator logistics system |
| CN111923062A (en) * | 2020-08-11 | 2020-11-13 | 温州大学 | Multi-degree-of-freedom zinc ingot slag-raking robot |
| CN111975751A (en) * | 2020-08-05 | 2020-11-24 | 黎锦华 | Four-degree-of-freedom industrial robot |
-
2020
- 2020-12-01 CN CN202011384746.9A patent/CN112548991B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105479456A (en) * | 2016-01-11 | 2016-04-13 | 安徽工业大学 | Movable four-axis robot |
| CN108145700A (en) * | 2018-02-27 | 2018-06-12 | 郑州神盾智能科技有限公司 | A kind of composite intelligent captures robot |
| CN111168644A (en) * | 2020-01-14 | 2020-05-19 | 罗厚镇 | Driving system of mechanical arm |
| CN111975751A (en) * | 2020-08-05 | 2020-11-24 | 黎锦华 | Four-degree-of-freedom industrial robot |
| CN111923062A (en) * | 2020-08-11 | 2020-11-13 | 温州大学 | Multi-degree-of-freedom zinc ingot slag-raking robot |
| CN111890346A (en) * | 2020-08-21 | 2020-11-06 | 马鞍山斯博尔机械技术服务有限公司 | Multi-station manipulator logistics system |
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| Publication number | Publication date |
|---|---|
| CN112548991B (en) | 2022-10-18 |
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