CN112544123A

CN112544123A - Electrostatic charge reduction system using wet gas

Info

Publication number: CN112544123A
Application number: CN201980051498.5A
Authority: CN
Inventors: 高国兴
Original assignee: Dake Antistatic Technology Consulting Shenzhen Co ltd
Current assignee: Dake Antistatic Technology Consulting Shenzhen Co ltd
Priority date: 2018-08-10
Filing date: 2019-08-09
Publication date: 2021-03-23
Anticipated expiration: 2039-08-09
Also published as: CN112544123B; WO2020030082A1

Abstract

The present invention relates to an electrostatic charge reduction system using wet gas, comprising a conductor connected to a low voltage power source, an electrostatic charge reduction member having at least a first surface, and a wet gas supplier for continuously supplying wet gas having a relative humidity of more than 60% to the first surface of the electrostatic charge reduction member and/or a discharge surface of electrostatic latent matter in which electrostatic charge is latent. The electrostatic charge on the electrostatic latency is at least sharply reduced to at least half of the original by momentarily contacting and separating the first surface of the electrostatic charge reduction member with and from the discharge surface of the electrostatic latency.

Description

Electrostatic charge reduction system using wet gas

Technical Field

The present invention relates to an electrostatic charge reduction technique, and more particularly, to an electrostatic charge reduction system using a wet gas.

Background

It is well known that the destruction of chips by electrostatic discharge (ESD) causes billions of losses each year in the global electronics manufacturing industry. In today's high speed, high volume automated manufacturing environment, there is an increasing risk that microchips are susceptible to damage due to the presence of electrostatic discharge events. The control of electrostatic charges using gas ionizers has long been a widely used method in the electronics industry. One of the biggest natural drawbacks of the gas ionizer (air ionizer) is that it cannot neutralize the numerous electrostatic charges on the chip fast enough because a certain relaxation time (decay time) is required to reduce the electrostatic charges to a safe and comfortable level. Therefore, in today's highly competitive manufacturing industry, it is a global urgent need to solve the problem of rapidly and economically mitigating static electricity in an increasingly high-speed automated manufacturing environment to cope with rapid pace and high speed changes.

In the prior art, moisture is considered as one of the effective methods of mitigating static electricity. While the prior art has cited the advantages of using such wet gases to mitigate electrostatic charges, it is understood that such effectiveness is more applicable to the assembly of Printed Circuit Boards (PCBA) and microchips, where wet gases exhibit good results on such small-sized and highly compact electrostatically sensitive components.

However, these prior art techniques will not solve these electrostatic charge problems faced by the manufacturing industry when dealing with objects having large insulating surface areas or materials of high purity or high insulating properties (e.g. polymer films, sheets or wide webs, etc.). Therefore, further research and development is required to sufficiently overcome these problems.

Disclosure of Invention

According to one aspect, there is provided an electrostatic charge reduction system using wet gas, including a conductor connected to a low voltage power supply, an electrostatic charge reduction member having at least a first surface, and a wet gas supplier for continuously supplying wet gas having a relative humidity of more than 60% to the first surface of the electrostatic charge reduction member and/or a discharge surface of an electrostatic latent object (static latent object) in which electrostatic charge is latent; wherein the electrostatic charge on the electrostatic latency is at least sharply reduced to at least half of an original charge by instantaneously contacting and separating the first surface of the electrostatic charge reduction member with and from the discharge surface of the electrostatic latency.

Preferably, the first surface of the electrostatic charge reduction member and/or the discharge surface of the electrostatic latency is wetted (soak) with a wet gas having a relative humidity in the range of 70% -99%, and the electrostatic charge on the electrostatic latency is at least sharply dropped below one tenth of the original to zero.

Preferably, the wet gas supplier includes a wet gas generator and an input pipe for transferring the wet gas generated by the wet gas generator to the electrostatic charge reduction member.

Preferably, the first surface of the electrostatic charge reduction member is a ventilation mesh (air netting) into and out of which the wet gas easily passes through a non-obstructive gas flow path in the ventilation mesh.

Preferably, the electrostatic charge reducing member includes a roller (roller) disposed in a first direction, the electrostatic latency being an electrostatic latency moving in a second direction different from the first direction, and the first surface of the roller and the discharging surface of the flexible electrostatic latency move in the same direction when the first surface of the roller is instantaneously contacted and then separated from the discharging surface of the flexible electrostatic latency.

Preferably, the rollers include at least one first roller including a roller body having a cylindrical surface and a roller rod connecting the conductors, wherein the discharge surface of the flexible electrostatic latency is instantaneously contacted with and then separated from the cylindrical surface of the roller body.

Preferably, one said first roller is provided, said first roller rotating in a counter-clockwise direction and said flexible electrostatic latency rotating in the same counter-clockwise direction to pass said first roller.

Preferably, more than one first roller is provided, the roller bodies of each first roller rotate about their roller axes, and the movement of the flexible electrostatic latency passes through the first rollers, thereby causing the discharge surface of the flexible electrostatic latency to instantaneously contact and then separate from the cylindrical surface of the roller body of at least one of the first rollers.

Preferably, an input pipe comprising at least two branch pipes for conveying the wet gas generated by the wet gas generator to at least two of the first rollers is provided.

Preferably, the rollers include at least one second roller including a rod shaft electrically connected to the conductor and a roller surface surrounding the rod shaft, the flexible electrostatic latent object moves in a horizontal direction, and the rod shaft is disposed above the flexible electrostatic latent object such that the roller surface of the second roller is instantaneously contacted and then separated from the discharge surface of the flexible electrostatic latent object.

Preferably, the shaft is arranged in a horizontal direction and the roller surface is rotatable around the shaft.

Preferably, the inlet pipe is arranged parallel to the second rollers and has a plurality of holes on the surface facing the roller surfaces for guiding the wet gas.

Preferably, the roller includes a distributor formed of a plate having a plurality of distribution rods rotatably disposed with respect to each other, and the discharge surface of the flexible electrostatic latency is instantaneously contacted with and then separated from the outer surface of at least one of the plurality of distribution rods.

Preferably, the plurality of dispensing rods are arranged in a circular pattern on the plate, and a sidewall cover is attached to the plate around its edge to form a housing having an opening through which the flexible electrostatic latency is drawn into the dispenser and passes through the plurality of dispensing rods.

Preferably, the plate has a core bar attached to its middle, and the flexible electrostatic latency is wound into and through the plurality of dispensing rods and finally wound onto the core bar or wound out of the dispenser at the opening of the outer shell.

Preferably, the input duct comprises at least two branch ducts for conveying the wet gas generated by the wet gas generator to the distributor; the two branch pipes are arranged at positions close to the opening, wherein one branch pipe is positioned above the flexible electrostatic latency, and the other branch pipe is positioned below the flexible electrostatic latency.

Preferably, the electrostatic charge reducing means is an adhesive film removing mechanical mechanism including at least two side structures each having one slot facing each other, a pair of slidable rotating rods held in the two slots to allow the slidable rotating rods to be freely and easily slidably moved, and the flexible electrostatic latent object inserted into a gap between the slidable rotating rods such that a discharging surface of the flexible electrostatic latent object is instantaneously contacted with and then separated from an outer surface of the slidable rotating rods.

Preferably, the slidable rotary bar is electrically connected to at least one of the two side structures, which further electrically connect the conductors.

Preferably, the input pipe includes at least two branch pipes for conveying the wet gas generated by the wet gas generator to the adhesive film removing mechanism; the two branch pipes are disposed at opposite sides of the slidable rotating rod.

Preferably, the electrostatic charge reducing means includes at least first and second rollers disposed at intervals in a first direction, and a roller support for fixing the first and second rollers and the input pipe disposed above the flexible electrostatic latency.

Preferably, the roller holder has a triangular shape and is movable in the second direction, the first and second rollers being disposed in parallel at a lower portion of the triangular shape, and the input pipe being disposed at an upper portion of the triangular shape.

Preferably, the roller holder has a rectangular shape and is movable in the second direction, the first and second rollers are disposed in parallel at a lower portion of the rectangular shape, and two or more input pipes are disposed at an upper portion of the rectangular shape.

Preferably, the wet gas supplier includes a wet gas generator, a hollow chamber structure composed of an outer wall and an inner wall, and a wet gas transfer member for transferring the wet gas generated by the wet gas generator to the hollow chamber structure, the inner wall having the air holes distributed therethrough, and the electrostatic charge reduction member includes a roller disposed along a central axis of the hollow chamber structure.

Preferably, the rollers are wrapped by a static dissipative or conductive layer of resilient foam sheet or by protruding stubs.

Preferably, the resistor has a resistance value of less than 10e7 ohms and is connected to ground or in series to the low voltage power supply.

Preferably, the flexible electrostatic latency comprises a polymeric or insulating film, a polymeric or insulating block, a polymeric or insulating sheet, a polymeric or insulating tape or a polymeric or insulating mesh, and the electrostatic charge reduction member is made of plastic, metal, wood, rubber, or a combination thereof.

It is known to those skilled in the art that the static charge on the electrostatic latency does not show any significant drop when momentarily contacting and separating the electrostatic charge reduction member wetted with and electrically connected to a conductor with a wet gas having a relative humidity below 60% (e.g., 40% or 50%), but surprisingly drops dramatically below at least half way down, even one tenth down to zero, as the relative humidity increases, e.g., to 60% or more.

Drawings

The invention will be further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a schematic diagram of an electrostatic charge reduction system according to a first embodiment of the present application;

FIG. 2A is a schematic illustration of a first surface of an electrostatic charge reduction component of an electrostatic charge reduction system being placed onto a discharge surface of an electrostatic latent;

fig. 2B is a schematic view of the first surface of the electrostatic charge reduction member contacting the discharge surface of the electrostatic latent;

FIG. 2C is a schematic view of the first surface of the electrostatic charge reduction member separated from the discharge surface of the electrostatic latent object;

FIG. 3 is a schematic diagram of an electrostatic charge reduction system according to a second embodiment of the present application;

FIG. 4 is a schematic diagram of an electrostatic charge reduction system according to a third embodiment of the present application;

fig. 5A is a schematic diagram of a first variation of an electrostatic charge reduction system according to a third embodiment of the present application;

fig. 5B is a schematic diagram of a second variation of an electrostatic charge reduction system according to a third embodiment of the present application;

fig. 5C is a schematic view of a third variation of an electrostatic charge reduction system according to a third embodiment of the present application;

fig. 5D is a schematic diagram of a fourth variation of an electrostatic charge reduction system according to a third embodiment of the present application;

fig. 5E is a schematic view of a fifth variation of an electrostatic charge reduction system according to a third embodiment of the present application;

FIG. 6 is a schematic diagram of an electrostatic charge reduction system according to a fourth embodiment of the present application;

FIG. 7A is a schematic diagram of an electrostatic charge reduction system according to a fifth embodiment of the present application;

fig. 7B is an internal schematic view of an electrostatic charge reduction component of an electrostatic charge reduction system according to a fifth embodiment of the present application;

fig. 7C is an external schematic view of an electrostatic charge reduction component of an electrostatic charge reduction system according to a fifth embodiment of the present application;

fig. 7D is a schematic diagram of a first variation of an electrostatic charge reduction system according to a fifth embodiment of the present application;

FIG. 8 is a schematic view of an electrostatic charge reduction system according to a sixth embodiment of the present application;

9A-9D are schematic diagrams of another variation of an electrostatic charge reduction system according to a seventh embodiment of the present application;

FIG. 10 is a schematic view of another electrostatic charge reduction system according to an eighth embodiment of the present application;

11A-11B are schematic views of a preferred embodiment of a roller;

fig. 12 shows the remaining charge after the first surface of the electrostatic charge reducing member of the electrostatic charge reducing system contacts the discharge surface of the electrostatic latency.

Detailed Description

In order to make the novel features, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Fig. 1 is a schematic diagram of an electrostatic charge reduction system according to a first embodiment of the present application. Fig. 2A-2C illustrate the contact and separation of the electrostatic charge reduction component of the electrostatic charge reduction system with the discharge surface of the electrostatic latency.

As shown in fig. 1, the electrostatic charge reduction system includes a conductor 20 connected to a low voltage power source 40, an electrostatic charge reduction member 10 electrically connected to the conductor 20, and a wet gas supplier 70 continuously supplying wet gas having a relative humidity of more than 60%.

Preferably, the conductor 20 may have a resistance of less than 10e7 ohms. Preferably, the conductor 20 may be grounded or connected to a low voltage power supply 40 of 1.5V, 3V, 6V, 12V and 24V. It is noted that the listed or tested low voltage power supply 40 is only an example and that any voltage source below the voltage of the electrostatic latency 30 is permissible as will be appreciated by those skilled in the art.

The electrostatic charge reduction system may be adapted for electrostatic latency 30 with high electrostatic charge 32 latent. For example, the electrostatic latency 30 may be an object with a large insulating surface area or a material with high purity or high insulating properties, such as a polymer film, sheet, or wide web.

As shown in fig. 2A to 2C, the first surface 11 of the electrostatic charge reduction member 10 and the discharge surface 31 of the electrostatic latency 30 contact each other and then are separated instantaneously (for example, after 1 to 2 seconds, or after 5 seconds at most) immediately. Of course, other possible contact times may be selected by one skilled in the art. Meanwhile, the wet gas supplier 70 continuously supplies the wet gas having a relative humidity of more than 60%, preferably in the range of 70% -99%, to the discharge surface 1 of the electrostatic latency 30 or the first surface 11 of the electrostatic charge reducing member 10. In a preferred embodiment, the wet gas supplier 70 continuously supplies wet gas having a relative humidity in the range of 70% -99% to the contact point of the discharge surface 31 and the first surface 11. Of course, in another embodiment, the wet gas supplier 70 continuously supplies only the wet gas having a relative humidity in the range of 70% -99% to the discharge surface 31 or some other point of the first surface 11, and makes it possible for the discharge surface 31 and/or the first surface 11 to be wetted with the wet gas.

It has been surprisingly found that the electrostatic charge on the electrostatic latent image 30 is at least sharply reduced to at least half of the original charge when the first surface 11 of the electrostatic charge reduction member 10 and the discharge surface 31 of the electrostatic latent image 30 are instantaneously contacted and separated. Preferably, the electrostatic charge on the electrostatic latency 30 drops sharply to less than a fraction, e.g., less than one tenth, of the original high electrostatic charge level. This is related to factors such as the contact time, duration and relative humidity of the wet gas.

It is understood by those skilled in the art that under normal circumstances with a relative humidity between 40% RH and 50% RH, no significant visible reduction in electrostatic charge is obtained. Further, it is not surprising to those skilled in the art that the electrostatic charge on the electrostatic latency 30 does not drop when the first surface 11 of the wet gas-wetted electrostatic charge reduction member 10 electrically connected to the conductor 20 with a relative humidity of less than 60% (e.g., 40% or 50%) momentarily contacts and separates. However, when the rh (relative humidity) of the humid gas wetted by the electrostatic charge reducing member 10 increases (e.g., to 60% or more), the electrostatic charge on the electrostatic latency sharply decreases to at least less than half, and even to less than one tenth to zero. This is unexpected, and surprisingly good results can be obtained in which the electrostatic charge is permanently reduced.

Table 1 shown in fig. 12 shows the remaining electrostatic charge of the electrostatic latency 30 after the electrostatic contact separation of the first surface 11 of the electrostatic charge reducing member 10 and the electrostatic latency 30. Tests were conducted on low voltage power supplies of different voltages and similar results were obtained at the same relative humidity and the same contact time.

The inventors are unaware of why the electrostatic charge is so surprisingly and significantly reduced under high relative humidity conditions with relative humidity greater than 60%, whereas under normal dry standard production environments with relative humidity between 40% RH and 50% RH, the electrostatic charge does not produce any significant reduction.

It is possible that when the wet gas at the contact surface reaches a certain concentration, it unexpectedly achieves dielectric breakdown, thereby making the contact point conductive and creating favorable conditions for rapid discharge of electrostatic charges to ground.

This discovery will bring new avenues for mitigating static electricity, overcoming the common problem of slow neutralization of static charge in gas ionizers. The current applications will open up many new ways to mitigate the appearance of notorious electrostatic charges in various processes in equipment sensitive manufacturing plants.

Fig. 3 is a schematic diagram of an electrostatic charge reduction system according to a second embodiment of the present application. As shown in fig. 3, the electrostatic charge reduction system includes a conductor 21 connected to the ground, an electrostatic charge reduction member 10 electrically connected to the conductor 21, and a wet gas supplier continuously supplying wet gas having a relative humidity of more than 60%. Preferably, the wet gas supplier continuously supplies the wet gas having a humidity (relative humidity) in the range of 70% -99%. Preferably, the conductor 20 may have a resistance of less than 10e7 ohms. Preferably, the conductor 20 may be grounded or connected to a low voltage power supply 40 of 1.5V, 3V, 6V, 12V and 24V.

The electrostatic charge reduction system may be applied to an electrostatic latency 30 that is latent with a high electrostatic charge 32. In the present embodiment, the electrostatic latency 30 is a rectangular block filled with electrostatic charges, and the electrostatic charge reduction member 10 has a similar structure to the electrostatic latency 30, but more preferably has a slightly larger size. Of course, in other embodiments, the electrostatic charge reduction member 10 and the electrostatic latency 30 may have other sizes or structures. In the present embodiment, the electrostatic charge reduction member 10 and the electrostatic latency 30 may also have other structures, such as a square, a hemisphere, or other structures, as long as there is a contact surface therebetween.

As shown in fig. 3, the wet gas supplier continuously supplies wet gas having a relative humidity of more than 60% to a contact point of the first surface 11 of the electrostatic charge reduction member 10 and the discharge surface (not shown) of the electrostatic latency 30. Of course, in another embodiment, the wet gas supplier continuously supplies only the wet gas having a relative humidity in the range of 70% -99% to the discharge surface 31 or some other point of the first surface 11, and makes it possible for the discharge surface 31 and/or the first surface 11 to be wetted with the wet gas.

When the first surface 11 of the electrostatic charge reduction member 10 and the discharge surface of the electrostatic latency 30 are in contact with each other and then instantaneously separated for at most 5 seconds, it has been surprisingly found that the electrostatic charge on the electrostatic latency 30 is sharply decreased to less than half when the first surface 11 of the electrostatic charge reduction member 10 and the discharge surface of the electrostatic latency 30 are instantaneously in contact and separated. Preferably, the electrostatic charge on the electrostatic latency 30 drops sharply to less than a fraction, e.g., less than one tenth, of the original high electrostatic charge level. This is related to the contact time of the wet gases, the relative humidity, etc.

In the present embodiment, the wet gas supplier includes a wet gas generator 50 and an input pipe 60 for delivering the wet gas having a high relative humidity generated by the wet gas generator 50 to the electrostatic charge reducing member 10. The input pipe 60 is disposed along the longitudinal direction of the electrostatic charge reducing member 10 and provides a plurality of holes 61 for guiding the wet gas to the electrostatic charge reducing member 10. Preferably, the wet gas generator 50 may be a humidifier, or a device that generates wet gas by a jet of wet gas, evaporation of water vapor from a wet surface coating, capillary action, dipping, printing, heating water, or any other method known in the industry.

In the present embodiment, as shown in fig. 3, the first surface 11 of the electrostatic charge reduction member 10 may have a ventilation mesh structure in which wet gas easily enters and exits through a non-obstructive gas flow path in the ventilation mesh structure.

In this embodiment, reducing the electrostatic charge on the insulating material with a grounded electrostatic charge reducing component wetted with a wet gas column creates a new and economical method without the use of an air ionizer.

Fig. 4 is a schematic diagram of an electrostatic charge reduction system according to a third embodiment of the present application. As shown in fig. 4, the electrostatic charge reduction system includes a grounded conductor, an electrostatic charge reduction member electrically connected to the conductor, and a wet gas supplier connected to supply wet gas having a relative humidity of more than 60%. Preferably, the wet gas supplier continuously supplies the wet gas having a humidity (relative humidity) in the range of 70% -99%.

As shown in fig. 4, the conductor may be a ground line 200 having a resistance value of less than 10e7 ohms. The electrostatic charge reduction means may be the first roller 100 rotating in a first direction (e.g., counterclockwise or clockwise). The first roller 100 may include a roller body 102 having a cylindrical surface 101 and a roller bar 103 disposed at the center of the roller body 102 as a rotation shaft. The electrostatic latency may be the insulating film 300 freely rotating in the same direction (e.g., counterclockwise or clockwise). The wet gas supplier continuously supplies wet gas having a relative humidity of more than 60% to a contact point of the discharge surface 301 of the insulating film 300 and the cylindrical surface 101 of the roller body 102. Of course, in another embodiment, the wet gas supplier continuously supplies only the wet gas having a relative humidity in the range of 70% -99% to the discharge surface 301 or some other point of the cylindrical surface 101, and makes the discharge surface 301 and the cylindrical surface 101 wettable by the wet gas. The discharge surface 301 of the insulating film 300 is separated from the cylindrical surface 101 of the roller body 102 after being instantaneously contacted. In this manner, the high electrostatic charge on the discharge surface 301 of the insulating film 300 is unexpectedly reduced to an unexpectedly very low level, for example, less than one tenth of the initial electrostatic charge level. Of course, when the discharge surface 301 of the insulative film 300 is separated from the cylindrical surface 101 of the roller body 102 after being instantaneously contacted, the insulative film 300 and the roller 100 may be disposed in other directions, and the discharge surface 301 of the insulative film 300 and the cylindrical surface 101 of the roller body 102 move in the same direction. In another preferred embodiment, for example, the insulation film 300 may move in a horizontal direction, and the roller body 102 is disposed at the center of the roller body 103, and the roller body 102 rotates around the roller body 103, for example, in a counterclockwise direction or a clockwise direction. Thus, during the rotation of the roller bodies 102 and the transfer of the insulative film 300, the discharge surface 301 of the insulative film 300 is instantaneously contacted with and then separated from the cylindrical surface 101 of the roller bodies 102. In a simplified embodiment, the roller bar 103 and the roller body 102 may be formed in one piece. In other preferred embodiments, a plurality of first rollers 110 may be provided, which embodiments will be discussed later.

Preferably, the cylindrical surface 101 of the roller body 102 may be made of plastic, metal, wood, rubber or any combination of these materials. Preferably, the cylindrical surface 101 of the roller body 102 may be a ventilation mesh structure into and out of which the wet gas easily passes through a non-obstructive gas flow path in the ventilation mesh structure.

In the embodiment shown in fig. 4, the wet gas supplier includes a wet gas generator 500 and an input pipe 600 for transferring the wet gas having a high relative humidity generated by the wet gas generator 500 to the first roller 100. The inlet pipe 600 is arranged in the axial direction of the first roller and provides a plurality of holes 601 for guiding moisture to the cylindrical surface 101 of the roller body 102. Preferably, the wet gas generator 50 may be a humidifier, or a device that generates wet gas by a jet of wet gas, evaporation of water vapor from a wet surface coating, capillary action, dipping, printing, heating water, or any other method known in the industry. It should be noted that the insulating film 300 may be replaced by any other flexible material (e.g., a tape or a plate or a mesh).

Fig. 5A-5D are schematic diagrams of variations of an electrostatic charge reduction system according to a third embodiment of the present application that can accommodate different insulating film in-and-out directions to achieve various film processing modes, thereby providing greater flexibility under the conditions of use of the present application.

As shown in fig. 5A, two first rollers 100 electrically connected to the ground conductor are disposed adjacent to each other in the longitudinal direction. Preferably, the two first rollers 100 may be constructed according to any of the embodiments discussed in fig. 4. In the present embodiment, the input pipe 620 connected to the wet gas generator 500 has a specific configuration. As shown in fig. 5A, the input pipe 620 has a main pipe connected to the wet gas generator 500 and two

branch pipes

621 and 624 parallel to the axes of the two first rollers 100, respectively. The insulating film 300 first moves in a horizontal direction so that its discharge surface is in contact with the cylindrical surface of the first roller 100 disposed at the bottom, and then instantaneously separates from the cylindrical surface. Then, the insulating film 300 rotates upward together with the first roller 100 disposed at the bottom, thereby transferring the insulating film 300 to pass through the first roller 100 disposed at the top. Thereafter, the discharge surface of the insulating film 300 is brought into contact with the cylindrical surface of the first roller 100 disposed at the top and then instantaneously separated therefrom. After that, the insulating film 300 passes through the first roller 100 disposed at the top and moves in the horizontal direction again.

As shown in fig. 5A, the

branch pipes

621 and 624 are disposed at opposite sides of the two first rollers 100, and a plurality of

holes

622 and 623 for guiding the wet gas thereto are further provided on the surface facing the cylindrical surfaces of the two first rollers. Alternatively, the plurality of holes may be replaced by long slits with thin air gaps.

Of course, in another embodiment, two first rollers 100 may be disposed adjacent to each other in the horizontal direction. In this embodiment, the input pipe 620 may be located in a horizontal direction or a longitudinal direction for guiding the wet gas to the cylindrical surfaces of the two first rollers, which are in contact with the discharge surface of the insulating film 300 and then instantaneously separated. Of course, two rollers 100 may be disposed adjacent to each other in other directions, such as at an angle relative to the longitudinal direction, as shown in FIG. 5B. In this embodiment, the input tubes 620 may each be positioned at a corresponding angle.

Fig. 5C shows another variation in which four first rollers 100 are provided. In the present embodiment, four first rollers 100 are arranged in parallel in the horizontal direction. As discussed above, the insulating film 300 moves in the horizontal direction to pass through the four first rollers 100, to contact the cylindrical surface of each of the first rollers 100 through the discharge surface thereof and then instantaneously separate. As shown in fig. 5C, the input pipe 620 has one main pipe connected to the wet gas generator 500 and two branch pipes having a plurality of holes for guiding the wet gas to the cylindrical surfaces of any two of the first rollers 100. Of course, in another embodiment, the input pipe 620 may have more or fewer branch pipes having a plurality of holes for guiding the wet air flow to the cylindrical surface of the first roller 100.

Fig. 5D and 5E show a further variation in which four first rollers 100 are provided. In the embodiment shown in fig. 5D, four first rollers 100 are arranged in two groups in parallel in the horizontal direction. In each set, two first rollers 100 are disposed parallel to each other in the longitudinal direction. The insulating film 300 is first moved in a horizontal direction and then moved in a longitudinal direction to pass through the four first rollers 100.

As shown in fig. 5D, the input pipe 620 has one main pipe connected to the wet gas generator 500 and two branch pipes having a plurality of holes for guiding the wet gas to the cylindrical surfaces of any two of the first rollers 100. Of course, in another embodiment, the input pipe 620 may have more or fewer branch pipes having a plurality of holes for guiding the wet air flow to the cylindrical surface of the first roller 100. Of course, the manifold can be adjusted to any position in order to direct the wet gas to the cylindrical surface.

In the embodiment shown in fig. 5E, four first rollers 100 are arranged in two groups in parallel in the horizontal direction. In each group, three first rollers 100 are arranged parallel to each other in the longitudinal direction. The other first roller and the lowermost one of the three first rollers are disposed in parallel with each other. In another embodiment, the another first roller 100 and the uppermost one of the three first rollers may be disposed in parallel with each other. The insulating film 300 is first moved in a horizontal direction and then moved in a longitudinal direction to pass through the four first rollers 100.

Of course, in other embodiments, the first rollers may be disposed in a different manner as long as the discharge surface of the insulating film 300 may move to contact with and then instantaneously separate from at least one cylindrical surface of at least one of the first rollers 100. Preferably, the insulating film 300 may move to contact each cylindrical surface of all the first rollers 100 through the discharge surface thereof and then instantaneously separate therefrom.

As shown in fig. 5E, the input pipe 620 has one main pipe connected to the wet gas generator 500 and two branch pipes having a plurality of holes for guiding the wet gas to the cylindrical surfaces of any two of the first rollers 100. Of course, in another embodiment, the input pipe 620 may have more or fewer branch pipes having a plurality of holes for guiding the wet air flow to the cylindrical surface of the first roller 100.

Fig. 6 is a schematic diagram of an electrostatic charge reduction system according to a fourth embodiment of the present application. As shown in fig. 6, the electrostatic charge reduction system includes a grounded conductor, an electrostatic charge reduction member electrically connected to the conductor, and a wet gas supplier continuously supplying wet gas having a relative humidity of more than 60%. Preferably, the wet gas supplier continuously supplies the wet gas having a humidity (relative humidity) in the range of 70% -99%.

As shown in fig. 6, the conductor may be a ground line 200 having a resistance of less than 10e7 ohms. The electrostatic charge reduction component may be a second roller 110, the second roller 110 comprising a shaft 112 electrically connected to the ground line 200 and a roller surface 111 surrounding the shaft 112. Preferably, the roller surface 111 may be a ventilation mesh structure into and out of which the wet gas easily passes through a non-obstructive gas flow path in the ventilation mesh structure. Preferably, the roller surface 111 is rotatable about the axle 112. Preferably, the roller surface 111 and the shaft 112 may also be integral or merely separate. Preferably, the roller surface 111 and the shaft 112 can also be made of plastic, metal, wood, rubber or any combination of these materials.

In the embodiment shown in fig. 6, the wet gas supplier includes the wet gas generator 500 and an input pipe 610 for delivering the wet gas having a high relative humidity generated by the wet gas generator 500 to the second rollers 110. The input pipe 610 is disposed above the insulating film 310 and parallel to the shaft 112. The surface of the input pipe 610 facing the axle 112 is provided with a plurality of holes 611 for guiding the wet gas to the roller surface 111 of the second roller 110. Preferably, the wet gas generator 50 may be a humidifier, or a device that generates wet gas by a jet of wet gas, evaporation of water vapor from a wet surface coating, capillary action, dipping, printing, heating water, or any other method known in the industry. It should be noted that the insulating film 300 may be replaced by any other flexible material (e.g., a tape or a plate or a mesh).

As shown in fig. 6, the electrostatic latency may be an insulating film 310 moving in a first direction (e.g., a horizontal direction). The lever shaft 112 is disposed above the insulating film 310 such that the roller surface 111 of the second roller 110 is instantaneously contacted with and then separated from the discharge surface 311 of the insulating film 310. In this manner, the electrostatic charge on the insulating film 310 drops sharply to less than a fraction, e.g., less than one-tenth, of the original high electrostatic charge level. In a preferred embodiment, the insulating film 310 may be wound in a rotation shaft and the insulating film 310 may move in a horizontal direction during rotation of the rotation shaft.

Fig. 7A-C are schematic diagrams of an electrostatic charge reduction system according to a fifth embodiment of the present application. As shown in fig. 7A-7C, the electrostatic charge reduction system includes a grounded conductor, an electrostatic charge reduction member electrically connected to the conductor, and a wet gas supplier continuously supplying wet gas having a relative humidity of more than 60%.

For simplicity of illustration, in this embodiment, the conductors and ground are not shown in the drawings, and those skilled in the art will appreciate that the conductors and ground may be located anywhere in accordance with the above discussion.

As shown in fig. 7A-7C, the electrostatic charge reduction member may be a distributor 120 formed from a plate 122 having a plurality of distribution rods 124, the distribution rods 124 being arranged in a circular pattern, such as in one or more circular rings.

The plurality of dispensing rods 124 and the plate 122 are rotatably disposed relative to one another. For example, the plate 122 may be a rotatable circular plate, and the plurality of distribution rods 124 may be fixed to the plate 122 or rotatably disposed on the plate 122. Further, for example, the plate 122 may be fixed, and the plurality of distribution levers 124 may be rotatably provided on the plate 122. In a preferred embodiment, the plate 122 may be a circular plate and made of plastic, metal, wood, rubber, or any combination of these materials.

As shown in fig. 7A-7C, the plate 122 has attached around its edges a sidewall cover forming an outer shell 123 having an opening 121 and a stem 125 in the middle. In a preferred embodiment, the housing 123 is separable from the plate 122. In this embodiment, the electrostatic latency may be an adhesive tape 320, which tape 320 rolls into the dispenser 120 at the opening 121, then passes through the plurality of dispensing rods 124 and finally rolls onto the core rod 125, or rolls out of the dispenser 120 at the opening 121 with or without passing through the core rod 125. Thus, in a simplified embodiment, the plate 122 may be provided without such core rods 125.

In one embodiment of the present application, at least one of the plurality of dispensing sticks 124, and preferably all of the plurality of dispensing sticks 124, is wetted with a humid gas having an RH (relative humidity) of greater than 60% via a humid gas supply. In another embodiment of the present application, the core rod 125 is wetted with a wet gas having a relative humidity greater than 60%. In another embodiment, the plurality of dispensing rods 124 and the core rod 125 are wetted with a humid gas having an RH (relative humidity) above 60%. In another embodiment, the entire dispenser 120 is wetted by the humid gas with an RH (relative humidity) higher than 60% provided by the continuous supply of said humid gas.

As shown in fig. 7A-7C, when the adhesive tape 320 is rolled into the dispenser 120 at the opening 121, the discharge surface of the adhesive tape 320 contacts and then instantaneously separates from at least one outer surface of at least one of the plurality of dispensing sticks 124 or the core rod 125 (preferably all outer surfaces of the dispensing sticks 124 and the core rod). In this manner, the high electrostatic charge on the discharge surface of the tape 320 will be unexpectedly reduced to an exceptionally low level, for example less than one tenth of the initial electrostatic charge level.

In the preferred embodiment shown in fig. 7A, the wet gas supplier includes a wet gas generator and an input pipe for delivering the wet gas generated by the wet gas generator to the electrostatic charge reducing member. In the present embodiment, the input pipe 630 connected to the wet gas generator is specially constructed. As shown in fig. 7A, the input pipe 630 has a main pipe connected to the wet gas generator and two branch pipes 631 respectively parallel to the conveying direction of the adhesive tape 320 and adjacent to the opening 121. The two branch pipes 631 have a plurality of holes 61 for introducing the wet gas into the distributor 120. Preferably, only one small opening 121 is provided to allow a minimum volume of wet gas to enter and exit the distributor 120 to achieve an economical and efficient electrostatic charge reduction goal.

Preferably, the plate 122 may have a larger outer ring formed by a plurality of dispensing bars 124 disposed on a larger circumference to allow the tape 320 to form a larger wrap around the outer ring to achieve a longer transport distance, thereby providing more time for the electrostatic charge on the tape 320 to steadily discharge before being dispensed. This design will further improve the static suppression efficiency, especially for very sensitive microchips or assembled PCBs (printed circuit boards). In a preferred embodiment, a plurality of dispensing rods 124 are provided at regular intervals. Of course, in another embodiment, the plurality of dispensing rods 124 may be arranged in a different manner, such as irregular spacing.

However, in a first variation shown in fig. 7D, more dispensing rods 124 are provided to form a double circle pattern. In other variations, more dispensing rods 124 may be provided to form more circles to achieve greater transport distances, providing more time for the electrostatic charge on the tape 320 to steadily discharge before being dispensed. These designs are particularly useful in ultra-sensitive devices where a minimum amount of electrostatic charge would pose a significant threat and risk of damage to highly complex, large-scale integrated circuits.

Fig. 8 is a schematic diagram of an electrostatic charge reduction system according to a sixth embodiment of the present application. As shown in fig. 8, the electrostatic charge reduction system includes a grounded conductor, an electrostatic charge reduction member electrically connected to the conductor, and a wet gas supplier continuously supplying wet gas having a relative humidity of more than 60%.

In the present application, the electrostatic charge reducing means may be an adhesive film removing mechanism 130 including at least two side structures 131, each side structure 131 having one groove 132 facing each other. A pair of slidable rotating rods 133 are held in the two slots 132 by insertion of both ends into the slots 132 to allow free and easy sliding movement of the slidable rotating rods 133. Preferably, the adhesive film removing mechanism 130 has a low-height square or rectangular structure to allow the groove 132 to have an elongated shape. The two slidable turning bars 133 are electrically connected to at least one of the two side structures 131, which side structure 131 is further electrically connected to a ground wire 200 by means of a further conductor 134.

In the present embodiment, the wet gas supplier includes the wet gas generator 500 and an input pipe 640 for delivering the wet gas having a high relative humidity generated by the wet gas generator 500 to the adhesive film removing mechanism 130. The input pipe 640 may have a main pipe passing through holes provided on a rod support on one side structure 131 and at least two branch pipes 641 having a plurality of holes 642 for guiding wet gas to the slidable rotating rod 133. As shown in fig. 8, two branch pipes 641 may be disposed at opposite sides of the slidably rotating rod 133.

In the present application, the electrostatic latency may be an adhesive film 330 on a semiconductor wafer or other carrier. During the act of removing the adhesive film from the semiconductor wafer, an initial small portion of the adhesive film 330 is peeled off the wafer and inserted into the gap of the two slidable rotating rods 133, and then passes through and is pulled upward out of the gap. When the discharge surface of the adhesive film 330 is instantaneously contacted with the outside of the slidable rotating rod 133 and then separated, the electrostatic charge on the adhesive film 330 is sharply reduced to less than half of the original. Preferably, the electrostatic charge on the adhesive film 330 drops sharply to less than a fraction, e.g., less than one tenth, of the original high electrostatic charge level. This is related to the contact time and the relative humidity of the humid gas

Fig. 9A-9D are variations of the embodiment shown in fig. 4 and 5A-5D. For the sake of brevity, only the particular arrangement thereof will be described in detail. As shown in fig. 9A and 9B, the electrostatic charge reducing means includes at least a first roller 710, a second roller 720, and a support 730 for supporting the first roller 710 and the second roller 720. In the present embodiment, the first roller 710 and the second roller 720 are electrically connected to each other and placed in parallel by the bracket 730. An input pipe 740 connected to the wet gas generator is also supported by the holder 730. In this embodiment, the input tube 740 is disposed above the first and

second rollers

710, 720 such that the support 730 holds the input tube 740 and the two first and

second rollers

710, 720 together in a triangular configuration to allow free movement in any plane. For example, the bracket 730 may be formed in an isosceles triangle or a right triangle. The first roller 710 and the second roller 720 are disposed in parallel at the lower portion of the triangular shape, and the input pipe 740 is disposed at the upper portion of the triangular shape (see fig. 9A-9B). It should be noted that the stent may also have other shapes, such as square, rectangular, or other regular or irregular shapes. Such portable structures may be used alone, mounted on a frame, suspended in the air, integrated inside or outside a machine, etc. One skilled in the art will recognize that additional input tubes 740 or rollers may be added to create more design variations to achieve greater flexibility in the application of the present invention. As shown in fig. 9C and 9D, the holder 730 is a rectangular holder, two rollers are provided in parallel at a lower portion of the rectangular holder, and two input pipes or three input pipes are provided in parallel at an upper portion of the rectangular holder.

Fig. 10 is a schematic diagram of another electrostatic charge reduction system according to an eighth embodiment of the present application. As shown in fig. 10, the electrostatic charge reduction system includes a wet gas generator, a hollow chamber structure 800, and a wet gas transfer member 900 for transferring the wet gas generated from the wet gas generator to the hollow chamber structure 800, and a roller 700. In this embodiment, the wet gas generator may be configured as described above, and the wet gas transfer member 900 may include an input pipe as described above, which communicates with the input pipe and the gas inlet 910 of the hollow chamber structure 800, thereby transferring the wet gas having a high relative humidity generated by the wet gas generator to the hollow chamber structure 800. As shown in fig. 10, the hollow chamber structure 800 may be a semi-cylindrical hollow chamber structure composed of a semi-cylindrical inner wall 820 and a semi-cylindrical outer wall 810, wherein the air holes 830 are distributed on the entire surface of the semi-cylindrical inner wall 820. The air inlet 910 is preferably disposed between the semi-cylindrical inner wall 820 and the semi-cylindrical outer wall 810. The rollers 700 are placed along the central axis of the hollow chamber structure 800 by two side brackets provided at the ends of the hollow chamber structure 800.

In this embodiment, the wet gas fed into the semi-cylindrical hollow chamber structure 800 passes through the air holes 830 and directly reaches the surface of the electrostatic latency, for example, the insulating film on the cylindrical surface of the roller 300, and finally flows out through the open gap at the bottom of the semi-cylindrical hollow chamber structure 800. Surprisingly, the static reduction capability using this method performed equally well in terms of static reduction. It should be noted that the semi-cylindrical hollow chamber structure 800 may be configured in any shape, such as a hollow cylindrical shape, a hollow cubic shape, and the like.

Fig. 11A-11B are diagrams of a preferred embodiment of a roller. As shown in fig. 11A, roller 700 may be wrapped with a static dissipative or conductive layer of flexible foam sheet 760 to form a soft surface conductive roller. Surprisingly, such additional wrapped conductive rollers achieve very similar results to conductive rollers without any wrapping. The conductive foam is added to provide a soft surface to improve the contact surface between the film and the roller for optimal electrostatic charge reduction performance. As shown in fig. 11B, the roller 700 may be wrapped with a static dissipative or conductive layer of protruding stubs 770 that cover the entire surface of the roller, forming a uniformly distributed surface of protruding static dissipative or conductive stubs. Also surprisingly, although not as flexible as the soft surface design encasing the soft conductive foam sheet, this design can still achieve a reduction in electrostatic charge down to very low electrostatic charge levels, and the uniformly distributed protruding electrostatic dissipation or conductive stub surface design will minimize contact surface area to reduce the risk of contact contamination in certain specific applications.

The electrostatic charge reduction system using a wet gas of the present invention provides for consistent optimal electrostatic charge reduction in a consistent direction of the adhesive film removal process.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.

While the invention has been described with reference to specific embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from its scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. An electrostatic charge reduction system using a wet gas, comprising a conductor connected to a low voltage power source, an electrostatic charge reduction member having at least a first surface, and a wet gas supplier for continuously supplying a wet gas having a relative humidity of more than 60% to the first surface of the electrostatic charge reduction member and/or a discharge surface of an electrostatic latent object latent with an electrostatic charge; wherein the electrostatic charge on the electrostatic latency is at least sharply reduced to at least half of an original charge by instantaneously contacting and separating the first surface of the electrostatic charge reduction member with and from the discharge surface of the electrostatic latency.

2. The electrostatic charge reduction system using wet gas according to claim 1, wherein the first surface of the electrostatic charge reduction member and/or the discharge surface of the electrostatic latent object on which the electrostatic charge is at least sharply dropped to less than one tenth of the original to zero is wetted with wet gas having a relative humidity in a range of 70 to 99%.

3. The electrostatic charge reduction system using wet gas according to claim 1 or 2, wherein the wet gas supplier includes a wet gas generator and an input pipe for delivering the wet gas generated by the wet gas generator to the electrostatic charge reduction member.

4. The electrostatic charge reduction system using wet gas according to claim 3, wherein the first surface of the electrostatic charge reduction member is a ventilation mesh structure, and the wet gas easily enters and exits the ventilation mesh structure through a non-obstructive gas flow path in the ventilation mesh structure.

5. The electrostatic charge reduction system using wet gas according to claim 3, wherein the electrostatic charge reduction means comprises a roller disposed in a first direction, the electrostatic latent object is an electrostatic latent object moving in a second direction different from the first direction, and when the first surface of the roller is instantaneously contacted and then separated from the discharge surface of the flexible electrostatic latent object, the first surface of the roller and the discharge surface of the flexible electrostatic latent object move in the same direction.

6. The electrostatic charge reduction system using wet gas according to claim 5, wherein the rollers comprise at least one first roller comprising a roller body having a cylindrical surface and a roller rod connecting the conductors, wherein a discharge surface of the flexible electrostatic latent object instantaneously contacts and then separates from the cylindrical surface of the roller body.

7. The electrostatic charge reduction system using wet gas of claim 6, wherein one said first roller is provided, said first roller rotates in a counterclockwise direction and said flexible electrostatic latency rotates in the same counterclockwise direction to pass through said first roller.

8. The electrostatic charge reduction system using wet gas according to claim 6, wherein more than one of the first rollers is provided, the roller bodies of each of the first rollers rotate about the roller axes thereof, the movement of the flexible electrostatic latent object passes through the first rollers, so that the discharge surface of the flexible electrostatic latent object is instantaneously contacted with and then separated from the cylindrical surface of the roller body of at least one of the first rollers.

9. The electrostatic charge reduction system using wet gas according to claim 8, wherein the input pipe includes at least two branch pipes for conveying the wet gas generated by the wet gas generator to at least two of the first rollers.

10. The electrostatic charge reduction system using wet gas according to claim 5, wherein the roller comprises at least one second roller comprising a rod shaft electrically connecting the conductor and a roller surface surrounding the rod shaft, the flexible electrostatic latent object moves in a horizontal direction, and the rod shaft is disposed above the flexible electrostatic latent object such that the roller surface of the second roller is instantaneously contacted with and then separated from the discharge surface of the flexible electrostatic latent object.

11. The wet gas based electrostatic charge reduction system of claim 10, wherein the rod shaft is disposed in a horizontal direction and the roller surface is rotatable about the rod shaft.

12. The electrostatic charge reduction system using wet gas of claim 11, wherein the input pipe is disposed parallel to the second roller and has a plurality of holes on a surface facing the roller surface for guiding the wet gas.

13. The electrostatic charge reduction system using wet gas according to claim 5, wherein the roller comprises a distributor formed of a plate having a plurality of distribution rods rotatably disposed with respect to each other, and the discharge surface of the flexible electrostatic latent object is instantaneously contacted with and then separated from the outer surface of at least one of the plurality of distribution rods.

14. The wet gas using electrostatic charge reduction system of claim 13, wherein the plurality of distribution rods are arranged in a ring pattern on the plate, and a sidewall cover is attached to the plate around its edge to form a housing having an opening through which the flexible electrostatic latent may be drawn into the distributor and through the plurality of distribution rods.

15. The wet gas electrostatic charge reduction system of claim 14, wherein the plate has a core bar attached to a middle portion thereof, and the flexible electrostatic latent object is wound into and through the plurality of distribution rods and finally wound onto the core bar or wound out of the distributor at an opening of the outer shell.

16. The electrostatic charge reduction system using wet gas according to claim 15, wherein the input pipe includes at least two branch pipes for conveying the wet gas generated by the wet gas generator to the distributor; the two branch pipes are arranged at positions close to the opening, wherein one branch pipe is positioned above the flexible electrostatic latency, and the other branch pipe is positioned below the flexible electrostatic latency.

17. An electrostatic charge reducing system using wet gas according to any one of claims 1 to 4, wherein the electrostatic charge reducing means is an adhesive film removing mechanical mechanism comprising at least two side structures each having one slot facing each other, a pair of slidable rotating rods held in the two slots to allow the slidable rotating rods to freely and easily slide, and the flexible electrostatic latent object is inserted into a gap between the slidable rotating rods so that a discharge surface of the flexible electrostatic latent object is instantaneously contacted and then separated from an outer surface of the slidable rotating rods.

18. The wet gas electrostatic charge reduction system of claim 17, wherein the slidable rotating rod is electrically connected to at least one of the two side structures, the two side structures further electrically connecting the conductor.

19. The electrostatic charge reduction system using wet gas according to claim 18, wherein the input pipe includes at least two branch pipes for conveying the wet gas generated by the wet gas generator to the adhesive film removing mechanism; the two branch pipes are disposed at opposite sides of the slidable rotating rod.

20. The electrostatic charge reduction system using wet gas according to claim 5, wherein the electrostatic charge reduction means comprises at least a first roller and a second roller which are disposed at intervals in a first direction, and a roller support for fixing the first roller, the second roller and the input pipe, the input pipe being disposed above the flexible electrostatic latency.

21. The electrostatic charge reduction system using wet gas according to claim 20, wherein the roller holder has a triangular shape and is movable in the second direction, the first roller and the second roller are disposed in parallel at a lower portion of the triangular shape, and the input pipe is disposed at an upper portion of the triangular shape.

22. The electrostatic charge reduction system using wet gas according to claim 20, wherein the roller holder has a rectangular shape and is movable in the second direction, the first roller and the second roller are disposed in parallel in a lower portion of the rectangular shape, and two or more input pipes are disposed in an upper portion of the rectangular shape.

23. An electrostatic charge reduction system using wet gas according to claim 1 or 2, wherein the wet gas supplier includes a wet gas generator, a hollow chamber structure composed of an outer wall and an inner wall, and a wet gas transfer member for transferring the wet gas generated by the wet gas generator to the hollow chamber structure, the inner wall having the gas holes distributed throughout, the electrostatic charge reduction means including rollers provided along a central axis of the hollow chamber structure.

24. An electrostatic charge reduction system using wet gases according to any of claims 5 to 23 wherein the rollers are wrapped by an electrostatic dissipative or conductive layer of resilient foam sheet or by protruding stubs.

25. An electrostatic charge reduction system using wet gas according to any one of claims 1 to 24, wherein the resistor has a resistance value of less than 10e7 ohms and is grounded or connected in series to the low voltage power supply.

26. The electrostatic charge reduction system using wet gases of claim 1, wherein said flexible electrostatic latency comprises a polymeric or insulating film, a polymeric or insulating block, a polymeric or insulating sheet, a polymeric or insulating tape, or a polymeric or insulating mesh, said electrostatic charge reduction component is made of plastic, metal, wood, rubber, or combinations thereof.