CN112504456A - Micro-area differential reflection type spectrum measurement system and method - Google Patents
Micro-area differential reflection type spectrum measurement system and method Download PDFInfo
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- CN112504456A CN112504456A CN202011292390.6A CN202011292390A CN112504456A CN 112504456 A CN112504456 A CN 112504456A CN 202011292390 A CN202011292390 A CN 202011292390A CN 112504456 A CN112504456 A CN 112504456A
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- 238000001228 spectrum Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000005259 measurement Methods 0.000 title claims description 29
- 239000000523 sample Substances 0.000 claims abstract description 28
- 239000013074 reference sample Substances 0.000 claims abstract description 20
- 238000005286 illumination Methods 0.000 claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims description 26
- 239000013307 optical fiber Substances 0.000 claims description 24
- 239000000835 fiber Substances 0.000 claims description 10
- 230000003595 spectral effect Effects 0.000 claims description 10
- 238000012360 testing method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000001055 reflectance spectroscopy Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J2003/425—Reflectance
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- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention relates to a micro-area spectrum measuring system, which comprises a light source module, a beam splitter, a measuring light path, a reference light path and a spectrum receiving module, wherein: the light source module is used for collimating and outputting the unpolarized light beam generated by the polychromatic light source; the beam splitter is used for splitting the output parallel light beams of the light source module into measuring light beams and reference light beams which respectively enter the measuring light path and the reference light path; the measuring light path is used for converging the measuring light beam to the surface of the sample to be measured to form a micro-area light spot to form critical illumination, and enabling a reflected light beam reflected by the sample to be measured to return through an objective lens of the measuring light path, and the light beam enters the spectrum receiving module after passing through the beam splitter; and the spectrum receiving module is used for collecting the reflected light differential spectrum of the sample to be detected and the reference sample. The invention also provides a measuring method of the micro-area differential reflection spectrum realized by the measuring system.
Description
Technical Field
The invention relates to the technical field of design of a spectral measurement system, in particular to a differential reflection type spectral measurement system and method of a micro-region.
Background
In general, the spatial resolution of a spectroscopic measurement system depends on the size of the spot in the system. For a spectral measurement system using a free light path, the light spot is about the order of cm; for a spectroscopic measurement system using optical fibers, the spot is on the order of mm. In the field of micro-nano photonics, in order to research the spectral performance of a microscopic sample, the spatial resolution of a spectral measurement system is often required to be improved to the order of μm. The difficulty in doing so is that the spot must be reduced by a factor of about a hundred, while the sensitivity of the system is increased by a factor of about a hundred.
The differential reflection spectrum technology is a high-sensitivity spectrum measurement method, has the characteristics of non-contact, no damage and the like, and can realize the on-line detection of the physical change or chemical change process. The technology is mainly applied to the fields of semiconductor research, in-situ measurement of the thickness of a nano film, optical characterization of a nano structure, surface defect detection and the like. Current differential reflectance spectroscopy systems do not have the measurement capability to detect micro-area differential reflectance signals, which limits their study of different structural problems that may exist with microscopic samples.
Disclosure of Invention
The invention provides a differential reflection type spectrum measurement system and method of a micro-region, and the technical scheme is as follows:
a micro-area spectrum measuring system comprises a light source module, a beam splitter, a measuring light path, a reference light path and a spectrum receiving module, wherein:
the light source module is used for collimating and outputting the unpolarized light beam generated by the compound color light source and illuminating the whole system, and comprises: a polychromatic light source for outputting unpolarized continuous polychromatic light; an incident optical fiber for conducting the output light of the polychromatic light source; and the collimating mirror is used for adjusting the output light of the incident optical fiber into a parallel light beam.
The beam splitter is used for splitting the output parallel light beams of the light source module into measuring light beams and reference light beams which respectively enter the measuring light path and the reference light path;
the measuring light path is used for converging the measuring light beam to the surface of the sample to be measured to form a micro-area light spot to form critical illumination, and enabling a reflected light beam reflected by the sample to be measured to return through an objective lens of the measuring light path, and the light beam enters the spectrum receiving module after passing through the beam splitter;
the reference light path is used for converging the reference light beam to the surface of a reference sample to form micro-area light spots to form critical illumination, so that a reflected light beam reflected by the reference sample returns through the objective lens of the reference light path, and the light beam enters the spectrum receiving module after passing through the beam splitter;
a spectral receiving module comprising: the transmission light beam and the reflection light beam after passing through the beam splitter are converged into the emergent optical fiber through the cylindrical mirror and enter the spectrometer, and the transmitted light beam and the reflection light beam are used for collecting the reflected light differential spectrum of the sample to be measured and the reference sample.
Preferably, the measuring optical path includes:
the measuring light path shutter is used for controlling the on-off of the light beam in the measuring light path; and the measuring light path objective is used for realizing critical illumination and improving the transverse spatial resolution of the micro-area.
Preferably, the reference light path includes:
the reference light path shutter is used for controlling the on-off of the light beam in the reference light path; and the reference light path objective is used for realizing critical illumination and improving the transverse spatial resolution of the micro-area.
The incident light fiber can be a multimode fiber with the core diameter of more than 450 microns. The emergent fiber is a multimode fiber with a core diameter of 50 microns.
The invention also provides a method for measuring the micro-area differential reflection spectrum, which comprises the following steps:
step A: controlling the collimated output of the polychromatic light source through the incident optical fiber, and selecting a reference sample with the same batch of substrate and sample to be detected;
and B: closing the measuring light path shutter, opening the reference light path shutter, and measuring the reflection spectrum Ref of the reference sample;
and C: opening a measuring light path shutter, closing a reference light path shutter, and measuring a reflection spectrum Test of a sample to be measured;
step D: and carrying out differential operation on the light intensity data of Ref and Test in the full spectrum width range to obtain a differential reflection spectrum.
From the above technical solutions, it can be seen that the differential reflection type spectrum measurement system and method of the micro-region of the present disclosure have at least one or some of the following beneficial effects:
(1) by utilizing the conjugate relation between the end image of the emergent optical fiber and the planar image of the sample, the emergent optical fiber with smaller core diameter is selected to be matched with the high-power objective lens, so that the transverse spatial resolution is high, and the spectral information acquisition of a micro-region can be realized.
(2) The size of the micro-regions can be adjusted as desired. The optical path structure is simple, the interchangeability of optical devices is good, and the expansibility is good.
(3) The measurement error caused by the light intensity drift can be reduced by using the reference light path.
(4) The measurement of the reflectivity of the surface of the sample can be realized.
Drawings
Fig. 1 is a schematic diagram of a differential reflection type optical spectrum measurement system of a micro-region according to an embodiment of the disclosure.
Fig. 2 is a block flow diagram of a micro-area differential reflection type optical spectrum measurement method according to an embodiment of the present disclosure.
[ description of main reference numerals in the drawings ] of the embodiments of the present disclosure
1-a white light source; 2-an incident optical fiber;
3-a collimating mirror; 4-a beam splitter;
5-measuring the optical path shutter; 6-measuring the light path objective;
7-a sample to be tested; 8-reference optical path shutter;
9-reference optical path objective lens; 10-a reference sample;
11-a cylindrical mirror; 12-an exit fiber;
13-spectrometer.
Detailed Description
The present disclosure provides a differential reflection type spectrum measuring system and method of micro-region, which will be described in detail with reference to the accompanying drawings in conjunction with the specific embodiments for making the objects, technical solutions and advantages of the present invention clearer.
Specifically, the differential reflection type spectrum measurement system and method of the micro-region can measure the differential reflection light intensity signal in a dozen micron region of a sample, and comprises a light source module, a beam splitter, a measurement light path, a reference light path and a spectrum receiving module; the light source module outputs unpolarized complex-color parallel light beams; the parallel light beam is divided into two beams by a beam splitter, wherein one beam is used as a measuring light beam to enter a measuring light path, and the other beam is used as a reference light beam to enter a reference light path; the measuring light path converges the measuring light beam to the surface of the sample to be measured to form a micro-area light spot to form critical illumination, and the reflected light beam reflected by the sample to be measured returns through the objective lens of the measuring light path, and the light beam enters the spectrum receiving module after passing through the beam splitter; the reference light path converges the reference light beam to the surface of the reference sample to form a micro-area light spot to form critical illumination, a reflected light beam reflected by the reference sample returns through the reference light path objective lens, and the light beam enters the spectrum receiving module after passing through the beam splitter; the spectrum receiving module is used for respectively collecting the light intensity of the reflected light reflected by the sample to be detected and the reference sample to obtain the reflection spectra respectively corresponding to the sample to be detected and the reference sample; using a differential reflection calculation method, a differential reflection spectrum can be obtained. The differential-based measurement method can effectively inhibit common-mode errors.
FIG. 1 is a schematic diagram of a differential reflection type optical spectrum measurement system of a micro-region according to an embodiment of the disclosure. As shown in fig. 1, the light source module includes: white light source 1, incident optical fiber 2, collimating mirror 3. The white light source 1 may be a xenon lamp, but is not limited thereto. The incident optical fiber can be multimode fiber with core diameter above 450 μm. The collimating mirror 3 can be a reflective collimating mirror. The beam splitter 4 may be a 1:1 non-polarizing beam splitter.
The measuring optical path comprises a measuring optical path shutter 5 and a measuring optical path objective 6, and the reference optical path comprises a reference optical path shutter 8 and a reference optical path objective 9; wherein the measuring optical path shutter 5 and the reference optical path shutter 8 can be selected from electric shutters; the objective lens 6 of the measuring optical path and the objective lens 9 of the reference optical path can adopt 20-time apochromatic objective lenses of the same batch.
The spectrum receiving module includes: a cylindrical mirror 11, an emergent optical fiber 12 and a spectrometer 13. Wherein, the tube lens 11 can be a tube lens matched with the objective lens of the measuring (reference) light path; the emergent optical fiber 12 can be a multimode optical fiber with the core diameter of 50 microns; the spectrometer 13 may be a PDA type spectrometer.
Emergent light of the white light source 1 is transmitted by an incident optical fiber 2, and is changed into parallel light beams through a collimating mirror 3, after the parallel light beams are incident on a beam splitter 4, reflected light beams generated by the beam splitter 4 are converged and incident on the surface of a sample 7 to be measured through a measuring light path objective lens 6 after passing through a measuring light path shutter 5; the light beam reflected by the surface of the sample 7 to be measured passes through the objective lens 6 of the measuring light path, and then the transmitted light beam passing through the beam splitter 4 is converged into the emergent optical fiber 12 through the cylindrical lens 11 and enters the spectrometer 13; the transmitted beam generated by the beam splitter 4 passes through a reference optical path shutter 8 and then is converged by a reference optical path objective lens 9 to be incident on the surface of a reference sample 10; the light beam reflected by the surface of the reference sample 10 passes through the reference optical path objective lens 9, and then the reflected light beam after passing through the beam splitter 4 is converged into the exit optical fiber 12 through the cylindrical mirror 11 and enters the spectrometer 13.
According to the differential reflection type spectrum measurement system of the micro-region, the reference light path can realize real-time measurement of light intensity, and the key point for reducing the error of a light intensity measurement signal is achieved. The beam splitter enables incident light and emergent light of a measurement (reference) light path to coincide, so that the working distance is convenient to adjust, and differential reflection spectrum measurement is realized. Through one-time measurement, the differential reflection signal of the full spectrum can be rapidly and accurately acquired. The spectral measurement range of the optical fiber spectrometer is 400-900 nm, and the measurement light spot with the diameter smaller than 100 mu m can be obtained by adjusting the core diameter of the emergent optical fiber and the magnification of the objective lens.
Fig. 2 is a block flow diagram of a micro-area differential reflection type optical spectrum measurement method according to an embodiment of the present disclosure. As shown in fig. 2, includes: step A: controlling a white light source 1 to output parallel light beams through an incident optical fiber 2 and a collimating mirror 3, and selecting a reference sample 10 with a substrate in the same batch as a sample 7 to be detected; and B: closing the measuring light path shutter 5, opening the reference light path shutter 8, and measuring the reflection spectrum Ref of the reference sample 10; and C: opening a measuring light path shutter 5, closing a reference light path shutter 8, and measuring a reflection spectrum Test of a sample 7 to be measured; step D: and carrying out differential operation on the light intensity data of Ref and Test in the full spectrum width range to obtain a differential reflection spectrum. The difference calculation formula is as follows:
thus, the introduction of the differential reflection type spectrum measurement system and method of the micro-region in the embodiment of the disclosure is completed.
The present invention has been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. Furthermore, the above definitions of the various elements and methods are not limited to the various specific structures, shapes or arrangements mentioned, which may be readily modified or substituted by those of ordinary skill in the art.
In conclusion, the invention can measure the differential reflection spectrum of a sample in a region of tens of micrometers. The emergent optical fiber with a smaller core diameter and the objective lens with high magnification in the invention realize the differential reflection spectrum measurement of the sample micro-area, have high transverse spatial resolution and can realize the rapid and accurate acquisition of the differential reflection signal in the full spectrum range. The setting of the reference light path effectively reduces the error of the measuring signal, and the setting of the beam splitter is convenient for adjusting the working distance and selecting the objective lenses with different multiplying powers, thereby realizing the micro-area spectral measurement.
Claims (6)
1. A micro-area spectrum measuring system comprises a light source module, a beam splitter, a measuring light path, a reference light path and a spectrum receiving module, wherein:
the light source module is used for collimating and outputting the unpolarized light beam generated by the compound color light source and illuminating the whole system, and comprises: a polychromatic light source for outputting unpolarized continuous polychromatic light; an incident optical fiber for conducting the output light of the polychromatic light source; and the collimating mirror is used for adjusting the output light of the incident optical fiber into a parallel light beam.
The beam splitter is used for splitting the output parallel light beams of the light source module into measuring light beams and reference light beams which respectively enter the measuring light path and the reference light path;
the measuring light path is used for converging the measuring light beam to the surface of the sample to be measured to form a micro-area light spot to form critical illumination, and enabling a reflected light beam reflected by the sample to be measured to return through an objective lens of the measuring light path, and the light beam enters the spectrum receiving module after passing through the beam splitter;
the reference light path is used for converging the reference light beam to the surface of a reference sample to form micro-area light spots to form critical illumination, so that a reflected light beam reflected by the reference sample returns through the objective lens of the reference light path, and the light beam enters the spectrum receiving module after passing through the beam splitter;
a spectral receiving module comprising: the transmission light beam and the reflection light beam after passing through the beam splitter are converged into the emergent optical fiber through the cylindrical mirror and enter the spectrometer, and the transmitted light beam and the reflection light beam are used for collecting the reflected light differential spectrum of the sample to be measured and the reference sample.
2. The system of claim 1, wherein the measurement optical path comprises:
the measuring light path shutter is used for controlling the on-off of the light beam in the measuring light path; and the measuring light path objective is used for realizing critical illumination and improving the transverse spatial resolution of the micro-area.
3. The system of claim 1, wherein the reference optical path comprises:
the reference light path shutter is used for controlling the on-off of the light beam in the reference light path; and the reference light path objective is used for realizing critical illumination and improving the transverse spatial resolution of the micro-area.
4. The system of claim 1, wherein the input fiber is a multimode fiber having a core diameter of 450 μm or more.
5. The system of claim 1, wherein the exit fiber is a multimode fiber having a core diameter of 50 microns.
6. The method for measuring micro-regional differential reflection spectroscopy of any one of claims 1 to 5, comprising the steps of:
step A: controlling the collimated output of the polychromatic light source through the incident optical fiber, and selecting a reference sample with the same batch of substrate and sample to be detected;
and B: closing the measuring light path shutter, opening the reference light path shutter, and measuring the reflection spectrum Ref of the reference sample;
and C: opening a measuring light path shutter, closing a reference light path shutter, and measuring a reflection spectrum Test of a sample to be measured;
step D: and carrying out differential operation on the light intensity data of Ref and Test in the full spectrum width range to obtain a differential reflection spectrum.
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| CN114235696A (en) * | 2021-12-17 | 2022-03-25 | 清华大学 | Material micro-area optical property measuring device |
| CN114966724A (en) * | 2022-07-27 | 2022-08-30 | 深圳市深视智能科技有限公司 | Distance measuring device and distance measuring method |
| CN115290186A (en) * | 2022-07-20 | 2022-11-04 | 天津大学 | Narrow-band high-resolution miniature infrared spectrometer |
| CN115753645A (en) * | 2022-11-22 | 2023-03-07 | 天津大学 | In-situ on-line spectral measurement system and method for film growth in high vacuum environment |
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Application publication date: 20210316 |