CN112497265A - Can realize robotic arm of upset - Google Patents
Can realize robotic arm of upset Download PDFInfo
- Publication number
- CN112497265A CN112497265A CN202011561726.4A CN202011561726A CN112497265A CN 112497265 A CN112497265 A CN 112497265A CN 202011561726 A CN202011561726 A CN 202011561726A CN 112497265 A CN112497265 A CN 112497265A
- Authority
- CN
- China
- Prior art keywords
- arm
- small
- belt wheel
- end effector
- belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a mechanical arm capable of realizing overturning, which comprises a body, a large arm, a small arm, an upper end effector and a lower end effector, wherein the fixed end of the large arm is rotatably arranged at one end of the body, the fixed end of the small arm is rotatably arranged at the moving end of the large arm, and the fixed ends of the upper end effector and the lower end effector are vertically superposed and rotatably arranged at the moving end of the small arm; the moving ends of the upper end effector and the lower end effector are rotatably provided with an upper finger and a lower finger; the upper finger is driven by the upper end effector to realize linear, rotary and turnover motions; the lower finger is driven by the lower end effector to realize linear and rotary motion. The invention has two end effectors which can move independently, wherein the upper end effector can be overturned, and different movement postures can be realized through the cooperative work of the motors of the driving shafts.
Description
Technical Field
The invention relates to the field of wafer transmission, in particular to a mechanical arm capable of overturning.
Background
With the continuous improvement of the semiconductor process level, the former and latter process equipment factories put higher and more complex requirements on the semiconductor automatic transmission technology.
At present, the wafer transmission motion in the industry mainly has two types: one is to maintain the wafer posture unchanged and to transmit the wafer at different heights in the horizontal plane between different stations. The other is to change the posture of the wafer and transmit the angle change between different stations.
The improvement of the wafer transmission efficiency in the industry is mainly achieved by increasing the number of end effectors of a Robot, for example, a single-arm SCARA (selective Compliance Assembly Robot arm) Robot is often equipped with more than one end effector, and a double-arm SCARA Robot is often equipped with one end effector on a lower arm and one or more end effectors on an upper arm.
In order to solve the problem of the increase of the wafer transmission range, such as the transmission of the wafer inside the EFEM (semiconductor equipment front end module) above the standard 3Port, a commonly adopted scheme of a Track shaft-matched SCARA single-arm or double-arm robot and a horizontal multi-joint robot with each joint capable of moving independently is adopted.
At present, various types of wafer carrying robots sold in the market at home and abroad, such as robots produced by companies like Brooks, Sankyo, JEL, etc., in the U.S., cannot meet the requirements in the occasions of multi-end-effector transmission, end-effector turnover, large transmission range and no walking shaft.
Disclosure of Invention
The invention aims to provide a mechanical arm capable of realizing turnover, which is provided with two end effectors capable of independently moving, wherein the upper end effector can be turned over, and different moving postures can be realized through the cooperative work of driving shaft motors.
In order to achieve the purpose, the invention adopts the following technical scheme: a mechanical arm capable of realizing overturning comprises a body, a large arm, a small arm, an upper end effector and a lower end effector, wherein the fixed end of the large arm is rotatably installed at one end of the body, the fixed end of the small arm is rotatably installed at the moving end of the large arm, and the fixed ends of the upper end effector and the lower end effector are superposed up and down and are rotatably installed at the moving end of the small arm; the moving ends of the upper end effector and the lower end effector are rotatably provided with an upper finger and a lower finger;
the upper finger is driven by the upper end effector to realize linear, rotary and turnover motions; the lower finger is driven by the lower end effector to realize linear and rotary motion.
Further, the lower end effector is connected with the first small arm large belt wheel, and the first small arm large belt wheel is connected with the first small arm small belt wheel through a synchronous belt; the first small arm belt pulley is fixedly connected with a first large arm belt pulley through a first elbow shaft, the first large arm belt pulley and the first large arm belt pulley form a transmission pair through a synchronous belt, and the first large arm belt pulley is fixedly connected to a first driving shaft; the first small arm large belt wheel is positioned at the fixed end of the large arm, the second large arm large belt wheel is positioned at the movable end of the large arm, and the first driving shaft is positioned in the body;
the first drive shaft drives the lower end effector to rotate.
Furthermore, the gear ratio of the small arm large belt wheel I to the small arm small belt wheel I is 2: 1.
Further, the upper end effector is connected with a second small arm large belt wheel, and the second small arm large belt wheel is connected with a second small arm small belt wheel through a synchronous belt; the small arm small belt pulley II is fixedly connected with a large arm small belt pulley II through a toggle shaft II, the large arm large belt pulley II and the large arm small belt pulley II form a transmission pair through a synchronous belt, and the large arm large belt pulley II is fixedly connected to a second driving shaft; the second large arm belt wheel is positioned at the fixed end of the large arm, and the second driving shaft is positioned in the body;
the second drive shaft drives the upper end effector to rotate.
Furthermore, the gear ratio of the small arm large belt wheel II to the small arm small belt wheel II is 2: 1.
Furthermore, the upper finger is fixedly connected with a second bevel gear, the first bevel gear and the second bevel gear form a gear pair, the first bevel gear is fixed on a third small-arm large belt wheel, and the first bevel gear and the third small-arm large belt wheel are provided with concentric shafts; the small arm large belt wheel tee joint is connected with a small arm small belt wheel III through a synchronous belt; the small arm small belt pulley III is fixedly connected with a large arm small belt pulley III through a toggle shaft III, the large arm large belt pulley III and the large arm small belt pulley III form a transmission pair through a synchronous belt, and the large arm large belt pulley III is fixedly connected to a third driving shaft; the small arm large belt wheel III is positioned at the moving end of the small arm, the small arm small belt wheel III is positioned at the fixed end of the small arm, the large arm small belt wheel III and the elbow shaft III are positioned at the moving end of the large arm, the large arm large belt wheel III is positioned at the fixed end of the large arm, and the third driving shaft is positioned in the body;
the third driving shaft drives the upper finger to do overturning motion.
Furthermore, the gear ratio of the small arm large belt wheel III to the small arm small belt wheel III is 2: 1.
Further, the stiff end of forearm is installed on big arm small pulley four, big arm small pulley four passes through the hold-in range with big arm big pulley four and constitutes the transmission pair, and wherein, big arm big pulley four is located the stiff end of big arm, and big arm big pulley four fixed connection fourth driving shaft, fourth driving shaft are located inside the body.
Further, the fixed end fixed connection of big arm is on the fifth drive shaft, and the fifth drive shaft is located inside the body, the big arm of fifth drive shaft drive rotates.
Further, the large arm and the small arm are equal in length.
The invention has the following beneficial effects: the invention has two end effectors which can move independently, wherein, the upper end effector can move linearly, rotate and turn; the lower end effector can move linearly and rotate; different movement postures can be realized through the cooperative work of the motors of the driving shafts; the robot has wide application range, can be used for carrying objects such as wafers and the like, and can also be used for assembling.
Drawings
FIG. 1 is a schematic structural diagram of a robot arm according to the present invention;
FIG. 2 is a schematic view of the robot arm of the present invention in an initial state;
FIG. 3 is a schematic view of the internal connection of the robot arm of the present invention;
FIG. 4 is an enlarged view of portion I of FIG. 3;
FIG. 5 is an enlarged view of section II of FIG. 3;
in the figure: 1 an upper end effector; 2 lower end effector; 3, a big arm; 4, a small arm; 5, a body; 6, a small arm and a large belt wheel I; 7, a small arm and a small belt wheel I; 8 small arm big belt wheel II; 9, a small arm and a small belt wheel II; 10 small arm big belt wheel III; 11, a small arm and a small belt wheel III; 12, a first bevel gear; 13, a second bevel gear; 14, a first elbow shaft; 15 an elbow shaft II; 16, an elbow shaft III; 17 a large arm small belt pulley I; 18 large arm and large belt wheel I; 19 large arm small belt pulley II; 20 big arm big belt wheel II; 21 large arm small belt pulley III; 22 big arm big belt wheel III; 23, a large arm and a small belt pulley IV; a 24 big arm big belt wheel IV; 25 driving the first shaft; 26 driving a second shaft; 27 driving a shaft III; 28 driving a shaft IV; shaft five is driven 29, upper finger 30, lower finger 31.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention are described in detail below with reference to the accompanying drawings.
Referring to fig. 1-5, the robot arm capable of turning over according to the present invention includes a body 5, a large arm 3, a small arm 4, an upper end effector 1 and a lower end effector 2, wherein a fixed end of the large arm 3 is rotatably mounted at one end of the body 5, a fixed end of the small arm 4 is rotatably mounted at a moving end of the large arm 3, and fixed ends of the upper end effector 1 and the lower end effector 2 are stacked up and down and rotatably mounted at a moving end of the small arm 4; the moving ends of the upper end effector 1 and the lower end effector 2 are rotatably provided with an upper finger 30 and a lower finger 31; wherein, the length of the big arm is equal to that of the small arm; the upper finger can realize linear, rotary and turnover motions; the lower finger can realize linear and rotary motion.
In the invention, a lower end effector 2 is connected with a small arm large belt wheel I6, a small arm large belt wheel I10 is connected with a small arm small belt wheel I7 through a synchronous belt, and the gear ratio of the small arm large belt wheel I to the small arm small belt wheel I is 2: 1; the small arm small belt wheel I7 is fixedly connected with a large arm small belt wheel I17 through an elbow shaft I14, a large arm large belt wheel I18 and the large arm small belt wheel I17 form a transmission pair through a synchronous belt, and the large arm large belt wheel I18 is fixedly connected to a first driving shaft 25; the first small arm large belt wheel 6 is positioned at the moving end of the small arm, the first small arm small belt wheel 7 is positioned at the fixed end of the small arm, the first large arm small belt wheel 17 and the first elbow shaft are positioned at the moving end of the large arm, the first large arm belt wheel 18 is positioned at the fixed end of the large arm, and the first driving shaft 25 is positioned in the body; the first driving shaft drives the lower end effector to rotate through the large arm large belt wheel I, the large arm small belt wheel I, the small arm small belt wheel I and the small arm large belt wheel I, the lower end effector drives the lower finger to rotate, and the rotating motion refers to that the lower end effector fixed at the small arm moving end rotates relative to the small arm moving end.
In the invention, an upper end executor is connected with a small arm large belt wheel II 8, the small arm large belt wheel II 8 is connected with a small arm small belt wheel II 9 through a synchronous belt, and the gear ratio of the small arm large belt wheel II to the small arm small belt wheel II is 2: 1; the small arm small belt pulley II 9 is fixedly connected with a large arm small belt pulley II 19 through a toggle shaft II 15, a large arm large belt pulley II 20 and the large arm small belt pulley II 19 form a transmission pair through a synchronous belt, and the large arm large belt pulley II 20 is fixedly connected to a second driving shaft 26; the second small arm large belt wheel 8 is positioned at the moving end of the small arm, the second small arm small belt wheel 9 is positioned at the fixed end of the small arm, the second large arm small belt wheel 19 and the second elbow shaft 15 are positioned at the moving end of the large arm, the second large arm belt wheel 19 is positioned at the fixed end of the large arm, and the second driving shaft 26 is positioned in the body; the second driving shaft drives the upper end effector to rotate through the large arm large belt pulley II, the large arm small belt pulley II, the small arm small belt pulley II and the small arm large belt pulley II, the upper end effector drives the upper finger to rotate, and the rotation refers to that the upper end effector fixed at the small arm moving end rotates relative to the small arm moving end.
In the invention, an upper finger is fixedly connected with a second bevel gear 13, a first bevel gear 12 and the second bevel gear 13 form a gear pair, the first bevel gear 12 is fixed on a third small-arm large belt pulley 10, and the first bevel gear 12 and a third small-arm large belt pulley 22 have concentric shafts; the small arm large belt wheel III 22 is connected with the small arm small belt wheel III 21 through a synchronous belt, and the gear ratio of the small arm large belt wheel III to the small arm small belt wheel III is 2: 1; the small arm small belt wheel III 21 is fixedly connected with the large arm small belt wheel III 21 through an elbow shaft III 16, the large arm large belt wheel III 22 and the large arm small belt wheel III 21 form a transmission pair through a synchronous belt, and the large arm large belt wheel III 22 is fixedly connected to a third driving shaft 27; the small arm large belt wheel III is positioned at the moving end of the small arm, the small arm small belt wheel III is positioned at the fixed end of the small arm, the large arm small belt wheel III and the elbow shaft III are positioned at the moving end of the large arm, the large arm large belt wheel III is positioned at the fixed end of the large arm, and the third driving shaft is positioned in the body; the third driving shaft drives the upper end effector to turn over through a large arm large belt wheel III, a large arm small belt wheel III, a small arm large belt wheel III, a bevel gear I and a bevel gear II. It is worth mentioning that the upper end effector cannot be overturned, and the upper end effector can rotate under the driving of the second driving shaft, but the overturning is directed at an upper finger, and the upper finger is overturned through the first bevel gear and the second bevel gear. Specifically, the axis of the second bevel gear can be fixedly connected with the upper finger, the third driving shaft drives the first bevel gear to rotate through the third large-arm large belt wheel, the third large-arm small belt wheel, the third small-arm small belt wheel and the third small-arm large belt wheel, the bevel gear drives the second bevel gear to rotate, the upper finger is fixed on the axis of the second bevel gear, the second bevel gear rotates to drive the upper finger to turn, and the specific turning angle can be determined according to the driving force of the third driving shaft.
In addition, the fixed end of the small arm is arranged on the large arm small belt pulley four 23, the large arm small belt pulley four 23 and the large arm large belt pulley four 24 form a transmission pair through a synchronous belt, wherein the large arm large belt pulley four 24 is positioned at the fixed end of the large arm, the large arm large belt pulley four 24 is fixedly connected with a fourth driving shaft 28, the fourth driving shaft 28 is positioned in the body, and the fourth driving shaft 28 drives the small arm to rotate. The fixed end of the large arm is fixedly connected to a fifth driving shaft 29, the fifth driving shaft 28 is positioned in the body, and the fifth driving shaft 29 drives the large arm to rotate.
In the invention, the linear motion of the upper end effector and the lower end effector means that when the fourth driving shaft and the fifth driving shaft are cooperatively driven and other driving shafts are not moved, the upper end effector and the lower end effector are driven to move radially with respect to the rotation axis of the fixed end of the large arm as a center when the large arm and the small arm are cooperatively moved, namely, the linear motion is adopted.
In summary, the moving end of the small arm in the invention comprises a first small arm large belt wheel 6, a second small arm large belt wheel 8 and a third small arm large belt wheel 41, wherein the first small arm large belt wheel 6 is connected with the lower end effector 2, the second small arm large belt wheel 8 is connected with the upper end effector 1, and the third small arm large belt wheel 10 is connected with the upper end effector 1;
the fixed end of the small arm 4 comprises a small arm small belt wheel I7, a small arm small belt wheel II 9 and a small arm small belt wheel III 11, wherein the small arm small belt wheel I7 is in transmission with the small arm large belt wheel I6 through a synchronous belt; the small arm small belt wheel II 9 is in transmission with the small arm large belt wheel II 8 through a synchronous belt; the small arm small belt wheel III 11 is in transmission with the small arm large belt wheel III 10 through a synchronous belt;
the moving end of the large arm comprises a first large arm small belt wheel 17, a second large arm small belt wheel 19, a third large arm small belt wheel 21 and a fourth large arm small belt wheel 23; a first elbow shaft 14, a second elbow shaft 15 and a third elbow shaft 16; the small arm and small belt wheel I7 is fixedly connected with a large arm and small belt wheel I17 through an elbow shaft I14; the small arm small belt wheel II 9 is fixedly connected with a large arm small belt wheel II 19 through an elbow shaft II 15; the small arm small belt wheel III 11 is fixedly connected with a large arm small belt wheel III 21 through an elbow shaft III 16; the fixed end of the small arm is rotatably arranged on the large arm small belt pulley four 23;
the fixed end of the large arm comprises a large arm large belt wheel I18, a large arm large belt wheel II 20, a large arm large belt wheel III 22 and a large arm large belt wheel IV 24, wherein the large arm large belt wheel I18 and the large arm small belt wheel I17 form a transmission pair through a synchronous belt, the large arm large belt wheel II 20 and the large arm small belt wheel II 19 form a transmission pair through the synchronous belt, the large arm large belt wheel III 22 and the large arm small belt wheel III 21 form the transmission pair through the synchronous belt, and the large arm large belt wheel IV 24 and the large arm small belt wheel IV 23 form the transmission pair through the synchronous belt;
the inside of the main body comprises a first driving shaft 25, a second driving shaft 26, a third driving shaft 27, a fourth driving shaft 28 and a fifth driving shaft 29; the first large arm belt pulley 18 is fixedly connected to a first driving shaft 25, the second large arm belt pulley 20 is fixedly connected to a second driving shaft 26, the third large arm belt pulley 22 is fixedly connected to a third driving shaft 27, the fourth large arm belt pulley 24 is fixedly connected to a fourth driving shaft 28, and the fixed end of the large arm 4 is fixedly connected to a fifth driving shaft 29;
with continued reference to fig. 1-5, the robot arm of the present invention performs the following movements:
when the mechanical arm is in an initial state, the five driving shafts rotate at the same speed and in the same direction, so that the rotation motion of the mechanical arm can be realized; at this time, as shown in fig. 2, the upper finger 30 and the lower finger 31 are overlapped, the large arm 3, the small arm 4, and the upper finger 30 form a triangle-like shape, and the upper finger and the lower finger are located approximately above the body.
When the end effector performs linear telescopic motion, the first driving shaft 25, the second driving shaft 26 and the third driving shaft 27 do not work, the fourth driving shaft 28 and the fifth driving shaft 29 reversely rotate, and meanwhile, the rotation speed of the small arm is ensured to be twice of that of the large arm; at the moment, the upper end effector and the lower end effector are still in an overlapped state, the large arm and the small arm drive the two end effectors to move, and the moving track takes the rotation axis of the fixed end of the large arm as the center and is in a straight line in the radial direction.
When the mechanical arm performs linear telescopic motion, the two fingers rotate reversely and are separated, and the upper fingers do not turn over, the fourth driving shaft and the fifth driving shaft rotate reversely, and meanwhile, the rotation speed of the small arm is two times of that of the large arm, so that the mechanical arm is ensured to perform linear telescopic motion; the first driving shaft and the second driving shaft are opposite in rotating direction, and meanwhile, the third driving shaft and the second driving shaft are kept rotating at the same speed and in the same direction, so that the two end effectors can drive the upper fingers and the lower fingers to rotate reversely and separately move, and the upper fingers are kept not to turn over.
When the end effector of the mechanical arm performs linear telescopic motion, the lower finger avoids, and the upper finger performs overturning motion, the fourth driving shaft and the fifth driving shaft rotate reversely, and meanwhile, the rotation speed of the small arm is two times of that of the large arm, so that the mechanical arm is ensured to perform linear telescopic motion; the first drive shaft is rotatory to drive end effector rotation down and makes the finger rotation dodge down, and the second drive shaft irrotational, go up end effector irrotational promptly and go up the finger irrotational, the third drive shaft is rotatory to be made and is gone up the finger upset.
The mechanical arm is not limited to an atmospheric robot and a vacuum robot, the end effector is not limited to vacuum adsorption and clamping, the driving mode of each shaft in the arm part is not limited to the coaxial mode of a body motor, and the mounting mode of the body of the robot is not limited to a base mounting mode and an upper flange mounting mode.
The present invention may be a transfer robot for transferring other transfer objects such as semiconductor wafers, or may be an industrial robot other than a transfer robot such as an assembly robot.
The above description is only a preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all equivalent structural changes made by using the contents of the specification and the drawings of the present invention should be included in the scope of the appended claims.
Claims (10)
1. The mechanical arm capable of realizing overturning is characterized by comprising a body, a large arm, a small arm, an upper end effector and a lower end effector, wherein the fixed end of the large arm is rotatably installed at one end of the body, the fixed end of the small arm is rotatably installed at the moving end of the large arm, and the fixed ends of the upper end effector and the lower end effector are superposed up and down and are rotatably installed at the moving end of the small arm; the moving ends of the upper end effector and the lower end effector are rotatably provided with an upper finger and a lower finger;
the upper finger is driven by the upper end effector to realize linear, rotary and turnover motions; the lower finger is driven by the lower end effector to realize linear and rotary motion.
2. The reversible mechanical arm as claimed in claim 1, wherein the lower end effector is connected to the first small arm large pulley, and the first small arm large pulley is connected to the first small arm small pulley through a synchronous belt; the first small arm belt pulley is fixedly connected with a first large arm belt pulley through a first elbow shaft, the first large arm belt pulley and the first large arm belt pulley form a transmission pair through a synchronous belt, and the first large arm belt pulley is fixedly connected to a first driving shaft; the first small arm large belt wheel is positioned at the fixed end of the large arm, the second large arm large belt wheel is positioned at the movable end of the large arm, and the first driving shaft is positioned in the body;
the first drive shaft drives the lower end effector to rotate.
3. The reversible mechanical arm is characterized in that the gear ratio of the small arm large belt wheel I to the small arm small belt wheel I is 2: 1.
4. The mechanical arm capable of realizing overturning of claim 1, wherein the upper end effector is connected with the second small arm large belt pulley, and the second small arm large belt pulley is connected with the second small arm small belt pulley through a synchronous belt; the small arm small belt pulley II is fixedly connected with a large arm small belt pulley II through a toggle shaft II, the large arm large belt pulley II and the large arm small belt pulley II form a transmission pair through a synchronous belt, and the large arm large belt pulley II is fixedly connected to a second driving shaft; the second large arm belt wheel is positioned at the fixed end of the large arm, and the second driving shaft is positioned in the body;
the second drive shaft drives the upper end effector to rotate.
5. The mechanical arm capable of realizing overturning of claim 4, wherein the gear ratio of the second small arm large belt wheel to the second small arm small belt wheel is 2: 1.
6. The mechanical arm capable of realizing overturning of the claim 1, wherein the upper finger is fixedly connected with a second bevel gear, the first bevel gear and the second bevel gear form a gear pair, the first bevel gear is fixed on a third large small-arm belt pulley, and the first bevel gear and the third large small-arm belt pulley have concentric shafts; the small arm large belt wheel tee joint is connected with a small arm small belt wheel III through a synchronous belt; the small arm small belt pulley III is fixedly connected with a large arm small belt pulley III through a toggle shaft III, the large arm large belt pulley III and the large arm small belt pulley III form a transmission pair through a synchronous belt, and the large arm large belt pulley III is fixedly connected to a third driving shaft; the small arm large belt wheel III is positioned at the moving end of the small arm, the small arm small belt wheel III is positioned at the fixed end of the small arm, the large arm small belt wheel III and the elbow shaft III are positioned at the moving end of the large arm, the large arm large belt wheel III is positioned at the fixed end of the large arm, and the third driving shaft is positioned in the body;
the third driving shaft drives the upper finger to do overturning motion.
7. The reversible mechanical arm as claimed in claim 6, wherein the gear ratio of the third small arm big belt wheel to the third small arm small belt wheel is 2: 1.
8. The mechanical arm capable of realizing overturning as claimed in claim 1, wherein the fixed end of the small arm is mounted on a large arm small pulley four, the large arm small pulley four and the large arm large pulley four form a transmission pair through a synchronous belt, wherein the large arm large pulley four is located at the fixed end of the large arm, the large arm large pulley four is fixedly connected with a fourth driving shaft, and the fourth driving shaft is located inside the body.
9. The reversible mechanical arm as claimed in claim 1, wherein the fixed end of the large arm is fixedly connected to a fifth driving shaft, the fifth driving shaft is located inside the body, and the fifth driving shaft drives the large arm to rotate.
10. A reversible robot arm as claimed in claim 1, wherein said large and small arms are of equal length.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011561726.4A CN112497265A (en) | 2020-12-25 | 2020-12-25 | Can realize robotic arm of upset |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011561726.4A CN112497265A (en) | 2020-12-25 | 2020-12-25 | Can realize robotic arm of upset |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112497265A true CN112497265A (en) | 2021-03-16 |
Family
ID=74922078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011561726.4A Pending CN112497265A (en) | 2020-12-25 | 2020-12-25 | Can realize robotic arm of upset |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112497265A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113352336A (en) * | 2021-06-04 | 2021-09-07 | 上海广川科技有限公司 | Rear-mounted eccentric device for wafer overturning |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528793A (en) * | 2010-12-15 | 2012-07-04 | 沈阳新松机器人自动化股份有限公司 | End effector overturnable mechanism for carrying plate-shaped workpiece |
| CN103223674A (en) * | 2012-01-26 | 2013-07-31 | 株式会社安川电机 | Conveying robot |
| CN103802099A (en) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | Manipulator mechanism |
| US20160136819A1 (en) * | 2013-08-09 | 2016-05-19 | Nidec Sankyo Corporation | Horizontal articulated robot and method for manufacturing horizontal articulated robot |
| US20160332301A1 (en) * | 2015-05-13 | 2016-11-17 | Boris Kesil | Method of handling and transporting flat objects between a plurality of flat object pocessing units at robotic station |
-
2020
- 2020-12-25 CN CN202011561726.4A patent/CN112497265A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528793A (en) * | 2010-12-15 | 2012-07-04 | 沈阳新松机器人自动化股份有限公司 | End effector overturnable mechanism for carrying plate-shaped workpiece |
| CN103223674A (en) * | 2012-01-26 | 2013-07-31 | 株式会社安川电机 | Conveying robot |
| CN103802099A (en) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | Manipulator mechanism |
| US20160136819A1 (en) * | 2013-08-09 | 2016-05-19 | Nidec Sankyo Corporation | Horizontal articulated robot and method for manufacturing horizontal articulated robot |
| US20160332301A1 (en) * | 2015-05-13 | 2016-11-17 | Boris Kesil | Method of handling and transporting flat objects between a plurality of flat object pocessing units at robotic station |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113352336A (en) * | 2021-06-04 | 2021-09-07 | 上海广川科技有限公司 | Rear-mounted eccentric device for wafer overturning |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11613002B2 (en) | Dual arm robot | |
| CN100410028C (en) | Robot mechanism able to achieve full circle rotation and four-freedom hybrid grasping/releasing | |
| CN100410029C (en) | Robot mechanism able to achieve full circle rotation and four-freedom hybrid grasping/releasing | |
| CN105026115B (en) | With the robot with the arm for not waiting interconnecting pieces length | |
| CN105459095A (en) | Three-freedom-degree series-parallel omni-directional mobile transfer robot | |
| US11691268B2 (en) | Robot having a variable transmission ratio | |
| CN102528793A (en) | End effector overturnable mechanism for carrying plate-shaped workpiece | |
| CN112635378A (en) | Wafer transmission system | |
| CN2762970Y (en) | Transferring robot | |
| CN112497265A (en) | Can realize robotic arm of upset | |
| CN218747730U (en) | Double-arm manipulator | |
| CN215149101U (en) | Wafer transmission system based on SCARA arm | |
| CN214772030U (en) | SACRA robotic arm with reversible end effector | |
| CN207104907U (en) | A kind of SCARA motion parallel connection mechanisms with rectangular workspace | |
| CN112060126A (en) | Three-degree-of-freedom wrist joint robot | |
| CN110181484A (en) | A kind of robot combined in series and parallel | |
| CN112621806B (en) | Connecting rod sliding seat compensation type linear parallel clamp self-adaptive under-actuated hand | |
| CN211916865U (en) | Both arms transport positioning robot | |
| WO2001026865A1 (en) | Horizontal articulated manipulator | |
| CN213796470U (en) | Mobile carrying manipulator | |
| CN210307893U (en) | Four-axis industrial robot | |
| CN106695766B (en) | Six-degree-of-freedom parallel device based on grabbing parallel mechanism | |
| CN108818580B (en) | Coaxial connecting rod gear sliding shaft type linear parallel clamping self-adaptive finger device | |
| CN220807384U (en) | Atmospheric pressure wafer conveying manipulator based on parallel mechanism | |
| US11241800B2 (en) | Asymmetric dual end effector robot arm |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210316 |